CN109471157A - A high-sensitivity infrasound sensor - Google Patents
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Abstract
本发明公开了一种高灵敏度次声传感器，包括：次声接收装置和膜振动光纤测量装置两个部分。其中，次声接收装置包括：前腔和后腔；其中，前腔顶面设置有进气口，前腔与后腔之间设有第一开口和第二开口，第一开口处设置有均压管，均压管使前腔与后腔连通，第二开口处设置有膜片，所诉后腔内位于第二开口处设有固定装置。膜振动光纤测量装置包括：光纤、耦合器、光探测器和单色光源，光纤一端通过固定装置固定，且端面与膜片平行，光纤另一端从后腔底面穿出并连接耦合器。运用光学测量膜片的振动信息，突出光学干涉测量位移的高灵敏度，可以测量到膜片纳米级的振动，能够实现次声传感器的高灵敏度。
The invention discloses a high-sensitivity infrasound sensor, which comprises two parts: an infrasound receiving device and a membrane vibration optical fiber measuring device. The infrasound receiving device includes: a front cavity and a rear cavity; wherein, an air inlet is arranged on the top surface of the front cavity, a first opening and a second opening are arranged between the front cavity and the rear cavity, and the first opening is provided with an air inlet. The pressure equalizing pipe connects the front cavity with the rear cavity, a diaphragm is arranged at the second opening, and a fixing device is arranged in the rear cavity at the second opening. The membrane vibration optical fiber measurement device includes: an optical fiber, a coupler, a photodetector and a monochromatic light source. One end of the optical fiber is fixed by a fixing device, and the end face is parallel to the diaphragm, and the other end of the optical fiber passes through the bottom surface of the rear cavity and is connected to the coupler. Using the vibration information of the optical measurement diaphragm to highlight the high sensitivity of the optical interference measurement displacement, the nano-scale vibration of the diaphragm can be measured, and the high sensitivity of the infrasound sensor can be realized.
Description
技术领域technical field
本发明涉及高空大气环境以及行星表面等低气压环境探测领域，尤其涉及一种高灵敏度次声传感器。The invention relates to the field of detection of high-altitude atmospheric environments and low-pressure environments such as planetary surfaces, in particular to a high-sensitivity infrasound sensor.
背景技术Background technique
深空探测尤其是对太阳系其他行星及其卫星的探测已经成为未来航天计划的重要组成部分。相比月球的寂静，一些行星及其卫星表面因为具有稀薄/浓密的大气层是有声世界，存在利用声音记录和探测这些神秘星球的可能。火星表面大气成分为二氧化碳,气压为1000Pa左右，属于低气压环境。地球表面20公里高空被称为邻近空间，其气压在1000Pa左右，也是一个低气压环境。地面、高空和行星表面的各种自然或人为事件很多都会产生次声的振动，例如：火山、飓风、地震和核爆等，因此对该空间的声信息研究也是一个热点。Deep space exploration, especially the detection of other planets in the solar system and their moons, has become an important part of the future space program. Compared with the silence of the moon, some planets and their moons have a thin/dense atmosphere on the surface of the sound world, and it is possible to record and detect these mysterious planets with sound. The atmospheric composition on the surface of Mars is carbon dioxide, and the pressure is about 1000Pa, which belongs to a low pressure environment. The altitude of 20 kilometers above the earth's surface is called adjacent space, and its pressure is about 1000Pa, which is also a low pressure environment. Many natural or man-made events on the ground, high-altitude and planetary surfaces will produce infrasound vibrations, such as volcanoes, hurricanes, earthquakes and nuclear explosions, so the study of acoustic information in this space is also a hotspot.
低气压环境中气体的密度较常压下低很多，因此在同样质点振动幅度的情况下，产生的声压强度也很低。而目前所有的声波探测都是通过感应声压来实现的，因此在低气压环境中的声波探测器需要很高灵敏度，次声信号的探测也是如此。The density of gas in a low-pressure environment is much lower than that under normal pressure, so the sound pressure intensity generated is also very low under the same particle vibration amplitude. However, all current sound wave detection is realized by sensing sound pressure, so the sound wave detector in the low pressure environment needs high sensitivity, and the detection of the infrasound signal is also the same.
目前的次声探测器主要是电容次声探测器。振动膜片和固定极板形成电容，当次声引起膜片振动时，导致电容发生变化，通过测量这个电容的变化得到膜片的振动信息。这种电容式次声探测器采用的测量膜片振动方式存在灵敏度低，膜片振动幅度和电容变化线形度低等问题，在低气压环境中这些问题尤其严重，因此不能满足在低气压环境中应用，需要一种高灵敏度的膜片振动测量方式来测量低气压环境中的次声信号。The current infrasound detectors are mainly capacitive infrasound detectors. The vibrating diaphragm and the fixed plate form a capacitor. When the infrasound causes the diaphragm to vibrate, the capacitance changes, and the vibration information of the diaphragm is obtained by measuring the change of the capacitance. The diaphragm vibration measurement method adopted by this capacitive infrasound detector has problems such as low sensitivity, low diaphragm vibration amplitude and low linearity of capacitance change. These problems are especially serious in a low pressure environment, so it cannot meet the requirements of low pressure environment. application, a high-sensitivity diaphragm vibration measurement method is required to measure the infrasound signal in a low-pressure environment.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种适用与低气压环境中次声探测的高灵敏度次声探测器，促进高空大气、行星表面等低气压环境中次声信号的探测。The purpose of the present invention is to provide a high-sensitivity infrasound detector suitable for infrasound detection in a low-pressure environment, so as to facilitate the detection of infrasound signals in low-pressure environments such as high-altitude atmosphere and planetary surfaces.
为达到上述目的，本发明公开了一种高灵敏度次声传感器，包括：次声接收装置和膜振动光纤测量装置两个部分。其中，In order to achieve the above object, the present invention discloses a high-sensitivity infrasound sensor, which includes two parts: an infrasound receiving device and a membrane vibration optical fiber measuring device. in,
次声接收装置包括：前腔和后腔；其中，前腔顶面设置有进气口，前腔与后腔之间设有第一开口和第二开口，第一开口处设置有均压管，均压管使前腔与后腔连通，第二开口处设置有膜片，所诉后腔内位于第二开口处设有固定装置。The infrasound receiving device includes: a front cavity and a rear cavity; wherein, an air inlet is arranged on the top surface of the front cavity, a first opening and a second opening are arranged between the front cavity and the rear cavity, and a pressure equalizing pipe is arranged at the first opening , the pressure equalizing pipe communicates the front cavity with the rear cavity, a diaphragm is arranged at the second opening, and a fixing device is arranged in the rear cavity at the second opening.
膜振动光纤测量装置包括：光纤、耦合器、光探测器和单色光源，光纤一端通过固定装置固定，且端面与膜片平行，光纤另一端从后腔底面穿出并连接耦合器。The membrane vibration optical fiber measurement device includes: an optical fiber, a coupler, a photodetector and a monochromatic light source. One end of the optical fiber is fixed by a fixing device, and the end face is parallel to the diaphragm. The other end of the optical fiber passes through the bottom surface of the back cavity and is connected to the coupler.
优选地，膜片采用对光具有反射能力的材料，用于将光纤导入的入射光进行反射，由于次声信号引起膜片的振动，进而改变反射光的光程，反射光与入射光在光纤内形成干涉光。Preferably, the diaphragm is made of a material that has the ability to reflect light, which is used to reflect the incident light introduced by the optical fiber. Due to the vibration of the diaphragm caused by the infrasound signal, the optical path of the reflected light is changed. Interfering light is formed inside.
优选地，设置不同的后腔的容积和/或均压管的长度和直径，用于测量不同频率范围的次声。Preferably, different volumes of the back cavity and/or lengths and diameters of the pressure equalizing pipes are provided for measuring infrasounds in different frequency ranges.
本发明的优点在于：运用光学干涉腔测量振动膜片的振动信息，突出光学干涉测量位移的高灵敏度，可以测量到膜片纳米级的振动，能够实现次声传感器的高灵敏度。The advantages of the present invention lie in that the optical interference cavity is used to measure the vibration information of the vibrating diaphragm, the high sensitivity of the optical interference measurement displacement is highlighted, the nano-scale vibration of the diaphragm can be measured, and the high sensitivity of the infrasound sensor can be realized.
附图说明Description of drawings
为了更清楚说明本发明实施例的技术方案，下面将对实施例描述中所需使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the drawings used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.
图1为本发明实施例的一种高灵敏度次声传感器结构图。FIG. 1 is a structural diagram of a high-sensitivity infrasound sensor according to an embodiment of the present invention.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
图1为本发明实施例的一种高灵敏度次声传感器结构图，如图1所示。包括：次声接收装置和膜振动光纤测量装置两个部分。其中，FIG. 1 is a structural diagram of a high-sensitivity infrasound sensor according to an embodiment of the present invention, as shown in FIG. 1 . It includes two parts: infrasound receiving device and membrane vibration optical fiber measuring device. in,
次声接收装置包括：前腔1和后腔2。其中，前腔1顶面设置有进气口3，前腔1与后腔2之间设有第一开口和第二开口，第一开口处设置有均压管4，均压管4使前腔1与后腔2连通，第二开口处设置有膜片5，所诉后腔2内位于第二开口处设有固定装置6。The infrasound receiving device includes: a front cavity 1 and a rear cavity 2 . Among them, the top surface of the front cavity 1 is provided with an air inlet 3, a first opening and a second opening are provided between the front cavity 1 and the rear cavity 2, and a pressure equalizing pipe 4 is arranged at the first opening, and the pressure equalizing pipe 4 makes the front The cavity 1 is communicated with the rear cavity 2, a diaphragm 5 is arranged at the second opening, and a fixing device 6 is arranged in the rear cavity 2 at the second opening.
膜振动光纤测量装置包括：光纤7、耦合器8、光探测器9和单色光源10，光纤7一端通过固定装置6固定，且端面与膜片5平行，光纤7另一端从后腔3底面穿出并连接耦合器8。The membrane vibration optical fiber measurement device includes: an optical fiber 7, a coupler 8, a photodetector 9 and a monochromatic light source 10. One end of the optical fiber 7 is fixed by the fixing device 6, and the end face is parallel to the diaphragm 5, and the other end of the optical fiber 7 is from the bottom surface of the back cavity 3. Thread out and connect coupler 8.
设置不同的后腔2的容积和/或均压管4的长度和直径，用于测量不同频率范围的次声。Different volumes of the back cavity 2 and/or lengths and diameters of the pressure equalizing pipes 4 are set for measuring infrasound in different frequency ranges.
次声信号经进气口3进入前腔1，均压管4可以保持前腔1和后腔2静压均匀，同时使次声压力进入后腔2。前腔1和后腔2的次声压力差作用膜片5使之随次声信号振动。同时，单色光源10发出的光经过光纤7端面入射到膜片5上，膜片5振动使膜片5到光纤7端面的距离发生变化，进而改变反射光的光程，使膜片5的反射光与入射光形成一定相位差，反射光与入射光在光纤7内形成干涉光，其干涉后光强度会随着相位的变化呈现变化。测量干涉信号强度变化的频率和幅度就可以得出膜片5的振动频率和幅度。The infrasound signal enters the front cavity 1 through the air inlet 3, and the pressure equalizing pipe 4 can keep the static pressure of the front cavity 1 and the rear cavity 2 uniform, and at the same time make the infrasound pressure enter the rear cavity 2. The infrasound pressure difference between the front cavity 1 and the rear cavity 2 acts on the diaphragm 5 to vibrate with the infrasound signal. At the same time, the light emitted by the monochromatic light source 10 is incident on the diaphragm 5 through the end face of the optical fiber 7, and the diaphragm 5 vibrates to change the distance between the diaphragm 5 and the end face of the optical fiber 7, thereby changing the optical path of the reflected light, making the diaphragm 5 The reflected light and the incident light form a certain phase difference, and the reflected light and the incident light form interference light in the optical fiber 7, and the light intensity after the interference changes with the change of the phase. The frequency and amplitude of vibration of the diaphragm 5 can be obtained by measuring the frequency and amplitude of the change in the intensity of the interference signal.
在一个具体实施例中，将传感器设置在高空低气压的环境中进行次声接收。In a specific embodiment, the sensor is positioned in an environment of high altitude and low pressure for infrasound reception.
如图1所示。包括：次声接收装置和膜振动光纤测量装置两个部分。其中，As shown in Figure 1. It includes two parts: infrasound receiving device and membrane vibration optical fiber measuring device. in,
次声接收装置采用硬铝加工而成，包括：前腔1和后腔2。其中，前腔1容积为60mL，后腔2容积为350mL。进气口3为长度5cm，直径3mm的硅胶管。均压管4为长度8cm，直径2mm的硅胶管。The infrasound receiving device is made of hard aluminum, including: front cavity 1 and rear cavity 2. Among them, the volume of the front cavity 1 is 60mL, and the volume of the rear cavity 2 is 350mL. The air inlet 3 is a silicone tube with a length of 5cm and a diameter of 3mm. The pressure equalizing tube 4 is a silicone tube with a length of 8 cm and a diameter of 2 mm.
单色光源10的中心波长为1550nm，光纤7的端面和膜片5平行，且光反射率同为R＝4％，进而得到干涉光光强为 其中，R为反射率，d为膜片5和光纤7端面的间距，λ0单色光源10的中心波长，为I0为入射光光强。膜片5因为振动引起间距d发生变化，进而改变干涉光光强。The central wavelength of the monochromatic light source 10 is 1550 nm, the end face of the optical fiber 7 is parallel to the diaphragm 5, and the light reflectivity is both R=4%, and then the light intensity of the interference light is obtained as Among them, R is the reflectivity, d is the distance between the diaphragm 5 and the end face of the optical fiber 7, λ 0 is the central wavelength of the monochromatic light source 10, and I 0 is the incident light intensity. The diaphragm 5 changes the spacing d due to vibration, thereby changing the intensity of the interference light.
通过光谱仪采集传感器返回的信号强度，得到干涉光光强，从而得到膜片5振动的幅度，干涉光强变化的频率即为膜片5振动的频率，即为接收到的次声信号的频率。The signal intensity returned by the sensor is collected by the spectrometer to obtain the light intensity of the interference light, thereby obtaining the amplitude of the vibration of the diaphragm 5. The frequency of the change of the interference light intensity is the frequency of the vibration of the diaphragm 5, that is, the frequency of the received infrasound signal.
本发明提供了一种高灵敏度次声传感器，运用光学测量振动膜片的振动信息，突出光学干涉测量位移的高灵敏度，可以测量到膜片纳米级的振动，能够实现次声传感器的高灵敏度。The invention provides a high-sensitivity infrasound sensor, which uses optical measurement of the vibration information of the vibrating diaphragm, highlights the high sensitivity of optical interference measurement of displacement, can measure the nano-scale vibration of the diaphragm, and can realize the high sensitivity of the infrasound sensor.
地球表面10KM以上的高空大气是气压为1000Pa的低气压环境，非常不利于声波的传播，所能得到的次声信号极其微弱，地面用的次声传感器不适合在低气压环境中应用，需要适用于低气压环境的高灵敏度探测器。本专利涉及的高灵敏度次声传感器可以搭载高空气球在临近空间接收各种次声信号。The high-altitude atmosphere above 10KM above the earth's surface is a low-pressure environment with a pressure of 1000Pa, which is very unfavorable for the propagation of sound waves, and the infrasound signal that can be obtained is extremely weak. High-sensitivity detectors in low-pressure environments. The high-sensitivity infrasound sensor involved in this patent can carry a high-altitude balloon to receive various infrasound signals in a nearby space.
以上的具体实施方式，对本发明的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上仅为本发明的具体实施方式而已，并不用于限定本发明的保护范围，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The above specific embodiments further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Within the spirit and principle of the present invention, any modifications, equivalent replacements, improvements, etc. made should be included within the protection scope of the present invention.
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