CN109459816A - Chip occurs for silicon-based optical random waveform - Google Patents

Chip occurs for silicon-based optical random waveform Download PDF

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Publication number
CN109459816A
CN109459816A CN201811188615.6A CN201811188615A CN109459816A CN 109459816 A CN109459816 A CN 109459816A CN 201811188615 A CN201811188615 A CN 201811188615A CN 109459816 A CN109459816 A CN 109459816A
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optical
phase
module
amplitude
silicon
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CN109459816B (en
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周林杰
刘源彬
陆梁军
陈建平
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/50Transmitters
    • H04B10/501Structural aspects
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/50Transmitters
    • H04B10/516Details of coding or modulation
    • H04B10/5161Combination of different modulation schemes

Abstract

A kind of silicon-based optical random waveform generation chip, array module is adjusted including optical frequency com generation module, filter module and amplitude-phase, optical frequency com generation module is made of adjustable micro-ring resonator, by cascading Mach, once moral interferometer is constituted filter module, and amplitude-phase adjusts array module and is made of feedback-type array waveguide grating, adjustable optical attenuator and phase shifter.The generation of random waveform in optimal frequency domain can be achieved in the present invention, has the characteristics that size is small, loss is low, stability is high, can play key effect in optical communication network and system.

Description

Chip occurs for silicon-based optical random waveform
Technical field
The invention belongs to optical communication field, chip occurs for especially a kind of silicon-based optical random waveform.
Background technique
With the swift and violent increase of the business such as modern communication networks, computer network, data volume is in explosive growth, and people are to bandwidth There is higher requirement.In order to meet the growing demand to information capacity, optical communication network will be still next generation network Core.Due to being continuously increased for optical communication capability, next-generation all-optical network proposes higher to active device, especially light source Requirement.Ultra-short pulse source be research topic most active in current laser technology and high speed optical communication application field it One, there is huge application prospect.In practical applications, we not only need to generate the higher ultrashort light pulse of quality, and It is also desirable that the shape of pulse can be adjusted.Therefore, optics random waveform generation technique cause the great interest of people and Concern.
Optics random waveform is to be based on Fourier's composition principle, by controlling the amplitude and phase of light pulse spectral line, Realize a kind of technology that random waveform generates in optical frequency range.This technology is in the generation of optics ultra-broadband signal, multichannel Wireless communication, large capacity optical transport, the dispersion compensation of optic communication, the test of optical communication system and the side such as laser acquisition and measurement Face has played key effect.
Optics random waveform occurs mainly to include time history synthesis method and frequency spectrum operating method.It is practical due to lacking at present Optical time delay unit part, therefore generate the time history synthesis method of light pulse using multiple delay lines and be of little use.Appoint in traditional optics It anticipates in waveform generation technique, most of frequency-domain operations method all uses body grating, array waveguide grating and fiber bragg grating Equal devices introduce dispersion, and with spatial light modulator or electrooptic modulator collective effect.The essence of this kind of scheme is exactly pair The amplitude and phase of each individual frequency component of signal spectrum are controlled, and obtain any wave of required optics by Spectrum synthesizing Shape.This needs optical frequency com to provide the frequency component of signal spectrum, then using pulse shaper to each in spectrum The amplitude and phase of spectral line carry out independent control, to realize shaping pulse, generate random waveform.
Later, with the appearance of mode-locked laser, the phase control of the stability of spectral line in spectral measurement and optical envelope Serve in system critical.Mode-locked laser can produce periodical ultrashort pulse sequence, these ultrashort pulse sequences exist A series of continuous spectral lines, i.e. optical frequency com are shown as in frequency domain.Research in recent years also found, be connected using microresonator The non-linear process of continuous wave parameter oscillation also can produce optical frequency com, and due to microresonator have integrated level height and The advantages that Frequency point alignment is good, in recent years by more concern.Nevertheless, optics random waveform generating system is in speed at present There are still many technical matters for degree, power consumption, degree of integration etc., and researcher is waited to go to capture.
Summary of the invention
In view of the above shortcomings of the prior art, the present invention provides a kind of silicon-based optical random waveform generation chip, the chip Have the characteristics that loss is low, stability is good, small in size and integrated level is high, crucial work can be played in optical communication system and network With with very high application value.
To achieve the goals above, technical solution of the invention is as follows:
Chip occurs for a kind of silicon-based optical random waveform, it is characterized in that, the chip include optical frequency com generation module, Filter module and amplitude-phase adjust array module, and the optical frequency com generation module includes an adjustable micro-loop of silicon nitride Resonator, the filter module includes one by the cascading Mach broadband rectangular filter that once moral interferometer is constituted, described It includes feedback-type array waveguide grating and N group adjustable optical attenuator (VOA) and phase shifter (PS) that amplitude-phase, which adjusts array module, The wherein positive integer that N is 1 or more.
The adjustable micro-loop filter of the optical frequency com generation module is made based on silicon nitride material, benefit Optical frequency com is generated with the non-linear Kerr effect of silicon nitride, and according to the thermo-optic effect of silicon nitride material, passes through hot light Modulate the tuning to realize optical frequency com wavelength.
The filter module uses the broadband rectangular filter based on cascading Mach once moral structure, and the filter is from optics N number of wavelength is selected to frequency comb equal intervals, the positive integer that wherein N is 1 or more.
It includes feedback-type array waveguide grating and N group adjustable optical attenuator and shifting that the amplitude-phase, which adjusts array module, Phase device, wherein feedback-type array waveguide grating is both multi-wavelength separator and multi-wavelength multiplex device.Each group of variable optical attenuation Device and a phase shifter delay of feedback line corresponding with feedback-type array waveguide grating are connected, for realizing N number of different wavelengths of light The adjusting of signal amplitude and phase.
The optical signal input/output of the optical frequency com generation module, amplitude-phase adjusting array module uses water Flat coupling or vertical coupled mode realize the connection between external signal and planar optical waveguide.The horizontal coupling uses lens It is realized with the back taper spot-size converter on chip, the vertical coupled grating coupler using on plane optical fiber and chip It realizes.
Compared with prior art, the beneficial effects are mainly reflected as follows:
1, device corresponding to all different function modules of the present invention can integrate respectively on one chip, chip size It is small, integrated level is high, low in energy consumption, stability is high, compatible with CMOS technology, advantageously reduce cost, be mass produced.
2, using cascading Mach, once moral structure constitutes broadband rectangular filter to the present invention, realizes filter function.Structure tool Have with roomy, passband is flat, the low advantage of loss.
3, the present invention constitutes amplitude-phase using feedback-type array waveguide grating, adjustable optical attenuator and phase shifter and adjusts battle array Column module, in the module, the optical signal of different wave length respectively corresponds one group of adjustable optical attenuator and phase shifter, to realize difference The independent control of wavelength channels amplitude and phase.In addition, feedback-type array waveguide grating simultaneously be used as multi-wavelength separator and Multi-wavelength multiplex device eliminates during wavelength separated due to wavelength shift bring error.
Detailed description of the invention
Fig. 1 is the whole schematic illustration that chip occurs for silicon-based optical random waveform of the present invention.
Fig. 2 is the structure for the broadband rectangular filter that chip occurs for silicon-based optical random waveform of the present invention.
Fig. 3 is the structural representation for each submodule of broadband rectangular filter that chip occurs for silicon-based optical random waveform of the present invention Figure.
Fig. 4 is the structural representation for the amplitude-phase adjusting array module that chip occurs for silicon-based optical random waveform of the present invention Figure.
Specific embodiment
In order to further elucidate the purpose, technical solution and Core Superiority of this programme, below in conjunction with attached drawing, the present invention is made Further details of explanation.The present embodiment is to give detailed implementation the technical scheme is that premise is implemented Mode and operating process, but protection scope of the present invention is not limited to following embodiments.
Fig. 1 is the whole schematic illustration that chip occurs for silicon-based optical random waveform of the present invention.As shown in Figure 1, of the invention Silicon-based optical random waveform occurs chip and is divided into three parts: optical frequency com generation module 101, filtering mould according to functional characteristics Block 102 and amplitude-phase adjust array module 103.
The optical signal of single-frequency is inputted from silicon nitride waveguides, is first passed around by the adjustable micro-ring resonator of silicon nitride and straight wave Lead the optical frequency com generation module 101 of composition.After the optical signal of single-frequency passes through micro-ring resonator, work as input optical power When higher than non-linear Kerr effect threshold power, a series of resonance peaks with certain wavelength interval will be generated in output end, That is optical frequency com.At this point, it should be noted that meeting the optical frequency com of condition in order to obtain, it is desirable that micro-ring resonator has Very high Q value, this suffers from very high requirement to loss control, the coupling line space design etc. of micro-loop.It is generated in optical frequency com In the process, using the thermo-optic effect of silicon nitride material, by adjusting institute's making alive of micro-heater in silicon nitride waveguides, Ke Yigai Become the effective refractive index of silicon nitride waveguides, to change the resonance wavelength of micro-ring resonator, realizes the tune of optical frequency com wavelength Section.
Then, enter filter module 102 by the optical frequency com that micro-ring resonator generates to be filtered.In this mould In block, it will be selected from optical frequency com by the broadband rectangular filter that the cascade of Mach-Zahnder interference device is constituted equally spaced N number of Wavelength, and the optical signal of this N number of wavelength is exported, the input signal as next module.Herein, in order to accurately select N The optical frequency com of a wavelength, and influence of the filtering to optical signal is minimized, filter needs to have flat lead to Band, sufficiently wide bandwidth and insertion loss small as far as possible are obtained enough by adjusting the arm length difference of Mach-Zahnder interference device Wide pass band width.The arm length difference of two-arm is smaller, and obtained bandwidth is bigger.
Then, amplitude-phase is entered by the optical signal containing N number of wavelength that filter module is selected and adjusts array module 103, And it initially enters array waveguide grating and carries out first time transmission.Later, the optical signal of different wave length will be divided into the road N, each Mono- group of adjustable optical attenuator of Lu Douyu is connected with phase shifter.The amplitude of the adjustable optical signal of adjustable optical attenuator, phase shifter can To adjust the phase of optical signal.By adjusting institute's making alive of every group of adjustable optical attenuator and phase shifter, may be implemented to each Road optical signal magnitude and phase it is separately adjustable, so that the optical signal of different wave length is respectively reached state required for our.It is different The optical signal of wavelength, which passes through adjustable optical attenuator and phase shifter and then once enters in array waveguide grating, to be transmitted, and most Signal all the way is synthesized eventually, is exported from the output end of the module, is obtained amplitude, the phase optical frequency com through overregulating.Most It is observed again by photodetector and oscillograph afterwards, realizes that optics random waveform occurs.
Amplitude-frequency response figure above device architecture shown in Fig. 1 can more intuitively reflect the function of each module.Firstly, The single-frequency optical signals that wavelength is λ 0 are inputted from input terminal, become have multiple wavelength by optical frequency com generation module 101 Optical frequency com.Later, filter module 102 selects N number of wavelength from optical frequency com, and is entered into amplitude-phase adjusting Array module 103.It is adjusted in array module 103 in amplitude-phase, the amplitude and phase of the optical signal of different wave length can obtain solely Vertical adjusting, and then realize the generation of optics random waveform.
On the basis of the above description, filter module 102 uses Fig. 2 and structure shown in Fig. 3.In this configuration, have three The different filtering submodule of class, respectively 102_1,102_2 and 102_3, these three types of submodules constitute the filter of binary tree structure Structure, it is specific as shown in Figure 2.Entire filter module 102 shares 8 output ends, we are used as 102 modules from wherein optional one Output.The effect of different type submodule is different, and specific structure is also different.Fig. 3 illustrates different type submodule Specific structure.Assuming that share 8 in frequency comb caused by optical frequency com generation module × N number of wavelength.It is filtered as the first order The effect of marble module 102_1 is to halve the optical frequency com number of wavelengths of input, i.e. first order filtering submodule 102_1's Be respectively per output all the way containing 4 × optical frequency com of N number of wavelength.Later, the second level filters submodule 102_2 for the first order The quantity of optical frequency com medium wavelength of filtering submodule 102_1 output halves, become 2 × it is N number of.Then, third level filtering Optical frequency com number of wavelengths of the module 102_3 again by second level filtering submodule 102_2 output halves, and becomes N number of, and final Output, wherein N is positive integer.The specific structure is shown in FIG. 3 for variant submodule, and the first order filters submodule 102_1 by 3 Unequal arm MZI is cascaded, filter curve passband is flat, smaller and stopband is spaced between passband to the inhibition of signal compared with By force, therefore as the first order submodule is filtered;Second level filtering submodule 102_2 is cascaded by 2 unequal arm MZI, is filtered Wave profile passband interval will be twice with respect to first order filtering submodule 102_1, passband still relatively flat, be used as the second level and filtered Submodule;It only includes 1 unequal arm MZI that the third level, which filters submodule 102_3,.Optical frequency com passes through preceding two stage filter submodule Processing after, the interval between wavelength becomes relatively large, is the third of periodic triangular function with filter curve shape Grade filters submodule 102_3 to filter, and enough separates the optical signal of adjacent wavelength.In order to make the output of filter module 102 N number of wavelength can be accommodated, we require filter module 102 to have sufficiently wide pass band width.This can be by adjusting Mach Zeng Degan The arm length difference of device is related to realize, the arm length difference of two-arm is smaller, and obtained bandwidth is bigger.
On the basis of the above description, amplitude-phase adjusts array module 103 and uses specific structure shown in Fig. 4, described Amplitude-phase adjust array module 103 include a feedback-type array waveguide grating, N group adjustable optical attenuator VOA and phase shift Device PS, wherein dotted box portion is feedback-type array waveguide grating, and the optical frequency com containing N number of wavelength enters the amplitude After phased array module 103, transmitted in array waveguide grating first.Later, the optical signal of different wave length is divided into N Road, per being all connected all the way with one group of adjustable optical attenuator VOA and phase shifter PS, to the amplitude and phase of different wave length optical signal into Row is separately adjustable.Pass through adjustable optical attenuator and phase shifter in optical signal and then once enter in the array waveguide grating and passes It is defeated, and be finally synthesizing and exported for signal all the way, each wavelength points amplitude, the phase optical frequency com through overregulating are obtained, it is real The generation of existing optics random waveform.For Fig. 4, optical frequency com enters in array waveguide grating from the input terminal of left first Transmission.When optical signal reaches the 2nd planar waveguide from the 1st planar waveguide for the first time, the optical signal of different wave length will enter It is transmitted in different delay of feedback lines, is all connected with one group of adjustable optical attenuator and phase shifter per delay of feedback line all the way, For individually adjusting the amplitude and phase per optical signal all the way.It is finished in the amplitude and phase adjusting of different wave length optical signal Afterwards, the road N optical signal, which is again gone into array waveguide grating, transmits, and reaches the 2nd from the 1st planar waveguide at second and put down It is combined into light all the way when board waveguide, is exported from output end.
It may be implemented to appoint in optimal frequency domain in conclusion chip occurs for the silicon-based optical random waveform realized according to the present invention The generation of meaning waveform, has the characteristics that size is small, integrated level is high, loss is low, stability is good, can be in optical communication network and system Play key effect.
It finally it should be noted that the above is only a preferred embodiment of the present invention, is not intended to limit the invention, ability The those of ordinary skill in domain should understand that.It is done within the spirit and principles of the present invention it is any modification, equivalent replacement or Improve etc., it should be included within the scope of the present invention.

Claims (5)

1. chip occurs for a kind of silicon-based optical random waveform, which is characterized in that the chip includes that integrated optical frequency com generates Module (101), filter module (102) and amplitude-phase adjust array module (103), the optical frequency com generation module It (101) include an input waveguide, a silicon nitride thermo-optic tunable micro-ring resonator and an output waveguide, the filtering mould Block (102) cascades the broadband rectangular filter constituted by Mach-Zahnder interference device (MZI), successively includes the first filtering submodule (102_1), the second filtering submodule (102_2) and third filtering submodule (102_3), the amplitude-phase adjust array mould Block (103) includes feedback-type array waveguide grating, N group adjustable optical attenuator (VOA) and phase shifter (PS), and wherein N is 1 or more Positive integer, simple signal light enter the silicon nitride thermo-optic tunable micro-ring resonator through the input waveguide and generate optics frequency Rate comb, the optical frequency com enter the filter module (102) through the output waveguide, successively through first filtering Submodule (102_1), the second filtering submodule (102_2) and third filter submodule (102_3) from the optical frequency com The middle N number of wavelength of selection, which enters the amplitude-phase and adjusts array module (103), first in array waveguide grating Middle transmission, later, the optical signal of different wave length are divided into the road N, per (i) all the way all with one group of adjustable optical attenuator (VOAi) and move Phase device (PSi) be connected, it is separately adjustable to the amplitude and phase progress of different wave length optical signal, pass through variable optical attenuation in optical signal Device and phase shifter and then once enter the array waveguide grating in transmit, be finally synthesizing for signal all the way output, obtain each The amplitude of wavelength, the phase optical frequency com through overregulating realize the output of optics random waveform.
2. chip occurs for silicon-based optical random waveform according to claim 1, which is characterized in that the optical frequency com produces The thermo-optic tunable micro-ring resonator of raw module (101) is made based on silicon nitride material.
3. chip occurs for silicon-based optical random waveform according to claim 1, which is characterized in that the filter module 102 have sufficiently wide pass band width, are realized by adjusting the arm length difference of Mach-Zahnder interference device, the arm length difference of two-arm is got over Small, obtained bandwidth is bigger.
4. chip occurs for silicon-based optical random waveform according to claim 1, which is characterized in that the amplitude-phase is adjusted The feedback-type array waveguide grating of array module (103) can play the role of partial wave and play the role of multiplex, and each group adjustable Optical attenuator and a phase shifter delay of feedback line corresponding with feedback-type array waveguide grating are connected, for realizing N number of difference The adjusting of wavelength channels amplitude and phase.
5. chip occurs for silicon-based optical random waveform according to claim 1, which is characterized in that the optical frequency com Generation module (101), amplitude-phase adjust the optical signal input/output of array module (103) using horizontal coupling or vertical coupling Conjunction mode realizes the connection between external signal and planar optical waveguide.The horizontal coupling is using the back taper on lens and chip Shape spot-size converter realizes that the vertical coupled grating coupler using on plane optical fiber and chip is realized.
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CN110720052A (en) * 2019-07-19 2020-01-21 深圳市速腾聚创科技有限公司 Phased array transmitting device, laser radar and automatic driving equipment
CN111313970A (en) * 2020-02-24 2020-06-19 中国科学院半导体研究所 Arbitrary waveform generating device of integrated chip
CN113093329A (en) * 2021-04-06 2021-07-09 联合微电子中心有限责任公司 Array waveguide grating and calibration system and calibration method thereof
CN114089475A (en) * 2022-01-11 2022-02-25 之江实验室 Quasi-distributed fiber Bragg grating demodulation chip and bearing equipment
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CN110277724A (en) * 2019-06-25 2019-09-24 中国人民解放军军事科学院国防科技创新研究院 A kind of adjustable high repetition frequency single-chamber bicoherence optical frequency com light source
CN110277724B (en) * 2019-06-25 2021-01-08 中国人民解放军军事科学院国防科技创新研究院 Adjustable high-repetition-frequency single-cavity double-phase-dry optical frequency comb light source
CN110720052A (en) * 2019-07-19 2020-01-21 深圳市速腾聚创科技有限公司 Phased array transmitting device, laser radar and automatic driving equipment
WO2021012084A1 (en) * 2019-07-19 2021-01-28 深圳市速腾聚创科技有限公司 Phased array transmitting apparatus, laser radar and automatic driving device
CN111313970A (en) * 2020-02-24 2020-06-19 中国科学院半导体研究所 Arbitrary waveform generating device of integrated chip
CN111313970B (en) * 2020-02-24 2021-03-26 中国科学院半导体研究所 Arbitrary waveform generating device of integrated chip
CN114609725A (en) * 2020-12-08 2022-06-10 军事科学院系统工程研究院网络信息研究所 Ultra-narrow band filtering method based on micro-detuning cascade filter
CN114609725B (en) * 2020-12-08 2024-01-05 军事科学院系统工程研究院网络信息研究所 Ultra-narrow band filtering method based on micro-detuning cascade filter
CN113093329A (en) * 2021-04-06 2021-07-09 联合微电子中心有限责任公司 Array waveguide grating and calibration system and calibration method thereof
CN114397261A (en) * 2021-12-16 2022-04-26 光子集成(温州)创新研究院 Fourier infrared spectrometer and application thereof
CN114089475A (en) * 2022-01-11 2022-02-25 之江实验室 Quasi-distributed fiber Bragg grating demodulation chip and bearing equipment
CN114895502A (en) * 2022-04-26 2022-08-12 东南大学 Repetition frequency large-range adjustable silicon nitride micro-optical comb array based on optical switch switching network

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