CN109454007A - A kind of silicon wafer production size detection mechanism - Google Patents
A kind of silicon wafer production size detection mechanism Download PDFInfo
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- CN109454007A CN109454007A CN201811386938.6A CN201811386938A CN109454007A CN 109454007 A CN109454007 A CN 109454007A CN 201811386938 A CN201811386938 A CN 201811386938A CN 109454007 A CN109454007 A CN 109454007A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/04—Sorting according to size
- B07C5/06—Sorting according to size measured mechanically
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
Abstract
The present invention relates to a kind of silicon wafer production size detection mechanisms, including bottom plate, monitor station, regulating mechanism and alert mechanism, monitor station is installed in the middle part of the bottom plate upper surface, regulating mechanism is installed between monitor station and bottom plate, the right side of regulating mechanism is equipped with alert mechanism, the upper end of bottom plate is equipped with monitor station, the lower end surface of monitor station is uniformly equipped with support column along its circumferential direction, the lower end of support column is mounted on the upper surface of bottom plate, and the upper surface of monitor station is uniformly provided with detection electric pushrod along its circumferential direction.The present invention can solve existing silicon wafer when manually being detected to die size it is fixed it is difficult, manual detection efficiency is low, need to calculate size again whether within the scope of allowable error, artificial detection error rate is high and qualified products and substandard product are easy the problems such as obscuring, the efficient detection to die size may be implemented, have many advantages, such as that easy to operate, Detection accuracy is high, detection efficiency is high and qualified products and substandard product distinguish it is convenient.
Description
Technical field
The present invention relates to silicon wafer manufacture fields, in particular to a kind of silicon wafer production size detection mechanism.
Background technique
With being constantly progressive for science and technology, the production technology of silicon wafer is also more and more mature, and silicon wafer is in chip, electronics, electricity
The fields such as pond are widely used, the processing of silicon wafer substantially pass through sticky stick, evolution, remove photoresist, barreling, slice, cleaning, drying,
Detection, packaging and other steps have some processes to use mechanically actuated in whole production line, but so there are some processes to use people
Work operation, wherein remove photoresist and detect two steps just use manually based on.
In the detection process of silicon wafer processing, using the ruler being manually placed into silicon wafer in granite measuring instrument to silicon wafer
Very little etc. to be detected, there is the fixed size inefficiency that is complicated, manually measuring soon of silicon wafer, needs in artificial detection in operation
Calculating the size whether die size within the scope of allowable error, manually measures soon again, there are certain error rate and qualifications
Product and substandard product are easy the problems such as obscuring.
Summary of the invention
To solve the above-mentioned problems, it the present invention provides a kind of silicon wafer production size detection mechanism, can solve artificial
When being detected to die size existing silicon wafer it is fixed it is difficult, manual detection efficiency is low, need to calculate size again whether
Within the scope of allowable error, artificial detection error rate is high and qualified products and substandard product are easy the problems such as obscuring, and may be implemented
To the efficient detection of die size, have that easy to operate, Detection accuracy is high, detection efficiency is high and qualified products and unqualified production
Product distinguish the advantages that convenient.
To achieve the goals above, the present invention uses following technical scheme, a kind of silicon wafer production size detection mechanism, packet
Bottom plate, monitor station, regulating mechanism and alert mechanism are included, monitor station, monitor station and bottom are installed in the middle part of the bottom plate upper surface
Regulating mechanism is installed, the right side of regulating mechanism is equipped with alert mechanism between plate.
The upper end of the bottom plate is equipped with monitor station, and the lower end surface of monitor station is uniformly equipped with support along its circumferential direction
Column, the lower end of support column are mounted on the upper surface of bottom plate, and it is electronic that the upper surface of monitor station along its circumferential direction is uniformly provided with detection
Push rod, the top for detecting electric pushrod are equipped with placement plate, and the middle part of placement plate is equipped with circular hole, is equipped with sucker, work in circular hole
When making, the silicon wafer detected will be needed to be placed on sucker, the center of the center alignment sucker of silicon wafer, the flexible fortune of detection electric pushrod
It is dynamic that placement plate is driven to move up and down, it can silicon wafer to be detected is driven to move up and down.
The regulating mechanism includes rotation branch, is equipped with rotation branch in the middle part of monitor station lower end surface, rotates branch
Side wall on be threaded with adjusting branch, rotation branch includes thread barrel, and monitor station is equipped with thread barrel in the middle part of lower end surface,
The inside of thread barrel is hollow structure and is internally threaded slot, and thread barrel internal screw thread is connected with screw rod, the lower end installation of screw rod
There is connecting plate, the lower end surface of connecting plate is connected with the output shaft of rotary electric machine, and rotary electric machine is mounted on support by motor cabinet
The lower end surface of the upper surface of plate, support plate is uniformly provided with support spring, lower end and the bottom plate phase of support spring along its circumferential direction
Connection, adjusting branch includes regulating platform, regulating platform is equipped between adjacent supports column, the lower end of regulating platform is mounted on the upper of bottom plate
On end face, the inside of regulating platform is equipped with adjustment hole, and the upper surface and lower end surface of adjustment hole are symmetrical above and below to be equipped with regulating tank, regulating tank
Inside adjusting draw runner is installed by way of being slidably matched, the adjusting adjusted in draw runner and lower regulating tank in upper regulating tank
Adjusting rod is installed, the front end face of adjusting rod is equipped with the first graduation apparatus, and the right side of adjusting rod is equipped with screw thread between draw runner
Plate, thread plate are arcuate structure, and the right side of thread plate is equipped with thread, and the left side of adjusting rod is equipped with support rod, props up
The lower end of strut right side is equipped with adjustment spring, and adjustment spring in spring groove, adjust on the left side of regulating platform by spring groove
The right end of section spring is connected with the right side of spring groove, and the upper end of support rod right side is equipped with fine tuning branch, when work, root
Determine that the maximum permissible value of die size, rotary electric machine drive screw rod to turn by connecting plate according to die size and allowable error value
Dynamic, screw rod rotation will drive rotary electric machine and move up and down, and support spring, which is stretched, moves up and down the condition of offer, screw rod for rotary electric machine
It is moved up and down while rotation and drives adjusting rod to move left and right by thread plate, determined according to the scale value of the first graduation apparatus
The position of maximum permissible value can be adjusted adjusting rod to the position of needs, so as to simply determine that the maximum of silicon wafer permits
Perhaps range.
The alert mechanism includes fine tuning branch, and the upper end of regulating mechanism is equipped with fine tuning branch, finely tunes the upper of branch
End is equipped with alarm branch, and fine tuning branch includes tuning plate, and the upper end of support rod right side is equipped with tuning plate, tuning plate and branch
The inside of strut is equipped with through-hole, and through-hole is interior to be equipped with trimming bolt by bearing, and the right side of trimming bolt is equipped with fine tuning
Disk, screw thread is equipped with regulating rod on the side wall of trimming bolt, and sliding block is symmetrically installed with before and after the front/rear end of regulating rod, and sliding block is logical
It crosses the mode being slidably matched to be mounted in sliding slot, the trailing flank of support rod is arranged in sliding slot, and the left end of limit plate is mounted on adjusting
The front end face of the right side of plate, limit plate is equipped with the second graduation apparatus, and the upper surface of regulating rod is equipped with blanking plate, blanking plate
Material is that the shape of rubber material and blanking plate is right-angle prismatic column, and the upper end of regulating rod side wall is equipped with alarm branch, alarm
Branch includes alarm board, and the upper end of regulating rod side wall is equipped with alarm board, and the front side of alarm board upper surface is with the right side of blanking plate
Face is line of demarcation, and left side is equipped with qualified alarm device, and right side is equipped with unqualified alarm device, and the upper end of qualified alarm device is equipped with
First button, the upper end of unqualified alarm device are equipped with the second button, the sound that qualified alarm device and unqualified alarm device issue
Difference is equipped with blanking bar on the right side of alarm board upper surface, and the upper end of blanking bar is triangular prism shape and its material is rubber material
When work, the minimum allowable value of silicon wafer is determined according to die size error permissible value, fine tuning dish is rotated, according to the second scale for matter
Regulating rod is determined to silicon wafer minimum allowable range that when silicon wafer is qualified products, i.e., die size is in allowable range of error by table
It is interior, the first button can be touched when silicon wafer moves down, qualified alarm sounds, and when moving still further below, blanking plate is by silicon
Piece is under sucker top, when silicon wafer is substandard product, i.e., when die size is greater than maximum value or when being less than minimum value, is greater than most
Under support rod directly pushes up silicon wafer when big value, when being less than minimum value, silicon wafer, which moves down, can touch the second button, unqualified
Alarm sounds, when moving still further below, under blanking bar pushes up silicon wafer from sucker, so that die size is examined in mechanization
Survey, detecting step is simple, work efficiency is high, accuracy rate is high and qualified products and substandard product differentiation it is simple and fast.
As a preferred technical solution of the present invention, the screw rod upper end is cylinder, and cylindrical be diameter down
The rotary table being gradually reduced, and the spiral shell spacing on screw rod is identical as the spiral shell spacing of thread, the right side of thread plate is incline structure,
Inclined angle is identical as the sidewall slope angle of rotary table, moves up and down and is able to drive when screw rod rotation so as to ensure
Adjusting rod moves left and right.
As a preferred technical solution of the present invention, the blanking plate, the first button, the second button and blanking bar height
Arrangement is followed successively by the first button, blanking plate, the second button and blanking bar to degree from high to low, so as to be judged according to alarm
Whether die size is qualified.
When work, firstly, the maximum permissible value of die size is determined according to die size and allowable error value, rotation electricity
Machine drives screw rod rotation by connecting plate, and screw rod rotation will drive rotary electric machine and move up and down, and support spring is stretched for rotation electricity
Machine moves up and down offer condition, and screw rod moves up and down while rotation and drives adjusting rod to move left and right by thread plate, according to
The scale value of first graduation apparatus determines the position of maximum permissible value, adjusting rod can be adjusted to the position of needs；Then, root
The minimum allowable value of silicon wafer is determined according to die size error permissible value, rotates fine tuning dish, it is according to the second graduation apparatus, regulating rod is true
Surely silicon wafer minimum allowable range is arrived；Then, the silicon wafer detected will be needed to be placed on sucker, in the center alignment sucker of silicon wafer
The heart, detection electric pushrod stretching motion drive placement plate to move up and down, it can silicon wafer to be detected is driven to move up and down；Most
Afterwards, detection electric pushrod stretching motion drives silicon wafer to move downward, and when silicon wafer is qualified products, i.e., die size permits in error
Perhaps in range, the first button can be touched when silicon wafer moves down, qualified alarm sounds, when moving still further below, blanking
Plate by silicon wafer under sucker top, when silicon wafer be substandard product when, i.e., die size be greater than maximum value when or be less than minimum value when,
Under support rod directly pushes up silicon wafer when greater than maximum value, when being less than minimum value, silicon wafer, which moves down, can touch the second button,
Unqualified alarm sounds, and when moving still further below, under blanking bar pushes up silicon wafer from sucker, can solve manually to die size
Existing silicon wafer fixation is difficult when being detected, manual detection efficiency is low, whether needs to calculate size again in allowable error model
It encloses interior, artificial detection error rate height and qualified products and substandard product is easy the problems such as obscuring, may be implemented to die size
Efficient detection.
The beneficial effects of the present invention are:
One, the present invention can solve the fixed difficult, artificial detection of existing silicon wafer when manually detecting to die size
Low efficiency, need to calculate again size whether within the scope of allowable error, artificial detection error rate is high and qualified products with do not conform to
Lattice product is easy the problems such as obscuring, and the efficient detection to die size may be implemented, have it is easy to operate, Detection accuracy is high,
Detection efficiency height and qualified products and substandard product distinguish the advantages that convenient.
Two, the present invention is provided with regulating mechanism, and regulating mechanism can determine most according to die size and allowable error range
Great error range；
Three, the present invention is provided with fine tuning branch, and fine tuning branch can determine most according to die size and allowable error range
Small error range；
Four, the present invention is provided with alert mechanism, and alert mechanism, which can be convenient, by the qualified products of silicon wafer and not to be conformed to efficiently
Lattice product zone separates.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is schematic perspective view of the invention；
Fig. 2 is the A of Fig. 1 of the present invention to enlarged diagram；
Fig. 3 is the B of Fig. 1 of the present invention to enlarged diagram.
Specific embodiment
In order to be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, tie below
Conjunction is specifically illustrating, and the present invention is further explained.It should be noted that in the absence of conflict, embodiment in the application and
Feature in embodiment can be combined with each other.
As shown in Figure 1 to Figure 3, a kind of silicon wafer production size detection mechanism, including bottom plate 1, monitor station 2, regulating mechanism 3
With alert mechanism 4, monitor station 2 is installed in the middle part of 1 upper surface of bottom plate, adjusting machine is installed between monitor station 2 and bottom plate 1
Structure 3, the right side of regulating mechanism 3 are equipped with alert mechanism 4.
The upper end of the bottom plate 1 is equipped with monitor station 2, and the lower end surface of monitor station 2 is uniformly equipped with branch along its circumferential direction
Dagger 21, the lower end of support column 21 are mounted on the upper surface of bottom plate 1, and the upper surface of monitor station 2 is uniformly provided with along its circumferential direction
Electric pushrod 22 is detected, the top of detection electric pushrod 22 is equipped with placement plate 23, and the middle part of placement plate 23 is equipped with circular hole, circular hole
Sucker 24 is inside installed, when work, the silicon wafer detected will be needed to be placed on sucker 24, in the center alignment sucker 24 of silicon wafer
The heart, detection 22 stretching motion of electric pushrod drive placement plate 23 to move up and down, it can silicon wafer to be detected is driven to move up and down.
The regulating mechanism 3 includes rotation branch 31, and rotation branch 31 is equipped in the middle part of 2 lower end surface of monitor station, is turned
It is threaded on the side wall of dynamic branch 31 and adjusts branch 32, rotation branch 31 includes thread barrel 311,2 lower end surface of monitor station
Middle part is equipped with thread barrel 311, and the inside of thread barrel 311 is hollow structure and is internally threaded slot, 311 internal screw thread of thread barrel
It is connected with screw rod 312, the lower end of screw rod 312 is equipped with connecting plate 313, and the lower end surface of connecting plate 313 is defeated with rotary electric machine 314
Shaft is connected, and rotary electric machine 314 is mounted on the upper surface of support plate 315 by motor cabinet, and the lower end surface of support plate 315 is along it
Circumferential direction is uniformly provided with support spring 316, and the lower end of support spring 316 is connected with bottom plate 1, and adjusting branch 32 includes adjusting
Platform 321 is equipped with regulating platform 321 between adjacent supports column 21, and the lower end of regulating platform 321 is mounted on the upper surface of bottom plate 1, adjusts
The inside for saving platform 321 is equipped with adjustment hole, and the upper surface and lower end surface of adjustment hole are symmetrical above and below to be equipped with regulating tank, the inside of regulating tank
It is equipped with by way of being slidably matched and adjusts draw runner 322, the adjusting adjusted in draw runner 322 and lower regulating tank in upper regulating tank
Adjusting rod 323 is installed, the front end face of adjusting rod 323 is equipped with the first graduation apparatus 324, the right side of adjusting rod 323 between draw runner 322
End face is equipped with thread plate 325, and thread plate 325 is arcuate structure, and the right side of thread plate 325 is equipped with thread, adjusting rod
323 left side is equipped with support rod 326, and the lower end of 326 right side of support rod is equipped with adjustment spring 327, adjustment spring 327
In spring groove, on the left side of regulating platform 321, the right end of adjustment spring 327 is connected spring groove with the right side of spring groove
It connects, the upper end of 322 right side of adjustable plate is equipped with fine tuning branch 41, true according to die size and allowable error value when work
Determine the maximum permissible value of die size, rotary electric machine 314 drives screw rod 312 to rotate by connecting plate 313, and screw rod 312 rotates meeting
Rotary electric machine 314 is driven to move up and down, support spring 316, which is stretched, moves up and down the condition of offer, screw rod 312 for rotary electric machine 314
Moving up and down while rotation and passing through thread plate 325 drives adjusting rod 323 to move left and right, according to the quarter of the first graduation apparatus 324
Angle value determines the position of maximum permissible value, adjusting rod 323 can be adjusted to the position needed, so as to simply determine
The permitted maximum range of silicon wafer.
The alert mechanism 4 includes fine tuning branch 41, and the upper end of regulating mechanism 3 is equipped with fine tuning branch 41, fine tuning branch
The upper end of chain 41 is equipped with alarm branch 42, and fine tuning branch 41 includes tuning plate 411, and the upper end of 326 right side of support rod is installed
There is a tuning plate 411, the inside of tuning plate 411 and support rod 326 is equipped with through-hole, is equipped with trimming bolt by bearing in through-hole
412, the right side of trimming bolt 412 is equipped with fine tuning dish 413, and screw thread is equipped with regulating rod on the side wall of trimming bolt 412
414, the front/rear end front and back of regulating rod 414 is symmetrically installed with sliding block 415, and sliding block 415 is mounted on by way of being slidably matched
In sliding slot, the trailing flank of limit plate 416 is arranged in sliding slot, and the left end of limit plate 416 is mounted on the right side of support rod 326, limit
The front end face of position plate 416 is equipped with the second graduation apparatus 417, and the upper surface of regulating rod 414 is equipped with blanking plate 418, blanking plate 418
Material be the shape of rubber material and blanking plate 418 be right-angle prismatic column, the upper end of 414 side wall of regulating rod is equipped with alarm branch
Chain 42, alarm branch 42 include alarm board 421, and the upper end of 414 side wall of regulating rod is equipped with alarm board 421,421 upper end of alarm board
The front side in face is using the right side of blanking plate 418 as line of demarcation, and left side is equipped with qualified alarm device 422, and right side is equipped with unqualified
Alarm device 423, the upper end of qualified alarm device 422 are equipped with the first button 424, and the upper end of unqualified alarm device 423 is equipped with
Two buttons 425, qualified alarm device 422 is different from the sound that unqualified alarm device 423 issues, the right side of 421 upper surface of alarm board
Blanking bar 426 is installed, the upper end of blanking bar 426 is triangular prism shape and its material is rubber material, when work, according to silicon wafer
Scale error permissible value determines the minimum allowable value of silicon wafer, fine tuning dish 413 is rotated, according to the second graduation apparatus 417, by regulating rod
414 determine to silicon wafer minimum allowable range, and when silicon wafer is qualified products, i.e. die size is in allowable range of error, in silicon
Piece can touch the first button 424 when moving down, qualified alarm sounds, and when moving still further below, blanking plate 418 is by silicon wafer
Under the top of sucker 24, when silicon wafer is substandard product, i.e., when die size is greater than maximum value or when being less than minimum value, it is greater than most
Under support rod 326 directly pushes up silicon wafer when big value, when being less than minimum value, silicon wafer, which moves down, can touch the second button 425,
Unqualified alarm sounds, when moving still further below, under blanking bar 426 pushes up silicon wafer from sucker 24, so that mechanization is to silicon wafer
Size is detected, and detecting step is simple, and work efficiency is high, accuracy rate is high and product differentiation is simple and fast.
As a preferred technical solution of the present invention, 312 upper end of screw rod is cylinder, and cylinder is straight down
The rotary table that diameter is gradually reduced, and the spiral shell spacing on screw rod 312 is identical as the spiral shell spacing of thread, the right side of thread plate 325 is
Incline structure, inclined angle is identical as the sidewall slope angle of rotary table, so as to move up and down when ensureing that screw rod 312 rotates
And it is able to drive adjusting rod 323 to move left and right.
As a preferred technical solution of the present invention, the blanking plate 418, the first button 424,425 and of the second button
The height of blanking bar 426 arranges from high to low is followed successively by the first button 424, blanking plate 418, the second button 425 and blanking bar
426, so as to judge whether die size is qualified according to alarm.
When work, firstly, the maximum permissible value of die size is determined according to die size and allowable error value, rotation electricity
Machine 314 drives screw rod 312 to rotate by connecting plate 313, and the rotation of screw rod 312 will drive rotary electric machine 314 and move up and down, and supports bullet
Spring 316, which stretches, moves up and down the condition of offer for rotary electric machine 314, and screw rod 312 moves up and down while rotation and passes through thread plate
325 drive adjusting rods 323 move left and right, and the position of maximum permissible value is determined according to the scale value of the first graduation apparatus 324, can be with
Adjusting rod 323 is adjusted to the position needed；Then, the minimum allowable value of silicon wafer is determined according to die size error permissible value,
Fine tuning dish 413 is rotated, according to the second graduation apparatus 417, regulating rod 414 is determined and arrives silicon wafer minimum allowable range；Then, it will need
The silicon wafer of detection is placed on sucker 24, and 22 stretching motion band of electric pushrod is detected at the center of the center alignment sucker 24 of silicon wafer
Dynamic placement plate 23 moves up and down, it can silicon wafer to be detected is driven to move up and down；Finally, detection 22 stretching motion of electric pushrod
Silicon wafer is driven to move downward, when silicon wafer is qualified products, i.e. die size moves down in allowable range of error in silicon wafer
When can touch the first button 424, qualified alarm sounds, and when moving still further below, blanking plate 418 pushes up silicon wafer from sucker 24
Under, when silicon wafer is substandard product, i.e., when die size is greater than maximum value or when being less than minimum value, adjusted when greater than maximum value
Under plate 322 directly pushes up silicon wafer, when being less than minimum value, silicon wafer, which moves down, can touch the second button 425, unqualified alarm
Device sounds, and when moving still further below, under blanking bar 426 pushes up silicon wafer from sucker 24, solves and manually examines to die size
Existing silicon wafer fixation is difficult when survey, manual detection efficiency is low, needs to calculate size again whether within the scope of allowable error, people
Work detection error rate height and qualified products and substandard product are easy the problems such as obscuring, and have reached purpose.
The basic principles, main features and advantages of the invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, and only illustrating for the description in above embodiments and description is of the invention
Principle, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these change and change
Into all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its equivalent
It defines.
Claims (6)
1. a kind of silicon wafer production size detection mechanism, including bottom plate (1), monitor station (2), regulating mechanism (3) and alert mechanism
(4), it is characterised in that: be equipped with monitor station (2) in the middle part of bottom plate (1) upper surface, between monitor station (2) and bottom plate (1)
It is equipped with regulating mechanism (3), the right side of regulating mechanism (3) is equipped with alert mechanism (4)；Wherein:
The upper end of the bottom plate (1) is equipped with monitor station (2), and the lower end surface of monitor station (2) is uniformly equipped with along its circumferential direction
Support column (21), the lower end of support column (21) are mounted on the upper surface of bottom plate (1), and the upper surface of monitor station (2) is along its circumferential direction side
To detection electric pushrod (22) is uniformly provided with, the top of detection electric pushrod (22) is equipped with placement plate (23), placement plate (23)
Middle part be equipped with circular hole, sucker (24) are installed in circular hole；
The regulating mechanism (3) includes rotation branch (31), is equipped with rotation branch in the middle part of monitor station (2) lower end surface
(31), it rotates to be threaded on the side wall of branch (31) and adjusts branch (32)；
The rotation branch (31) includes thread barrel (311), is equipped with thread barrel (311) in the middle part of monitor station (2) lower end surface,
The inside of thread barrel (311) is hollow structure and is internally threaded slot, and thread barrel (311) internal screw thread is connected with screw rod (312),
The lower end of screw rod (312) is equipped with connecting plate (313), the lower end surface of connecting plate (313) and the output shaft phase of rotary electric machine (314)
Connection, rotary electric machine (314) are mounted on the upper surface of support plate (315) by motor cabinet, and the lower end surface of support plate (315) is along it
Circumferential direction is uniformly provided with support spring (316), and the lower end of support spring (316) is connected with bottom plate (1)；
The alert mechanism (4) includes fine tuning branch (41), and the upper end of regulating mechanism (3) is equipped with fine tuning branch (41), micro-
Adjust the upper end of branch (41) that alarm branch (42) are installed.
2. a kind of silicon wafer production size detection mechanism according to claim 1, it is characterised in that: the adjusting branch
(32) include regulating platform (321), be equipped between adjacent supports column (21) regulating platform (321), the lower end installation of regulating platform (321)
On the upper surface of bottom plate (1), the inside of regulating platform (321) is equipped with adjustment hole, right above and below the upper surface and lower end surface of adjustment hole
Claim to be equipped with regulating tank, the inside of regulating tank is equipped with by way of being slidably matched adjusts draw runner (322), the tune in upper regulating tank
It is equipped with adjusting rod (323) between adjusting draw runner (322) in section draw runner (322) and lower regulating tank, the front end of adjusting rod (323)
Face is equipped with the first graduation apparatus (324), and the right side of adjusting rod (323) is equipped with thread plate (325), and thread plate (325) is arc
The right side of shape structure, thread plate (325) is equipped with thread, and the left side of adjusting rod (323) is equipped with support rod (326),
The lower end of support rod (326) right side is equipped with adjustment spring (327), and adjustment spring (327) in spring groove, adjusting by spring groove
On the left side for saving platform (321), the right end of adjustment spring (327) is connected with the right side of spring groove, support rod (326) right end
The upper end in face is equipped with fine tuning branch (41).
3. a kind of silicon wafer production size detection mechanism according to claim 1, it is characterised in that: the fine tuning branch
It (41) include tuning plate (411), the upper end of support rod (326) right side is equipped with tuning plate (411), tuning plate (411) and branch
The inside of strut (326) is equipped with through-hole, is equipped with trimming bolt (412) in through-hole by bearing, the right side of trimming bolt (412)
End face is equipped with fine tuning dish (413), and screw thread is equipped with regulating rod (414) on the side wall of trimming bolt (412), regulating rod (414)
Front/rear end before and after be symmetrically installed with sliding block (415), sliding block (415) is mounted in sliding slot by way of being slidably matched, sliding
Slot is arranged in the trailing flank of limit plate (416), and the left end of limit plate (416) is mounted on the right side of support rod (326), limit plate
(416) front end face is equipped with the second graduation apparatus (417), and the upper surface of regulating rod (414) is equipped with blanking plate (418), blanking
The material of plate (418) is that the shape of rubber material and blanking plate (418) is right-angle prismatic column, the upper end of regulating rod (414) side wall
Alarm branch (42) are installed.
4. a kind of silicon wafer production size detection mechanism according to claim 1, it is characterised in that: the alarm branch
It (42) include alarm board (421), the upper end of regulating rod (414) side wall is equipped with alarm board (421), alarm board (421) upper surface
Front side using the right side of blanking plate (418) as line of demarcation, left side is equipped with qualified alarm device (422), and right side, which is equipped with, not to be conformed to
The upper end of lattice alarm device (423), qualified alarm device (422) is equipped with the first button (424), unqualified alarm device (423) it is upper
End is equipped with the second button (425), and qualified alarm device (422) is different from the sound that unqualified alarm device (423) issues, alarm board
(421) it is equipped on the right side of upper surface blanking bar (426), the upper end of blanking bar (426) is triangular prism shape and its material is rubber
Glue material matter.
5. a kind of silicon wafer production size detection mechanism according to claim 1, it is characterised in that: the screw rod
(312) upper end is cylinder, the cylindrical rotary table being gradually reduced down for diameter, and spiral shell spacing on threaded rod and thread
Spiral shell spacing is identical, and the right side of thread plate (325) is incline structure, and inclined angle is identical as the sidewall slope angle of rotary table.
6. a kind of silicon wafer production size detection mechanism according to claim 3, it is characterised in that: the blanking plate
(418), the height of the first button (424), the second button (425) and blanking bar (426) arranges from high to low is followed successively by first and presses
Button (424), blanking plate (418), the second button (425) and blanking bar (426).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811386938.6A CN109454007A (en) | 2018-11-20 | 2018-11-20 | A kind of silicon wafer production size detection mechanism |
Applications Claiming Priority (1)
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110103143A (en) * | 2019-05-10 | 2019-08-09 | 李联辉 | A kind of pressure gauge with bottom connection stainless steel rolling ring finishing processing equipment |
| CN112326215A (en) * | 2020-09-18 | 2021-02-05 | 建湖金洋科技有限公司 | Detection device is used in production of track traffic gasket |
| CN112541657A (en) * | 2020-11-11 | 2021-03-23 | 特劢丝软件科技(上海)有限公司 | Silicon chip product conversion method and system, electronic equipment and storage medium |
| CN114023661A (en) * | 2021-11-05 | 2022-02-08 | 江门市华凯科技有限公司 | Integrated circuit chip packaging and processing device |
-
2018
- 2018-11-20 CN CN201811386938.6A patent/CN109454007A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110103143A (en) * | 2019-05-10 | 2019-08-09 | 李联辉 | A kind of pressure gauge with bottom connection stainless steel rolling ring finishing processing equipment |
| CN110103143B (en) * | 2019-05-10 | 2020-04-07 | 北方民族大学 | Stainless steel rolling ring finish machining equipment for radial pressure gauge |
| CN112326215A (en) * | 2020-09-18 | 2021-02-05 | 建湖金洋科技有限公司 | Detection device is used in production of track traffic gasket |
| CN112541657A (en) * | 2020-11-11 | 2021-03-23 | 特劢丝软件科技(上海)有限公司 | Silicon chip product conversion method and system, electronic equipment and storage medium |
| CN112541657B (en) * | 2020-11-11 | 2022-11-18 | 上海赛美特软件科技有限公司 | Silicon chip product conversion method and system, electronic device and storage medium |
| CN114023661A (en) * | 2021-11-05 | 2022-02-08 | 江门市华凯科技有限公司 | Integrated circuit chip packaging and processing device |
| CN114023661B (en) * | 2021-11-05 | 2022-04-29 | 江门市华凯科技有限公司 | Integrated circuit chip packaging and processing device |
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Application publication date: 20190312 |