CN109451647A - High current diode cone ceramic package vacuum interface insulation structure - Google Patents

High current diode cone ceramic package vacuum interface insulation structure Download PDF

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Publication number
CN109451647A
CN109451647A CN201811295041.2A CN201811295041A CN109451647A CN 109451647 A CN109451647 A CN 109451647A CN 201811295041 A CN201811295041 A CN 201811295041A CN 109451647 A CN109451647 A CN 109451647A
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radius
cylinder
length
annulus
cone angle
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CN109451647B (en
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荀涛
孙晓亮
令钧溥
贺军涛
杨汉武
陈冬群
张军
张建德
钟辉煌
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National University of Defense Technology
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National University of Defense Technology
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00—Direct voltage accelerators; Accelerators using single pulses
    • H05H5/02—Details
    • H05H5/03—Accelerating tubes

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  • High Energy & Nuclear Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
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Abstract

The invention discloses a cone ceramic packaging vacuum interface insulation structure of a high current diode, and aims to improve the long-time vacuum-maintaining capacity and the withstand working voltage of the high current diode. The invention consists of a cathode base, a first voltage-sharing cover, a second voltage-sharing cover, an inner conductor, a first kovar ring, a cone angle insulator, a ceramic ring, a second kovar ring, a first flange, a second flange and a strong current diode outer cylinder; the cathode base, the first pressure equalizing cover, the second pressure equalizing cover, the inner conductor, the first kovar ring, the cone angle insulator, the ceramic ring, the second kovar ring and the first flange are located inside the outer cylinder of the high-current diode, the cathode base and the ceramic ring are packaged at the right end of the cone angle insulator through the first kovar ring, and the first flange is packaged at the left end of the cone angle insulator through the second kovar ring, so that integrated packaging is realized; according to the invention, through reasonably designing the electric field shielding structures such as the cone angle insulator, the voltage-sharing cover and the like, the distribution of the surface electric field and the surface magnetic field is optimized, the surface flashover probability of the interface is reduced, and the long-time vacuum-keeping capability and the working voltage tolerance of the high-current diode are improved.

Description

A kind of high current diode cone ceramic package vacuum interface insulation system
Technical field
The invention belongs to high-current accelerators and technical field of pulse power, and in particular to a kind of high current diode cone ceramics Encapsulated vacuum interfacial insulator structure.
Background technique
High current diode is one of the critical component of high-current accelerator and technical field of pulse power, for generating high current phase To by charged particle beam.The liquid-working-medium and the particle beams that high current diode vacuum interface is used to be isolated in pulsed drive source are negative Vacuum environment is carried, generally includes to play the insulator of support and insulating effect between coaxial inner conductor, outer conductor, internal and external conductor, play screen Cover the equal laminated structure with the effect of pressure.Before the transmitting of the high current particle beams, which will usually bear several hundred kV even MV The pulse voltage of magnitude.Since edge flashing discharges, high current diode vacuum interface often becomes the limiting factor of high power stream With the difficult point of system design.
It is exhausted for influencing the principal element of high current diode vacuum interface working performance (including insulation characterisitic and vacuum characteristic) The material and vacuum interface configuration of edge body.In terms of insulating material, often using organic polymer and nylon material as representative, feature It is that dielectric constant is low, easy processing, but discharge quantity is big, is not suitable for being applied to high vacuum occasion；Ceramic material is due to gas efficiency Low, high-temperature baking resistant and be easy to metal weld the advantages that, using high current diode vacuum circle of ceramet integrative packaging Face is conducive to improve electron beam load vacuum level and system compactization is horizontal, reduces assembly connection link.Vacuum interface configuration Aspect, the critical function of vacuum interface are insulation pulse high-voltages, for ceramic dielectric vacuum interface, from processing and yield rate angle Degree sets out, and ceramics insulator configuration is mostly plate, i.e., ceramic flat surface and power flow direction are equal to or slightly less than 90 degree.This kind of structure The high current diode ceramic vacuum interface of type has also been successfully applied to drive the high-power microwave source electron beam load in no magnetic field, such as Magnetic insulation line high-power microwave oscillator.For there is the high-power microwave source electron beam load in magnetic field, as the theory of relativity high power returns Wave duct, to avoid reflux electron bombardment ceramics insulator surface, ceramic dielectric needs that wide-angle (cone angle) is taken to design, i.e., ceramic Plane and power flow direction are greater than 90 degree, it is desirable that ceramics insulator configuration becomes " circular platform type " from " plate ".Compared to organic The vacuum insulation interface at high molecular material and plate ceramic vacuum interface, wide-angle cone angle ceramet integrative packaging can Load vacuum levels and densification degree are effectively improved, and at the same time suitable for no magnetic field and the high power, the high current that have magnetic field Electron beam load.The high current vacuum interface of wide-angle cone angle ceramet integrative packaging can be applied as insulating support member In technical fields such as high-current accelerator, pulse power system and high-power microwave sources, there is preferable military and industrial efficiency, But there has been no related art schemes at present.
Summary of the invention
The technical problem to be solved by the present invention is there is the high vacuum high current diode of magnetic field high-power microwave source for driving Practical application request proposes a kind of high current diode cone angle ceramic package vacuum interface insulation system, by rationally designing cone angle It is several to reduce interface edge flashing for the electric field shielding constructions such as ceramics insulator, grading shield, optimizing surface electric field and along face Distribution of Magnetic Field Rate, improving driving has the high current diode of magnetic field high-power microwave source to protect vacuum capacity and tolerance operating voltage for a long time.
To achieve the goals above, the invention adopts the following technical scheme:
The present invention can cut down ring, cone angle insulator, porcelain by cathode block, the first grading shield, the second grading shield, inner conductor, first Ring, second can cut down ring, first flange, second flange, high current diode outer cylinder composition.The present invention is axisymmetry structure, fixed The central axis of adopted cathode block is rotation axes of symmetry OO'；It is left end close to one end of inner conductor, one end close to the second grading shield is Right end；It is inside close to the side of rotation axes of symmetry OO', the side far from rotation axes of symmetry OO' is outside.Second flange left end By the external pulse power driving source outer conductor of threaded hole, right end is connect by threaded hole with high current diode outer cylinder left end；Yin Electrode seat, the first grading shield, the second grading shield, inner conductor, first can cut down ring, cone angle insulator, ceramic ring, second can cut down ring, first Flange is respectively positioned on high current diode outer barrel.Inner conductor left end passes through the external pulse power driving source inner conductor of claw-like structures, Right end is connected through a screw thread with cathode block；Cathode block right end is connected through a screw thread with the first grading shield left end；First grading shield is right End is connected through a screw thread with the second grading shield left end；When second grading shield works, the external high current diode cathode emitter of right end； First can cut down ring outer surface by soldering connection ceramic ring inner surface and left side, and first can cut down ring inner surface is connected by argon arc welding Connect cathode block outer surface；Second, which can cut down ring outer surface, connects first flange inner surface by argon arc welding；Cone angle insulator right side Ring outer surface can be cut down by soldering connection with right side inner surface and first, and left side and left side outer surface and second can cut down ring Inner surface can cut down ring seal by first and fill cathode block and ceramic ring by soldering connection, cone angle insulator right end, and cone angle insulator is left End can cut down ring seal by second and fill first flange, final to realize based on cone angle insulator, cathode block, first can cut down ring, ceramic ring, Second can cut down ring, first flange as the integrative packaging of slave part.First flange left end is connected by threaded hole and second flange It connects, right end is connect by threaded hole with high current diode outer cylinder.
Cathode block, the first grading shield, third grading shield, inner conductor, first flange, second flange and high current diode outer cylinder Using non-magnetic rustproof Steel material, first, which can cut down ring and second, can cut down ring using kovar alloy (i.e. 4J29 and 4J44 sections nickel cobalt conjunction Gold), cone angle insulator and ceramic ring use alumina ceramic material.
Cone angle insulator is hollow round table shape structure, right side inside radius R1Meet R1=R5+Δ1, R5For cathode block first Cylindrical radius, Δ1For deformation surplus, Δ1Generally take 1~2mm, right side outer radius R2Meet R2=R1+D1, D1For cone angle insulation Side wall thickness is determined that tolerance isostatic pressing strength P is generally higher than 1MPa absolute pressure, thickness D by tolerance isostatic pressing strength P1Meet and closes It is D1≥15mm；Left side outer radius is R3, it is equal to second flange inside radius, left side inside radius is R4, meet R4=R3- 0.5D1.For convenience of description, it is specified that cone angle insulator surface be itself and right side vacuum environment contact surface, it is exhausted for cone angle along the plane direction Edge body frustum cone structure generatrix direction.Cone angle insulator side wall (is used along face and power flow flow directionIndicate) angle θ1By electrostatic Field distribution determines, to reduce edge flashing occurrence probability, angle theta1Following principle should be met: high current diode outer cylinder (11) is internal Power line is distributed along OO ' axial symmetry, and the ipsilateral power line of OO ' axis and cone angle insulator (6) are along face angle theta2It is at 45 °, cone angle is exhausted The parallel cone angle insulator (6) of edge body (6) magnetic line of force near face is along the plane direction, cone angle insulator (6) is along face maximum field intensity Less than 30kV/cm and electric field is uniform as far as possible along EDS maps, θ in actual design1It should be maintained between 125 ° to 145 °；Along face length L1The tolerance electric field strength E of high current diode operation pulse high-voltage V and cone angle insulator 6 as packaged by the present invention are (general Value is chosen in 40~60kV/cm according to practical application condition) it determines, meet relationship L1≥V/E。
Cathode block is by the first cylinder and the second cylinder is coaxially connected forms, and the first cylindrical radius is R5, length L2；Second Cylindrical radius is R6, length L3。R5It is determined according to circulating current size, typically no less than 40mm, L2Satisfaction can be fixed effectively Cone angle insulator is simultaneously convenient for assembly, general satisfaction relationship L2=8 Δs1；R6According to three binding site region (cathode of shielded cathode At seat, vacuum and cone angle insulator interface) electric field effect determination, meet relationship R6=R5+4Δ1；L3General satisfaction relationship L3=10 Δ1.To optimize two sections of cylindrical structure boundary surface electric field distributions, the boundary rounded corner of the second cylinder and the first cylinder.? (the large-scale general finite element analysis (FEA) that ANSYS company, the U.S. develops is soft according to electrostatic field analysis software ANSYS for fillet parameter Part is a computer-aided engineering (CAE) software) simulation result selection, it is desirable that cone angle insulator cathode three combines after rounded corner Point region is less than 30kV/cm along face electric field strength.First cylinder right end center, which is dug, the first threaded hole, is inserted in the first threaded hole Grading shield left end；Second cylinder left end center, which is dug, the second threaded hole, and inner conductor right end is inserted in the second threaded hole.Consider welding Deformation factor, the first cylinder right end outer surface cut off an annulus, annulus thickness h1Meet relationship h1=1.5 Δs1, length l1It is full Sufficient relationship l1=5 Δs1。
First grading shield is by third cylinder and the 4th cylinder is coaxially connected forms.Third cylindrical radius is R7, length L4； 4th cylindrical radius is R8, length L5.An outer radius is dug up first centered on rotation axes of symmetry OO' in third cylinder left end For R71, inside radius R73, length L41Annulus；Later centered on rotation axes of symmetry OO', then digs up an outer radius and be R72, inside radius R73, length L42Annulus so that center leaves the first thin cylinder.Third cylinder parameter chooses main basis Cone angle insulator and cathode block join domain surface field effect and practical set situation are shielded, meets following relationship: R7=R71+ 7Δ1, R71=R2+3Δ1, R72=R71-2Δ1, R73Meet the first thin cylinder and be just inserted into the first threaded hole, considers that assembly is practical Situation, L4=L2+2Δ1, L41=L4-2Δ1, L42=2.5 Δs1.4th cylindrical radius R8Meet relationship R8=R5+2Δ1, length L5 Practical set condition, general satisfaction L are considered as when selection5=2L2+ (2~5) Δ1It is practical, the equal rounding of third cylinder surfaces externally and internally Angle, rounding angular dimensions are chosen according to electrostatic field analysis software ANSYS simulation result, it is desirable that cone angle insulator cathode three after rounded corner Binding site region is less than 30kV/cm along face electric field strength, while not influencing cone angle insulator surface structure.First thin cylinder appearance Face is provided with external screw thread, and the first thin cylinder is inserted into the first threaded hole and is threadedly coupled with the first threaded hole.4th cylinder is to revolve Turn to dig first centre bore centered on symmetry axis OO', the first center pore radius is equal to R73, the first depth of center hole is h2, h2 =L5-2Δ1, the first centre bore is provided with internal screw thread, the second thin cylinder of the second grading shield is inserted in the first centre bore, with second The thin cylindrical thread connection of the second of grading shield.
Second grading shield mentality of designing and the first grading shield are almost the same, and the second grading shield is by the 5th cylinder and the 6th cylinder It is coaxially connected to form.5th cylindrical radius is R10, length L7；6th cylindrical radius is R11, length L8.5th cylinder left end First centered on rotation axes of symmetry OO', diging up an outer radius is R101, inside radius R9, length L6Annulus；Later with Centered on rotation axes of symmetry OO', then diging up an outer radius is R101, inside radius R8, length L71Annulus so that center Leave the second thin cylinder.R9Equal to the first center pore radius, R10It chooses can effectively prevent the electron back bombardment of emission of cathode from arriving Subject to cone angle insulator surface, meet relationship R10≥Rc+ 1.5cm, wherein RcFor external high current diode cathode emitter (for It is cylindrical) radius；L7Should be taken into account when selection optimization cone angle insulator surface electric field and avoid high current diode outer cylinder right side and The surface field of second grading shield downstream connection cathode emission area enhances, and there is no theoretical formula to illustrate at present, mainly according to design Experience, general value is between 20~40mm.5th cylinder is provided with rounding corner structure to optimize the 5th periphery electric field point Cloth, rounded corner should ensure that at chamfering when choosing and high current diode outer cylinder right side surface field intensity is less than 30kV/cm.6th Cylindrical radius R11Meet relationship R11=Rc+0.5Δ1, length L8It is subject to and does not cause high current diode outer barrel surface electric-field enhancing, General value is between 20~40mm.It replaces right angle to connect using inclined-plane connection at 5th cylinder and the 6th cylinder interface, subtracts Small surface field.R9Meet the second thin cylinder and is just inserted into the first centre bore.Second thin cylinder is provided with external screw thread, is inside inserted into First centre bore of one grading shield, which is realized, to be threadedly coupled.6th cylinder digs second center centered on rotation axes of symmetry OO' Hole the second centre bore inner sidewall is provided with internal screw thread, is inside inserted with high current diode cathode emitter.Second center-hole diameter h3 Equal to the interpolation high current diode cathode emitter diameter of thread, depth l3Slightly larger than interpolation high current diode cathode emitter screw thread Length.
Inner conductor is successively made of the 7th cylinder, the first rotary table and the 8th cylinder from left to right.7th cylindrical radius is R12、 Length is L9；First rotary table upper bottom surface radius is R12, bottom radius surface be R13, length L10；8th cylindrical radius is R13, it is long Degree is L11.7th cylinder left end, which is provided in claw-like structures, is inserted into pulse power driving source inner conductor (for cylinder), claw-like knot Structure processing method is as follows: first in the 7th cylinder left end centered on rotation axes of symmetry OO', diging up a radius is R121, length For L91Cylinder, remaining annulus is uniformly along the circumferential direction divided into 2N parts later, it is a according to a excision in interval, along rotating It is L that resection length is distinguished in the direction symmetry axis OO'91N part, N is integer, and value is generally 12~24, length L91Relationship should be met L91=L9(2~5) Δ1.7th cylindrical radius R12Equal to pulse power driving source inner conductor (for cylinder) radius；First circle Platform side and OO' angle theta3General 40 °~60 ° of value, go to the bottom radius surface R13It is determined according to practical set demand, general satisfaction closes It is R13=(1.5~2) R12, length L10Relationship L should be met when selection10=(R13-R12)/arctan(θ3)；8th body length L11Guarantee left side and arteries and veins that external pulse power driving source inner conductor right end annulus and claw-like structures are inserted into claw-like structures Rushing power drive source inner conductor right end annulus bottom, concordantly (pulse power driving source inner conductor a part is cylinder, with claw-like knot Structure junction is annulus, and the place that annulus is connected with cylinder is pulse power driving source inner conductor right end annulus bottom), radius R13Local electric field strength enhancement effect, control three binding site region electric field strength of cathode need to be avoided to be less than 30kV/cm, general value 30~50mm.For 8th cylinder right end first centered on rotation axes of symmetry OO', diging up an outer radius is R13, inside radius be R132, length L111Annulus；Later centered on rotation axes of symmetry OO', then diging up an outer radius is R131, inside radius be R132, length L112Annulus so that there are the thin cylinder of third, radius R at center132Equal to the second screw thread pore radius, radius R131 Meet relationship R131=R132+2Δ1, length L111Value does not contact cone angle insulator, length L when should meet the assembly of the first rotary table112 Substantially equal to L111.8th cylinder right end uses rounded corner structure optimization surface electric field distribution, and chamfering parameter is chosen with electrostatic field point It is standard that big cone angle insulator, which is less than 30kV/cm along face electric field strength, in analysis software ANSYS emulation.The thin periphery setting of third There is external screw thread, be inside inserted into the second threaded hole of cathode block, is threadedly coupled with the second threaded hole.
First can to cut down ring integrally annular in shape, from left to right successively includes the first annulus, the second annulus, third annulus, the Four annulus.First annulus outer radius is R14, inside radius is equal to R5, length L121；Second annulus outer radius is equal to R2, inside radius Equal to R5, length L122；Third annulus outer radius is equal to R14, inside radius is equal to R5, length L123；4th annulus outer radius is R15, inside radius is equal to R5, meet relationship R15=R5+0.5Δ1, length L124；First can cut down ring entire length L12=L121+L122 +L123+L124, each section length is respectively L121=2 Δs1、L122=Δ1、L123=3 Δs1、L124=2 Δs1, R14It can be cut down according to first Ring and cone angle insulator practical set condition are chosen, general satisfaction relationship R5< R14≤R5+3Δ1.First can cut down and be inserted with yin in ring First cylinder of electrode seat, first can cut down ring is connected on cathode block by argon arc welding；First can cut down in the first annulus of ring and insert in Cone angle insulator right side inner surface, until the second annulus left end surface is close to cone angle insulator right side, first can cut down ring The first annulus and the second annulus by soldering connection in cone angle insulator right end so that cathode block can cut down ring seal dress by first On cone angle insulator.It is required according to working vacuum degree, at cone angle insulator and cathode block sealing-in (namely ring pricker can be cut down with first At weldering) sealing-in leak rate require less than 5 × 10-7Pa.L/s.Mechanical support needed for third annulus provides the second annulus, the 4th annulus Function is reserved soldering encapsulation and argon arc welding encapsulation thermal deformation space, and ceramic ring inner surface does not contact outside the 4th annulus after meeting welding Surface.
Ceramic ring is annular shape, and inside radius is equal to cone angle insulator right side inside radius R1, outer radius is equal to cone angle insulator Right side outer radius R2, length L13=3 Δs1.First is inserted with inside ceramic ring can cut down the third annulus of ring, until ceramic ring left side It is close to the second annulus right side, ceramic ring can cut down ring by soldering connection with first, and then be encapsulated on cone angle insulator.Ceramic ring master Act on is to guarantee the sealing-in uniformity and intensity, offset stress of sealing.
Second can cut down ring as annular shape, and inside radius is equal to first flange inside radius R16, outer radius is equal to R16+Δ1, length etc. In first flange length L14.Second can cut down ring set on the outer surface of cone angle insulator left side, and second can cut down ring right side and cone Angle insulator left side outer surface right end is concordant, and second, which can cut down ring, is connect by soldering with cone angle insulator, so that second can cut down Ring is fixed on cone angle insulator left end；Second, which can cut down ring outer, coaxial, is nested in first flange, and second can cut down ring left side and the One flange left side is concordant, and second can cut down ring outer surface and first flange inner surface by argon arc welding, by second can cut down ring with First flange is packaged together；Finally in cone angle insulator left end, realize that cone angle insulator can cut down ring and first flange to second Integrative packaging.It is required according to working vacuum degree, cone angle insulator can cut down the ring seal place of connecing sealing-in leak rate with second and generally require Less than 5 × 10-7Pa.L/s。
First flange is annular shape, inside radius R16, outer radius R17, R17Equal to high current diode outer cylinder left side Five annulus inside radius R211, length L14Equal to the 5th annulus length L of high current diode outer cylinder left side161It is cut off at the 6th annulus Ring part length h4The sum of.First flange left side is provided with 2 third threaded holes, for the 4th screw thread with second flange Hole connection.First flange right side is provided with the first edge seal slot, for placing wound packages outside first flange and high current diode The copper sealing ring that timing uses；First flange left side is provided with the first rectangular seal slot, for placing first flange and second The fluorine rubber circle or copper sealing ring that flange uses when assembling improve system working vacuum level.Is coaxially nested in first flange Two can cut down ring, and first flange left side can cut down that ring left side is concordant, and first flange inner surface and second can cut down ring appearance with second Face is connected by argon arc welding.
Second flange is annular shape, outer radius R19, R19Equal to high current diode outer cylinder outer radius R20, inside radius R18, Ring, first flange junction surface field, R can be cut down for optimization cone angle insulator and second18Meet relationship R18=R4-5Δ1, long Degree is L15, chosen according to the pulse power driving source outer conductor cooperation actual demand being connect with left side, general satisfaction relationship L15= 2.5Δ1.Second flange inner surface should meet table at chamfering by rounded corner structure optimization surface electric field distribution, rounding angular dimensions Face electric field strength is less than 30kV/cm.Second flange right side is provided with the 4th threaded hole, for assembling first flange；Left side It is provided with the 5th threaded hole, for the 6th threaded hole and upstream pulse power drive source outer conductor spiral shell with high current diode outer cylinder Line assembly connection.
High current diode outer cylinder is integrally annular in shape, from left to right successively includes the 5th annulus, the 6th annulus, the second circle Platform, the 7th annulus and the 8th annulus.5th annulus outer radius is R20, inside radius R211, length L161；6th annulus outer radius For R212, inside radius R213, length L162；Second rotary table left side outer radius is R212, left side inside radius is R211, right end Face outer radius is R20, right side inside radius is R21, length L163, frustum cone side and rotation axes of symmetry OO ' angle are θ4；7th Annulus outer radius is R20, inside radius R21, length L164；8th annulus outer radius is R20, inside radius R214, length be L165, high current diode outer cylinder total length is L16=L161+L162+L163+L164+L165.5th annulus outer radius R20Connect equal to left end Pulsed drive source outer conductor (for the cylinder) radius connect, inside radius R211Meet relationship R211=R20-7.5Δ1, length L161 =5 Δs1；It is R that an outer radius is dug up in 6th annulus left side211, inside radius R213, length h4Annulus, half outside the 6th annulus Diameter R212Meet relationship R212=R20-5Δ1, inside radius R213Meet relationship R213=R212-8Δ1, length L162=6 Δs1；Second circle Platform right side inside radius R21Meet relationship R21=R20-Δ1, length L163Meet rotary table surface and central axis OO' angle theta4=45 °； 7th annulus length L164It is determined according to practical set condition, generally takes 40~60mm；8th annulus inside radius R214Meet relationship R214=R20-20Δ1, length L165Meet relationship L165=5 Δs1.It should ensure that high current diode outer barrel space when actual design It is sufficiently large, to reserve subsequent placement getter, vacuum replenishment pump space and optimization high current diode outer barrel field distribution.By force Stream diode outer cylinder left side is provided with the 6th threaded hole connecting with second flange, is provided with second at the 6th threaded hole Rectangular seal slot is to install fluorine rubber circle sealing ring.6th annulus left end is provided with the second edge seal slot, the second edge seal slot Copper sealing ring is inside installed, for sealing second flange and high current diode outer cylinder junction.The 7th screw thread is arranged in 8th annulus Hole, for connecting right side high-power microwave source.The right side of 8th annulus is additionally provided with several bleeding points and facilitates subsequent vacuumize Deng operation.
At work, the right side of cone angle insulator is usually vacuum environment to the present invention, is pulse function on the left of cone angle insulator Rate source working media, such as liquid or SF6Gas.
Following technical effect can achieve using the present invention:
Present invention structure based on cone angle insulator, cone angle insulator right end can cut down ring realization and cathode by first Seat, ceramic ring encapsulation, cone angle insulator left end can cut down ring realization by second and encapsulate with first flange, and then pass through helicitic texture reality The existing structure-integrated encapsulation of high current diode ceramic vacuum interfacial insulator, improve tens ns of pulsewidth, several hundred kV single pulses and High current diode vacuum levels under the conditions of repetitive frequency pulsed, by optimization cone angle insulator angle of taper, along face length, add Add the measures such as grading shield and surface chamfering, has improved high current diode vacuum interface insulation system under magnetic field condition and be resistant to along face Electric field strength.The present invention can effectively improve magnetic field, tens ns pulsewidths, several hundred repetitive frequency pulsed condition of high voltage of kV magnitude Under, the vacuum levels and system overall compact degree of high current diode.
Detailed description of the invention
Fig. 1 is the present invention along OO ' overall structure forward direction schematic cross-sectional view；
Fig. 2 (a) is cone angle insulator 6 of the present invention along the positive cross-sectional view of OO '；Fig. 2 (b) is power line along EDS maps semi-section Scheme (OO ' above section)；Fig. 2 (c) is the magnetic line of force along EDS maps half-sectional view (OO ' above section)；
Fig. 3 is cathode block 1 of the present invention along the positive cutaway view Amplified image of OO '；
Fig. 4 is the first grading shield 2 of the invention along the positive cutaway view Amplified image of OO '；
Fig. 5 is the second grading shield 3 of the invention along the positive cutaway view Amplified image of OO '；
Fig. 6 (a) is inner conductor 4 of the present invention along the positive cutaway view Amplified image of OO '；Fig. 6 (b) is 4 left view of inner conductor of the present invention；
Fig. 7 is that the present invention first can cut down ring 5 along the positive cutaway view Amplified image of OO '；
Fig. 8 is ceramic ring 7 of the present invention along the positive cutaway view Amplified image of OO '；
Fig. 9 is first flange 9 of the present invention along the positive cross-sectional view of OO '；
Figure 10 is second flange 10 of the present invention along the positive cross-sectional view of OO '；
Figure 11 is high current diode outer cylinder 11 of the present invention along the positive cross-sectional view of OO '；
Figure 12 is present invention experiment output waveform.
Specific embodiment
Further description of the specific embodiments of the present invention with reference to the accompanying drawing.
Fig. 1 is the present invention along OO ' overall structure forward direction schematic cross-sectional view.The present invention is by cathode block 1, the first grading shield 2, Two grading shields 3, inner conductor 4, first, which can cut down ring 5, cone angle insulator 6, ceramic ring 7, second, can cut down ring 8, first flange 9, the second method Orchid 10, high current diode outer cylinder 11 form.The present invention is axisymmetry structure, and the central axis for defining cathode block 1 is rotation pair Claim axis OO'；It is left end close to one end of inner conductor 4, is right end close to one end of the second grading shield 3；Close to rotation axes of symmetry OO' Side be inside, far from rotation axes of symmetry OO' side be outside.
10 left end of second flange passes through threaded hole and high current by the external pulse power driving source outer conductor of threaded hole, right end The connection of 11 left end of diode outer cylinder；Cathode block 1, the first grading shield 2, the second grading shield 3, inner conductor 4, first can cut down ring 5, cone angle Insulator 6, ceramic ring 7, second can cut down ring 8, first flange 9 is respectively positioned on inside high current diode outer cylinder 11.4 left end of inner conductor passes through The external pulse power driving source inner conductor of claw-like structures 4011, right end are connected through a screw thread with cathode block 1；1 right end of cathode block with First grading shield, 2 left end is connected through a screw thread；First grading shield, 2 right end is connected through a screw thread with 3 left end of the second grading shield；Second When grading shield 3 works, the external high current diode cathode emitter of right end；First, which can cut down 5 outer surface of ring, passes through soldering connection porcelain 7 inner surface of ring and left side, first, which can cut down 5 inner surface of ring, connects 1 outer surface of cathode block by argon arc welding；Second can cut down outside ring 8 Surface connects 9 inner surface of first flange by argon arc welding；6 right side 601 of cone angle insulator and right side inner surface 602 and first 5 outer surface of ring can be cut down can cut down 8 inner surface of ring and pass through pricker by soldering connection, left side 603 and left side outer surface 604 and second Weldering connection, 6 right end of cone angle insulator can cut down ring 5 by first and encapsulate cathode block 1 and ceramic ring 7, and 6 left end of cone angle insulator passes through the Two, which can cut down ring 8, encapsulates first flange 9, final to realize based on cone angle insulator 6, and cathode block 1, first can cut down ring 5, ceramic ring 7, the Two can cut down ring 8, first flange 9 as the integrative packaging of slave part；9 left end of first flange passes through threaded hole and second flange 10 Connection, right end are connect by threaded hole with high current diode outer cylinder 11.
Cathode block 1, the first grading shield 2, third grading shield 3, inner conductor 4, first flange 9, second flange 10 and high current two Pole pipe outer cylinder 11 use non-magnetic rustproof Steel material, first can cut down ring 5 and second can cut down ring 8 using kovar alloy (i.e. 4J29 and 4J44 sections nickel cobalt (alloy)), cone angle insulator 6 and ceramic ring 7 use alumina ceramic material.
Fig. 2 (a) is cone angle insulator 6 of the present invention along the positive cross-sectional view of OO '；Fig. 2 (b) is power line along EDS maps semi-section Scheme (OO ' above section)；Fig. 2 (c) is the magnetic line of force along EDS maps half-sectional view (OO ' above section).Cone angle insulator 6 is hollow Truncated cone-shaped structure, right side inside radius R1Meet R1=R5+Δ1, R5For 1 first cylinder of cathode block, 101 radius, Δ1More than deformation Amount, Δ1Generally take 1~2mm, right side outer radius R2Meet R2=R1+D1, D1It is quiet by being resistant to for 6 sidewall thickness of cone angle insulator Compressive Strength P determines that tolerance isostatic pressing strength P is generally higher than 1MPa absolute pressure, thickness D1Meet relationship D1≥15mm；Outside left side Radius is R3, it is equal to 9 inside radius of second flange, left side inside radius is R4, meet R4=R3-0.5D1.For convenience of description, it is specified that 6 surface of cone angle insulator is itself and right side vacuum environment contact surface, is along the plane direction cone
6 frustum cone structure generatrix direction of angle insulator.6 side wall of cone angle insulator (is used along face and power flow flow directionIndicate) institute At angle theta1It is determined by electrostatic field distribution, to reduce edge flashing occurrence probability, angle theta1Following principle: two pole of high current should be met Pipe outer cylinder
(11) internal powerline power (is usedIndicate) it is distributed along OO ' axial symmetry, the ipsilateral power line of OO ' axis and cone angle insulator (6)
Along face angle theta2At 45 °, cone angle insulator (6) magnetic line of force near face (is usedIndicate) parallel cone angle insulator (6) Along the plane direction, cone angle insulator (6) is less than 30kV/cm along face maximum field intensity and electric field is uniform as far as possible along EDS maps；It is practical θ in design1It should be maintained between 125 ° to 145 °；Along face length L1The high current diode operation pulse as packaged by the present invention is high The tolerance electric field strength E of voltage V and cone angle insulator 6 (general value is chosen in 40~60kV/cm according to practical application condition) It determines, meets relationship L1≥V/E。
Fig. 3 is cathode block 1 of the present invention along the positive cutaway view Amplified image of OO '；Cathode block 1 is by the first cylinder 101 and the second cylinder 102 it is coaxially connected form, 101 radius of the first cylinder be R5, length L2；Second cylinder, 102 radius is R6, length L3。R5Root It is determined according to circulating current size, typically no less than 40mm, L2Satisfaction can effectively fix cone angle insulator 6 and it is convenient for assembly be Can, general satisfaction relationship L2=8 Δs1；R6According to three binding site region of shielded cathode 100 (cathode block 1, vacuum and cone angle insulator 6 intersections) electric field effect determination, meet relationship R6=R5+4Δ1；L3General satisfaction relationship L3=10 Δs1.To optimize two sections of cylinders 103 rounded corner of boundary of structure boundary surface electric field distribution, the second cylinder 102 and the first cylinder 101.Rounding angular dimensions root It is chosen according to electrostatic field analysis software ANSYS simulation result, it is desirable that 6 cathode of cone angle insulator, three binding site region 100 after rounded corner It is less than 30kV/cm along face electric field strength.First cylinder, 101 right end center, which is dug, the first threaded hole 1011, the first threaded hole 1011 Inside it is inserted with 2 left end of grading shield；Second cylinder, 102 left end center, which is dug, the second threaded hole 1021, is inserted in the second threaded hole 1021 4 right end of inner conductor.Consider welding deformation factor, 101 right end outer surface of the first cylinder cuts off an annulus, annulus thickness h1Meet Relationship h1=1.5 Δs1, length l1Meet relationship l1=5 Δs1。
Fig. 4 is the first grading shield 2 of the invention along the positive cutaway view Amplified image of OO '；First grading shield 2 is by 201 He of third cylinder 4th cylinder 202 is coaxially connected to be formed.201 radius of third cylinder is R7, length L4；4th cylinder, 202 radius is R8, length For L5.For 201 left end of third cylinder first centered on rotation axes of symmetry OO', diging up an outer radius is R71, inside radius R73、 Length is L41Annulus；Later centered on rotation axes of symmetry OO', then diging up an outer radius is R72, inside radius R73, it is long Degree is L42Annulus so that center leaves the first thin cylinder 2011.201 parameter of third cylinder is chosen mainly exhausted according to shielding cone angle Edge body 6 and 1 join domain surface field effect of cathode block and practical set situation, meet following relationship: R7=R71+7Δ1, R71 =R2+3Δ1, R72=R71-2Δ1, R73Meet the first thin cylinder 2011 and be just inserted into the first threaded hole 1011, considers that assembly is practical Situation, L4=L2+2Δ1, L41=L4-2Δ1, L42=2.5 Δs1.4th cylinder, 202 radius R8Meet relationship R8=R5+2Δ1, long Spend L5Practical set condition, general satisfaction L are considered as when selection5=2L2+ (2~5) Δ1It is practical, 201 surfaces externally and internally of third cylinder Equal rounded corner, rounding angular dimensions are chosen according to electrostatic field analysis software ANSYS simulation result, it is desirable that cone angle insulator after rounded corner 6 cathode, three binding site region 100 is less than 30kV/cm along face electric field strength, while not influencing 6 surface texture of cone angle insulator.The One thin 2011 outer surface of cylinder is provided with external screw thread, the first thin cylinder 2011 be inserted into the first threaded hole 1011 and with the first screw thread Hole 1011 is threadedly coupled.4th cylinder 202 digs first centre bore 2021, the first center centered on rotation axes of symmetry OO' 2021 radius of hole is equal to R73, 2021 depth of the first centre bore is h2, h2=L5-2Δ1, the first centre bore 2021 is provided with interior spiral shell Line is inserted with the second thin cylinder 3011 of the second grading shield 3, the second thin cylinder with the second grading shield 3 in the first centre bore 2021 3011 are threadedly coupled.
Fig. 5 is the second grading shield 3 of the invention along the positive cutaway view Amplified image of OO '；Second grading shield, 3 mentality of designing and first is Pressure cover is 2 almost the same, and the second grading shield 3 is by the 5th cylinder 301 and the 6th cylinder 302 is coaxially connected forms.5th cylinder 301 half Diameter is R10, length L7；6th cylinder, 303 radius is R11, length L8.5th cylinder, 301 left end is first with rotation axes of symmetry Centered on OO', diging up an outer radius is R10, inside radius R9, length L6Annulus；It is with rotation axes of symmetry OO' later Center, then diging up an outer radius is R101, inside radius R8, length L71Annulus so that center leaves the second thin cylinder 3011。R9Equal to 2021 radius of the first centre bore, R10It chooses can effectively prevent the electron back bombardment of emission of cathode exhausted to cone angle Subject to 6 surface of edge body, meet relationship R10≥Rc+ 1.5cm, wherein RcFor high current diode cathode emitter (for cylinder) half Diameter；L5Optimization 6 surface field of cone angle insulator should be taken into account when selection and avoids 11 right side of high current diode outer cylinder and second The surface field enhancing of 3 downstream connection cathode emission areas of pressure cover, there is no theoretical formula to illustrate, mainly according to design experiences at present. 5th cylinder 301 is provided with rounding corner structure to optimize 301 surface electric field distribution of the 5th cylinder, and rounded corner should ensure that down when choosing At angle and 11 right side surface field intensity of high current diode outer cylinder is less than 30kV/cm.6th cylinder, 302 radius R11Meet relationship R11=Rc+0.5Δ1, length L8It is subject to and 11 surface field of high current diode outer cylinder is not caused to enhance.5th cylinder 301 and the 6th It replaces right angle to connect using inclined-plane connection at 302 interface of cylinder, reduces surface field.R9Meet the second thin cylinder 3011 just It is inserted into the first centre bore 2021.Second thin cylinder 3011 is provided with external screw thread, is inside inserted into the first centre bore of the first grading shield 2 2021 realize threaded connection.6th cylinder 302 is centered on rotation axes of symmetry OO', one the second centre bore 3021 of digging, in second 3021 inner sidewall of heart hole is provided with internal screw thread, is inside inserted with high current diode cathode emitter.Second centre bore, 3021 diameter h3 Equal to the interpolation high current diode cathode emitter diameter of thread, depth l3Slightly larger than interpolation high current diode cathode emitter screw thread Length.
Fig. 6 (a) is inner conductor 4 of the present invention along the positive cutaway view Amplified image of OO '；Fig. 6 (b) is 4 left view of inner conductor of the present invention； 7th cylinder, 401 radius is R12, length L9；First rotary table, 402 upper bottom surface radius is R12, bottom radius surface be R13, length be L10；8th cylinder, 403 radius is R13, length L11.7th cylinder, 401 left end, which is provided in claw-like structures 4011, is inserted into pulse Power drive source inner conductor (for cylinder), 4011 processing method of claw-like structures is as follows: first in 401 left end of the 7th cylinder to revolve Centered on turning symmetry axis OO', diging up a radius is R121, length L91Cylinder, later along the circumferential direction by remaining annulus Uniformly it is divided into 2N parts, according to a excision portion in interval, difference resection length is L along the direction rotation axes of symmetry OO'91N part, N For integer, value is generally 12~24, length L91Relationship L should be met91=L9(2~5) Δ1.7th cylinder, 401 radius R12Deng In pulse power driving source inner conductor (for cylinder) radius；First rotary table, 402 upper bottom surface and side angle theta3General 40 ° of value ~60 °, go to the bottom radius surface R13It is determined according to practical set demand, general satisfaction relationship R13=(1.5~2) R12, length L10It chooses When should meet relationship L10=(R13-R12)/arctan(θ3)；8th cylinder, 403 length L11Guarantee to be inserted into claw-like structures (4011) The left side of external pulse power driving source inner conductor right end annulus and claw-like structures and pulse power driving source inner conductor right end Annulus bottom is concordant, radius R13It need to avoid local electric field strength enhancement effect, control three binding site region of cathode, 100 electric field strength Less than 30kV/cm, general 30~50mm of value.8th cylinder, 403 right end digs up one first centered on rotation axes of symmetry OO' A outer radius is R13, inside radius R132, length L111Annulus；Later centered on rotation axes of symmetry OO', then dig up one Outer radius is R131, inside radius R132, length L112Annulus so that there are the thin cylinder 4031 of third, radius R at center132Deng In 121 radius of the second threaded hole, radius R131Meet relationship R131=R132+2Δ1, length L111Value should meet the first rotary table 402 Cone angle insulator 6, length L are not contacted when assembly112Substantially equal to L111.8th cylinder, 403 right end uses rounded corner structure optimization Surface electric field distribution, chamfering parameter are chosen with cone angle insulator 6 big in electrostatic field analysis software ANSYS emulation along face electric field strength It is standard less than 30kV/cm.Thin 4031 surface of cylinder of third is provided with external screw thread, is inside inserted into the second threaded hole of cathode block 1 In 1021, it is threadedly coupled with the second threaded hole 1021.
Fig. 7 is that the present invention first can cut down ring 5 along the positive cutaway view Amplified image of OO '；First can to cut down ring 5 whole annular in shape, from It from left to right successively include the first annulus 501, the second annulus 502, third annulus 503, the 4th annulus 504.Half outside first annulus 501 Diameter is R14, inside radius R5, length L121；Second annulus, 502 outer radius is R2, inside radius be equal to R5, length L122；Third 503 outer radius of annulus is equal to R14, inside radius is equal to R5, length L123；4th annulus, 504 outer radius is R15, inside radius is equal to R5, meet relationship R15=R5+0.5Δ1, length L124；First can cut down 5 entire length L of ring12=L121+L122+L123+L124, respectively Partial-length is respectively L121=2 Δs1、L122=Δ1、L123=3 Δs1、L124=2 Δs1, R14It is exhausted with cone angle that ring 5 can be cut down according to first 6 practical set condition of edge body is chosen, general satisfaction relationship R5< R14≤R5+3Δ1.Is inserted into first cylinder 101 of cathode block 1 One can cut down ring 5, can cut down ring 5 for first by argon arc welding and be connected on cathode block 1；First, which can cut down 5 left end of ring, passes through the first circle 6 right side inner surface 602 of cone angle insulator is inserted into ring 501, until 502 left end surface of the second annulus and cone angle insulator 6 are right End face 601, first can cut down the first annulus 501 of ring 5 and the second annulus 502 by soldering connection cone angle insulator 6, finally bore Insulator 6 right end in angle can cut down ring 5 for first and be encapsulated on cone angle insulator 6, and cathode block 1 can cut down ring 5 by first and be encapsulated in cone On angle insulator 6.It is required according to working vacuum degree, cone angle insulator 6 and cathode block 1 (namely can be cut down at 5 soldering of ring with first) Sealing-in leak rate is required less than 5 × 10 at sealing-in-7Pa.L/s.Mechanical support needed for third annulus 503 provides the second annulus 502, the The reserved soldering encapsulation of four annulus 504 encapsulates thermal deformation space with argon arc welding, and 7 inner surface of ceramic ring does not contact the 4th circle after meeting welding 504 outer surface of ring.
Fig. 8 is ceramic ring 7 of the present invention along the positive cutaway view Amplified image of OO '；Ceramic ring 7 is annular shape, and inside radius insulate equal to cone angle 6 right side inside radius R of body1, outer radius is equal to 6 right side outer radius R of cone angle insulator2, length L13=3 Δs1.Inside ceramic ring 7 Insertion first can cut down the third annulus 503 of ring 5, until 502 right side of the second annulus, ceramic ring 7 and first are close in 7 left side of ceramic ring Ring 5 can be cut down by soldering connection, and then be encapsulated on cone angle insulator 6.7 main function of ceramic ring is to guarantee the sealing-in uniformity and strong Degree offsets stress of sealing.
Second can cut down ring 8 as annular shape, and inside radius is equal to 9 inside radius R of first flange16, outer radius is equal to R16+Δ1, length Equal to 9 length L of first flange14.Second can cut down 8 sets of ring on 6 left side outer surface 604 of cone angle insulator, and second can cut down 8 right side of ring End face is concordant with 6 left side outer surface 604 of cone angle insulator, and second, which can cut down ring 8, is connect by soldering with cone angle insulator 6, makes Second can cut down ring 8 and be fixed on 6 left end of cone angle insulator；Second, which can cut down ring 8, is coaxially nested in first flange 9, and second can cut down ring 8 Left side is concordant with 9 left side of first flange, and second, which can cut down 8 outer surface of ring, passes through argon arc welding with 9 inner surface of first flange, will Second can cut down ring 8 is packaged together with first flange 9；Finally in 6 left end of cone angle insulator, realize cone angle insulator 6 to second The integrative packaging of ring 8 and first flange 9 can be cut down.It is required according to working vacuum degree, cone angle insulator 6 and second can cut down 8 envelope of ring Place's sealing-in leak rate is connect generally to require less than 5 × 10-7Pa.L/s。
Fig. 9 is first flange 9 of the present invention along the positive cross-sectional view of OO '；First flange 9 is annular shape, inside radius R16, outer half Diameter is R17, R17Equal to 11 the 5th annulus of left side of high current diode outer cylinder, 1101 inside radius R211, length L15, L14Equal to high current 11 the 5th annulus of left side of diode outer cylinder, 1101 length L161With excision ring part length h at the 6th annulus 11024The sum of. 9 left side of first flange is provided with 2 third threaded holes 901, connect for the 4th threaded hole 1001 with second flange 10.The One flange, 9 right side is provided with the first edge seal slot 902, assembles for placing first flange 9 and high current diode outer cylinder 11 When the copper sealing ring that uses；9 left side of first flange is provided with the first rectangular seal slot 903, for placing first flange 9 and The fluorine rubber circle or copper sealing ring that two flanges 10 use when assembling improve system working vacuum level.It is coaxial nested in first flange 9 There is second can cut down ring 8,9 left side of first flange can cut down that 8 left side of ring is concordant, and 9 inner surface of first flange and second can with second 8 outer surface of ring is cut down to connect by argon arc welding.
Figure 10 is second flange 10 of the present invention along the positive cross-sectional view of OO '；Second flange 10 is annular shape, outer radius R19, R19Equal to 11 outer radius R of high current diode outer cylinder20, inside radius R18, ring 8, the can be cut down for optimization cone angle insulator 6 and second One flange, 9 junction surface field, R18Meet relationship R18=R4-5Δ1, length L15, according to the pulse power being connect with left side Driving source outer conductor cooperates actual demand to choose, general satisfaction relationship L15=2.5 Δs1.10 inner surface of second flange passes through rounding Corner structure optimizing surface field distribution, rounding angular dimensions should meet surface field intensity at chamfering and be less than 30kV/cm.Second flange 10 right sides are provided with the 4th threaded hole 1001, for assembling first flange 9；Left side is provided with the 5th threaded hole 1002, uses It is connect in the 6th threaded hole 1106 of high current diode outer cylinder 11 and upstream pulse power drive source outer conductor Screw assembly.
Figure 11 is high current diode outer cylinder 11 of the present invention along the positive cross-sectional view of OO '；High current diode outer cylinder 11 is whole in circle Ring-type successively includes the 5th annulus 1101, the 6th annulus 1102, the second rotary table 1103, the 7th annulus 1104 and the from left to right Eight annulus 1105.5th annulus, 1101 outer radius is R20, inside radius R211, length L161；6th annulus, 1102 outer radius is R212, inside radius R213, length L162；Second rotary table, 1103 left side outer radius is R212, left side inside radius is R211, right End face outer radius is R20, right side inside radius is R21, length L163, frustum cone side and rotation axes of symmetry OO ' angle are θ4；The Seven annulus, 1104 outer radius is R20, inside radius R21, length L164；8th annulus, 1105 outer radius is R20, inside radius be R214, length L165, high current diode outer cylinder total length is L16=L161+L162+L163+L164+L165.Half outside 5th annulus 1101 Diameter R20Equal to pulsed drive source outer conductor (for cylinder) radius of left end connection, inside radius R211Meet relationship R211=R20- 7.5Δ1, length L161=5 Δs1；It is R that an outer radius is dug up in 6th annulus, 1102 left side211, inside radius R213, length be h4Annulus, 1102 outer radius R of the 6th annulus212Meet relationship R212=R20-5Δ1, inside radius R213Meet relationship R213=R212- 8Δ1, length L162=6 Δs1；Second rotary table, 1103 right side inside radius R21Meet relationship R21=R20-Δ1, length L163Meet circle Platform surface and central axis OO' angle theta4=45 °；7th annulus, 1104 length L164It is determined according to practical set condition, generally takes 40 ~60mm；8th annulus, 1105 inside radius R214Meet relationship R214=R20-20Δ1, length L165Meet relationship L165=5 Δs1.It is real Border should ensure that 11 inner spaces of high current diode outer cylinder are sufficiently large when designing, to reserve subsequent placement getter, vacuum replenishment pump Space and optimization 11 internal electric field of high current diode outer cylinder distribution.11 left side of high current diode outer cylinder is provided with and second flange 6th threaded hole 1106 of 10 connections, is provided with the second rectangular seal slot 1107 at the 6th threaded hole 1106 to install fluorine rubber Enclose sealing ring.6th annulus, 1102 left end is provided with the second edge seal slot 1108, is equipped in the second edge seal slot 1108 Copper sealing ring, for sealing second flange 9 and 11 junction of high current diode outer cylinder.The 7th threaded hole is arranged in 8th annulus 1105 1109, for connecting right side high-power microwave source.The right side of 8th annulus 1105 is additionally provided with several 11010 convenience of bleeding point It is subsequent the operation such as to vacuumize.
A high current diode ceramic package vacuum interface insulation system (embodiment is prepared for by structure of the present invention 1), realizing driving has the one makeup of high current diode ceramic package vacuum interface insulation system of magnetic field high-power microwave source Match.1 corresponding size of embodiment are as follows: R1=20mm, R2=32mm, R3=151.5mm, R4=145.5mm, R5=18.5mm, R6= 24.5mm R7=47mm, R71=36.5mm, R72=33.5mm, R73=10mm, R8=21.5mm, R9=10mm, R10=106mm, R101=86mm, R11=30mm, R12=26mm, R121=25mm, R13=42mm, R131=26mm, R132=20mm, R14= 20.25mm R15=19.25mm, R16=151.5mm, R17=210mm, R18=235mm, R19=138mm, R20=235mm, R21 =233.5mm, R211=223.75mm, R212=227.5mm, R21=215.5mm, R214=205mm, Rc=29.25mm, L1= 166mm, L2=12mm, L3=15mm, L4=15mm, L41=12mm, L42=3.75mm, L5=41.5mm, L6=8mm, L7= 30mm, L71=15mm, L8=30mm, L9=25mm, L91=20mm, L10=33mm, L11=87mm, L111=9.5mm, L112= 10mm, L12=12mm, L121=3mm, L122=1.5mm, L123=4.5mm, L124=3mm, L13=4.5mm, L14=18.5mm, L15=3.75mm, L16=72mm, L161=7.5mm, L162=9mm, L163=7.5mm, L164=40.5mm, L165=7.5mm, Δ1 =1.5mm, D1=12mm, θ1=135 °, θ2=45 °, θ3=45 °, θ4=45 °, h1=2.25mm, h2=12mm, h3=10mm, h4=1.5mm, l1=7.5mm.Figure 12 is that embodiment 1 is high in high current diode operation pulse high-voltage V=630kV, working pulse The collected Current Voltage of the present invention of oscillograph under voltage repetition rate 10Hz, high current diode externally-applied magnetic field 0.7T experiment condition Waveform diagram, C1, C2 are voltage waveform and current waveform respectively in figure, and ordinate is amplitude, and every lattice are 1V, and abscissa is the time, Every lattice are 200ns.As can be seen from Figure 12: voltage, current waveform consistency and repeatability is good, do not occur pulsewidth shorten it is existing As voltage pulse width is greater than 60ns, and average voltage amplitude is more than 630kV after conversion, does not occur edge flashing phenomenon, High-Power Microwave Source vacuum degree is better than 5 × 10-4Pa, and system overall compact.It can be seen that the present invention improves tens ns of pulsewidth, several hundred kV single pulses With it is repetitive frequency pulsed under the conditions of high current diode vacuum levels, improved high current diode vacuum interface under magnetic field condition Insulation system is resistant to electric field strength along face.
The above is only a preferred embodiment of the present invention, and protection scope of the present invention is not only limited to above-mentioned reality Example is applied, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.

Claims (17)

1. a kind of high current diode cone ceramic package vacuum interface insulation system, it is characterised in that high current diode cone ceramics Encapsulated vacuum interfacial insulator structure be axisymmetry structure, by cathode block (1), the first grading shield (2), the second grading shield (3), Inner conductor (4), first can cut down ring (5), cone angle insulator (6), ceramic ring (7), second can cut down ring (8), first flange (9), second Flange (10), high current diode outer cylinder (11) composition；The central axis for defining cathode block (1) is rotation axes of symmetry OO', is led close to interior One end of body (4) is left end, and one end close to the second grading shield (3) is right end, and the side close to rotation axes of symmetry OO' is interior Side, the side far from rotation axes of symmetry OO' are outside；Second flange (10) left end passes through the external pulse power driving source of threaded hole Outer conductor, right end are connect by threaded hole with high current diode outer cylinder (11) left end；Cathode block (1), the first grading shield (2), Two grading shields (3), inner conductor (4), first can cut down ring (5), cone angle insulator (6), ceramic ring (7), second can cut down ring (8), first It is internal that flange (9) is respectively positioned on high current diode outer cylinder (11)；The external pulse power driving source inner conductor in inner conductor (4) left end, it is right End is connected through a screw thread with cathode block (1)；Cathode block (1) right end is connected through a screw thread with the first grading shield (2) left end；First Pressure cover (2) right end is connected through a screw thread with the second grading shield (3) left end；The external high current diode yin of second grading shield (3) right end Pole emitter；First can cut down ring (5) outer surface by soldering connection ceramic ring (7) inner surface and left side, and first can cut down ring (5) Inner surface connects cathode block (1) outer surface by argon arc welding；Second, which can cut down ring (8) outer surface, connects first flange by argon arc welding (9) inner surface；Cone angle insulator (6) right side (601) and right side inner surface (602) can cut down ring (5) outer surface with first and lead to Soldering connection is crossed, cone angle insulator (6) left side (603) and left side outer surface (604) can cut down ring (8) inner surface with second and lead to Soldering connection is crossed, cone angle insulator (6) right end can cut down ring (5) encapsulation cathode block (1) and ceramic ring (7), cone angle insulation by first Body (6) left end can cut down ring (8) encapsulation first flange (9) by second, final to realize based on cone angle insulator (6), cathode block (1), first can cut down ring (5), ceramic ring (7), second can cut down ring (8), first flange (9) be slave part integrative packaging；The One flange (9) left end is connect by threaded hole with second flange (10), and right end passes through threaded hole and high current diode outer cylinder (11) Connection；
Cone angle insulator (6) is hollow round table shape structure, right side inside radius R1Meet R1=R5+Δ1, R5For cathode block (1) One cylinder (101) radius, Δ1For deformation surplus, right side outer radius R2Meet R2=R1+D1, D1For cone angle insulator (6) side wall Thickness is determined by tolerance isostatic pressing strength P；Left side outer radius is R3, it is equal to second flange (9) inside radius, left side inside radius For R4, meet R4=R3-0.5D1；Cone angle insulator (6) surface is itself and right side vacuum environment contact surface, is along the plane direction cone angle Insulator (6) frustum cone structure generatrix direction；Cone angle insulator (6) side wall flows to angle θ along face and power flow1By electrostatic field Distribution determination, θ1Meet: high current diode outer cylinder (11) internal powerline power is distributed along OO ' axial symmetry, the ipsilateral power line of OO ' axis With cone angle insulator (6) along face angle theta2At 45 °, parallel cone angle insulator (6) edge of cone angle insulator (6) magnetic line of force near face Face direction, cone angle insulator (6) is less than 30kV/cm along face maximum field intensity and electric field is uniform along EDS maps；Along face length L1 Meet relationship L1>=V/E, V are high current diode operation pulse high-voltage, and E is the tolerance electric field strength of cone angle insulator (6)；
Cathode block (1) is by the first cylinder (101) and the second cylinder (102) is coaxially connected forms, and the first cylinder (101) radius is R5, Length is L2；Second cylinder (102) radius is R6, length L3；R5It is determined according to circulating current size, L2Satisfaction can effectively be consolidated Determine cone angle insulator (6) and convenient for assembly, R6According to three binding site region (100) i.e. of shielded cathode cathode block (1), vacuum It is determined with the electric field effect of cone angle insulator (6) intersection；First cylinder (101) right end center, which is dug, the first threaded hole (1011), grading shield (2) left end is inserted in the first threaded hole (1011)；Second cylinder (102) left end center, which is dug, the second screw thread Hole (1021), the second threaded hole (1021) is interior to be inserted with inner conductor (4) right end；
First grading shield (2) is by third cylinder (201) and the 4th cylinder (202) is coaxially connected forms；Third cylinder (201) radius For R7, length L4；4th cylinder (202) radius is R8, length L5；Third cylinder (201) left end is first with rotation axes of symmetry Centered on OO', diging up an outer radius is R71, inside radius R73, length L41Annulus；It is with rotation axes of symmetry OO' later Center, then diging up an outer radius is R72, inside radius R73, length L42Annulus so that center leaves the first thin cylinder (2011)；First thin cylinder (2011) outer surface is provided with external screw thread, and the first thin cylinder (2011) is inserted into the first threaded hole (1011) it is threadedly coupled in and with the first threaded hole (1011)；4th cylinder (202) digs one centered on rotation axes of symmetry OO' First centre bore (2021), the first centre bore (2021) radius are equal to R73, the first centre bore (2021) is provided with internal screw thread, and first The second thin cylinder (3011) of the second grading shield (3), the second thin cylinder with the second grading shield (3) are inserted in centre bore (2021) (3011) it is threadedly coupled；
Second grading shield (3) is by the 5th cylinder (301) and the 6th cylinder (302) is coaxially connected forms；5th cylinder (301) radius For R10, length L7；6th cylinder (302) radius is R11, length L8；5th cylinder (301) left end is first with rotational symmetry Centered on axis OO', diging up an outer radius is R101, inside radius R9, length L6Annulus；Later with rotation axes of symmetry OO' Centered on, then diging up an outer radius is R101, inside radius R8, length L71Annulus so that center leaves the second thin cylinder (3011)；R9Equal to the first centre bore (2021) radius R73, R10It chooses can effectively prevent the electron back bombardment of emission of cathode from arriving Subject to cone angle insulator (6) surface, L7Optimization cone angle insulator (6) surface field should be taken into account when selection and avoids high current diode The enhancing of the surface field of outer cylinder (11) right side and the second grading shield (3) downstream connection cathode emission area；Length L8Not cause Subject to the enhancing of high current diode outer cylinder (11) surface field；Using oblique at 5th cylinder (301) and the 6th cylinder (302) interface Face connection；R9Meet the second thin cylinder (3011) and is just inserted into the first centre bore (2021)；Second thin cylinder (3011) is provided with External screw thread, the first centre bore (2021) for being inside inserted into the first grading shield (2), which is realized, to be threadedly coupled；6th cylinder (302) is to rotate Centered on symmetry axis OO', second centre bore (3021) is dug, the second centre bore (3021) depth and diameter are respectively l3And h3, Second centre bore (3021) inner sidewall is provided with internal screw thread, is inside inserted with high current diode cathode emitter；
Inner conductor (4) is successively made of the 7th cylinder (401), the first rotary table (402) and the 8th cylinder (403) from left to right；The Seven cylinders (401) radius is R12, length L9；First rotary table (402) upper bottom surface radius is R12, bottom radius surface be R13, length For L10；8th cylinder (403) radius is R13, length L11；7th cylinder (401) left end is provided in claw-like structures (4011) It is inserted into pulse power driving source inner conductor；7th cylinder (401) radius R12Equal to pulse power driving source inner conductor radius；First Rotary table (402) side and OO' angle are θ3, go to the bottom radius surface R13It is determined according to practical set demand；8th cylinder (403) length L11Guarantee the left side that external pulse power driving source inner conductor right end annulus and claw-like structures are inserted into claw-like structures (4011) It is concordant with pulse power driving source inner conductor right end annulus bottom, radius R13Value need to avoid local electric field strength enhancement effect, It controls three binding site region (100) electric field strength of cathode and is less than 30kV/cm；8th cylinder (403) right end is first with rotational symmetry Centered on axis OO', diging up an outer radius is R13, inside radius R132, length L111Annulus；Later with rotation axes of symmetry Centered on OO', then diging up an outer radius is R131, inside radius R132, length L112Annulus so that there are thirds at center Thin cylinder (4031)；The thin cylinder of third (4031) surface is provided with external screw thread, is inside inserted into the second threaded hole of cathode block (1) (1021) it in, is threadedly coupled with the second threaded hole (1021)；
First can to cut down ring (5) whole annular in shape, from left to right successively includes the first annulus (501), the second annulus (502), the Three annulus (503), the 4th annulus (504)；First annulus (501) outer radius is R14, inside radius is equal to R5, length L121；Second Annulus (502) outer radius is equal to R2, inside radius be equal to R5, length L122；Third annulus (503) outer radius is equal to R14, inside radius Equal to R5, length L123；4th annulus (504) outer radius is R15, inside radius is equal to R5, length L124；First can cut down ring (5) Entire length L12=L121+L122+L123+L124；First can cut down the first cylinder (101) that cathode block (1) is inserted in ring (5), and first Ring (5) can be cut down to be connected on cathode block (1) by argon arc welding；First can cut down that insert in cone angle in the first annulus (501) of ring (5) exhausted Edge body (6) right side inner surface (602), until the second annulus (502) left end surface and cone angle insulator (6) right side (601) It is close to, first can cut down the first annulus (501) of ring (5) and the second annulus (502) by soldering connection on cone angle insulator (6) right side End is encapsulated on cone angle insulator (6) so that cathode block (1) can cut down ring (5) by first；Third annulus (503) provides second Mechanical support needed for annulus (502), the function of the 4th annulus (504) are that reserved soldering encapsulation and argon arc welding encapsulation thermal deformation are empty Between, ceramic ring (7) inner surface does not contact the 4th annulus (504) outer surface after meeting welding；
Ceramic ring (7) is annular shape, and inside radius is equal to cone angle insulator (6) right side inside radius R1, outer radius is equal to cone angle insulator (6) right side outer radius R2, length L13；The third annulus (503) of ring (5) can be cut down by being inserted with first inside ceramic ring (7), until porcelain The second annulus (502) right side is close in ring (7) left side, and ceramic ring (7) can cut down ring (5) with first and pass through soldering connection, Jin Erfeng It is attached on cone angle insulator (6)；
Second can cut down ring (8) as annular shape, and inside radius is equal to first flange (9) inside radius R16, outer radius is equal to R16+Δ1, length Equal to first flange (9) length L14；Second, which can cut down ring (8), covers on cone angle insulator (6) left side outer surface (604), and second It is concordant with cone angle insulator (6) left side outer surface (604) right end that ring (8) right side can be cut down, second, which can cut down ring (8), passes through soldering It is connect with cone angle insulator (6), so that second can cut down ring (8) and be fixed on cone angle insulator (6) left end；Second can cut down ring (8) together Axis is nested in first flange (9), and second can cut down that ring (8) left side is concordant with first flange (9) left side, and second can cut down ring (8) Outer surface and first flange (9) inner surface can be cut down ring (8) for second and are packaged together with first flange (9) by argon arc welding； Finally in cone angle insulator (6) left end, the integration that cone angle insulator (6) can cut down ring (8) and first flange (9) to second is realized Encapsulation；
First flange (9) is annular shape, inside radius R16, outer radius R17, R17Equal to high current diode outer cylinder (11) left side 5th annulus (1101) inside radius R211, length L14；First flange (9) left side is provided with 2 third threaded holes (901), uses It is connect in the 4th threaded hole (1001) with second flange (10)；First flange (9) right side is provided with the first edge seal slot (902), the copper sealing ring used when for placing first flange (9) and high current diode outer cylinder (11) assembly；First flange (9) Left side is provided with the first rectangular seal slot (903), uses when first flange (9) and second flange (10) are assembled for placing Fluorine rubber circle or copper sealing ring；Second is coaxially nested in first flange (9) can cut down ring (8)；
Second flange (10) is annular shape, outer radius R19, R19Equal to high current diode outer cylinder (11) outer radius R20, inside radius For R18, length L15；Second flange (10) right side is provided with the 4th threaded hole (1001), for assembling first flange (9)； Left side is provided with the 5th threaded hole (1002), is used for and the 6th threaded hole (1106) of high current diode outer cylinder (11) and upstream The connection of pulse power driving source outer conductor Screw assembly；
High current diode outer cylinder (11) is whole annular in shape, from left to right successively includes the 5th annulus (1101), the 6th annulus (1102), the second rotary table (1103), the 7th annulus (1104) and the 8th annulus (1105)；5th annulus (1101) outer radius is R20, inside radius R211, length L161；6th annulus (1102) outer radius is R212, inside radius R213, length L162；Second Rotary table (1103) left side outer radius is R212, left side inside radius is R211, right side outer radius is R20, right side inside radius is R21, length L163, frustum cone side and rotation axes of symmetry OO ' angle are θ4；7th annulus (1104) outer radius is R20, inside radius For R21, length L164；8th annulus (1105) outer radius is R20, inside radius R214, length L165, high current diode outer cylinder (11) total length is L16=L161+L162+L163+L164+L165；It is R that an outer radius is dug up in 6th annulus (1102) left side211, it is interior Radius is R213, length h4Annulus；High current diode outer cylinder (11) left side is provided with connect with second flange (10) Six threaded holes (1106), it is close to install fluorine rubber circle to be provided with the second rectangular seal slot (1107) at the 6th threaded hole (1106) Seal；6th annulus (1102) left end is provided with the second edge seal slot (1108), installation in the second edge seal slot (1108) There is copper sealing ring, for sealing second flange (9) and high current diode outer cylinder (11) junction；8th annulus (1105) setting the Seven threaded holes (1109), for connecting right side high-power microwave source；8th annulus (1105) if right side be additionally provided with dry tap Port (11010).
2. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The cathode block (1), the first grading shield (2), third grading shield (3), inner conductor (4), first flange (9), second flange (10) With high current diode outer cylinder (11) use non-magnetic rustproof Steel material, first can cut down ring (5) and second can cut down ring (8) use can cut down conjunction Gold, cone angle insulator (6) and ceramic ring (7) use alumina ceramic material.
3. a kind of high current diode cone ceramic package vacuum interface insulation system as claimed in claim 2, it is characterised in that The kovar alloy refers to 4J29 and 4J44 sections nickel cobalt (alloy).
4. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The deformation surplus Δ11~2mm, tolerance isostatic pressing strength P is taken to be greater than 1MPa absolute pressure, cone angle insulator (6) sidewall thickness D1 Meet D1≥15mm；θ1Value is between 125 ° to 145 °；The tolerance electric field strength E value of cone angle insulator (6) be 40~ 60kV/cm。
5. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The R5Not less than 40mm, L2Meet L2=8 Δs1, R6Meet R6=R5+4Δ1, L3Meet L3=10 Δs1。
6. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The boundary (103) and the equal rounded corner of third cylinder (201) surfaces externally and internally of second cylinder (102) and the first cylinder (101), Rounding angular dimensions is chosen according to electrostatic field analysis software ANSYS simulation result, it is desirable that cone angle insulator (6) cathode three after rounded corner Binding site region (100) is less than 30kV/cm along face electric field strength；5th cylinder (301) is provided with rounding corner structure, rounded corner ginseng Number meets the 5th cylinder (301) surface and high current diode outer cylinder (11) right side surface field intensity is less than 30kV/cm；8th Cylinder (403) right end uses rounding corner structure, and rounding angular dimensions meets exhausted with cone angle big in electrostatic field analysis software ANSYS emulation Edge body (6) is less than 30kV/cm along face electric field strength；Second flange (10) inner surface rounded corner, after rounding angular dimensions meets chamfering Second flange (10) inner surface electric field strength is less than 30kV/cm.
7. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that First cylinder (101) the right end outer surface cuts off an annulus, annulus thickness h1Meet relationship h1=1.5 Δs1, length l1It is full Sufficient relationship l1=5 Δs1。
8. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that Third cylinder (201) parameter meets following relationship: R7=R71+7Δ1, R71=R2+3Δ1, R72=R71-2Δ1, R73Meet First thin cylinder (2011) is just inserted into the first threaded hole (1011), L4=L2+2Δ1, L41=L4-2Δ1, L42=2.5 Δs1；The Four cylinders (202) radius R8Meet relationship R8=R5+2Δ1, length L5Consider that mechanical strength and assembly are practical when selection, in first Heart hole (2021) depth h2Meet h2=L5-2Δ1。
9. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The parameter of second grading shield (3) meets: R10Meet R10≥Rc+ 1.5cm, RcFor external high current diode cathode emitter Radius；L7Value is between 20~40mm；R11Meet R11=Rc+0.5Δ1, length L8Value is between 20~40mm；In second Heart hole (3021) diameter h3Equal to the interpolation high current diode cathode emitter diameter of thread, depth l3Greater than two pole of interpolation high current Tube cathode emitter reach.
10. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that Claw-like structures (4011) processing method is as follows: first in the 7th cylinder (401) left end centered on rotation axes of symmetry OO', Diging up a radius is R121, length L91Cylinder, remaining annulus is uniformly along the circumferential direction divided into 2N parts later, according to A excision in interval is a, along the direction rotation axes of symmetry OO', difference resection length is L91N part, N is integer, value is 12~ 24, length L91Meet relationship L91=L9(2~5) Δ1。
11. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The parameter of the inner conductor (4) meets: θ340 °~60 ° of value, go to the bottom radius surface R13Meet R13=(1.5~2) R12, length L10 Meet L10=(R13-R12)/arctan(θ3)；8th cylinder (403) length L11The present invention and external pulse when equal to practical set Power drive source inner conductor distance, radius R1330~50mm of general value；Radius R132Equal to the second threaded hole (1021) radius, Radius R131Meet R131=R132+2Δ1, length L111Value does not contact cone angle insulator when meeting the first rotary table (402) assembly (6), length L112Equal to L111。
12. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that Described first, which can cut down ring (5) parameter, meets R15=R5+0.5Δ1, L121=2 Δs1、L122=Δ1、L123=3 Δs1、L124=2 Δs1, R14Meet relationship R5< R14≤R5+3Δ1。
13. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The cone angle insulator (6) and cathode block (1), the second sealing-in leak rate that can be cut down at the sealing-in of ring (8) are required to less than 5 × 10- 7Pa.L/s。
14. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that Ceramic ring (7) the length L13=3 Δs1；The length L of the first flange (9)14Equal to high current diode outer cylinder (11) left side Five annulus (1101) length L161With excision ring part length h at the 6th annulus (1102)4The sum of；The second flange (10) Inside radius R18, meet R18=R4-5Δ1, length L15Meet L15=2.5 Δs1。
15. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that 5th annulus (1101) the outer radius R20Equal to the pulsed drive source outer conductor radius of left end connection, inside radius R211Meet and closes It is R211=R20-7.5Δ1, length L161=5 Δs1；6th annulus (1102) outer radius R212Meet R212=R20-5Δ1, inside radius R213Meet R213=R212-8Δ1, length L162=6 Δs1；Second rotary table (1103) right side inside radius R21Meet R21=R20- Δ1, length L163Meet rotary table surface and central axis OO' angle theta4=45 °；7th annulus (1104) length L164Take 40~60mm； 8th annulus (1105) inside radius R214Meet R214=R20-20Δ1, length L165Meet L165=5 Δs1。
16. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that It is vacuum environment on the right side of the cone angle insulator (6), is pulse power supply working media on the left of cone angle insulator (6).
17. a kind of high current diode cone ceramic package vacuum interface insulation system as described in claim 1, it is characterised in that The θ1It is maintained between 125 ° to 145 °.
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CN114649655A (en) * 2022-02-18 2022-06-21 中国电子科技集团公司第二十九研究所 Coaxial ceramic packaging insulation interface structure

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CN108364731A (en) * 2018-02-01 2018-08-03 清华大学 Based on charge regulation and control and the novel basin-shaped insulator actively to dissipate
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