CN109449301B - Evaporation method of OLED display device, OLED display device and evaporation equipment - Google Patents
Evaporation method of OLED display device, OLED display device and evaporation equipment Download PDFInfo
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- CN109449301B CN109449301B CN201811095904.1A CN201811095904A CN109449301B CN 109449301 B CN109449301 B CN 109449301B CN 201811095904 A CN201811095904 A CN 201811095904A CN 109449301 B CN109449301 B CN 109449301B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/15—Hole transporting layers
Abstract
The invention discloses an evaporation method of an OLED display device, the OLED display device and evaporation equipment, wherein a hole transmission layer, a light emitting layer and an electron transmission layer are combined in an evaporation chamber for evaporation, or the hole transmission layer and the electron transmission layer are split, and then part of the hole transmission layer, the electron transmission layer and part of the electron transmission layer are combined and evaporated, so that the waiting time between different corresponding functional layers evaporated in the same evaporation chamber is reduced, the injection and transmission capacity and the recombination efficiency between current carriers are enhanced, the performance of the device is further enhanced, the yield of products is increased, meanwhile, only part of the functional layers are combined, the influence on the production beat is small, and the higher productivity can be ensured at the same time.
Description
Technical Field
The invention relates to the field of OLED display device preparation, in particular to an evaporation method of an OLED display device, the OLED display device and evaporation equipment.
Background
The OLED display technology is receiving much attention from the market as an emerging display technology, but the OLED display device has a higher cost than other display devices due to its low yield in mass production.
In the mass production process of the current OLED display device, the evaporation part is used as a core process section, and a common scheme of the evaporation section is shown in fig. 1, that is, only one functional layer is evaporated in each evaporation chamber, so that the production tact (i.e., T1-T6) can be reduced, and the overall productivity can be increased.
Disclosure of Invention
In view of the above, the present invention provides an evaporation method for an OLED display device to improve the yield of OLED display.
The technical scheme provided by the invention is as follows:
the invention provides an evaporation method of an OLED display device in a first aspect, which comprises the following steps:
at least a first carrier transmission layer, a light-emitting layer, a second carrier transmission layer and a second electrode are sequentially evaporated on the first electrode; the first carrier transport layer comprises a hole transport layer, the second carrier transport layer comprises an electron transport layer, and the hole transport layer, the luminescent layer and the electron transport layer are evaporated in the same evaporation chamber.
Optionally, the hole transport layer, the light emitting layer, and the electron transport layer are sequentially and continuously evaporated in the same evaporation chamber
Optionally, the second carrier transport layer further includes an electron injection layer, and the electron injection layer and the second electrode are evaporated in the same evaporation chamber, preferably, the electron injection layer and the second electrode are sequentially and continuously evaporated in the same evaporation chamber; preferably, the second electrode and the light-emitting layer are not deposited in the same deposition chamber.
Optionally, the first carrier transport layer further comprises a hole injection layer, wherein the hole injection layer and the light emitting layer are not evaporated in the same evaporation chamber.
According to a second aspect, the present invention provides an evaporation method for an OLED display device, including:
at least a first carrier transmission layer, a light-emitting layer, a second carrier transmission layer and a second electrode are sequentially evaporated on the first electrode; wherein the first carrier transport layer comprises a hole transport layer and the second carrier transport layer comprises an electron transport layer;
the hole transport layer comprises a first hole transport layer far away from the luminescent layer and a second hole transport layer close to the luminescent layer, the electron transport layer comprises a first electron transport layer close to the luminescent layer and a second electron transport layer far away from the luminescent layer, and the second hole transport layer, the luminescent layer and the first electron transport layer are evaporated in the same evaporation chamber;
preferably, the second hole transport layer, the light emitting layer, and the first electron transport layer are sequentially and continuously deposited in the same deposition chamber.
Preferably, the first hole transport layer and the second electron transport layer are not evaporated in the same evaporation chamber as the light emitting layer.
Optionally, the first carrier transport layer further includes a hole injection layer, and the hole injection layer and the light emitting layer are not evaporated in the same evaporation chamber.
According to a third aspect, embodiments of the present invention provide an OLED display device, including:
a substrate; an encapsulation layer, and a functional layer disposed between the substrate and the encapsulation layer;
the functional layer is prepared by any one of the OLED display device evaporation methods.
According to a fourth aspect, an embodiment of the present invention provides an evaporation apparatus, including:
the evaporation equipment comprises a plurality of evaporation chambers, wherein at least one evaporation chamber is internally provided with an evaporation nozzle corresponding to raw materials of the hole transport layer, the luminescent layer and the electron transport layer.
The technical scheme of the invention has the following advantages:
according to the evaporation method of the OLED display device, the OLED display device and the electronic equipment, the hole transport layer, the light emitting layer and the electron transport layer are combined in the evaporation chamber for evaporation, so that the waiting time between different corresponding functional layers evaporated in the same evaporation chamber can be reduced; the three layer structures are evaporated in the same evaporation chamber, and evaporation materials are doped with each other in a small amount, so that the performance of the OLED display device is not influenced, the injection and transmission capacities and the recombination efficiency of current carriers are enhanced, and the performance of the device is further enhanced; meanwhile, only partial functional layers are combined, so that the influence on the production beat is small, and high productivity can be ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a flow chart of a specific example of a prior art evaporation method for an OLED display device;
FIG. 2 is a schematic diagram of a device structure of an evaporation method for an OLED display device in an embodiment of the present invention;
FIG. 3 is a flowchart illustrating an exemplary method for evaporating an OLED display device according to an embodiment of the present invention;
fig. 4 is a flowchart illustrating another specific example of an evaporation method for an OLED display device according to an embodiment of the present invention.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As described in the background art, only one functional layer is evaporated in each evaporation chamber during evaporation of the functional layers of the OLED display device, so that the production tact time can be reduced, that is, the time for preparing each OLED display device on a production line is reduced, thereby increasing the productivity of mass production of the OLED display devices. However, the evaporation process may cause a waiting time between each functional layer, and if there is a waiting time between each functional layer when evaporating each functional layer, the waiting time may affect the injection and transport capabilities and the recombination efficiency of carriers, and further adversely affect the voltage, efficiency and lifetime of the OLED device. However, if all the functional layers are placed in the same evaporation chamber for evaporation, intermediate links such as substrate alignment time and substrate transfer time can be omitted, waiting time between the functional layers can be reduced, voltage, efficiency and service life of the OLED device are improved, production tact of the whole production line can be increased, and productivity can be seriously reduced. The evaporation method for the OLED display device provided by the embodiment mainly aims to balance the production cycle and the OLED quality, and the yield of the OLED device is improved while the influence on the production cycle of the product is reduced as much as possible.
The embodiment of the invention provides an OLED display device structure which comprises a first electrode, a first carrier injection layer, a first carrier transmission layer, a light emitting layer, a second carrier transmission layer, a second carrier injection layer and a second electrode which are sequentially stacked.
As shown in fig. 2, the following description will take as an example that the first electrode is an anode, the first carrier injection Layer is a Hole Injection Layer (HIL), the first carrier transport Layer is a Hole Transport Layer (HTL), the light emitting Layer (EML), the second carrier transport Layer is an Electron Transport Layer (ETL), the second carrier injection Layer is an Electron Injection Layer (EIL), and the second electrode is a Cathode (Cathode); in order to achieve the above purpose, the inventor conducted a comparative experiment on the influence degree of the waiting time between the functional layers on the yield of the Device, in which the influence of the waiting time (Q1-Q5) between five groups of functional layers obtained through five groups (Device B to Device F) of the Device including the seven materials on the performance of the OLED Device was obtained, as shown in fig. 2, in the five groups of comparative experiment, the waiting time included in the dashed-line frame was eliminated or reduced, that is, two layers on both sides of the dashed-line frame were evaporated in the same evaporation chamber, and through analysis of the experiment results, it was determined that the waiting times of three key functional layers having the greatest influence on the Device performance were Q2, Q3 and Q5 shown in fig. 1. The Q2 and the Q3 respectively represent waiting time between the HTL and the EML, and between the ETL and the EML, and since the HTL and the ETL are close to the EML, the waiting time between the HTL and the ETL affects a recombination region of electrons and holes, so that the effect on efficiency is large, the two waiting times of the Q2 and the Q3 have a significant effect on the device, and the Q5 represents waiting time between the EIL and the Cathode, and the waiting time between the EIL and the Cathode affects injection of electrons, so that the voltage of the OLED display device is greatly affected.
Based on the above tests, the embodiment of the present invention provides an evaporation method for an OLED display device incorporating functional layers having a significant effect on device performance, as shown in fig. 3, three functional layers, i.e., HTL, EML, and ETL, are incorporated in the same evaporation chamber for evaporation, and EIL and Cathode are incorporated in the same evaporation chamber for evaporation, that is, HIL is evaporated on a substrate including an anode in a first evaporation chamber 1, HTL, EML, and ETL are successively evaporated in a second evaporation chamber 2, and EIL and Cathode are finally evaporated in a third evaporation chamber 3.
The evaporation method for the OLED display device with the combined functional layers provided by the embodiment of the invention reduces or even eliminates the waiting time among the HTL, the EML and the ETL, improves the transmission capacity and the compounding efficiency of current carriers among the HTL, the EML and the ETL, reduces the waiting time between the EIL and the Catode, enhances the capacity of injecting electrons into the EIL in the Catode, further improves the performance of the prepared OLED display device, improves the yield of the device, and simultaneously only combines part of the functional layers (the HTL, the EML and the ETL are combined in an evaporation chamber for evaporation, and the EIL and the Catode are combined in an evaporation chamber for evaporation), has small influence on the production beat and can simultaneously ensure higher productivity.
In order to further reduce the tact time and make the production efficiency as close as possible to the productivity of the prior art while reducing the influence of the waiting time on the performance of the OLED display device, the embodiment of the present invention provides an evaporation method for an OLED display device with a split functional layer, in which an HTL is split into two parts, the first part is an HTL1, and the second part is an HTL 2; splitting the ETL into two parts, the first part being ETL1 and the second part being ETL 2; the EIL is split into two parts, the first part being EIL1 and the second part being EIL 2. Specifically, as shown in fig. 4, the vapor deposition method may be such that HIL is vapor-deposited on the anode in the first vapor deposition chamber 1, HTL1 is vapor-deposited in the second vapor deposition chamber 2, HTL2, EML, and ETL2 are vapor-deposited in the third vapor deposition chamber 3, ETL1 is vapor-deposited in the fourth vapor deposition chamber 4, EIL1 is vapor-deposited in the fifth vapor deposition chamber 5, and EIL2 and Cathode are vapor-deposited in the sixth vapor deposition chamber 6.
Wherein Q2' shown in fig. 4 is the latency between HTL1 and HTL 2; q3' is the latency between ETL1 and ETL 2; q5' is the latency between EIL1 and EIL 2. In this embodiment, the waiting times Q2, Q3, and Q5 between different functional layers, i.e., different materials, are converted into the waiting times Q2 ', Q3 ', and Q5 ' between the same functional layers, i.e., the same materials, because the energy levels between the same materials are consistent, the influence of the waiting time between the same materials on the device is far lower than that of the waiting time between different materials on the device, so that the waiting time between different functional layers can be reduced, and the production tact of the OLED display device in the manufacturing process cannot be increased compared with the prior art.
Based on the above embodiments, the problem of the waiting time for the preparation of the OLED display device on the performance of the device can be solved through some optional embodiments, and at the same time, the higher production efficiency is ensured, and the following embodiments are exemplified:
at least two adjacent layers of HIL, HTL, EML, ETL, ELI and Cathode can be evaporated in the same evaporation chamber, and the evaporation manner of other functional layers is the same as that of the prior art.
In order to achieve a good control effect on the yield and guarantee high productivity, based on the above tests, functional layers having a critical influence on the yield are subjected to combined evaporation, specifically, any two of the HTL, the EML and the ETL can be subjected to evaporation in the same evaporation chamber, and the evaporation modes of other functional layers are the same as those in the prior art. Only EIL and Cathiode can be evaporated in the same evaporation chamber, and the evaporation way of other functional layers is the same as that of the prior art. It should be noted that the evaporation method in the embodiment of the present invention is not limited to the evaporation method provided above, and in practical applications, other evaporation methods that are not described and can achieve a better control effect on the yield and ensure a higher yield also belong to the protection scope of the embodiment of the present invention.
As an alternative embodiment, other evaporation methods for separating the functional layer may be used, for example, a part of the HTL or a part of the ETL and the EML may be evaporated in the same evaporation chamber, and the other part of the HTL or the other part of the ETL and the other functional layer may be evaporated in the same manner as in the prior art. Part of the EIL and all cathodes may be evaporated in the same evaporation process, and other functional layers may be evaporated according to the prior art, or part of the HTL or part of the ETL and the EML may be evaporated in the same evaporation chamber, and the remaining part of the HTL or the remaining part of the ETL and other functional layers may be evaporated in the same manner as the prior art. It should be noted that the evaporation method in the embodiment of the present invention is not limited to the above-mentioned evaporation method, and in practical applications, other evaporation methods that are not described, can be separately evaporated, can achieve a better control effect on the yield, and can ensure higher yield, also belong to the protection scope of the embodiment of the present invention.
As another embodiment of the present invention, the OLED display device may further include only a device having an HTL, an EML, an ETL, and a Cathode structure sequentially stacked on an anode, and for the device having the above structure, the evaporation method provided in this embodiment may include: evaporating at least two of the HTL, the EML and the ETL in the same evaporation chamber, and evaporating the Cathfode in another evaporation chamber; the ETL and Cathode may be deposited in the same deposition chamber, and the HTL and EML may be deposited in the conventional deposition method, or may be deposited in the same deposition chamber.
As an alternative embodiment, the evaporation may be performed by other evaporation methods for separating the functional layer, for example, a part of the HTL or a part of the ETL and the EML may be evaporated in the same evaporation chamber, the rest of the ETL and the Cathode may be evaporated in the same evaporation chamber, and the rest of the ETL and the Cathode may be evaporated in separate evaporation chambers.
The OLED display device in the embodiment of the present invention may be any one of an AMOLED display device and a PMOLED display device.
An embodiment of the present invention further provides an OLED display device, including: a substrate; the packaging layer and the functional layer are arranged between the substrate and the packaging layer; the functional layer is prepared by any one of the evaporation methods of the OLED display device described in the above embodiments.
The OLED display device in the embodiment of the present invention may be at least one of a mobile phone screen, a computer screen, a shop window screen, and a vehicle-mounted screen, and is not limited in practical application.
The embodiment of the invention provides evaporation equipment which comprises a first evaporation chamber, a second evaporation chamber and a third evaporation chamber, wherein evaporation spray heads are arranged in the evaporation chambers, a hole injection layer is formed in the first evaporation chamber, a hole transport layer, a light emitting layer and an electron transport layer are formed in the second evaporation chamber, and an electron injection layer and a cathode are formed in the third evaporation chamber.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (8)
1. An evaporation method of an OLED display device is characterized by comprising the following steps:
at least a first carrier transmission layer, a light-emitting layer, a second carrier transmission layer and a second electrode are sequentially evaporated on the first electrode; wherein the first carrier transport layer comprises a hole transport layer and the second carrier transport layer comprises an electron transport layer;
the hole transport layer comprises a first hole transport layer far away from the luminescent layer and a second hole transport layer close to the luminescent layer, and the electron transport layer comprises a first electron transport layer close to the luminescent layer and a second electron transport layer far away from the luminescent layer, wherein the first hole transport layer is evaporated in a second evaporation chamber, and the second hole transport layer, the luminescent layer and the first electron transport layer are evaporated in a third evaporation chamber;
evaporating the second electron transport layer in a fourth evaporation chamber;
the first hole transport layer and the second hole transport layer are made of the same material, and the first electron transport layer and the second electron transport layer are made of the same material.
2. A vapor deposition method according to claim 1, wherein the second hole transport layer, the light-emitting layer, and the first electron transport layer are sequentially deposited in a third vapor deposition chamber.
3. The evaporation method according to claim 1, wherein the second carrier transport layer further comprises an electron injection layer including a first electron injection layer provided away from the second electrode and a second electron injection layer provided close to the second electrode, and the first electron injection layer is evaporated in a fifth evaporation chamber.
4. The evaporation method according to claim 3, wherein the second electron injection layer and the second electrode are evaporated in a sixth evaporation chamber.
5. The evaporation method according to claim 4, wherein the second electron injection layer and the second electrode are combined and evaporated in the sixth evaporation chamber sequentially and continuously.
6. The evaporation method according to claim 1, wherein the first carrier transport layer further comprises a hole injection layer, and the hole injection layer is evaporated in a first evaporation chamber.
7. An OLED display device, comprising:
a substrate;
an encapsulation layer, and
a functional layer disposed between the substrate and the encapsulation layer;
the functional layer is prepared by adopting the evaporation method of the OLED display device as claimed in any one of claims 1-6.
8. The evaporation equipment for the OLED display device is characterized by comprising at least three evaporation chambers, wherein an evaporation head corresponding to a raw material of a first hole transport layer is arranged in a second evaporation chamber, an evaporation head corresponding to a raw material of a second hole transport layer, a light emitting layer and a raw material of a first electron transport layer is arranged in a third evaporation chamber, the second hole transport layer is close to the light emitting layer, the first hole transport layer is far away from the light emitting layer, the first hole transport layer and the second hole transport layer form a hole transport layer of the OLED display device, the first electron transport layer is close to the light emitting layer, the second electron transport layer is far away from the light emitting layer, and the first electron transport layer and the second electron transport layer form an electron transport layer of the OLED display device;
a raw material evaporation nozzle corresponding to the second electron transmission layer is arranged in the fourth evaporation chamber;
the first hole transport layer and the second hole transport layer are made of the same material, and the first electron transport layer and the second electron transport layer are made of the same material.
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