CN109448109A - The three-dimensional rebuilding method of scanning electron microscope image - Google Patents
The three-dimensional rebuilding method of scanning electron microscope image Download PDFInfo
- Publication number
- CN109448109A CN109448109A CN201811230563.4A CN201811230563A CN109448109A CN 109448109 A CN109448109 A CN 109448109A CN 201811230563 A CN201811230563 A CN 201811230563A CN 109448109 A CN109448109 A CN 109448109A
- Authority
- CN
- China
- Prior art keywords
- image
- area
- matching
- template
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T17/00—Three dimensional [3D] modelling, e.g. data description of 3D objects
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
- G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
- G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
- G06V10/751—Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
Abstract
The invention discloses a kind of three-dimensional rebuilding methods of scanning electron microscope image.The present invention chooses template area to the image head frame of SEM acquisition the following steps are included: setting picture number threshold value；With the mobile sample platform of predefined step-length, realtime graphic is obtained, template matching is carried out using the template area of first frame；The image that matching is obtained is added in matching image sequence；Area-of-interest is chosen to matching image sequence, is measured using the focusing that modified Laplce calculates each pixel；The maximum focus measure values that each pixel is calculated using Gauss interpolation are calculated the height of respective point according to maximum focus measure values, obtain three-dimensional point cloud；According to three-dimensional point cloud, interpolation fitting 3-D graphic realizes three-dimensional reconstruction.
Description
Technical field
The present invention relates to sem image process fields, and in particular to a kind of three-dimensional rebuilding method of scanning electron microscope image
Background technique
Large-sized analytic instrument of the scanning electron microscope (SEM) as microscopic appearance observation and microstructure analysis, extensively
The general 3D shape recovery applied to the precise measurement of nano material size, performance characterization and material.In addition, utilizing SEM image
As visual sensor, great help is provided to automate the development of nano-manipulation, such as the automatic detection of IC chip, nanometer
The automatic Picking of line and four probe automatic measurement nano wire impedance operators, the mankind are liberated from cumbersome manual nano-manipulation
Out, working efficiency is greatly improved.But since SEM image lacks elevation information, so as to cause the damage of end effector,
Greatly reduce the success rate of automation nano-manipulation.
However, the measurement of the three-dimensional dimension based on two dimensional image obtains great development with the development of machine vision.
Shape recovery (SSF) is focused because of its precision height, implements simply to be widely used to robot obstacle-avoiding, biological entities, mineral grain
Three-dimensionalreconstruction in.But during obtaining a large amount of figure sequence due to SSF, due to the vibration of executing agency, cause sample flat
Platform can not be moved up and down absolutely, and sidesway occurs along with picture frame, error is obtained so as to cause focus measure values, to influence three-dimensional
The precision of reconstruction.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of three-dimensional rebuilding method of scanning electron microscope image, can eliminate by
In executing agency vibration and lead to the error of traditional SSF algorithm three-dimensional reconstruction, and simple easily realize.
In order to solve the above-mentioned technical problems, the present invention provides a kind of three-dimensional rebuilding methods of scanning electron microscope image, comprising:
Picture number threshold value is set, template area is chosen to the image head frame of SEM acquisition；
With the mobile sample platform of predefined step-length, realtime graphic is obtained, template matching is carried out using the template area of first frame；
The image that matching is obtained is added in matching image sequence；
When not up to described image quantity threshold, repeat the above steps；
Area-of-interest is chosen to matching image sequence, is surveyed using the focusing that modified Laplce calculates each pixel
Magnitude；
The maximum focus measure values that each pixel is calculated using Gauss interpolation calculate phase according to maximum focus measure values
The height that should be put, obtains three-dimensional point cloud；
According to the three-dimensional point cloud, interpolation fitting 3-D graphic realizes three-dimensional reconstruction.
It is described with the mobile sample platform of predefined step-length in one of the embodiments, realtime graphic is obtained, using first frame
Template area carries out template matching, specifically includes:
With scheduled step-length mobile example platform, realtime graphic is obtained；
Using coefficients match algorithm, template area extraction is carried out to realtime graphic using first frame template area as template.
The matching image sequence in one of the embodiments, specifically includes:
The template image region obtained on realtime graphic is added in first frame image, is combined into new image sequence, as
Matching image sequence.
It is described in one of the embodiments, that area-of-interest is chosen to matching image sequence, using modified drawing pula
This calculates the focus measure values of each pixel, specifically includes:
Identical position is chosen in images match sequence as area-of-interest, forms area-of-interest sequence；
The focus measure values of each pixel in area-of-interest sequence are calculated using modified Laplace operator.
The maximum focus measure values for calculating each pixel using Gauss interpolation in one of the embodiments, according to most
Big focus measure values calculate the height of respective point, obtain three-dimensional point cloud；
The maximum focus measure values of each pixel of area-of-interest sequence are calculated using Gauss interpolation；
The height of the pixel is calculated by the position of the area-of-interest sequence where maximum focus measure values and its；
The height for obtaining all pixels, obtains three-dimensional point cloud.
A kind of computer equipment can be run on a memory and on a processor including memory, processor and storage
The step of computer program, the processor realizes any one the method when executing described program.
A kind of computer readable storage medium, is stored thereon with computer program, realization when which is executed by processor
The step of any one the method.
A kind of processor, the processor is for running program, wherein described program executes described in any item when running
Method.
Beneficial effects of the present invention:
1, the present invention improves traditional SSF three-dimensional rebuilding method, and algorithm is simple, and operand is little.
2, the present invention can effectively eliminate the vibration due to executing agency, and sample platform is caused absolutely not move up and down,
Sidesway occurs along with picture frame, causes focus measure values to obtain error, to influence the precision of three-dimensional reconstruction.
Detailed description of the invention
Fig. 1 is that (side has occurred in image to SEM executing agency seismogram in the three-dimensional rebuilding method of scanning electron microscope image of the present invention
It moves, causes pixel focus measure values that error occurs).
Fig. 2 is the flow chart of the three-dimensional rebuilding method of scanning electron microscope image of the present invention.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings and specific examples, so that those skilled in the art can be with
It more fully understands the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
Referring to shown in Fig. 2, the invention discloses the three-dimensional rebuilding methods of scanning electron microscope image, comprising the following steps:
Step S101, picture number threshold value is set, template area is chosen to the image head frame of SEM acquisition；
Step S102, with the mobile sample platform of predefined step-length, realtime graphic is obtained, mould is carried out using the template area of first frame
Plate matching.Wherein coefficients match method matches relative value of the template to its mean value with correlation of the image to its mean value, 1 table
Show perfect matching, -1 indicates bad matching, and 0 indicates no any correlation (random sequence).Its calculation formula is:
R(x, y)=∑ x ', y ' (T ' (x ', y ') I (x+x ', y+y ')) (1)
Wherein:
T ' (x ', y ')=T (x ', y ') one I/ (wh) ∑X ", y "T (x ", y ") (2)
I ' (x+x ', y+y ')=I (x+x ', y+y ')-
I/(w·h)·∑X ", y "I (x+x ", y+y ") (3)
Step S103, the image for obtaining matching is added in matching image sequence；
Step S104, it when not up to described image quantity threshold, repeats the above steps；
Step S105, area-of-interest is chosen to matching image sequence, each pixel is calculated using modified Laplce
The focus measure values of point, and calculated with a variable step-length s to adapt to the texture variations of image, i.e.,
LM(x, y)=| 2I (x, y)-I (x-s, y)-I (x+s, y) |+
| 2I (x, y)-I (x, y-s)-I (x, y+s) | (9)
Wherein: LM(x, y) is modified Laplace operator value at point (x, y)；I (x, y) is the ash that (x, y) is put on image
Angle value.
It is finally the sum of modified Laplce's calculated value in the field (i, j) in the focus measure values of (i, j) point, i.e.,
In formula: N is the window size for participating in calculating in the field (x, y)；T is a threshold value.Laplce greater than T calculates
Value just participates in calculating, window size when wherein N determines calculating.
Step S106, the maximum focus measure values that each pixel is calculated using Gauss interpolation are surveyed according to maximum focusing
The height of magnitude calculation respective point, obtains three-dimensional point cloud.Due to the height that maximum value process obtains be it is discrete, resolution ratio is by institute
The limitation for clapping the image number of plies, the focusing maximum value of each pixel is calculated using Gauss interpolation fitting.Three adjacent width images are poly-
Burnt measurement degree is respectively Fm-1, Fm, Fm+1, but the maximum measurement degree of object is not in this three width image.According to Gaussian function fitting
Model, maximum focusing measurement degree can be calculated by fitting Gaussian function, correspondingly also obtain the point on object at this time
Height value.
Wherein: dm-1, dm, dm+1For focal position, Fm-1, Fm, Fm+1For focus measure values, d is the focusing position of Gauss curve fitting
It sets, FpFor the focus measure values of fitting.
Step S107, according to three-dimensional point cloud, interpolation fitting 3-D graphic realizes three-dimensional reconstruction.
A kind of computer equipment can be run on a memory and on a processor including memory, processor and storage
The step of computer program, the processor realizes any one the method when executing described program.
A kind of computer readable storage medium, is stored thereon with computer program, realization when which is executed by processor
The step of any one the method.
A kind of processor, the processor is for running program, wherein described program executes described in any item when running
Method.
Embodiment described above is only to absolutely prove preferred embodiment that is of the invention and being lifted, protection model of the invention
It encloses without being limited thereto.Those skilled in the art's made equivalent substitute or transformation on the basis of the present invention, in the present invention
Protection scope within.Protection scope of the present invention is subject to claims.
Claims (8)
1. a kind of three-dimensional rebuilding method of scanning electron microscope image characterized by comprising
Picture number threshold value is set, template area is chosen to the image head frame of SEM acquisition；
With the mobile sample platform of predefined step-length, realtime graphic is obtained, template matching is carried out using the template area of first frame；
The image that matching is obtained is added in matching image sequence；
When not up to described image quantity threshold, repeat the above steps；
Area-of-interest is chosen to matching image sequence, is measured using the focusing that modified Laplce calculates each pixel
Value；
The maximum focus measure values that each pixel is calculated using Gauss interpolation calculate respective point according to maximum focus measure values
Height, obtain three-dimensional point cloud；
According to the three-dimensional point cloud, interpolation fitting 3-D graphic realizes three-dimensional reconstruction.
2. the three-dimensional rebuilding method of scanning electron microscope image as described in claim 1, which is characterized in that described with predefined step-length
Mobile sample platform, obtains realtime graphic, carries out template matching using the template area of first frame, specifically includes:
With scheduled step-length mobile example platform, realtime graphic is obtained；
Using coefficients match algorithm, template area extraction is carried out to realtime graphic using first frame template area as template.
3. the three-dimensional rebuilding method of scanning electron microscope image as described in claim 1, which is characterized in that the matching image sequence
Column, specifically include:
The template image region obtained on realtime graphic is added in first frame image, new image sequence is combined into, as matches
Image sequence.
4. the three-dimensional rebuilding method of scanning electron microscope image as described in claim 1, which is characterized in that described to matching image sequence
Column selection takes area-of-interest, and the focus measure values of each pixel are calculated using modified Laplce, are specifically included:
Identical position is chosen in images match sequence as area-of-interest, forms area-of-interest sequence；
The focus measure values of each pixel in area-of-interest sequence are calculated using modified Laplace operator.
5. the three-dimensional rebuilding method of scanning electron microscope image as described in claim 1, which is characterized in that calculated using Gauss interpolation
The maximum focus measure values of each pixel calculate the height of respective point according to maximum focus measure values, obtain three-dimensional point cloud；
The maximum focus measure values of each pixel of area-of-interest sequence are calculated using Gauss interpolation；
The height of the pixel is calculated by the position of the area-of-interest sequence where maximum focus measure values and its；
The height for obtaining all pixels, obtains three-dimensional point cloud.
6. a kind of computer equipment including memory, processor and stores the meter that can be run on a memory and on a processor
Calculation machine program, which is characterized in that the processor realizes any one of claims 1 to 5 the method when executing described program
Step.
7. a kind of computer readable storage medium, is stored thereon with computer program, which is characterized in that the program is held by processor
The step of any one of claims 1 to 5 the method is realized when row.
8. a kind of processor, which is characterized in that the processor is for running program, wherein right of execution when described program is run
Benefit requires 1 to 5 described in any item methods.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811230563.4A CN109448109B (en) | 2018-10-22 | 2018-10-22 | Three-dimensional reconstruction method of scanning electron microscope image |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811230563.4A CN109448109B (en) | 2018-10-22 | 2018-10-22 | Three-dimensional reconstruction method of scanning electron microscope image |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109448109A true CN109448109A (en) | 2019-03-08 |
| CN109448109B CN109448109B (en) | 2023-06-20 |
Family
ID=65547073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811230563.4A Active CN109448109B (en) | 2018-10-22 | 2018-10-22 | Three-dimensional reconstruction method of scanning electron microscope image |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109448109B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110288701A (en) * | 2019-06-26 | 2019-09-27 | 纳米视觉(成都)科技有限公司 | A kind of three-dimensional rebuilding method and terminal based on deep focus |
| CN110910506A (en) * | 2019-12-03 | 2020-03-24 | 江苏集萃华科智能装备科技有限公司 | Three-dimensional reconstruction method and device based on normal detection, detection device and system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103791836A (en) * | 2014-01-28 | 2014-05-14 | 南京航空航天大学 | Numerically controlled tool cutting edge measuring method based on laser scanning confocal technology |
| CN106683068A (en) * | 2015-11-04 | 2017-05-17 | 北京文博远大数字技术有限公司 | Three-dimensional digital image acquisition method and equipment thereof |
| CN106959079A (en) * | 2017-03-27 | 2017-07-18 | 淮阴师范学院 | A kind of modified focuses on 3 D measuring method |
-
2018
- 2018-10-22 CN CN201811230563.4A patent/CN109448109B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103791836A (en) * | 2014-01-28 | 2014-05-14 | 南京航空航天大学 | Numerically controlled tool cutting edge measuring method based on laser scanning confocal technology |
| CN106683068A (en) * | 2015-11-04 | 2017-05-17 | 北京文博远大数字技术有限公司 | Three-dimensional digital image acquisition method and equipment thereof |
| CN106959079A (en) * | 2017-03-27 | 2017-07-18 | 淮阴师范学院 | A kind of modified focuses on 3 D measuring method |
Non-Patent Citations (3)
| Title |
|---|
| SHANG YAN 等: "A hybrid 3D SEM reconstruction method optimized for complex geologic material surfaces", 《MIRCRON》 * |
| 刘冰洋 等: "摄影测量辅助地面激光点云的三维重建", 《郑州师范教育》 * |
| 杨维 等: "基于灰色关联度的聚焦形貌恢复", 《计算机应用研究》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110288701A (en) * | 2019-06-26 | 2019-09-27 | 纳米视觉(成都)科技有限公司 | A kind of three-dimensional rebuilding method and terminal based on deep focus |
| CN110288701B (en) * | 2019-06-26 | 2023-01-24 | 图码思(成都)科技有限公司 | Three-dimensional reconstruction method based on depth focusing and terminal |
| CN110910506A (en) * | 2019-12-03 | 2020-03-24 | 江苏集萃华科智能装备科技有限公司 | Three-dimensional reconstruction method and device based on normal detection, detection device and system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109448109B (en) | 2023-06-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109360246B (en) | Stereoscopic vision three-dimensional displacement measurement method based on synchronous subarea search | |
| DE102015005267B4 (en) | Information processing apparatus, method therefor and measuring apparatus | |
| Wu et al. | Quality-driven poisson-guided autoscanning | |
| DE112011100652T5 (en) | THREE-DIMENSIONAL MEASURING DEVICE, PROCESSING METHOD AND NON-VOLATILE COMPUTER-READABLE STORAGE MEDIUM | |
| JP6899189B2 (en) | Systems and methods for efficiently scoring probes in images with a vision system | |
| CN113112504A (en) | Plant point cloud data segmentation method and system | |
| CN106897995B (en) | A kind of components automatic identifying method towards Automatic manual transmission process | |
| CN107328502B (en) | Anchor rod tray load visualization digital imaging method | |
| CN104021547A (en) | Three dimensional matching method for lung CT | |
| CN110728667A (en) | Automatic and accurate cutter wear loss measuring method based on gray level image probability | |
| CN104760812B (en) | Product real-time positioning system and method on conveyer belt based on monocular vision | |
| CN111724433A (en) | Crop phenotype parameter extraction method and system based on multi-view vision | |
| CN109470149B (en) | Method and device for measuring position and posture of pipeline | |
| CN101030300A (en) | Method for matching depth image | |
| CN109448109A (en) | The three-dimensional rebuilding method of scanning electron microscope image | |
| CN110536142A (en) | A kind of interframe interpolation method for non-rigid image sequence | |
| US20150104068A1 (en) | System and method for locating fiducials with known shape | |
| CN116222381A (en) | Electrode coating size measurement method and device | |
| Lee et al. | Improving focus measurement via variable window shape on surface radiance distribution for 3D shape reconstruction | |
| CN111523547A (en) | 3D semantic segmentation method and terminal | |
| CN111127613B (en) | Image sequence three-dimensional reconstruction method and system based on scanning electron microscope | |
| CN112525106B (en) | Three-phase machine cooperative laser-based 3D detection method and device | |
| CN113642397A (en) | Object length measuring method based on mobile phone video | |
| CN107590787A (en) | A kind of image distortion correction method of SEM | |
| CN107341808A (en) | Simulative lunar soil hardness vision detection system and measuring method based on rut image |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 215100 South 3rd and 4th Floors of Huanxiu Lake Building, Xiangcheng High-speed Railway New Town, Suzhou City, Jiangsu Province Applicant after: JIANGSU JICUI MICRO-NANO AUTOMATION SYSTEM AND EQUIPMENT TECHNOLOGY RESEARCH INSTITUTE Co.,Ltd. Address before: 215100 F003 workstation, 3rd floor, 58 South Tiancheng Road, Xiangcheng High-speed Railway New Town, Suzhou City, Jiangsu Province Applicant before: JIANGSU JICUI MICRO-NANO AUTOMATION SYSTEM AND EQUIPMENT TECHNOLOGY RESEARCH INSTITUTE Co.,Ltd. |
|
| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |