CN106959079A - A kind of modified focuses on 3 D measuring method - Google Patents
A kind of modified focuses on 3 D measuring method Download PDFInfo
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- CN106959079A CN106959079A CN201710187268.4A CN201710187268A CN106959079A CN 106959079 A CN106959079 A CN 106959079A CN 201710187268 A CN201710187268 A CN 201710187268A CN 106959079 A CN106959079 A CN 106959079A
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- ionospheric
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
3 D measuring method is focused on the invention discloses a kind of modified, this method includes：Using the white light interferometric system of Low coherence, continuous acquisition obtains the interference image of several high-contrasts of the testee with smooth surface；Calculate the maximum of the (ionospheric) focussing factor of each pixel coordinate point in every piece image；The accurate focal position of all pixels coordinate points is determined according to the maximum of the (ionospheric) focussing factor of all pixels coordinate points, so as to recover the three-dimensional appearance of the testee with smooth surface.White light interferometric system of the invention by using Low coherence, continuous acquisition obtains the interference image of several high-contrasts of the testee with smooth surface, the accurate focal position of all pixels coordinate points is determined according to the maximum of the (ionospheric) focussing factor of all pixels coordinate points, so as to recover the three-dimensional appearance of tested smooth surface object, with high degree of automation, measurement is easy to operate, the advantages of measurement accuracy is higher and is easy to penetration and promotion.
Description
Technical field
The present invention relates to radiographic measurement field, and in particular to a kind of modified focuses on 3 D measuring method.
Background technology
With the progress of science, requirement also more and more higher of the industry-by-industry for the surface profile measurement of complex object.Three
Tie up topography scientific research, quality engineering, high speed on-line checking, robot vision, reverse-engineering, CAD, medical diagnosis,
Increasingly it is widely applied in engineering design, the live mark analysis of criminal investigation, quality control and many production processes.
For example, the on-line checking in the processing and manufacturing such as body of a motor car, airframe and steamer hull.In view of object three-dimensional contour outline measures skill
Art has important industrial application value, and object three-dimensional contour outline e measurement technology enjoys the concern of various countries scientific and technical personnel, new three-dimensional
Contour measuring method also constantly emerges in large numbers.
Since 1990s, optical triangle method technology be increasingly becoming current international hot research topic it
One.Multiple countries propose many new Principle and method of measurement in the field in succession, and China there has also been larger in this field
Progress.Up to the present, these measuring three-dimensional profile methods precision mostly between nanometer to micrometer range, wherein,
Research on measuring technique based on " focusing shape recovery " is than wide.But, existing focusing topography measurement method mostly can only
For measuring the contour of object with rough textured surface.
Existing focusing topography measurement principle is as shown in Figure 1：Fig. 1 is on the geometrical light-path of basic convex lens, object plane
The Q points that image in image planes of P points, from Gauss theorem, the relation between object distance O, focal length f and image distance i is
Every bit on object plane produced all in image planes it is one-to-one focus on picture point, if camera target surface not with image planes position consistency and
During the amount of offsetting δ, then object point P will form a radius on camera target surface and beThe round spot of (R is convex lens radius),
I.e. system generates defocus.And with the increase of offset delta, defocus degree is aggravated, the contrast in image around picture point declines.
If continuously changing the relative position between camera target surface and image planes, the (ionospheric) focussing factor for obtaining picture point Q in a series of images is calculated,
When camera target surface is overlapped with the image planes where picture point Q, picture point Q (ionospheric) focussing factor reaches maximum in resulting image, because
This can judge object point P focal position according to the position of (ionospheric) focussing factor maximum.
But, when body surface is relatively smooth, the contrast in image around picture point is smaller, therefore contrast
Change less substantially, when system has certain measurement noise, it is impossible to accurately judge the corresponding focal positions of object point P.
In order to precisely determine the specific focal position of each picture point in the picture, it is necessary to calculate correspondence picture point in image
(ionospheric) focussing factor, it is desirable to which obvious acute variation occurs before and after focal position for the (ionospheric) focussing factor, while in image vernier focusing
The (ionospheric) focussing factor reaches maximum.It therefore, it can using the various algorithms used when carrying out high-pass filtering to image, it is most common
Have Laplace operator, the Operator Model is as follows：
It can be expressed as using difference form：
Finally, by the drawing for each the interior pixel coordinate point of window for calculating the pixel coordinate of some in image point (x, y) surrounding
General Laplacian operater summation, can obtain the (ionospheric) focussing factor of the pixel coordinate point (x, y), as follows：
But, it is existing to focus on the object wheel that topography measurement method is primarily adapted for use in Non-smooth surface (having notable texture) surface
Exterior feature measurement, and there is larger error for measuring for smooth surface contour of object, such as glassware, and the smooth table of this class
Face object is seen everywhere in life.
In view of this, it is badly in need of a kind of high-precision focusing topography measurement method for smooth surface object.
The content of the invention
The technical problems to be solved by the invention be existing smooth surface object focusing topography measurement method error compared with
Big the problem of.
In order to solve the above-mentioned technical problem, the technical solution adopted in the present invention is to provide a kind of modified focusing three-dimensional shaped
Looks measuring method, comprises the following steps：
Using the white light interferometric system of Low coherence, continuous acquisition obtains several of the testee with smooth surface
The interference image of high-contrast；
Calculate the maximum of the (ionospheric) focussing factor of each pixel coordinate point in every piece image；
The accurate focal position of all pixels coordinate points is determined according to the maximum of the (ionospheric) focussing factor of all pixels coordinate points,
So as to recover the three-dimensional appearance of the testee with smooth surface.
In the above-mentioned technical solutions, the maximum of the (ionospheric) focussing factor of each pixel coordinate point in every piece image is calculated
Value, specifically includes following steps：
Calculate some (ionospheric) focussing factor of pixel coordinate point in every piece image；
Enter line label according to the collection position of each image for each image, it is corresponding poly- with the serial number abscissa of each image
The burnt factor is ordinate, sets up coordinate system, and describes the value of each (ionospheric) focussing factor, obtains the discrete point diagram of (ionospheric) focussing factor；
The discrete point diagram of (ionospheric) focussing factor to obtaining carries out LPF and cubic spline interpolation successively, obtains (ionospheric) focussing factor
Peak value.
In the above-mentioned technical solutions, some (ionospheric) focussing factor of pixel coordinate point in every piece image, for the pixel coordinate
The Laplace operator summation of each point, as follows in window around point：
Wherein, Z represents picture numbers；N represents to calculate the coordinate window size used during (ionospheric) focussing factor；ML(i,j,z)
Represent in Z width images, the Laplace operator of each point in the window around the pixel coordinate point.
In the above-mentioned technical solutions, the Laplace operator of each point is as follows in the window around the pixel coordinate point：
It is expressed as using difference form：
Wherein, I (x, y, z) represents the pixel coordinate point；Step represents differential step size, for the integer more than or equal to 1.
In the above-mentioned technical solutions, the abscissa according to corresponding to the maximum of the (ionospheric) focussing factor of all pixels coordinate points,
Determine the accurate focal position of all pixels coordinate points；According to the accurate focal position of each pixel coordinate point, it is determined that correspondence
All object points relative altitude, so as to recover the three-dimensional appearance of testee.
In the above-mentioned technical solutions, the white light interferometric system of the Low coherence includes the measured object with smooth surface
Body, the first collimation lens, beam-splitter, the first object lens, the second object lens, Plane reference mirror, stepper motor, the second collimation lens and
Photodetector, specifically includes following measuring process：
Using low-coherence light source as incident light source, change the position of Plane reference mirror by the continuous unique step of stepper motor,
Meanwhile, continuously change the position of testee along the surface of testee and be fixed, make the surface of testee with putting down
The optical path difference on the surface of face reference mirror is zero；
After incident light source is collimated through the first collimation lens, beam-splitter is incident to, two-beam source is formed after beam-splitter light splitting,
Surface of a branch of light source through the first objective lens entrance to testee, another light source beam is through the second objective lens entrance to Plane reference mirror
Surface；
Two-beam source after reflection forms interference on the surface of beam-splitter, after interference image is focused on through the second collimation lens,
The interference image of several high-contrasts of testee is obtained through photodetector continuous acquisition.
The present invention is by using the white light interferometric system of Low coherence, and continuous acquisition obtains tested with smooth surface
The interference image of several high-contrasts of object, all pixels are determined according to the maximum of the (ionospheric) focussing factor of all pixels coordinate points
The accurate focal position of coordinate points, so that the three-dimensional appearance of tested smooth surface object is recovered, with high degree of automation,
Measurement is easy to operate, the advantages of measurement accuracy is higher and is easy to penetration and promotion.
Brief description of the drawings
Fig. 1 is existing focusing measuring principle figure；
Fig. 2 focuses on 3 D measuring method flow chart for a kind of modified that the present invention is provided；
The white light interferometric system schematic for the Low coherence that Fig. 3 provides for the present invention；
The particular flow sheet for the step S20 that Fig. 4 provides for the present invention；
The (ionospheric) focussing factor schematic diagram for the pixel coordinate point (x, y) that Fig. 5 provides for the present invention；
The peak value schematic diagram for the (ionospheric) focussing factor FM that Fig. 6 provides for the present invention；
The particular flow sheet for the step S30 that Fig. 7 provides for the present invention；
The schematic diagram for the model step that Fig. 8 provides for the present invention；
A series of interference fringe image schematic diagrames for the model step collected that Fig. 9 provides for the present invention；
The 3-D view schematic diagram for the model step that Figure 10 is restored for the present invention using improved Laplace operator；
Modified hydrothermal process and existing algorithm restoration model step is respectively adopted for the present invention in Figure 11, and enters with theoretical model
The schematic diagram that row compares；
The partial enlarged drawing for Figure 11 that Figure 12 provides for the present invention.
Embodiment
The present invention is described in detail with reference to specification drawings and specific embodiments.
3 D measuring method is focused on the embodiments of the invention provide a kind of modified, as shown in Fig. 2 including following step
Suddenly：
S10, the white light interferometric system using Low coherence, continuous acquisition obtain the testee with smooth surface
The interference image of several high-contrasts.
As shown in figure 3, the white light interferometric system of above-mentioned Low coherence includes the testee 10 with smooth surface, the
Collimating lens 20, beam-splitter 30, the first object lens 40, the second object lens 50, Plane reference mirror 60, stepper motor 70, second are collimated
Lens 80 and photodetector 90, its measuring principle is specially：
Using low-coherence light source as incident light source, change the position of Plane reference mirror 60 by the continuous unique step of stepper motor 70
Put, meanwhile, along the surface of testee 10, the continuous position for changing testee 10 is simultaneously fixed so that mobile every time
During, the optical path difference on the surface of testee 10 and the surface of Plane reference mirror 60 is zero (i.e. z=z0)；Incident light source is through
After collimating lens 20 are collimated, beam-splitter 30 is incident to, two-beam source is formed after the light splitting of beam-splitter 30, a branch of light source is through first
Object lens 40 are incident to the surface of testee 10, and another light source beam is incident to the surface of Plane reference mirror 60 through the second object lens 50；
Two-beam source after reflection forms interference on the surface of beam-splitter 30, after interference image is focused on through the second collimation lens 80, through light
The continuous acquisition of electric explorer 90 obtains the interference image of several high-contrasts of testee 10.
The present invention collects the testee 10 with smooth surface using the white light interferometric system of Low coherence
The interference image of several high-contrasts, therefore can accurately obtain the three-D profile of the testee 10 with smooth surface.
S20, the (ionospheric) focussing factor of each pixel coordinate point calculated in every piece image maximum.
In the Laplacian algorithm of existing image procossing, some pixel coordinate point (x, y) in certain width image it is poly-
The burnt factor is the Laplace operator summation of each point in the window of the pixel coordinate point (x, y) surrounding, for example, at one 3 × 3
In coordinate window, the (ionospheric) focussing factor of the coordinate window center point is 8 points in 8 windows around pixel coordinate point (2,2)
The summation for the Laplace operator each calculated, that is, be solely dependent upon the light intensity value around the pixel coordinate point (x, y), still
When the white light interferometric system continuous acquisition interference image using Low coherence, the (ionospheric) focussing factor of the pixel coordinate point (x, y)
The light intensity value of surrounding is depended not only on, the collection position of every piece image where the pixel coordinate point (x, y) is additionally depended on, because
This, this programme is improved Laplace operator, as follows：
It can be expressed as using difference form：
The (ionospheric) focussing factor of the pixel coordinate point (x, y) is：
Wherein, Z represents picture numbers；N represents to calculate coordinate window size selected during (ionospheric) focussing factor；ML (i, j, z) table
Show in Z width images, the Laplace operator of each point in the window around the pixel coordinate point；I (x, y, z) represents the pixel
Coordinate points；Step represents differential step size, for the integer more than or equal to 1.
S30, the accurate focusing for determining according to the maximum of the (ionospheric) focussing factor of all pixels coordinate points all pixels coordinate points
Position, so as to recover the three-dimensional appearance of the testee with smooth surface.
As shown in figure 4, step S20 specifically includes following steps：
S201, calculate (ionospheric) focussing factor FM of some pixel coordinate point in every piece image, it is specific as shown in Figure 5.
S202, according to the collection position of each image enter line label for each image, with the serial number abscissa of each image, correspondence
(ionospheric) focussing factor FM be ordinate, set up coordinate system, and describe each (ionospheric) focussing factor FM value, obtain the discrete of (ionospheric) focussing factor FM
Point diagram.
S203, the discrete point diagram of (ionospheric) focussing factor FM to obtaining carry out LPF and cubic spline interpolation successively, obtain
(ionospheric) focussing factor FM peak value, it is specific as shown in Figure 6.
As shown in fig. 7, step S30 specifically includes following steps：
Step S301, the abscissa according to corresponding to the maximum of the (ionospheric) focussing factor of all pixels coordinate points, you can it is determined that
The accurate focal position of all pixels coordinate points.
Step S302, the accurate focal position according to each pixel coordinate point, determine the relative of corresponding all object points
Highly, so as to recover the three-dimensional appearance of testee.
Embodiment two：
The model step present invention employs one with 2 micrometer depths carries out emulation experiment, in order to clearly be done
Image is related to, model step a small angle (about 0.1 °) has been tilted into the horizontal direction, as shown in Figure 8.
Used parameter is as shown in table 1：
| Image size | 400x50pixel |
| Frame number | 150 |
| IMAQ step-length spacing | 120nm |
| Pixel dimension | 7.1μm |
A series of interference images collected are as shown in Figure 9, it can be seen that in 150 frame interference images, because light source
Low coherence, there is in the image of only limited frame interference fringe.
The simulation experiment result is analyzed：
As shown in Figure 10, it is the 3-D view of the model step restored using improved Laplace operator；Such as Figure 11 institutes
Show, for modified hydrothermal process (such as 1) and existing algorithm (such as 2) restoration model step is respectively adopted, and enter with theoretical model (such as 3)
Row compares, and can significantly find out, can accurately be restored with smooth table using the white light interferometric system of Low coherence
The three-D profile of the testee in face；As shown in figure 12, the partial enlarged drawing for being Figure 11, as a result shows, using the calculation after improvement
Contour shape (such as 3) of the contour shape (such as 1) that method is restored closer to ideal model.
The present invention is not limited to above-mentioned preferred forms, anyone structure change made under the enlightenment of the present invention,
It is every that there is same or like technical scheme with of the invention, each fall within protection scope of the present invention.
Claims (6)
1. a kind of modified focuses on 3 D measuring method, it is characterised in that comprise the following steps：
Using the white light interferometric system of Low coherence, continuous acquisition obtains many panel heights pair of the testee with smooth surface
Than the interference image of degree；
Calculate the maximum of the (ionospheric) focussing factor of each pixel coordinate point in every piece image；
The accurate focal position of all pixels coordinate points is determined according to the maximum of the (ionospheric) focussing factor of all pixels coordinate points, so that
Recover the three-dimensional appearance of the testee with smooth surface.
2. modified as claimed in claim 1 focuses on 3 D measuring method, it is characterised in that calculate every piece image
In each pixel coordinate point (ionospheric) focussing factor maximum, specifically include following steps：
Calculate some (ionospheric) focussing factor of pixel coordinate point in every piece image；
Enter line label according to the collection position of each image for each image, with the serial number abscissa of each image, corresponding focusing because
Son is ordinate, sets up coordinate system, and describes the value of each (ionospheric) focussing factor, obtains the discrete point diagram of (ionospheric) focussing factor；
The discrete point diagram of (ionospheric) focussing factor to obtaining carries out LPF and cubic spline interpolation successively, obtains the peak of (ionospheric) focussing factor
Value.
3. modified as claimed in claim 2 focuses on 3 D measuring method, it is characterised in that some pixel coordinate point exists
It is as follows for the Laplace operator summation of each point in the window around the pixel coordinate point per the (ionospheric) focussing factor in piece image
It is shown：
Wherein, Z represents picture numbers；N represents to calculate the coordinate window size used during (ionospheric) focussing factor；ML (i, j, z) is represented
In Z width images, the Laplace operator of each point in the window around the pixel coordinate point.
4. modified as claimed in claim 3 focuses on 3 D measuring method, it is characterised in that the pixel coordinate point week
The Laplace operator of each point is as follows in the window enclosed：
It is expressed as using difference form：
Wherein, I (x, y, z) represents the pixel coordinate point；Step represents differential step size, for the integer more than or equal to 1.
5. modified as claimed in claim 1 focuses on 3 D measuring method, it is characterised in that according to all pixels coordinate
Abscissa corresponding to the maximum of the (ionospheric) focussing factor of point, determines the accurate focal position of all pixels coordinate points；According to each
The accurate focal position of individual pixel coordinate point, determines the relative altitude of corresponding all object points, so as to recover testee
Three-dimensional appearance.
6. modified as claimed in claim 1 focuses on 3 D measuring method, it is characterised in that the white light of the Low coherence
Interferometer measuration system include with the testee of smooth surface, the first collimation lens, beam-splitter, the first object lens, the second object lens,
Plane reference mirror, stepper motor, the second collimation lens and photodetector, specifically include following measuring process：
Using low-coherence light source as incident light source, change the position of Plane reference mirror by the continuous unique step of stepper motor, meanwhile,
Continuously change the position of testee along the surface of testee and be fixed, make surface and the Plane reference of testee
The optical path difference on the surface of mirror is zero；
After incident light source is collimated through the first collimation lens, beam-splitter is incident to, two-beam source is formed after beam-splitter light splitting, it is a branch of
Surface of the light source through the first objective lens entrance to testee, table of another light source beam through the second objective lens entrance to Plane reference mirror
Face；
Two-beam source after reflection forms interference on the surface of beam-splitter, after interference image is focused on through the second collimation lens, through light
Electric explorer continuous acquisition obtains the interference image of several high-contrasts of testee.
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| CN107680152A (en) * | 2017-08-31 | 2018-02-09 | 太原理工大学 | Target surface topography measurement method and apparatus based on image procossing |
| CN108009988A (en) * | 2017-12-04 | 2018-05-08 | 淮阴师范学院 | A kind of image fractal regressive method for optimizing population |
| CN109448109A (en) * | 2018-10-22 | 2019-03-08 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | The three-dimensional rebuilding method of scanning electron microscope image |
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Application publication date: 20170718 |