CN109444782A - Electronic Calibration module based on mems switch, system and method - Google Patents
Electronic Calibration module based on mems switch, system and method Download PDFInfo
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- CN109444782A CN109444782A CN201811260592.5A CN201811260592A CN109444782A CN 109444782 A CN109444782 A CN 109444782A CN 201811260592 A CN201811260592 A CN 201811260592A CN 109444782 A CN109444782 A CN 109444782A
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- mems switch
- port
- electronic calibration
- mems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/965—Switches controlled by moving an element forming part of the switch
Abstract
The Electronic Calibration module that the present disclosure discloses a kind of based on mems switch, system and method, including two symmetrical mems switch units, the mems switch unit includes at least four stationary contact ports, that is open circuit port, connectivity port, short-circuit port and load port, an and movable contact port, it is directly connected between the connectivity port of two mems switch units by transmission line, by switching the movable contact of mems switch unit and the connection logic state of each stationary contact, the switching of various reflective conditions and straight-through transmitting state is realized.The disclosure utilizes the excellent power linear characteristic and temperature characterisitic of mems switch device, ensure the wider power scope of application of impedance standard, the stability for being calibrated vector network analysis system is improved, the calibration efficiency and calibration accuracy of vector network analysis system are improved.
Description
Technical field
This disclosure relates to a kind of Electronic Calibration module based on mems switch, system and method.
Background technique
It is a kind of automatic calibration and error correction for vector network analyzer that vector network analysis system is calibrated automatically
Technology, its main feature is that automatic calibration, small in size, light-weight, USB powering mode, calibration accuracy height.Electronic Calibration part is suitable for arrow
The field calibration test for measuring Network Analyzer, can improve the various equipment Auto-Test Systems using vector network analyzer as core
The degree of automation and test speed.Electronic Calibration process be Electronic Calibration part and vector network analyzer by USB cable into
Row connection, is automatically controlled by vector network analyzer and completes calibration process.
MEMS (Micro electro mechanical system) MEMS is developed in microelectric technique basis
The new discipline with multi-crossed disciplines and infiltration to get up.MEMS device has for radio frequency and microwave regime executes speed
Fastly, low and high quality factor advantage is lost, the MEMS device most mature for radio frequency and microwave regime surely belongs to switch, with tradition
Field-effect tube or the semiconductor switch device of PIN diode compare, MEMS has extremely low series resistance and low execution function
Rate consumption, thus, it is lost very low.Furthermore mems switch is without semiconductor junction effect bring intermodulation distortion, and bears power
It is bigger, it can be calibrated under bigger input power.
Existing Electronic Calibration implementation is mainly constructed needed for Electronic Calibration by fet switch device
Hardware foundation, the impedance standards such as open circuit, short circuit and load needed for realizing Electronic Calibration by switching.Major defect is field
Effect switch device insertion loss is larger, while stationary wave characteristic is poor, especially when frequency is higher, since standing wave is poor
The frequency response curve between different impedance states is brought to reach unanimity, impedance standards different in this way can not be differentiated, therefore need
It is for selection to design more impedance states, and needs subsequent algorithm optimization to select preferably several standards of independence
It uses, reduces calibration efficiency.Meanwhile field effect transistor switch device compression point power is relatively low, causes calibration power bracket limited, limit
The application range of existing Electronic Calibration part is made.Simultaneously fieldtron switch, PIN switch be all semiconductor devices, be easy by
Temperature influences, and MEMS on state characteristic is pure conductor, therefore its temperature characterisitic is more superior much than field effect transistor switch and PIN switch.
Summary of the invention
The disclosure to solve the above-mentioned problems, proposes a kind of Electronic Calibration module, system and side based on mems switch
Method, the disclosure replace fet switch device to realize for hardware base needed for Electronic Calibration using mems switch device
Plinth utilizes the excellent stationary wave characteristic and temperature characterisitic of mems switch device, it is ensured that the mutual independence of impedance standard reduces
Circuit complexity improves calibration efficiency, it can be ensured that the wider power scope of application of impedance standard, raising are calibrated vector net
The stability of network analysis system further improves the calibration efficiency and calibration accuracy of vector network analysis system.
To achieve the goals above, the disclosure adopts the following technical scheme that
A kind of Electronic Calibration module based on mems switch, it is described including two symmetrical mems switch units
Mems switch unit includes at least four stationary contact ports, i.e. open circuit port, connectivity port, short-circuit port and load port, with
And a movable contact port, it is directly connected to by transmission line between the connectivity port of two mems switch units, passes through switching
The connection logic state of the movable contact of mems switch unit and each stationary contact realizes cutting for various reflective conditions and straight-through transmitting state
It changes.
It is limited as further, the load port passes through resistance eutral grounding.
It is limited as further, the short circuit port is directly grounded.
It is limited as further, the open circuit port open.
It is limited as further, the movable contact port connects external-connected port by transmission line.
A kind of electronic calibration system based on mems switch, including MEMS Electronic Calibration module, switch control module and control
Device processed, in which:
The controller, connected vector Network Analyzer are configured as issuing control instruction, to control the shape of mems switch
State switching；
The switch control module receives control instruction, and is connect by transmission line with MEMS Electronic Calibration module, drives
The movement of mems switch unit is closed with changing the movable contact port of MEMS Electronic Calibration module with the connection of corresponding stationary contact port
System.
Limited as further, the controller is also connected with memory and communication module, the memory with it is described
Controller is connected, the storage for Electronic Calibration part calibration data；The switch control unit is connected with the controller, is used for
Control the state switching of mems switch；The communication module is connected with the controller, for logical with vector network analyzer
Letter.
It is limited as further, the memory is SRAM memory and/or FLASH memory, and is stored with difference
Impedance standard value, the difference impedance standard value is as scaled values.
It is limited as further, automatic algorithms module, the Electronic Calibration is configured in the vector network analyzer
Part realizes the automatic calibration and error correction of vector network analyzer by the control of the automatic algorithms module.
A kind of Electronic Calibration method based on mems switch issues control instruction, controls the state switching of mems switch, drives
Dynamic mems switch unit movement, to change the movable contact port of MEMS Electronic Calibration module and the connection of corresponding stationary contact port
Relationship realizes the switching of various reflective conditions and straight-through transmitting state, and then realizes the automatic single, double port of vector network analyzer
Calibration and error correction.
Compared with prior art, the disclosure has the beneficial effect that
The Electronic Calibration part that the disclosure provides replaces fet switch device to realize by using mems switch device
For hardware foundation needed for Electronic Calibration, the excellent stationary wave characteristic of mems switch device is utilized, it is ensured that the phase of impedance standard
Mutual independence, reduces circuit complexity, improves calibration efficiency.Using the excellent power linear characteristic of mems switch device,
It ensures the wider power scope of application of impedance standard, improves the stability for being calibrated vector network analysis system, improve arrow
Measure the calibration efficiency and calibration accuracy of network analysis system.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present application, and the application's shows
Meaning property embodiment and its explanation are not constituted an undue limitation on the present application for explaining the application.
Fig. 1 is mems switch and PHEMT fet switch Insertion Loss Property comparison figure；
Fig. 2 is mems switch figure compared with PHEMT fet switch return loss characteristic；
Fig. 3 is the Electronic Calibration module principle figure provided in this embodiment realized based on mems switch；
Fig. 4 is the Electronic Calibration part schematic diagram provided in this embodiment based on mems switch technology；
Specific embodiment:
The disclosure is described further with embodiment with reference to the accompanying drawing.
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the application.Unless another
It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
In the disclosure, term for example "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", " side ",
The orientation or positional relationship of the instructions such as "bottom" is to be based on the orientation or positional relationship shown in the drawings, only to facilitate describing this public affairs
The relative for opening each component or component structure relationship and determination, not refers in particular to either component or element in the disclosure, cannot understand
For the limitation to the disclosure.
In the disclosure, term such as " affixed ", " connected ", " connection " be shall be understood in a broad sense, and indicate may be a fixed connection,
It is also possible to be integrally connected or is detachably connected；It can be directly connected, it can also be indirectly connected through an intermediary.For
The related scientific research of this field or technical staff can determine the concrete meaning of above-mentioned term in the disclosure as the case may be,
It should not be understood as the limitation to the disclosure.
Existing Electronic Calibration implementation as described in background mainly by fet switch device come
Hardware foundation needed for constructing Electronic Calibration, the resistance such as open circuit, short circuit and load needed for realizing Electronic Calibration by switching
Anti- standard.Major defect is that field effect transistor switch device insertion loss is larger, while stationary wave characteristic is poor, especially higher in frequency
When, bring the frequency response curve between different impedance states to reach unanimity since standing wave is poor, impedances different in this way
Standard can not be differentiated, it is therefore desirable to it is for selection to design more impedance states, and needs subsequent algorithm optimization to select
Preferably several standards of independence use, and reduce calibration efficiency.Meanwhile field effect transistor switch device compression point power is relatively low, leads
It causes calibration power bracket limited, limits the application range of existing Electronic Calibration part.Field effect transistor switch device is easy by temperature simultaneously
Degree variation influences.
A kind of Electronic Calibration part is present embodiments provided, is the Electronic Calibration module for including mems switch and transmission line；Electricity
Sub- calibration module includes open circuit, short circuit, load reflection impedance standard and straight-through transmission standard.
There are two ports for Electronic Calibration part tool.
It can connect switch control unit, to realize the control to mems switch, realize to different in Electronic Calibration module
The selection of standard.
Additionally provide a kind of electronic calibration system, wherein including above-mentioned Electronic Calibration part, automatic algorithms module and vector net
Network analyzer；Automatic algorithms module is built in the vector network analyzer, and the Electronic Calibration part passes through the automatic calculation
The automatic calibration and error correction of vector network analyzer are realized in the control of method module.
Electronic Calibration part replaces fet switch device to realize for Electronic Calibration by using mems switch device
Required hardware foundation utilizes the excellent stationary wave characteristic of mems switch device, it is ensured that the mutual independence of impedance standard reduces
Circuit complexity, improves calibration efficiency.
Utilize the excellent power linear characteristic of mems switch device, it is ensured that the wider power scope of application of impedance standard,
The stability for being calibrated vector network analysis system is improved, the calibration efficiency and calibration essence of vector network analysis system are improved
Degree.With executing, speed is fast, loss is low, quality factor are high and power compression point is high for radio frequency and microwave regime for MEMS device
Advantage, the MEMS device most mature for radio frequency and microwave regime surely belong to switch, with traditional field-effect tube or PIN diode
Semiconductor switch device is compared, and MEMS has extremely low series resistance and low execution power consumption, thus, loss is very low,
And stationary wave characteristic is good.Meanwhile mems switch device has excellent power linear characteristic, it is ensured that broader power is applicable in model
It encloses, the extensive application prospect in microwave circuit.
As shown in Figure 1 and Figure 2, with the AMMC-2008 of the RMSW221 and Agilent company of RADANT MEMS company this two
The Insertion Loss characteristic and return loss characteristic comparison of two class devices are given for the typical single-pole double-throw switch (SPDT) of kind, can therefrom be seen
Mems switch device is in the frequency range until 12.5GHz out, and compared to for PHEMT field effect transistor switch device, Insertion Loss is small about
1dB, and return loss is better than 10dB in the low side to 10GHz, high-end index is suitable.
Based on the electronic standard principle that mems switch technology is realized, as shown in Figure 3, it can be achieved that open circuit, short circuit, load etc. are more
Kind of reflected umpedance and straight-through transfer impedance state, to provide the original of automatic calibration and error correction for vector network analyzer
Scaled values.The excellent stationary wave characteristic of mems switch is more advantageous to the reflective condition of realization close to ideal emission state, and impedance shape
For state closer to ideal value, calibration accuracy is higher；And the power linear characteristic that mems switch device is excellent, it is ensured that broader power
The scope of application；The design symmetry of layout ensure that two port consistency and open the phase independence of short-circuit condition.
As shown in figure 3, electronic standard part is made of two mems switch units, by the logic shape for switching switch unit
State switches different connections (load, short circuit are opened a way and led directly to), various reflection shapes can be realized between port 1 and port 2
State and straight-through transmitting state.
Electronic standard part includes open circuit, short circuit, load reflection impedance standard and straight-through transmission standard these four basic standards
And several combination standard.
When it is applied to calibration system, and under the control of switch control unit 402, by mems switch corresponding
Electronic standard is connected on port.Calibration standard is the hardware foundation for determining final Electronic Calibration precision, the independence of standard
Better, standard is closer preferably to open the standards such as short circuit, higher calibration accuracy more easy to accomplish, and mems switch is extremely low
Loss characteristic and excellent stationary wave characteristic have been to ensure that the mutual independence and precision of electronic standard, and excellent power characteristic is true
The application of more broad power band is protected.
As shown in figure 4, a kind of electronic calibration system, including Electronic Calibration module 401, control circuit module 402, control electricity
Road module 402 is connected with Electronic Calibration module 401.
Switch control unit 402 is mems switch control unit, and control circuit module further includes CPU module 403, memory
404 and communication module 405；Memory 404 is connected with CPU module 403, the storage for Electronic Calibration part calibration data；Switch
Control unit 402 is connected with CPU module 403, and the state for controlling mems switch switches；Communication module 405 and CPU module phase
Even, for the communication with vector network analyzer.Electronic Calibration module 401 include mems switch, transmission line and load, open circuit,
The Electronic Calibrations module such as short circuit.
Memory is SRAM memory and/or FLASH memory, and SRAM memory and/or FLASH memory are stored with not
With impedance standard value, different impedance standard values are as scaled values.
Electronic Calibration part described in the present embodiment based on mems switch such as calibrates interpolation in conjunction with corresponding software algorithm
Fitting algorithm and residual error parser, so that it may realize the automatic single, double port calibration and error of vector network analyzer
Amendment.
Software algorithm is stored in automatic algorithms module, and automatic algorithms module is built in the host of vector network analyzer
In.Solves the problems such as existing Electronic Calibration part is relatively low due to the poor bring calibration efficiency of electronic standard standing wave index, more
For it is important that the power characteristic excellent using mems switch, has expanded the power application range of Electronic Calibration part.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Although above-mentioned be described in conjunction with specific embodiment of the attached drawing to the disclosure, model not is protected to the disclosure
The limitation enclosed, those skilled in the art should understand that, on the basis of the technical solution of the disclosure, those skilled in the art are not
Need to make the creative labor the various modifications or changes that can be made still within the protection scope of the disclosure.
Claims (10)
1. a kind of Electronic Calibration module based on mems switch, it is characterized in that: include two symmetrical mems switch units,
The mems switch unit includes at least four stationary contact ports, i.e. open circuit port, connectivity port, short-circuit port and load end
Mouthful and a movable contact port, be directly connected to by transmission line between the connectivity port of two mems switch units, by cutting
The movable contact of mems switch unit and the connection logic state of each stationary contact are changed, realizes various reflective conditions and straight-through transmitting state
Switching.
2. a kind of Electronic Calibration module based on mems switch as described in claim 1, it is characterized in that: the load port is logical
Cross resistance eutral grounding.
3. a kind of Electronic Calibration module based on mems switch as described in claim 1, it is characterized in that: the short circuit port is straight
Ground connection.
4. a kind of Electronic Calibration module based on mems switch as described in claim 1, it is characterized in that: the open circuit port is opened
Road.
5. a kind of Electronic Calibration module based on mems switch as described in claim 1, it is characterized in that: the movable contact port
External-connected port is connected by transmission line.
6. a kind of electronic calibration system based on mems switch, it is characterized in that: including according to any one of claims 1 to 5
MEMS Electronic Calibration module, switch control module and controller, in which:
The controller, connected vector Network Analyzer are configured as issuing control instruction, be cut with controlling the state of mems switch
It changes；
The switch control module receives control instruction, and is connect by transmission line with MEMS Electronic Calibration module, drives MEMS
Switch unit movement, to change the movable contact port of MEMS Electronic Calibration module and the connection relationship of corresponding stationary contact port.
7. a kind of electronic calibration system based on mems switch as claimed in claim 6, it is characterized in that: the controller also connects
It is connected to memory and communication module, the memory is connected with the controller, the storage for Electronic Calibration part calibration data；
The switch control unit is connected with the controller, and the state for controlling mems switch switches；The communication module and institute
It states controller to be connected, for the communication with vector network analyzer.
8. a kind of electronic calibration system based on mems switch as claimed in claim 6, it is characterized in that: the memory is
SRAM memory and/or FLASH memory, and different impedance standard values are stored with, the difference impedance standard value is as calibration
Value.
9. a kind of electronic calibration system based on mems switch as claimed in claim 6, it is characterized in that: the vector network point
Automatic algorithms module is configured in analyzer, the Electronic Calibration part realizes vector network by the control of the automatic algorithms module
The automatic calibration of analyzer and error correction.
10. a kind of Electronic Calibration method based on mems switch controls the shape of mems switch it is characterized in that: issuing control instruction
State switching, driving mems switch unit movement, to change the movable contact port of MEMS Electronic Calibration module and corresponding stationary contact
The connection relationship of port, realizes the switching of various reflective conditions and straight-through transmitting state, so realize vector network analyzer from
Move single, double port calibration and error correction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811260592.5A CN109444782A (en) | 2018-10-26 | 2018-10-26 | Electronic Calibration module based on mems switch, system and method |
| PCT/CN2019/095646 WO2020082819A1 (en) | 2018-10-26 | 2019-07-11 | Mems switch-based electronic calibration module, system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811260592.5A CN109444782A (en) | 2018-10-26 | 2018-10-26 | Electronic Calibration module based on mems switch, system and method |
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| CN109444782A true CN109444782A (en) | 2019-03-08 |
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| CN201811260592.5A Pending CN109444782A (en) | 2018-10-26 | 2018-10-26 | Electronic Calibration module based on mems switch, system and method |
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| WO (1) | WO2020082819A1 (en) |
Cited By (5)
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| CN110646693A (en) * | 2019-09-26 | 2020-01-03 | 上海仁童电子科技有限公司 | Test equipment of 100BASE-TX equipment |
| WO2020082819A1 (en) * | 2018-10-26 | 2020-04-30 | 中电科仪器仪表有限公司 | Mems switch-based electronic calibration module, system and method |
| CN112051534A (en) * | 2020-08-31 | 2020-12-08 | 中电科仪器仪表有限公司 | External device and method for improving measurement and calibration precision of microwave network |
| CN112485740A (en) * | 2020-12-11 | 2021-03-12 | 上海创远仪器技术股份有限公司 | Method for realizing automatic port identification of electronic calibration part based on amplitude difference values of various impedance states |
| WO2022033125A1 (en) * | 2020-08-14 | 2022-02-17 | 中国电子科技集团公司第十三研究所 | Two-port on-chip calibration member model and parameter determination method |
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| CN109444782A (en) * | 2018-10-26 | 2019-03-08 | 中电科仪器仪表有限公司 | Electronic Calibration module based on mems switch, system and method |
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| CN103368669A (en) * | 2013-06-21 | 2013-10-23 | 中国电子科技集团公司第四十一研究所 | Electronic corrector and correcting system thereof |
| CN103367848A (en) * | 2013-06-21 | 2013-10-23 | 中国电子科技集团公司第四十一研究所 | Microwave program-control step attenuator |
| CN108508392A (en) * | 2018-06-21 | 2018-09-07 | 中北大学 | A kind of four beam type Electronic Calibration part of T-type switch |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020082819A1 (en) * | 2018-10-26 | 2020-04-30 | 中电科仪器仪表有限公司 | Mems switch-based electronic calibration module, system and method |
| CN110646693A (en) * | 2019-09-26 | 2020-01-03 | 上海仁童电子科技有限公司 | Test equipment of 100BASE-TX equipment |
| WO2022033125A1 (en) * | 2020-08-14 | 2022-02-17 | 中国电子科技集团公司第十三研究所 | Two-port on-chip calibration member model and parameter determination method |
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| CN112051534A (en) * | 2020-08-31 | 2020-12-08 | 中电科仪器仪表有限公司 | External device and method for improving measurement and calibration precision of microwave network |
| CN112485740A (en) * | 2020-12-11 | 2021-03-12 | 上海创远仪器技术股份有限公司 | Method for realizing automatic port identification of electronic calibration part based on amplitude difference values of various impedance states |
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|---|---|
| WO2020082819A1 (en) | 2020-04-30 |
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