CN109427926A - The detection device and method of solar battery sheet - Google Patents
The detection device and method of solar battery sheet Download PDFInfo
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- CN109427926A CN109427926A CN201710778633.9A CN201710778633A CN109427926A CN 109427926 A CN109427926 A CN 109427926A CN 201710778633 A CN201710778633 A CN 201710778633A CN 109427926 A CN109427926 A CN 109427926A
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- 238000001514 detection method Methods 0.000 title claims abstract description 96
- 238000000034 method Methods 0.000 title abstract description 20
- 230000007547 defect Effects 0.000 claims abstract description 31
- 230000002950 deficient Effects 0.000 claims abstract description 27
- 239000000523 sample Substances 0.000 claims description 66
- 238000005259 measurement Methods 0.000 claims description 63
- 238000012545 processing Methods 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 7
- 238000003860 storage Methods 0.000 claims description 6
- 230000005622 photoelectricity Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 238000012216 screening Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013386 optimize process Methods 0.000 description 1
- 238000000241 photoluminescence detection Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention discloses the detection device and method of a kind of solar battery sheet, and the defect inspection method of solar battery sheet includes providing a solar battery sheet, with a receipts smooth surface and a plurality of main electrode line being set in the receipts smooth surface.The receipts smooth surface of solar battery sheet is divided into multiple areas to be measured, wherein each main electrode line passes through at least one area to be measured.A detection light is irradiated to the multiple areas to be measured for receiving smooth surface simultaneously.Then, the practical photocurrent values of multiple groups of solar battery sheet are measured, and practical photocurrent values described in multiple groups respectively correspond multiple areas to be measured.According to each group of practical photocurrent values of solar battery sheet, to determine whether corresponding area to be measured is defective.In addition, the detection device of solar battery sheet can be used to execute above-mentioned detection method.The defect inspection method of solar battery sheet provided by the present invention is to be detected simultaneously for different areas to be measured, therefore can shorten detection time.
Description
Technical field
The present invention relates to a kind of detection device of solar battery and methods, can be to solar battery more particularly to one kind
The device and method that the internal flaw of piece is detected.
Background technique
In the manufacturing side of solar battery sheet, typically only by the battery conversion efficiency for measuring solar battery sheet, with
Tentatively sift out defective products.However, the superiority and inferiority of battery conversion efficiency can not actually reflect whether solar battery sheet has fine fisssure
The internal flaws such as (micro crack) or line broken circuit (finger interruption).These internal flaws are to solar-electricity
The battery conversion efficiency influence of pond piece is not significant, but can have pole in stability, reliability and service life to solar battery sheet
It is big to influence.
It in the prior art, is that multiple solar battery sheet series weldings are being formed to solar energy module and then are utilizing electricity
Photoluminescence detection system once carries out Inner Defect Testing to multi-disc solar battery sheet.Specifically, to solar battery mould
Block imposes impressed current, and to excite the electronics inside solar battery sheet to high energy rank, and the electrons being excited are again and electric hole
Compound (recombination) and shine.At the same time, it is issued using near infrared ray camera grabs silicon substrate faint close
Infrared light can be obtained electroluminescent image.By analyzing electroluminescent image, it can be seen that the sun in solar cell module
Whether energy cell piece is defective.
However, electroluminescent detection system is not widely used in the solar battery sheet manufacturing side at present, to detect too
Positive energy cell piece.Solar battery sheet is primarily due in the manufacturing side not by series welding, so a piece of sun can only be detected every time
It can cell piece, excessively time-consuming.In addition, the additionally limitation of setting electroluminescent detection system and image processing techniques, it also can be big
The cost of width raising equipment.
In addition, in the manufacturing side, when detecting solar battery sheet to carry out classification judgement, it is desirable that at least completed per hour
The detection of 3000 solar battery sheets.In other words, the detection of every solar battery sheet need to be completed in 1 to 2 second.Therefore,
Although existing laser initiation electric current (laser beam inducedcurrent) image conversion detection technique can also be used for detection too
Whether positive energy cell piece has internal flaw, but the time for measuring a piece of solar battery sheet every time is at least wanted several minutes, can not
Meet detection speed required by the manufacturing side.
Summary of the invention
Technical problem to be solved by the present invention lies in provide a kind of solar battery sheet in view of the deficiencies of the prior art
Detection device and method by the way that solar battery sheet is divided into multiple areas to be measured, and measure solar energy in different areas to be measured
The photocurrent values of cell piece can detect the position where whether solar battery sheet defective and defect in a short time.
In order to solve the above technical problems, a wherein technical solution of the present invention is to provide a kind of solar energy
The detection device of cell piece.Solar battery sheet includes a receipts smooth surface and is set to a plurality of main electrode line received in smooth surface, is received
Smooth surface is divided into multiple areas to be measured, and each main electrode line passes through at least one area to be measured.The detection device of solar battery sheet
Including optical analog unit, multiple probe modules, multiple auxiliary measurement modules and a processing unit.Optical analog unit is to provide
One is irradiated in the detection light for receiving smooth surface.Multiple probe modules correspond respectively to a plurality of main electrode line, each probe module includes
One corresponds to the probe unit at least one area to be measured.Multiple auxiliary measurement modules are electrically connected in multiple probe modules.It is more
A auxiliary measures wired in parallel connection, and multiple auxiliary measurement modules are respectively cooperating with multiple probe modules, to measure respectively too
The practical photocurrent values of multiple groups of positive energy cell piece, and the practical photocurrent values of multiple groups respectively correspond multiple areas to be measured.Processing module electricity
Property is connected to multiple auxiliary measurement modules.Processing module is according to each group of practical photocurrent values of solar battery sheet, to determine
Whether corresponding area to be measured is defective.
Further, each main electrode line passes through multiple areas to be measured, and each main electrode line, which has, to be corresponded respectively to
Multiple tested points in multiple areas to be measured, each probe module include multiple probe lists corresponding to main electrode line described in same
Member, to contact the online multiple tested points of same main electrode respectively.
Further, each auxiliary measurement module includes multiple auxiliary measurement units being connected in parallel, and multiple auxiliary
Measurement unit is helped to connect respectively multiple probe units.
Further, the quantity of probe module, the quantity of multiple probe units on each probe module and to
The quantity for surveying area meets following relationship: R=M × N, wherein M is the quantity of probe module, and N is on each probe module
The quantity of multiple probe units, and R is the quantity in area to be measured.
Further, it connects and connects corresponding to multiple probe units of same main electrode line in each probe module
It connects, each auxiliary measurement module includes at least one auxiliary measurement unit, and one of series connection of multiple probe units connects
It is connected to few auxiliary measurement unit.
Further, the quantity in area to be measured and the quantity of probe module are identical.
Further, the detection device of solar battery sheet may further comprise: a main measurement module, be electrically connected
Processing module, to measure total photocurrent values of solar battery sheet and transmit total photocurrent values to processing module, wherein mutually simultaneously
The multiple auxiliary measurement modules for joining connection are connect with the main block coupled in series that measures.
Further, solar battery sheet includes a rear electrode, and detection device includes one to carry solar-electricity
The plummer of pond piece, plummer is equipped with an electrode contact to rear electrode in electrical contact, and rear electrode passes through electricity
Pole contact portion is electrically connected main measurement module.
Further, processing module generates a photoelectricity stream picture according to the position in multiple areas to be measured.
Further, processing module includes a database, and database storage corresponds respectively to the multiple of multiple areas to be measured
Reference photocurrent value, processing module compare the reference photocurrent value for corresponding to the same area to be measured and practical photocurrent values, with
Judge whether corresponding area to be measured is defective.
In order to solve the above technical problems, an other technical solution of the present invention is to provide a kind of solar energy
The defect inspection method of cell piece comprising: a solar battery sheet is provided, solar battery sheet has a receipts smooth surface and sets
It is placed in a plurality of main electrode line received in smooth surface;The receipts smooth surface of solar battery sheet is divided into multiple areas to be measured, wherein each
Main electrode line passes through at least one area to be measured;A detection light is irradiated to the multiple areas to be measured for receiving smooth surface simultaneously;Measure solar-electricity
The practical photocurrent values of the multiple groups of pond piece, wherein the practical photocurrent values of multiple groups respectively correspond multiple areas to be measured;And according to solar energy
Each group of practical photocurrent values of cell piece, to determine whether corresponding area to be measured is defective.
Further, the detection method of solar battery sheet further include: establish a database, database storage is right respectively
It should be in multiple reference photocurrent values in multiple areas to be measured.
Further, the step of establishing database includes: to provide a standard solar cells piece, standard solar cells
Piece is divided into multiple standards area to be measured, wherein multiple standard areas to be measured respectively correspond multiple areas to be measured;Irradiating and detecting light beam in
Multiple standards area to be measured of standard solar cells piece;And multiple reference photocurrent values of measuring standard solar battery sheet,
Wherein, multiple groups reference photocurrent value corresponds respectively to multiple groups standard area to be measured.
Further, according to each group of practical photocurrent values of solar battery sheet, to determine corresponding area to be measured
Whether defective step includes: to compare the reference photocurrent value for corresponding to the same area to be measured and practical photoelectric current respectively
Value;And when the error amount of practical photocurrent values and reference photocurrent value is more than a preset range, determine practical photocurrent values
Corresponding area to be measured has defect.
The beneficial effects of the present invention are the detection device of solar battery sheet provided by technical solution of the present invention and sides
Method, can be by " with multiple auxiliary measurement modules being connected in parallel, while the practical photoelectric current of multiple groups for measuring solar battery sheet
Value ", since the practical photocurrent values of multiple groups can respectively correspond multiple areas to be measured, and every group of practical photocurrent values can reflect out institute
The Carrier recombination situation in corresponding area to be measured, it is scarce so as to determine whether corresponding area to be measured has according to practical photocurrent values
It falls into.
For the manufacturing side, the detection device and method of solar battery sheet provided by the embodiment of the present invention can be with
Luminance-current-voltage (Lumination-Current-Voltage) detection system of script is integrated, because without being arranged
The cost that equipment is built can be greatly decreased in electroluminescent detection system and image interpretation device.In addition, provided by the present invention
The defect inspection method of solar battery sheet is to be detected simultaneously for different areas to be measured, therefore can shorten detection time.
Be further understood that feature and technology contents of the invention to be enabled, please refer to below in connection with it is of the invention specifically
Bright and attached drawing, however provided attached drawing is merely provided for reference and description, is not intended to limit the present invention.
Detailed description of the invention
Fig. 1 is the schematic side view of the wherein detection device of the solar battery sheet of an embodiment of the invention.
Fig. 2 is to be detected using the detection device of the wherein solar battery sheet of an embodiment of the invention to solar battery sheet
When schematic top plan view.
Fig. 3 is when being detected using the detection device of the solar battery sheet of another embodiment of the present invention to solar battery sheet
Schematic top plan view.
Fig. 4 is when being detected using the detection device of the solar battery sheet of another embodiment of the present invention to solar battery sheet
Schematic top plan view.
Fig. 5 is the flow chart of the detection method of the solar battery sheet of the embodiment of the present invention.
Specific embodiment
Be below illustrated by specific specific example it is presently disclosed in relation to the " detection device of solar battery sheet
And method " embodiment, those skilled in the art can by content disclosed in this specification understand advantages of the present invention and effect
Fruit.The present invention can be implemented or be applied by other different specific embodiments, and the various details in this specification can also base
In different viewpoints and application, various modifications and change are carried out without departing from the spirit of the present invention.In addition, attached drawing of the invention is only
To be simple schematically illustrate, not according to the description of actual size, state in advance.This will be explained in further detail in the following embodiments and the accompanying drawings
The relevant technologies content of invention, but the protection scope that disclosure of that is not intended to limit the invention.
It please refers to shown in Fig. 1 to Fig. 2.The side of Fig. 1 present invention wherein detection device of the solar battery sheet of an embodiment
Depending on schematic diagram, Fig. 2 is to be examined using the detection device of the wherein solar battery sheet of an embodiment of the invention to solar battery sheet
Schematic top plan view when survey.
As shown in Figure 1, the detection device 1 of the solar battery sheet of the embodiment of the present invention can be used to detect solar battery
Piece whether have can not with macroscopic defect, such as: fine fisssure or broken string etc..In addition to this, the embodiment of the present invention is too
The detection device 1 of positive energy cell piece also can detect the region where defect, and further according to each survey of solar battery sheet 2
Test result, to be classified to solar battery sheet.
The detection device 1 of the solar battery sheet of the embodiment of the present invention includes optical analog unit 10, multiple probe modules
11a, 11b, multiple auxiliary measurement module 12a, 12b, main measurement module 13 and a processing module 14.
Solar battery sheet 2 can be silica-based solar cell piece, such as: monocrystaline silicon solar cell piece, the amorphous silicon sun
It can cell piece or polysilicon solar battery slice.In the present embodiment, solar battery sheet 2 complete most processing procedure it
Afterwards, continue to detect solar battery sheet 2 using the detection device of the embodiment of the present invention 1, to obtain solar battery
Electrical performance, photoelectric conversion efficiency and the defect distribution state of piece 2, so as to which solar battery sheet 2 is classified or is sieved
Choosing.
Solar battery sheet 2 to be detected usually receives the back side opposite with the receipts smooth surface 2a smooth surface 2a and one with one
2b.Solar battery sheet 2 includes the electrode structure at right side 20 being arranged in receive on smooth surface 2a and the back side electricity that overleaf 2b is arranged
Pole 21.
Please also refer to Fig. 2, electrode structure at right side 20 includes a plurality of main electrode line 20a, 20b (namely bus (bus
)), and finger electrode (not shown) staggered with a plurality of main electrode line 20a, 20b bar.In addition, the receipts of solar battery sheet 2
Smooth surface 2a can be divided into multiple area R11~R24 to be measured, and each main electrode line 20a, 20b can pass through at least one area to be measured
R11~R24, and each main electrode line 20a, 20b it is upper can be equipped at least one be located at the tested point in area R11~R24 to be measured
(not labeled).
It in the embodiment of fig. 2, is carried out by taking the solar battery sheet 2 with two main electrode lines 20a, 20b as an example
Explanation.In the first direction dl mutually side by side, and two articles of main electrode lines 20a, 20b are towards the by two main electrode lines 20a, 20b
Two direction D2 extend.
As shown in Fig. 2, the receipts smooth surface 2a of the solar battery sheet 2 of the present embodiment be divided into m × n area R11 to be measured~
R24, wherein m is the quantity in each column (i.e. along a first direction D1 arrangement) area to be measured, and n is that every row (is arranged along second direction D2
Column) area to be measured quantity.
The quantity of area R11~R24 to be measured will affect the precision of testing result.Therefore, when wishing the accurate of testing result
Degree is higher, can will receive smooth surface 2a and be divided into more, the smaller area R11~R24 to be measured in region.In the present embodiment, light is received
Face 2a is divided into 2 × 4 area R11~R24 to be measured.
In the area to be measured of same row (being arranged along first direction D1), such as: the quantity m of area R11, R21 to be measured, it can be according to main electricity
The quantity of polar curve 20a, 20b determines.In the present embodiment, each main electrode line 20a (or main electrode line 20b) can pass through position
In the area R11~R14 to be measured (or area R21~R24 to be measured) of same a line.In addition, a plurality of main electrode line 20a, 20b passed through to
Surveying area R11~R24 will not be overlapped.In other words, it is logical only to have main electrode line 20a, a 20b by each area R11~R24 to be measured
It crosses, without having two main electrode line 20a, 20b in same area R11~R24 to be measured.However, in other embodiments,
The range of area R11~R24 to be measured can be changed according to actual needs, so that each area R11~R24 to be measured be made to cover two or two
More than item main electrode line 20a, 20b, the present invention are not intended to limit.
Referring again to Fig. 1.Optical analog unit 10 is to provide a detection light L for being irradiated in receipts smooth surface 2a.Optical analog unit
The luminous intensity of detection light L caused by 10 can adjust according to actual needs with wave spectrum.In the detection process, detection light L meeting
The entire receipts smooth surface 2a of solar battery sheet 2 is irradiated, to promote solar battery sheet 2 to generate photoelectric current.
Hold above-mentioned, multiple probe module 11a, 11b correspond respectively to a plurality of main electrode line 20a, 20b and are arranged.Therefore, it visits
The quantity of pin module is M, and can be identical with the quantity of main electrode line 20a, 20b.In addition, each probe module 11a (or 11b)
Including one correspond at least one area R11~R14 (or R21~R24) to be measured probe unit 111a~114a (or 111b~
114b)。
Referring to figure 2..In the present embodiment, each probe module 11a (or 11b) includes multiple corresponding to the main electricity of same
Probe unit 111a~114a (or 111b~114b) of polar curve 20a (or 20b), to contact same main electrode line 20a respectively
Multiple tested points on (or 20b).If probe unit 111a~114a (or 111b on each probe module 11a (or 11b)
~114b) quantity be N, then the quantity n of N meeting and every row area R11~R14 (or R21~R24) to be measured is identical.
Probe unit 111a~114a, the total meeting of 111b~114b are identical with the quantity of area R11~R24 to be measured.One
In embodiment, the quantity of area R11~R24 to be measured is R, the quantity M and each probe module 11a (or 11b) of probe module
On the quantity N of multiple probe unit 111a~114a (or 111b~114b) meet following relationship: R=M × N.
Referring again to Fig. 1.It is noted that the detection device 1 of the solar battery sheet of the embodiment of the present invention includes a use
To carry the plummer 15 of solar battery sheet 2.Plummer 15 is equipped with one and connects to the electrode of rear electrode 21 in electrical contact
Contact portion 150.
When solar battery sheet 2 is arranged on plummer 15, rear electrode 21 can be by contacting electrode contact 150
It is electrically connected at main measurement module 13.Accordingly, when probe unit 111a~114a, the 111b on probe module 11a, 11b~
When 114b touches main electrode line 20a, 20b, measure loop can be formed.
Referring again to Fig. 1, multiple auxiliary measurement module 12a, 12b are electrically connected in multiple probe module 11a, 11b.
Multiple auxiliary measurement module 12a, 12b in the present embodiment are to be connected in parallel, and multiple auxiliary measurement module 12a, 12b match respectively
Multiple probe module 11a, 11b are closed, the practical photocurrent values of the multiple groups to measure solar battery sheet 2 respectively, and multiple groups are practical
Photocurrent values respectively correspond multiple area R11~R24 to be measured.
Referring to figure 2., each auxiliary measurement module 12a (or 12b) of the present embodiment will include multiple auxiliary and measure list
First 121a~124a (or 121b~124b), and multiple auxiliary measurement unit 121a~124a, 121b~124b can connect respectively
Connect multiple probe unit 111a~114a, 111b~114b.When detection light L is irradiated to the receipts smooth surface 2a of solar battery sheet 2
When, each auxiliary measurement unit 121a~124a, 121b~124b may detect that a practical photocurrent values.
It should be noted that smooth surface 2a is received since detection light L is that irradiation is entire, each auxiliary measurement unit 121a~
The practical photocurrent values that 124a, 121b~124b are measured are not just as produced by the regional area of solar battery sheet 2
Photoelectric current, but photoelectric current caused by entire solar battery sheet 2.
However, if existing defects in area R11~R24 to be measured of solar battery sheet 2, can generate in defective place
The complex centre (recombination centers) of carrier (hole or electronics), to make the practical photoelectric current measured
It is worth lower.Therefore, it is each auxiliary measurement unit 121a~124a, 121b~124b amount to practical photocurrent values can reflect
The defect situation of corresponding area R11~R24 to be measured.By analyzing these practical photocurrent values, that is, it can determine whether solar battery
The region whether piece 2 is distributed with defect and defect.
Referring again to Fig. 1, processing module 14 be electrically connected at optical analog unit 10 and multiple auxiliary measurement module 12a,
12b.Processing module 14 controls the sending of optical analog unit 10 detection light L and is radiated on solar battery sheet 2, and control is multiple auxiliary
Measurement module 12a, 12b is helped to measure the practical photocurrent values of multiple groups of solar battery sheet 2.
In addition, processing module 14 receives and analyzes the practical light of multiple groups that multiple auxiliary measurement module 12a, 12b are measured
Current value.Specifically, each group practical photocurrent values of the processing module 14 according to solar battery sheet 2, corresponding to determine
Area R11~R24 to be measured it is whether defective.
In the present embodiment, processing module 14 further includes a database 140.The storage of database 140 corresponds respectively to multiple
Multiple reference photocurrent values of area R11~R24 to be measured.Processing module 14 can by compare correspond to the same area R11 to be measured~
The reference photocurrent value of R24 and practical photocurrent values, it is whether defective in corresponding area R11~R24 to be measured to judge.
For example, in the present embodiment, the receipts smooth surface 2a of solar battery sheet 2 be divided into 8 area R11 to be measured~
R24, therefore, processing module 14 can receive 8 groups of different locations in solar battery sheet 2 by auxiliary measurement module 12a, 12b
The practical photocurrent values measured.Assuming that solar battery sheet 2 has defect in area R11 to be measured, then processing module 14 can compare
Out, the practical photocurrent values arrived in R11 amount in area to be measured, can be lower than the reference photocurrent value of corresponding area R11 to be measured, to judge
Defect is located at area R11 to be measured.
In addition, processing module 14 can also be according to the region number that defect is distributed, to divide solar battery sheet 2
Grade and screening.Specifically, the grade scale and screening conditions of solar battery sheet 2 can be stored in database 140.Processing module
14 after judging to have defective area R11~R24 to be measured, can further learn the defective area R11~R24's to be measured of tool
Quantity, and obtain the gross area for having defective area R11~R24 to be measured and receive the ratio of the gross area of smooth surface 2a.
Grade scale above-mentioned is, for example, to set the gross area for having defective area R11~R24 to be measured and receive smooth surface 2a's
The ratio of the gross area is fallen in the first preset range, then is determined as best;If having total face of defective area R11~R24 to be measured
It is sub-optimal that the ratio of the gross area of product and receipts smooth surface 2a, which is fallen in the second preset range, and so on.Screening conditions example above-mentioned
Setting has the gross area of defective area R11~R24 to be measured in this way and the ratio of the gross area of receipts smooth surface 2a need to be default less than one
Value is determined as defective products if being more than aforementioned preset value.
In another embodiment, processing module 14 can be according to the position of multiple area R11~R24 to be measured, and respectively corresponds
The practical photocurrent values of these area R11~R24 to be measured generate a photoelectricity stream picture, in order to operator's interpretation solar-electricity
The defect distribution situation of pond piece 2.
In addition, the detection device 1 of the solar battery sheet of the embodiment of the present invention can also measure other of solar battery sheet 2
Electrical performance.Please refer to Fig. 1.Specifically, the detection device 1 of the solar battery sheet of the embodiment of the present invention further includes one and place
Manage the main measurement module 13 that module 14 is electrically connected.In addition, main multiple auxiliary measurement module 13 and be connected in parallel with each other
Measurement module 12a, 12b are connected in series.
Main measurement module 13 receives the control of processing module 14, to detect the electrical performance of solar battery sheet 2, such as:
Open-circuit voltage, short circuit current and photoelectric conversion efficiency etc..In the present embodiment, main measurement module 13 can be used to measure too
Total photocurrent values of positive energy cell piece 2, that is, multiple practical photoelectricity that multiple auxiliary measurement module 12a, 12b are measured respectively
The summation of flow valuve.
Specifically, it is assumed that multiple auxiliary measurement unit 121a~124a were measured respectively in area R11~R14 to be measured
Practical photocurrent values are I11、I12、I13、I14, and multiple auxiliary measurement unit 121b~124b are measured respectively in area R21~R24 to be measured
The practical photocurrent values measured are I21、I22、I23、I24.Total photocurrent values (I) that main measurement module 13 measures with it is each
Practical photocurrent values I11~I24Between relational expression are as follows: I=n11×I11+n12×I12+n13×I13+…+n24×I24.It is above-mentioned
n11~n24The coefficient value of multiple area R11~R24 to be measured is corresponded to respectively, and can be either logical by electrical simulation appropriate
Overcorrect measures to obtain.
Accordingly, when the detection device 1 using solar battery sheet provided by the embodiment of the present invention is to solar battery sheet 2
When carrying out defects detection, first solar battery sheet 2 is arranged on plummer 15, optical analog unit 10 is recycled to generate detection light
L is radiated at the entire receipts smooth surface 2a of solar battery sheet 2.Then, multiple probe module 11a, 11b can control to decline, same
Make multiple probe unit 111a~114a, 111b~114b contact solar cell piece 2 in time, to measure multiple solar-electricities
The practical photocurrent values of pond piece 2.Processing module 14 further according to received solar battery sheet 2 each group of practical photoelectric current
Value, to determine whether corresponding area R11~R24 to be measured is defective.Detailed detecting step will be in being described hereinafter.
Accordingly, the detection device 1 of solar battery sheet provided by the embodiment of the present invention can in a short time, same to hour hands
It to each area R11~R24 to be measured of solar battery sheet 2, measures and arrives corresponding practical photocurrent values, and according to practical photoelectric current
Whether solar battery sheet 2 defective and defect distribution situation to detect for value.In addition to this, provided by the embodiment of the present invention
The detection device 1 of solar battery sheet can also be screened and be classified to solar battery sheet 2 according to defect distribution situation.
Referring to figure 3..Fig. 3 is the detection device using the solar battery sheet of another embodiment of the present invention to solar-electricity
Schematic top plan view when pond piece detects.
Unlike the embodiment of Fig. 2, area R11~R21's to be measured of the solar battery sheet 2 in the embodiment of Fig. 3
Quantity is identical with the quantity of main electrode line 20a, 20b.For previous embodiment, the quantity of area R11~R21 to be measured subtracts
It is few, but area is larger.
In addition, in the present embodiment, same main electrode line 20a is corresponded in each probe module 11a (or 11b)
Multiple probe unit 111a~114a (or 111b~114b) of (or 20b) are to be connected in series.Each auxiliary measurement module 12a
(or 12b) assists measurement unit 121a, 121b (one is painted in Fig. 3) including at least one, and multiple probe unit 111a~
Auxiliary measurement unit 121a (or 121b) can be connected in series in one of those of 114a (or 111b~114b).
Similar with previous embodiment, processing module 14 receives and analyzes multiple auxiliary measurement module 12a, 12b and measures
The practical photocurrent values of multiple groups, it is corresponding to be measured to determine and according to each group of practical photocurrent values of solar battery sheet 2
Whether area R11~R21 is defective.
Referring to figure 4., Fig. 4 is the detection device using the solar battery sheet of another embodiment of the present invention to solar-electricity
Schematic top plan view when pond piece detects.In the fig. 4 embodiment, it receives smooth surface 2a and is divided into 4 area R11~R22 to be measured.It is same
Multiple probe unit 111a~114a (or 111b~114b) in probe module 11a (or 11b) are divided into multiple secondary group G1, G2
(or G3, G4).By taking one of them group G1 as an example, probe unit 111a~112a in each group G1 is serially connected company
It connects.
In addition, each of same probe module 11a secondary group G1, G2 can be parallel with one another by taking probe module 11a as an example
Connection.In that case, each auxiliary measurement module 12a (or 12b) will include the number with time group G1, G2 (or G3, G4)
Measure identical auxiliary measurement unit 121a~122a (or 121b~122b).Auxiliary measurement unit 121a can contact time group G1,
Auxiliary measurement unit 122a can contact time group G2, but measurement unit 121a is assisted in parallel to connect with auxiliary measurement unit 122a
It connects.Accordingly, auxiliary measurement module 12a, 12b can measure the practical photocurrent values of multiple groups of solar battery sheet 2.
Hold above-mentioned, the quantity in area to be measured is fewer, and area is bigger.Therefore, the speed of the processing of processing module 14 data is also very fast.
But the quantity in area to be measured is fewer, accuracy of the processing module 14 when determining that defect whether there is is lower.Therefore, this field skill
Art personnel can design circuit according to the demand of practical application, make multiple probe units in same probe module 11a, 11b
111a~114a, 111b~114b have different connection types in different modes, such as: it can be switched to whole in parallel, portions
Divide in parallel or all series connection.Accordingly, user can switch different measurement modes according to demand.
Referring to figure 5..Fig. 5 is the flow chart of the detection method of the solar battery sheet of the embodiment of the present invention.The present embodiment
The detection method of solar battery sheet can be executed by the detection device 1 of the solar battery sheet in Fig. 1 to Fig. 4.
In the step s 100, a solar battery sheet is provided, solar battery sheet has a receipts smooth surface and is set to receipts
A plurality of main electrode line in smooth surface.In step s101, the receipts smooth surface of solar battery sheet is divided into multiple areas to be measured,
In, each main electrode line passes through at least one area to be measured.
The mode for dividing the receipts smooth surface 2a of solar battery sheet 2 is referred to the embodiment of earlier figures 2 to Fig. 4.Such as preceding institute
It states, the quantity of area R11~R24 to be measured can determine according to actual needs.
In step s 102, while to the multiple areas to be measured for receiving smooth surface a detection light is irradiated.In the present embodiment, it can use
Optical analog unit 10 shown in FIG. 1 generates detection light L, and when being detected, detection light L can be radiated at solar battery sheet
2 entire receipts smooth surface.
In step s 103, the practical photocurrent values of multiple groups of solar battery sheet are measured, wherein the practical photoelectric current of multiple groups
Value respectively corresponds multiple areas to be measured.As previously mentioned, the auxiliary quantity in auxiliary measurement module 12a, 12b of Fig. 1 to Fig. 4 can be passed through
Survey unit 121a~124a, 121b~124b, the practical photocurrent values of multiple groups to measure solar battery sheet 2.
Then, corresponding to determine according to each group of practical photocurrent values of solar battery sheet in step S104
Whether area to be measured is defective.
It should be noted that step S200 can be carried out before carrying out step S104, a database, the database are established
Storage corresponds respectively to multiple reference photocurrent values in multiple areas to be measured.
In one embodiment, the mode for establishing database can be to provide a standard solar cells piece, and the standard sun
Energy cell piece is divided into multiple standards area to be measured.Multiple standard areas to be measured correspond respectively to the more of solar battery sheet to be measured
A area to be measured.Then, irradiating and detecting light is in multiple standards area to be measured of standard solar cells piece, and measuring standard solar-electricity
The multiple groups reference photocurrent value of pond piece, wherein multiple groups reference photocurrent value can correspond respectively to multiple standards area to be measured.
It measures to standard solar cells piece, when establishing database, can also be used as shown in Figures 1 to 4
The detection device of solar battery sheet executes.In addition, the grade scale and sieve of solar battery sheet can also be stored in database
Condition is selected, to carry out subsequent classification and screening.
Then, according to each group of practical photocurrent values of the solar battery sheet, to determine that corresponding area to be measured is
No defective step may include: to compare the reference photocurrent value for corresponding to the same area to be measured and practical photoelectric current respectively
Value;And when the error amount of practical photocurrent values and reference photocurrent value is more than a preset range, determine practical photocurrent values
Corresponding area to be measured has defect.
[beneficial effect of embodiment]
The beneficial effects of the present invention are the detection devices and method of solar battery sheet provided by the embodiment of the present invention
Can be integrated with luminance-current-voltage (Luminance-Current-Voltage) detection system of script, because without
Electroluminescent detection system and image interpretation device are set, the cost that equipment is built can be greatly decreased.
The detection device of solar battery sheet provided by the embodiment of the present invention can analyze solar battery sheet whether have it is scarce
Sunken, defect position and defect distribution situation, are conducive to that further solar battery sheet is classified and is screened.It removes
Except this, defect position and defect distribution situation are understood, it helps trace the process in production solar battery sheet
In the reason of causing defect, so as to advanced optimize process parameter and condition.
In addition, being to be shone simultaneously for all areas to be measured in the detection method of solar battery sheet provided by the present invention
Detection light is penetrated, is detected with the same time for different areas to be measured, therefore shorten detection time.Specifically, every solar energy
The detection time expection of cell piece can reach in 1~2 second, and may conform to detection speed required by the manufacturing side.
The detection device of solar battery sheet provided by the embodiment of the present invention is in addition to the position where can detecte out defect
It sets, also can detecte the electrical performance of solar battery sheet, such as: open-circuit voltage, short circuit current and photoelectric conversion efficiency.
Content disclosed above is only preferred possible embodiments of the invention, not thereby limits to right of the invention and wants
The protection scope of book is sought, so all equivalence techniques variations done with description of the invention and accompanying drawing content, are both contained in
In the protection scope of claims of the present invention.
Claims (14)
1. a kind of detection device of solar battery sheet, the solar battery sheet includes a receipts smooth surface and is set to the receipts
A plurality of main electrode line in smooth surface, the receipts smooth surface are divided into multiple areas to be measured, and main electrode line described in each is by least
One area to be measured, which is characterized in that the defect detection equipment of the solar battery sheet includes:
One optical analog unit is irradiated in the detection light for receiving smooth surface to provide one;
Multiple probe modules, correspond respectively to a plurality of main electrode line, each described probe module includes one corresponding to extremely
The probe unit in a few area to be measured;
Multiple auxiliary measurement modules are electrically connected in multiple probe modules, wherein multiple auxiliary measurement modules
It is connected in parallel, multiple auxiliary measurement modules are respectively cooperating with multiple probe modules, to measure the solar energy respectively
The practical photocurrent values of the multiple groups of cell piece, and practical photocurrent values described in multiple groups respectively correspond multiple areas to be measured;And
One processing module is electrically connected at multiple auxiliary measurement modules, wherein the processing module is according to the solar energy
Practical photocurrent values described in each group of cell piece, to determine whether the corresponding area to be measured is defective.
2. the detection device of solar battery sheet according to claim 1, which is characterized in that main electrode line described in each
By multiple areas to be measured, main electrode line described in each, which has, corresponds respectively to the multiple to be measured of multiple areas to be measured
Point, each described probe module includes multiple probe units corresponding to main electrode line described in same, same to contact respectively
The online multiple tested points of one main electrode.
3. the detection device of solar battery sheet according to claim 2, which is characterized in that each described auxiliary measures
Module includes multiple auxiliary measurement units being connected in parallel, and multiple auxiliary measurement units are connected multiple probes respectively
Unit.
4. the detection device of solar battery sheet according to claim 2, which is characterized in that the number of the probe module
Amount, the quantity of multiple probe units on each described probe module and the quantity in the area to be measured meet following pass
It is formula: R=M × N, wherein the M is the quantity of the probe module, and the N is multiple on each described probe module
The quantity of the probe unit, and the R is the quantity in the area to be measured.
5. the detection device of solar battery sheet according to claim 2, which is characterized in that each described probe module
In correspond to multiple probe units of main electrode line described in same and be connected in series, each described auxiliary measurement module packet
At least one auxiliary measurement unit is included, and the auxiliary of one of series connection at least one of multiple probe units measures
Unit.
6. the detection device of solar battery sheet according to claim 5, which is characterized in that the quantity in the area to be measured with
The quantity of the probe module is identical.
7. the detection device of solar battery sheet according to claim 1, which is characterized in that the solar battery sheet
Detection device may further comprise: a main measurement module, the processing module is electrically connected, to measure the solar-electricity
Total photocurrent values of pond piece simultaneously transmit total photocurrent values to the processing module, wherein the multiple institutes being connected in parallel with each other
Auxiliary measurement module is stated to connect with the main measurement block coupled in series.
8. the detection device of solar battery sheet according to claim 7, which is characterized in that the solar battery sheet packet
Include a rear electrode, the detection device includes a plummer to carry the solar battery sheet, on the plummer
Electrode contact equipped with one to the rear electrode in electrical contact, and the rear electrode passes through the electrode contact electricity
Property the connection main measurement module.
9. the detection device of solar battery sheet according to claim 1, which is characterized in that the processing module is according to more
The position in a area to be measured is to generate a photoelectricity stream picture.
10. the detection device of solar battery sheet according to claim 1, which is characterized in that the processing module includes
One database, the database storage correspond respectively to multiple reference photocurrent values in multiple areas to be measured, the processing mould
Block compares the reference photocurrent value for corresponding to the same area to be measured and the practical photocurrent values, opposite to judge
Whether the area to be measured answered is defective.
11. a kind of detection method of solar battery sheet, which is characterized in that the detection method of the solar battery sheet includes:
A solar battery sheet is provided, the solar battery sheet has a receipts smooth surface and is set to more in the receipts smooth surface
Bar main electrode line;
The receipts smooth surface of the solar battery sheet is divided into multiple areas to be measured, wherein main electrode line described in each is logical
Cross at least one area to be measured;
A detection light is irradiated to the multiple areas to be measured for receiving smooth surface simultaneously;
Measure the practical photocurrent values of multiple groups of the solar battery sheet, wherein practical photocurrent values described in multiple groups are right respectively
Answer multiple areas to be measured;And
The practical photocurrent values according to each group of the solar battery sheet, whether to determine the corresponding area to be measured
It is defective.
12. the detection method of solar battery sheet according to claim 11, which is characterized in that the solar battery
The detection method of piece further include: establish a database, the database storage corresponds respectively to the multiple of multiple areas to be measured
Reference photocurrent value.
13. the detection method of solar battery sheet according to claim 12, which is characterized in that establish the database
Step includes:
A standard solar cells piece is provided, the standard solar cells piece is divided into multiple standards area to be measured, wherein more
A standard area to be measured respectively corresponds multiple areas to be measured;
The detection light beam is irradiated in multiple standard areas to be measured of the standard solar cells piece;And
Measure multiple reference photocurrent values of the standard solar cells piece, wherein the difference of reference photocurrent value described in multiple groups
Corresponding to the area to be measured of standard described in multiple groups.
14. the detection method of solar battery sheet according to claim 12, which is characterized in that according to the solar-electricity
Practical photocurrent values described in each group of pond piece, to determine that the corresponding whether defective step in the area to be measured includes:
The reference photocurrent value for corresponding to the same area to be measured and the practical photocurrent values are compared respectively;And
When the practical photocurrent values and the error amount of the reference photocurrent value are more than a preset range, the reality is determined
The area to be measured corresponding to photocurrent values has defect.
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201110395A (en) * | 2009-09-15 | 2011-03-16 | Delta Electronics Inc | Method and apparatus of adjusting solar battery plate inspecting position |
CN102023235A (en) * | 2009-09-23 | 2011-04-20 | 台达电子工业股份有限公司 | Contrapuntal detection equipment and contrapuntal detection method of solar cell panel detection system |
JP2011198243A (en) * | 2010-03-23 | 2011-10-06 | Micronics Japan Co Ltd | Device, method and program for adjusting relative parallelism of probe unit, probe unit and panel conveyance member |
CN102253046A (en) * | 2011-04-26 | 2011-11-23 | 3i系统公司 | Electroluminescence defect detection and IV detection integrated system for solar cell |
CN102725859A (en) * | 2009-02-04 | 2012-10-10 | 应用材料公司 | Metrology and inspection suite for a solar production line |
CN105118792A (en) * | 2015-07-15 | 2015-12-02 | 苏州阿特斯阳光电力科技有限公司 | Test method of contact resistance between metal electrode and silicon substrate |
CN106653633A (en) * | 2015-10-28 | 2017-05-10 | 镇江大全太阳能有限公司 | Battery piece for detecting abnormality of probe row and operation method used for detection |
-
2017
- 2017-09-01 CN CN201710778633.9A patent/CN109427926A/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102725859A (en) * | 2009-02-04 | 2012-10-10 | 应用材料公司 | Metrology and inspection suite for a solar production line |
TW201110395A (en) * | 2009-09-15 | 2011-03-16 | Delta Electronics Inc | Method and apparatus of adjusting solar battery plate inspecting position |
CN102023235A (en) * | 2009-09-23 | 2011-04-20 | 台达电子工业股份有限公司 | Contrapuntal detection equipment and contrapuntal detection method of solar cell panel detection system |
JP2011198243A (en) * | 2010-03-23 | 2011-10-06 | Micronics Japan Co Ltd | Device, method and program for adjusting relative parallelism of probe unit, probe unit and panel conveyance member |
CN102253046A (en) * | 2011-04-26 | 2011-11-23 | 3i系统公司 | Electroluminescence defect detection and IV detection integrated system for solar cell |
CN105118792A (en) * | 2015-07-15 | 2015-12-02 | 苏州阿特斯阳光电力科技有限公司 | Test method of contact resistance between metal electrode and silicon substrate |
CN106653633A (en) * | 2015-10-28 | 2017-05-10 | 镇江大全太阳能有限公司 | Battery piece for detecting abnormality of probe row and operation method used for detection |
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