CN109396456B - Preparation device and method of spherical tungsten powder - Google Patents

Preparation device and method of spherical tungsten powder Download PDF

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Publication number
CN109396456B
CN109396456B CN201811630985.0A CN201811630985A CN109396456B CN 109396456 B CN109396456 B CN 109396456B CN 201811630985 A CN201811630985 A CN 201811630985A CN 109396456 B CN109396456 B CN 109396456B
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atomizing chamber
plasma torch
chamber
powder
hydrogen
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CN109396456A (en
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陈斌科
孙念光
向长淑
贺卫卫
凤治华
王超
李云蔚
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Xi'an Sailong Additive Technology Co ltd
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Xi'an Sailong Metal Materials Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/20Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
    • B22F9/22Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds using gaseous reductors

Abstract

The invention discloses a preparation device and a preparation method of spherical tungsten powder, and relates to the field of metal powder preparation. Solves the problems of complex production process and low sphericity of powder in the existing tungsten powder preparation process. The device comprises: the plasma torch cathode component and the plasma torch anode component are oppositely arranged in the atomization chamber; the inlet of the water inlet pipe is arranged at the outer side of the atomizing chamber, and the other end of the water inlet pipe extends into the atomizing chamber and is contacted with the plasma cathode component; the outlet of the water return pipe is arranged at the outer side of the atomizing chamber, and the other end of the water return pipe extends into the atomizing chamber and is communicated with the water inlet pipe; the water cooling pipe traverses the atomizing chamber, and the part of the water cooling pipe in the atomizing chamber is contacted with the plasma anode component; one end of the air supply pipeline comprises two air inlets positioned at the outer side of the atomizing chamber, and the air outlet of the air supply pipe extends into the atomizing chamber and is smaller than the plasma torch anode part in distance with the plasma torch cathode part; the cyclone separator and the vacuum system are respectively communicated with the atomizing chamber.

Description

Preparation device and method of spherical tungsten powder
Technical Field
The invention relates to the technical field of metal powder, in particular to a preparation device and method of spherical tungsten powder.
Background
In recent years, spherical tungsten powder has been widely used in the fields of low-temperature molten metal porous filters, ionizers, tube cathodes and thermal spraying. At present, chemical vapor deposition is mainly adopted to act on tungsten hexafluoride gas to produce large-granularity spherical tungsten powder of 40-650 mu m. The method has the advantages of complex production process and low sphericity of powder.
Disclosure of Invention
The embodiment of the invention provides a preparation device and a preparation method of spherical tungsten powder, which are used for solving the problems that the existing production process is complex and the sphericity of the formed powder is not high.
The embodiment of the invention provides a preparation device of spherical tungsten powder, which comprises the following components: the plasma torch system, the atomizing chamber, the cyclone separator and the vacuum system;
the plasma torch system comprises a plasma torch cathode component, a plasma torch anode component, a water return pipe, a water inlet pipe, a water cooling pipe and a gas supply pipeline;
the plasma torch cathode component and the plasma torch anode component are oppositely arranged in the atomization chamber;
the inlet of the water inlet pipe is arranged at the outer side of the atomizing chamber, and the other end of the water inlet pipe extends into the atomizing chamber and is in contact with the plasma cathode component; the outlet of the water return pipe is arranged at the outer side of the atomizing chamber, and the other end of the water return pipe extends into the atomizing chamber and is communicated with the water inlet pipe;
the water cooling pipe traverses the atomizing chamber, and the part of the water cooling pipe in the atomizing chamber is in contact with the plasma anode component;
one end of the air supply pipeline comprises two air inlets positioned at the outer side of the atomizing chamber, and the air outlet of the air supply pipe extends into the atomizing chamber and the distance between the air outlet of the air supply pipe and the cathode part of the plasma torch is smaller than the distance between the air outlet of the air supply pipe and the anode part of the plasma torch;
the cyclone separator and the vacuum system are respectively communicated with the atomizing chamber.
Preferably, a section of the water inlet pipe extending into the atomization chamber comprises an inner ring and an outer ring, the inner ring is communicated with the inlet of the water inlet pipe, the outer ring is in seamless contact with the plasma cathode component, and the part of the water return pipe extending into the atomization chamber is in seamless contact with the outer ring.
Preferably, the inlet of the water return pipe, the outlet of the water inlet pipe and the air inlet of the air supply pipeline are both arranged at the middle position of the top end of the atomizing chamber.
Preferably, the cyclone separator comprises a cavity, a powder inlet, an air outlet and a fine powder collecting end which are arranged on the cavity;
the powder inlet is communicated with the atomization chamber and is used for sucking fine-particle-size tungsten powder with small particle size and hydrogen fluoride gas in the atomization chamber, and the hydrogen fluoride gas is discharged out of the cyclone separator through the air outlet; the tungsten powder with small particle size falls to the fine powder collecting end.
Preferably, the device further comprises a coarse powder collecting end arranged at the lower end of the atomizing chamber, wherein the coarse powder collecting end is used for collecting tungsten powder with larger particle size of metal powder formed in the atomizing chamber.
The embodiment of the invention also provides a preparation method of the spherical tungsten powder, which comprises the following steps:
the ion torch cathode component and the plasma torch anode component which are arranged in the atomization chamber ionize with high-purity hydrogen filled through the gas supply pipeline to generate plasma arcs;
filling mixed gas of tungsten hexafluoride and hydrogen through the gas supply pipeline, and heating and reacting the mixed gas by the ion torch cathode component and the plasma torch anode component to generate tungsten powder with fine particle size and hydrogen fluoride gas;
the tungsten powder with larger particle size in the tungsten powder with small particle size is recovered to a coarse powder collecting end arranged below the atomizing chamber, and the tungsten powder with smaller particle size in the tungsten powder with small particle size is recovered to a fine powder collecting end arranged at the lower end of the cyclone device by the cyclone device.
Preferably, before the ion torch cathode component and the plasma torch anode component which are arranged in the atomization chamber ionize with the high purity hydrogen filled through the gas supply pipeline to generate the plasma arc, the plasma arc device further comprises:
vacuumizing the atomizing chamber, coarse powder collecting end and cyclone classifier by vacuum system until the vacuum degree reaches 5×10 -3 Pa;
And filling high-purity hydrogen into the atomizing chamber and the cyclone separator.
Preferably, the purity of the tungsten hexafluoride is greater than 99.999%, and the purity of the hydrogen is greater than 99.999%;
the volume ratio of the tungsten hexafluoride to the hydrogen included in the mixed gas is 1:3.
preferably, the pressure in the atomization chamber is between 0.04 and 0.06Mpa.
The embodiment of the invention provides a preparation device and a preparation method of spherical tungsten powder, wherein the device comprises the following steps: the plasma torch system, the atomizing chamber, the cyclone separator and the vacuum system; the plasma torch system comprises a plasma torch cathode component, a plasma torch anode component, a water return pipe, a water inlet pipe, a water cooling pipe and a gas supply pipeline; the plasma torch cathode component and the plasma torch anode component are oppositely arranged in the atomization chamber; the inlet of the water inlet pipe is arranged at the outer side of the atomizing chamber, and the other end of the water inlet pipe extends into the atomizing chamber and is in contact with the plasma cathode component; the outlet of the water return pipe is arranged at the outer side of the atomizing chamber, and the other end of the water return pipe extends into the atomizing chamber and is communicated with the water inlet pipe; the water cooling pipe traverses the atomizing chamber, and the part of the water cooling pipe in the atomizing chamber is in contact with the plasma anode component; one end of the air supply pipeline comprises two air inlets positioned at the outer side of the atomizing chamber, and the air outlet of the air supply pipe extends into the atomizing chamber and the distance between the air outlet of the air supply pipe and the cathode part of the plasma torch is smaller than the distance between the air outlet of the air supply pipe and the anode part of the plasma torch; the cyclone separator and the vacuum system are respectively communicated with the atomizing chamber. The device heats the mixed gas of the high-purity tungsten hexafluoride and the hydrogen which are input through the gas supply pipeline by the high-temperature plasma torch in the atomizing chamber, the mixed gas of the high-purity tungsten hexafluoride and the hydrogen is subjected to chemical reaction to generate solid tungsten powder, the tungsten powder can obtain better sphericity under the action of surface tension when being solidified, and meanwhile, the whole preparation process has controllable reaction atmosphere, high speed and high efficiency, and continuous production can be realized. The device solves the problems that the existing tungsten powder production process is complex, and the sphericity of the formed powder is not high.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of a device for preparing spherical tungsten powder according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a plasma torch structure according to an embodiment of the present invention;
fig. 3 is a schematic flow chart of a preparation method of spherical tungsten powder according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Fig. 1 is a schematic structural diagram of a preparation apparatus for spherical tungsten powder according to an embodiment of the present invention, and fig. 2 is a schematic structural diagram of a plasma torch according to an embodiment of the present invention. As shown in fig. 1, the device mainly comprises a vacuum system 1, an atomization chamber 2, a coarse powder collecting end 3, a plasma torch system 4, a cyclone separator 5 and a bracket platform 6. Wherein, plasma torch system 4 sets up in atomizing room 2, and plasma torch system 4 includes plasma torch cathode assembly 10, plasma torch anode assembly 11, wet return 7, inlet tube 8, water cooling pipe 12 and air feed pipe 9.
Specifically, as shown in fig. 2, the plasma torch cathode part 10 and the plasma torch anode part 11 are disposed in the atomizing chamber 2 in opposition, and the distance between the plasma torch cathode part 10 and the tip of the atomizing chamber 2 is smaller than the distance between the plasma torch anode part 11 and the tip of the atomizing chamber 2.
Because the plasma torch system 4 is in a transferred arc type working mode, in order to cool the plasma torch cathode part 10 and ensure the service life of the plasma torch cathode, it is preferable that a water inlet pipe 8 and a water return pipe 7 are arranged at the upper end of the plasma torch cathode part 10 in the atomizing chamber 2, and the plasma torch cathode part 10 is cooled through the water inlet pipe 8 and the water return pipe 7. Specifically, as shown in fig. 2, the inlet of the water inlet pipe 8 is arranged outside the atomizing chamber 2, the other end extends to the atomizing chamber 2, and a section of the water inlet pipe 8 extending into the atomizing chamber 2 comprises an inner ring and an outer ring, wherein one end of the inner ring extending into the atomizing chamber 2 is communicated with the inlet of the water inlet pipe 8, the other end and the outer ring simultaneously extend to the plasma torch cathode part 10, and the outer ring is in seamless contact with the plasma torch cathode part 10; further, the water inlet pipe 8 of the water return pipe 7 extends into the atomizing chamber 2 to be in seamless contact with the outer ring, and the outlet of the water return pipe 7 is arranged at the outer side of the atomizing chamber 2.
In practical application, cooling water flows into the inner ring of the water inlet pipe 8 through the inlet of the water inlet pipe 8, when the cooling water flows into the accessories of the plasma torch cathode part 10, the cooling water flows into the outer ring from the inner ring, and the outer ring is in seamless contact with the plasma torch cathode part 10, so that the cooling water is in contact with the plasma torch cathode part 10, and the effect of cooling the plasma torch cathode part 10 is achieved; further, the cooling water flows out of the atomizing chamber 2 through the return pipe 7 in contact with the outer ring.
In order to be able to cool the plasma torch anode part 11 and ensure the service life of the plasma torch anode part 11, it is preferred that a water-cooled tube 12 is arranged in the atomizing chamber 2, which water-cooled tube 12 traverses the atomizing chamber 2 and the part of the water-cooled tube 12 in the atomizing chamber 2 is in contact with the plasma torch anode part 11. By providing the water cooling pipe 12 near the plasma torch anode part 11, the plasma torch anode part 11 can be cooled, so that the service life of the plasma torch anode part 11 is determined.
Further, gas is supplied into the plasma torch system 4 through two gas inlets of the gas supply pipe 9, specifically, one end of the gas supply pipe 9 includes two gas inlets located outside the atomizing chamber 2, and the gas outlet of the gas supply pipe 9 extends into the atomizing chamber 2 and is less than the distance from the plasma torch anode part 11 to the plasma torch cathode part 10.
Through the gas supply pipeline 9, on one hand, hydrogen can be filled into the plasma torch system 4, so that the pressure in the vacuumized atomizing chamber 2 reaches between 0.04 and 0.06 Mpa; on the other hand, the mixed gas of tungsten hexafluoride and hydrogen can be filled into the atomizing chamber 2 through two gas inlets provided outside the atomizing chamber 2.
In practical use, the plasma torch cathode assembly 10 and the plasma torch anode assembly 11 heat the mixed gas of tungsten hexafluoride and hydrogen to produce a reaction to produce fine particle size tungsten powder and hydrogen fluoride gas. In the embodiment of the invention, the tungsten powder can be prepared by the method, so that the method is different from the tungsten powder prepared by adopting tungsten raw materials in the prior art, and the problems of complex process and low sphericity of the powder are solved.
As shown in fig. 1, the apparatus for preparing spherical tungsten powder according to the embodiment of the present invention includes a vacuum system 1 communicating with an atomization chamber 2, a coarse powder collecting end 3 disposed at a lower end of the atomization chamber 2, a cyclone separator 5 communicating with the atomization chamber 2, and a support platform 6 for disposing the atomization chamber 2 and the cyclone separator 5.
In practical application, the vacuum system 1 is used for vacuumizing the atomizing chamber 2 and the cyclone separator 5; the coarse powder collecting end 3 is used for collecting powder from the atomizing chamber 2; the cyclone 5 is used for sucking fine particle size tungsten powder having a small particle size and hydrogen fluoride gas into the atomizing chamber 2.
As shown in fig. 1, the cyclone separator 5 provided in the embodiment of the present invention mainly includes a cavity, a powder inlet, an air outlet and a fine powder collecting end, which are disposed on the cavity; specifically, the powder inlet is communicated with the atomizing chamber 2 for sucking fine particle size tungsten powder having a small particle size and hydrogen fluoride gas in the atomizing chamber 2, and further, the hydrogen fluoride gas is discharged out of the cyclone 5 through the air outlet; the tungsten powder with small particle size falls to the fine powder collecting end.
In order to more clearly describe the device for preparing spherical tungsten powder provided by the embodiment of the invention, the method for preparing spherical tungsten powder provided by the embodiment of the invention is described below, and the structure of the device for preparing spherical tungsten powder and the specific powder preparation step can be more clearly understood through the powder preparation method.
The preparation method of the spherical tungsten powder mainly comprises the following steps:
step 101, a plasma torch cathode part 10 and a plasma torch anode part 11 which are arranged in an atomization chamber 2 are ionized with high-purity hydrogen filled through a gas supply pipeline 9 to generate a plasma arc;
step 102, filling mixed gas of tungsten hexafluoride and hydrogen through the gas supply pipeline 9, and heating and reacting the mixed gas by the plasma torch cathode component 10 and the plasma torch anode component 11 to generate tungsten powder with fine particle size and hydrogen fluoride gas;
and 103, recovering the tungsten powder with larger particle size in the tungsten powder with small particle size to a coarse powder collecting end 3 arranged below the atomizing chamber 2, and recovering the tungsten powder with smaller particle size in the tungsten powder with small particle size to a fine powder collecting end arranged at the lower end of the cyclone 5 by the cyclone 5.
Before step 101, the atomizing chamber 2, the coarse powder collecting end 3 and the cyclone classifier are required to be vacuumized by the vacuum system 1, and when the vacuum degree of the atomizing chamber 2, the coarse powder collecting end 3 and the cyclone separator 5 reaches 5×10 -3 After Pa, the evacuation operation is stopped.
Then high-purity hydrogen is filled into the atomizing chamber 2 and the cyclone separator 5, and the pressure in the atomizing chamber 2 is set to be 0.04-0.06 Mpa.
In step 101, a power supply of the 100kW plasma torch system 4 is turned on, and the plasma torch cathode part 10 and the plasma torch anode part 11 which are arranged in the atomizing chamber 2 ionize with high purity hydrogen gas filled through the gas supply pipeline 9 to generate plasma arcs, wherein the plasma arc temperature in the atomizing chamber 2 can reach 10000 degrees at maximum.
In step 102, a mixed gas of tungsten hexafluoride and hydrogen is charged into the atomizing chamber 2 through two gas inlets provided outside the atomizing chamber 2. In practical application, the plasma torch cathode component 10 and the plasma torch anode component 11 heat and react the mixed gas of tungsten hexafluoride and hydrogen to generate tungsten powder with fine particle size and hydrogen fluoride gas; in the embodiment of the invention, the purity of tungsten hexafluoride is more than 99.999 percent, and the purity of hydrogen is more than 99.999 percent, wherein the volume ratio of the mixed gas of tungsten hexafluoride and hydrogen is 1:3.
Further, the flow rate of the mixed gas of tungsten hexafluoride and hydrogen is between 60 and 100L/min, and it should be noted that in practical application, the flow rate and pressure of the mixed gas can be adjusted.
Further, the hydrogen fluoride gas is classified by the cyclone 5, and the solid tungsten powder is collected in the atomizing chamber 2 and the cyclone 5.
In step 103, the mixed gas of tungsten hexafluoride and hydrogen is heated to generate chemical reaction to generate tungsten powder with fine particle size and hydrogen fluoride gas. When the cyclone 5 communicated with the atomizing chamber 2 works, the hydrogen fluoride gas formed in the atomizing chamber 2 can be extracted, when the hydrogen fluoride gas enters the cyclone 5, the hydrogen fluoride gas can be discharged through an air outlet arranged at the top end of the cyclone 5, further, when the cyclone 5 extracts the hydrogen fluoride gas in the atomizing chamber 2, tungsten powder with smaller particle size in the atomizing chamber 2 can be simultaneously extracted into the cyclone 5, and in the embodiment of the invention, tungsten powder with smaller particle size entering the cyclone 5 can fall into a fine powder collecting end arranged at the bottom end of a cavity of the cyclone 5. Furthermore, the particle size of the tungsten powder not extracted by the cyclone 5 in the atomizing chamber 2 is relatively large with respect to the particle size of the extracted tungsten powder, and the tungsten powder remaining in the atomizing chamber 2 can be collected by the coarse powder collecting end 3 provided below the atomizing chamber 2.
In the embodiment of the invention, the prepared tungsten powder can be naturally distinguished according to the particle size of the powder by arranging the two tungsten powder collecting ends, so that the production efficiency of the tungsten powder is improved on one hand, the preparation speed of the tungsten powder can be controlled by controlling the inlet amount of tungsten hexafluoride and hydrogen at the air inlet in the whole tungsten powder preparation process, furthermore, the mixed gas of the high-purity tungsten hexafluoride and the hydrogen is subjected to chemical reaction to generate solid tungsten powder, and the tungsten powder can obtain better sphericity under the action of surface tension when being solidified.
In summary, an embodiment of the present invention provides a device and a method for preparing spherical tungsten powder, where the device includes: the plasma torch system, the atomizing chamber, the cyclone separator and the vacuum system; the plasma torch system comprises a plasma torch cathode component, a plasma torch anode component, a water return pipe, a water inlet pipe, a water cooling pipe and a gas supply pipeline; the plasma torch cathode component and the plasma torch anode component are oppositely arranged in the atomization chamber; the inlet of the water inlet pipe is arranged at the outer side of the atomizing chamber, and the other end of the water inlet pipe extends into the atomizing chamber and is in contact with the plasma cathode component; the outlet of the water return pipe is arranged at the outer side of the atomizing chamber, and the other end of the water return pipe extends into the atomizing chamber and is communicated with the water inlet pipe; the water cooling pipe traverses the atomizing chamber, and the part of the water cooling pipe in the atomizing chamber is in contact with the plasma anode component; one end of the air supply pipeline comprises two air inlets positioned at the outer side of the atomizing chamber, and the air outlet of the air supply pipe extends into the atomizing chamber and the distance between the air outlet of the air supply pipe and the cathode part of the plasma torch is smaller than the distance between the air outlet of the air supply pipe and the anode part of the plasma torch; the cyclone separator and the vacuum system are respectively communicated with the atomizing chamber. The device heats the mixed gas of the high-purity tungsten hexafluoride and the hydrogen which are input through the gas supply pipeline by the high-temperature plasma torch in the atomizing chamber, the mixed gas of the high-purity tungsten hexafluoride and the hydrogen is subjected to chemical reaction to generate solid tungsten powder, the tungsten powder can obtain better sphericity under the action of surface tension when being solidified, and meanwhile, the whole preparation process has controllable reaction atmosphere, high speed and high efficiency, and continuous production can be realized. The device solves the problems that the existing tungsten powder production process is complex, and the sphericity of the formed powder is not high.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims (3)

1. A device for preparing spherical tungsten powder, comprising: the plasma torch system, the atomizing chamber, the cyclone separator and the vacuum system;
the plasma torch system comprises a plasma torch cathode component, a plasma torch anode component, a water return pipe, a water inlet pipe, a water cooling pipe and a gas supply pipeline;
the plasma torch cathode component and the plasma torch anode component are oppositely arranged in the atomization chamber;
the inlet of the water inlet pipe is arranged at the outer side of the atomizing chamber, and the other end of the water inlet pipe extends into the atomizing chamber and is contacted with the plasma torch cathode component; the outlet of the water return pipe is arranged at the outer side of the atomizing chamber, and the other end of the water return pipe extends into the atomizing chamber and is communicated with the water inlet pipe;
the water cooling pipe traverses the atomizing chamber, and the part of the water cooling pipe in the atomizing chamber is in contact with the plasma torch anode component;
one end of the air supply pipeline comprises two air inlets positioned at the outer side of the atomizing chamber, and the air outlet of the air supply pipeline extends into the atomizing chamber and is smaller than the distance between the air outlet of the air supply pipeline and the cathode part of the plasma torch;
the cyclone separator and the vacuum system are respectively communicated with the atomizing chamber;
filling mixed gas of tungsten hexafluoride and hydrogen into the atomizing chamber through two air inlets positioned at the outer side of the atomizing chamber; the purity of the tungsten hexafluoride is greater than 99.999%, the purity of the hydrogen is greater than 99.999%, and the volume ratio of the tungsten hexafluoride to the hydrogen is 1:3, a step of; the pressure in the atomization chamber is between 0.04mpa and 0.06 mpa;
the plasma torch system is used for heating the mixed gas of tungsten hexafluoride and hydrogen to react to generate tungsten powder with fine particle size and hydrogen fluoride gas;
the vacuum system is used for vacuumizing the atomizing chamber and the cyclone separator; the cyclone separator is used for sucking tungsten powder with small particle diameter and hydrogen fluoride gas in the atomization chamber;
the device comprises an atomization chamber, a coarse powder collecting end, a powder collecting end and a powder collecting end, wherein the coarse powder collecting end is arranged at the lower end of the atomization chamber and is used for collecting tungsten powder with larger particle size of metal powder formed in the atomization chamber;
the section of the water inlet pipe extending into the atomizing chamber comprises an inner ring and an outer ring, the inner ring is communicated with the inlet of the water inlet pipe, the outer ring is in seamless contact with the cathode part of the plasma torch, and the part of the water return pipe extending into the atomizing chamber is in seamless contact with the outer ring;
the inlet of the water return pipe, the outlet of the water inlet pipe and the air inlet of the air supply pipeline are both arranged at the middle position of the top end of the atomizing chamber.
2. The apparatus of claim 1, wherein the cyclone separator comprises a chamber, a powder inlet disposed on the chamber, an air outlet, and a fines collection end;
the powder inlet is communicated with the atomization chamber and is used for sucking fine-particle-size tungsten powder with small particle size and hydrogen fluoride gas in the atomization chamber, and the hydrogen fluoride gas is discharged out of the cyclone separator through the air outlet; the tungsten powder with small particle size falls to the fine powder collecting end.
3. A method for producing a spherical tungsten powder based on the production apparatus for a spherical tungsten powder according to claim 1 or 2, comprising:
the plasma torch cathode component and the plasma torch anode component which are arranged in the atomization chamber ionize with high-purity hydrogen filled through the gas supply pipeline to generate plasma arcs;
filling mixed gas of tungsten hexafluoride and hydrogen through the gas supply pipeline, and heating and reacting the mixed gas by the plasma torch cathode component and the plasma torch anode component to generate tungsten powder with fine particle size and hydrogen fluoride gas; the purity of the tungsten hexafluoride is greater than 99.999%, the purity of the hydrogen is greater than 99.999%, and the volume ratio of the tungsten hexafluoride to the hydrogen is 1:3, a step of; the pressure in the atomization chamber is between 0.04mpa and 0.06 mpa;
the tungsten powder with larger particle size in the tungsten powder with small particle size is recovered to a coarse powder collecting end arranged below the atomizing chamber, and the tungsten powder with smaller particle size in the tungsten powder with small particle size is recovered to a fine powder collecting end arranged at the lower end of the cyclone device by the cyclone device;
the plasma torch cathode component and the plasma torch anode component which are arranged in the atomization chamber are ionized with high-purity hydrogen filled through the gas supply pipeline to generate plasma arcs, and the plasma torch further comprises:
vacuum-pumping the atomizing chamber, coarse powder collecting end and cyclone separator until the vacuum degree reaches 5×10 - 3 Pa;
And filling high-purity hydrogen into the atomizing chamber and the cyclone separator.
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