CN109387323A - A kind of pressure sensor - Google Patents
A kind of pressure sensor Download PDFInfo
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- CN109387323A CN109387323A CN201811524273.0A CN201811524273A CN109387323A CN 109387323 A CN109387323 A CN 109387323A CN 201811524273 A CN201811524273 A CN 201811524273A CN 109387323 A CN109387323 A CN 109387323A
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- Prior art keywords
- coating
- pressure sensor
- parylene
- pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provides a kind of pressure sensor, and the contact surface and pressure-bearing surface of the pressure sensor are coated with parylene coating.The coating method of the parylene coating is the following steps are included: carry out mask process without coating the position of parylene coating in pressure sensor, and clean to coated face；The raw material and coupling agent of parylene coating are added into coating machine, coats parylene coating on the contact surface and pressure-bearing surface of the pressure sensor using coating machine；The exposure mask on pressure sensor is taken out after coating.Pressure sensing service life in the case where measuring accuracy is unaffected greatly improves.
Description
Technical field
The invention belongs to sensor field, it is related to a kind of pressure sensor more particularly to a kind of with parylene coating
Pressure sensor.
Background technique
The compression face of most of pressure sensor is protected using silicone oil or glue class currently on the market, also there is portion
Partial pressure sensor product is protected not to compression face, this has resulted in certain hidden danger.When pressure sensor by
When pressure surface is directly contacted with water or oils for a long time without protection, if certain pollution can be caused to contact surface,
To influence the output accuracy of pressure sensor, and the pressure sensor protected using silicone oil or glue class is also faced
Same problem, selected silicone oil or glue it is anti-that some chemistry can or can not occur when contacting for a long time with water or oils
It answers, to influence output accuracy or lead to falling off for glue or silicone oil.With the development of the times, nanotechnology application gradually
It steps into people's lives, and Parylene coating this technology can then combine application with pressure sensor, to make
The compression face of pressure sensor obtains best protection.
Parylene prepares the 0.1-100 micron film coating of (CVD) using vacuum vapor deposition technique, thickness uniformly,
It is fine and close it is pin-free, transparent it is unstressed, without auxiliary agent, not disfiguring workpiece, have excellent electrical insulating property and protective, be most to have in the present age
Moisture-proof, mould proof, the anti-corrosion, salt-fog preventing coating material of effect.Under the premise of not influencing pressure precision suffered by pressure sensor,
Effective persistently protection can be provided to the compression face of pressure sensor.
207472327 U of CN discloses a kind of electrode applied to vortex street flowmeter sensor, and the detection of electrode is led outside core
Portion is coated with Parylene film.At least resistance to 3KV of the dielectric strength of the Parylene film.The invention also discloses applications to have
The vortex street flowmeter sensor of above-mentioned electrode, and application have the flowmeter of such vortex street flowmeter sensor.The utility model
Parylene film is plated on core to avoid the insulation sleeve of traditional structure from influencing measurement result by leading in detection, makes its measurement accuracy
It is higher, and mounting structure is also simpler.The utility model can be improved the sealing performance of detection through-hole by sealing drum, thus
So that sensor obtains better seal, its service life is improved.
202494536 U of CN discloses a kind of pressure sensor pressure cell of Parylene film, and pedestal (5) upper cover connects
Have nut cap (3), be connected on the pedestal in nut cap Silicon pressure chip (1), is connected between connected stitch on Silicon pressure chip and pedestal
Conductive wire (2), the pedestal, Silicon pressure chip, conductive wire and the stitch end being connect with conductive wire
Surface be coated with parylene coating (6), Silicon pressure chip, the surface coating Parylene of surface coating parylene coating apply
The periphery one for the stitch end of the conductive wire of layer and surface coating parylene coating being connect with conductive wire
Property envelope be connected with layer of silica gel (4).Pedestal in the pressure sensor, Silicon pressure chip, conductive wire and connect with conductive wire
The surface of the stitch end connect is coated with parylene coating, is not coated in the contact surface and pressure-bearing surface of pressure sensor
On.
Summary of the invention
Aiming at the problems existing in the prior art, the present invention provides a kind of pressure sensor, and the pressure sensor connects
Contacting surface and pressure-bearing surface are coated with parylene coating, and pressure sensing service life in the case where measuring accuracy is unaffected is big
Width improves.
In order to achieve the above object, the invention adopts the following technical scheme:
The present invention provides a kind of pressure sensor, and the contact surface and pressure-bearing surface of the pressure sensor are applied coated with Parylene
Layer.
As currently preferred technical solution, the parylene coating coating with a thickness of 10~15 μm, such as 10 μm,
10.5 μm, 11 μm, 11.5 μm, 12 μm, 12.5 μm, 13 μm, 13.5 μm, 14 μm, 14.5 μm or 15 μm etc., it is not limited to institute
The numerical value enumerated, other interior unlisted numerical value of the numberical range are equally applicable.
In the present invention, when parylene coating is less than 10 μm, pressure sensor bottom compression face can not be played enough
Protective effect, also not can guarantee compression face can be completely with the gas of contact, and water, the media such as oil are kept apart, when parylene coating is big
When 15 μm, blocked up coating may influence whether the pressure that pressure sensor compression face is sensed, to influence pressure biography
The output accuracy of sensor.
As currently preferred technical solution, the coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and coated face is carried out clear
It washes；
The raw material and coupling agent of parylene coating are added into coating machine, using coating machine in the pressure sensor
Parylene coating is coated on contact surface and pressure-bearing surface；
The exposure mask on pressure sensor is taken out after coating.
As currently preferred technical solution, the coated face is cleaned using the mixed liquor of pure and mild gasoline.
As currently preferred technical solution, the alcohol is isopropanol and/or dehydrated alcohol.
Preferably, the gasoline is NY-120 gasoline.
Preferably, the volume ratio of the pure and mild gasoline is 1:(0.5~2), such as 1:0.5,1:0.6,1:0.8,1:1,1:
1.2,1:1.5,1:1.8 or 1:2 etc., it is not limited to cited numerical value, other interior unlisted numerical value of the numberical range
It is equally applicable, preferably 1:1.
As currently preferred technical solution, the coated face cleaned after cleannes less than 37 μ g/in2,
Such as 5 μ g/in2、10μg/in2、15μg/in2、20μg/in2、25μg/in2、30μg/in2Or 35 μ g/in2Deng, it is not limited to
Cited numerical value, other interior unlisted numerical value of the numberical range are equally applicable.
Isopropanol can be exceedingly fast to mix with water-wet and quickly volatilize and take away, and reach the dry and comfortable effect of strength dehumidifying, and have
There are highly efficiently antistatic and cleaning function, prevent dust and dirt from gathering, various metal contamination dirts, such as oxygen can be removed effective and rapidly
Compound, aqueous vapor, dust mixture and magnetic carbon dust etc. can effectively improve the clean degree that pressure sensor is coated face, and effectively storage
It is longer to deposit the phase, is easy to save.As 37 μ g/in of cleannes >2When, it is bonding with pressure sensor strong not can guarantee parylene coating
Degree, is easy to appear bubble or obscission, so as to cause the failure of parylene coating, influences the output essence of pressure sensor
Degree.
The pressure sensor is toasted before coating parylene coating as currently preferred technical solution
Drive tide processing.
Preferably, it is 55~65 DEG C that the temperature of tide processing is driven in the baking, such as 55 DEG C, 56 DEG C, 57 DEG C, 58 DEG C, 59 DEG C, 60
DEG C, 61 DEG C, 62 DEG C, 63 DEG C, 64 DEG C or 65 DEG C etc., it is not limited to cited numerical value, other are not arranged in the numberical range
The numerical value of act is equally applicable.
Preferably, it is described baking drive tide processing time be 2~3h, as 2h, 2.1h, 2.2h, 2.3h, 2.4h, 2.5h,
2.6h, 2.7h, 2.8h, 2.9h or 3h etc., it is not limited to cited numerical value, other interior unlisted numbers of the numberical range
It is worth equally applicable.
As currently preferred technical solution, before coating parylene coating, the chamber walls of coating machine are carried out
Coating release agent processing.
Preferably, the release agent is the Micro-90 release agent aqueous solution of volumn concentration 2~5%, wherein volume
Percentage composition can be 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% etc., it is not limited to cited numerical value,
Other unlisted numerical value are equally applicable in the numberical range.
As currently preferred technical solution, the silane coupling agent is appointing in KH-550, KH-560 or KH-570
It anticipates a kind of or at least two combinations, preferably KH-570.
In the present invention, before coating parylene coating, the first above-mentioned coupling agent of coating by vaporization.
As currently preferred technical solution, the coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses the mixed of pure and mild gasoline
Close liquid coated face is cleaned, the coated face cleaned after cleannes less than 37 μ g/in2, to right after cleaning
The pressure sensor carries out baking at 55~65 DEG C and drives 2~3h of tide processing；
Coating release agent processing is carried out to the chamber walls of coating machine, be added into coating machine the raw material of parylene coating with
And coupling agent, parylene coating is coated on the contact surface and pressure-bearing surface of the pressure sensor using coating machine；
The exposure mask on pressure sensor is removed after coating.
Compared with prior art, the present invention is at least had the advantages that
The present invention provides a kind of pressure sensor, and the contact surface and pressure-bearing surface of the pressure sensor are applied coated with Parylene
Layer, pressure sensing service life in the case where measuring accuracy is unaffected greatly improve 1~2 times.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of pressure sensor provided by the invention.
In figure: 1- is the pressure-sensitive chip of pressure sensor, and it is Parylene that 2-, which is the contact surface and compression face of pressure sensor,
Coating needs overlay area, and 3- is the shell of pressure sensor, and the entire bottom of shell is all compression face and parylene coating
Overlay area is needed, 4- is the connector of pressure sensor, and 5- is the circuit board of pressure sensor.
The present invention is described in more detail below.But following examples is only simple example of the invention, not generation
Table or limitation the scope of the present invention, protection scope of the present invention are subject to claims.
Specific embodiment
A kind of pressure sensor is provided in present invention specific implementation, the contact surface and pressure-bearing surface of the pressure sensor apply
It is covered with parylene coating.
Wherein, the parylene coating coating method the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and coated face is carried out clear
It washes；
The raw material and coupling agent of parylene coating are added into coating machine, using coating machine in the pressure sensor
Parylene coating is coated on contact surface and pressure-bearing surface；
The exposure mask on pressure sensor is taken out after coating.
In the present invention, the naked hand of operator is forbidden to take in each link of process flow；Operator must wear antistatic work
It takes, wear antistatic wrist strap and antistatic finger-stall.
In the present invention, the mask process uses adhesive tape or plastic foil etc. to apply pressure sensor without coating Parylene
The part of layer is coated.
In the present invention, the method for removing the exposure mask on pressure sensor is using scalpel or double-edged razor blade etc., carefully
Coating at pressure sensor bottom and mask material boundary line is drawn and is broken, then carefully removes mask material.
In the present invention, need to detect the appearance of parylene coating after coating is complete, such as under magnifying glass 100% into
Row checks.Film is forbidden to have any small scar scratch, abrade, wounding, peeling etc. and destroying film layer integrality；Film layer answers light
It is sliding, uniform, transparent, must not there are bubble, hickie, corrugation, tangerine peel, pin hole, cracking, mechanical admixture etc.；The place that should not be applied is not
Coated is obtained to be covered.
In the present invention, the raw material of the parylene coating used is the conventional selection of this field, therefore no longer superfluous in specification
It states.
In the present invention, single-piece inner packing is carried out to the pressure sensor for having coated parylene coating, packaging material is quiet to prevent
Electric bag and foam rubber cushion；Intermediate package is polyester foam box；Outer packing has anti-collision using the packing case for being suitble to long-distance transport, packing case
It hits, anti-reverse, acid-proof, fire danger sign.
In order to better illustrate the present invention, it is easy to understand technical solution of the present invention, of the invention is typical but non-limiting
Embodiment is as follows:
Pressure sensor used in the specific embodiment of the invention is that the new power in Jiangxi senses Science and Technology Ltd.'s research and development life
The 1000 type pressure sensors produced, 1000 type sensors are a pressure sensors based on MEMS pressure-sensitive chip, be can be realized
Absolute voltage/ratio-voltage output mode, supply voltage are 5V/3.3V DC voltage optional mode.The pressure test model of product
It encloses for 0~1000kPa gauge pressure.
In use process, testing pressure is acted on silicon MEMS pressure-sensitive chip, causes Wheatstone bridge electricity on pressure chip
The variation of resistance.By the processing of external ASIC, which is converted to the voltage change linear with pressure, and will
It is analog voltage signal that it, which is exported,.
Embodiment 1
The present embodiment provides a kind of pressure sensor, the contact surface and pressure-bearing surface of the pressure sensor are coated with 10 μ m-thicks
Parylene coating.
The coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses volume ratio 1:0.5
Isopropanol and the mixed liquor of NY-120 gasoline coated face is cleaned, the coated face cleaned after cleaning
Degree is less than 37 μ g/in2, to carrying out at 55 DEG C to the pressure sensor, baking drive is damp to handle 3h after cleaning；
Coating release agent processing is carried out to the chamber walls of coating machine, be added into coating machine the raw material of parylene coating with
And coupling agent kh-570, coating machine coating by vaporization coupling agent on the contact surface and pressure-bearing surface of the pressure sensor is first used, then make
Parylene coating is coated on the contact surface and pressure-bearing surface of the pressure sensor with coating machine；
The exposure mask on pressure sensor is taken out after coating.
Embodiment 2
The present embodiment provides a kind of pressure sensor, the contact surface and pressure-bearing surface of the pressure sensor are coated with 15 μ m-thicks
Parylene coating.
The coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses volume ratio 1:5's
The mixed liquor of dehydrated alcohol and NY-120 gasoline cleans coated face, the coated face cleaned after cleaning
Degree is less than 37 μ g/in2, to carrying out at 65 DEG C to the pressure sensor, baking drive is damp to handle 2h after cleaning；
Coating release agent processing is carried out to the chamber walls of coating machine, be added into coating machine the raw material of parylene coating with
And coupling agent kh-570, coating machine coating by vaporization coupling agent on the contact surface and pressure-bearing surface of the pressure sensor is first used, then make
Parylene coating is coated on the contact surface and pressure-bearing surface of the pressure sensor with coating machine；
The exposure mask on pressure sensor is taken out after coating.
Embodiment 3
The present embodiment provides a kind of pressure sensor, the contact surface and pressure-bearing surface of the pressure sensor are coated with 12 μ m-thicks
Parylene coating.
The coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses volume ratio 1:1's
The mixed liquor of dehydrated alcohol and NY-120 gasoline cleans coated face, the coated face cleaned after cleaning
Degree is less than 37 μ g/in2, to carrying out at 60 DEG C to the pressure sensor, baking drive is damp to handle 2.5h after cleaning；
Coating release agent processing is carried out to the chamber walls of coating machine, be added into coating machine the raw material of parylene coating with
And coupling agent kh-570, coating machine coating by vaporization coupling agent on the contact surface and pressure-bearing surface of the pressure sensor is first used, then make
Parylene coating is coated on the contact surface and pressure-bearing surface of the pressure sensor with coating machine；
The exposure mask on pressure sensor is taken out after coating.
Embodiment 4
The present embodiment provides a kind of pressure sensor, the contact surface and pressure-bearing surface of the pressure sensor are coated with 11 μ m-thicks
Parylene coating.
The coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses volume ratio 1:0.8
Isopropanol and the mixed liquor of NY-120 gasoline coated face is cleaned, the coated face cleaned after cleaning
Degree is less than 37 μ g/in2, to carrying out at 60 DEG C to the pressure sensor, baking drive is damp to handle 2.5h after cleaning；
Coating release agent processing is carried out to the chamber walls of coating machine, be added into coating machine the raw material of parylene coating with
And coupling agent kh-570, coating machine coating by vaporization coupling agent on the contact surface and pressure-bearing surface of the pressure sensor is first used, then make
Parylene coating is coated on the contact surface and pressure-bearing surface of the pressure sensor with coating machine；
The exposure mask on pressure sensor is taken out after coating.
Embodiment 5
The present embodiment provides a kind of pressure sensor, the contact surface and pressure-bearing surface of the pressure sensor are coated with 13 μ m-thicks
Parylene coating.
The coating method of the parylene coating the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses volume ratio 1:1.2
Dehydrated alcohol and the mixed liquor of NY-120 gasoline coated face is cleaned, the coated face cleaned after it is clear
Cleanliness is less than 37 μ g/in2, to carrying out at 65 DEG C to the pressure sensor, baking drive is damp to handle 2h after cleaning；
Coating release agent processing is carried out to the chamber walls of coating machine, be added into coating machine the raw material of parylene coating with
And coupling agent kh-570, coating machine coating by vaporization coupling agent on the contact surface and pressure-bearing surface of the pressure sensor is first used, then make
Parylene coating is coated on the contact surface and pressure-bearing surface of the pressure sensor with coating machine；
The exposure mask on pressure sensor is taken out after coating.
Comparative example 1
In this comparative example, coated face is cleaned in addition to dehydrated alcohol is used only in the coating method of parylene coating
Outside, other conditions are same as Example 3.
Comparative example 2
In this comparative example, coated face is carried out in addition to NY-120 gasoline is used only in the coating method of parylene coating
Cleaning is outer, and other conditions are same as Example 3.
Comparative example 3
In this comparative example, other than parylene coating is with a thickness of 5 μm, other conditions are same as Example 3.
Comparative example 4
In this comparative example, other than parylene coating is with a thickness of 30 μm, other conditions are same as Example 3.
The service life of the pressure sensor that 1-5 is provided in the present embodiment, opposite conventional pressure sensor can be improved 1~2
Times, and precision is not affected.Compared with Example 3, the Parylene coated side of the partial pressure sensor of comparative example 1 occurs
Bubble, and flatness is deteriorated, there is parylene coating and falls off in the Parylene coated side of the partial pressure sensor of comparative example 2
The phenomenon that, there is water or oil enters bottom in the test contacted for a long time with water or oil in the partial pressure sensor of comparative example 3
The partial pressure sensor of the phenomenon that compression face causes the output accuracy of pressure sensor to have received larger impact, comparative example 4 exist
In accuracy test after parylene coating technique, a biggish minus deviation is presented in output accuracy, can not accurately sense institute
The pressure being subject to.
The Applicant declares that the present invention is explained by the above embodiments detailed construction feature of the invention, but the present invention is simultaneously
It is not limited to above-mentioned detailed construction feature, that is, does not mean that the present invention must rely on above-mentioned detailed construction feature and could implement.Institute
Belong to those skilled in the art it will be clearly understood that any improvement in the present invention, to the equivalence replacement of component selected by the present invention
And increase, selection of concrete mode of accessory etc., all of which fall within the scope of protection and disclosure of the present invention.
The preferred embodiment of the present invention has been described above in detail, still, during present invention is not limited to the embodiments described above
Detail within the scope of the technical concept of the present invention can be with various simple variants of the technical solution of the present invention are made, this
A little simple variants all belong to the scope of protection of the present invention.
It is further to note that specific technical features described in the above specific embodiments, in not lance
In the case where shield, can be combined in any appropriate way, in order to avoid unnecessary repetition, the present invention to it is various can
No further explanation will be given for the combination of energy.
In addition, various embodiments of the present invention can be combined randomly, as long as it is without prejudice to originally
The thought of invention, it should also be regarded as the disclosure of the present invention.
Claims (10)
1. a kind of pressure sensor, which is characterized in that the contact surface and pressure-bearing surface of the pressure sensor are applied coated with Parylene
Layer.
2. pressure sensor according to claim 1, which is characterized in that the parylene coating coating with a thickness of 10~
15μm。
3. pressure sensor according to claim 1 or 2, which is characterized in that the coating method packet of the parylene coating
Include following steps:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and coated face is cleaned；
Into coating machine be added parylene coating raw material and coupling agent, using coating machine the pressure sensor contact
Parylene coating is coated on face and pressure-bearing surface；
The exposure mask on pressure sensor is taken out after coating.
4. pressure sensor according to claim 3, which is characterized in that applied using the mixed liquor of pure and mild gasoline to described
Clad can is cleaned.
5. pressure sensor according to claim 3 or 4, which is characterized in that the alcohol is isopropanol and/or anhydrous second
Alcohol；
Preferably, the gasoline is NY-120 gasoline；
Preferably, the volume ratio of the pure and mild gasoline is 1:(0.5~2), preferably 1:1.
6. according to the described in any item pressure sensors of claim 3-5, which is characterized in that after the coated face is cleaned
Cleannes less than 37 μ g/in2。
7. according to the described in any item pressure sensors of claim 3-6, which is characterized in that right before coating parylene coating
The pressure sensor carries out baking and drives tide processing；
Preferably, it is 55~65 DEG C that the temperature of tide processing is driven in the baking；
Preferably, the baking drives the time that tide is handled as 2~3h.
8. according to the described in any item pressure sensors of claim 3-7, which is characterized in that right before coating parylene coating
The chamber walls of coating machine carry out coating release agent processing；
Preferably, the release agent is the Micro-90 release agent aqueous solution of volumn concentration 2~5%.
9. according to the described in any item pressure sensors of claim 3-8, which is characterized in that the silane coupling agent is KH-
550, any one in KH-560 or KH-570 or at least two combination, preferably KH-570.
10. according to the described in any item pressure sensors of claim 3-9, which is characterized in that the coating of the parylene coating
Method the following steps are included:
Mask process is carried out without coating the position of parylene coating in pressure sensor, and uses the mixed liquor of pure and mild gasoline
Coated face is cleaned, the coated face cleaned after cleannes less than 37 μ g/in2, to described after cleaning
Pressure sensor carries out baking at 55~65 DEG C and drives 2~3h of tide processing；
Coating release agent processing is carried out to the chamber walls of coating machine, the raw material and idol of parylene coating are added into coating machine
Join agent, coats parylene coating on the contact surface and pressure-bearing surface of the pressure sensor using coating machine；
The exposure mask on pressure sensor is taken out after coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811524273.0A CN109387323A (en) | 2018-12-13 | 2018-12-13 | A kind of pressure sensor |
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|---|---|---|---|
| CN201811524273.0A CN109387323A (en) | 2018-12-13 | 2018-12-13 | A kind of pressure sensor |
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ID=65429257
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114260155A (en) * | 2021-12-24 | 2022-04-01 | 深圳市山禾乐科技开发有限公司 | Process for improving adhesive force of coating layer |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1664527A (en) * | 2004-03-04 | 2005-09-07 | 株式会社电装 | Pressure sensor |
| US20110270028A1 (en) * | 2010-04-30 | 2011-11-03 | Allergan, Inc. | Biocompatible and biostable implantable medical device |
| CN202494536U (en) * | 2012-02-17 | 2012-10-17 | 杭州科岛微电子有限公司 | Pressure sensor pressure sensitive element coated with parylene |
| WO2015073734A1 (en) * | 2013-11-13 | 2015-05-21 | Massachusetts Institute Of Technology | Thin-film parylene membrane transfer |
| CN105595959A (en) * | 2014-10-16 | 2016-05-25 | 王洪超 | Elastic pressure sensor matrix and probe for detecting tissue elasticity |
| CN106811735A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of mobile phone nano water-proof film |
| CN106811733A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of the nano water-proof film of Intelligent worn device |
| CN107520102A (en) * | 2017-09-11 | 2017-12-29 | 清华大学 | A kind of coupling processing method |
| CN107615225A (en) * | 2015-04-06 | 2018-01-19 | 鉴定国际公司 | For the system and method using pressure-sensitive film capture images |
| CN108424711A (en) * | 2018-04-26 | 2018-08-21 | 东莞新劲电子有限公司 | Electronic shelf label product increases protective coating technique |
-
2018
- 2018-12-13 CN CN201811524273.0A patent/CN109387323A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1664527A (en) * | 2004-03-04 | 2005-09-07 | 株式会社电装 | Pressure sensor |
| US20110270028A1 (en) * | 2010-04-30 | 2011-11-03 | Allergan, Inc. | Biocompatible and biostable implantable medical device |
| CN202494536U (en) * | 2012-02-17 | 2012-10-17 | 杭州科岛微电子有限公司 | Pressure sensor pressure sensitive element coated with parylene |
| WO2015073734A1 (en) * | 2013-11-13 | 2015-05-21 | Massachusetts Institute Of Technology | Thin-film parylene membrane transfer |
| CN105595959A (en) * | 2014-10-16 | 2016-05-25 | 王洪超 | Elastic pressure sensor matrix and probe for detecting tissue elasticity |
| CN107615225A (en) * | 2015-04-06 | 2018-01-19 | 鉴定国际公司 | For the system and method using pressure-sensitive film capture images |
| CN106811735A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of mobile phone nano water-proof film |
| CN106811733A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of the nano water-proof film of Intelligent worn device |
| CN107520102A (en) * | 2017-09-11 | 2017-12-29 | 清华大学 | A kind of coupling processing method |
| CN108424711A (en) * | 2018-04-26 | 2018-08-21 | 东莞新劲电子有限公司 | Electronic shelf label product increases protective coating technique |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114260155A (en) * | 2021-12-24 | 2022-04-01 | 深圳市山禾乐科技开发有限公司 | Process for improving adhesive force of coating layer |
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Application publication date: 20190226 |
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