CN109374982B - A liquid dielectric constant measuring device - Google Patents
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- 239000007788 liquid Substances 0.000 title claims abstract description 65
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- 230000005540 biological transmission Effects 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 6
- 239000004020 conductor Substances 0.000 claims description 68
- 229910052751 metal Inorganic materials 0.000 claims description 62
- 239000002184 metal Substances 0.000 claims description 62
- 229910001220 stainless steel Inorganic materials 0.000 claims description 31
- 239000010935 stainless steel Substances 0.000 claims description 31
- 238000007789 sealing Methods 0.000 claims description 25
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 11
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- 239000010937 tungsten Substances 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 8
- 229910021641 deionized water Inorganic materials 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 3
- 238000011160 research Methods 0.000 abstract description 2
- 238000007493 shaping process Methods 0.000 description 15
- 238000001228 spectrum Methods 0.000 description 13
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- 238000005259 measurement Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
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Abstract
Description
技术领域technical field
本发明涉及材料研究领域,尤其是一种能够测量高电压作用后的液体样品的介电常数的一种液体介电常数测量装置。The invention relates to the field of material research, in particular to a liquid dielectric constant measuring device capable of measuring the dielectric constant of a liquid sample subjected to high voltage action.
背景技术Background technique
许多化学和生物应用中需要对液体介电常数进行精确测量,现有技术中采用折射率传感器来测量,但是其折射率响应不是线性的,从而需要繁琐的校准过程,另外,折射率传感器对弯曲非常敏感,因此会在折射测量的特性谱中采集到干扰信号,也有现有技术采用反射型折射计来测量液体介电常数,但是反射型折射计较为脆弱,制作成本高且工艺复杂,且其两个反射表面必须精确加工以保持平行,这些缺陷影响了其在实际应用中的表现。在研究高电压作用后的液体的实验中,需要对液体施加一定幅度及持续时间的电压脉冲,但是,现有技术中的装置体积较大且操作不便,所述一种液体介电常数测量装置能够解决问题。Many chemical and biological applications need to accurately measure the dielectric constant of liquids. Refractive index sensors are used in the prior art to measure, but the refractive index response is not linear, which requires a cumbersome calibration process. In addition, the refractive index sensor is not sensitive to bending It is very sensitive, so interference signals will be collected in the characteristic spectrum of refraction measurement. There are also existing technologies that use reflective refractometers to measure the dielectric constant of liquids, but reflective refractometers are relatively fragile, with high manufacturing costs and complicated processes. The two reflective surfaces must be precisely machined to keep them parallel, and these imperfections affect their performance in practical applications. In the experiment of studying the liquid after the action of high voltage, it is necessary to apply a voltage pulse with a certain amplitude and duration to the liquid. However, the devices in the prior art are large in size and inconvenient to operate. The device for measuring the dielectric constant of a liquid able to solve problems.
发明内容Contents of the invention
为了解决上述问题,本发明采用脉冲成形线缆结合高压开关的结构来产生电压脉冲,并通过传输线将高压施加到液体样品上,另外,采用特殊设计的共振器结合矢量网络分析仪来测量液体的介电常数。In order to solve the above problems, the present invention adopts the structure of the pulse shaping cable combined with the high voltage switch to generate the voltage pulse, and applies the high voltage to the liquid sample through the transmission line. In addition, a specially designed resonator combined with a vector network analyzer is used to measure the voltage of the liquid dielectric constant.
本发明所采用的技术方案是:The technical scheme adopted in the present invention is:
所述一种液体介电常数测量装置包括高压直流电源、充电电阻、充电线、脉冲成形线缆、循环水机、高压开关、功率分配器、衰减器、传输线I、阻抗匹配电路、示波器、传输线II、样品槽、共振器、矢量网络分析仪和计算机,高压直流电源输出电压典型范围为1.2kV到2.0kV,所述高压开关具有输入端和输出端,所述功率分配器具有输入端、输出端I和输出端II,高压直流电源、充电电阻、充电线、脉冲成形线缆、高压开关和功率分配器的输入端依次电缆连接,功率分配器的输出端I依次电缆连接传输线II和样品槽,传输线II的芯线与样品槽外壳绝缘,样品槽外壳接地,功率分配器的输出端II依次电缆连接衰减器、传输线I、阻抗匹配电路和示波器,共振器位于样品槽内;脉冲成形线缆包括外壳、不锈钢条、绝缘圆柱、入水口和出水口,不锈钢条和绝缘圆柱均位于外壳内,不锈钢条螺旋缠绕于绝缘圆柱上,不锈钢条两端分别连接充电线和高压开关输入端,外壳为圆柱桶形,外壳和绝缘圆柱之间充满去离子水,去离子水的导电性为0.1uS/cm,外壳具有入水口和出水口并分别连接于循环水机;高压开关包括开普通膜、金属层I、绝缘层、金属层II和肖特基二极管,所述开普通膜、金属层I、绝缘层和金属层II至下而上依次沉积制备,肖特基二极管的阳极连接金属层II,肖特基二极管的阴极连接高压开关的输入端,高压开关的输出端连接金属层I,开普通膜为边长1厘米的正方形,绝缘层为聚对二甲苯材料,金属层I由厚度为50微米的铜制成、且上表面镀有厚度为5微米的钨,金属层II由厚度为35微米的铜制成、且上表面和下表面均镀有厚度为5微米钨,钨能够防止铜被高压开关在开关过程中产生的高温电弧烧坏;共振器包括外导体、内导体、密封圈、共振腔、金属片、SMA接头,SMA接头同轴电缆连接矢量网络分析仪,矢量网络分析仪连接计算机,外导体和内导体均由不锈钢制成,外导体是中空圆柱体,内导体是圆柱体,内导体同轴固定于外导体内,外导体上面密封地连接有SMA接头、下面焊接有金属片,密封圈位于外导体内的中间位置,内导体穿过密封圈,密封圈将外导体内部分为上部和下部,所述上部和下部之间具有气密性,所述上部充满空气,所述下部形成共振腔,所述下部的侧壁上具有一个通孔,通孔全部浸入液体样品中;不锈钢条直径为2毫米,绝缘圆柱的直径为40毫米、长度为200毫米,不锈钢条缠绕于绝缘圆柱上的螺旋间距为15毫米;外壳的长度为300毫米、内径为100毫米;绝缘层的厚度为12微米;外导体的长度为20厘米、内径为15毫米、外径为20毫米,内导体的长度为20厘米、直径为5毫米;外导体下部侧壁上的通孔直径为10毫米,所述通孔上边缘距离密封圈为3毫米。Described a kind of liquid permittivity measuring device comprises high voltage DC power supply, charging resistance, charging line, pulse shaping cable, circulating water machine, high voltage switch, power divider, attenuator, transmission line I, impedance matching circuit, oscilloscope, transmission line II, sample tank, resonator, vector network analyzer and computer, the typical range of output voltage of the high-voltage DC power supply is 1.2kV to 2.0kV, the high-voltage switch has an input end and an output end, and the power divider has an input end, an output end Terminal I and output terminal II, high-voltage DC power supply, charging resistor, charging line, pulse shaping cable, high-voltage switch and input terminal of the power divider are cable-connected in turn, and output terminal I of the power divider is cable-connected to transmission line II and the sample tank in turn , the core wire of the transmission line II is insulated from the shell of the sample tank, the shell of the sample tank is grounded, the output terminal II of the power divider is connected to the attenuator, the transmission line I, the impedance matching circuit and the oscilloscope in turn, the resonator is located in the sample tank; the pulse shaping cable Including shell, stainless steel bar, insulating cylinder, water inlet and water outlet, the stainless steel bar and insulating cylinder are located in the shell, the stainless steel bar is spirally wound on the insulating cylinder, the two ends of the stainless steel bar are respectively connected to the charging line and the input end of the high-voltage switch, the shell is Cylindrical barrel shape, filled with deionized water between the shell and the insulating cylinder, the conductivity of the deionized water is 0.1uS/cm, the shell has a water inlet and a water outlet and are respectively connected to the circulating water machine; Layer I, insulating layer, metal layer II and Schottky diode, the open common film, metal layer I, insulating layer and metal layer II are deposited sequentially from bottom to top, and the anode of the Schottky diode is connected to metal layer II, The cathode of the Schottky diode is connected to the input end of the high-voltage switch, and the output end of the high-voltage switch is connected to the metal layer I. The common film is a square with a side length of 1 cm. The insulating layer is made of parylene material. The metal layer I has a thickness of 50 Micron copper, and the upper surface is plated with tungsten with a thickness of 5 microns. Metal layer II is made of copper with a thickness of 35 microns, and the upper and lower surfaces are plated with tungsten with a thickness of 5 microns. Burned out by the high-temperature arc generated by the high-voltage switch during the switching process; the resonator includes outer conductor, inner conductor, sealing ring, resonant cavity, metal sheet, SMA connector, SMA connector coaxial cable connection vector network analyzer, vector network analyzer Connect to the computer, the outer conductor and the inner conductor are made of stainless steel, the outer conductor is a hollow cylinder, the inner conductor is a cylinder, the inner conductor is coaxially fixed in the outer conductor, the outer conductor is sealedly connected with SMA joints, and the lower part is welded with The metal sheet, the sealing ring is located in the middle of the outer conductor, the inner conductor passes through the sealing ring, and the sealing ring divides the inner part of the outer conductor into an upper part and a lower part, the upper part and the lower part are airtight, and the upper part is filled with air, The lower part forms a resonant cavity, the side wall of the lower part has a through hole, and the through hole is completely immersed in the liquid sample; the diameter of the stainless steel bar is 2 mm, the diameter of the insulating cylinder is 40 mm, and the length is 200 mm. The stainless steel bar is wound The pitch of the helix on the insulating cylinder is 15 mm; the length of the shell is 300 mm, the inner diameter is 100 mm; the thickness of the insulating layer is 12 microns; the length of the outer conductor is 20 cm, the inner diameter is 15 mm, and the outer diameter is 20 mm, The inner conductor has a length of 20 cm and a diameter of 5 mm; the diameter of the through hole on the lower side wall of the outer conductor is 10 mm, and the distance from the upper edge of the through hole to the sealing ring is 3 mm.
共振器的工作方式为:The resonator works as follows:
在工作时,共振器的外导体下部的侧壁上的通孔全部浸入液体样品中,密封圈下方处具有少量残留空气,所述残留空气与液体样品的接触面形成了气体-液体界面,所述气体-液体界面具有较大的阻抗失配,因此能够作为一个高反射率的反射器,金属片作为另一个反射器,液体样品在密封圈与金属片之间形成了法布里-珀罗共振,通过矢量网络分析仪监控共振谱的移动,能够通过测量及相应的计算得到液体样品的介电常数。When working, the through holes on the side wall of the lower part of the outer conductor of the resonator are all immersed in the liquid sample, and there is a small amount of residual air under the sealing ring, and the contact surface between the residual air and the liquid sample forms a gas-liquid interface, so The gas-liquid interface has a large impedance mismatch, so it can be used as a reflector with high reflectivity, and the metal sheet is used as another reflector. The liquid sample forms a Fabry-Perot barrier between the sealing ring and the metal sheet. Resonance, the movement of the resonance spectrum is monitored by a vector network analyzer, and the dielectric constant of the liquid sample can be obtained through measurement and corresponding calculation.
矢量网络分析仪输出的微波信号通过SMA接头输入共振器,在外导体和内导体之间形成波形,并沿着负y轴方向转播,所述微波信号的大部分被气体-液体界面反射,定义为第一次反射信号,所述微波信号的小部分透过气体-液体界面到达金属片,定义为第一次透射信号,且所述第一次透射信号的大部分能量被金属片反射,使得共振腔中产生多重反射和多重干涉。在气体-液体界面处的第一次反射信号和第一次透射信号的相位延迟为(式一),其中λ和f分别为微波信号的波长和频率,d是共振腔在y轴方向的内部长度,εr是液体样品的绝对介电常数,c是真空中光速,当相位延迟δ=2mπ时,能够在频域的反射谱中得到共振图案,其中m为整数,称为共振系数,反射谱中的共振频率为(式二),反射谱中的两个相邻的极小值之间的间隔,定义为自由谱范围,表示为/>(式三),当液体样品的介电常数改变而导致反射谱移动时,共振频率移动表示为/>(式四),这样,能够在d固定的条件下通过监控共振频率的变化来确定共振腔中液体样品的介电常数的变化,从上述公式得出:共振器的液体介电常数的测量灵敏度为/>正比于共振系数m,反比于d以及液体的绝对介电常数εr,采用/>(式四)测量的是液体介电常数的变化值,而不是绝对值,如果变化较小,所述变化值可以看做是线性的。/>(式三)用于测量液体介电常数的绝对值,即保持d不变,通过从记录的反射谱中得到自由谱范围。The microwave signal output by the vector network analyzer is input into the resonator through the SMA connector, forms a waveform between the outer conductor and the inner conductor, and is rebroadcast along the negative y-axis direction, and most of the microwave signal is reflected by the gas-liquid interface, defined as For the first reflection signal, a small part of the microwave signal reaches the metal sheet through the gas-liquid interface, which is defined as the first transmission signal, and most of the energy of the first transmission signal is reflected by the metal sheet, making the resonance Multiple reflections and multiple interferences occur in the cavity. The phase delay of the first reflected signal and the first transmitted signal at the gas-liquid interface is (Formula 1), where λ and f are the wavelength and frequency of the microwave signal, d is the internal length of the resonant cavity in the y-axis direction, ε r is the absolute permittivity of the liquid sample, c is the speed of light in vacuum, when the phase delay When δ=2mπ, the resonance pattern can be obtained in the reflection spectrum in the frequency domain, where m is an integer, called the resonance coefficient, and the resonance frequency in the reflection spectrum is (Formula 2), the interval between two adjacent minimum values in the reflection spectrum is defined as the free spectral range, expressed as /> (Equation 3), when the dielectric constant of the liquid sample changes to cause the reflection spectrum to shift, the resonance frequency shift is expressed as /> (Formula 4), like this, can determine the change of the dielectric constant of the liquid sample in the resonant cavity by monitoring the change of the resonant frequency under the fixed condition of d, draw from the above formula: the measurement sensitivity of the liquid dielectric constant of the resonator for /> Proportional to the resonance coefficient m, inversely proportional to d and the absolute dielectric constant ε r of the liquid, using /> (Equation 4) measures the change value of the dielectric constant of the liquid, rather than the absolute value. If the change is small, the change value can be regarded as linear. /> (Equation 3) is used to measure the absolute value of the dielectric constant of the liquid, that is, keeping d constant, by obtaining the free spectral range from the recorded reflection spectrum.
通过(式二)可知,由热膨胀造成的共振腔长度的变化会导致共振频率的移动,从而导致温度干扰,温度灵敏度为/>其中α0是不锈钢的温度膨胀系数,从而得到,介电常数-温度的交叉灵敏度为2εrα0。pass (Equation 2) shows that the change in the length of the resonant cavity caused by thermal expansion will cause the resonant frequency to shift, resulting in temperature disturbance, and the temperature sensitivity is /> Where α 0 is the temperature expansion coefficient of stainless steel, thus, the dielectric constant-temperature cross-sensitivity is 2ε r α 0 .
高压开关的工作方式为:The high voltage switch works as follows:
当肖特基二极管阳极和阴极之间的电压超过其反向击穿电压,肖特基二极管和金属层II之间的界面的PN结产生蒸发效应,进而导致等离子体产生并放大,击穿了绝缘层,使得金属层I和金属层II之间产生了高压电弧,所述高压电弧导致了金属层I和金属层II之间的金属重新分布,从而使得高压开关闭合。When the voltage between the anode and cathode of the Schottky diode exceeds its reverse breakdown voltage, the PN junction at the interface between the Schottky diode and the metal layer II produces an evaporation effect, which in turn causes the plasma to be generated and amplified, and the breakdown The insulating layer causes a high-voltage arc to be generated between the metal layer I and the metal layer II, and the high-voltage arc causes metal redistribution between the metal layer I and the metal layer II, thereby closing the high-voltage switch.
采用所述一种液体介电常数测量装置来测量液体样品的介电常数的步骤为:The steps for measuring the dielectric constant of a liquid sample by using said a liquid dielectric constant measuring device are:
步骤1,将待测液体样品加入样品槽,并将共振器的外导体下部的侧壁上的通孔全部浸入液体样品中;Step 1, adding the liquid sample to be tested into the sample tank, and immersing all the through holes on the side wall of the lower part of the outer conductor of the resonator into the liquid sample;
步骤2,开启高压直流电源,通过充电电阻、充电线和脉冲成形线缆输出电压至高压开关,调节高压直流电源的输出电压以使得高压开关闭合;Step 2, turn on the high-voltage DC power supply, output the voltage to the high-voltage switch through the charging resistor, charging line and pulse shaping cable, and adjust the output voltage of the high-voltage DC power supply to close the high-voltage switch;
步骤3,通过示波器监控高压开关的输出端的电压波形;Step 3, monitor the voltage waveform of the output terminal of the high voltage switch through an oscilloscope;
步骤4,在高压开关闭合的时间内,传输线II的芯线与样品槽外壳之间产生电压差,并施加到液体样品上;Step 4, during the time when the high-voltage switch is closed, a voltage difference is generated between the core wire of the transmission line II and the outer shell of the sample tank, and is applied to the liquid sample;
步骤5,矢量网络分析仪输出微波信号并通过SMA接头进入共振器,矢量网络分析仪记录液体样品的共振频率;Step 5, the vector network analyzer outputs the microwave signal and enters the resonator through the SMA connector, and the vector network analyzer records the resonance frequency of the liquid sample;
步骤6,矢量网络分析仪采集的数据输入计算机,计算机处理后得到反射谱,并计算得到液体样品的介电常数。In step 6, the data collected by the vector network analyzer is input into the computer, and the reflectance spectrum is obtained after computer processing, and the dielectric constant of the liquid sample is calculated.
本发明的有益效果是:The beneficial effects of the present invention are:
本发明装置产生高压脉冲的结构简单,操作方便,用于测量液体介电常数的共振器成本较低,测试结果精度较高。The device of the invention has the advantages of simple structure and convenient operation for generating high-voltage pulses, and the cost of the resonator used for measuring the dielectric constant of the liquid is low, and the precision of the test result is high.
附图说明Description of drawings
下面结合本发明的图形进一步说明:Below in conjunction with figure of the present invention further illustrate:
图1是本发明示意图;图2是脉冲成形线缆放大示意图;Fig. 1 is a schematic diagram of the present invention; Fig. 2 is an enlarged schematic diagram of a pulse shaping cable;
图3是高压开关放大示意图;图4是图3的俯视图;Fig. 3 is an enlarged schematic diagram of a high-voltage switch; Fig. 4 is a top view of Fig. 3;
图5是共振器放大示意图。Figure 5 is an enlarged schematic diagram of the resonator.
图中,1.高压直流电源,2.充电电阻,3.充电线,4.脉冲成形线缆,4-1.外壳,4-2.不锈钢条,4-3.绝缘圆柱,4-4.入水口,4-5.出水口,5.循环水机,6.高压开关,6-1.开普通膜,6-2.金属层I,6-3.绝缘层,6-4.金属层II,6-5.肖特基二极管,7.功率分配器,8.衰减器,9.传输线I,10.阻抗匹配电路,11.示波器,12.传输线II,13.样品槽,14.共振器,14-1.外导体,14-2.内导体,14-3.密封圈,14-4.共振腔,14-5.金属片,14-6.SMA接头,15.矢量网络分析仪,16.计算机。In the figure, 1. High-voltage DC power supply, 2. Charging resistor, 3. Charging wire, 4. Pulse shaping cable, 4-1. Shell, 4-2. Stainless steel bar, 4-3. Insulated cylinder, 4-4. Water inlet, 4-5. Water outlet, 5. Circulating water machine, 6. High voltage switch, 6-1. Open ordinary film, 6-2. Metal layer I, 6-3. Insulation layer, 6-4. Metal layer II, 6-5. Schottky diode, 7. Power divider, 8. Attenuator, 9. Transmission line I, 10. Impedance matching circuit, 11. Oscilloscope, 12. Transmission line II, 13. Sample tank, 14. Resonance Device, 14-1. Outer conductor, 14-2. Inner conductor, 14-3. Sealing ring, 14-4. Resonant cavity, 14-5. Metal sheet, 14-6. SMA connector, 15. Vector network analyzer , 16. Computer.
具体实施方式Detailed ways
如图1是本发明示意图,xyz为三维空间坐标系,如图2是脉冲成形线缆放大示意图,测量装置包括高压直流电源(1)、充电电阻(2)、充电线(3)、脉冲成形线缆(4)、循环水机(5)、高压开关(6)、功率分配器(7)、衰减器(8)、传输线I(9)、阻抗匹配电路(10)、示波器(11)、传输线II(12)、样品槽(13)、共振器(14)、矢量网络分析仪(15)和计算机(16),高压直流电源(1)输出电压典型范围为1.2kV到2.0kV,所述高压开关(6)具有输入端和输出端,所述功率分配器(7)具有输入端、输出端I和输出端II,高压直流电源(1)、充电电阻(2)、充电线(3)、脉冲成形线缆(4)、高压开关(6)和功率分配器(7)的输入端依次电缆连接,功率分配器(7)的输出端I依次电缆连接传输线II(12)和样品槽(13),传输线II(12)的芯线与样品槽(13)外壳绝缘,样品槽(13)外壳接地,功率分配器(7)的输出端II依次电缆连接衰减器(8)、传输线I(9)、阻抗匹配电路(10)和示波器(11),共振器(14)位于样品槽(13)内;脉冲成形线缆(4)包括外壳(4-1)、不锈钢条(4-2)、绝缘圆柱(4-3)、入水口(4-4)和出水口(4-5),不锈钢条(4-2)和绝缘圆柱(4-3)均位于外壳(4-1)内,不锈钢条(4-2)螺旋缠绕于绝缘圆柱(4-3)上,不锈钢条(4-2)两端分别连接充电线(3)和高压开关(6)输入端,外壳(4-1)为圆柱桶形,外壳(4-1)和绝缘圆柱(4-3)之间充满去离子水,去离子水的导电性为0.1uS/cm,外壳(4-1)具有入水口(4-4)和出水口(4-5)并分别连接于循环水机(5);不锈钢条(4-2)直径为2毫米,绝缘圆柱(4-3)的直径为40毫米、长度为200毫米,不锈钢条(4-2)缠绕于绝缘圆柱(4-3)上的螺旋间距为15毫米;外壳(4-1)的长度为300毫米、内径为100毫米。Figure 1 is a schematic diagram of the present invention, xyz is a three-dimensional space coordinate system, Figure 2 is an enlarged schematic diagram of a pulse shaping cable, and the measuring device includes a high-voltage DC power supply (1), a charging resistor (2), a charging line (3), and a pulse shaping cable. Cable (4), circulating water machine (5), high voltage switch (6), power divider (7), attenuator (8), transmission line I (9), impedance matching circuit (10), oscilloscope (11), Transmission line II (12), sample tank (13), resonator (14), vector network analyzer (15) and computer (16), the typical range of output voltage of high voltage DC power supply (1) is 1.2kV to 2.0kV, described The high-voltage switch (6) has an input terminal and an output terminal, the power divider (7) has an input terminal, an output terminal I and an output terminal II, a high-voltage DC power supply (1), a charging resistor (2), and a charging line (3) , the input end of the pulse shaping cable (4), the high voltage switch (6) and the power divider (7) are cable-connected in sequence, and the output terminal I of the power divider (7) is cable-connected to the transmission line II (12) and the sample tank ( 13), the core wire of the transmission line II (12) is insulated from the shell of the sample tank (13), the shell of the sample tank (13) is grounded, and the output terminal II of the power divider (7) is connected to the attenuator (8) and the transmission line I ( 9), an impedance matching circuit (10) and an oscilloscope (11), the resonator (14) is located in the sample tank (13); the pulse shaping cable (4) includes a shell (4-1), a stainless steel bar (4-2) , an insulating cylinder (4-3), a water inlet (4-4) and a water outlet (4-5), the stainless steel strip (4-2) and the insulating cylinder (4-3) are all located in the shell (4-1), The stainless steel bar (4-2) is spirally wound on the insulating cylinder (4-3), the two ends of the stainless steel bar (4-2) are respectively connected to the charging line (3) and the input end of the high voltage switch (6), and the shell (4-1) It is in the shape of a cylindrical barrel, filled with deionized water between the shell (4-1) and the insulating cylinder (4-3), the conductivity of the deionized water is 0.1uS/cm, and the shell (4-1) has a water inlet (4- 4) and the water outlet (4-5) are respectively connected to the circulating water machine (5); the diameter of the stainless steel bar (4-2) is 2 millimeters, and the diameter of the insulating cylinder (4-3) is 40 millimeters and the length is 200 millimeters , the helical pitch of the stainless steel strip (4-2) wound on the insulating cylinder (4-3) is 15 millimeters; the length of the shell (4-1) is 300 millimeters, and the inner diameter is 100 millimeters.
如图3是高压开关放大示意图,如图4是图3的俯视图,高压开关(6)包括开普通膜(6-1)、金属层I(6-2)、绝缘层(6-3)、金属层II(6-4)和肖特基二极管(6-5),所述开普通膜(6-1)、金属层I(6-2)、绝缘层(6-3)和金属层II(6-4)至下而上依次沉积制备,肖特基二极管(6-5)的阳极连接金属层II(6-4),肖特基二极管(6-5)的阴极连接高压开关(6)的输入端,高压开关(6)的输出端连接金属层I(6-2),开普通膜(6-1)为边长1厘米的正方形,绝缘层(6-3)为聚对二甲苯材料,绝缘层(6-3)的厚度为12微米;金属层I(6-2)由厚度为50微米的铜制成、且上表面镀有厚度为5微米的钨,金属层II(6-4)由厚度为35微米的铜制成、且上表面和下表面均镀有厚度为5微米钨,钨能够防止铜被高压开关(6)在开关过程中产生的高温电弧烧坏。Figure 3 is an enlarged schematic diagram of a high-voltage switch, and Figure 4 is a top view of Figure 3, and the high-voltage switch (6) includes an open common film (6-1), a metal layer I (6-2), an insulating layer (6-3), Metal layer II (6-4) and Schottky diode (6-5), said open common film (6-1), metal layer I (6-2), insulating layer (6-3) and metal layer II (6-4) is deposited and prepared sequentially from bottom to top, the anode of the Schottky diode (6-5) is connected to the metal layer II (6-4), and the cathode of the Schottky diode (6-5) is connected to the high voltage switch (6 ), the output end of the high-voltage switch (6) is connected to the metal layer I (6-2), the common film (6-1) is a square with a side length of 1 cm, and the insulating layer (6-3) is poly-two Toluene material, the thickness of the insulating layer (6-3) is 12 microns; the metal layer I (6-2) is made of copper with a thickness of 50 microns, and the upper surface is plated with tungsten with a thickness of 5 microns, and the metal layer II ( 6-4) It is made of copper with a thickness of 35 microns, and the upper and lower surfaces are plated with tungsten with a thickness of 5 microns. The tungsten can prevent the copper from being burned by the high-temperature arc generated by the high-voltage switch (6) during the switching process.
如图5是共振器放大示意图,共振器(14)包括外导体(14-1)、内导体(14-2)、密封圈(14-3)、共振腔(14-4)、金属片(14-5)、SMA接头(14-6),SMA接头(14-6)同轴电缆连接矢量网络分析仪(15),矢量网络分析仪(15)连接计算机(16),外导体(14-1)和内导体(14-2)均由不锈钢制成,外导体(14-1)是中空圆柱体,内导体(14-2)是圆柱体,内导体(14-2)同轴固定于外导体(14-1)内,外导体(14-1)的长度为20厘米、内径为15毫米、外径为20毫米,内导体(14-2)的长度为20厘米、直径为5毫米,外导体(14-1)上面密封地连接有SMA接头(14-6)、下面焊接有金属片(14-5),密封圈(14-3)位于外导体(14-1)内的中间位置,内导体(14-2)穿过密封圈(14-3),密封圈(14-3)将外导体(14-1)内部分为上部和下部,所述上部和下部之间具有气密性,所述上部充满空气,所述下部形成共振腔(14-4),所述下部的侧壁上具有一个通孔,通孔全部浸入液体样品中,外导体(14-1)下部侧壁上的通孔直径为10毫米,所述通孔上边缘距离密封圈(14-3)为3毫米。Figure 5 is a resonator enlarged schematic diagram, and the resonator (14) includes an outer conductor (14-1), an inner conductor (14-2), a sealing ring (14-3), a resonant cavity (14-4), a metal sheet ( 14-5), SMA joint (14-6), SMA joint (14-6) coaxial cable connects vector network analyzer (15), vector network analyzer (15) connects computer (16), outer conductor (14- 1) and the inner conductor (14-2) are made of stainless steel, the outer conductor (14-1) is a hollow cylinder, the inner conductor (14-2) is a cylinder, and the inner conductor (14-2) is coaxially fixed on Inside the outer conductor (14-1), the length of the outer conductor (14-1) is 20 cm, the inner diameter is 15 mm, and the outer diameter is 20 mm, and the length of the inner conductor (14-2) is 20 cm, and the diameter is 5 mm , the upper surface of the outer conductor (14-1) is hermetically connected to the SMA connector (14-6), and the lower surface is welded with a metal sheet (14-5), and the sealing ring (14-3) is located in the middle of the outer conductor (14-1) position, the inner conductor (14-2) passes through the sealing ring (14-3), and the sealing ring (14-3) divides the interior of the outer conductor (14-1) into an upper part and a lower part, and there is an air gap between the upper part and the lower part. tightness, the upper part is filled with air, the lower part forms a resonant cavity (14-4), the side wall of the lower part has a through hole, the through hole is completely immersed in the liquid sample, and the outer conductor (14-1) lower side The diameter of the through hole on the wall is 10 mm, and the distance from the upper edge of the through hole to the sealing ring (14-3) is 3 mm.
共振器(14)的工作方式为:The mode of work of resonator (14) is:
在工作时,共振器(14)的外导体(14-1)下部的侧壁上的通孔全部浸入液体样品中,密封圈(14-3)下方处具有少量残留空气,所述残留空气与液体样品的接触面形成了气体-液体界面,所述气体-液体界面具有较大的阻抗失配,因此能够作为一个高反射率的反射器,金属片(14-5)作为另一个反射器,液体样品在密封圈(14-3)与金属片(14-5)之间形成了法布里-珀罗共振,通过矢量网络分析仪(15)监控共振谱的移动,能够通过测量及相应的计算得到液体样品的介电常数。When working, the through holes on the side wall of the outer conductor (14-1) bottom of the resonator (14) are all immersed in the liquid sample, and there is a small amount of residual air below the sealing ring (14-3), and the residual air and The contact surface of the liquid sample forms a gas-liquid interface, and the gas-liquid interface has a large impedance mismatch, so it can be used as a reflector with high reflectivity, and the metal sheet (14-5) is used as another reflector, The liquid sample forms a Fabry-Perot resonance between the sealing ring (14-3) and the metal sheet (14-5), and the movement of the resonance spectrum is monitored by a vector network analyzer (15), which can be measured and corresponding Calculate the dielectric constant of the liquid sample.
矢量网络分析仪(15)输出的微波信号通过SMA接头(14-6)输入共振器(14),在外导体(14-1)和内导体(14-2)之间形成波形,并沿着负y轴方向转播,所述微波信号的大部分被气体-液体界面反射,定义为第一次反射信号,所述微波信号的小部分透过气体-液体界面到达金属片(14-5),定义为第一次透射信号,且所述第一次透射信号的大部分能量被金属片(14-5)反射,使得共振腔(14-4)中产生多重反射和多重干涉。在气体-液体界面处的第一次反射信号和第一次透射信号的相位延迟为(式一),其中λ和f分别为微波信号的波长和频率,d是共振腔(14-4)在y轴方向的内部长度,εr是液体样品的绝对介电常数,c是真空中光速,当相位延迟δ=2mπ时,能够在频域的反射谱中得到共振图案,其中m为整数,称为共振系数,反射谱中的共振频率为/>(式二),反射谱中的两个相邻的极小值之间的间隔,定义为自由谱范围,表示为/>(式三),当液体样品的介电常数改变而导致反射谱移动时,共振频率移动表示为/>(式四),这样,能够在d固定的条件下通过监控共振频率的变化来确定共振腔(14-4)中液体样品的介电常数的变化,从上述公式得出:共振器(14)的液体介电常数的测量灵敏度为正比于共振系数m,反比于d以及液体的绝对介电常数εr,采用(式四)测量的是液体介电常数的变化值,而不是绝对值,如果变化较小,所述变化值可以看做是线性的。/>(式三)用于测量液体介电常数的绝对值,即保持d不变,通过从记录的反射谱中得到自由谱范围。The microwave signal output by the vector network analyzer (15) enters the resonator (14) through the SMA connector (14-6), forms a waveform between the outer conductor (14-1) and the inner conductor (14-2), and along the negative Rebroadcast in the y-axis direction, most of the microwave signal is reflected by the gas-liquid interface, which is defined as the first reflection signal, and a small part of the microwave signal reaches the metal sheet (14-5) through the gas-liquid interface, defined as It is the first transmission signal, and most of the energy of the first transmission signal is reflected by the metal sheet (14-5), so that multiple reflections and multiple interferences occur in the resonant cavity (14-4). The phase delay of the first reflected signal and the first transmitted signal at the gas-liquid interface is (Formula 1), where λ and f are the wavelength and frequency of the microwave signal respectively, d is the internal length of the resonant cavity (14-4) in the y-axis direction, εr is the absolute permittivity of the liquid sample, and c is the The speed of light, when the phase delay δ=2mπ, the resonance pattern can be obtained in the reflection spectrum in the frequency domain, where m is an integer, called the resonance coefficient, and the resonance frequency in the reflection spectrum is /> (Formula 2), the interval between two adjacent minimum values in the reflection spectrum is defined as the free spectral range, expressed as /> (Equation 3), when the dielectric constant of the liquid sample changes to cause the reflection spectrum to shift, the resonance frequency shift is expressed as /> (Formula 4), like this, can determine the change of the dielectric constant of the liquid sample in the resonant cavity (14-4) by monitoring the change of resonant frequency under the fixed condition of d, draw from above-mentioned formula: resonator (14) The measurement sensitivity of the dielectric constant of the liquid is Proportional to the resonance coefficient m, inversely proportional to d and the absolute dielectric constant ε r of the liquid, using (Equation 4) measures the change value of the dielectric constant of the liquid, rather than the absolute value. If the change is small, the change value can be regarded as linear. /> (Equation 3) is used to measure the absolute value of the dielectric constant of the liquid, that is, keeping d constant, by obtaining the free spectral range from the recorded reflection spectrum.
通过(式二)可知,由热膨胀造成的共振腔(14-4)长度的变化会导致共振频率的移动,从而导致温度干扰,温度灵敏度为/>其中α0是不锈钢的温度膨胀系数,从而得到,介电常数-温度的交叉灵敏度为2εrα0。pass (Equation 2) shows that the change in the length of the resonant cavity (14-4) caused by thermal expansion will cause the resonant frequency to move, thereby causing temperature disturbance, and the temperature sensitivity is /> Where α 0 is the temperature expansion coefficient of stainless steel, thus, the dielectric constant-temperature cross-sensitivity is 2ε r α 0 .
高压开关(6)的工作方式为:The mode of work of high voltage switch (6) is:
当肖特基二极管(6-5)阳极和阴极之间的电压超过其反向击穿电压,肖特基二极管(6-5)和金属层II(6-4)之间的界面的PN结产生蒸发效应,进而导致等离子体产生并放大,击穿了绝缘层(6-3),使得金属层I(6-2)和金属层II(6-4)之间产生了高压电弧,所述高压电弧导致了金属层I(6-2)和金属层II(6-4)之间的金属重新分布,从而使得高压开关(6)闭合。When the voltage between the anode and cathode of the Schottky diode (6-5) exceeds its reverse breakdown voltage, the PN junction of the interface between the Schottky diode (6-5) and the metal layer II (6-4) The evaporation effect is generated, which in turn leads to the generation and amplification of plasma, which breaks down the insulating layer (6-3), so that a high-voltage arc is generated between the metal layer I (6-2) and the metal layer II (6-4). The high voltage arc causes metal redistribution between metal layer I (6-2) and metal layer II (6-4), thereby closing the high voltage switch (6).
所述一种液体介电常数测量装置包括高压直流电源(1)、充电电阻(2)、充电线(3)、脉冲成形线缆(4)、循环水机(5)、高压开关(6)、功率分配器(7)、衰减器(8)、传输线I(9)、阻抗匹配电路(10)、示波器(11)、传输线II(12)、样品槽(13)、共振器(14)、矢量网络分析仪(15)和计算机(16),高压直流电源(1)输出电压典型范围为1.2kV到2.0kV,所述高压开关(6)具有输入端和输出端,所述功率分配器(7)具有输入端、输出端I和输出端II,高压直流电源(1)、充电电阻(2)、充电线(3)、脉冲成形线缆(4)、高压开关(6)和功率分配器(7)的输入端依次电缆连接,功率分配器(7)的输出端I依次电缆连接传输线II(12)和样品槽(13),传输线II(12)的芯线与样品槽(13)外壳绝缘,样品槽(13)外壳接地,功率分配器(7)的输出端II依次电缆连接衰减器(8)、传输线I(9)、阻抗匹配电路(10)和示波器(11),共振器(14)位于样品槽(13)内;脉冲成形线缆(4)包括外壳(4-1)、不锈钢条(4-2)、绝缘圆柱(4-3)、入水口(4-4)和出水口(4-5),不锈钢条(4-2)和绝缘圆柱(4-3)均位于外壳(4-1)内,不锈钢条(4-2)螺旋缠绕于绝缘圆柱(4-3)上,不锈钢条(4-2)两端分别连接充电线(3)和高压开关(6)输入端,外壳(4-1)为圆柱桶形,外壳(4-1)和绝缘圆柱(4-3)之间充满去离子水,去离子水的导电性为0.1uS/cm,外壳(4-1)具有入水口(4-4)和出水口(4-5)并分别连接于循环水机(5);高压开关(6)包括开普通膜(6-1)、金属层I(6-2)、绝缘层(6-3)、金属层II(6-4)和肖特基二极管(6-5),所述开普通膜(6-1)、金属层I(6-2)、绝缘层(6-3)和金属层II(6-4)至下而上依次沉积制备,肖特基二极管(6-5)的阳极连接金属层II(6-4),肖特基二极管(6-5)的阴极连接高压开关(6)的输入端,高压开关(6)的输出端连接金属层I(6-2),开普通膜(6-1)为边长1厘米的正方形,绝缘层(6-3)为聚对二甲苯材料,金属层I(6-2)由厚度为50微米的铜制成、且上表面镀有厚度为5微米的钨,金属层II(6-4)由厚度为35微米的铜制成、且上表面和下表面均镀有厚度为5微米钨,钨能够防止铜被高压开关(6)在开关过程中产生的高温电弧烧坏;共振器(14)包括外导体(14-1)、内导体(14-2)、密封圈(14-3)、共振腔(14-4)、金属片(14-5)、SMA接头(14-6),SMA接头(14-6)同轴电缆连接矢量网络分析仪(15),矢量网络分析仪(15)连接计算机(16),外导体(14-1)和内导体(14-2)均由不锈钢制成,外导体(14-1)是中空圆柱体,内导体(14-2)是圆柱体,内导体(14-2)同轴固定于外导体(14-1)内,外导体(14-1)上面密封地连接有SMA接头(14-6)、下面焊接有金属片(14-5),密封圈(14-3)位于外导体(14-1)内的中间位置,内导体(14-2)穿过密封圈(14-3),密封圈(14-3)将外导体(14-1)内部分为上部和下部,所述上部和下部之间具有气密性,所述上部充满空气,所述下部形成共振腔(14-4),所述下部的侧壁上具有一个通孔,通孔全部浸入液体样品中;不锈钢条(4-2)直径为2毫米,绝缘圆柱(4-3)的直径为40毫米、长度为200毫米,不锈钢条(4-2缠绕于绝缘圆柱(4-3)上的螺旋间距为15毫米;外壳(4-1)的长度为300毫米、内径为100毫米;绝缘层(6-3)的厚度为12微米;外导体(14-1)的长度为20厘米、内径为15毫米、外径为20毫米,内导体(14-2)的长度为20厘米、直径为5毫米;外导体(14-1)下部侧壁上的通孔直径为10毫米,所述通孔上边缘距离密封圈(14-3)为3毫米。The device for measuring the dielectric constant of a liquid includes a high-voltage DC power supply (1), a charging resistor (2), a charging line (3), a pulse shaping cable (4), a circulating water machine (5), and a high-voltage switch (6) , power divider (7), attenuator (8), transmission line I (9), impedance matching circuit (10), oscilloscope (11), transmission line II (12), sample tank (13), resonator (14), Vector network analyzer (15) and computer (16), the typical range of output voltage of high-voltage DC power supply (1) is 1.2kV to 2.0kV, and described high-voltage switch (6) has input terminal and output terminal, and described power divider ( 7) It has an input terminal, an output terminal I and an output terminal II, a high-voltage DC power supply (1), a charging resistor (2), a charging cable (3), a pulse shaping cable (4), a high-voltage switch (6) and a power divider The input end of (7) is cable connected successively, and the output terminal I of power divider (7) is cable-connected transmission line II (12) and sample tank (13) successively, and the core wire of transmission line II (12) and sample tank (13) shell Insulation, the sample tank (13) shell is grounded, the output terminal II of the power divider (7) is connected to the attenuator (8), the transmission line I (9), the impedance matching circuit (10) and the oscilloscope (11), and the resonator ( 14) Located in the sample tank (13); the pulse shaping cable (4) includes a shell (4-1), a stainless steel bar (4-2), an insulating cylinder (4-3), a water inlet (4-4) and an outlet The nozzle (4-5), the stainless steel strip (4-2) and the insulating cylinder (4-3) are all located in the casing (4-1), and the stainless steel strip (4-2) is spirally wound on the insulating cylinder (4-3) , the two ends of the stainless steel bar (4-2) are respectively connected to the charging line (3) and the input end of the high-voltage switch (6), the shell (4-1) is cylindrical barrel-shaped, and the shell (4-1) and the insulating cylinder (4-3 ) is filled with deionized water, the conductivity of the deionized water is 0.1uS/cm, the shell (4-1) has a water inlet (4-4) and a water outlet (4-5) and is connected to the circulating water machine ( 5); the high-voltage switch (6) comprises an open common film (6-1), a metal layer I (6-2), an insulating layer (6-3), a metal layer II (6-4) and a Schottky diode (6 -5), the open film (6-1), metal layer I (6-2), insulating layer (6-3) and metal layer II (6-4) are sequentially deposited from bottom to top, Schott The anode of the base diode (6-5) is connected to the metal layer II (6-4), the cathode of the Schottky diode (6-5) is connected to the input end of the high voltage switch (6), and the output end of the high voltage switch (6) is connected to the metal layer Layer I (6-2), the common film (6-1) is a square with a side length of 1 cm, the insulating layer (6-3) is a parylene material, and the metal layer I (6-2) has a thickness of 50 Micron copper with a thickness of 5 microns of tungsten on the upper surface, metal layer II (6-4) made of copper with a thickness of 35 microns and a thickness of 5 microns of tungsten on both the upper and lower surfaces , tungsten can prevent copper from being burnt by the high-temperature arc generated by the high-voltage switch (6) in the switching process; the resonator (14) includes an outer conductor (14-1), an inner conductor (14-2), a sealing ring (14-3 ), resonance cavity (14-4), metal sheet (14-5), SMA connector (14-6), SMA connector (14-6) coaxial cable connection vector network analyzer (15), vector network analyzer ( 15) Connect the computer (16), the outer conductor (14-1) and the inner conductor (14-2) are all made of stainless steel, the outer conductor (14-1) is a hollow cylinder, and the inner conductor (14-2) is a cylinder body, the inner conductor (14-2) is coaxially fixed in the outer conductor (14-1), and the upper surface of the outer conductor (14-1) is sealed with an SMA joint (14-6), and the lower surface is welded with a metal sheet (14- 5), the sealing ring (14-3) is located in the middle of the outer conductor (14-1), the inner conductor (14-2) passes through the sealing ring (14-3), and the sealing ring (14-3) connects the outer conductor (14-1) The interior is divided into an upper part and a lower part, there is airtightness between the upper part and the lower part, the upper part is filled with air, the lower part forms a resonant cavity (14-4), and the side wall of the lower part has A through hole, the through hole is completely immersed in the liquid sample; the diameter of the stainless steel bar (4-2) is 2 mm, the diameter of the insulating cylinder (4-3) is 40 mm, and the length is 200 mm, and the stainless steel bar (4-2) is wound on The pitch of the spiral on the insulating cylinder (4-3) is 15 millimeters; the length of the shell (4-1) is 300 millimeters, and the inner diameter is 100 millimeters; the thickness of the insulating layer (6-3) is 12 microns; the outer conductor (14- 1) is 20 centimeters in length, 15 millimeters in inner diameter, and 20 millimeters in outer diameter, and the length of the inner conductor (14-2) is 20 centimeters and 5 millimeters in diameter; The diameter of the hole is 10 mm, and the distance from the upper edge of the through hole to the sealing ring (14-3) is 3 mm.
本发明装置具有脉冲成形线缆结合高压开关的结构,以产生电压脉冲并施加到液体样品,另外,采用基于法布里-珀罗共振原理的共振器来测量液体的介电常数。The device of the present invention has a structure of a pulse-shaping cable combined with a high-voltage switch to generate a voltage pulse and apply it to a liquid sample. In addition, a resonator based on the principle of Fabry-Perot resonance is used to measure the dielectric constant of the liquid.
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