CN109366459A - The micro-clamp of chucking power and clamping jaw displacement is measured using fiber bragg grating - Google Patents
The micro-clamp of chucking power and clamping jaw displacement is measured using fiber bragg grating Download PDFInfo
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- CN109366459A CN109366459A CN201811157091.4A CN201811157091A CN109366459A CN 109366459 A CN109366459 A CN 109366459A CN 201811157091 A CN201811157091 A CN 201811157091A CN 109366459 A CN109366459 A CN 109366459A
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- bragg grating
- chucking power
- fiber bragg
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- 238000005259 measurement Methods 0.000 claims abstract description 14
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- 229910000838 Al alloy Inorganic materials 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
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Abstract
The present invention relates to a kind of micro-clamps that chucking power and clamping jaw displacement are measured using fiber bragg grating, to solve the problems, such as that micro-clamp in the prior art cannot carry out precise measurement to chucking power and clamping jaw displacement simultaneously.Its technical solution includes: pedestal, the monolithic compliant mechanism being fixed on pedestal, the actuator being installed in the cavity opened up on monolithic compliant mechanism, controller, FBG (FBG) demodulator connected to the controller, and the fiber bragg grating multiplied sensor being connect with the FBG (FBG) demodulator, monolithic compliant mechanism includes: displacement amplifying mechanism, symmetrically arranged two chucking power sensing mechanisms and symmetrically arranged two clamping jaws, the input stage of displacement amplifying mechanism is abutted against with actuator, two output stages of displacement amplifying mechanism, two chucking power sensing mechanisms and two clamping jaws correspond, and the output stage of displacement amplifying mechanism, chucking power sensing mechanism and clamping jaw are sequentially connected.
Description
Technical field
The present invention relates to microoperation and micro assemby field, it is specifically a kind of using fiber bragg grating measurement chucking power and
The micro-clamp of clamping jaw displacement.
Background technique
With the fast development of MEMS (Micro-Electro-Mechanical System, MEMS), in addition
Traditional MEMS manufacturing process cannot be produced with complex three-dimensional geometry and micro parts made of different materials, micro- dress
With having shown very important effect with microoperation technology.Micro-clamp is the end execution of microassembly system and micro OS
Device is directly in contact with the object operated, plays decisive role to the completion of micro assemby and microoperation task, is widely applied
In fields such as biomedicine, electronic manufacture, aerospace and military affairs.
Common micro-clamp driving method includes electrostatic drive, electrothermal drive, shape memory driving, electromagnetic drive and piezoelectricity
Driving etc., compared to other driving methods, Piezoelectric Driving is high with displacement resolution, driving force is big, Hz-KHz is wide, response is fast
The advantages that degree is fast and dynamic property is good, thus the driving particularly suitable as micro-clamp.
But since the output shift quantity of piezo actuator is small, in order to complete clamping task, displacement amplifying mechanism is usually used
Clamping jaw will be passed to after the micro-displacement amplification of actuator output；Simultaneously because piezoelectric stack actuator driven power is big, and pressed from both sides
The object held is small, wall is thin brittle, and displacement amplifying mechanism plays the role of reducing power, therefore uses displacement amplifying mechanism by micro- execution
The driving force of device output passes to clamping jaw after reducing again.Most basic requirement to the displacement amplifying mechanism of micro-clamp be it is small in size,
Structure is simple, gapless, reduces again without mechanical friction, autokinesis height, high resolution, stable displacement equations multiplying power and power
Rate.
Also, since the size of clamping object such as is generally less than 100 μm, and easily deforms, fractures at the damage, usually need
Operation is completed using the controllable micro-clamp with force feedback, therefore integrate clamping force snesor on micro-clamp to become required.
Clamping process carries out in micro assemby space, accurately to realize automatic assembling task, then must obtain clamping jaw displacement information, therefore
It needs to integrate clamping jaw displacement sensor on micro-clamp.So the design of micro-clamp should ensure that can simultaneously to chucking power and clamping jaw
Displacement measures.The present inventor (Wang D H, Yang Q, and Dong H M, A Monolithic Compliant
Piezoelectric-Driven Microgripper: Design, Modeling, and Testing, IEEE/ASME
Transactions on Mechatronics, Vol 18, No 1, 138-147, Feb 2013；Wang Daihua, Yang Qun,
A kind of piezoelectric actuated micro-clamp and its open loop placement property, nanotechnology and precision engineering, Vol 8, No 1,47-53,
January 2010) a kind of report micro-clamp structure, it is realized by the way of pasting semiconductor gauge on micro-clamp
The sensing of chucking power and clamping jaw displacement, but chucking power and clamping jaw displacement very little due to micro-clamp, the output signal of foil gauge is very
It is faint, and inevitable electromagnetic interference, so that the measurement of small chucking power and the higher precision of clamping jaw displacement is restricted.
In conclusion precision is high, stability is good, resolving power is small, is avoided that electromagnetic interference, and it is able to achieve chucking power and clamping jaw
The micro-clamp of displacement while sensing becomes urgent need.
Summary of the invention
The purpose of the present invention is to provide a kind of micro- folders that chucking power and clamping jaw displacement are measured using fiber bragg grating
Pincers, to solve the problems, such as that micro-clamp in the prior art cannot simultaneously measure chucking power and clamping jaw displacement.
The technical solution of the present invention is as follows:
The present invention provides a kind of micro-clamps that chucking power and clamping jaw displacement are measured using fiber bragg grating, comprising: pedestal,
The monolithic compliant mechanism that is fixed on the pedestal, the actuator being installed in the cavity opened up on the monolithic compliant mechanism,
Controller, the FBG (FBG) demodulator connecting with the controller, and the fiber bragg grating connecting with the FBG (FBG) demodulator are multiple
With sensor, the monolithic compliant mechanism includes:
Displacement amplifying mechanism, symmetrically arranged two chucking power sensing mechanisms and symmetrically arranged two clamping jaws, the displacement
The input stage of enlarger is abutted against with the actuator, two output stages of the displacement amplifying mechanism, two clampings
Power sensing mechanism and two clamping jaws correspond, and the output stage of the displacement amplifying mechanism, the chucking power sense machine
Structure and the clamping jaw are sequentially connected；
The fiber bragg grating multiplied sensor includes: the first fiber bragg grating and the second light formed on optical fiber
Fine Bragg grating, first fiber bragg grating and second fiber bragg grating with the FBG (FBG) demodulator
Connection, first fiber bragg grating, which is installed on the chucking power sensing mechanism, can incude the chucking power sensing mechanism
Deformation position at；Second fiber bragg grating be installed on the displacement amplifying mechanism can incude it is described displacement put
At the position of the deformation of great institutions；
When the controller controls the actuator and pushes the input stage of the displacement amplifying mechanism in a first direction, institute's rheme
The actuator is pushed the moving displacement of generation to be converted to second party by the input stage for moving enlarger in said first direction
Upward moving displacement, and institute is successively transferred to via the output stage of the displacement amplifying mechanism and the chucking power sensing mechanism
It states at jaw position, makes two clamping jaw closures, clamped to component to be clamped；The first direction and the second party
To perpendicular in the horizontal direction.
Preferably, the chucking power sensing mechanism be can the output stage to the displacement amplifying mechanism pass in a second direction
The mechanism that the power passed is transmitted in parallel is closed the clamping jaw in parallel in a second direction.
Preferably, the output stage of the displacement amplifying mechanism is formation is processed on the monolithic compliant mechanism first flat
Row quadrangular mechanism is connected by the first flexible hinge between adjacent two connecting rods of first parallelogram mechanism, and
A wherein connecting rod for first parallelogram mechanism is connect with the input stage of the displacement amplifying mechanism.
Preferably, the chucking power sensing mechanism is the second parallel four side that formation is processed on the monolithic compliant mechanism
Shape mechanism is connected between adjacent two connecting rods of second parallelogram mechanism, described first by the second flexible hinge
Parallelogram mechanism, second parallelogram mechanism and the clamping jaw are sequentially connected in series；Or
The chucking power sensing mechanism is the double-flexibility beam mechanism that formation is processed on the monolithic compliant mechanism, and described first is flat
Row quadrangular mechanism, double-flexibility beam mechanism and the clamping jaw are sequentially connected in series；Or
The chucking power sensing mechanism is the cantilever beam mechanism that formation is processed on the monolithic compliant mechanism, and described first is parallel
Quadrangular mechanism, the cantilever beam mechanism and the clamping jaw are sequentially connected in series.
Preferably, the input stage of the displacement amplifying mechanism is that two four companies of formation are processed on the monolithic compliant mechanism
Linkage, two four-bar mechanisms are symmetrical arranged, two four-bar mechanisms and two first parallelogram
Mechanism corresponds, and is connected between adjacent two connecting rods of the four-bar mechanism by third flexible hinge, the double leval jib
Two fixing ends of mechanism are fixedly connected with the pedestal, and the input terminal of the four-bar mechanism is abutted against with the actuator,
The output end of the four-bar mechanism is connect with a wherein connecting rod for first parallelogram mechanism.
Preferably, the input stage of the displacement amplifying mechanism is that a bridge of formation is processed on the monolithic compliant mechanism
Formula displacement amplifying mechanism, the cavity are located in the bridge-type displacement amplifying mechanism, and the bridge-type displacement amplifying mechanism is wherein
Wherein the one of one output end and one of them the first parallelogram mechanism in two first parallelogram mechanisms
The connection of root connecting rod, another output end of the bridge-type displacement amplifying mechanism and another described first parallelogram machine
A wherein connecting rod connection for structure.
Preferably, when second fiber bragg grating is installed in the output stage of the displacement amplifying mechanism, institute
State the second fiber bragg grating be installed on one of them described first flexible hinge of first parallelogram mechanism,
On first flexible hinge described in any two or on four first flexible hinges.
Preferably, when chucking power sensing mechanism is the second parallelogram mechanism, first fiber bragg grating
It is installed on one of them described second flexible hinge of second parallelogram mechanism, the second flexibility described in any two
On hinge or on four second flexible hinges；
When chucking power sensing mechanism is double-flexibility beam mechanism, first fiber bragg grating is installed on the double-flexibility beam
On a wherein wherein side surface for a flexible beam for mechanism, on the inner surface of two flexible beams, the outer surface of two flexible beams
In upper or the inner surface and the outer surface of two flexible beams；
When chucking power sensing mechanism is cantilever beam mechanism, first fiber bragg grating is installed on the cantilever beam mechanism
On cantilever beam inner surface and/or outer surface on.
Preferably, first flexible hinge, second flexible hinge and the third flexible hinge are oval soft
Property hinge, right circular flexure hinge or straight beam flexible hinge.
Preferably, the bending stiffness of the clamping jaw is greater than the bending stiffness of the chucking power sensing mechanism, and the clamping jaw
Clamping face be plane or the curved surface that fits with surface component to be clamped.
Preferably, two cushion blocks being oppositely arranged are installed, and the actuator is set to described in two in the cavity
Between cushion block, the input stage of one of them cushion block and the displacement amplifying mechanism is abutted against, another cushion block with it is described
It is abutted against in cavity towards the side cell wall of the input stage of displacement amplifying mechanism；
The cushion block is fluted towards opening up on a side end face of the monolithic compliant mechanism, and the monolithic compliant mechanism is arranged in
In the groove.
The invention has the benefit that
1) realize that chucking power and jaw position sense simultaneously using fiber bragg grating multiplexing technology, structure is simple, anti-electromagnetism
Interference, corrosion-resistant, high sensitivity are able to achieve precise measurement and high-precision feedback control to chucking power and clamping jaw displacement, we
The resolving power of method measurement is smaller than common strain transducer.
2) clamping jaw in zero load can parallel opening and closing, and sense the same of chucking power and clamping jaw displacement in clamping object and simultaneously
When, clamping jaw remains to move in parallel, and to guarantee to be reliably completed clamping task, part is not easily caused to slide or fall off.
Detailed description of the invention
One of Fig. 1 is the structural diagram of the present invention；
Fig. 2 is second structural representation of the invention；
Fig. 3 is the structure chart of fiber bragg grating multiplied sensor of the invention；
Fig. 4 is the installation diagram of the first fiber bragg grating of the invention on the second parallelogram mechanism；
Fig. 5 is the installation diagram of the second fiber bragg grating of the invention on the first parallelogram mechanism；
Fig. 6 is one of the structural schematic diagram of monolithic compliant mechanism of the invention；
Fig. 7 is the second structural representation of monolithic compliant mechanism of the invention；
Fig. 8 is the third structural representation of monolithic compliant mechanism of the invention；
Fig. 9 is the four of the structural schematic diagram of monolithic compliant mechanism of the invention；
Figure 10 is the five of the structural schematic diagram of monolithic compliant mechanism of the invention；
Figure 11 is the six of the structural schematic diagram of monolithic compliant mechanism of the invention；
Figure 12 is the seven of the structural schematic diagram of monolithic compliant mechanism of the invention；
Figure 13 is the eight of the structural schematic diagram of monolithic compliant mechanism of the invention；
Figure 14 is the structure chart of four-bar mechanism of the invention；
Description of symbols:
1-pedestal；2-monolithic compliant mechanisms；3-actuators；4-fiber bragg grating multiplied sensors；41-the first light
Fine Bragg grating；42-the second fiber bragg grating；5-FBG (FBG) demodulators；6-cushion blocks；7-driving powers；8-cables
Interface；21-displacement amplifying mechanisms；22-chucking power sensing mechanisms；23-clamping jaws；211-input stages；212-output stages；
The first hinge joint of 212a-；The second hinge joint of 212b-；212c-third hinge joint；The 4th hinge joint of 212d-；213-four bars
Mechanism；214-lever mechanisms；The 5th hinge joint of 22a-；The 6th hinge joint of 22b-；The 7th hinge joint of 22d-；22c-the 8th
Hinge joint；221,222-flexible beam；223-cantilever beams；24-the first screw hole；25-the second screw hole；26-third screw holes；
27-the four screw hole；28-the five screw hole.
Specific embodiment
Referring to figs. 1 to Figure 14, it is displaced the present invention provides a kind of using fiber bragg grating measurement chucking power and clamping jaw
Micro-clamp, comprising: pedestal 1, the monolithic compliant mechanism 2 that is fixed on pedestal 1 are installed on and open up on monolithic compliant mechanism 2
Actuator 3, controller, FBG (FBG) demodulator 5 connected to the controller in cavity, and the light being connect with the FBG (FBG) demodulator 5
Fine Bragg grating multiplied sensor 4, monolithic compliant mechanism 2 include: displacement amplifying mechanism 21, symmetrically arranged two chucking powers
Sensing mechanism 22 and symmetrically arranged two clamping jaws 23, input stage 211 and the actuator 3 of displacement amplifying mechanism 21 abut against,
Two output stages, 212, two chucking power sensing mechanisms 22 of displacement amplifying mechanism 21 and two clamping jaws 23 correspond, and are displaced
Output stage 212, chucking power sensing mechanism 22 and the clamping jaw 23 of enlarger 21 are sequentially connected；Fiber bragg grating multiplexed sensing
Device 4 includes: the first fiber bragg grating 41 and the second fiber bragg grating 42 formed on optical fiber, the first optical fiber Bradley
Lattice grating 41 and the second fiber bragg grating 42 are connect with FBG (FBG) demodulator 5, and the first fiber bragg grating 41 is installed on folder
At the position that the deformation of chucking power sensing mechanism 22 can be incuded on holding force sensing mechanism 22；The installation of second fiber bragg grating 42
In on displacement amplifying mechanism 21 can inductive displacement enlarger 21 deformation position at；In controller control actuator 3 the
When one direction pushes the input stage 211 of displacement amplifying mechanism 21, the input stage 211 of displacement amplifying mechanism 21 is by actuator 3 the
The moving displacement that one side pushes up generation is converted to the moving displacement in second direction, and via the defeated of displacement amplifying mechanism 21
Grade 212 and chucking power sensing mechanism 22 are successively transferred at 23 position of clamping jaw out, are closed two clamping jaws 23, to component to be clamped
It is clamped；First direction is perpendicular in the horizontal direction with second direction.
Specifically, in the present invention, fiber bragg grating multiplied sensor 4 can be 1 or 2.It is 1
When, as shown in Figure 1, it only installs the chucking power sensing mechanism 22 and displacement amplifying mechanism 21 connecting with one of clamping jaw 23
On, 1 fiber bragg grating multiplied sensor 4 only detects deformation caused by one of clamping jaw 23；Such as Fig. 2,
When it is 2,2 fiber bragg grating multiplied sensors 4, which respectively correspond, is mounted on the clamping that two clamping jaws 23 respectively connect
On power sensing mechanism 22 and displacement amplifying mechanism 21, two fiber bragg grating multiplied sensors 4 are respectively to two clamping jaws 23
Deformation caused by respectively is detected.
Specifically, as shown in fig. 6, the mode that the monolithic compliant mechanism 2 is connected by screw to is fixed on pedestal 1, in base
Seat 1 is equipped with 5 screw holes (respectively the first screw hole 24, the second screw hole 25, third screw holes 26, the 4th screw hole 27, the 5th screw hole
28), 5 screws and 5 screw holes correspond, and guarantee that the connection of monolithic compliant mechanism 2 and pedestal 1 at 5 screwhole positions is
Rigid connection.Pedestal 1 uses aluminum alloy materials, other suitable materials can also be used.It is fluted in pedestal 1, guarantee its not with
Displacement amplifying mechanism 21 hereinafter and the contact of the flexible hinge in chucking power sensing mechanism 22 and flexible beam, and do not influence to execute
The movement of device 3.Pedestal 1 is fixed with attachment device, and micro-clamp is enabled to access micro assemby/micro OS by attachment device.
Monolithic compliant mechanism 2 is integrated structure, is process using titanium alloy plate by wire electric discharge processing technology, the processing
Technique is, for example, wire cutting technology, laser cutting parameter and etch process etc..
The bending stiffness of clamping jaw 23 is greater than the bending stiffness of chucking power sensing mechanism 22, and the clamping face of clamping jaw 23 is plane
Or the curved surface to fit with surface component to be clamped.Such as it is component to be clamped be centrum when, the clamping face of clamping jaw 23 can be oblique
Face or circular conical surface.
As depicted in figs. 1 and 2, in embodiments of the present invention, first direction is the center line phase with the monolithic compliant mechanism 2
Parallel direction (longitudinal direction marked in Fig. 1 and Fig. 2), second direction is mutually to hang down with the center line of the monolithic compliant mechanism 2
Straight direction (transverse direction marked in Fig. 1 and Fig. 2).
The actuator 3 is piezoelectric element actuator, and other kinds of actuator can also be used, as long as needed for being able to satisfy
Displacement resolution, driving force, Hz-KHz, response speed and dynamic property, such as voice coil motor.
When the actuator 3 is piezoelectric element actuator, it is equipped between controller and piezoelectric element actuator
The voltage of the driving power 7 that the two poles of the earth of a pair of of piezoelectric element actuator are powered, the driving power 7 output is controllable
(such as power amplifier), driving power 7 pass through cable interface 8(such as BNC connector, sub-miniature A connector etc.) it is communicated with controller, when
When controller controls the two poles of the earth application voltage of the driving power 7 to the piezoelectric element actuator, piezoelectric element actuator
The phenomenon that extending in a first direction, and then push the displacement amplifying mechanism abutted with the piezoelectric element actuator
21 input stage 211 generates moving displacement in a first direction, and the input stage 211 of displacement amplifying mechanism 21, will be by conversion
The moving displacement generated on first direction is converted to the moving displacement (displacement equations) in second direction, and is put by displacement
The output stage 212 of great institutions 21 carries out second displacement amplification and chucking power sensing mechanism 22 in second direction in a second direction
On sensed so that two clamping jaws 23 are closed, realize to clamping component to be clamped；When controller controls driving power
When 7 stoppings apply voltage to the two poles of the earth of the piezoelectric element actuator, the length of the piezoelectric element actuator is restored, no
The input stage 211 of displacement amplifying mechanism 21 is pushed again, so that two clamping jaws 23 open, is completed to hold assembly
Release operation.
Specifically, controller passes through cable interface 8(such as BNC connector, sub-miniature A connector etc.) and FBG (FBG) demodulator (optical fiber Bragg
Grating demodulation instrument) 5 output end connection, the input terminal of the FBG (FBG) demodulator 5 respectively with the second fiber bragg grating 42 and second
Fiber bragg grating 42 connects.One first can be formed in the first end of an optical fiber (single mode optical fiber or multimode fibre)
Fiber bragg grating 41, second end form second fiber bragg grating 42, or the first end shape in an optical fiber
Two the second fiber bragg gratings are formed at two the first fiber bragg gratings 41 and in the second end of an optical fiber
42, also or, the first end in two optical fiber (two optical fiber are coupled) is respectively formed one or two first optical fiber Bragg light
Grid 41 and one or two second fiber bragg grating 42 is formed in the second end of two optical fiber.
In the embodiment of the present invention, the first fiber bragg grating 41 is pasted on chucking power sensing mechanism 22, is used for pair
Deformation on chucking power sensing mechanism 22 is detected；Second fiber bragg grating 42 is pasted onto displacement amplifying mechanism 21
On, it is used to detect the deformation on displacement amplifying mechanism 21.Wherein, when the first parallelogram mechanism and second parallel
When the flexible hinge deformation of quadrangular mechanism, the grid region for being pasted on Bragg grating on flexible hinge generates deformation, causes
Heart wavelength shift；FBG (FBG) demodulator 5 can demodulate the deformation quantity in the grid region of Bragg grating according to the translational movement of central wavelength,
And then calculate the size and jaw position of chucking power.
The deformation that controller is respectively sensed according to the first fiber bragg grating 41 and the second fiber bragg grating 42
The concrete principle for obtaining chucking power and clamping jaw displacement is as follows:
According to the prior art it is found that applying electricity at the two poles of the earth of controller control driving power 7 to the piezoelectric element actuator
When pressure is closed two clamping jaws 23, if two clamping jaws 23 do not carry out clamping or two clamping jaws 23 not and wait press from both sides to component to be clamped
When holding component contact, deformation will not be generated at chucking power sensing mechanism 22, at this point, will not at the first fiber bragg grating 41
Sense deformation, FBG (FBG) demodulator 5 causes the central wavelength of variation flat according to the second fiber bragg grating 42 after detecting deformation
Shifting amount carries out conversion and calculates the clamping jaw displacement that can obtain the micro-clamp；And it is clamped in two clamping jaws 23 to component to be clamped
When, chucking power is produced, making the chucking power sensing mechanism 22, deformation occurs, at this point, the first fiber bragg grating 41 can
With after detecting deformation generative center wavelength shift change, translated by central wavelength to the first fiber bragg grating 41
Amount carries out conversion and calculates the chucking power for obtaining micro-clamp.
Therefore, the deformation of chucking power sensing mechanism 22 and the relationship of chucking power, the shape of displacement amplifying mechanism 21 can be calculated
Become the relationship with clamping jaw displacement, by the deformation and the first fiber bragg grating 41 that calculate or demarcate chucking power sensing mechanism 22
The relationship of output signal, the relationship of the deformation of displacement amplifying mechanism 21 and 42 output signal of the second fiber bragg grating, control
Device can accurately be controlled according to chucking power and the clamping jaw displacement measured, be guaranteed to firm clamping component to be clamped, and
It can prevent the phenomenon that deforming and fracture because stress is larger component to be clamped.
Specifically, in embodiments of the present invention, it slots from the upper side of the monolithic compliant mechanism 2 to the monolithic compliant mechanism
2 downside, to form through slot (cavity).Two cushion blocks 6 being oppositely arranged are installed, and actuator 3 is set to two in cavity
Between a cushion block 6, the input stage 211 of one of cushion block 6 and displacement amplifying mechanism 21 is abutted against, in another cushion block 6 and cavity
It is abutted against towards the side side wall of the input stage 211 of displacement amplifying mechanism 21；Cushion block 6 is towards a side of monolithic compliant mechanism 2
Open up fluted on face, monolithic compliant mechanism 2 is arranged in groove.
Also, offer deep gouge in the upper side of pedestal 1 position opposite with the cavity, the purpose of setting of the deep gouge be for
Prevent the cushion block 6 and actuator 3 from will not touch between pedestal 1.The purpose of setting of another cushion block 6 is to realize to this
The preload of actuator 3, since the cavity is not through slot in a first direction, so that another cushion block 6 is displaced with direction in cavity
The side side wall of the input stage 211 of enlarger 21 abuts against, and such set-up mode has guiding role, enables to be mounted on
Actuator 3 in cavity elongation in a first direction or to restore moved along a straight line along the first direction.The monolithic is soft
Property mechanism 2 is fastened in the groove of cushion block 6, can guarantee that the central axis of actuator 3 is located at the upper table of the monolithic compliant mechanism 2
On face.Also, the side that cushion block 6 is contacted with actuator 3 is plane, to guarantee actuator 3 and cushion block 6 for rigid face contact.
Referring to shown in Fig. 6 to 13, in embodiments of the present invention, the output stage 212 of displacement amplifying mechanism 21 is soft in monolithic
Property mechanism 2 on process the first parallelogram mechanism of formation, lead between adjacent two connecting rods of the first parallelogram mechanism
Cross the connection of the first flexible hinge, and the input stage of wherein a connecting rod and displacement amplifying mechanism 21 for the first parallelogram mechanism
211 connections.
In the embodiment of the present invention, the first parallelogram mechanism, which had both been played, carries out secondary put to the output displacement of actuator 3
Big effect, and play the role of sensing the displacement of actuator 3.
Kinetic characteristic based on parallelogram mechanism, in the case where a connecting rod is fixed, to adjacent with fixed connecting rod
Any one connecting rod input the power that is parallel on fixed connecting rod direction, the connecting rod opposite with fixation connecting rod can be made along the party
To moving.Therefore, in embodiments of the present invention, to the defeated of first parallelogram mechanism and displacement amplifying mechanism 21
When entering the power in a wherein connecting rod input in a second direction for the connection of grade 211, first parallelogram mechanism and chucking power
The connected connecting rod of sensing mechanism 22 upper in a second direction can move in parallel.First parallelogram mechanism is in second direction
It moves in parallel and is transferred at 23 position of clamping jaw by chucking power sensing mechanism 22, so that clamping jaw 23 synchronizes in a second direction
It is mobile.
Second fiber bragg grating 42 may be mounted in the input stage 211 or output stage 212 of displacement amplifying mechanism 21,
When the second fiber bragg grating 42 is mounted in the input stage 211 of displacement amplifying mechanism 21, double leval jib may be mounted at
At at least one third flexible hinge position of mechanism or at least one hinge joint position of bridge-type displacement amplifying mechanism；?
When second fiber bragg grating 42 is mounted in the output stage 212 of displacement amplifying mechanism 21, the second fiber bragg grating 42
Arrangement can multiplicity, the second fiber bragg grating 42 be installed on the first parallelogram mechanism one of them first
On flexible hinge, on the first flexible hinge of any two or on four the first flexible hinges.
Also, in embodiments of the present invention, the form of the first flexible hinge in the first parallelogram mechanism can be more
Sample, such as oval flexible hinge, right circular flexure hinge or straight beam flexible hinge, as long as required movement effects can be reached and convenient for essence
It really calculates, such as Fig. 6,7,8,9,10,12 are right circular flexure hinge, Figure 11 is straight beam flexible hinge etc..
In embodiments of the present invention, chucking power sensing mechanism 22 be can output stage 212 to displacement amplifying mechanism 21 the
The mechanism that the power that two sides are communicated up is transmitted in parallel is closed clamping jaw 23 in parallel in a second direction.
For the concrete shape of chucking power sensing mechanism 22, multiple structural forms are provided in the embodiment of the present invention, specifically
Are as follows: as shown in Fig. 6 to 11, chucking power sensing mechanism 22 is the second parallelogram that formation is processed on monolithic compliant mechanism 2
Mechanism is connected between adjacent two connecting rods of the second parallelogram mechanism, the first parallelogram by the second flexible hinge
Mechanism, the second parallelogram mechanism and clamping jaw 23 are sequentially connected in series；Or
As shown in figure 12, chucking power sensing mechanism 22 is the double-flexibility beam mechanism that formation is processed on monolithic compliant mechanism 2, first
Parallelogram mechanism, double-flexibility beam mechanism and clamping jaw 23 are sequentially connected in series；Or
As shown in figure 13, chucking power sensing mechanism 22 is the cantilever beam mechanism that formation is processed on monolithic compliant mechanism 2, and first is flat
Row quadrangular mechanism, cantilever beam mechanism and clamping jaw 23 are sequentially connected in series.
Such as Fig. 6 to 11, when chucking power sensing mechanism 22 is the second parallelogram mechanism, the second flexible hinge form can
With multiplicity, such as oval flexible hinge, right circular flexure hinge or straight beam flexible hinge, as long as required movement effects and just can be reached
In accurately calculating, such as Fig. 6,7,8,9,10 are right circular flexure hinge, and Figure 11 is straight beam flexible hinge etc..
It is corresponding, in embodiments of the present invention, the arrangement of second fiber bragg grating 42 may be it is a variety of,
As shown in Fig. 6 to 11, when chucking power sensing mechanism 22 is the second parallelogram mechanism, the second fiber bragg grating 42 peace
On one of them described second flexible hinge loaded on the second parallelogram mechanism, on the second flexible hinge described in any two
Or on four second flexible hinges.
Wherein, in embodiments of the present invention, in order to reduce the manufacture difficulty of the fiber bragg grating multiplied sensor 4,
When fiber bragg grating multiplied sensor 4 only includes an optical fiber, the first fiber bragg grating 41 and the second optical fiber cloth
Glug grating 42 is sticked on the side wall in the same direction of the first parallelogram mechanism and the second parallelogram mechanism.Such as
Shown in Fig. 1, first fiber bragg grating 41 and the second fiber bragg grating 42 are 1, the first optical fiber Bragg light
Grid 41 are fitted on the lateral wall of the second parallelogram mechanism, and the second fiber bragg grating 42 is fitted in first parallel four
On the lateral wall of Bian Xing mechanism.That is, being sticked in the first fiber bragg grating 41 in the 5th hinge joint in Fig. 1 and Fig. 3
When on 22a and/or the 6th hinge joint 22b, the optimal position that is sticked of second fiber bragg grating 42 is the first hinge joint
On 212a and/or third hinge joint 212c.
It include two optical fiber and the first fiber bragg grating 41 and the second light in fiber bragg grating multiplied sensor 4
When fine Bragg grating 42 is two, first fiber bragg grating 4 and one second are respectively equipped on two optical fiber
Fiber bragg grating 42.The first fiber bragg grating 41 formed on two optical fiber can be diagonally arranged, and realize to the
On two parallelogram mechanisms at the diagonal position two hinge joints (the 5th hinge joint 22a and the 7th hinge joint 22d, or
Person the 6th hinge joint 22b and the 8th hinge joint 22c) distortion measurement at position, or the first light formed on two optical fiber
Fine Bragg grating 41 is symmetrical arranged, and is realized to two opposite in opposite two side walls on the second parallelogram mechanism
At the position hinge joint (the 5th hinge joint 22a and the 7th hinge joint 22d or the 6th hinge joint 22b and the 8th hinge joint 22c)
Distortion measurement；Similarly, the second fiber bragg grating 42 formed on two optical fiber can diagonally be arranged or symmetrically set
It sets, to realize to two hinge joints being on the first parallelogram mechanism at diagonal position or in opposite two side walls
On opposite two hinge joint positions distortion measurement.
It include two optical fiber and the first fiber bragg grating 41 and the second light in fiber bragg grating multiplied sensor 4
It, then can be to the tetra- hinge joint positions the first hinge joint 212a to the 4th hinge joint 212d when fine Bragg grating 42 is four
The deformation at place is incuded, and is carried out to the deformation at the tetra- hinge joint positions the 5th hinge joint 22a to the 8th hinge joint 22c
Induction.
As shown in figure 12, when chucking power sensing mechanism 22 is double-flexibility beam mechanism, double-flexibility mechanism includes flexible beam 221
With flexible beam 222, the first fiber bragg grating 41 is installed on the wherein side of a wherein flexible beam for double-flexibility beam mechanism
On surface, on the inner surface of two flexible beams, on the outer surface of two flexible beams or the inner surface and the outer surface of two flexible beams
On.
Arrangement form when can be the second parallelogram mechanism by means of above-mentioned chucking power sensing mechanism 22, to clamping
The first fiber bragg grating 41 is arranged in double-flexibility beam mechanism when power sensing mechanism 22 is double-flexibility beam mechanism.
When chucking power sensing mechanism 22 is cantilever beam mechanism, the first fiber bragg grating 41 is installed on cantilever beam mechanism
On cantilever beam 223 inner surface and/or outer surface on.
When chucking power sensing mechanism 22 is the second parallelogram mechanism or double-flexibility beam mechanism, chucking power sensing mechanism
22 two kinds of structure types and the arrangement form of the first fiber bragg grating 41 had both realized the measurement of chucking power, and can guarantee
Clamping jaw will not rotate when clamping object, still to move in parallel.
In the embodiment of the present invention, the form of chucking power sensing mechanism 22 can be various, as long as clamping jaw 23 can in clamping
Reach the desired depth of parallelism, and micro-strain needed for measurement chucking power can be generated.
In addition, in embodiments of the present invention, the input stage 211 or diversified forms of the displacement amplifying mechanism 21, example
Such as, as shown in Fig. 6,11 and 12, the input stage 211 of displacement amplifying mechanism 21 is two that formation is processed on monolithic compliant mechanism 2
Four-bar mechanism, two four-bar mechanisms are symmetrical arranged, and two four-bar mechanisms and two the first parallelogram mechanisms are one by one
It is corresponding, it is connected between adjacent two connecting rods of four-bar mechanism by third flexible hinge, two fixing ends of four-bar mechanism
It is fixedly connected with pedestal 1, input terminal and the actuator 3 of four-bar mechanism abut against, the output end of four-bar mechanism and first flat
A wherein connecting rod connection for row quadrangular mechanism.
As shown in Fig. 6,11 and 12, the front end of the cavity, a fortune of four-bar mechanism is arranged in two four-bar mechanisms
Moved end (input terminal) is fitted closely with actuator 3 and (is abutted) by cushion block 6, guarantees the direction of motion of the input terminal of four-bar mechanism
With the power of actuator 3 and displacement outbound course and consistent；Two fixing ends of the four-bar mechanism pass through screw and pedestal 1 respectively
Fixed, another the side connecting rod of tache motorice (output end) with the first parallelogram mechanism close to the four-bar mechanism is connected.
Third flexible hinge form can be various, such as oval flexible hinge, right circular flexure hinge or straight beam flexible hinge, only
It wants that required movement effects can be reached and convenient for accurately calculating.
As shown in figure 14, each four-bar mechanism is specifically made of a four-bar mechanism 213 and a lever mechanism 214,
The input terminal of the lever mechanism 214 is abutted with the cushion block 6, and the input terminal of four-bar mechanism 213 is the output of the lever mechanism 214
End, the lever mechanism 214 is using a fixed third flexible hinge as fulcrum.
It wherein, in embodiments of the present invention, can be with when the input stage of displacement amplifying mechanism 21 is two four-bar mechanisms
Displacement conversion is realized by another mode, the input terminal of two four-bar mechanisms is by a connecting rod connection, at this point, pad
Block 6 is abutted with the connecting rod, by pushing the connecting rod, and then the input terminal of two four-bar mechanisms is driven to occur in a first direction
It is mobile.
Again alternatively, as shown in Fig. 7 to 10, the input stage 211 of displacement amplifying mechanism 21 is to process on monolithic compliant mechanism 2
The bridge-type displacement amplifying mechanism formed, cavity are located in bridge-type displacement amplifying mechanism, and bridge-type displacement amplifying mechanism is wherein
A wherein company for one output end and one of them the first parallelogram mechanism in two the first parallelogram mechanisms
Bar connection, wherein one of another output end of bridge-type displacement amplifying mechanism and another the first parallelogram mechanism
Connecting rod connection.
In embodiments of the present invention, as shown in Figure 10, guiding mechanism can be set to be connected with bridge-type displacement amplifying mechanism；Or
The side of bridge-type displacement amplifying mechanism and pedestal 1 is fixed, guarantee the output shaft of bridge-type displacement amplifying mechanism always with actuator 3
Power with displacement outbound course it is vertical.
As shown in Fig. 7 to 10, which is placed in bridge-type displacement amplifying mechanism, and actuator 3 is moved up to first party
When, two output ends that will drive bridge-type displacement amplifying mechanism move inward in a second direction, and then drive two it is first flat
Row quadrangular mechanism moves inward in a second direction, the final closure for realizing clamping jaw 23.
The form of bridge-type displacement amplifying mechanism can be various, such as Fig. 7 is diamond type, and Fig. 8 is elliptic, and Fig. 9 and 10 is
Flexible hinge chained scheduling.
In the embodiment of the present invention, the input stage 211 of displacement amplifying mechanism 21 includes but is not limited to above-mentioned form, it is only necessary to be protected
Its parallel output that output displacement of actuator 3 can be converted into clamping jaw 23 is demonstrate,proved, there is stable displacement equations multiplying power and power to contract
Small multiplying power, and meet expected autokinesis, resolution ratio.
The micro-clamp provided in an embodiment of the present invention that chucking power and clamping jaw displacement are measured using fiber bragg grating, is had
Following advantages:
1) realize that chucking power and jaw position sense simultaneously using fiber bragg grating multiplexing technology, structure is simple, anti-electromagnetism
Interference, corrosion-resistant, high sensitivity are able to achieve precise measurement and high-precision feedback control to chucking power and clamping jaw displacement, we
The resolving power of method measurement is smaller than common strain transducer.
2) clamping jaw 23 in zero load can parallel opening and closing, and sense chucking power and clamping jaw displacement in clamping object and simultaneously
Meanwhile clamping jaw 23 remains to move in parallel, and to guarantee to be reliably completed clamping task, part is not easily caused to slide or fall off.
Claims (11)
1. utilizing the micro-clamp of fiber bragg grating measurement chucking power and clamping jaw displacement, comprising: pedestal (1), be fixed on it is described
Monolithic compliant mechanism (2) on pedestal (1), the actuator being installed in the cavity opened up on the monolithic compliant mechanism (2)
(3), controller, the FBG (FBG) demodulator (5) being connect with the controller, and the optical fiber cloth being connect with the FBG (FBG) demodulator (5)
Glug grating multiplied sensor (4), which is characterized in that the monolithic compliant mechanism (2) includes:
Displacement amplifying mechanism (21), symmetrically arranged two chucking power sensing mechanisms (22) and symmetrically arranged two clamping jaws
(23), the input stage (211) of the displacement amplifying mechanism (21) is abutted against with the actuator (3), the displacement amplifying mechanism
(21) two output stages (212), two chucking power sensing mechanisms (22) and two clamping jaws (23) correspond, and
Output stage (212), the chucking power sensing mechanism (22) and the clamping jaw (23) of the displacement amplifying mechanism (21) successively connect
It connects；
The fiber bragg grating multiplied sensor (4) includes: the first fiber bragg grating (41) formed on optical fiber
With the second fiber bragg grating (42), first fiber bragg grating (41) and second fiber bragg grating
(42) it is connect with the FBG (FBG) demodulator (5), first fiber bragg grating (41) is installed on the chucking power sensing machine
At the position that the deformation of the chucking power sensing mechanism (22) can be incuded on structure (22)；Second fiber bragg grating (42)
It is installed on the displacement amplifying mechanism (21) at the position for the deformation that the displacement amplifying mechanism (21) can be incuded；
The input stage that the actuator (3) pushes the displacement amplifying mechanism (21) in a first direction is controlled in the controller
(211) when, the input stage (211) of the displacement amplifying mechanism (21) pushes the actuator (3) in said first direction
The moving displacement of generation is converted to the moving displacement in second direction, and via the output stage of the displacement amplifying mechanism (21)
(212) it is successively transferred at the clamping jaw (23) position with the chucking power sensing mechanism (22), makes two clamping jaws (23)
Closure, clamps to component to be clamped；The first direction and the second direction are perpendicular in the horizontal direction.
2. the micro-clamp according to claim 1 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is, the chucking power sensing mechanism (22) be can output stage (212) to the displacement amplifying mechanism (21) in second party
The mechanism that the power being communicated up is transmitted in parallel is closed the clamping jaw (23) in parallel in a second direction.
3. the micro-clamp according to claim 2 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is that the output stage (212) of the displacement amplifying mechanism (21) is that formation is processed on the monolithic compliant mechanism (2)
One parallelogram mechanism is connected by the first flexible hinge between adjacent two connecting rods of first parallelogram mechanism
It connects, and the input stage (211) of wherein a connecting rod and the displacement amplifying mechanism (21) for first parallelogram mechanism
Connection.
4. the micro-clamp according to claim 3 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is,
The chucking power sensing mechanism (22) is the second parallelogram machine that formation is processed on the monolithic compliant mechanism (2)
Structure is connected by the second flexible hinge between adjacent two connecting rods of second parallelogram mechanism, and described first is parallel
Quadrangular mechanism, second parallelogram mechanism and the clamping jaw (23) are sequentially connected in series；Or
The chucking power sensing mechanism (22) is the double-flexibility beam mechanism that formation is processed on the monolithic compliant mechanism (2), institute
The first parallelogram mechanism, double-flexibility beam mechanism and the clamping jaw (23) is stated to be sequentially connected in series；Or
The chucking power sensing mechanism (22) is the cantilever beam mechanism that formation is processed on the monolithic compliant mechanism (2), described
First parallelogram mechanism, the cantilever beam mechanism and the clamping jaw (23) are sequentially connected in series.
5. the micro-clamp according to claim 4 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is that the input stage (211) of the displacement amplifying mechanism (21) is two that formation is processed on the monolithic compliant mechanism (2)
Four-bar mechanism, two four-bar mechanisms are symmetrical arranged, two four-bar mechanisms with two described first parallel four
Bian Xing mechanism corresponds, and is connected between adjacent two connecting rods of the four-bar mechanism by third flexible hinge, described four
Two fixing ends of link mechanism are fixedly connected with the pedestal (1), the input terminal of the four-bar mechanism and the actuator
(3) it abuts against, the output end of the four-bar mechanism is connect with a wherein connecting rod for first parallelogram mechanism.
6. the micro-clamp according to claim 4 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is that the input stage (211) of the displacement amplifying mechanism (21) is to process the one of formation on the monolithic compliant mechanism (2)
A bridge-type displacement amplifying mechanism, the cavity are located in the bridge-type displacement amplifying mechanism, the bridge-type displacement amplifying mechanism
Its of one of output end and one of them the first parallelogram mechanism in two first parallelogram mechanisms
In the connection of connecting rod, another output end of the bridge-type displacement amplifying mechanism four sides parallel with described in another first
A wherein connecting rod connection for shape mechanism.
7. according to claim 3 to 6 it is described in any item using fiber bragg grating measure chucking power and clamping jaw displacement it is micro-
Clamp, which is characterized in that be installed on the output of the displacement amplifying mechanism (21) in second fiber bragg grating (42)
When in grade (212), second fiber bragg grating (42) is installed on one of them of first parallelogram mechanism
On first flexible hinge, on the first flexible hinge described in any two or on four first flexible hinges.
8. the micro-clamp of chucking power and clamping jaw displacement is measured using fiber bragg grating according to claim 4,5 or 6,
It is characterized in that,
When chucking power sensing mechanism (22) are the second parallelogram mechanism, the first fiber bragg grating (41) installation
In on one of them described second flexible hinge of second parallelogram mechanism, the second flexible hinge described in any two
On upper or four second flexible hinges；
When chucking power sensing mechanism (22) are double-flexibility beam mechanism, first fiber bragg grating (41) is installed on described
On a wherein wherein side surface for a flexible beam for double-flexibility beam mechanism, on the inner surface of two flexible beams, two flexible beams
Outer surface on or the inner surface and the outer surface of two flexible beams on；
When chucking power sensing mechanism (22) are cantilever beam mechanism, first fiber bragg grating (41) is installed on described outstanding
On the inner surface of cantilever beam (223) in Bei Liang mechanism and/or outer surface.
9. the micro-clamp according to claim 5 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is, first flexible hinge, second flexible hinge and the third flexible hinge be oval flexible hinge, straight
Circle flexible hinge or straight beam flexible hinge.
10. the micro-clamp according to claim 1 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is that the bending stiffness of the clamping jaw (23) is greater than the bending stiffness of the chucking power sensing mechanism (22), and the clamping jaw
(23) clamping face is plane or the curved surface to fit with surface component to be clamped.
11. the micro-clamp according to claim 1 for measuring chucking power and clamping jaw displacement using fiber bragg grating, special
Sign is, two cushion blocks (6) being oppositely arranged is equipped in the cavity, and the actuator (3) is set to two pads
Between block (6), one of them described cushion block (6) and the input stage (211) of the displacement amplifying mechanism (21) are abutted against, Ling Yisuo
Cushion block (6) is stated to abut against in the cavity towards the side side wall of the input stage (211) of displacement amplifying mechanism (21)；
The cushion block (6) is towards opening up fluted, the monolithic compliant mechanism on a side end face of the monolithic compliant mechanism (2)
(2) it is arranged in the groove.
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