CN109359436A - A kind of high-precision based on LCD space light modulator, high stability light pencil deflect phased algorithm - Google Patents
A kind of high-precision based on LCD space light modulator, high stability light pencil deflect phased algorithm Download PDFInfo
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Abstract
The invention discloses a kind of, and the novel phase based on LCD space light modulator generates method --- and symmetrical radial direction sub-aperture coherent algorithm belongs to the non-mechanical beam deflection techniques field in active electro-optical system.The problem of actual scanning point stability is influenced vulnerable to alignment error between light source and modulator when realizing that light pencil high-precision scans mainly for original sub-aperture shot.Effective modulation areas of modulator is mainly divided into two groups of symmetric fanning structures by the phase generation method, and the adjacent spaces angle that traditional variable period phase method can scan is loaded respectively, other fine angles between the corresponding angle of final two region are realized by changing the area accounting in two symmetric fanning regions.Simultaneously when input hot spot center deviation modulator panel center, this method can make light beam fall into the energy proportion in two regions because to supply effect realization relatively stable for double sector structure bring energy, to realize the high stability for scanning point range entirety.This method can be adapted for the central symmetry light beam of any grade bore, can substantially relax the adjustment precision limitation of system in the case where keeping original radial sub-aperture shot scanning accuracy constant, while improving deflection angle to the resistance of external mechanical vibrations.Improvement in terms of this stability finally can effectively promote the practical value that phased-array technique carries out light beam high-precision deflection scanning.
Description
Technical field
The present invention refers to a kind of using LCD space light modulator realization high stability, the phase that high precision light beam deflection controls
Position loading algorithm --- symmetrical radial direction sub-aperture coherent algorithm belongs to the on-mechanical light beam deflection skill in active Light Electronic Control System
Art field.
Background technique
Beam deflection techniques are widely used in laser radar, laser communication, laser imaging and remote sensing, far field beam shape control
System etc..Traditional beam deflection techniques generally rely on mechanical device by changing the direction of optical axis to realize the deflection of light beam
Control, exist structure is complicated, it is bulky, involve great expense, the disadvantages of energy consumption is high.And using optical phased array technology as the new of representative
Type beam deflection techniques realize the pure automatically controlled deflection of light beam, overcome the shortcomings of tradition machinery formula beam deflection techniques,
It shows it and deflects the huge application potential in field in light beam.
In recent years, constantly improve with LCD space light modulator manufacture craft is generated based on conventional variable period phase
The light beam deflection pointing accuracy error of algorithm has reached differential of the arc measurement level.Skill is loaded by the subregion phase of scanning panel
Art, the scanning accuracy of modulator equally can reach sub-micro radian magnitude.The case where being heavy-calibre planar wave for input, use cross
Being concerned with to sub-aperture, high scanning accuracy may be implemented in (SAC) phase generating algorithm, the light beam of high stability deflects.And for aperture
Diameter light pencil, although radial sub-aperture is concerned with, (RSAC) algorithm may be implemented to carry out heavy caliber with SAC algorithm in the ideal case
Light beam deflects same precision, but the stability of actual scanning is severely limited by the lateral position of light source center and modulator center
Deviation is specifically divided into changeless lateral alignment error and the facula position as caused by environmental factor is shaken on a small quantity.In order to
The stability that small-bore beam deflection system is improved under the premise of precision is not influenced, and original radial sub-aperture is concerned with by the present invention
Algorithm improvement is that symmetrical radial Subaperture method (SRSAC) passes through area surface when inputting hot spot offset less than offset franchise
The drift of beam deflection angle degree is greatly reduced to more it is effectively guaranteed that the isometry of scanning point range in the method for product compensation.
Summary of the invention
It is an object of the invention to design a kind of novel phase generation method for small-bore light beam, it is less than for bore
The central symmetry light pencil of modulator panel width realizes that sweep spacing angle is the light beam of sub-micro radian magnitude and numerical stability
Scanning.And for different light beam apertures, different facula position offsets, modulator can export stable scan angle
Degree series.
Following particular contents of the invention:
At present to realize that the most basic phase generating algorithm of light beam deflection is variable period method (VPG), for desired light
Beam deflection angle θideal, the theoretically whole phase distribution in modulator panelAs shown in (1) formula:
Wherein d is pixel wide, and λ is lambda1-wavelength, and x is the round () using face plate center as coordinate origin position coordinates
It is respectively round function and remainder function with mod () function.For radial sub-aperture coherent algorithm, modulator face
Plate is divided into two fan-shaped regions and loads the corresponding phase distribution of different deflection angles respectively, by adjusting fan-shaped region
Area ratio realizes the angle accurate adjustment between two discrete deflection angles, and phase distribution is as shown in Figure 1.In order to reduce light
Spot deviates bring output angle error, and the present invention announces a kind of novel radial zone partitioning scheme --- symmetrical radial direction sub-aperture
Diameter coherent algorithm.Modulator panel is divided into two groups of symmetric fanning structures by the algorithm, and phase distribution figure is as shown in Figure 2.When
There are when small deviation, the symmetric fanning region segmentation method in Fig. 2 can make for launching spot center and modulator panel center
Light energy realization in some region in two symmetric fannings is mutually supplied, so that the whole light energy in the region maintains substantially
It is constant.Fig. 3 is its concrete principle schematic diagram: for only existing the offset of the direction x, when offset vector mould | δinWhen | < < R, face can be obtained
Product variable quantity is as shown in (2) formula:
S+=2Rsin (βII/2)·δin,x+O(δin,x 2) (2a)
S-=2Rsin (βII/2)·δin,x-O(δin,x 2) (2b)
Wherein O (δin,x 2) represent the direction x alignment error second order it is a small amount of.The gross energy variable quantity in two regions such as (3) formula institute
Show:
ΔEII=(S+-S-) I (R)=O (δin,x 2) (3a)
ΔEI=-Δ EII=O (δin,x 2) (3b)
Partial differential relationship when offset of zero is obtained, as shown in (4a) formula, similarly when only existing the offset of the direction y, partially
Differential relationship is as shown in (4b) formula.
Therefore binary function E continuous for high-orderI(δin,x,δin,y),EII(δin,x,δin,y), there are total differentials at zero point
Relationship:
(5) formula shows the symmetrical radial sub-aperture phase generation method for announcing in the present invention, any direction it is small
Alignment error will not change energy distribution ratio of the incident beam in two regions.And analog result shows that final two light beam is relevant
The intensity mass center corresponding angle of superposition depends primarily on the energy distribution in two regions, and translates caused complicated frequency domain phase to hot spot
Shifting response is insensitive, i.e., launching spot has stable energy integral to can guarantee the steady of emergent light deflection angle in two regions
It is fixed.
It is the specific design process of the invention below:
Step 1: the computer simulation of diffraction process is carried out using MATLAB software.Arbitrarily choose in a scanning range
Sweep interval [θI,θII), by (6) formula definition normalization angle:
It is simulated respectively in the case where region occupation rate is equal to several discrete representative values, output angle error thetaerrorWith input
The relationship curved surface of facula deviation vector.The symmetrical radial Subaperture method that existing radial Subaperture method and the present invention are announced
It compares, the analog result of the two error surface such as Fig. 4, shown in 5,6,7.
Step 2: with reference to the analog result in step 1, emphasis simulated domain occupation rate and the direction x normalize deflection angle
Scanning relation curve, radial sub-aperture shot and symmetrical radial sub-aperture shot analog result are respectively such as Fig. 8, shown in 9.
Step 3: linearisation sequence reconstruct, tool are carried out to symmetrical radial sub-aperture scanning curve approximation formula shown in Fig. 9
Body reconstructing method is similar with existing radial sub-aperture shot.Curve of approximation is pressed into ordinate equal part, records a series of ordinates
The corresponding abscissa of equidistant scanning element, lookup when LUT table is made in case of actual scanning in obtained abscissa sequence.
Step 4: it builds specific optical path and carries out experimental verification, schematic diagram and practical index path are respectively such as Figure 10, figure
11.And measured data is analyzed to verify the correctness of Computer simulation results.
Compared with prior art, the invention has the advantages that and the utility model has the advantages that the present invention is having radial sub-aperture phase
The novel symmetrical radial sub-aperture coherent method of otherwise designed on the basis of dry method, in order to realize symmetrical light pencil
Under the premise of superelevation scanning accuracy deflects, increasing substantially system, there are stability when alignment error.It is embodied in obvious
The adjustment required precision of reduction system makes the tolerance of spacial alignment error be relaxed to submillimeter magnitude, while being drawn by environmental factor
The relative position fluctuation of the modulator and light source that rise also will no longer will affect the deviation angle of light beam, thus after Linearized correction
It can be realized that deflection angle is stable, the equidistant light beam scanning of superelevation scanning accuracy.This will make to be based on liquid crystal spatial light modulation
The beam deflection techniques of device have more good practicability in fields such as laser radar, laser communication, laser countermeasure (s)s.
Detailed description of the invention
Fig. 1: the phase schematic diagram of existing radial direction sub-aperture shot, transverse and longitudinal coordinate is modulator panel pixel number, panel
Overall width is L.
It (1) is one area of phase-modulation, deflection angle θI。
It (2) is 2nd area of phase-modulation, deflection angle θII。
(3) it is area's opening angle, is denoted as αI。
(4) it is two area's opening angles, is denoted as αII。
The apex angle of two fan-shaped regions respectively represents respective region occupation rate: ηI=αI/2π,ηII=αII/2π.Deflection angle
Value restrictive condition: the scanning angle in two regions is θstepIntegral multiple and θstep=θII-θI, generated respectively by (1) formula respective
The phase distribution in region.
Fig. 2: the phase schematic diagram for the symmetrical radial sub-aperture shot announced in the present invention."×" shape cut-off rule is by modulator face
Plate is divided into two different phase-modulation regions.
(1) (2) are one area of phase-modulation, deflection angle θI。
(3) (4) are 2nd area of phase-modulation, deflection angle θII。
(5) it is the apex angle of the double sector structures in an area, is denoted as βI。
(6) it is the apex angle of the double sector structures in 2nd area, is denoted as βII。
The corresponding relationship of two region occupation rates and respective apex angle: ηI=βI/π,ηII=βII/π.Deflection angle value limits item
The radial sub-aperture shot that part is illustrated with Fig. 1 is identical.
Fig. 3: symmetrical radial direction Subaperture method reduces the schematic illustration that alignment error influences.Modulator phase distribution is the same as figure
2.Solid line, circle of dotted line domain is respectively represented there are alignment error and there is no the launching spot of alignment error, radius R.
(1) the area increase S for dot projection in 2nd area+。
(2) area reduction S of the dot projection in 2nd area-。
Fig. 4: the contour simulation drawing of the direction the x output error curved surface of radial sub-aperture shot.Simulate spot radius R=3mm;
Transverse and longitudinal coordinate is respectively the x inputted, y deflection error, simulation context: (- 0.3mm, 0.3mm)2, curved surface numerical value is normalization deflection
Angular error.(a) (b) (c) (d) is respectively the case where two region segmentation ratios are equal to 1/6,2/6,3/6,4/6.
Fig. 5: the contour simulation drawing of the direction the y output error curved surface of radial sub-aperture shot.Simulate spot radius and curved surface
Coordinate meaning is respectively the case where two region segmentation ratios are equal to 1/6,2/6,4/6 with Fig. 4 (a) (b) (c).
Fig. 6, Fig. 7 are respectively the direction x of symmetrical radial sub-aperture shot and the contour simulation of the direction y output error curved surface
Figure.Spot radius and the same Fig. 4 of surface coordinates meaning.(a) (b) (c) (d) is respectively that two region segmentation ratios are equal to 1/6,2/6,3/6,
4/6 the case where.
Fig. 8: radial sub-aperture shot scanning curve schematic diagram.Recording a span is θstepSweep interval in normalized angle
Spend θnormWith two area occupation rate ηIIBetween scanning relation curve.And have recorded the variation feelings of scanning curve under different alignment errors
Condition: "○", " △ ", " ", it is 0 that " * ", which respectively represents the direction x alignment error ,+0.2mm ,+0.4mm, and scanning when+0.6mm dissipates
Point.When the direction x alignment error is negative, hash point is whole to be moved down, and is that timing is symmetrical with alignment error.Solid black lines are different scanning
The approximate analysis curve of scatterplot.
Fig. 9: symmetrical radial direction sub-aperture shot scanning curve schematic diagram.
Scanning scatterplot when " " is represented without alignment error.
"○" represents the direction x alignment error as the scanning scatterplot of+0.4mm.
" * " represents the direction y alignment error as the scanning scatterplot of+0.4mm.
Solid black lines are the unified approximate analysis curve of all scanning scatterplots.
Figure 10: angle measurement light path schematic diagram and main devices mark.Dark light beam is tested light beam, space laser in figure
Device outgoing 730nm laser simultaneously enters autocollimator through heavy caliber fiber coupling.After heavy caliber collimated light beam is emitted by autocollimator
Autocollimator is reflected back through LCD space light modulator, in-built CCD light spot received and according to facula position output beam deflection angle
Degree evidence.Light light beam is illuminating bundle, is responsible for for the accurate adjustment diaphragm of equivalent light pencil being aligned with modulator panel.Diaphragm alignment
It removes after the completion and angle measurement is carried out to Barebone.
(1) emit the 730nm laser of tested light.
(2) motor-driven rotating ground glass plate, for speckle effect caused by laser coherence.
(3) heavy caliber optical fiber, the light for issuing laser import autocollimator.
(4) full digital micrometer autocollimator, by optical fiber input light beam become heavy-calibre planar wave emit and receive instead
Penetrate light, subsequent output reflection light deflection angle numerical value, 0.1 μ rad of the angle measurement accuracy limit.Including minor structure (5), (6) (7).
(5) semi-transparent partly to return mirror.
(6) collimating optical system.
(7) collimator in-built CCD camera, light spot received position.(5) (6) (7) are the structure diagram of (4), are not represented specific
Instrument internal construction.
(8) angle measurement computer, for analyzing the signal of (7) and exporting measurement angle data.
(9) polarizing film is tilted.For filtering polarized light component that modulator cannot be modulated while avoiding reflected light itself
It influences.
(10) diaphragm and its high precision displacement platform, for blocking the heavy caliber light beam of autocollimator transmitting with equivalent aperture
Diameter plane wave.Diaphragm is close to place with modulator panel and the two center relies on and precisely aligns to Barebone.Hereafter smart
Displacement platform is adjusted, realizes the accurate equivalent of different alignment errors.
(11) liquid crystal on silicon spatial light modulator realizes that light beam high-precision deflects by wave-front phase modulation.
(12) computer control system of modulator.
(13) white light source, for carrying out side lighting to diaphragm and modulator panel.
(14) reflecting mirror, reflection diaphragm and modulator panel diffuse.
(15) imaging len, for diaphragm and modulator panel to be imaged on alignment CCD.
(16) for alignment CCD camera, for receiving the picture of diaphragm and modulator panel, by observation both picture into
Row stop position accurate adjustment, to realize the alignment at the two center.
Figure 11: actual measurement optical path and main devices mark.(1) measuring system is constituted to (7), is tested 730nm light beam such as
In figure shown in grey arrow.(8) auxiliary is constituted to Barebone to (12), illumination white light for alignment white arrow institute such as in figure
Show.
(1) 730nm laser.(2) rotating ground glass plate.(3) heavy caliber optical fiber.(4) liquid crystal on silicon spatial light modulator.
(5) diaphragm and its high precision displacement platform.(6) full digital micrometer autocollimator.(7) polarizing film.(8) white light source.(9),
(11) reflecting mirror.(10) imaging len.(12) it is directed at CCD.Beam alignment is first carried out before actual measurement, is removed after alignment
(9) reflecting mirror carries out actual deflection angle measurement again.
Figure 12: there are the radial sub-aperture shot of alignment error to survey scanning element schematic diagram.Scheme (12a) be Linearized correction it
Preceding scanning angle distribution."○", " " respectively represent the actual measurement scatterplot when direction x alignment error is set as ± 0.2mm, black
Solid line is customized matched curve.Scheming (12b) is the scanning angle distribution after Linearized correction." * ", "○", " " difference
It represents the direction x alignment error and is set as 0, actual measurement scatterplot when ± 0.2mm, black line is ideal scan straight line.
Figure 13: there are the symmetrical radial sub-aperture shot of alignment error to survey scanning element schematic diagram.Scheming (13a) is linearisation school
Scanning angle distribution before just."○", " " respectively represent the direction x alignment error and are set as the direction 0.2mm and y alignment mistake
Difference is set as actual measurement scatterplot when 0.2mm, and solid black lines are customized matched curve.(13b) is schemed for after Linearized correction
Scanning angle distribution." * ", "○", " " respectively represents no alignment error, the direction x alignment error is set as 0.2mm and the side y
Actual measurement scatterplot when being set as from 0.2mm to alignment error, black line are ideal scan straight line.
Specific embodiment
1. the stability of the symmetrical radial sub-aperture shot of computer simulation, and compared with existing radial sub-aperture shot.
1) analog parameter is set by actual device parameters:
Modulator pixel width: d=15 μm;Modulator pixel number: 512 × 512;
Lambda1-wavelength: 730nm;Incident light form: fundamental-mode gaussian beam Circular Aperture plane wave with a tight waist/limited;
Incident light bore: 3mm;Sector scanning angle difference: 10 μ rad;
Scan minimum angles interval: 0.5 μ rad.
2) radial direction sub-aperture shot and symmetrical radial sub-aperture shot output angle error are simulated respectively and input alignment error
Dependence.As also shown in e.g. figs. 4-7.The analog result for comparing two kinds of algorithms obtains several conclusions:
A. comparison diagram 4, Fig. 5 learn the δ of radial sub-aperture shot under normal conditionsout,x>>δout,y, and δ as shown in Figure 4out,x
Approximate and δin,yIt is unrelated, therefore the subsequent analysis of the algorithm is mainly for δout,xAnd δin,xCorresponding relationship.
B. by Fig. 6, the δ of symmetrical radial direction Subaperture methodout,xMuch smaller than radial Subaperture method, for | δin| fixed
Different directions alignment error,
δout,xRespectively in δinVery big, minimum is taken when along the direction x, y.The δ of two algorithmsout,yIt is 1/10th microradians
Magnitude can ignore this perpendicular to the influence of scanning direction in one-dimensional scanning.
3) it is based on conclusion in 2), simulates scanning point range variation tendency of two kinds of algorithms when there are alignment error.For diameter
To Subaperture method (Fig. 8), single parameter Approximate Analytic Formula is established, as shown in (7) formula:
Parameter δcRepresent normalization angular deviation when occupation rate is 0.5.For symmetrical radial Subaperture method (figure
9) point range trend kept stable, is scanned under different alignment errors, therefore can establish unified Approximate Analytic Formula.Consider with
Connection between upper two phase place generating algorithm can be solved the approximate formula of symmetrical radial sub-aperture shot, such as (8) formula by (7) formula:
4) analytic curve in Fig. 9 is subjected to Linearized correction.Specific practice is by simulation curve by ordinate equal part, note
Record a series of corresponding abscissa of the equidistant scanning element of ordinates.LUT table is made in obtained abscissa sequence in case actually sweeping
Lookup when retouching.
2. the stability of the symmetrical radial sub-aperture shot of experiment detection, and compared with existing radial sub-aperture shot.
1) radial Subaperture method is loaded, δ is adjustedin,x=0, ± 0.2mm.Figure 12 a is two groups of scannings containing alignment error
Point range and its using (7) formula as the customized fitting result of target fitting function.Figure 12 b is the scanning point range after linearisation, for
Radial Subaperture method, alignment error can make in the middle part of final output point range in the presence of the whole trend for moving up or moving down, hence it is evident that shadow
Ring the isometry between point range linear character and scanning element.
2) the symmetrical radial Subaperture method of load, adjusts δin,x=0.4mm or δin,y=0.4mm.Figure 13 a be two groups containing pair
The scanning point range and its unification approximate formula (8) of quasi- error.Figure 13 b is the scanning point range after linearisation, is different from radial sub-aperture
Diameter algorithm, three groups of symmetrical radial direction Subaperture method finally scan the identical ideal scan straight line of point range.By aforementioned computer mould
This method known to quasi- conclusion exists | δinLinear array can be exported within the scope of | < 0.4mm, be spaced equidistant stablizing and scanned point range.
Eyeball is the limited caused random survey of measuring system precision relative to the deviation of theoretical value in Figure 12 and Figure 13
Error is measured, does not influence the stability of actual scanning interval angles.
3. the phase calculation process of the symmetrical radial Subaperture method of practical application
1) control system receives initial desired angle numerical value θ, and θ needs to be the whole of minimum 0.5 μ rad of sweep spacing angle
Several times.Judge the sweep interval belonging to it, an area, the corresponding scanning angle in 2nd area is respectively as shown in (9a, 9b) formula:
θI=θstep×floor(θ/θstep) (9a)
θII=θI+θstep (9b)
Wherein floor (x) represents the maximum integer taken no more than x.And by θI,θIIValue calculate normalization angle, θnorm,
As shown in (6) formula.
2) by θnormCalculate linear reconstruction sequence subscript: n=θnorm×N.N=θ in the present inventionstep/ 0.5 μ rad=20, it is real
It can be according to the value of the corresponding N of minimum sweep spacing angle calculation of parameter request in the use process of border.
3) the LUT table of two area's occupation rate sequences obtained in finding step three, records series ηII,iThe corresponding η of middle i=nII
Value, as actual 2nd areas occupation rate, area's occupation rate are ηI=1- ηII。
4) region segmentation is carried out by Fig. 2 by region occupation rate.Respectively by θI,θIIθ in (1) formula of substitutionidealAcquire twoth area
The phase distribution in domain.This phase distribution is finally loaded in modulator panel, realizes that the light beam that angle is θ deflects.
The symmetrical radial Subaperture method (SRSAC) announced in the verified present invention and existing radial sub-aperture shot
(RSAC) scanning accuracy having the same, the two is identical to the deflection effect of small-bore light beam in the ideal case.But
For system there are when alignment error, existing radial direction sub-aperture scanning point range will receive interference, sweep spacing angle floating error phase
It should increase;And symmetrically the scanning point range of radial sub-aperture shot is without substantially departing from ideal line, so that the dress of system be effectively reduced
Precision limitation is adjusted, while improving the resistance to extraneous disturbance factor.Significantly improving in terms of this stability will be so that liquid crystalline phase
The practical value of control battle array beam deflection techniques is substantially improved.
Claims (4)
1. a kind of high-precision based on LCD space light modulator, the phase generation method of high stability --- symmetrical radial direction sub-aperture
Diameter coherent algorithm, it is characterised in that: effective modulation areas of LCD space light modulator is divided into two groups of symmetric fanning regions,
The corresponding phase distribution of different deflection angles is loaded respectively according to variable period phase generating algorithm in two symmetric fanning regions.It is logical
The light beam deflection for changing other fine angles between apex angle two corresponding deflection angles of realization in symmetric fanning region is crossed, is realized
High stability, high-precision light beam deflection scanning.
2. symmetrical radial sub-aperture coherent phase according to claim 1 generates method, it is characterised in that: with "×" shape point
Modulation areas is partitioned into four fan-shaped sub-districts by secant, and two mutually symmetrical sectors are a scanning area, loads same deflection
The corresponding phase distribution of angle.The phase modulating structure can be realized region when launching spot and modulator center exist and deviate
Internal energy fluctuation is complementary, greatly improves deflection angle stability.
3. symmetrical radial sub-aperture coherent phase according to claim 1 generates method, it is characterised in that: two symmetrical fans
The corresponding deflection angle difference θ in shape regionII-θIIt is equal with the sweep spacing angle of traditional variable period method.Outgoing beam is relevant folded
Add rear mass center angle between θI,θIIBetween.Normalization angle is defined according to actual scanning angle, θ:
Relation curve between verified normalization angle and region occupation rate can take the feelings of different representative values in hardware parameter
It keeps stablizing under condition.The Linearized correction of angle is scanned according to this relationship, specific practice is bent by ordinate etc. point simulation
Line records a series of corresponding abscissa of the equidistant scanning element of ordinates.Region occupation rate is made in obtained abscissa sequence to look into
Table typing is looked for control program.
4. the process for using of symmetrical radial direction sub-aperture coherent method, it is characterised in that:
Step 1: scanning section [θ is determined according to input scanning angle θI,θII) and normalization angle, θnorm。
Step 2: it finds serial number in occupation rate sequence and is equal to θnormThe corresponding region occupation rate of × N is based on by the generation of this occupation rate
The phase distribution of symmetrical radial direction sub-aperture coherent method.Wherein N is the sampled point number in a scanning section.
Step 3: the phase distribution in load step two on the modulator realizes high precision light beam deflection.
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