CN109358208A - A kind of exoskeletal torquer microminiature quartz accelerometer - Google Patents
A kind of exoskeletal torquer microminiature quartz accelerometer Download PDFInfo
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- CN109358208A CN109358208A CN201811353454.1A CN201811353454A CN109358208A CN 109358208 A CN109358208 A CN 109358208A CN 201811353454 A CN201811353454 A CN 201811353454A CN 109358208 A CN109358208 A CN 109358208A
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- torquer
- stator module
- exoskeletal
- microminiature
- shell
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
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Abstract
The present invention provides a kind of exoskeletal torquer microminiature quartz accelerometers, it is characterized in that, including shell, shell is the cylindrical structure with flange connection, stator module gos deep into shell cylindrical cavity bottom, signal processing circuit board outer circle and shell inner hole cooperation are fixed, upper stator module is connected and is welded and fixed using connection ring with lower stator module, and rocker component is fixed in stator module, the rocker component is acceleration sensitive mass block, the present invention has structure simple, craftsmanship is strong, precision is high, it is small in size, it is light-weight, starting is fast, power is low, the big feature of range, inertia system especially suitable for special small space and a large amount of range request use conditions, the present invention provides specific flange fixed disk, mounting means is simple, it is general.
Description
Technical field
The present invention relates to a kind of microminiature quartz accelerometers, and in particular to a kind of exoskeletal torquer microminiature quartz adds
Speedometer.
Background technique
Accelerometer is the key element in inertia system, and quartz accelerometer is since its is small in size, precision is high, starting
Fastly, the features such as shock resistance, high reliability, it is widely used in the inertial navigation systems such as ship, vehicle, aircraft, guided missile and rocket
Inertial guidance system and satellite, the control system of airship etc..In recent years as the application environment of ship, aircraft etc. complicates
With the trend high to required precision, all to accelerometer, more stringent requirements are proposed in many fields, does not require nothing more than accelerometer essence
Spend high, small in size, light-weight, starting is fast, power is small, the service life is long, shock resistance, environment resistant ability by force, high reliablity, performance it is steady
It is fixed, and require under the conditions of existing available material, process, to miniaturization, wide range proposes higher requirement.It is existing
Quartz accelerometer uses push-pull type torquer structure, realizes the error compensation of pendulum component, but that there are sizes is big, range is small, right
Process and the demanding defect of condition are difficult to meet the need that microminaturization and wide range are realized under the conditions of current material
It asks.Servo pendulous accelerometer precision belong in low precision, although shock resistance, antivibration kinetic force is stronger, it uses axis nest-axis
Apical branch holds the working principle of pendulum component, there are the inherent shortcoming that pivot is easy to wear, limits it in high-precision, long-time reliably working
Application in the inertial navigation system of equal high requests.Therefore need to develop a kind of quartz acceleration with exoskeletal torquer
Degree meter: compared with current main-stream quartz accelerometer, measurement accuracy, bias instaility, nonlinearity, repeatability, power, starting
The indexs such as time are suitable therewith, and volume integrally reduces, and range increases exponentially and process is more simplified, to new magnetic steel material
It is required that lower.The mentality of designing for changing mainstream quartz accelerometer is set using exoskeletal torquer structure using global optimization
Meter realizes the microminaturization of exoskeletal torquer quartz accelerometer, increases range and simplifies technique.
Summary of the invention
It is an object of the invention to overcome the inherent shortcoming of above-mentioned servo pendulous accelerometer, change above-mentioned quartzy acceleration
The mainstream thinking of the torquer structure design of meter, provides a kind of exoskeletal torquer microminiature quartz accelerometer, has precision
High, light-weight, the characteristics of starting is fast, power is low, range substantially increases, and volume is substantially reduced.
The technical solution adopted by the present invention is that:
A kind of exoskeletal torquer microminiature quartz accelerometer, including shell, shell are the circle with flange connection
Column structure, stator module go deep into shell cylindrical cavity bottom, and signal processing circuit board outer circle and shell inner hole cooperation are fixed, on
Stator module is connected and is welded and fixed using connection ring with lower stator module, and rocker component is fixed in stator module, institute
Stating rocker component is acceleration sensitive mass block, when there is acceleration signal, pendulum component and upper stator module, lower stator module group
At the capacitor of differential capacitance sensor change, driving testing circuit detects the capacitive differential between upper bottom crown, and will
Capacitive differential is converted into its proportional electric signal, and the electric signal is corrected, power amplification, enters torque after feedback loop
Device, one sample circuit of torquer one end series connection, the electric current for flowing through sampling resistor are proportional to the measurement acceleration of carrier.
Further, the vertical range of the surface of shell is not more than 17mm；The diameter of the shell 2 is not more than Φ
17mm。
Further, the signal processing circuit board is additionally provided with no metal shell and binding post, and outside uses silicon rubber
Sealing and isolation.
Further, it is nothing that the torquer of the stator module, which is the torquer of push-pull type structure or the stator module,
Skeleton structure.
Further, gap is less than 0.15mm between the torquer coil and magnet steel of the stator module；
Further, gap is less than 0.15mm between the torquer coil and upper stator of the stator module；
Further, gap is less than 0.15mm between the torquer coil of the stator module and lower stator.
Further, the pendulum component coil is bonded on rocker；
Further, for the pendulum component coil by the way of being symmetrically bonded, weight differential is less than 1mg；The pendulum group
Part coil straight forming, no metal or ceramic skeleton.
Further, the outer diameter of the rocker 21 is less than φ 14mm.
Further, sensitive-mass is in free working condition in the case where thin cervical branch is held fastly in the pendulum component.
Inventing has that structure is simple, craftsmanship is strong, precision is high, small in size, light-weight, starting is fast, power is low, range is big
Feature, especially suitable for the inertia system of special small space and a large amount of range request use conditions, the present invention provides specific method
Blue fixed disk, mounting means is simple, general.
Detailed description of the invention
The above is only the invention patent plan explanation, illustrates technological means of the invention to become apparent from, ties below
It closes attached drawing and specific embodiment elaborates to the present invention.
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the schematic diagram of electric signal；
Fig. 3 is each part assembly relation of stator module 3；
Fig. 4 is each part assembly relation of lower stator module 8；
Fig. 5 is each part assembly relation of upper stator module 5；
Fig. 6 is each part assembly relation of magnetic steel component 11；
Fig. 7 is each part assembly relation of insulator assembly 13；
Fig. 8 is each part assembly relation of insulator assembly 14；
Fig. 9 is the pendulum each part assembly relation of component 7.
The label in accompanying drawing is: 1- signal processing circuit board, 2- shell, 3- stator module, 4- sealing screw, the upper stator of 5-
Component, 6- connection ring, 7- put component, stator module under 8-, stator under 9-, 10- magnetic steel component, 11- magnetic compensation ring, fixed on 12-
Son, 13- insulator assembly I, 14- insulator assembly II, 15- magnet steel, 16- magnetic conduction cap, 17- insulator block I, 18- binding post,
19- insulator block II, 20- binding post, 21- rocker, 22- torquer coil.
Specific embodiment
Below in conjunction with attached drawing and specific embodiment, the present invention will be described in detail, herein illustrative examples of the invention
And explanation is used to explain the present invention, but not as a limitation of the invention.
Exoskeletal torquer microminiature quartz accelerometer of the invention is as shown in Figure 1, include shell 2, shell 2 is band method
The cylindrical structure of flange connection structure, stator module 3 go deep into the former column cavity bottom of shell 2, and blend compounds liquid is fixed.Signal processing electricity
1 outer circle of road plate and 2 inner hole of shell are simultaneously fixed with glue.Sealing screw is screwed into the screw hole of shell 2, and is sealed admittedly with sealant
It is fixed.
The electric signal schematic diagram is as shown in Fig. 2, electric signal principle of the invention are as follows: pendulum component is acceleration sensitive matter
Gauge block, when having acceleration signal, the capacitor for the differential capacitance sensor that pendulum component and upper stator module, lower stator module form is sent out
Changing, driving testing circuit detects the capacitive differential between upper bottom crown, and is translated into electric signal proportional thereto,
Enter torquer after the links such as the signal is corrected, power amplification, feedback loop, the sampling of connecting of torquer one end is electric
Road, the electric current for flowing through sampling resistor are proportional to the measurement acceleration of carrier.
Stator module 3 is as shown in Figure 3.Upper stator module 5 and lower stator module 8 will put component and compress, and solid with connection ring 6
It is fixed, it is fixed by the way of laser welding.
For lower stator module 8 as shown in figure 4, magnetic steel component 10 is pressed into the bottom circle of lower stator 9, circumferential section is inserted in magnetic benefit
Ring 11 is repaid, blend compounds liquid is fixed.
Upper stator module 5 is as shown in figure 5, insulator assembly I13, insulator assembly II14 band glue are fixed on stator 12
In, magnetic steel component 10 is pressed into the bottom circle of upper stator 12, and circumferential section is inserted in magnetic compensation ring 11, and blend compounds liquid is fixed.
Magnetic steel component 10 is as shown in fig. 6, by magnetic compensation ring 16 with being bonded on magnet steel 15.
Insulator assembly I13 is as shown in fig. 7, by binding post 18 with glue sticking on insulator block 17.Insulator assembly
II14 is as shown in figure 8, by binding post 20 with glue sticking on insulator block 19.Insulator block 19, insulator block 17 are bonded respectively
In lower stator 9 and upper stator 12, it is ensured that insulate with upper stator module 5 and lower stator module 8.
Component 7 is put as shown in figure 9, torquer coil 22 is fixed on rocker 21 with glue, it is desirable that between torquer coil
Weight difference be less than 1mg, and keep coaxial.
Compared with existing servo pendulous accelerometer, pendulum assembly connecting mode is axis nest-centre support, axis nest-axis
There are kinetic force of friction, long-time, strong vibration environmental work axis nest-pivot serious wear, pendulum components to pass through supporting slice, shaft assembly for point
It is connect with pedestal, part is more and small, variable factor is difficult to control.Existing quartz accelerometer torquer coil is fixed on gold
It is supreme to belong to skeleton, is related to the limitation of the factors such as copper factor, the gap between torquer coil and magnet steel is caused not count accurately
The problem of calculating, coil caused not operate in magnetic field optimum position.The design structure causes rocker because skeleton is larger, and quartz accelerates
Degree meter overall dimensions are larger.Torquer coil design is the coil of straight forming by the present invention, is removed for shaping and fixation
Skeleton, greatly reduces the outer diameter of torquer coil block, and number of parts reduces, reduces operation difficulty, improve efficiency, together
When control torquer coil and magnet steel between gap be in magnetic field optimum position, substantially increase the effective rate of utilization in magnetic field,
Not only it is substantially reduced the size of quartz accelerometer, the raising of magnetic field utilization rate can greatly improve quartz accelerometer
Range.Therefore compared to existing quartz accelerometer, the present invention have structure is simple, craftsmanship is strong, precision is high, it is small in size,
Feature light-weight, starting is fast, power is low, range is big, especially suitable for special small space and a large amount of range request use conditions
Inertia system, the present invention provides specific flange fixed disk, and mounting means is simple, general.
Technical solution disclosed in the embodiment of the present invention is described in detail above, specific implementation used herein
Example is expounded the principle and embodiment of the embodiment of the present invention, and the explanation of above embodiments is only applicable to help to understand
The principle of the embodiment of the present invention；At the same time, for those skilled in the art is being embodied according to an embodiment of the present invention
There will be changes in mode and application range, in conclusion the content of the present specification should not be construed as to limit of the invention
System.
Claims (8)
1. a kind of exoskeletal torquer microminiature quartz accelerometer, which is characterized in that including shell, shell is band flanged joint
The cylindrical structure of structure, stator module go deep into shell cylindrical cavity bottom, and signal processing circuit board outer circle is matched with shell inner hole
It closes and fixes, upper stator module is connected and is welded and fixed using connection ring with lower stator module, and rocker component is fixed on stator
In component, the rocker component be acceleration sensitive mass block, when there is acceleration signal, pendulum component and upper stator module, under
The capacitor of the differential capacitance sensor of stator module composition changes, and driving testing circuit detects the capacitor between upper bottom crown
Difference, and convert its proportional electric signal for capacitive differential, the electric signal is corrected, power amplification, after feedback loop
Into torquer, torquer one end is connected a sample circuit, flow through sampling resistor electric current and measurement carrier acceleration at
Ratio.
2. exoskeletal torquer microminiature quartz accelerometer according to claim 1, which is characterized in that the surface of shell
Vertical range be not more than 17mm；The diameter of the shell 2 is not more than Φ 17mm.
3. exoskeletal torquer microminiature quartz accelerometer according to claim 1, which is characterized in that
The signal processing circuit board is fixed and is sealed using gluing；
The signal processing circuit board is additionally provided with no metal shell and binding post, and outside uses silicone rubber seal and isolation.
4. exoskeletal torquer microminiature quartz accelerometer according to claim 1, which is characterized in that the stator module
Torquer be the torquer of push-pull type structure or the stator module be chassis less construction.
5. according to claim 1 or the 4 exoskeletal torquer microminiature quartz accelerometers, which is characterized in that the stator
Gap is less than 0.15mm between the torquer coil and magnet steel of component；
Gap is less than 0.15mm between the torquer coil and upper stator of the stator module；
Gap is less than 0.15mm between the torquer coil of the stator module and lower stator.
6. exoskeletal torquer microminiature quartz accelerometer according to claim 1, which is characterized in that in the pendulum component
Coil is bonded on rocker；
For the pendulum component coil by the way of being symmetrically bonded, weight differential is less than 1mg；The pendulum component coil directly at
Type, no metal or ceramic skeleton.
7. exoskeletal torquer microminiature quartz accelerometer according to claim 6, which is characterized in that the rocker 21
Outer diameter is less than φ 14mm.
8. exoskeletal torquer microminiature quartz accelerometer according to claim 1, which is characterized in that in the pendulum component
Sensitive-mass holds in thin cervical branch lower in free working condition fastly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811353454.1A CN109358208A (en) | 2018-11-14 | 2018-11-14 | A kind of exoskeletal torquer microminiature quartz accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811353454.1A CN109358208A (en) | 2018-11-14 | 2018-11-14 | A kind of exoskeletal torquer microminiature quartz accelerometer |
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| CN109358208A true CN109358208A (en) | 2019-02-19 |
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ID=65345152
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| CN201811353454.1A Pending CN109358208A (en) | 2018-11-14 | 2018-11-14 | A kind of exoskeletal torquer microminiature quartz accelerometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110285832A (en) * | 2019-07-04 | 2019-09-27 | 北京航天时代光电科技有限公司 | The used calibrating parameters long-time stability defect inspection method for surveying product of optical fibre gyro |
| CN114130623A (en) * | 2021-10-29 | 2022-03-04 | 中国船舶重工集团公司第七0七研究所 | Novel assembling method for quartz flexible accelerometer pendulum component based on adhesive film bonding |
| CN114371312A (en) * | 2020-10-15 | 2022-04-19 | 航天科工惯性技术有限公司 | Torque device suitable for high-temperature environment and stabilization processing method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998481A (en) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | Novel electromagnetic accelerometer structure |
| CN203191405U (en) * | 2013-01-25 | 2013-09-11 | 柳州长虹机器制造公司 | Minitype high-precision quartz flexible accelerometer |
| EP2722676A1 (en) * | 2012-10-19 | 2014-04-23 | Honeywell International Inc. | Acceleration sensor with stress reduction components |
| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN206505096U (en) * | 2017-03-03 | 2017-09-19 | 青岛智腾微电子有限公司 | A kind of high antivibration quartz flexibility acceleration sensor |
| CN107703329A (en) * | 2017-09-29 | 2018-02-16 | 中国船舶重工集团公司第七0七研究所 | Vacuum holding structure for high-resolution quartz flexible accelerometer |
-
2018
- 2018-11-14 CN CN201811353454.1A patent/CN109358208A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2722676A1 (en) * | 2012-10-19 | 2014-04-23 | Honeywell International Inc. | Acceleration sensor with stress reduction components |
| CN102998481A (en) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | Novel electromagnetic accelerometer structure |
| CN203191405U (en) * | 2013-01-25 | 2013-09-11 | 柳州长虹机器制造公司 | Minitype high-precision quartz flexible accelerometer |
| CN206505096U (en) * | 2017-03-03 | 2017-09-19 | 青岛智腾微电子有限公司 | A kind of high antivibration quartz flexibility acceleration sensor |
| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN107703329A (en) * | 2017-09-29 | 2018-02-16 | 中国船舶重工集团公司第七0七研究所 | Vacuum holding structure for high-resolution quartz flexible accelerometer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110285832A (en) * | 2019-07-04 | 2019-09-27 | 北京航天时代光电科技有限公司 | The used calibrating parameters long-time stability defect inspection method for surveying product of optical fibre gyro |
| CN114371312A (en) * | 2020-10-15 | 2022-04-19 | 航天科工惯性技术有限公司 | Torque device suitable for high-temperature environment and stabilization processing method |
| CN114130623A (en) * | 2021-10-29 | 2022-03-04 | 中国船舶重工集团公司第七0七研究所 | Novel assembling method for quartz flexible accelerometer pendulum component based on adhesive film bonding |
| CN114130623B (en) * | 2021-10-29 | 2023-06-20 | 中国船舶重工集团公司第七0七研究所 | Novel quartz flexible accelerometer pendulum part assembly method based on adhesive film bonding |
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Application publication date: 20190219 |
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