CN109352280B - Manufacturing process of large vacuum cavity - Google Patents
Manufacturing process of large vacuum cavity Download PDFInfo
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- CN109352280B CN109352280B CN201811373884.XA CN201811373884A CN109352280B CN 109352280 B CN109352280 B CN 109352280B CN 201811373884 A CN201811373884 A CN 201811373884A CN 109352280 B CN109352280 B CN 109352280B
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- vacuum cavity
- sealing surface
- manufacturing process
- vibration aging
- top sealing
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 230000032683 aging Effects 0.000 claims abstract description 50
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 44
- 239000010959 steel Substances 0.000 claims abstract description 44
- 238000007789 sealing Methods 0.000 claims abstract description 37
- 230000035882 stress Effects 0.000 claims abstract description 25
- 238000003466 welding Methods 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 11
- 238000007667 floating Methods 0.000 claims description 59
- 230000000712 assembly Effects 0.000 claims description 7
- 238000000429 assembly Methods 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 3
- 239000004519 grease Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract description 12
- 230000002159 abnormal effect Effects 0.000 abstract description 6
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000003014 reinforcing effect Effects 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
Abstract
The invention relates to the technical field of manufacturing of vacuum coating equipment, and discloses a manufacturing process of a large vacuum cavity, which comprises the following steps: (1) blanking a steel plate; (2) welding; (3) carrying out vibration aging treatment; (4) processing a bottom datum plane; (5) processing a top sealing surface; in the vibration aging treatment process, the vibration aging machine is connected with the vacuum cavity through a balance beam in a cross structure; the vibration aging machine is arranged at the center of the balance beam of the cross structure, and each cantilever end of the balance beam of the cross structure is connected with the top sealing surface of the vacuum cavity. The invention improves the uniformity of stress release during stress relief treatment after welding the vacuum cavity, reduces abnormal deformation after the stress relief treatment and simultaneously improves the precision of machining.
Description
Technical Field
The invention relates to the technical field of manufacturing of vacuum coating equipment, in particular to a manufacturing process of a large vacuum cavity.
Background
The vacuum cavity is a core part in large-scale vacuum coating equipment. Fig. 6 shows a large vacuum chamber with a typical structure, which is an austenitic stainless steel welded structure with a rectangular parallelepiped shape, and the large vacuum chamber has a length of more than 10 meters, a height of more than 4 meters and a width of more than 2 meters. The upper part of the vacuum cavity is provided with a flange sealing surface, and the bottom of the vacuum cavity is provided with a reference surface for mechanical processing and positioning.
In the prior art, the manufacture of the large vacuum cavity has the following problems:
firstly, because the part size is great, the stress relief after welding is mostly treated by adopting vibration aging stress relief, and the specific method is to fix a vibration aging machine (an exciting motor) at a certain part of a large-scale vacuum cavity (usually at a certain angular position for the sake of convenience in fixing), and then remove the internal stress of the vibration aging vacuum cavity through the vibration aging machine. However, because the vibration aging machine is fixed at a certain position, the exciting force of the vibration aging machine can be attenuated along with the increase of the distance, part of stress close to the vibration aging machine is released firstly during vibration aging, and the stress far away from the vibration aging machine is released later, so that the time and the magnitude of stress release are inconsistent. Due to the fact that the strength of each part of the vacuum cavity is different, the stress release inconsistency is especially caused by the fact that the exciting force of the weak part of the vacuum cavity is overloaded, the abnormal deformation of each part of the vacuum cavity after vibration aging is caused, the upper flange sealing surface of the vacuum cavity is not flat after deformation, the thickness of the flange surface is not uniform after machining, and therefore the appearance quality and the final sealing performance are affected.
And secondly, in mechanical processing, the processing of the bottom reference surface takes the upper flange sealing surface as a reference, the flange sealing surface is a blank surface during clamping, and due to the fact that the size of a part is large, multipoint positioning clamping is adopted for clamping, compression deformation of the flange sealing surface is inconsistent when the multipoint positioning clamping is compressed, elastic recovery deformation occurs after the processing of the processed bottom reference surface is completed and the clamping is removed, the processed bottom reference surface is uneven, and therefore the precision of the flange sealing surface is reduced in subsequent finish processing.
Disclosure of Invention
In order to solve the problems, the invention provides a manufacturing process of a large vacuum cavity, which aims to improve the uniformity of stress release during stress relief treatment after welding of the vacuum cavity, reduce abnormal deformation after the stress relief treatment and improve the machining precision. The specific technical scheme is as follows:
a manufacturing process of a large vacuum cavity comprises the following process steps:
(1) blanking of a steel plate: cutting and forming the steel plate by adopting a numerical control plasma machine;
(2) welding: after blanking, the steel plate is spliced, fixed by spot welding and then welded;
(3) vibration aging treatment: after welding, performing vibration aging treatment by using a vibration aging machine to eliminate welding stress;
(4) processing a bottom reference surface: the top sealing surface is arranged downwards, and the bottom reference surface is milled by taking the top sealing surface as a positioning reference;
(5) processing a top sealing surface: the bottom reference surface is arranged downwards, and the top sealing surface is milled by taking the milled bottom reference surface as a positioning reference;
in the vibration aging treatment process, the vibration aging machine is connected with the vacuum cavity through a balance beam in a cross structure; the vibration aging machine is arranged at the center of the balance beam of the cross structure, and each cantilever end of the balance beam of the cross structure is connected with the top sealing surface of the vacuum cavity.
In the manufacturing process of the large-scale vacuum cavity, the balance beam with the cross structure is adopted, the vibration aging machine is arranged at the central part of the balance beam with the cross structure, the connection between the balance beam with the cross structure and the vacuum cavity can reinforce the strength of a weaker part on the vacuum cavity, and the abnormal deformation problem caused by inconsistent stress release sequence during vibration aging is reduced, so that the deformation of the vacuum cavity is more uniform; on the other hand, the vibration aging machine is arranged at the central part of the balance beam of the cross structure, so that the stress of the vacuum cavity can be released more uniformly and evenly, unevenness caused by deformation of the top sealing surface of the vacuum cavity can be further reduced, and the quality of subsequent machining is improved.
In a preferred aspect of the present invention, in the vibration aging treatment step, a plurality of cushion tires are provided at the bottom of the vacuum chamber, and the cushion tires are located directly below the cantilever ends of the balance beam having the cross-shaped structure.
When the vibration aging treatment is carried out, the buffer tire is arranged right below each cantilever end of the balance beam of the cross structure, so that the exciting force load overload of the vacuum cavity at the suspension point position can be prevented, and the stress can be more uniformly released.
As a second preferable aspect of the present invention, the cantilever ends of the balance beam of the cross structure are connected to the top sealing surface of the vacuum chamber by spot welding.
As a third preferred aspect of the present invention, in the bottom datum plane machining process, a positioning fixture is provided, where the positioning fixture includes a base and a plurality of floating tightening assemblies mounted on the base and used for positioning the top sealing surface, and the floating tightening assemblies are distributed dispersedly along the periphery of the top sealing surface.
Through setting up a plurality of tight subassemblies in top that float, can be so that the vacuum chamber reduces the deformation when clamping and processing to improve the machining precision.
The specific structure of the floating jacking assembly can be two types:
as one of the structures of the floating jacking assembly, the floating jacking assembly is a floating supporting cylinder.
The floating supporting cylinder can adapt to the positioning of the rough blank when the surface is not flat, and the floating supporting cylinder can be automatically locked after being contacted with the positioning surface.
As a second structure of the floating jacking assembly, the floating jacking assembly is a steel ball integrated floating jacking assembly, the steel ball integrated floating jacking assembly comprises a floating supporting cylinder and a lifting plate connected to the upper part of the floating supporting cylinder, fixed enclosing walls are arranged around the lifting plate, and steel balls are stacked in the enclosing walls above the lifting plate.
During the use, hoist the tight subassembly in the unsteady top of vacuum cavity integrated form of steel ball, the locating surface leans on the up end of flat enclosure, and the floating support jar pushes up and makes the lifter plate rise, and the rising of lifter plate drives the interior integrated form steel ball of enclosure and rises, and the locating surface of the interior contact vacuum cavity of integrated form steel ball after the rise, can meet great resistance when the floating support jar rises again, carries out automatic locking promptly after the resistance reaches a definite value, realizes the large tracts of land location to vacuum cavity blank face.
The steel ball integrated floating jacking assembly is compared with a single floating supporting cylinder structure, and the position of the steel ball integrated floating jacking assembly, which is in contact with the positioning surface of the vacuum cavity, is an integrated steel ball with a large area, so that the contact area of the floating jacking assembly and the positioning surface of the vacuum cavity can be greatly increased, the rigidity after the vacuum cavity is positioned is greatly increased, and the precision of subsequent machining is further improved.
In the invention, the surface of the steel ball is coated with a layer of lubricating grease.
As a preferable scheme of the steel ball integrated floating jacking assembly, a guide plate is connected to the enclosing wall below the lifting plate, a plurality of guide rods are connected to the lifting plate, and the guide rods are slidably connected to guide holes formed in the guide plate.
Preferably, a gap is provided between the lifting plate and the enclosing wall.
Preferably, the diameter of the steel ball is 8-20 mm.
The invention has the beneficial effects that:
firstly, the balance beam with the cross structure is adopted, the vibration aging machine is arranged at the central part of the balance beam with the cross structure, the connection between the balance beam with the cross structure and the vacuum cavity can reinforce the strength of a weaker part on the vacuum cavity, and the abnormal deformation problem caused by inconsistent stress release sequence during vibration aging is reduced, so that the deformation of the vacuum cavity is more uniform; on the other hand, the vibration aging machine is arranged at the central part of the balance beam of the cross structure, so that the stress of the vacuum cavity can be released more uniformly and evenly, unevenness caused by deformation of the top sealing surface of the vacuum cavity can be further reduced, and the quality of subsequent machining is improved.
Secondly, according to the manufacturing process of the large vacuum cavity, the balance beam with the cross structure is adopted, and during vibration aging treatment, the cushion tires are arranged right below the cantilever ends of the balance beam with the cross structure, so that the excitation force load of the vacuum cavity at the suspension point can be prevented from being overloaded, and the stress can be released more uniformly.
Thirdly, according to the manufacturing process of the large vacuum cavity, the plurality of floating jacking assemblies are arranged, so that the deformation of the vacuum cavity during clamping and processing can be reduced, and the processing precision can be improved.
Fourthly, compared with a single floating support cylinder structure, the steel ball integrated floating jacking assembly has the advantages that the integrated steel ball with a larger area is arranged at the position in contact with the positioning surface of the vacuum cavity, so that the contact area of the floating jacking assembly and the positioning surface of the vacuum cavity can be greatly increased, the rigidity of the vacuum cavity after positioning is greatly increased, and the precision of subsequent machining is further improved.
Drawings
FIG. 1 is a schematic process flow diagram of a large vacuum chamber fabrication process of the present invention;
FIG. 2 is a schematic diagram of a vacuum chamber for vibratory aging treatment;
FIG. 3 is a top view of FIG. 2;
FIG. 4 is a schematic structural diagram of a vacuum chamber positioning by using a steel ball integrated floating jacking assembly;
FIG. 5 is a schematic structural diagram of the steel ball integrated floating jacking assembly;
fig. 6 is a schematic structural view of the vacuum chamber.
In the figure: 1. the device comprises a vacuum cavity, 2, a vibration aging machine, 3, a bottom datum plane, 4, a top sealing surface, 5, a balance beam with a cross structure, 5-1, a reinforcing plate, 5-2, a connecting block, 6, a buffer tire, 7, a base, 8, a floating jacking assembly, 9, a floating supporting cylinder, 10, a lifting plate, 11, an enclosing wall, 12, a steel ball, 13, a guide plate, 14, a guide rod, 15 and a bottom plate.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
Fig. 1 to 6 show an embodiment of a manufacturing process of a large vacuum chamber according to the present invention, which includes the following steps:
(1) blanking of a steel plate: cutting and forming the steel plate by adopting a numerical control plasma machine;
(2) welding: after blanking, the steel plate is spliced, fixed by spot welding and then welded;
(3) vibration aging treatment: after welding, a vibration aging machine 2 is adopted for vibration aging treatment to eliminate welding stress;
(4) processing a bottom reference surface: the top sealing surface 4 is arranged downwards, and the bottom datum plane 3 is milled by taking the top sealing surface 4 as a positioning datum;
(5) processing a top sealing surface: the bottom datum plane 3 is arranged downwards, and the milled bottom datum plane 3 is used as a positioning datum to mill a top sealing surface 4;
in the vibration aging treatment process, the vibration aging machine 2 is connected with the vacuum cavity 1 through a balance beam 5 in a cross structure; the vibration aging machine 2 is arranged at the center of the balance beam 5 in the cross structure, and each cantilever end of the balance beam 5 in the cross structure is connected with the top sealing surface 4 of the vacuum cavity 1.
In the manufacturing process of the large-scale vacuum cavity 1, the balance beam 5 with the cross structure is adopted, the vibration aging machine 2 is arranged at the central part of the balance beam 5 with the cross structure, and the connection between the balance beam 5 with the cross structure and the vacuum cavity 1 can reinforce the strength of a weaker part on the vacuum cavity, so that the abnormal deformation problem caused by inconsistent stress release sequence during vibration aging is reduced, and the deformation of the vacuum cavity 1 is more uniform; on the other hand, the vibration aging machine 2 is arranged at the central part of the balance beam 5 with the structure shaped like a Chinese character 'mi', so that the stress of the vacuum cavity 1 can be released more uniformly and evenly, the deformation unevenness of the top sealing surface 4 of the vacuum cavity 1 can be further reduced, and the quality of subsequent machining is improved.
As one preferable mode of the present embodiment, in the vibration aging process, a plurality of cushion tires 6 are provided at the bottom of the vacuum chamber 1, and the cushion tires 6 are located right below the cantilever ends of the balance beam 5 having the cross structure.
During vibration aging treatment, the cushion tires 6 are arranged right below the cantilever ends of the balance beams 5 of the cross structure, so that the exciting force load of the vacuum cavity 1 at the suspension point can be prevented from being overloaded, and the stress can be released more uniformly.
As a second preferred embodiment of the present invention, the cantilever ends of the balance beam 5 having the cross-shaped structure are connected to the top sealing surface 4 of the vacuum chamber 1 by spot welding.
As a third preferable scheme of this embodiment, in the bottom datum plane 3 processing procedure, a positioning tool is provided, where the positioning tool includes a base 7 and a plurality of floating tightening assemblies 8 installed on the base 7 and used for positioning the top sealing surface 4, and the floating tightening assemblies 8 are distributed dispersedly along the periphery of the top sealing surface 4.
Through setting up a plurality of tight subassemblies 8 in top that float, can be so that vacuum chamber 1 reduces the deformation when clamping and processing to improve the machining precision.
The floating jacking component 8 can have two specific structures:
as one of the structures of the floating jacking assembly, the floating jacking assembly 8 is a floating support cylinder.
The floating supporting cylinder can adapt to the positioning of the rough blank when the surface is not flat, and the floating supporting cylinder can be automatically locked after being contacted with the positioning surface.
As a second structure of the floating jacking assembly, the floating jacking assembly 8 is a steel ball integrated floating jacking assembly, the steel ball integrated floating jacking assembly comprises a floating supporting cylinder 9 and a lifting plate 10 connected to the upper part of the floating supporting cylinder 9, fixed enclosing walls 11 are arranged around the lifting plate 10, and steel balls are stacked in the enclosing walls 11 above the lifting plate 10.
During the use, hoist vacuum chamber 1 to the tight subassembly in the unsteady top of steel ball integrated form, the locating surface leans on the up end of flat enclosure 11, unsteady supporting cylinder 9 is pushed up and is made lifter plate 10 rise, the rising of lifter plate 10 drives the interior integrated form steel ball 12 of enclosure 11 and rises, integrated form steel ball 12 rises the locating surface of back contact vacuum chamber 1, can meet great resistance when unsteady supporting cylinder 9 rises again, carry out automatic locking promptly after the resistance reaches a definite value, realize the large tracts of land location to vacuum chamber 1 blank face.
The steel ball integrated floating jacking assembly is compared with a single floating supporting cylinder structure, and the position of the steel ball integrated floating jacking assembly, which is in contact with the positioning surface of the vacuum cavity 1, is an integrated steel ball 12 with a large area, so that the contact area of the floating jacking assembly 8 and the positioning surface of the vacuum cavity 1 can be greatly increased, the rigidity of the vacuum cavity 1 after positioning is greatly increased, and the precision of subsequent machining is further improved.
In this embodiment, the surface of the steel ball 12 is coated with a layer of grease.
As a preferable scheme of the steel ball integrated floating jacking assembly, a guide plate 13 is connected to the enclosing wall 11 below the lifting plate 10, a plurality of guide rods 14 are connected to the lifting plate 10, and the guide rods 14 are slidably connected to guide holes formed in the guide plate 13.
Preferably, a gap is provided between the lifting plate 10 and the enclosing wall 11.
Preferably, the diameter of the steel ball 12 is 8-20 mm.
In this embodiment, the lower end of the enclosing wall 11 is fixed on the bottom plate 15, the bottom end of the floating support cylinder 9 is connected to the bottom plate, and the lifting head of the floating support cylinder 9 upwards passes through the through hole formed in the guide plate 13 and then contacts with the lifting plate 10.
In this embodiment, a reinforcing plate 5-1 is further disposed at a central portion of the balance beam of the cross structure, and the vibration aging machine is disposed on the reinforcing plate 5-1.
In the embodiment, the balance beam with the cross-shaped structure is made of carbon steel through welding, a connecting block 5-2 is welded at a position, in contact with the vacuum cavity, of the cantilever end of the balance beam with the cross-shaped structure, and the connecting block 5-2 is an austenitic stainless steel connecting block.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A manufacturing process of a large vacuum cavity is characterized by comprising the following process steps:
(1) blanking of a steel plate: cutting and forming the steel plate by adopting a numerical control plasma machine;
(2) welding: after blanking, the steel plate is spliced, fixed by spot welding and then welded;
(3) vibration aging treatment: after welding, performing vibration aging treatment by using a vibration aging machine to eliminate welding stress;
(4) processing a bottom reference surface: the top sealing surface is arranged downwards, and the bottom reference surface is milled by taking the top sealing surface as a positioning reference;
(5) processing a top sealing surface: the bottom reference surface is arranged downwards, and the top sealing surface is milled by taking the milled bottom reference surface as a positioning reference;
in the vibration aging treatment process, the vibration aging machine is connected with the vacuum cavity through a balance beam in a cross structure; the vibration aging machine is arranged at the central part of the balance beam of the cross structure, and each cantilever end of the balance beam of the cross structure is connected with the top sealing surface of the vacuum cavity;
the positioning tool comprises a base and a plurality of floating jacking assemblies arranged on the base and used for positioning the top sealing surface, wherein the floating jacking assemblies are distributed around the top sealing surface in a dispersed manner.
2. The manufacturing process of the large-scale vacuum chamber according to claim 1, wherein in the vibration aging treatment process, a plurality of cushion tires are arranged at the bottom of the vacuum chamber, and the cushion tires are positioned right below each cantilever end of the balance beam of the cross structure.
3. The manufacturing process of the large-scale vacuum cavity according to claim 1, wherein the connection between each cantilever end of the balance beam of the cross structure and the top sealing surface of the vacuum cavity is spot welding connection.
4. The manufacturing process of the large-scale vacuum cavity according to claim 1, wherein the floating jacking assembly is a floating support cylinder.
5. The manufacturing process of the large vacuum cavity according to claim 1, wherein the floating jacking assembly is a steel ball integrated floating jacking assembly, the steel ball integrated floating jacking assembly comprises a floating supporting cylinder and a lifting plate connected to the upper part of the floating supporting cylinder, a fixed enclosure is arranged around the lifting plate, and steel balls are stacked in the enclosure above the lifting plate.
6. The manufacturing process of claim 5, wherein the surface of the steel ball is coated with a layer of grease.
7. The manufacturing process of the large vacuum chamber according to claim 5, wherein a guide plate is connected to the enclosing wall below the lifting plate, a plurality of guide rods are connected to the lifting plate, and the guide rods are slidably connected to guide holes formed in the guide plate.
8. The manufacturing process of claim 5, wherein a gap is provided between the lifting plate and the enclosing wall.
9. The manufacturing process of the large vacuum cavity as claimed in claim 5, wherein the diameter of the steel ball is 8-20 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811373884.XA CN109352280B (en) | 2018-11-19 | 2018-11-19 | Manufacturing process of large vacuum cavity |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811373884.XA CN109352280B (en) | 2018-11-19 | 2018-11-19 | Manufacturing process of large vacuum cavity |
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| CN109352280A CN109352280A (en) | 2019-02-19 |
| CN109352280B true CN109352280B (en) | 2020-01-21 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3751505B2 (en) * | 2000-06-07 | 2006-03-01 | 株式会社テージーケー | Vacuum chamber forming method for control valve for variable capacity compressor |
| CN101003850A (en) * | 2006-12-29 | 2007-07-25 | 山东齐鲁电机制造有限公司 | Technique for reducing residual stress of motor bed plate in welded structure |
| CN103878468B (en) * | 2012-12-21 | 2017-10-20 | 上海航天设备制造总厂 | The welding method of large-scale core detection container structure |
| CN103170814B (en) * | 2013-03-06 | 2015-04-22 | 西安理工大学 | Processing method of anti-blasting device sealing and combining surface |
| CN106443821A (en) * | 2016-11-08 | 2017-02-22 | 天奇自动化工程股份有限公司 | Comprehensive adjusting type seat detection mechanism |
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Address after: 225400 He Han 1 and 6 Groups, Hanzhuang Village, Huangqiao Town, Taixing City, Taizhou City, Jiangsu Province Patentee after: Jiangsu Guangke Precision Equipment Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GKVAC MACHINERY Co.,Ltd. |
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