CN109352280A - A kind of large-scale vacuum cavity manufacturing process - Google Patents
A kind of large-scale vacuum cavity manufacturing process Download PDFInfo
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- CN109352280A CN109352280A CN201811373884.XA CN201811373884A CN109352280A CN 109352280 A CN109352280 A CN 109352280A CN 201811373884 A CN201811373884 A CN 201811373884A CN 109352280 A CN109352280 A CN 109352280A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 42
- 239000010959 steel Substances 0.000 claims abstract description 42
- 241000209094 Oryza Species 0.000 claims abstract description 38
- 235000007164 Oryza sativa Nutrition 0.000 claims abstract description 38
- 235000009566 rice Nutrition 0.000 claims abstract description 38
- 230000035882 stress Effects 0.000 claims abstract description 35
- 230000032683 aging Effects 0.000 claims abstract description 30
- 238000003466 welding Methods 0.000 claims abstract description 17
- 238000003754 machining Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000005520 cutting process Methods 0.000 claims abstract description 7
- 238000007667 floating Methods 0.000 claims description 59
- 230000003139 buffering effect Effects 0.000 claims description 10
- 238000003801 milling Methods 0.000 claims description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
- 238000009825 accumulation Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 239000004519 grease Substances 0.000 claims description 3
- 230000001050 lubricating effect Effects 0.000 claims description 3
- 230000002159 abnormal effect Effects 0.000 abstract description 6
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000630 rising effect Effects 0.000 description 4
- 238000012163 sequencing technique Methods 0.000 description 3
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 241000233855 Orchidaceae Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Butt Welding And Welding Of Specific Article (AREA)
- Heat Treatment Of Articles (AREA)
Abstract
The present invention relates to vacuum coating equipment manufacturing technology fields, and it discloses a kind of large-scale vacuum cavity manufacturing process, comprise the technical steps that: (1) steel plate cutting；(2) it welds；(3) vibration stress relief treatment；(4) bottom datum level is processed；(5) top land is processed；Wherein, in the vibration stress relief treatment process, the oscillating aging machine is connected by the equalizer bar of rice word structure with the vacuum cavity；Wherein, the centre of the equalizer bar of the rice word structure is arranged in the oscillating aging machine, and each cantilever end of the equalizer bar of the rice word structure connects the top land of the vacuum cavity.The present invention improves the uniformity of stress release when destressing after vacuum cavity welding is handled, reduces destressing treated abnormal deformation, while improving the precision of machining.
Description
Technical field
The present invention relates to vacuum coating equipment manufacturing technology fields, and in particular to a kind of large-scale vacuum cavity manufacturing process.
Background technique
Vacuum cavity is the core part in large vacuum coating equipment.It is illustrated in figure 6 a kind of large size of typical structure
Vacuum cavity, the shape of the large-scale vacuum cavity are the austenitic stainless steel welding structural element of rectangular parallelepiped structure, and length is more than
10 meters, highly more than 4 meters, width is more than 2 meters.The top of vacuum cavity is equipped with flange sealing surface, and bottom is equipped with to be added for mechanical
The datum level of work positioning.
In the prior art, the manufacture of above-mentioned large-scale vacuum cavity has the following problems:
First is that destressing processing after welding mostly uses greatly oscillating aging destressing to handle, tool since part size is larger
Body method is that oscillating aging machine (shock electric machine) is fixed on a certain position of large-scale vacuum cavity (in order to be fixed conveniently, usually
It is to be fixed on a certain corner location), then pass through the removal of the oscillating aging vacuum cavity internal stress of oscillating aging machine.But
Since oscillating aging machine is to be fixed on a certain position, the exciting force of oscillating aging machine can decay with the increase of distance, vibration
Part stress when timeliness close to oscillating aging machine position discharges first, discharges, makes after the stress far from oscillating aging machine position
Time and the size for obtaining stress release are all inconsistent.And since each position intensity of vacuum cavity is different, above-mentioned this stress release
It is inconsistent especially in the overload of more weak its exciting force of position of vacuum cavity, will lead to each position of vacuum cavity and shaking
Abnormal deformation after dynamic timeliness, and make out-of-flatness after the upper flange sealing surface deformation of vacuum cavity, after over mechanical processing
Flange face became uneven, to influence its presentation quality and final sealing performance.
Second is that the processing of bottom datum level is flange when clamping on the basis of the flange sealing surface of top in machining
Sealing surface is black skin, and since part size is big, clamping uses multipoint positioning clamping, and multipoint positioning clamping will lead to method when compressing
The compression deformation of blue sealing surface is inconsistent, and the bottom datum level processed is caused to occur elasticity after completing the process, removing clamping
Deformation is replied, so that the bottom datum level out-of-flatness processed, thus reduces the precision of subsequent finishing method orchid sealing surface.
Summary of the invention
To solve the above-mentioned problems, the present invention proposes a kind of large-scale vacuum cavity manufacturing process, it is intended to improve vacuum cavity
The uniformity of stress release when destressing is handled after welding reduces destressing treated abnormal deformation, at the same improve it is mechanical plus
The precision of work.Specific technical solution is as follows:
A kind of large-scale vacuum cavity manufacturing process, comprises the technical steps that:
(1) steel plate cutting: steel plate is cut and formed using digital controlling plasma machine；
(2) it welds: carrying out assembled, spot welding after steel plate cutting and fix, then weld；
(3) vibration stress relief treatment: vibration stress relief treatment is carried out using oscillating aging machine after welding, to eliminate welding stress；
(4) bottom datum level is processed: top land is arranged downward, and using top land as positioning datum, Milling Machining
Bottom datum level；
(5) top land is processed: bottom benchmark is arranged down, and is positioning base with the bottom datum level of Milling Machining
Standard, Milling Machining top land；
Wherein, in the vibration stress relief treatment process, equalizer bar and institute of the oscillating aging machine by rice word structure
Vacuum cavity is stated to be connected；Wherein, the centre of the equalizer bar of the rice word structure is arranged in the oscillating aging machine, described
Each cantilever end of the equalizer bar of rice word structure connects the top land of the vacuum cavity.
In the manufacturing process of above-mentioned large-scale vacuum cavity, using the equalizer bar of rice word structure, and oscillating aging machine is arranged
Connection in the centre of the equalizer bar of the rice word structure, the equalizer bar and vacuum cavity of one side rice word structure can add
Though the more intensity of weakness on vacuum cavity, cause when reducing oscillating aging since the sequencing of stress release is inconsistent
Abnormal deformation problem so that the deformation of vacuum cavity is more uniform；Another aspect oscillating aging machine is arranged in rice word knot
The centre of the equalizer bar of structure can make the release of vacuum cavity stress more balance and uniformly, so as to further subtract
Out-of-flatness caused by the top land of few vacuum cavity deforms, improves the quality of subsequent mechanical processing.
One of as a preferred solution of the present invention, in the vibration stress relief treatment process, at the bottom of the vacuum cavity
Portion is provided with a number of buffering tyre, and the buffering tyre is being located at each cantilever end of the equalizer bar of the rice word structure just
Lower section.
It is above-mentioned in vibration stress relief treatment, each cantilever of the equalizer bar by the way that buffering tyre to be arranged in the rice word structure
The underface at end can prevent vacuum cavity in the exciting force traffic overload at vacantly point position, so that the release of stress is more
It is uniform.
As a preferred solution of the present invention two, each cantilever end and the vacuum cavity of the equalizer bar of the rice word structure
Top land connection be spot welding connection.
As a preferred solution of the present invention three, in the bottom datum level manufacturing procedure, it is provided with positioning tool, institute
Stating positioning tool includes pedestal, a number of floating top for being used to position the top land being mounted on the base
Tight component, the floating hold out against surrounding dispersed distribution of the component along the top land.
Component is held out against by the way that multiple floatings are arranged, vacuum cavity can be made to reduce deformation in clamping and processing, thus
Improve machining accuracy.
Float hold out against component specific structure can there are two types of:
As one of the structure for holding out against component of floating, it is floating support cylinder that the floating, which holds out against component,.
Above-mentioned floating support cylinder can adapt to positioning when black skin out-of-flatness, after floating support cylinder and positioning face contact
It being capable of automatically lock.
As the two of the structure for holding out against component of floating, it is that the floating of steel ball integrated form holds out against component that the floating, which holds out against component,
It includes floating support cylinder, the lifter plate for being connected to floating support cylinder top, institute that the steel ball integrated form floating, which holds out against component,
The surrounding for stating lifter plate is provided with fixed enclosure wall, and accumulation has steel ball in the enclosure wall being located above the lifter plate.
It is held out against on component in use, vacuum cavity is lifted into the floating of steel ball integrated form, positioning surface leans on the upper end of flat enclosure wall
Face is pushed up on floating support cylinder so that lifter plate rises, and the rising of lifter plate drives the integrated form steel ball in enclosure wall to rise, integrated form
Steel ball contacts the positioning surface of vacuum cavity after rising, biggish resistance can be encountered when floating support cylinder rises again, resistance reaches one
Automatically lock is carried out after definite value, realizes and the large area of vacuum cavity black skin is positioned.
Above-mentioned steel ball integrated form floating holds out against component compared to single floating support cylinder structure, with vacuum cavity positioning surface
The position of contact is the biggish integrated form steel ball of area, and so as to increase considerably, floating holds out against component and vacuum cavity positions
The contact area in face, so that the rigidity after vacuum cavity positioning increases considerably, to further improve subsequent mechanical processing
Precision.
In the present invention, the surface of the steel ball is coated with one layer of lubricating grease.
A kind of preferred embodiment of component is held out against as stating steel ball integrated form and floating, described in being located at below the lifter plate
It is connected with guide plate on enclosure wall, a number of guide rod is connected on the lifter plate, the guide rod is slidably connected to institute
It states in the pilot hole being arranged on guide plate.
Preferably, gap is provided between the lifter plate and the enclosure wall.
Preferably, the diameter of the steel ball is 8~20mm.
The beneficial effects of the present invention are:
First, a kind of large-scale vacuum cavity manufacturing process of the invention, using the equalizer bar of rice word structure, and when vibration
The centre of the equalizer bar of the rice word structure, the equalizer bar of one side rice word structure and the company of vacuum cavity is arranged in effect machine
The more intensity of weakness can be reinforced on vacuum cavity by connecing, since the sequencing of stress release is different when reducing oscillating aging
Abnormal deformation problem caused by cause, so that the deformation of vacuum cavity is more uniform；The setting of another aspect oscillating aging machine
The centre of the equalizer bar of rice word structure can make vacuum cavity stress release more balance and uniformly, so as to
The top land for being further reduced vacuum cavity deforms caused out-of-flatness, improves the quality of subsequent mechanical processing.
Second, a kind of large-scale vacuum cavity manufacturing process of the invention, using the equalizer bar of rice word structure, in vibration
When effect processing, the underface of each cantilever end of the equalizer bar by the way that buffering tyre to be arranged in the rice word structure can be prevented
Vacuum cavity is in the exciting force traffic overload for vacantly putting position, so that the release of stress is more uniform.
Third, a kind of large-scale vacuum cavity manufacturing process of the invention hold out against component by the way that multiple floatings are arranged, can make
It obtains vacuum cavity and reduces deformation in clamping and processing, to improve machining accuracy.
4th, a kind of large-scale vacuum cavity manufacturing process of the invention, steel ball integrated form floating holds out against component compared to single
Floating support cylinder structure, with vacuum cavity positioning face contact position be the biggish integrated form steel ball of area, so as to
It increases considerably to float and holds out against the contact area of component Yu vacuum cavity positioning surface, so that the rigidity after vacuum cavity positioning is substantially
Degree increases, to further improve the precision of subsequent mechanical processing.
Detailed description of the invention
Fig. 1 is a kind of process flow diagram of large-scale vacuum cavity manufacturing process of the invention；
Fig. 2 is the structural schematic diagram that vacuum cavity carries out vibration stress relief treatment；
Fig. 3 is the top view of Fig. 2；
Fig. 4 is floated using steel ball integrated form holds out against the structural schematic diagram that component carries out vacuum cavity positioning；
Fig. 5 is the structural schematic diagram that the floating of steel ball integrated form holds out against component；
Fig. 6 is the structural schematic diagram of vacuum cavity.
In figure: 1, vacuum cavity, 2, oscillating aging machine, 3, bottom datum level, 4, top land, 5, rice word structure it is flat
Balance beam, 5-1, securing plate, 5-2, link block, 6, buffering tyre, 7, pedestal, 8, floating holds out against component, 9, floating support cylinder, 10,
Lifter plate, 11, enclosure wall, 12, steel ball, 13, guide plate, 14, guide rod, 15, bottom plate.
Specific embodiment
With reference to the accompanying drawings and examples, further description of the specific embodiments of the present invention.Following embodiment is only
For clearly illustrating technical solution of the present invention, and not intended to limit the protection scope of the present invention.
It is as shown in Figures 1 to 6 a kind of embodiment of large-scale vacuum cavity manufacturing process of the invention, including following technique step
It is rapid:
(1) steel plate cutting: steel plate is cut and formed using digital controlling plasma machine；
(2) it welds: carrying out assembled, spot welding after steel plate cutting and fix, then weld；
(3) vibration stress relief treatment: vibration stress relief treatment is carried out using oscillating aging machine 2 after welding, to eliminate welding stress；
(4) bottom datum level is processed: top land 4 is arranged downward, and is positioning datum with top land 4, and milling adds
Work bottom datum level 3；
(5) top land is processed: bottom datum level 3 is arranged downward, and is positioning base with the bottom datum level 3 of Milling Machining
Standard, Milling Machining top land 4；
Wherein, in the vibration stress relief treatment process, the oscillating aging machine 2 by the equalizer bar 5 of rice word structure with
The vacuum cavity 1 is connected；Wherein, the central part of the equalizer bar 5 of the rice word structure is arranged in the oscillating aging machine 2
Position, each cantilever end of the equalizer bar 5 of the rice word structure connect the top land 4 of the vacuum cavity 1.
In the manufacturing process of above-mentioned large-scale vacuum cavity 1, using the equalizer bar 5 of rice word structure, and oscillating aging machine 2 is set
It sets in the centre of the equalizer bar 5 of the rice word structure, the connection of the equalizer bar 5 and vacuum cavity 1 of one side rice word structure
The more intensity of weakness can be reinforced on vacuum cavity, since the sequencing of stress release is inconsistent when reducing oscillating aging
Caused by abnormal deformation problem so that the deformation of vacuum cavity 1 is more uniform；Another aspect oscillating aging machine 2 is arranged
The centre of the equalizer bar 5 of rice word structure can make 1 stress of vacuum cavity release more balance and uniformly, so as to
To be further reduced the out-of-flatness that the top land 4 of vacuum cavity 1 deforms, the quality of subsequent mechanical processing is improved.
One of preferred embodiment as the present embodiment, in the vibration stress relief treatment process, in the vacuum cavity 1
Bottom is provided with a number of buffering tyre 6, and the buffering tyre 6 is located at each cantilever of the equalizer bar 5 of the rice word structure
The underface at end.
It is above-mentioned in vibration stress relief treatment, by buffering tyre 6 is arranged in the rice word structure equalizer bar 5 it is each outstanding
The underface at arm end can prevent vacuum cavity 1 in the exciting force traffic overload at vacantly point position, so that the release of stress
More uniformly.
Two of preferred embodiment as the present embodiment, each cantilever end of the equalizer bar 5 of the rice word structure and the vacuum
The connection of the top land 4 of cavity 1 is spot welding connection.
Three of preferred embodiment as the present embodiment are provided with positioning work in 3 manufacturing procedure of bottom datum level
Dress, the positioning tool include pedestal 7, be mounted on the pedestal 7 for positioning a number of of the top land 4
Floating hold out against component 8, the floating holds out against component 8 along the surrounding dispersed distribution of the top land 4.
Component 8 is held out against by the way that multiple floatings are arranged, vacuum cavity 1 can be made to reduce deformation in clamping and processing, from
And improve machining accuracy.
Float hold out against component 8 specific structure can there are two types of:
As one of the structure for holding out against component of floating, it is floating support cylinder that the floating, which holds out against component 8,.
Above-mentioned floating support cylinder can adapt to positioning when black skin out-of-flatness, after floating support cylinder and positioning face contact
It being capable of automatically lock.
As the two of the structure for holding out against component of floating, it is that the floating of steel ball integrated form holds out against component that the floating, which holds out against component 8,
It includes floating support cylinder 9, the lifter plate for being connected to 9 top of floating support cylinder that the steel ball integrated form floating, which holds out against component,
10, the surrounding of the lifter plate 10 is provided with fixed enclosure wall 11, and in the enclosure wall 11 being located above the lifter plate 10
Interior accumulation has steel ball.
It is held out against on component in use, vacuum cavity 1 is lifted into the floating of steel ball integrated form, positioning surface is upper by flat enclosure wall 11
End face is pushed up on floating support cylinder 9 so that lifter plate 10 rises, and the rising of lifter plate 10 drives the integrated form steel ball 12 in enclosure wall 11
Rise, integrated form steel ball 12 contacts the positioning surface of vacuum cavity 1 after rising, can encounter when floating support cylinder 9 rises again biggish
Resistance, resistance carry out automatically lock after reaching certain value, realize and position to the large area of 1 black skin of vacuum cavity.
Above-mentioned steel ball integrated form floating holds out against component compared to single floating support cylinder structure, positions with vacuum cavity 1
The position of face contact is the biggish integrated form steel ball 12 of area, holds out against component 8 and vacuum chamber so as to increase considerably floating
The contact area of 1 positioning surface of body, so that the rigidity after vacuum cavity 1 positions increases considerably, to further improve subsequent
The precision of machining.
In the present embodiment, the surface of the steel ball 12 is coated with one layer of lubricating grease.
A kind of preferred embodiment of component is held out against as stating steel ball integrated form and floating, in the institute being located at below the lifter plate 10
It states and is connected with guide plate 13 on enclosure wall 11, a number of guide rod 14, the guide rod 14 are connected on the lifter plate 10
It is slidably connected in the pilot hole being arranged on the guide plate 13.
Preferably, gap is provided between the lifter plate 10 and the enclosure wall 11.
Preferably, the diameter of the steel ball 12 is 8~20mm.
In the present embodiment, the lower end of the enclosure wall 11 is fixed on bottom plate 15, and the bottom end of the floating support cylinder 9 is connected to
On the bottom plate, the lift head of the floating support cylinder 9 is upward through after the through-hole being arranged on the guide plate 13 and the liter
Plate 10 is dropped to contact.
In the present embodiment, the centre of the equalizer bar of rice word structure is additionally provided with securing plate 5-1, the oscillating aging machine
It is arranged on the securing plate 5-1.
In the present embodiment, the equalizer bar of rice word structure is made of carbon steel welding, and in the outstanding of the equalizer bar of rice word structure
The position contacted on arm end with vacuum cavity is welded with link block 5-2, and the link block 5-2 is austenitic stainless steel link block.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of large-scale vacuum cavity manufacturing process, which is characterized in that comprise the technical steps that:
(1) steel plate cutting: steel plate is cut and formed using digital controlling plasma machine；
(2) it welds: carrying out assembled, spot welding after steel plate cutting and fix, then weld；
(3) vibration stress relief treatment: vibration stress relief treatment is carried out using oscillating aging machine after welding, to eliminate welding stress；
(4) bottom datum level is processed: top land is arranged downward, and using top land as positioning datum, Milling Machining bottom
Datum level；
(5) top land is processed: bottom benchmark is arranged down, and using the bottom datum level of Milling Machining as positioning datum, milling
Process top land；
Wherein, in the vibration stress relief treatment process, the oscillating aging machine passes through the equalizer bar of rice word structure and described true
Cavity body is connected；Wherein, the centre of the equalizer bar of the rice word structure, the rice word is arranged in the oscillating aging machine
Each cantilever end of the equalizer bar of structure connects the top land of the vacuum cavity.
2. a kind of large-scale vacuum cavity manufacturing process according to claim 1, which is characterized in that at the oscillating aging
In science and engineering sequence, a number of buffering tyre is provided in the bottom of the vacuum cavity, the buffering tyre is located at the rice
The underface of each cantilever end of the equalizer bar of word structure.
3. a kind of large-scale vacuum cavity manufacturing process according to claim 1, which is characterized in that the rice word structure is put down
Each cantilever end of balance beam is that spot welding is connect with the connection of the top land of the vacuum cavity.
4. a kind of large-scale vacuum cavity manufacturing process according to claim 1, which is characterized in that in the bottom datum level
In manufacturing procedure, be provided with positioning tool, the positioning tool include pedestal, be mounted on the base it is described for positioning
The a number of floating of top land holds out against component, and the floating holds out against component and disperses along the surrounding of the top land
Distribution.
5. a kind of large-scale vacuum cavity manufacturing process according to claim 4, which is characterized in that the floating holds out against component
For floating support cylinder.
6. a kind of large-scale vacuum cavity manufacturing process according to claim 4, which is characterized in that the floating holds out against component
Hold out against component for the floating of steel ball integrated form, the steel ball integrated form floating hold out against component include floating support cylinder, be connected to it is described
The lifter plate on floating support cylinder top, the surrounding of the lifter plate are provided with fixed enclosure wall, and on being located at the lifter plate
Accumulation has steel ball in the enclosure wall of side.
7. a kind of large-scale vacuum cavity manufacturing process according to claim 6, which is characterized in that the surface of the steel ball applies
There is one layer of lubricating grease.
8. a kind of large-scale vacuum cavity manufacturing process according to claim 6, which is characterized in that be located at the lifter plate
It is connected with guide plate on the enclosure wall of lower section, a number of guide rod is connected on the lifter plate, the guide rod is sliding
It is dynamic to be connected in the pilot hole being arranged on the guide plate.
9. a kind of large-scale vacuum cavity manufacturing process according to claim 6, which is characterized in that the lifter plate with it is described
Gap is provided between enclosure wall.
10. a kind of large-scale vacuum cavity manufacturing process according to claim 6, which is characterized in that the diameter of the steel ball
For 8~20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811373884.XA CN109352280B (en) | 2018-11-19 | 2018-11-19 | Manufacturing process of large vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811373884.XA CN109352280B (en) | 2018-11-19 | 2018-11-19 | Manufacturing process of large vacuum cavity |
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| Publication Number | Publication Date |
|---|---|
| CN109352280A true CN109352280A (en) | 2019-02-19 |
| CN109352280B CN109352280B (en) | 2020-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811373884.XA Active CN109352280B (en) | 2018-11-19 | 2018-11-19 | Manufacturing process of large vacuum cavity |
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| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118222815A (en) * | 2024-04-01 | 2024-06-21 | 巨力精密设备制造(东莞)有限公司 | Vacuum cavity manufacturing equipment with lifting structure |
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Cited By (2)
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|---|---|---|---|---|
| CN118222815A (en) * | 2024-04-01 | 2024-06-21 | 巨力精密设备制造(东莞)有限公司 | Vacuum cavity manufacturing equipment with lifting structure |
| CN118222815B (en) * | 2024-04-01 | 2024-09-24 | 巨力精密设备制造(东莞)有限公司 | Vacuum cavity manufacturing equipment with lifting structure |
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| CN109352280B (en) | 2020-01-21 |
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Address after: 225400 He Han 1 and 6 Groups, Hanzhuang Village, Huangqiao Town, Taixing City, Taizhou City, Jiangsu Province Patentee after: Jiangsu Guangke Precision Equipment Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GKVAC MACHINERY Co.,Ltd. |