CN109346483A - Array substrate and its display panel - Google Patents

Array substrate and its display panel Download PDF

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Publication number
CN109346483A
CN109346483A CN201811179127.9A CN201811179127A CN109346483A CN 109346483 A CN109346483 A CN 109346483A CN 201811179127 A CN201811179127 A CN 201811179127A CN 109346483 A CN109346483 A CN 109346483A
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China
Prior art keywords
layer
substrate
insulating layer
metal layer
grid
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CN201811179127.9A
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Chinese (zh)
Inventor
吴川
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HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
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HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
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Application filed by HKC Co Ltd, Chongqing HKC Optoelectronics Technology Co Ltd filed Critical HKC Co Ltd
Priority to CN201811179127.9A priority Critical patent/CN109346483A/en
Priority to PCT/CN2019/073184 priority patent/WO2020073567A1/en
Publication of CN109346483A publication Critical patent/CN109346483A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259Multistep manufacturing methods
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/123Connection of the pixel electrodes to the thin film transistors [TFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The application provides a kind of array substrate and its display panel, and array substrate includes: substrate, including viewing area, and the viewing area configures multiple active switches and multiple pixel electrodes, the multiple the multiple active switch of pixel electrode electric property coupling;A plurality of driving line segment, is set on the substrate, the multiple active switch of electric property coupling, and each driving line segment includes: insulating layer, is set on the substrate;Protective layer is set on the substrate, and the protective layer covers the insulating layer;Metal layer is set in the covering scope of the driving line segment, and the metal layer is suspension joint;Wherein, the metal layer is set at least one position between the substrate and the insulating layer and between the insulating layer and the protective layer.For the application by suspension joint metal layer, increasing Electro-static Driven Comb path even if suspension joint metal layer is burnt also will not influence display quality, compared with can improve product yield.Adjustment light mask image is only needed simultaneously, therefore is not required to adjustment production procedure.

Description

Array substrate and its display panel
Technical field
This application involves display fields, more particularly to a kind of array substrate and its display panel.
Background technique
Panel display apparatus is used widely with many merits such as the wide, power savings of colour gamut in each field.It is existing Panel display apparatus mainly includes liquid crystal display device (Liquid Crystal Display, LCD), Organic Light Emitting Diode (Organic Light Emitting Diodes, OLED) display device and light emitting diode with quantum dots (Quantum Dot Light Emitting Diodes, QLED) display device.Wherein, thin film transistor (TFT) (Thin Film Transistor, TFT), it may be formed on glass substrate or plastic base, be the important composition portion of panel display apparatus usually as active switch / mono-.And with development, more, higher requirement, such as antistatic property also are proposed to display panel and display device, portion Divide product due to high sensitivity, thus the requirement to the antistatic property of the components such as active switch is especially high.
In the production and manufacturing process of TFT, multiple film layers with different function effect can be plated in array substrate, And different film layers is completed in different mechanical equipments and reaction chamber.In general, in the process of plated film and board carrying In, contact of the substrate with other media can generate a large amount of electrostatic charge, those electrostatic charges are piled up in array substrate, when with transmission When equipment contacts, it will form biggish potential difference, and then the film layer near contact point is punctured, seriously affect panel display board Or the quality of panel display apparatus.
Summary of the invention
In order to solve the above-mentioned technical problem, the purpose of the application is, provides a kind of array substrate and its display panel, By the suspension joint metal layer of increase driver circuit, increase the absorption release way of electrostatic charge, it is quiet to promote resisting for display panel Electric energy power.
It the purpose of the application and solves its technical problem and adopts the following technical solutions to realize.It is proposed according to the application A kind of array substrate, comprising: substrate, including viewing area, the viewing area configure multiple active switches and multiple pixel electrodes, The multiple the multiple active switch of pixel electrode electric property coupling;A plurality of driving line segment, is set on the substrate, electrical coupling The multiple active switch is connect, each driving line segment includes: insulating layer, is set on the substrate;Protective layer is set to described On substrate, the protective layer covers the insulating layer;Metal layer is set in the covering scope of the driving line segment, and described Metal layer is suspension joint (floating can also claim floating);Wherein, the metal layer be set to the substrate and the insulating layer it Between and at least one position between the insulating layer and the protective layer.
The application solves its technical problem also following technical measures can be used to further realize.
In the embodiment of the application, the driving line segment includes source electrode line, the insulating layer and the protective layer it Between be provided with active layer, the metal layer is set between the insulating layer and the substrate.
In the embodiment of the application, the metal layer is Floating gate layer or floating electrode layer.
In the embodiment of the application, the driving line segment includes grid line, and the source electrode line and the grid line are handed over Ji Chu has grid layer, and the grid layer is set between the insulating layer and the substrate, and the metal layer is positioned adjacent to The grid layer.
In the embodiment of the application, the driving line segment includes grid line, between the insulating layer and the substrate It is provided with grid layer, the metal layer is set between the insulating layer and the protective layer.
In the embodiment of the application, the metal layer is suspension joint active layer or floating electrode layer.
In the embodiment of the application, the driving line segment includes source electrode line, and the grid line and the source electrode line are handed over Ji Chu has active layer, and the active layer is set between the insulating layer and the protective layer, and the metal layer is set to phase Between two adjacent active layers.
In the embodiment of the application, the active layer includes source layer and drain electrode layer at least one.
The another object of the application is a kind of display panel, comprising: array substrate;Opposite substrate, with the array substrate It is oppositely arranged;Wherein, the array substrate includes: substrate, including viewing area, and the viewing area configures multiple active switches and more A pixel electrode, the multiple the multiple active switch of pixel electrode electric property coupling;A plurality of driving line segment, is set to the base On plate, the multiple active switch of electric property coupling, each driving line segment includes: insulating layer, is set on the substrate;Protection Layer, is set on the substrate, and the protective layer covers the insulating layer;Metal layer is set to covering for the driving line segment In range, and the metal layer is suspension joint;Wherein, the metal layer is set between the substrate and the insulating layer, and At least one position between the insulating layer and the protective layer.
The further object of the application is a kind of array substrate, comprising: substrate, including viewing area, the viewing area configuration are more A active switch and multiple pixel electrodes, the multiple the multiple active switch of pixel electrode electric property coupling;A plurality of source electrode line, It is set on the substrate, the multiple active switch of electric property coupling, every source line includes: insulating layer, is set to the base On plate;Active layer is set between the insulating layer and the protective layer;Protective layer is set on the substrate, the protection Layer covers the insulating layer and the active layer;A plurality of grid line is set on the substrate, the multiple active of electric property coupling Switch, each grid line includes: grid layer, is set on the substrate;Insulating layer is set on the grid layer;Protective layer, It is set on the substrate, the protective layer covers the insulating layer;Metal layer is set to a plurality of source electrode line and a plurality of grid In the covering scope of polar curve, and the metal layer is suspension joint;Wherein, the metal layer includes that Floating gate layer and suspension joint are active Layer;The Floating gate layer is set between the substrate and the insulating layer of the source electrode line range, and the neighbouring grid Pole layer;The suspension joint active layer is set between the protective layer and the insulating layer of the grid line range, and is located at phase Between two adjacent active layers;The active layer includes source layer and drain electrode layer at least one;The metal layer with it is adjacent The grid layer between be spaced 3 microns to 20 microns;3 microns are spaced between the metal layer and the adjacent active layer extremely 20 microns.
The another object of the application is a kind of array substrate manufacturing method, comprising: provides a substrate.Metal layer is formed in institute It states on substrate, the metal layer is located within the scope of the predetermined set of source electrode line, and the metal layer is suspension joint.Insulating layer is formed, The insulating layer is covered the metal layer and is set on the substrate.Active layer is formed on the insulating layer, and described is had Active layer position is relative to the metal layer.Protective layer is formed, the protective layer is set to described exhausted to cover the active layer In edge layer.
In some embodiments, the metal layer and grid layer are formed in same step, and the metal layer and the grid There is spacing distance between layer.
The further object of the application is a kind of array substrate manufacturing method, comprising: provides a substrate.Grid layer is formed in institute It states on substrate.Insulating layer is formed, the insulating layer is set on the substrate to cover the grid layer.Formed metal layer in On the insulating layer, the metal layer is located within the scope of the setting of the grid layer, and the metal layer is suspension joint.Form protection Layer, the protective layer are set on the insulating layer with covering the metal layer.
In some embodiments, the metal layer and active layer are formed in same step, and the metal layer with it is described active There is spacing distance between layer.
A further object of the application is a kind of array substrate manufacturing method, comprising: provides a substrate;Form the first metal layer With grid layer on the substrate, the first metal layer is located within the scope of the predetermined set of source electrode line, and first metal There is spacing distance, and the first metal layer is suspension joint between layer and the grid layer;Formed insulating layer, the insulating layer with Cover the first metal layer and the grid layer and is set on the substrate;Second metal layer and active layer are formed described On insulating layer, and the active layer position is relative to the first metal layer, between the second metal layer and the active layer With spacing distance, and the second metal layer is suspension joint;Protective layer is formed, the protective layer is to cover the second metal layer And the active layer and be set on the insulating layer.
The application is increased the absorption release way of electrostatic charge, can be made by the suspension joint metal layer of increase driver circuit It obtains the electrostatic charge generated in manufacturing process and is able to more dispersed, reduction potential difference, even if there is electrostatic to occur to cause in suspension joint metal layer Suspension joint metal layer has the situation burnt, and will not influence display quality, compared with can improve product yield.The application is increased without light shield Required layer only need to not accordingly be drawn in design, therefore can not substantially change existing production procedure by quantity, to maintain Former process requirement and product cost.Because being not required to adjustment production procedure, therefore without special process requirements and difficulty, therefore will not be promoted Cost, great standby market competitiveness.Moreover, being increased without array cabling area, designed suitable for display panels a variety of now, It is of course also apply to panel narrow frame design, meets market and technological trend.
Detailed description of the invention
Fig. 1 a is the configuration diagram of exemplary display device.
Fig. 1 b is exemplary pixel cell structure schematic diagram.
Fig. 1 c is the pixel unit configuration schematic diagram of exemplary array substrate.
Fig. 1 d is the A1 sectional view of Fig. 1 c.
Fig. 1 e is the A2 sectional view of Fig. 1 c.
Fig. 2 a is display according to the present processes, the pixel region schematic diagram of an embodiment array substrate.
Fig. 2 b is source electrode line in Fig. 2 a with regard to the diagrammatic cross-section of S1 hatching line.
Fig. 2 c is source electrode line in Fig. 2 a with regard to the diagrammatic cross-section of S2 hatching line.
Fig. 2 d is source electrode line in Fig. 2 a with regard to the diagrammatic cross-section of G1 hatching line.
Fig. 2 e is source electrode line in Fig. 2 a with regard to the diagrammatic cross-section of G2 hatching line.
Fig. 3 is display according to the present processes, an embodiment display panel schematic diagram.
Fig. 4 is display according to the present processes, an embodiment array substrate production process schematic diagram.
Fig. 5 is display according to the present processes, an embodiment array substrate production process schematic diagram.
Fig. 6 is display according to the present processes, an embodiment array substrate production process schematic diagram.
Specific embodiment
The explanation of following embodiment is to can be used to the particular implementation of implementation to illustrate the application with reference to additional schema Example.The direction term that the application is previously mentioned, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outside", " side " Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the application, rather than to Limit the application.
Attached drawing and explanation are considered inherently illustrative, rather than restrictive.The similar list of structure in the figure Member is to be given the same reference numerals.In addition, in order to understand and be convenient for description, the size and thickness of each component shown in the accompanying drawings are It is arbitrarily shown, but the application is without being limited thereto.
In the accompanying drawings, for clarity, the thickness in layer, film, panel, region etc. is exaggerated.In the accompanying drawings, in order to understand With convenient for description, the thickness of some layer and region is exaggerated.It will be appreciated that ought such as layer, film, region or substrate component quilt Referred to as " " another component "upper" when, the component can be directly on another component, or there may also be middle groups Part.
In addition, in the description, unless explicitly described as opposite, otherwise word " comprising " will be understood as meaning to wrap The component is included, but is not excluded for any other component.In addition, in the description, " above " means to be located at target group Part either above or below, and be not intended to must be positioned on the top based on gravity direction.
Further to illustrate that the application is the technical means and efficacy reaching predetermined goal of the invention and being taken, below in conjunction with Attached drawing and specific embodiment, to a kind of array substrate and its display panel proposed according to the application, specific embodiment, Structure, feature and its effect, detailed description is as follows.
Fig. 1 a is the configuration diagram of exemplary display device.Please refer to Fig. 1 a, a kind of display device 200, comprising: control Making sheet 100, the control panel 100 include tfi module (Timing Controller, TCON) 101;Printed circuit board 103, with It is connected between the control panel 100 by flexible flat cable (Flexible Flat Cable, FFC) 102;Source drive Unit 104 and drive element of the grid 105 are configured at wiring region 109, respectively with the source electrode line 104a and grid line in viewing area 106 105a connection.In some embodiments, it is thin include but to be not limited to flip for drive element of the grid 105 and source drive unit 104 Form membrane.
The driving method of display device 200 include: system board provide color (such as: R/G/B) compressed signal, control letter Number and power delivery to control panel 100.Sequence controller (Timing Controller, TCON) 101 on control panel 100 with After handling these signals, together with driven circuit processing power supply, by flexible flat cable (Flexible Flat Cable, FFC) 102, it is transmitted to the drive element of the grid 105 and source drive unit 104 of printed circuit board 103, gate driving list together Member 105 and source drive unit 104 by the data of necessity and power delivery in viewing area 106 so that display device 200 Obtain power supply, the signal that picture demand is presented.
Fig. 1 b is exemplary pixel cell structure schematic diagram.Fig. 1 c is that the pixel unit of exemplary array substrate configures Schematic diagram, Fig. 1 d are the A1 sectional view of Fig. 1 c, and Fig. 1 e is the A2 sectional view of Fig. 1 c.Please cooperate simultaneously Fig. 1 a and Fig. 1 b in favor of Solution.Array substrate 300 include substrate 310, thereon include active switch T, grid line 105a, source electrode line 104a and pixel electrode P, At the intersection of grid line 105a described in the active switch T electric property coupling and source electrode line 104a, the pixel electrode P electric property coupling The active switch T and share wires (Com) C.The grid line 105a self-reference substrate 310 rises including grid layer 320, insulating layer 330 with protective layer 350.The source electrode line 104a self-reference substrate 310 rises including insulating layer 330, active layer 340 and protective layer 350.
However, the contact due to substrate 310 with other media can generate largely during display panel is manufactured Electrostatic charge, and these charge inducings can be transmitted to the weaker place release of film layer, such as grid layer after metal layer adsorbs 320 with the overlapping place of active layer 340, at the channel of active layer 340.When contacting with transmission equipment, biggish potential difference will form, And then puncture the film layer near contact point, it relatively will affect the quality of display panel, display device.
Fig. 2 a is display according to the present processes, the pixel region schematic diagram of an embodiment array substrate.Fig. 2 b is figure Diagrammatic cross-section of the source electrode line with regard to S1 hatching line in 2a.Fig. 2 c is source electrode line in Fig. 2 a with regard to the diagrammatic cross-section of S2 hatching line.Fig. 2 d is Diagrammatic cross-section of the source electrode line with regard to G1 hatching line in Fig. 2 a.Fig. 2 e is source electrode line in Fig. 2 a with regard to the diagrammatic cross-section of G2 hatching line.It is existing The device architecture and component of technology please refer to Fig. 1 a to Fig. 1 e in favor of understanding.A referring to figure 2., in one embodiment of the application In, a kind of array substrate 300, comprising: substrate 310, including viewing area 106, the viewing area 106 configure multiple actives and open Close T and multiple pixel electrode P, the multiple the multiple active switch T of pixel electrode P electric property coupling;A plurality of driving line segment, if It is placed on the substrate 310, the multiple active switch T of electric property coupling, each driving line segment includes: insulating layer 330, is set to On the substrate 310;Protective layer 350 is set on the substrate 310, and the protective layer 350 covers the insulating layer 330;Gold Belong to layer (360a, 360b), is set in the covering scope of the driving line segment, and the metal layer (360a, 360b) is suspension joint (floating);Wherein, the metal layer is set between the substrate 310 and the insulating layer 330 and the insulating layer At least one position between 330 and the protective layer 350.
As depicted in Fig. 2 a, Fig. 2 b and Fig. 2 c, in some embodiments, the driving line segment includes source electrode line 104a, institute It states and is provided with active layer 340 between insulating layer 330 and the protective layer 350, the metal layer 360a is set to the insulating layer Between 330 and the substrate 310.
In some embodiments, the metal layer 360a is Floating gate layer (Floating Gate) or floating electrode layer (Floating ITO)。
In some embodiments, the driving line segment includes grid line 105a, the source electrode line 104a and the grid line There is grid layer 320, the grid layer 320 is set between the substrate 310 and the insulating layer 330, institute at 105a intersection It states metal layer 360a and is positioned adjacent to the grid layer 320.
In some embodiments, it is separated by one respectively between the metal layer 360a and adjacent two grid layers 320 Spacing distance x.
In some embodiments, the spacing distance x is between 3 microns to 20 microns.
In some embodiments, the active layer 340 includes source layer and drain electrode layer.
As depicted in Fig. 2 a, Fig. 2 d and Fig. 2 e, in some embodiments, the driving line segment includes grid line 105a, institute It states and is provided with grid layer 320 between insulating layer 330 and the substrate 310, the metal layer is set to the insulating layer 330 and institute It states between protective layer 350.
In some embodiments, the metal layer 360b is suspension joint active layer (Floating SD) or floating electrode layer (Floating ITO)。
In some embodiments, the driving line segment includes source electrode line 104a, the grid line 105a and the source electrode line There is active layer 340 at 104a intersection, the active layer 360b is set between the insulating layer 330 and the protective layer 350, The metal layer 360b is set between the active layer 340 of adjacent two.
In some embodiments, it is separated by one respectively between the metal layer 360b and adjacent two source layers 340 Spacing distance x.
In some embodiments, the spacing distance x is between 3 microns to 20 microns.
Fig. 3 is display according to the present processes, and an embodiment display panel schematic diagram please cooperate Fig. 2 a to Fig. 2 e with benefit In understanding.Existing display apparatus assembly is please refer to Fig. 1 a to Fig. 1 e.In one embodiment of the application, a kind of display panel, It include: array substrate 300;Opposite substrate 400 is oppositely arranged with the array substrate 300, and the opposite substrate 400 can be coloured silk Colo(u)r filter substrate, alternatively, colored filter is set in the array substrate 300, the opposite substrate 400 is that configuration is necessary The mating substrate of component;Wherein, the array substrate 300 includes: substrate 310, including viewing area 106, and the viewing area 106 is matched Set multiple active switch T and multiple pixel electrode P, the multiple the multiple active switch T of pixel electrode P electric property coupling;It is more Item drives line segment, is set on the substrate 310, the multiple active switch T of electric property coupling, each driving line segment includes: exhausted Edge layer 330 is set on the substrate 310;Protective layer 350 is set on the substrate 310, and the protective layer 350 covers institute State insulating layer 330;Metal layer (360a, 360b) is set in the covering scope of the driving line segment, and the metal layer (360a, 360b) is suspension joint;Wherein, the metal layer (360a, 360b) is set to the substrate 310 and the insulating layer 330 Between and at least one position between the insulating layer 330 and the protective layer 350.
In some embodiments, the array substrate 300 further includes previously described various modus operandis.
It please refers to such as Fig. 2 a to Fig. 2 e, in one embodiment of the application, a kind of array substrate 300 comprising: substrate 310, Including viewing area, the viewing area configures multiple active switch T and multiple pixel electrode P, the multiple pixel electrode P electrical property coupling Meet the multiple active switch T;A plurality of source electrode line 104a is set on the substrate 310, and the multiple active of electric property coupling is opened T is closed, every source line 104a includes: insulating layer 330, is set on the substrate 310;Active layer 340 is set to the insulation Between layer 330 and the protective layer 350;Protective layer 350 is set on the substrate 310, and the protective layer 350 covers described Insulating layer 330 and the active layer 340;A plurality of grid line 105a is set on the substrate 310, and electric property coupling is the multiple Active switch T, each grid line 105a include: grid layer 320, are set on the substrate 310;Insulating layer 330 is set to institute It states on grid layer 320;Protective layer 350 is set on the substrate 310, and the protective layer 350 covers the insulating layer 330;Gold Belong to layer (360a, 360b), is set in the covering scope of the driving line segment, and the metal layer (360a, 360b) is suspension joint; Wherein, the metal layer (360a, 360b) includes Floating gate layer and suspension joint active layer;Floating gate layer (the metal layer It 360a) is set between the substrate 310 and the insulating layer 330 of the source electrode line 104a range, and the neighbouring grid Layer 320;The suspension joint active layer (metal layer 360b) be set to the protective layer 350 of the grid line 105a range with it is described Between insulating layer 330, and between two adjacent active layers 340;The active layer 340 include source layer and drain electrode layer extremely Few one;3 microns to 20 microns are spaced between the metal layer 360a and the adjacent grid layer 320;The metal layer 3 microns to 20 microns are spaced between 360b and the adjacent active layer 340.
Fig. 4 is display according to the present processes, an embodiment array substrate production process schematic diagram.Please cooperate figure simultaneously 2a to Fig. 2 c is in favor of understanding.The embodiment of the application, by taking the metal layer 360a is set to source electrode line 104a range as an example, A kind of array substrate manufacturing method comprising:
Step S410 provides a substrate 310.
Step S420 forms metal layer 360a on the substrate 310, and the metal layer 360a is located at source electrode line 104a's Within the scope of predetermined set, and the metal layer 360a is suspension joint.
Step S430, forms insulating layer 330, and the insulating layer 330 covers the metal layer 360a and is set to the base On plate 310.
Step S440 forms active layer 340 on the insulating layer 330, and 340 position of the active layer is relative to described Metal layer 360a.
Step S450, forms protective layer 350, and the protective layer 350 is set to described exhausted with covering the active layer 340 In edge layer 330.
In some embodiments, the metal layer 360a is formed with grid layer 320 in same step, and the metal layer 360a There is spacing distance x between the grid layer 320.
Fig. 5 is display according to the present processes, an embodiment array substrate production process schematic diagram.Please cooperate figure simultaneously 2a, Fig. 2 d and Fig. 2 e are in favor of understanding.The embodiment of the application is set to grid line 105a range with the metal layer 360b For, a kind of array substrate manufacturing method comprising:
Step S510 provides a substrate 310.
Step S520 forms grid layer 320 on the substrate 310.
Step S530, forms insulating layer 330, and the insulating layer 330 is set to the base to cover the grid layer 320 On plate 310.
Step S540 forms metal layer 360b on the insulating layer 330, and the metal layer 360 is located at the grid layer Within the scope of 320 setting, and the metal layer 360b is suspension joint.
Step S550, forms protective layer 350, and the protective layer 350 is set to described with covering the metal layer 360b On insulating layer 330.
In some embodiments, the metal layer 360b is formed with active layer 340 in same step, and the metal layer 360b There is spacing distance x between the active layer 340.
Fig. 6 is display according to the present processes, an embodiment array substrate production process schematic diagram.Please cooperate figure simultaneously 2a to Fig. 2 c is in favor of understanding.The embodiment of the application is set to source with the metal layer 360a (being considered as the first metal layer) Polar curve 104a range and the metal layer 360b (being considered as second metal layer) are set to for grid line 105a range.A kind of battle array Column method for preparing substrate comprising:
Step S610 provides a substrate 310.
Step S620, forms the first metal layer 360a and grid layer 320 on the substrate 310, the first metal layer 360a is located within the scope of the predetermined set of source electrode line 104a, and has between the first metal layer 360a and the grid layer 320 There is spacing distance x, and the first metal layer 360a is suspension joint.
Step S630 forms insulating layer 330, and the insulating layer 330 is to cover the first metal layer 360a and the grid Pole layer 320 and be set on the substrate 310.
Step S640 forms second metal layer 360b and active layer 340 on the insulating layer 330, and the active layer 340 positions have interval relative to the first metal layer 360a between the second metal layer 360b and the active layer 340 Distance x, and the second metal layer 360b is suspension joint.
Step S650 forms protective layer 350, and the protective layer 350 is to cover the second metal layer 360b and described have Active layer 340 and be set on the insulating layer 330.
In some embodiments, the display panel of the application may be, for example, liquid crystal display panel, so without being limited thereto, also may be used For OLED display panel, W-OLED display panel, QLED display panel, plasma display panel, curved face type display panel or Other types display panel.
The application is increased the absorption release way of electrostatic charge, can be made by the suspension joint metal layer of increase driver circuit It obtains the electrostatic charge generated in manufacturing process and is able to more dispersed, reduction potential difference, even if there is electrostatic to occur to cause in suspension joint metal layer Suspension joint metal layer has the situation burnt, and will not influence display quality, compared with can improve product yield.The application is increased without light shield Required layer only need to not accordingly be drawn in design, therefore can not substantially change existing production procedure by quantity, to maintain Former process requirement and product cost.Because being not required to adjustment production procedure, therefore without special process requirements and difficulty, therefore will not be promoted Cost, great standby market competitiveness.Moreover, being increased without array cabling area, designed suitable for display panels a variety of now, It is of course also apply to panel narrow frame design, meets market and technological trend.
" in some embodiments " and " in various embodiments " terms are used repeatedly etc..The term is not usually Refer to identical embodiment;But it may also mean that identical embodiment.The words such as "comprising", " having " and " comprising " are synonymous Word, unless its context meaning shows other meanings.
The above is only embodiments herein, not makes any form of restriction to the application, although the application It is disclosed above with specific embodiment, however it is not limited to the application, any person skilled in the art, not It is detached within the scope of technical scheme, when the technology contents using the disclosure above make a little change or are modified to equivalent change The equivalent embodiment of change, but all contents without departing from technical scheme, the technical spirit according to the application is to the above reality Any simple modification, equivalent change and modification made by example are applied, in the range of still falling within technical scheme.

Claims (10)

1. a kind of array substrate characterized by comprising
Substrate, including viewing area, the viewing area configure multiple active switches and multiple pixel electrodes, the multiple pixel electrode The multiple active switch of electric property coupling;
A plurality of driving line segment, is set on the substrate, the multiple active switch of electric property coupling, and each driving line segment includes:
Insulating layer is set on the substrate;
Protective layer is set on the substrate, and the protective layer covers the insulating layer;
Metal layer is set in the covering scope of the driving line segment, and the metal layer is suspension joint;
Wherein, the metal layer is set between the substrate and the insulating layer and the insulating layer and the protective layer Between at least one position.
2. array substrate as described in claim 1, which is characterized in that the driving line segment includes source electrode line, the insulating layer Active layer is provided between the protective layer, the metal layer is set between the insulating layer and the substrate.
3. array substrate as claimed in claim 2, which is characterized in that the metal layer is Floating gate layer or floating electrode Layer.
4. array substrate as claimed in claim 2, which is characterized in that the driving line segment includes grid line, the source electrode line With there is grid layer at the grid line intersection, the grid layer is set between the insulating layer and the substrate, the gold Belong to layer and is positioned adjacent to the grid layer.
5. array substrate as claimed in claim 2, which is characterized in that the active layer include source layer and drain electrode layer at least its One.
6. array substrate as described in claim 1, which is characterized in that the driving line segment includes grid line, the insulating layer Grid layer is provided between the substrate, the metal layer is set between the insulating layer and the protective layer.
7. array substrate as claimed in claim 6, which is characterized in that the metal layer is suspension joint active layer or floating electrode Layer.
8. array substrate as claimed in claim 6, which is characterized in that the driving line segment includes source electrode line, the grid line With at the source electrode line intersection have active layer, the active layer is set between the insulating layer and the protective layer, described Metal layer is set between two adjacent active layers.
9. a kind of display panel characterized by comprising
Array substrate;
Opposite substrate is oppositely arranged with the array substrate;
Wherein, the array substrate includes:
Substrate, including viewing area, the viewing area configure multiple active switches and multiple pixel electrodes, the multiple pixel electrode The multiple active switch of electric property coupling;
A plurality of driving line segment, is set on the substrate, the multiple active switch of electric property coupling, and each driving line segment includes:
Insulating layer is set on the substrate;
Protective layer is set on the substrate, and the protective layer covers the insulating layer;
Metal layer is set in the covering scope of the driving line segment, and the metal layer is suspension joint;
Wherein, the metal layer is set between the substrate and the insulating layer and the insulating layer and the protective layer Between at least one position.
10. a kind of array substrate characterized by comprising
Substrate, including viewing area, the viewing area configure multiple active switches and multiple pixel electrodes, the multiple pixel electrode The multiple active switch of electric property coupling;
A plurality of source electrode line is set on the substrate, the multiple active switch of electric property coupling, and every source line includes:
Insulating layer is set on the substrate;
Active layer is set between the insulating layer and the protective layer;
Protective layer is set on the substrate, and the protective layer covers the insulating layer and the active layer;
A plurality of grid line is set on the substrate, the multiple active switch of electric property coupling, and each grid line includes:
Grid layer is set on the substrate;
The insulating layer is set on the grid layer;
The protective layer is set on the substrate, and the protective layer covers the insulating layer;
Metal layer is set in the covering scope of a plurality of source electrode line and a plurality of grid line, and the metal layer is floating It connects;
Wherein, the metal layer includes Floating gate layer and suspension joint active layer;
The Floating gate layer is set between the substrate and the insulating layer of the source electrode line range, and the neighbouring grid Pole layer;
The suspension joint active layer is set between the protective layer and the insulating layer of the grid line range, and is located at adjacent Two active layers between;
The active layer includes source layer and drain electrode layer at least one;
3 microns to 20 microns are spaced between the metal layer and the adjacent grid layer;
3 microns to 20 microns are spaced between the metal layer and the adjacent active layer.
CN201811179127.9A 2018-10-10 2018-10-10 Array substrate and its display panel Pending CN109346483A (en)

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PCT/CN2019/073184 WO2020073567A1 (en) 2018-10-10 2019-01-25 Array substrate, display panel having same and manufacturing method thereof

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Application publication date: 20190215