CN109342766A - A kind of acceleration sensor structure - Google Patents
A kind of acceleration sensor structure Download PDFInfo
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- CN109342766A CN109342766A CN201811320425.5A CN201811320425A CN109342766A CN 109342766 A CN109342766 A CN 109342766A CN 201811320425 A CN201811320425 A CN 201811320425A CN 109342766 A CN109342766 A CN 109342766A
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- 230000001133 acceleration Effects 0.000 title claims abstract description 94
- 230000003750 conditioning effect Effects 0.000 claims abstract description 16
- 239000003990 capacitor Substances 0.000 claims description 46
- 239000011159 matrix material Substances 0.000 claims description 12
- 238000001914 filtration Methods 0.000 claims description 11
- 230000005611 electricity Effects 0.000 claims description 5
- 241000837181 Andina Species 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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Abstract
The present invention provides a kind of acceleration sensor structures, including bottom plate and the shell being placed on bottom plate, a first circuit board is fixedly installed in the x-axis direction of the bottom plate, a second circuit board is fixedly installed on the y-axis direction of the bottom plate, a tertiary circuit plate is fixedly installed on the z-axis direction of the bottom plate, the first circuit board, second circuit board, tertiary circuit plate forms orthogonal structure two-by-two, the first circuit board, acceleration sensor module and the conditioning circuit for adjusting sensing data precision are respectively mounted on second circuit board and tertiary circuit plate, the conditioning circuit is connect with the acceleration sensor module, acceleration sensor module on the first circuit board, acceleration sensor module on second circuit board, acceleration sensor module formation on tertiary circuit plate is capable of measuring x-axis, y-axis , three directions of z-axis acceleration signal.Present invention optimizes the impedance characteristics of sensor signal.
Description
Technical field
The present invention relates to special equipment technical field, especially a kind of acceleration sensor structure.
Background technique
Circuit element in practical application is more much more complex than ideal resistance, and shows resistive, capacitive and perception spy
Property, they have codetermined impedance operator.Impedance and resistance are differing principally in that two aspects.Firstly, impedance is a kind of friendship
Properties of flow；Secondly, usually giving a definition impedance in some specific frequency.If measuring impedance under different frequency conditions, can obtain
To different impedance values.Existing can all use in many applications arrives acceleration sensor, and existing acceleration transducer is difficult to
Realize the fixed problem of 3 direction sensors, and the differential signal sensitivity that the acceleration transducer in 3 directions obtains is not
Height has that the impedance characteristic of sensor signal is bad.
Summary of the invention
In order to overcome the problems referred above, the object of the present invention is to provide a kind of acceleration sensor structures, realize 3 directions
Data acquisition, optimizes the impedance characteristic of sensor signal.
The present invention is realized using following scheme: a kind of acceleration sensor structure, including bottom plate and the shell being placed on bottom plate
Body is fixedly installed a first circuit board in the x-axis direction of the bottom plate, is fixedly installed one on the y-axis direction of the bottom plate
Second circuit board is fixedly installed a tertiary circuit plate, the first circuit board, second circuit on the z-axis direction of the bottom plate
Plate, tertiary circuit plate form orthogonal structure two-by-two, on the first circuit board, second circuit board and tertiary circuit plate
Acceleration sensor module and the conditioning circuit for adjusting sensing data precision, the conditioning circuit and the acceleration are installed
Spend sensor module connection, the acceleration sensor module on the first circuit board, the acceleration sensing on second circuit board
Acceleration sensor module in device module, tertiary circuit plate formed be capable of measuring x-axis, y-axis, three directions of z-axis acceleration letter
Number.
Further, the acceleration sensor module includes that P3 socket, 5V power supply turn 3.3V power circuit and accelerate
Spend sensor, it includes ADR4533BRZ chip, capacitor C1, capacitor C2, capacitor C5 that the 5V power supply, which turns 3.3V power circuit, described
One end is connect with 5V power supply after capacitor C1, capacitor C2 parallel connection, and the other end is connect with the VIN pin of ADR4533BRZ chip；It is described
One end of capacitor C5 is connect with the ADR4533BRZ chip VOUT pin, and the other end is connect with signal ground；The acceleration
Sensor includes E6308 chip, capacitor C3, capacitor C4, capacitor C10, resistance R6, resistance R7, the capacitor C4 and capacitor C10 string
In parallel with the capacitor C3 after connection, the capacitor C3 is connect with the VOUT pin of the ADR4533BRZ chip, the P3 socket
The 5th pin connect with the ST pin of the E6308 chip, the VDD pin of the one end the capacitor C4 and the E6308 chip connects
It connects, the other end is connect with the VMID pin of the E6308 chip；The OUTN pin of the resistance R6 and the E6308 chip connects
It connects, the resistance R7 is connect with the OUTP pin of the E6308 chip.
Further, described for adjust the conditioning circuit of sensing data precision to include ADA4528-2TCPZ chip, electricity
Hold C11, the one end the capacitor C11 is connect with the V+ pin of ADA4528-2TCPZ chip, and the other end and the 5V power supply turn 3.3V
The 5V power supply of power circuit connects, the OUTA pin and-INA pins in parallel of the ADA4528-2TCPZ chip, described
+ INA the pin of ADA4528-2TCPZ chip is connect by the resistance R7 with the OUTP pin of the E6308 chip, described
+ INB the pin of ADA4528-2TCPZ chip is connect by the resistance R76 with the OUTN pin of the E6308 chip.
Further, there are two the first fixed plates for the bottom plate Right vertical setting, and two the first fixed plates are set side by side
It sets, there are two the second fixed plates for the lower vertical setting of the bottom plate, and two the second fixed plates are arranged side by side, first electricity
Road plate is fixed in two the second fixed plates, and the second circuit board is fixed in two the first fixed plates, the tertiary circuit
Plate is fixed on the surface of bottom plate, and tertiary circuit plate and first circuit board, second circuit board are mutually vertical.
Further, a route hole, the first circuit board, second circuit board, tertiary circuit are offered on the shell
Route on plate is pierced by after twisting into one from the route hole.
Further, the acceleration information obtained to acceleration sensor structure is filtered, to reduce the external world
The interference of interference signal, the filtering processing specifically: by 2000hz sample rate, first the acceleration initial data of acquisition is carried out
50hz notch filter algorithm:
y50(k)=- A (1,2) * y50(k-1)-A(1,3)*y50(k-2)+B(1,1)*x(k)+B(1,2)*x(k-1)+B(1,
3) * x (k-2), wherein x (k) is that the acceleration at k moment samples original value, y50It (k) is the acceleration degree after 50hz notch filter
According to；
A (i, j) representing matrix
A the i-th row j column data；B (i, j) representing matrix B the i-th row j column data；ω0For trapper trap frequency, 50hz, ω are takenfFor signal
Sample frequency, α are trapper coefficient, take 0.9；
100hz notch filter algorithm is carried out to the acceleration information after 50hz notch filter algorithm again:
y100(k)=- C (1,2) * y100(k-1)-C(1,3)*y100(k-2)+D(1,1)*y50(k)+D(1,2)*y50(k-1)
+D(1,3)*y50(k-2) wherein y100It (k) is the acceleration information after 100hz notch filter；
C (i, j) representing matrix
C the i-th row j column data；D (i, j) representing matrix D the i-th row j column data；ω1For trapper trap frequency, 100hz, ω are takenfFor letter
Number sample frequency, α are trapper coefficient, take 0.9；
Finally, 3-axis acceleration data pass through the second order Chebyshev that cutoff frequency is 120hz again after 100hz notch filter
Low-pass filtering, and the 3-axis acceleration data of second order Chebyshev's low-pass filtering are used for a time integral and obtain three axle speeds
The 3-axis acceleration data of degree evidence, second order Chebyshev's low-pass filtering obtain the equipment sampled for secondary time integral
Location information.
The beneficial effects of the present invention are: the present invention is by the acceleration sensor module on three circuit boards according to stringent
Tri- axis of X, Y, Z is fixedly mounted on inside metal shell；The acceleration transducer differential signal that 3 direction and sensitivities may be implemented is defeated
Out；It solves in many applications, consumer products are difficult to realize the fixed problem of 3 direction sensors；Then pass through signal tune
After managing circuit, the impedance characteristic of sensor signal is optimized；And the acceleration information by being obtained to acceleration sensor structure
It is filtered, to reduce the interference of extraneous interference signal, to improve the accuracy of acceleration information.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that bottom plate and shell of the present invention are assembled together.
Fig. 2 is bottom plate top view of the invention.
Fig. 3 is bottom panel side structural schematic diagram of the invention.
Fig. 4 is the side structure schematic diagram of shell of the invention.
Fig. 5 is the detailed construction schematic diagram of acceleration transducer and conditioning circuit connection relationship of the present invention.
Fig. 6 is the structural schematic diagram of P3 socket of the present invention.
Fig. 7 is the electrical block diagram that 5V power supply of the present invention turns 3.3V power circuit.
Specific embodiment
The present invention will be further described with reference to the accompanying drawing.
It please refers to shown in Fig. 1 to Fig. 7, the present invention provides a kind of acceleration sensor structure, including bottom plate 1 and is placed on bottom
Shell 2 on plate, is fixedly installed a first circuit board 3 in the x-axis direction of the bottom plate 1, solid on the y-axis direction of the bottom plate
Surely it is provided with a second circuit board 4, a tertiary circuit plate 5, first circuit are fixedly installed on the z-axis direction of the bottom plate
Plate 3, second circuit board 4, tertiary circuit plate 5 form orthogonal structure two-by-two, the first circuit board, second circuit board and
Acceleration sensor module and the conditioning circuit for adjusting sensing data precision, the conditioning are respectively mounted on tertiary circuit plate
Circuit is connect with the acceleration sensor module, acceleration sensor module, second circuit board on the first circuit board
On acceleration sensor module, on tertiary circuit plate acceleration sensor module formation be capable of measuring x-axis, y-axis, z-axis three
The acceleration signal in direction；To one high-precision acceleration transducer fixed bin of production.Wherein, with the center of the bottom plate
Point is used as 0 point of one coordinate system of formation, so that bottom plate forms x-axis, y-axis, z-axis direction.
Wherein, the acceleration sensor module includes P3 socket, 5V power supply turns 3.3V power circuit and acceleration passes
Sensor, it includes ADR4533BRZ chip, capacitor C1, capacitor C2, capacitor C5, the capacitor that the 5V power supply, which turns 3.3V power circuit,
One end is connect with 5V power supply after C1, capacitor C2 parallel connection, and the other end is connect with the VIN pin of ADR4533BRZ chip；The capacitor
One end of C5 is connect with the ADR4533BRZ chip VOUT pin, and the other end is connect with signal ground；Wherein, ADR4533BRZ
Chip is high-precision 3.3V reference voltage source chip；It can produce the ultra-low noise power supply that 5V is transformed into 3.3V, it can be to acceleration
Working sensor power supply is spent, and is powered to the amplifier chip of conditioning circuit；
The acceleration transducer includes E6308 chip, capacitor C3, capacitor C4, capacitor C10, resistance R6, resistance R7, institute
State in parallel with the capacitor C3 after capacitor C4 connects with capacitor C10, the VOUT of the capacitor C3 and the ADR4533BRZ chip
Pin connection, the 5th pin of the P3 socket connect with the ST pin of the E6308 chip, the one end the capacitor C4 with it is described
The VDD pin of E6308 chip connects, and the other end is connect with the VMID pin of the E6308 chip；The resistance R6 with it is described
The OUTN pin connection of E6308 chip, the resistance R7 are connect with the OUTP pin of the E6308 chip.The E6308 chip its
Sensitivity can reach 7ug(hertz for opening radical sign).Wherein, socket P3 is interface socket signal；It is inserted for 5 pins
Seat；Wherein the 5th pin ST3.3V is reserved acceleration transducer self-test signal, and it is corresponding to be directly connected to acceleration transducer
Self-checking function pin；And the 4th pin ZOUTP and the 3rd pin ZOUTN of socket P3 is by amplifier ADA4528-
The positive and negative anodes of differential output signal after the conditioning of 2TCPZ chip；And the 5V voltage letter that the 2nd pin and the 1st pin are an externally input
Number.
It is described for adjust the conditioning circuit of sensing data precision to include ADA4528-2TCPZ chip, capacitor C11, institute
It states the one end capacitor C11 to connect with the V+ pin of ADA4528-2TCPZ chip, the other end and the 5V power supply turn 3.3V power circuit
The connection of 5V power supply, the OUTA pin of the ADA4528-2TCPZ chip and-INA pins in parallel, the ADA4528-2TCPZ
+ INA the pin of chip is connect by the resistance R7 with the OUTP pin of the E6308 chip, the ADA4528-2TCPZ core
+ INB the pin of piece is connect by the resistance R76 with the OUTN pin of the E6308 chip.Wherein, E6308 chip the 4th draws
Foot and the 5th pin are the anode and negative terminal of the analog voltage differential output signal of acceleration transducer；The differential signal is connected to
Ultra-low noise, the null offset single channel high precision operating amplifier core of ADI company (Ya De promise semiconductor technology Co., Ltd)
The conditioning chip option A DA4528-2TCPZ that piece is exported as the differential voltage；1st pin of the ADA4528-2TCPZ chip
It is the positive and negative anodes of the difference output after amplifier improves with the 7th pin.
There are two the first fixed plates 11 for 1 Right vertical of the bottom plate setting, and two the first fixed plates 11 are arranged side by side, institute
The lower vertical setting of bottom plate 1 is stated there are two the second fixed plate 12, and two the second fixed plates 12 are arranged side by side, first electricity
Road plate 3 is fixed in two the second fixed plates 12, and the second circuit board 4 is fixed in two the first fixed plates 11, and described
Three-circuit plate 5 is fixed on the surface of bottom plate 1, and tertiary circuit plate and first circuit board, second circuit board are mutually vertical.In this way
First circuit board, second circuit board, tertiary circuit plate can be more firmly placed in bottom plate 1 and shell.It is opened on the shell 2
Equipped with a route hole 21, the first circuit board, second circuit board, the route on tertiary circuit plate twist into one after from the line
Road hole is pierced by.
The acceleration information obtained to acceleration sensor structure is filtered, to reduce extraneous interference signal
Interference, the filtering processing specifically: by 2000hz sample rate, the filter of 50hz trap first is carried out to the acceleration initial data of acquisition
Wave algorithm:
y50(k)=- A (1,2) * y50(k-1)-A(1,3)*y50(k-2)+B(1,1)*x(k)+B(1,2)*x(k-1)+B(1,
3) * x (k-2), wherein
X (k) is that the acceleration at k moment samples original value, y50It (k) is the acceleration information after 50hz notch filter；
A (i, j) representing matrix
A the i-th row j column data；B (i, j) representing matrix B the i-th row j column data；ω0For trapper trap frequency, 50hz, ω are takenfFor signal
Sample frequency, α are trapper coefficient, take 0.9；I.e.A (1,3)=α2；B (1,1)=1；B (1,3)=1.
100hz notch filter algorithm is carried out to the acceleration information after 50hz notch filter algorithm again:
y100(k)=- C (1,2) * y100(k-1)-C(1,3)*y100(k-2)+D(1,1)*y50(k)+D(1,2)*y50(k-1)
+D(1,3)*y50(k-2) wherein y100It (k) is the acceleration information after 100hz notch filter；
C (i, j) representing matrix
C the i-th row j column data；D (i, j) representing matrix D the i-th row j column data；ω1For trapper trap frequency, 100hz, ω are takenfFor letter
Number sample frequency, α are trapper coefficient, take 0.9；
Finally, 100hz notch filter post-acceleration data pass through second order Chebyshev's low pass that cutoff frequency is 120hz again
Filtering, and the acceleration information of second order Chebyshev's low-pass filtering is used for a time integral and obtains three axle speed data,
The acceleration information of second order Chebyshev's low-pass filtering obtains equipment (such as acceleration sensing sampled for secondary time integral
For device structure setting on elevator, then the equipment sampled is elevator) location information.Interference signal is reduced in this way in useful letter
Specific gravity in number improves the accuracy of acceleration information.
In short, the present invention is by the acceleration sensor module on three circuit boards according to stringent X, the fixed peace of tri- axis of Y, Z
Inside metal shell；The acceleration transducer differential signal output of 3 direction and sensitivities may be implemented；It solves very much
In, consumer products are difficult to realize the fixed problem of 3 direction sensors；Then by optimizing after signal conditioning circuit
The impedance characteristic of sensor signal；And by being filtered to the acceleration information that acceleration sensor structure obtains, come
The interference for reducing extraneous interference signal, to improve the accuracy of acceleration information.
The foregoing is merely presently preferred embodiments of the present invention, all equivalent changes done according to scope of the present invention patent with
Modification, is all covered by the present invention.
Claims (6)
1. a kind of acceleration sensor structure, it is characterised in that: including bottom plate and the shell being placed on bottom plate, the x of the bottom plate
It is fixedly installed a first circuit board in axis direction, a second circuit board is fixedly installed on the y-axis direction of the bottom plate, it is described
A tertiary circuit plate, the first circuit board, second circuit board, tertiary circuit plate shape are fixedly installed on the z-axis direction of bottom plate
At orthogonal structure two-by-two, acceleration sensing is respectively mounted on the first circuit board, second circuit board and tertiary circuit plate
Device module and conditioning circuit for adjusting sensing data precision, the conditioning circuit and the acceleration sensor module connect
It connects, the acceleration sensor module in acceleration sensor module, second circuit board on the first circuit board, tertiary circuit
Acceleration sensor module on plate formed be capable of measuring x-axis, y-axis, three directions of z-axis acceleration signal.
2. a kind of acceleration sensor structure according to claim 1, it is characterised in that: the acceleration sensor module
Turn 3.3V power circuit and acceleration transducer including P3 socket, 5V power supply, the 5V power supply turns 3.3V power circuit and includes
One end is connect with 5V power supply after ADR4533BRZ chip, capacitor C1, capacitor C2, capacitor C5, the capacitor C1, capacitor C2 parallel connection,
The other end is connect with the VIN pin of ADR4533BRZ chip；One end of the capacitor C5 and the ADR4533BRZ chip VOUT
Pin connection, the other end are connect with signal ground；The acceleration transducer includes E6308 chip, capacitor C3, capacitor C4, electricity
Hold C10, resistance R6, resistance R7, the capacitor C4 is in parallel with the capacitor C3 after connecting with capacitor C10, the capacitor C3 and institute
The VOUT pin connection of ADR4533BRZ chip is stated, the 5th pin of the P3 socket and the ST pin of the E6308 chip connect
It connects, the one end the capacitor C4 is connect with the VDD pin of the E6308 chip, the VMID pin of the other end and the E6308 chip
Connection；The resistance R6 connect with the OUTN pin of the E6308 chip, the OUTP of the resistance R7 and the E6308 chip
Pin connection.
3. a kind of acceleration sensor structure according to claim 2, it is characterised in that: described for adjusting sensor number
Conditioning circuit according to precision includes ADA4528-2TCPZ chip, capacitor C11, the one end the capacitor C11 and ADA4528-2TCPZ
The V+ pin of chip connects, and the other end is connect with the 5V power supply that the 5V power supply turns 3.3V power circuit, the ADA4528-
+ INA the pin of the OUTA pin and-INA pins in parallel of 2TCPZ chip, the ADA4528-2TCPZ chip passes through the resistance
R7 is connect with the OUTP pin of the E6308 chip, and+INB the pin of the ADA4528-2TCPZ chip passes through the resistance
R76 is connect with the OUTN pin of the E6308 chip.
4. a kind of acceleration sensor structure according to claim 1, it is characterised in that: the bottom plate Right vertical setting
There are two the first fixed plates, and two the first fixed plates are arranged side by side, and the lower vertical setting of the bottom plate is solid there are two second
Fixed board, and two the second fixed plates are arranged side by side, the first circuit board is fixed in two the second fixed plates, second electricity
Road plate is fixed in two the first fixed plates, and the tertiary circuit plate is fixed on the surface of bottom plate, and tertiary circuit plate and first
Circuit board, second circuit board are mutually vertical.
5. a kind of acceleration sensor structure according to claim 1, it is characterised in that: offer a line on the shell
Lu Kong, the first circuit board, second circuit board, the route on tertiary circuit plate are pierced by after twisting into one from the route hole.
6. a kind of acceleration sensor structure according to claim 1, it is characterised in that: obtained to acceleration sensor structure
The acceleration information taken is filtered, to reduce the interference of extraneous interference signal, the filtering processing specifically: pass through
2000hz sample rate first carries out 50hz notch filter algorithm to the acceleration initial data of acquisition:
y50(k)=- A (1,2) * y50(k-1)-A(1,3)*y50(k-2)+B(1,1)*x(k)+B(1,2)*x(k-1)+B(1,3)*x
(k-2), wherein
X (k) is that the acceleration at k moment samples original value, y50It (k) is the acceleration information after 50hz notch filter；
A (i, j) representing matrix A i-th
Row j column data；B (i, j) representing matrix B the i-th row j column data；ω0For trapper trap frequency, 50hz, ω are takenfFor signal sampling
Frequency, α are trapper coefficient, take 0.9；
100hz notch filter algorithm is carried out to the acceleration information after 50hz notch filter algorithm again:
y100(k)=- C (1,2) * y100(k-1)-C(1,3)*y100(k-2)+D(1,1)*y50(k)+D(1,2)*y50(k-1)+D(1,
3)*y50(k-2) wherein y100It (k) is the acceleration information after 100hz notch filter；
C (i, j) representing matrix C i-th
Row j column data；D (i, j) representing matrix D the i-th row j column data；ω1For trapper trap frequency, 100hz, ω are takenfIt is adopted for signal
Sample frequency, α are trapper coefficient, take 0.9；
Finally, 100hz notch filter post-acceleration data pass through second order Chebyshev's low pass filtered that cutoff frequency is 120hz again
Wave, and the 3-axis acceleration data of second order Chebyshev's low-pass filtering are used for a time integral and obtain three axle speed degrees
According to the 3-axis acceleration data of second order Chebyshev's low-pass filtering obtain the position of the equipment sampled for secondary time integral
Information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811320425.5A CN109342766A (en) | 2018-11-07 | 2018-11-07 | A kind of acceleration sensor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811320425.5A CN109342766A (en) | 2018-11-07 | 2018-11-07 | A kind of acceleration sensor structure |
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| Publication Number | Publication Date |
|---|---|
| CN109342766A true CN109342766A (en) | 2019-02-15 |
Family
ID=65314417
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811320425.5A Pending CN109342766A (en) | 2018-11-07 | 2018-11-07 | A kind of acceleration sensor structure |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0572227A (en) * | 1991-09-12 | 1993-03-23 | Sumitomo Electric Ind Ltd | Acceleration detector |
| WO2001051890A1 (en) * | 2000-01-12 | 2001-07-19 | American Gnc Corporation | Micro inertial measurement unit |
| CN1821717A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | A Light small type intertia measuring unit |
| CN2874501Y (en) * | 2006-02-24 | 2007-02-28 | 安徽中科智能高技术有限责任公司 | Lift acceleration detector |
| CN102798734A (en) * | 2011-05-24 | 2012-11-28 | 中国科学院上海微系统与信息技术研究所 | Micro-electromechanical system (MEMS) triaxial accelerometer and manufacturing method thereof |
| CN208902759U (en) * | 2018-11-07 | 2019-05-24 | 福州鑫奥特纳科技有限公司 | A kind of acceleration sensor structure |
-
2018
- 2018-11-07 CN CN201811320425.5A patent/CN109342766A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0572227A (en) * | 1991-09-12 | 1993-03-23 | Sumitomo Electric Ind Ltd | Acceleration detector |
| WO2001051890A1 (en) * | 2000-01-12 | 2001-07-19 | American Gnc Corporation | Micro inertial measurement unit |
| CN2874501Y (en) * | 2006-02-24 | 2007-02-28 | 安徽中科智能高技术有限责任公司 | Lift acceleration detector |
| CN1821717A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | A Light small type intertia measuring unit |
| CN102798734A (en) * | 2011-05-24 | 2012-11-28 | 中国科学院上海微系统与信息技术研究所 | Micro-electromechanical system (MEMS) triaxial accelerometer and manufacturing method thereof |
| CN208902759U (en) * | 2018-11-07 | 2019-05-24 | 福州鑫奥特纳科技有限公司 | A kind of acceleration sensor structure |
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