CN109342179A - A kind of standard microhardness testers - Google Patents
A kind of standard microhardness testers Download PDFInfo
- Publication number
- CN109342179A CN109342179A CN201811525568.XA CN201811525568A CN109342179A CN 109342179 A CN109342179 A CN 109342179A CN 201811525568 A CN201811525568 A CN 201811525568A CN 109342179 A CN109342179 A CN 109342179A
- Authority
- CN
- China
- Prior art keywords
- impression
- focusing
- reflective mirror
- gear
- object lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
A kind of standard microhardness testers disclosed by the invention, belong to metering field.The present invention includes sequentially connected, test force loading system, impression measuring system, control tower converting system, autofocus system.Test force loading system, impression measuring system, control tower converting system, autofocus system are controlled by control module；When carrying out hardness test, test force loading system tests force value needed for generating, and is applied to specimen surface by pressure head, and autofocus system drives sample to complete focusing, by the rotation of control tower converting system, so that impression measuring system alignment gained impression measures.It is 0.0098N that the present invention, which tests lower limit, and have the advantages that (1) can be under the premise of guarantee test measurement accuracy, and expanding test power measurement range, (2) focus control precision height, it can be avoided defocusing phenomenon, guarantee the verticality in focus process.The present invention can provide effective reliable technical guarantee for the development of new material and technique.
Description
Technical field
The invention belongs to metering fields, and in particular to a kind of standard microhardness testers.
Technical background
With modern material Surface Engineering, such as vapor deposition, sputtering, ion implanting, the modification of high energy beam surface, thermal spraying and
The development in the fields such as microelectronics, integrated micro-opto-electro-mechanical systems, sample itself or surface reforming layer thickness are smaller and smaller, are badly in need of measurement
The accurate and reliable and test smaller microhardness testers that test specimen will not be punched of force value.Currently, standard level microhardness testers
Force value lower limit is 0.4903N, and test force value is larger, and when test can will have the characteristics that small, thin sample is punched.And the grade that works
The force value lower limit of microhardness testers is 0.0098N, meets existing test demand, but since the requirement of its indices is very loose, is led
It causes test result and the stable sexual deviation of test larger, effective directive significance can not be provided.Therefore it develops a kind of force value lower limit and is
The standard microhardness testers of 0.0098N are very urgent.
Summary of the invention
A kind of standard microhardness testers technical problems to be solved disclosed by the invention are: providing a kind of standard microhardness
Meter realizes measurement of the standard microhardness to microhardness, and test lower limit is 0.0098N, and has the advantages that (1) is being tried
In the case where power range is tested as (0.0098~9.8) N, force value precision be can guarantee are as follows: when test force value F > 1.961, test force is missed
Difference is ± 0.1%；When testing force value F≤1.961, Test force error is ± 0.5%；(2) focus control precision is high, can be avoided
Defocusing phenomenon guarantees the verticality in focus process.The present invention can be provided for the development of new material and technique it is effective can
The technical guarantee leaned on.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of standard microhardness testers disclosed by the invention, including test force loading system, impression measuring system, control tower turn
Change system, autofocus system, control module.It tests force loading system, impression measuring system, control tower converting system, gather automatically
Burnt system is controlled by control module, and test force loading system is connect with impression measuring system by control tower converting system, and on
Three systems are stated to be installed on together with autofocus system on equipment body.
When carrying out hardness test, test force loading system tests force value needed for generating, and is applied to sample table by pressure head
Face, autofocus system drive sample to complete focusing, by the rotation of control tower converting system, so that impression measuring system is directed at institute
Impression is obtained to measure.
Control tower converting system is used for the conversion of force value loading system and impression measuring system.
Further, test force loading system is for realizing the change lotus of test force and load, including load device seat, change lotus
Handwheel, drive rod, index dial, load driving gear, limiter, change gear, sector gear, spur rack, slide plate, ball straight line
Guide rail, load bowl, counterweight group.Become lotus handwheel and load driving gear is connected by drive rod, index dial, load are housed on drive rod
Driving gear is connected with limiter, and load driving gear and sector gear are engaged by change gear, sector gear connection
Spur rack, spur rack are attached by slide plate and load bowl, and load bowl is provided with counterweight group, and slide plate passes through with load device seat
The connection of ball linear guide.
Further, impression measuring system is used for the acquisition and measurement of indentation image, including the installation of light source, object lens, object lens
Face, spectroscope, imaging surface, graticle, eyepiece, turns to reflective mirror, CCD camera target surface and Indentation image measurement mould at main reflective mirror
Block.Wherein, light source is more clear observation, it is more accurate to measure for illuminating light field.Object lens mounting surface is light path imaging system
The original bench mark face of mechanical tube length, object lens are for amplifying impression.Main reflective mirror is for changing imaging optical path direction.One side of spectroscope
Face is used to light source reflexing to main reflective mirror to reach object plane, on the other hand for transmiting main reflective mirror imaging optical path light beam extremely
Imaging surface.Microhardness indentation image is presented for receiving in imaging surface, and when being observed and measured using CCD camera, imaging surface is not involved in
The graticle that works is and to realize and be rotated by 360 ° for measurement horizontal direction and vertical direction impression respectively with two parallel grooves
Catercorner length, when being observed and measured using CCD camera, differentiation plate is not involved in image forming job.Eyepiece is magnification eyepiece camera lens, is used for
Observe and measure microhardness impression catercorner length.Reflective mirror is turned to according to reality, is divided into two kinds of situations, is seen using CCD camera
When examining measurement, it will transmit through spectroscopical imaging beam steering and be projected to CCD camera target surface, when measuring observation using eyepiece, turn to
Reflective mirror is not involved in image forming job.Microhardness indentation image, Indentation image measurement module is presented for receiving in CCD camera target surface
For automatic measurement impression and hardness number is calculated.
As further preferred, impression measuring system components preferred size parameter and positional relationship are as follows: light source is served as reasons
The 5W multiple spot LED area light source of 15 chips composition.Object lens are mechanical tube length 160mm, numerical aperture 0.65,40 times of amplification factor
Flat-field objective camera lens.Object lens mounting surface is the original bench mark face of light path imaging system mechanics tube length.Main reflective mirror and object lens are installed
55 ° of face angle, central point is away from object lens mounting surface 20mm.55 ° of spectroscope and object lens mounting surface angle, central point is reflective away from master
Mirror central point 22mm.Imaging surface is perpendicular to main reflective mirror optical path direction, away from main reflective mirror central point 140mm.Graticle be located at
The other side of image planes is tightly connected with imaging surface.Eyepiece is the eyepiece camera lens that amplification factor is 10 times.Turn to reflective mirror and object lens
55 ° of mounting surface angle, central point is away from main reflective mirror central point 50mm.CCD camera target surface be located at turn to reflective mirror optical path just on
Side, away from steering reflective mirror central point 90mm.
Further, measurement of the impression measurement module of impression measuring system for realizing impression size, implementation method packet
Include following steps:
The first step projects to the impression picture close to regular quadrangle of the positive rectangular pyramid projection on sample by optical tubes
On CCD.
Second step, the indentation image that will be obtained are defined as 256 grades of gray scale picture figure, divide 0-255 gray level.0 is black,
255 is white, and median is different gray scales.
Third step, since impression part is usually dark compared with background, so passing through gray level light and shade pair according to setting gray scale thresholding
Than 256 grades of gray scale pictures for obtaining second step are processed into the black and white picture of the dualization of 0-1.
4th step identifies impression and background sundries, according to the black and white picture of dualization obtained by third step, to the X/Y of a picture
Length is compared discrimination.If it is impression that the difference of X/Y, which less than 10%, that is, determines that the picture is, remaining gives up it.
5th step needs to select a sweep interval according to precision to the impression that the 4th step determines.It needs to use according to precision
Yellow wire gives delimitation sweep interval, and carries out Target cell domain measurement.
6th step, Target cell domain is progressively scanned point by point in the wire region obtained to the 5th step, that is, obtains this pressure
The number of the diagonal pixels point of the X and Y of trace, Xpixel and Ypixel
7th step, the factor of the pixel to entire fluorescent screen and length is demarcated in advance.That is X-axis: 1 pixel (pixel)=
Lx (length), Y-axis: 1 pixel (pixel)=Ly (length)
8th step, according to the factor of pixel and length in advance to entire fluorescent screen demarcate, to Xpixel and Ypixel into
The corresponding operation of row is to get the actual length for arriving d1 and d2
The average value d of d1 and d2 is substituted into HV=1.8544F/d by the 9th step2, wherein F is test force/kgf, d impression pair
Average value/mm of linea angulata, obtains hardness number HV.
Further, autofocus system is used for the automatic focusing of impression, for improving Manual focusing control precision, guarantees
Verticality is gone up and down, defocusing phenomenon is avoided；Autofocus system includes: workbench, focusing gear, small pulley, lifting motor cabinet, step
Into motor, connecting shaft, conveyer belt, big belt wheel, handwheel, traversing guide, direction bearing, focusing pedestal, ball bearing, 45 ° of spirals
Gear, helical gear, focusing connecting rod sleeve, focusing axis, driving box, automatic focus module.
Be divided into manual mode or automatic focusing mode according to actual use situation, manual mode: handwheel drives focusing gear
It is rotated, focusing gear passes through makes focusing axis move up and down with the steering of engaging of 45 ° of helical gears, to drive focusing
Workbench above axis, which moves up and down, completes focusing.Automatic mode: automatic focus module controls driving box, and driving box drives stepping
Motor rotation is further driven to pass through transmission to drive the rotation for the small pulley being connected by connecting shaft with stepper motor
The rotation for the big belt wheel that band is attached with small pulley, big belt wheel drive focusing gear to be rotated, and focusing gear passes through and 45 °
The engagement steering of helical gear makes focusing axis move up and down, and completes so that the workbench above focusing axis be driven to move up and down
Focusing.
For realizing auto focus control, implementation method includes the following steps: automatic focus module
The first step carries out first indentation image focused acquisition to the impression after suppressing, by calculate find it is next more
Accurate focusing range；The first impression step pitch is (± 10~± 400) μm.
Second step, in the more accurate focusing range obtained after first focus, the secondary impression image of progress is focused
Acquisition, obtains accurate focusing range；The secondary impression step pitch is (± 1~± 9) μm.
Third step, focal plane in the accurate focusing range obtained after secondary focusing, carries out the focusing of final indentation image
Acquisition, to obtain the measurable indentation image of final precise sharpness.The final impression step pitch is (± 0.4~± 0.9) μm.
4th step finds focal plane obtained by third step and is adjusted to state after obtaining the measurable indentation image of precise sharpness
Owe coke-like state, after recall to parfocalization state, i.e. the workbench distance that first moves step pitch set by third step downwards, backward top is moved
It is dynamic, guarantee the screw thread lower edge of the focusing axis moved up and down always on the screw thread of focusing connecting rod sleeve on, to eliminate with test
The defocusing phenomenon that the increase of power and the influence of gravity occur.
Preferably, idle stroke is convenient for control to eliminate the screw pitch gap in focusing commutation process, stepping electricity after commutation
Machine need to first carry out the focus operation of default stepping.The method of default stepping is as follows: screw pitch is α μm, putting when motor control is focused
Big multiple is x times, and the umber of pulse that motor one encloses 360 ° is β, therefore the corresponding distance δ of each pulse of motor is δ=α/(x β),
Idle stroke gap caused by screw pitch is γ μm, to eliminate the gap, needs gamma/delta=A pulse.
Further, test force loading system is connect with impression measuring system by control tower, and is mounted on mainboard jointly.
Further, autofocus system is taken jointly with test force loading system, impression measuring system, control tower converting system
It is loaded on body.
Further, control module is for controlling equipment operation.
The utility model has the advantages that
1, a kind of standard microhardness testers disclosed by the invention provide a kind of standard microhardness testers, realize that standard is micro-
Measurement of the hardness to standard microhardness, can be under the premise of guarantee test measurement accuracy, expanding test power measurement range, warp
Overtesting verifying, range of test force are (0.0098~9.8) N, force value precision are as follows: when test force value F > 1.961, test force is missed
Difference is ± 0.1%；When testing force value F≤1.961, Test force error is ± 0.5%.Impression measurement accuracy is ± 0.2 μm, hardness
The error of indication ± 3%.
2, a kind of standard microhardness testers disclosed by the invention increase ruler item and ball in test force loading system
Linear guide makes existing equipment in such a way that lever construction carries out curve change lotus, becomes straight line and become lotus, changes and lead due to becoming lotus
The case where causing each counterweight decentraction in counterweight group increases test force loading system stability to reduce Test force error.
3, a kind of standard microhardness testers disclosed by the invention, in impression measuring system, selection mechanical tube length is 160mm
Standard object lens, solve current microhardness testers impression measuring system can only use mechanical tube length be the non-standard object lens mirror of 210mm
The problem of head, improves the quality of imaging and reduces production cost.
4, a kind of standard microhardness testers disclosed by the invention increase automatic focus module solution in impression measuring system
Certainly Manual focusing control accuracy difference, and because of operator's bring error, utilize impression automatic measurement module, completion impression ruler
Very little automatic measurement；Defocusing phenomenon is avoided using automatic focus module；Increase traversing guide and fixed-direction axis on focal axis
Hold the verticality to ensure focusing.
5, a kind of standard microhardness testers disclosed by the invention, in impression measuring system, light source is by existing 50W halogen
Lamp becomes the 5W multiple spot LED area light source being made of 15 chips, and brightness is high, the straightness of light is good, so that visual field be made to become more
It is clear to add, and improves image quality；And its power of 5W multiple spot LED area light source is small used in the present invention, can eliminate mainboard quilt
The failure punched increases service life.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of standard microhardness testers of the invention；
Fig. 2 is a kind of test force loading system structural schematic diagram of standard microhardness testers of the invention；
Fig. 3 is a kind of impression measuring system structural schematic diagram of standard microhardness testers of the invention；
Fig. 4 is a kind of autofocus system structural schematic diagram A of standard microhardness testers of the invention；
Fig. 5 is a kind of autofocus system structural schematic diagram B of standard microhardness testers of the invention；
Fig. 6 is a kind of autofocus system structural schematic diagram C of standard microhardness testers of the invention；
Fig. 7 is indentation hardness schematic diagram caused by a kind of standard microhardness testers of the invention；
Fig. 8 is the dualization black and white picture of indentation hardness caused by a kind of standard microhardness testers of the invention；
Fig. 9 is that band caused by a kind of standard microhardness testers of the invention has powerful connections the impression schematic diagram of sundries, in which:
Fig. 9 A is that impression schematic diagram, Fig. 9 B with scratch are the impression dualization black and white with scratch as, Fig. 9 C is with rust staining
Impression schematic diagram, Fig. 9 D are the impression dualization black and white picture with rust staining；
When Figure 10 is a kind of standard microhardness testers automatic measurement of the invention, the impression signal in display scanning survey section
Figure, in which: Figure 10 A is the impression schematic diagram in scanning survey section, the impression dualization black and white that Figure 10 B is scanning survey section
Picture.
Wherein: 1-load device seat, 2-become lotus handwheels, 3-drive rods, 4-index dials, 5-load driving gears,
6-limiters, 7-change gears, 8-sector gears, 9-spur racks, 10-slide plates, 11-ball linear guides, 12-carry
Lotus bowl, 13-counterweight groups, 14-eyepieces, 15-graticles, 16-imaging surfaces, 17-CCD camera target surfaces, 18-steerings are reflective
Mirror, 19-spectroscopes, 20-main reflective mirrors, 21-light sources, 22-object lens mounting surfaces, 23-object lens, 24-workbench, 25-are adjusted
Burnt gear, 26-small pulleys, 27-lifting motor cabinets, 28-stepper motors, 29-connecting shafts, 30-conveyer belts, 31-big bands
Wheel, 32-handwheels, 33-traversing guides, 34-direction bearings, 35-focusing pedestals, 36-ball bearings, 37-45 ° of helical tooths
Wheel, 38-helical gears, 39-focusing connecting rod sleeves, 40-focusing axis.
Specific embodiment
By specific embodiment, the present invention is described in further detail with reference to the accompanying drawing.
Embodiment 1:
As shown in Figure 1, a kind of standard microhardness testers disclosed in the present embodiment, including test force loading system, impression are surveyed
Amount system, control tower converting system, autofocus system, control module.Force loading system, impression measuring system, control tower is tested to turn
Change system, autofocus system is controlled by control module, test force loading system and impression measuring system by control tower conversion
System connection, and above three system is installed on equipment body together with autofocus system.
When carrying out hardness test, test force loading system tests force value needed for generating, and is applied to sample table by pressure head
Face, autofocus system drive sample to complete focusing, by the rotation of control tower converting system, so that impression measuring system is directed at institute
Impression is obtained to measure.
Control tower converting system is used for the conversion of force value loading system and impression measuring system.
Test force loading system is connect with impression measuring system by control tower, and is mounted on mainboard jointly.
Autofocus system and test force loading system, impression measuring system, control tower converting system are mounted in body jointly
On.
Control module is for controlling equipment operation.
As shown in Fig. 2, test force loading system is for realizing the change lotus of test force and load, including load device seat 1, change
Lotus lotus handwheel 2, drive rod 3, index dial 4, load driving gear 5, limiter 6, change gear 7, sector gear 8, spur rack 9,
Slide plate 10, ball linear guide 11, load bowl 12, counterweight group 13.Become lotus handwheel 2 and load driving gear is connected by drive rod 3
5, index dial 4 is housed, load driving gear 5 is connected with limiter 6, and load driving gear 5 leads to sector gear 8 on drive rod 3
Change gear 7 to be crossed to be engaged, sector gear 8 connects spur rack 9, and spur rack 9 is attached by slide plate 10 with load bowl 12,
Load bowl 12 is provided with counterweight group 13, and slide plate 10 is connect with load device seat 1 by ball linear guide 11.
As shown in figure 3, impression measuring system is used for the acquisition and measurement of indentation image, including light source 21, object lens 23, object lens
Mounting surface 22, spectroscope 19, imaging surface 16, graticle 15, eyepiece 14, turns to reflective mirror 18, CCD camera target at main reflective mirror 20
Face 17.Wherein, light source 21 is the 5W multiple spot LED area light source being made of 15 chips.Object lens 23 are mechanical tube length 160mm, numerical value
Aperture 0.65,40 times of amplification factor of flat-field objective camera lens.Object lens mounting surface 22 is the starting of light path imaging system mechanics tube length
Datum level.Main reflective mirror 20, with 55 ° of 22 angle of object lens mounting surface, central point is away from object lens mounting surface 2220mm.Spectroscope 19,
With 55 ° of 22 angle of object lens mounting surface, central point is away from 20 central point 22mm of main reflective mirror.Imaging surface 16 is perpendicular to main reflective mirror 20
Optical path direction, away from 20 central point 140mm of main reflective mirror.Graticle 15 is located at the other side of imaging surface, is tightly connected with imaging surface.
Eyepiece 14 is the eyepiece camera lens that amplification factor is 10 times.Turn to 55 ° of reflective mirror 18 and 22 angle of object lens mounting surface, central point away from
20 central point 50mm of main reflective mirror.CCD camera target surface, which is located at, to be turned to right above reflective mirror optical path, away from steering reflective mirror central point
90mm。
The impression measurement module of impression measuring system is for realizing the measurement of impression size, and the specific implementation steps are as follows:
The first step, as shown in fig. 7, the impression picture close to regular quadrangle of the positive rectangular pyramid projection on sample is passed through optics
Lens barrel projects on CCD.
Second step, the indentation image that will be obtained are defined as 256 grades of gray scale picture figure, divide 0-255 gray level.0 is black,
255 is white, and median is different gray scales.
Third step, since impression part is usually dark compared with background, so passing through gray level light and shade pair according to setting gray scale thresholding
Than 256 grades of gray scale pictures for obtaining second step are processed into the black and white picture of the dualization of 0-1, as shown in Figure 8.
4th step, as shown in figure 9, identification impression and background sundries, according to the black and white picture of dualization obtained by third step, to one
The X/Y length of a picture is compared discrimination.If it is impression that the difference of X/Y, which less than 10%, that is, determines that the picture is, remaining gives up it.
5th step to the impression that the 4th step determines, needs to select a sweep interval according to precision as shown in Figure 10.Root
It needs to give delimitation sweep interval with wire according to precision, and carries out Target cell domain measurement.
6th step, Target cell domain is progressively scanned point by point in the wire region obtained to the 5th step, that is, obtains this pressure
The number of the diagonal pixels point of the X and Y of trace, Xpixel and Ypixel.
7th step, the factor of the pixel to entire fluorescent screen and length is demarcated in advance.That is X-axis: 1 pixel (pixel)=
Lx (length), Y-axis: 1 pixel (pixel)=Ly (length).
8th step, according to the factor of pixel and length in advance to entire fluorescent screen demarcate, to Xpixel and Ypixel into
The corresponding operation of row is to get the actual length for arriving d1 and d2.
The average value d of d1 and d2 is substituted into HV=1.8544F/d by the 9th step2, wherein F is test force/kgf, d impression pair
Average value/mm of linea angulata, obtains hardness number HV.
As shown in Figure 4,5, 6, autofocus system is used for the automatic focusing of impression, for improving Manual focusing control essence
Degree guarantees lifting verticality, avoids defocusing phenomenon；Autofocus system include workbench 24, focusing gear 25, small pulley 26,
Lifting motor cabinet 27, stepper motor 28, connecting shaft 29, conveyer belt 30, big belt wheel 31, handwheel 32, traversing guide 33, direction bearing
34, focus pedestal 35,36,45 ° of helical gears 37 of ball bearing, helical gear 38, focusing connecting rod sleeve 39, focusing axis 40, driving box,
Automatic focus module.
Be divided into manual mode or automatic focusing mode according to actual use situation, manual mode: handwheel 32 drives focusing tooth
Wheel 25 is rotated, and focusing gear 25 passes through makes focusing axis 40 move up and down with the steering of engaging of 45 ° of helical gears 37, from
And it drives the workbench 24 of 40 top of focusing axis to move up and down and completes focusing.Automatic mode: automatic focus module controls driving box,
Driving box drives stepper motor 28 to rotate, to drive turning for the small pulley 26 being connected by connecting shaft 29 with stepper motor 28
It is dynamic, it is further driven to the rotation for the big belt wheel 31 being attached by conveyer belt 30 and small pulley 26, big belt wheel 31 drives focusing
Gear 25 is rotated, and focusing gear 25 passes through makes focusing axis 40 move up and down with the steering of engaging of 45 ° of helical gears 37,
Focusing is completed to drive the workbench 24 of 40 top of focusing axis to move up and down.
For automatic focus module for realizing auto focus control, specific implementation step is as follows:
The first step carries out the first indentation image focused acquisition that step pitch is ± 10 μm to the impression after suppressing, passes through calculating
Find next accurate focusing range.
Second step in the accurate focusing range obtained after first focus, carries out the secondary pressure that step pitch is ± 1 μm
Trace image focused acquisition, obtains accurate focusing range.
Third step in the accurate focusing range obtained after secondary focusing, carries out the final impression figure that step pitch is ± 0.4 μm
The focused acquisition of picture, to obtain the measurable indentation image of precise sharpness.
4th step finds focal plane obtained by third step, after obtaining the measurable indentation image of precise sharpness, first by state tune
To owing coke-like state, after recall to the parfocalization state found to third step, workbench 24 first moves downwards step pitch set by third step
Distance, after be moved upward, the screw thread lower edge for the focusing axis 40 for guaranteeing to move up and down is always on the screw thread of focusing connecting rod sleeve 39
It is finally not in out of focus to eliminate the defocusing phenomenon occurred with the increase of test force and the influence of gravity on
The measurable indentation image of the precise sharpness of phenomenon.
To eliminate the screw pitch gap in focusing commutation process, motor will first carry out right after 27 pulse steps after commutation
Coke, to reduce influence of the idle stroke to subsequent focusing as caused by screw pitch gap after commutation.
Through detecting, a kind of technical indicator of standard microhardness testers disclosed in the present embodiment is as follows:
Test force value detection data table
Impression measuring system detection data table
Hardometer indicating value detection data table
Test result shows disclosed in the present embodiment that a kind of standard microhardness testers fully meet related vertification regulation and wants
Ask, range of test force be (0.0098~9.8) N, force value precision are as follows: test force value F > 1.961 when, Test force error be ±
0.1%；When testing force value F≤1.961, Test force error is ± 0.5%.Impression measurement accuracy is ± 0.2 μm, and hardness indicating value is missed
Difference ± 3%.
Above-described specific descriptions have carried out further specifically the purpose of invention, technical scheme and beneficial effects
It is bright, it should be understood that the above is only a specific embodiment of the present invention, the protection model being not intended to limit the present invention
It encloses, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention
Protection scope within.
Claims (10)
1. a kind of standard microhardness testers, it is characterised in that: including sequentially connected, test force loading system, impression measurement system
System, control tower converting system, autofocus system；It tests force loading system, impression measuring system, control tower converting system, gather automatically
Burnt system is controlled by control module, and test force loading system is connect with impression measuring system by control tower converting system, and on
Three systems are stated to be installed on together with autofocus system on equipment body；
When carrying out hardness test, test force loading system tests force value needed for generating, and is applied to specimen surface by pressure head, from
Dynamic focusing system drives sample to complete focusing, by the rotation of control tower converting system, so that impression measuring system alignment gained pressure
Trace measures；
Control tower converting system is used for the conversion of force value loading system and impression measuring system.
2. a kind of standard microhardness testers as described in claim 1, it is characterised in that: test force loading system is for realizing examination
Test change lotus and the load of power, including load device seat (1), change lotus handwheel (2), drive rod (3), index dial (4), load driving tooth
Take turns (5), limiter (6), change gear (7), sector gear (8), spur rack (9), slide plate (10), ball linear guide (11),
Load bowl (12), counterweight group (13)；Become lotus handwheel (2) and connect load driving gear (5) by drive rod (3), on drive rod (3)
Equipped with index dial (4), load driving gear (5) is connected with limiter (6), and load driving gear (5) passes through with sector gear (8)
Change gear (7) is engaged, and sector gear (8) connects spur rack (9), and spur rack (9) passes through slide plate (10) and load bowl
(12) it is attached, load bowl (12) is provided with counterweight group (13), and slide plate (10) is led with load device seat (1) by ball straight line
Rail (11) connection.
3. a kind of standard microhardness testers as described in claim 1, it is characterised in that: impression measuring system is used for indentation image
Acquisition and measurement, including light source (21), object lens (23), object lens mounting surface (22), main reflective mirror (20), spectroscope (19), at
Image planes (16), eyepiece (14), turn to reflective mirror (18), CCD camera target surface (17) and Indentation image measurement mould at graticle (15)
Block；Wherein, light source (21) is more clear observation, it is more accurate to measure for illuminating light field；Object lens (23) are for amplifying pressure
Trace；Object lens mounting surface (22) is the original bench mark face of light path imaging system mechanics tube length；Main reflective mirror (20) is for changing imaging
Optical path direction；Spectroscope (19) is on the one hand for reflexing to main reflective mirror (20) for light source (21) to reach object plane, another party
Face is for transmiting main reflective mirror (20) imaging optical path light beam to imaging surface (16)；Microhardness is presented for receiving in imaging surface (16)
Indentation image, when being observed and measured using CCD camera, imaging surface (16) is not involved in image forming job；Graticle (15) is with two
Parallel groove, and realize and be rotated by 360 ° for measurement horizontal direction and vertical direction impression catercorner length respectively, using CCD phase
When machine observes and measures, differentiation plate is not involved in image forming job；Eyepiece (14) is magnification eyepiece camera lens, for observing and measuring microhardness
Impression catercorner length；Reflective mirror (18) are turned to according to reality, are divided into two kinds of situations, it, will be saturating when being observed and measured using CCD camera
The imaging beam steering for crossing spectroscope (19) is projected to CCD camera target surface (17), when measuring observation using eyepiece (14), turns to anti-
Light microscopic (18) is not involved in image forming job；Microhardness indentation image is presented for receiving in CCD camera target surface (17).
4. a kind of standard microhardness testers as claimed in claim 3, it is characterised in that: the preferred ruler of impression measuring system components
Very little parameter and positional relationship are as follows: light source (21) is the 5W multiple spot LED area light source being made of 15 chips；Object lens (23) are machinery
Tube length 160mm, numerical aperture 0.65,40 times of amplification factor of flat-field objective camera lens；Object lens mounting surface (22) is light path imaging system
The original bench mark face of system mechanical tube length；Main reflective mirror (20) and 55 ° of angle of object lens mounting surface (22), central point are installed away from object lens
Face (22) 20mm；Spectroscope (19), with 55 ° of angle of object lens mounting surface (22), central point is away from main reflective mirror (20) central point
22mm；Imaging surface (16) is perpendicular to main reflective mirror (20) optical path direction, away from main reflective mirror (20) central point 140mm；Graticle
(15) it is located at the other side of imaging surface (16), is tightly connected with imaging surface (16)；Eyepiece (14) is the mesh that amplification factor is 10 times
Lens head；Reflective mirror (18) and 55 ° of angle of object lens mounting surface (22) are turned to, central point is away from main reflective mirror (20) central point
50mm；CCD camera target surface (17), which is located at, to be turned to right above reflective mirror (18) optical path, away from steering reflective mirror (18) central point 90mm.
5. a kind of standard microhardness testers as described in claim 3 or 4, it is characterised in that: the impression of impression measuring system is surveyed
Module is measured for realizing the automatic measurement of impression size, implementation method includes the following steps,
The impression picture close to regular quadrangle of positive rectangular pyramid projection on sample is projected to CCD by optical tubes by the first step
On；
Second step, the indentation image that will be obtained are defined as 256 grades of gray scale picture figure, divide 0-255 gray level；0 is black, and 255 are
White, median is different gray scales；
Third step, since impression part is usually dark compared with background, so according to setting gray scale thresholding by gray level comparison of light and shade, it will
256 grades of gray scale pictures that second step obtains are processed into the black and white picture of the dualization of 0-1；
4th step identifies impression and background sundries, according to the black and white picture of dualization obtained by third step, to the X/Y length of a picture
It is compared discrimination；If it is impression that the difference of X/Y, which less than 10%, that is, determines that the picture is, remaining gives up it；
5th step needs to select a sweep interval according to precision to the impression that the 4th step determines；It is needed to use yellow according to precision
Wire gives delimitation sweep interval, and carries out Target cell domain measurement；
6th step, Target cell domain is progressively scanned point by point in the wire region obtained to the 5th step, that is, obtains the X of this impression
With the number of the diagonal pixels point of Y, Xpixel and Ypixel；
7th step, the factor of the pixel to entire fluorescent screen and length is demarcated in advance；That is X-axis: 1 pixel (pixel)=Lx is (long
Degree), Y-axis: 1 pixel (pixel)=Ly (length)
8th step is demarcated according to the factor of pixel and length in advance to entire fluorescent screen, is carried out pair to Xpixel and Ypixel
Operation is answered to get the actual length of d1 and d2 is arrived
The average value d of d1 and d2 is substituted into HV=1.8544F/d by the 9th step2, wherein F is test force/kgf, and d is that impression is diagonal
Average value/mm of line, obtains hardness number HV.
6. a kind of standard microhardness testers as described in claim 3 or 4, it is characterised in that: autofocus system is used for impression
Automatic focusing, for improve Manual focusing control precision, guarantee lifting verticality, avoid defocusing phenomenon；Autofocus system
Including workbench (24), focusing gear (25), small pulley (26), lifting motor cabinet (27), stepper motor (28), connecting shaft
(29), conveyer belt (30), big belt wheel (31), handwheel (32), traversing guide (33), direction bearing (34), focusing pedestal (35), rolling
Pearl bearing (36), helical gear (38), focusing connecting rod sleeve (39), focusing axis (40) driving box, gathers at 45 ° of helical gears (37) automatically
Burnt module；
Be divided into manual mode or automatic focusing mode according to actual use situation, manual mode: handwheel (32) drives focusing gear
(25) it is rotated, focusing gear (25) is by making to focus axis (40) progress up and down with the steering of engaging of 45 ° of helical gears (37)
Movement, so that driving the workbench (24) above focusing axis (40) to move up and down completes focusing；Automatic mode: automatic focus module
Driving box is controlled, driving box drives stepper motor (28) rotation, passes through connecting shaft (29) and stepper motor (28) phase to drive
The rotation of the small pulley (26) of connection is further driven to the big belt wheel being attached by conveyer belt (30) and small pulley (26)
(31) rotation, big belt wheel (31) drive focusing gear (25) to be rotated, and focusing gear (25) is passed through and 45 ° of helical gears
(37) engagement steering make focus axis (40) move up and down, thus drive focusing axis (40) above workbench (24) up and down
Focusing is completed in movement.
7. a kind of standard microhardness testers as claimed in claim 6, it is characterised in that: automatic focus module is for realizing automatic
Focus control, implementation method include the following steps,
The first step carries out the first indentation image focused acquisition that step pitch is (± 10~± 400) μm to the impression after suppressing, passes through
Next accurate focusing range is found in calculating；
Second step in the accurate focusing range obtained after first focus, carries out two that step pitch is (± 1~± 9) μm
Secondary indentation image focused acquisition, obtains accurate focusing range；
Third step, in the accurate focusing range obtained after secondary focusing, carrying out step pitch is the final of (± 0.4~± 0.9) μm
The focused acquisition of indentation image, to obtain the measurable indentation image of precise sharpness；
4th step finds focal plane obtained by third step and first is adjusted to owe by state after obtaining the measurable indentation image of precise sharpness
Coke-like state, after recall to the parfocalization state found to third step, i.e. the distance of the first step pitch set by the mobile third step in lower section of workbench,
It is moved upward on afterwards, guarantees the screw thread lower edge of the focusing axis (40) moved up and down the edge on the screw thread of focusing connecting rod sleeve (39) always
On, it is finally not in out of focus existing to eliminate the defocusing phenomenon occurred with the increase of test force and the influence of gravity
The measurable indentation image of the precise sharpness of elephant.
8. a kind of standard microhardness testers as claimed in claim 7, it is characterised in that: to eliminate the spiral shell in focusing commutation process
Away from gap, idle stroke, convenient for control, stepper motor need to first carry out the focus operation of default stepping after commutation；The side of default stepping
Method is as follows: screw pitch is α μm, and amplification factor when motor control is focused is x times, and the umber of pulse that motor one encloses 360 ° is β, therefore motor
The corresponding distance δ of each pulse is δ=α/(x β), and idle stroke gap caused by screw pitch is γ μm, to eliminate the gap, is needed
Want gamma/delta=A pulse.
9. a kind of standard microhardness testers as described in claim 3 or 4, it is characterised in that: test force loading system and impression
Measuring system, control tower connection, and be mounted on mainboard jointly.
10. a kind of standard microhardness testers as described in claim 3 or 4, it is characterised in that: autofocus system and test force
Loading system, impression measuring system, control tower converting system are mounted on body jointly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811525568.XA CN109342179B (en) | 2018-12-13 | 2018-12-13 | Standard microhardness tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811525568.XA CN109342179B (en) | 2018-12-13 | 2018-12-13 | Standard microhardness tester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109342179A true CN109342179A (en) | 2019-02-15 |
| CN109342179B CN109342179B (en) | 2021-04-06 |
Family
ID=65304546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811525568.XA Active CN109342179B (en) | 2018-12-13 | 2018-12-13 | Standard microhardness tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109342179B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110047343A (en) * | 2019-03-27 | 2019-07-23 | 北京市理化分析测试中心 | A kind of method of VR simulation microhardness testers operation |
| CN110082231A (en) * | 2019-05-27 | 2019-08-02 | 平湖莱顿光学仪器制造有限公司 | A kind of multi link loading device and microscope |
| CN110864987A (en) * | 2019-11-29 | 2020-03-06 | 中国航空工业集团公司北京长城计量测试技术研究所 | Two-section type electromagnetic force application system of high-precision microhardness tester |
| CN112014205A (en) * | 2020-10-09 | 2020-12-01 | 中国航空工业集团公司北京长城计量测试技术研究所 | Microhardness meter with multi-sample automatic calibration function |
| CN112098191A (en) * | 2020-10-09 | 2020-12-18 | 中国航空工业集团公司北京长城计量测试技术研究所 | Special fixture for multi-sample microhardness block test |
| CN113720264A (en) * | 2021-07-19 | 2021-11-30 | 湘潭大学 | Hardness tester camera focusing measurement method and device |
| CN114383963A (en) * | 2021-12-15 | 2022-04-22 | 迈格仪器(苏州)有限公司 | Indentation reading method of micro Vickers hardness tester |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4611487A (en) * | 1984-03-16 | 1986-09-16 | Anton Paar, Kg | Micro hardness testing device |
| CN1310334A (en) * | 2001-04-05 | 2001-08-29 | 上海恒一电子测试设备有限公司 | Guide rail type loader for microscopic hardness meter |
| CN101526452A (en) * | 2009-04-16 | 2009-09-09 | 莱州华银试验仪器有限公司 | Automatic turret type electronic mainshaft measuring unit of Brinell hardness tester |
| CN201322709Y (en) * | 2008-12-22 | 2009-10-07 | 沈阳天星试验仪器有限公司 | Portable hardness tester |
| CN103353431A (en) * | 2013-07-12 | 2013-10-16 | 吉林大学 | In-situ indentation mechanical testing device based on tensile compression and fatigue combined load mode |
| CN203519441U (en) * | 2013-10-21 | 2014-04-02 | 上海研润光机科技有限公司 | Intelligent metallographic analysis and hardness measurement system |
| CN204064831U (en) * | 2014-08-29 | 2014-12-31 | 上海奥龙星迪检测设备有限公司 | Accurate microhardness testers |
| CN205067206U (en) * | 2015-08-04 | 2016-03-02 | 上海尚材试验机有限公司 | Vickers |
| CN205067207U (en) * | 2015-08-04 | 2016-03-02 | 上海尚材试验机有限公司 | Brinell hardness tester |
| CN107045176A (en) * | 2017-02-22 | 2017-08-15 | 上海钜晶精密仪器制造有限公司 | Microhardness testers automatic lifting focusing mechanism |
-
2018
- 2018-12-13 CN CN201811525568.XA patent/CN109342179B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4611487A (en) * | 1984-03-16 | 1986-09-16 | Anton Paar, Kg | Micro hardness testing device |
| CN1310334A (en) * | 2001-04-05 | 2001-08-29 | 上海恒一电子测试设备有限公司 | Guide rail type loader for microscopic hardness meter |
| CN201322709Y (en) * | 2008-12-22 | 2009-10-07 | 沈阳天星试验仪器有限公司 | Portable hardness tester |
| CN101526452A (en) * | 2009-04-16 | 2009-09-09 | 莱州华银试验仪器有限公司 | Automatic turret type electronic mainshaft measuring unit of Brinell hardness tester |
| CN103353431A (en) * | 2013-07-12 | 2013-10-16 | 吉林大学 | In-situ indentation mechanical testing device based on tensile compression and fatigue combined load mode |
| CN203519441U (en) * | 2013-10-21 | 2014-04-02 | 上海研润光机科技有限公司 | Intelligent metallographic analysis and hardness measurement system |
| CN204064831U (en) * | 2014-08-29 | 2014-12-31 | 上海奥龙星迪检测设备有限公司 | Accurate microhardness testers |
| CN205067206U (en) * | 2015-08-04 | 2016-03-02 | 上海尚材试验机有限公司 | Vickers |
| CN205067207U (en) * | 2015-08-04 | 2016-03-02 | 上海尚材试验机有限公司 | Brinell hardness tester |
| CN107045176A (en) * | 2017-02-22 | 2017-08-15 | 上海钜晶精密仪器制造有限公司 | Microhardness testers automatic lifting focusing mechanism |
Non-Patent Citations (1)
| Title |
|---|
| 石伟 等: "智能加载激光洛氏硬度标准装置", 《计测技术》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110047343A (en) * | 2019-03-27 | 2019-07-23 | 北京市理化分析测试中心 | A kind of method of VR simulation microhardness testers operation |
| CN110082231A (en) * | 2019-05-27 | 2019-08-02 | 平湖莱顿光学仪器制造有限公司 | A kind of multi link loading device and microscope |
| CN110082231B (en) * | 2019-05-27 | 2024-04-26 | 平湖莱顿光学仪器制造有限公司 | Multi-connecting rod loading device and microscope |
| CN110864987A (en) * | 2019-11-29 | 2020-03-06 | 中国航空工业集团公司北京长城计量测试技术研究所 | Two-section type electromagnetic force application system of high-precision microhardness tester |
| CN110864987B (en) * | 2019-11-29 | 2022-03-29 | 中国航空工业集团公司北京长城计量测试技术研究所 | Two-section type electromagnetic force application system of high-precision microhardness tester |
| CN112014205A (en) * | 2020-10-09 | 2020-12-01 | 中国航空工业集团公司北京长城计量测试技术研究所 | Microhardness meter with multi-sample automatic calibration function |
| CN112098191A (en) * | 2020-10-09 | 2020-12-18 | 中国航空工业集团公司北京长城计量测试技术研究所 | Special fixture for multi-sample microhardness block test |
| CN113720264A (en) * | 2021-07-19 | 2021-11-30 | 湘潭大学 | Hardness tester camera focusing measurement method and device |
| CN113720264B (en) * | 2021-07-19 | 2024-04-26 | 湘潭大学 | Focusing measurement method and device for camera of sclerometer |
| CN114383963A (en) * | 2021-12-15 | 2022-04-22 | 迈格仪器(苏州)有限公司 | Indentation reading method of micro Vickers hardness tester |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109342179B (en) | 2021-04-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109342179A (en) | A kind of standard microhardness testers | |
| CN110006905A (en) | A kind of ultra-clean smooth surface defect detecting device of heavy caliber that line area array cameras combines | |
| CN1207601C (en) | Confocal point microscope and height measuring method using this | |
| CN103940377B (en) | Optical lens centre of sphere deviation measurement device | |
| KR20100124742A (en) | Electronic component inspecting method and apparatus used in the method | |
| CN105203304B (en) | Magnifying power method surveys the optical bench of focal length | |
| CN102353518B (en) | Device and method for detecting quality of lattice point of printed light guide plate | |
| CN101852677A (en) | Method for improving focal distance detection precision of long focal distance collimator | |
| CN111735768B (en) | Micro imaging method and device for Micro LED screen | |
| CN110849289A (en) | Double-camera parallel confocal differential microscopic 3D morphology measurement device and method | |
| CN110411346A (en) | A kind of aspherical fused quartz element surface microdefect method for rapidly positioning | |
| CN2898765Y (en) | Digital image inspector | |
| CN107356619B (en) | A kind of micro-beam X-ray quickly positions and calibrating installation and its application method | |
| CN116754565B (en) | Automatic focusing detection method for optical element full-caliber surface micro-defect photo-induced fluorescence detection | |
| CN106442528A (en) | Dual camera microscope testing device and testing method for contents of fiber components | |
| KR0184039B1 (en) | Image quality inspection system and image synthesis method | |
| CN209992407U (en) | Large-caliber ultra-clean smooth surface defect detection device combined with linear array camera | |
| CN210571301U (en) | Optical detection mechanism for central deviation of cylindrical mirror | |
| JP2011145160A (en) | Device and method for multi-focus inspection | |
| CN110006921B (en) | Automatic pose adjusting method and device for large-curvature-radius spherical optical element | |
| US11536943B2 (en) | Microscope and method for generating an image pieced together from a plurality of individual microscope images | |
| AT515745A1 (en) | lighting device | |
| WO2024051008A1 (en) | System and method for ultrafast and large-size scanning | |
| CN211527333U (en) | Non-contact cable diameter and wall thickness measuring device | |
| CN1275065C (en) | Spectrum face coordinate calibrating device for digital scanning optical transfer function detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |