CN109324572A - Machine automation management system and method thereof - Google Patents
Machine automation management system and method thereof Download PDFInfo
- Publication number
- CN109324572A CN109324572A CN201810155219.7A CN201810155219A CN109324572A CN 109324572 A CN109324572 A CN 109324572A CN 201810155219 A CN201810155219 A CN 201810155219A CN 109324572 A CN109324572 A CN 109324572A
- Authority
- CN
- China
- Prior art keywords
- board
- remote control
- monitoring device
- execution system
- manufacturing execution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 74
- 238000004519 manufacturing process Methods 0.000 claims abstract description 76
- 238000012806 monitoring device Methods 0.000 claims abstract description 67
- 238000007726 management method Methods 0.000 claims description 68
- 238000012545 processing Methods 0.000 claims description 52
- 238000010561 standard procedure Methods 0.000 claims description 46
- 238000003860 storage Methods 0.000 claims description 23
- 238000004891 communication Methods 0.000 claims description 21
- 238000013024 troubleshooting Methods 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 5
- 238000004886 process control Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 abstract description 10
- 239000000047 product Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000012015 optical character recognition Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011265 semifinished product Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000013468 resource allocation Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
An automatic management system and method for machine. According to an example, the machine automation management system may include: the system comprises a plurality of machines, a plurality of remote control devices, a manufacturing execution system and a monitoring device. The plurality of remote control devices are respectively coupled with the machines. The manufacturing execution system is used for providing a plurality of process instructions for operating a plurality of machines. The monitoring device is coupled with the plurality of remote control devices and the manufacturing execution system, receives at least one of the plurality of process instructions from the manufacturing execution system, and executes one of the plurality of sets of machine standard operation program source codes according to the received process instruction so as to control each remote control device to execute the automatic operation of each machine.
Description
Technical field
The present invention relates to a kind of management system and management methods, and more particularly to a kind of board automated management system
And its method.
Background technique
With the development of science and technology, since the development of various electronic product is more and more polynary, wherein manufacture of semiconductor technology
Towards micromation, densification development.In current semiconductor processing technology, benefit such as wafer (Wafer) manufacturing technology, processing procedure
Equipment may need round-the-clock running and monitoring, in general board producing line management system, it may be desirable to rely on operation
Personnel are manually entered parameter on board or execute the operational order of a succession of fixation, and the board that a bit manipulation personnel can manage
Number be usually units, although having part producing line at present is to come remote management machine platform, energy using remote control management machine
Enough board numbers for promoting management, but that there is still a need for operators is on duty before remote control management machine, relies on operator's
It is artificial to manage processing procedure producing line progress or troubleshooting, very labor intensive, additionally, due to manually-operated relationship, therefore exist
A possibility that generating artificial careless mistake, if in addition, the board operated by different operation personnel, needs online interaction each other
When, as needing to coordinate between personnel so that how mutually efficiency of movement reduction so far proposes a kind of production that can be full-automatic
Wire management system becomes project important at present.
Summary of the invention
The present invention provides a kind of board automated management system and the automatic management method to manage multiple boards, leads to
Computer control is crossed, full-automatic board management can be implemented, fault caused by reducing human cost and reducing artificially, and
And the efficiency raising that interaction is online.
The embodiment of the present invention provides a kind of board automated management system, comprising: multiple boards, multiple long-range control dresses
It sets, manufacturing execution system (manufacturing execution system, MES) and monitoring device.Multiple long-range controls
Device is respectively coupled to each board.Manufacturing execution system operates multiple processing procedures instruction of multiple boards to provide.Monitoring device coupling
Multiple remote control apparatuses and manufacturing execution system are connect, monitoring device receives multiple processing procedure instructions at least from manufacturing execution system
One of them, and processing procedure instruction execution multiple groups board standard operating procedure (Standard Operating based on the received
One of Procedures, SOP) source code, the automatic operation of each board is executed to control each remote control apparatus.
The embodiment of the present invention provides a kind of board automated management system, comprising: multiple boards, manufacturing execution system with
And monitoring device, wherein each board carry remote control program.Manufacturing execution system is to provide the multiple of the multiple boards of operation
Processing procedure instruction.Monitoring device couples multiple boards and manufacturing execution system, and monitoring device receives multiple systems from manufacturing execution system
At least one of Cheng Zhiling, and processing procedure instruction execution multiple groups board standard operating procedure source code is wherein based on the received
One of, the automatic operation of each board is executed with online remote control program.
The embodiment of the present invention provides a kind of automatic management method to manage multiple boards, is suitable for managing multiple
The monitoring device of board, plurality of board carry remote control program or are respectively coupled to multiple remote control apparatuses respectively, side
The remote control program or multiple remote control apparatuses that method includes: online multiple boards are remotely to control multiple boards；
The processing procedure instruction of corresponding multiple boards is received from manufacturing execution system；And processing procedure instruction execution multiple groups board mark based on the received
One of quasi- operation procedure source code, it is each to execute with the remote control program or each remote control apparatus that control each board
The automatic operation of board.
Based on above-mentioned, board automated management system and its method provided by the embodiment of the present invention, according to from manufacture
The received processing procedure instruction of execution system, monitoring device control board automation using remote control apparatus or remote control program
Operation, manual operation is replaced by using monitoring device, and only need inside board carry remote control program or
Coupling remote control apparatus in outside is not required to the built-in software set of change board, therefore the software of board itself will not be caused to rush
It is prominent, in addition a variety of different types of boards all can the same remote control program of carry or plug-in same model long-range control
Device, therefore board automated management system and its method provided by the embodiment of the present invention can reduce human cost and reduce
In addition careless mistake caused by artificial elastic can also be applied on a variety of boards, and cost is cheap.
To make the foregoing features and advantages of the present invention clearer and more comprehensible, special embodiment below, and cooperate institute's accompanying drawings
It is described in detail below.
Detailed description of the invention
Fig. 1 is the schematic diagram according to a kind of board automated management system of one embodiment of the invention.
Fig. 2 is the block diagram according to the monitoring device of the board automated management system of one embodiment of the invention.
Fig. 3 is the monitoring device according to one embodiment of the invention to the process of board full-automation method for remote management
Figure.
Fig. 4 is a kind of machine operations interface captured by remote control apparatus according to one embodiment of the invention
Schematic diagram.
Fig. 5 is the schematic diagram according to a kind of board automated management system of another embodiment of the present invention.
Fig. 6 is a kind of process to manage the automatic management method of multiple boards according to one embodiment of the invention
Figure.
Symbol description
100,500: board automated management system
110: board
120: manufacturing execution system
130: monitoring device
132: processor
134: storage device
136: communication device
138: input equipment
140: network
150: remote control apparatus
200: operation interface image
210: image child window
212: pattern
230: wafer
232: crystal grain
240: the first child windows
252: the second child windows
254: third child window
262:SEM sets the first child window
264:SEM sets the second child window
S302~S316: the step of monitoring device is to board full-automation method for remote management
S510~S530: the step of automatic management method to manage multiple boards
Specific embodiment
In order to allow the contents of the present invention to be easier to be illustrated, spy can actually be accordingly as the present invention for embodiment below
The example of implementation.In addition, all possible places, use component/component/step of identical label in the drawings and embodiments, are
Represent same or like component.
Fig. 1 is the schematic diagram according to a kind of board automated management system of one embodiment of the invention.Fig. 1 is please referred to,
Board automated management system 100 includes multiple boards 110, manufacturing execution system (manufacturing execution
System, MES) 120, multiple remote control apparatuses 150 and monitoring device 130, wherein the present embodiment is to be with three boards
Example is illustrated, but not limited to this, in other embodiments, board automated management system 100 may include more boards
110.In this embodiment, every board 110 couples a remote control apparatus 150.Manufacturing execution system 120 can provide use
To operate multiple processing procedures instruction of multiple boards 110.Monitoring device 130 couples manufacturing execution system 120, and passes through network
140 each remote control apparatuses 150 of connection.By remote control apparatus 150, monitoring device 130 can observe every board 110
Operation interface remotely operates the operation interface of board 110 to obtain the practice condition of board 110.In addition to this, it monitors
Device 130 includes multiple groups board standard operating procedure (Standard Operating Procedures, SOP) source code, monitoring
It, can the corresponding board of processing procedure instruction execution based on the received after device 130 receives processing procedure instruction from manufacturing execution system 120
SOP source code executes the automatic operation of each board 110 to control each remote control apparatus 150, to reach board automation
The purpose of production.
In detail, board 110 be to produce converted products or execute fabrication steps hardware process apparatus, e.g.
The board of semiconductor crystal wafer processing procedure, but not limited to this.Remote control apparatus 150 is the computer hardware with logic circuit, can be with
Control board 110 is used to input the peripheral equipment or software of instruction, such as keyboard, mouse and desktop programs (Desktop
Application) etc..Remote control apparatus 150 can also may be integrally incorporated to inside board 110, this hair with external board 110
The bright configuration mode for being not intended to limit remote control apparatus 150 Yu board 110.Board 110 can be allowed by remote control apparatus 150
Realize Unmanned operation.In the present embodiment, every board 110 couples a remote control apparatus 150, however in other implementations
In example, attachable 110 not limited to of board of remote control apparatus 150 is in one.
Manufacturing execution system 120 is to manage the overall flow of producing line production test and store product parameters.For for example
For the manufacturing equipments of high-tech industries such as semiconductor, display panel or other electronic components, in order to increase the productivity of equipment
(productivity) the considerations of and saving cost, it is however generally that, product manufacturing system all includes that a center manufacture executes
System is must assure that the scheduling (scheduling) of board and using effectively.For example, center manufacture executes system
System can execute following function: (work in process, WIP) tracking, resource allocation and state in work progress, movement row
Journey, quality control data (quality data) are collected, and processing control.Manufacturing execution system can also be treated as one and be used to collect
The central storeroom (central depository) of data and distribution data.For example, manufacturing execution system can be real-time
Ground and dynamically is collected, combination, and indicates (express) raw material (raw materials), finished product (finished
Products), the data or storage processing procedure kind of semi-finished product (semi-finished products), machine, time and cost
The parameters such as class, processing time, the batch (batch) of product, lot number, serial number, and track and control each production processing.?
In the present embodiment, manufacturing execution system 120 is configurable in an electronic, and in the form of software program or hardware circuit form
Realize it.In the present embodiment, electronic device can be for example file server with operational capability, database server, answer
With computing devices such as program servers, work station or personal computers.Also, electronic device may include storage device and processing
Device.Manufacturing execution system 120 can execute above-mentioned each functions of modules by processor, each described in various embodiments of the present invention to realize
Kind data operation, integration, judgement and analysis.
Fig. 2 is the block diagram according to the monitoring device of the board automated management system of one embodiment of the invention.Please refer to figure
2, this example demonstrates that in Fig. 1 monitoring device 130 composition and function.Monitoring device 130 is, for example, desktop computer, notebook
Computer, work station, server or other have the smartphone, personal digital assistant or tablet computer of calculation function,
The present embodiment is without being limited thereto.
Monitoring device 130 includes processor 132, storage device 134 and communication device 136.The coupling manufacture of processor 132 is held
Row system 120, storage device 134 and communication device 136.Processor 132 can connect to long-range control by communication device 136
Device 150 is connected to board 110 in turn, and accesses the data in 110 operation interface of board by remote control apparatus 150 and (lift
It is data shown by desktop programs for example), the e.g. manufacture about the parameter setting of processing procedure, producing line progress or product
As a result.Storage device 134 stores multiple groups board SOP source code, and processor 132, which executes one group of board SOP source code, to be passed through
Remote control apparatus 150 executes a series of machine operations movement to control board 110, says it in detail, every group of board SOP is original
Code has recorded the automatic execution code of the operation standard operation procedure of board, and processor 132, which executes board SOP source code, to be led to
Crossing remote control apparatus 150 makes board 110 execute operation standard operation procedure automatically.Processor 132 can be executed from manufacture
System 120 receives at least one of multiple processing procedure instructions, and can be instructed according to the processing procedure received from storage device 134
Corresponding board SOP source code is found out, processor 132, which executes above-mentioned corresponding board SOP source code, can control long-range control
Device 150 is with succession of steps come the keyboard, mouse and desktop programs (Desktop Application) etc. that operate board 110
Deng allowing board 110 to carry out Unmanned operation to respond processing procedure instruction and (for example, respond received processing procedure instruction
Indicate that board is wanted to execute certain operation standard operation procedures), to reach board automated production product (such as product wafer)
Purpose.
In the present embodiment, SEMI device talk standard/shared device model (SEMI can be used in monitoring device 130
Equipment Communication Standard/Generic Equipment Model, SECS/GEM) it is executed with manufacture
System 120 is communicated with each other.SECS/GEM is semiconductor equipment and the general communications protocol/interface of upper layer (host) ditch, and citing comes
It says, in the fab of automation, the instruction started or stopped can be assigned to equipment through this interface, collection metric data, changed
Become process parameter and selection formula.SECS/GEM agreement covers such as SECS I, HSMS (High-Speed SECS
Message Services), SECS II and GEM.However, the present invention for monitoring device 130 and manufacturing execution system 120 it
Between communications protocol and without restriction, for having usually intellectual in this field, when knowing that there are also other communication standards
In the presence of, and system is executed using the semiconductors manufacture of other communication standards, and be included within the scope of the present invention.
Communication device 136 is, for example, to support motor and Electronic Engineering Association (Institute of Electrical and
Electronics Engineers, IEEE) wireless communication standards such as 802.11n/b/g wireless network card or support Ethernet
(Ethernet) network interface card of cable networks connection such as, can by other devices in wired or wireless way and network 140 into
Row network on-line.In the present embodiment, communication device 136 uses a local area network (local area network, LAN), so
And has usually intellectual in this field and other means of communication also can be used according to actual demand, and is logical using other
The communication device of communication method is also to be included within the scope of the present invention.
Storage device 134 can be the fixed or packaged type random access memory (Random of any kenel
Access Memory, RAM), read-only memory (Read-Only Memory, ROM), flash memory (Flash memory) or similar
The combination of component or said modules can be used to store board SOP source code.
In the present embodiment, processor 132 may include the central processing unit being made of single core or multi-core
The microprocessor of the general service or specific use of (Central Processing Unit, CPU) or other programmables
(Microprocessor), digital signal processor (Digital Signal Processor, DSP), programmable controller,
Special application integrated circuit (Application Specific Integrated Circuits, ASIC), programmable logic
The combination of equipment (Programmable Logic Device, PLD) or other similar device or these devices, can be used to load
Computer erasable software is to execute a plurality of instructions, the long-range monitoring of the monitoring device 130 to execute the embodiment of the present invention
Function.Illustrate that monitoring device 130 executes the detailed step of automation remote monitoring to board 10 for embodiment below.
In addition to this, in the present embodiment, monitoring device 130 further includes input equipment 138, and the coupling of input equipment 138 is deposited
Storage device 134 and processor 132.Input equipment 138 can be keyboard (wired or wireless keyboard), mouse (wired or wireless mouse
Mark), speech recognition equipment, one of Touch Screen or combinations thereof.User can be inputted by input equipment 138 to be wanted
Board standard operating procedure source code to storage device 134, can also to the board SOP source code in storage device 134 into
Edlin.
For example, Fig. 3 is the monitoring device according to one embodiment of the invention to the full-automatic long-range manager of board
The flow chart of method can be adapted for the embodiment of Fig. 1 and Fig. 2.Fig. 4 is passed through remotely according to one kind of one embodiment of the invention
The schematic diagram at the machine operations interface that control device is captured.Fig. 1 and Fig. 2 please arrange in pairs or groups referring to Fig. 3 and 4, processor 132 utilizes logical
It interrogates device 136 and connects network 140, and online multiple remote control apparatuses 150 are distinguished by network 140.It below will be to monitor dress
Set 130 remotely control any board 110 for, but not limited to this.In one embodiment, board automated management system 100
Board 110 remotely is controlled to implement automatic operation, herein with scanning electron microscope using monitoring device 130
For the full-automatic focus operation of (Scanning Electron Microscope, SEM), but not limited to this, it is also implementable
Other are for example coated with photoresist, etching technique etc., and one skilled in the art can illustrate according to actual conditions with implementing, and
Make appropriate variation.
Firstly, in step s 302, monitoring device 130 captures the operation interface of board 110 by remote control apparatus 150
Image 200, then, in step 304, the operation interface image 200 of 132 pairs of processor acquisitions carries out picture and text identification (Optical
Character Recognition,OCR).It should be noted that processor 132 is not necessarily required for operation interface image 200 entirely
Portion carries out picture and text identification, can be just for the first child window 240, second in certain particular range, such as operation interface image 200
The picture area of child window 252 or third child window 254, which can be omitted, not to be recognized or only carries out text-recognition, or to SEM
It sets the first child window 262 or SEM sets the second child window 264 and carries out picture and text identification, to learn SEM setting value at this time,
Image identification can be carried out otherwise for specific picture area, such as image child window 210 captured by SEM.Segment 230 is
The schematic diagram of wafer, wherein crystal grain 232 indicates target captured by SEM, is shown in image child window 210.
In step S306, the operation interface image 200 of acquisition is compared, such as compares the picture (shadow of SEM shooting
As child window 210) whether have comprising the default figure to be etched (herein by taking triangle pattern as an example) or image child window 210
Whether pattern 212 is located at scheduled position after captured etching, and in region 216, the target of comparison is not added in the present invention
With limitation.
Then, in step S308, judge whether comparison result meets expection, next step is executed if not meeting
S310.Since the operation interface of board 110 can be learnt in advance, it may thus be appreciated that road is special in the lower left corner of image child window 210
Determine the coordinate position 214 that can show SEM shooting in pixel region, can get the seat of SEM shooting at this time by picture and text discriminating function
Cursor position 214, or previous in step S304 or step S306, can determine whether out what meets by the result that picture and text recognize
The numerical value or character indicates coordinate position of format.If judging current coordinate position 214 undesirably, board can control
110 SEM changes camera site or focal length etc., wherein new camera site or focal length etc. can by it is preset from
Dynamic focusing method is found out.
It illustrates, in step S306 or step S308, the operation interface image 200 of acquisition is compared
Act, judge the movement of comparison result or calculate the new shooting coordinate of SEM, focal length etc., can be will by monitoring device 130
Operation interface image 200 after picture and text identification sends manufacturing execution system 120 to, carries out above-mentioned meter by manufacturing execution system 120
Calculation movement, or completed by processor 132, the present invention does not limit this.
In step s310, processor 132 receives processing procedure instruction from manufacturing execution system 120, for example, in order to automate
The setting for changing the SEM of board 110 (will e.g. change the instruction of SEM shooting coordinate and shoot new image, include new
SEM shoots coordinate), later in step S312 and step S314, processor 132 finds out corresponding machine from storage device 134
Platform SOP source code, board SOP source code is to operate 110 operation interface of board, such as oneself by remote control apparatus 150
Dynamic execute clicks the movement of certain specific pulldownmenus, clicks some specific keys or click specific times, and or specific
Input space key in desired number (desired number is, for example, new SEM shooting coordinate), choose particular options etc., or
The combination of above-mentioned movement.
After completing step S314, returning to step S302 and repeating the following steps (can only return to step in another embodiment
Rapid S306), until step S308 judges that comparison result meets expection, then step S316 is carried out, terminates the full-automatic focusing of SEM
Movement.
In one embodiment, processor 132 can pass through operation interface image after step S302 and step S306
200 picture and text identification and comparison result and obtain the practice condition of board 110, such as the image of product, quality, process parameter,
Fault state, processing procedure progress etc., and then the practice condition of board 110 is supplied to manufacturing execution system 120 as reference, and
Manufacturing execution system 120 can provide the instruction of the corresponding processing procedure of processor 132 according to practice condition.
In one embodiment, when at least one of practice condition of multiple boards 110 is fault state, processor
132 return fault state receive troubleshooting instruction, and processing to manufacturing execution system 120 and from manufacturing execution system 120
Device 132 receives the board SOP source code of corresponding troubleshooting instruction from storage device 134 and executes it, to control long-range control
Device 150 makes the automatic debugging situation of board 110 of failure.Specifically, processor 132 is in operation circle to board 110
After face image carries out picture and text identification, it is found that processor 132 can return the error code picked out to system there are erroneous signals
Execution system 120 is made, manufacturing execution system 120 is instructed according to the corresponding troubleshooting of error code response monitoring device 130, place
Reason device 132 can find out corresponding board SOP source code from storage device 134 after receiving troubleshooting instruction, this corresponding board
SOP source code has recorded the operating procedure for how coping with this fault code, therefore processor 132 executes this corresponding board SOP
The fault state for excluding board 110 can be automated after source code.
Fig. 5 is the schematic diagram according to a kind of board automated management system of another embodiment of the present invention.Board is automatic
Changing management system 500 includes multiple boards 110, manufacturing execution system (manufacturing execution system, MES)
120 and monitoring device 130.Board automated management system 500 is similar with board automated management system 100, and difference is
Board automated management system 500 can not include remote control apparatus 150, but every 110 carry of board remotely controls
(Remote Control or Remote Desktop) program.Remote control program can allow long-range client (Client) logical
The mode for crossing network on-line shows the operation interface of host side (desktop) and can operate the operation of host side on the client
Interface, remote control program are, for example, TeamViewer, AnyDesk, VNC (Virtual Network Computing) etc.
Software, but not limited to this.Mainly illustrate this difference below.
In this embodiment, monitoring device 130 couples manufacturing execution system 120, and connects each board by network 140
110.By remote control program, monitoring device 130 can observe the operation interface of every board 110 to obtain board 110
Practice condition, and remotely operate the operation interface of board 110, for example, open window, drop-down window, control cursor click are pressed
Key or in space input numerical value or character etc..Therefore the execution board SOP source code of processor 132 of monitoring device 130 can
To make board 110 execute operation standard operation procedure automatically by remote control program.Board automated management system 500
Detailed configuration relationship and embodiment, can refer to the embodiment of above-mentioned Fig. 1~4 explanation obtain it is enough teaching, suggest and
Implement explanation, therefore repeats no more.
Fig. 6 is a kind of process to manage the automatic management method of multiple boards according to one embodiment of the invention
Figure, referring to figs. 1 to Fig. 5, the automatic management method of the present embodiment can at least be suitable for the board automated management system of Fig. 1
The board automated management system 500 of 100 and Fig. 5.In step S510, monitoring device 130 is online to 110 carries of each board
Remote control program or each board 110 of coupling remote control apparatus 150.In step S520, monitoring device 130 is from system
It makes execution system 120 and receives the processing procedure instruction of corresponding multiple boards 110, and find out the board that the corresponding received processing procedure of institute instructs
SOP source code.In step S530, monitoring device 130 executes board SOP source code to control the long-range control of each board 110
Program or each remote control apparatus 150 operate board 110 by remote control program or remote control apparatus 150 to execute machine
The automatic operation of platform 110.Therefore, the producing line management of the implementable full-automation of the automatic management method of the present embodiment.However,
The related system feature and embodiment for realizing the automatic management method of the present embodiment, can refer to the embodiment of above-mentioned Fig. 1~5
Explanation obtain enough teachings, suggest and implement explanation, therefore repeat no more.
In addition illustrate, in certain embodiments, board 110 can carry remote control program and plug-in remote simultaneously
Process control device 150, the present invention is not intended to limit this.
In conclusion the board automated management system and its method of the embodiment of the present invention can pass through by monitoring device
Remote control apparatus or remote control program are automatically brought into operation board.There are coupling remote control apparatus or carry by each board
Remote control program, monitoring device can online remote control apparatus or remote control program control the primary operations of these boards
Interface.The storage device of monitoring device is stored with multiple groups board standard operating procedure source code, and above-mentioned multiple groups board standard is made
Industry program source code has recorded the automatic execution code of a succession of machine operations movement respectively, that is to say, that different board standards
Operation procedure source code executes different machine operations standard operating procedures respectively, therefore monitoring device connects from manufacturing execution system
The board standard operating procedure source code of corresponding processing procedure instruction can be executed after receiving processing procedure instruction, therefore monitoring device can be made to pass through
Remote control apparatus or remote control program come so that board executes automatically needs manually-operated operation standard operation journey originally
Sequence, therefore board automated management system and its method provided by the embodiment of the present invention can achieve nobody full-automation
Processing procedure management reaches the technical effect of human cost required for reducing producing line, as long as and coupling long-range control in each board
Device or carry remote control program are not required to the built-in software set of change board, can be avoided and the software of board is caused to rush
It is prominent and be suitable for a variety of different types of boards, it may also reach up under limited budget construction board automated management system simultaneously
And the extensive effect of application elasticity.
Although the present invention has been disclosed by way of example above, it is not intended to limit the present invention., any technical field
Middle tool usually intellectual, without departing from the spirit and scope of the present invention, when can make some changes and embellishment, thus it is of the invention
Protection scope should be defined by the scope of the appended claims.
Claims (20)
1. a kind of board automated management system, comprising:
Multiple boards；
Multiple remote control apparatuses are respectively coupled to each board；
Manufacturing execution system, to provide the multiple processing procedures instruction for operating the multiple board；And
Monitoring device, couples the multiple remote control apparatus and the manufacturing execution system, and the monitoring device is from the system
Make execution system receive the instruction of the multiple processing procedure at least one, and processing procedure instruction execution multiple groups based on the received
One of board standard operating procedure source code, with control each remote control apparatus execute each board from
Dynamicization operation.
2. board automated management system as described in claim 1, wherein the monitoring device includes:
Communication device passes through the multiple remote control apparatus of network on-line；
Storage device stores the multiple groups board standard operating procedure source code；And
Processor, couples the communication device, the storage device and the manufacturing execution system, and the processor is from the system
It makes execution system and receives the processing procedure instruction, the processor instructs corresponding from storage device reception according to the processing procedure
Board standard operating procedure source code, and the board standard operating procedure source code is executed to control each long-range control dress
It sets to execute the automatic operation of each board, wherein the processor connects each long-range control by the communication device
Device processed.
3. board automated management system as described in claim 1, wherein the monitoring device further include:
Input equipment couples the storage device and the processor, and wherein user is inputted or compiled by the input equipment
Collect one of described multiple groups board standard operating procedure source code.
4. board automated management system as described in claim 1, wherein
The monitoring device obtains the practice condition of each board by each remote control apparatus, and sends to described
Manufacturing execution system, and
The manufacturing execution system provides the corresponding processing procedure of the monitoring device according to the practice condition of each board and refers to
It enables.
5. board automated management system as claimed in claim 4, wherein the monitoring device passes through each long-range control
Device obtains the operation interface image of each board, and to carry out picture and text identification to each operation interface image each to obtain
The practice condition of the board.
6. board automated management system as claimed in claim 4, wherein when the execution of one of the multiple board
When situation is fault state,
The monitoring device returns the manufacturing execution system and receives troubleshooting instruction from the manufacturing execution system, and
The monitoring device executes the board standard operating procedure source code of the corresponding troubleshooting instruction, described remote to control
Process control device makes the board exclude the fault state automatically.
7. board automated management system as described in claim 1, wherein the monitoring device passes through each long-range control
Device controls at least one of the keyboard of each board, mouse and desktop programs, to execute the automatic of each board
Change operation.
8. a kind of board automated management system, comprising:
Multiple boards, wherein each board carry remote control program；
Manufacturing execution system, to provide the multiple processing procedures instruction for operating the multiple board；And
Monitoring device, couples the multiple board and the manufacturing execution system, and the monitoring device executes system from the manufacture
System receives at least one of the multiple processing procedure instruction, and the processing procedure instruction execution multiple groups board standard based on the received
One of operation procedure source code executes the automation behaviour of each board by the online remote control program
Make.
9. board automated management system as claimed in claim 8, wherein the monitoring device includes:
Communication device passes through the multiple board of network on-line；
Storage device stores the multiple groups board standard operating procedure source code；And
Processor, couples the communication device, the storage device and the manufacturing execution system, and the processor is from the system
It makes execution system and receives the processing procedure instruction, the processor instructs corresponding from storage device reception according to the processing procedure
Board standard operating procedure source code, and the board standard operating procedure source code is executed to pass through the remote control program
The automatic operation of each board is executed, wherein the processor controls the long-range control journey by the communication device
Sequence.
10. board automated management system as claimed in claim 8, wherein the monitoring device further include:
Input equipment couples the storage device and the processor, and wherein user is inputted or compiled by the input equipment
Collect one of described multiple groups board standard operating procedure source code.
11. board automated management system as claimed in claim 8, wherein
The monitoring device obtains the practice condition of each board by the remote control program, and sends the system to
Execution system is made, and
The manufacturing execution system provides the corresponding processing procedure of the monitoring device according to the practice condition of each board and refers to
It enables.
12. board automated management system as claimed in claim 11, wherein
The monitoring device obtains the operation interface image of each board by the remote control program, and to each described
Operation interface image carries out picture and text identification to obtain the practice condition of each board.
13. board automated management system as claimed in claim 11, wherein when at least one of the multiple board
Practice condition be fault state when,
The monitoring device returns the manufacturing execution system and receives troubleshooting instruction from the manufacturing execution system, and
The monitoring device executes the board standard operating procedure source code of the corresponding troubleshooting instruction, to control the machine
The remote control program of platform excludes the fault state automatically.
14. board automated management system as claimed in claim 8, wherein the monitoring device passes through the long-range control
At least one of the keyboard of each board of process control, mouse and desktop programs, to execute the automatic of each board
Change operation.
15. a kind of automatic management method to manage multiple boards, suitable for managing the monitoring device of multiple boards, wherein
The multiple board carry remote control program or is respectively coupled to multiple remote control apparatuses respectively, which comprises
The remote control program or the multiple remote control apparatus of online the multiple board are to carry out the multiple board
Long-range control；
The processing procedure instruction of corresponding the multiple board is received from manufacturing execution system；And
One of described processing procedure instruction execution multiple groups board standard operating procedure source code based on the received, to control each institute
The remote control program or each remote control apparatus for stating board execute the automatic operation of each board.
16. automatic management method as claimed in claim 15, wherein user passes through the input equipment of the monitoring device
Input or edit one of described multiple groups board standard operating procedure source code.
17. automatic management method as claimed in claim 15, further includes:
The practice condition of each board is obtained by each remote control apparatus or the remote control program, and is transmitted
To the manufacturing execution system, and
The processing procedure instruction for corresponding to the practice condition of each board is received from the manufacturing execution system.
18. automatic management method as claimed in claim 17, wherein described passes through each remote control apparatus or institute
State remote control program includes: the step of the practice condition of each board to obtain
The operation interface image of each board is obtained by each remote control apparatus or the remote control program, and
Picture and text identification is carried out to obtain the practice condition of each board to each operation interface image.
19. automatic management method as claimed in claim 17, wherein described receive from the manufacturing execution system corresponds to
Include: in the step of processing procedure instruction of the practice condition of each board
When at least one of practice condition of the multiple board is fault state, the fault state is returned to described
Manufacturing execution system simultaneously receives troubleshooting instruction from the manufacturing execution system, and
The board standard operating procedure source code of the corresponding troubleshooting instruction is executed to control each remote control apparatus
Or the remote control program makes the board exclude the fault state automatically.
20. automatic management method as claimed in claim 15, wherein the monitoring device is filled by each long-range control
Set or the remote control program control the keyboard of each board, mouse and desktop programs at least one, to execute
The automatic operation of each board.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW107100429A TWI693564B (en) | 2018-01-05 | 2018-01-05 | Automatic equipment management system and method thereof |
| TW107100429 | 2018-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109324572A true CN109324572A (en) | 2019-02-12 |
Family
ID=65263469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810155219.7A Withdrawn CN109324572A (en) | 2018-01-05 | 2018-02-23 | Machine automation management system and method thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109324572A (en) |
| TW (1) | TWI693564B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554670A (en) * | 2019-09-06 | 2019-12-10 | 中电九天智能科技有限公司 | Multi-machine control optimization method based on flexible manufacturing |
| CN112905171A (en) * | 2021-03-15 | 2021-06-04 | 深圳中科飞测科技股份有限公司 | Control method of detection device, detection system, and computer-readable storage medium |
| CN114326507A (en) * | 2021-12-29 | 2022-04-12 | 苏州赛美特科技有限公司 | Machine control method and device, electronic equipment and computer readable storage medium |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI739474B (en) * | 2020-06-11 | 2021-09-11 | 宏正自動科技股份有限公司 | Image processing device, image processing system and image processing method |
| TWI763111B (en) * | 2020-11-05 | 2022-05-01 | 宇曜智能股份有限公司 | Simulation control system and simulation control method |
| US20220253045A1 (en) * | 2021-02-08 | 2022-08-11 | Farobot Inc. | Meta-data driven management systems and methods for flexible manufacturing |
| US20220336242A1 (en) * | 2021-04-16 | 2022-10-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for automated material handling management |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1670720A (en) * | 2004-01-09 | 2005-09-21 | 旺宏电子股份有限公司 | Machine control system |
| CN1892522A (en) * | 2005-07-07 | 2007-01-10 | 台湾积体电路制造股份有限公司 | System for collecting and processing electronic data obtained from processing tool and production system |
| US20090012834A1 (en) * | 2007-07-03 | 2009-01-08 | Brian Fahey | Compliance Management System |
| CN104699019A (en) * | 2013-12-09 | 2015-06-10 | 中芯国际集成电路制造(上海)有限公司 | Machine recovery detection system and method |
| CN107462821A (en) * | 2016-06-02 | 2017-12-12 | 南茂科技股份有限公司 | Remote monitoring method and system for wafer test machine |
| CN206807469U (en) * | 2017-06-20 | 2017-12-26 | 胡新炜 | A kind of network computer room integrated monitoring and fault remote processing system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005009022A1 (en) * | 2005-02-28 | 2006-09-07 | Advanced Micro Devices, Inc., Sunnyvale | Automatic throughput control system and method of operating the same |
| US7379782B1 (en) * | 2007-03-26 | 2008-05-27 | Activplant Corporation | System and method of monitoring and quantifying performance of an automated manufacturing facility |
| US9442482B2 (en) * | 2013-04-29 | 2016-09-13 | GlobalFoundries, Inc. | System and method for monitoring wafer handling and a wafer handling machine |
| US11569138B2 (en) * | 2015-06-16 | 2023-01-31 | Kla Corporation | System and method for monitoring parameters of a semiconductor factory automation system |
-
2018
- 2018-01-05 TW TW107100429A patent/TWI693564B/en active
- 2018-02-23 CN CN201810155219.7A patent/CN109324572A/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1670720A (en) * | 2004-01-09 | 2005-09-21 | 旺宏电子股份有限公司 | Machine control system |
| CN1892522A (en) * | 2005-07-07 | 2007-01-10 | 台湾积体电路制造股份有限公司 | System for collecting and processing electronic data obtained from processing tool and production system |
| US20090012834A1 (en) * | 2007-07-03 | 2009-01-08 | Brian Fahey | Compliance Management System |
| CN104699019A (en) * | 2013-12-09 | 2015-06-10 | 中芯国际集成电路制造(上海)有限公司 | Machine recovery detection system and method |
| CN107462821A (en) * | 2016-06-02 | 2017-12-12 | 南茂科技股份有限公司 | Remote monitoring method and system for wafer test machine |
| CN206807469U (en) * | 2017-06-20 | 2017-12-26 | 胡新炜 | A kind of network computer room integrated monitoring and fault remote processing system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554670A (en) * | 2019-09-06 | 2019-12-10 | 中电九天智能科技有限公司 | Multi-machine control optimization method based on flexible manufacturing |
| CN112905171A (en) * | 2021-03-15 | 2021-06-04 | 深圳中科飞测科技股份有限公司 | Control method of detection device, detection system, and computer-readable storage medium |
| CN114326507A (en) * | 2021-12-29 | 2022-04-12 | 苏州赛美特科技有限公司 | Machine control method and device, electronic equipment and computer readable storage medium |
| CN114326507B (en) * | 2021-12-29 | 2023-10-31 | 赛美特科技有限公司 | Machine control method, device, electronic equipment and computer readable storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201931228A (en) | 2019-08-01 |
| TWI693564B (en) | 2020-05-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109324572A (en) | Machine automation management system and method thereof | |
| EP3536647B1 (en) | Authorization management and authorization request of elevator service request | |
| US20110153034A1 (en) | Universal human machine interface for automation installation | |
| KR20010030038A (en) | Computer integrated manufacturing techniques | |
| CN104076770A (en) | Method and system for monitoring production line | |
| JP6679808B2 (en) | Smart driver | |
| JPH11238658A (en) | Method for general control semiconductor process data | |
| CN104281132A (en) | Information collection system and method for machine manufacturing workshop in production process based on machine vision | |
| CN105824726A (en) | Remote automatic test system and method of mobile terminals | |
| JP2015176191A (en) | controller | |
| CN105204463A (en) | Marking machine system based on Internet of things and marking method thereof | |
| CN104008446A (en) | Construction technology information interactive method and system | |
| CN107370823A (en) | Data acquisition and long-range control method, device and computer-readable recording medium | |
| US20170277172A1 (en) | Sim system, control method therefor and production informatization system | |
| KR100702843B1 (en) | Semiconductor prodution device can processing batch of variable lot and method for processing variable lot | |
| KR20120067649A (en) | Apparatus and method for managing status of community robot | |
| CN109901830A (en) | A kind of symbol arranging method and system for scada system development | |
| CN107150340B (en) | Robot group control device | |
| CN106774178A (en) | A kind of automation control system and method, plant equipment | |
| CN207209640U (en) | A kind of elevator remote monitoring system | |
| CN110442105A (en) | A kind of lithium electric material digitlization workshop | |
| CN110794798B (en) | Production data monitoring system and monitoring method applied to display panel | |
| KR20210051947A (en) | Monitoring system using HMI optimized for smart factory construction | |
| US20020198617A1 (en) | System and method for controlling priority of lots employed in MES | |
| CN103441088B (en) | Automated system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20190220 Address after: 230001 Room 504, Block C, J2 Building, Phase II, Innovation Industrial Park, 2800 Innovation Avenue, Hefei High-tech Zone, Anhui Province Applicant after: Hehua Intelligent Technology (Hefei) Co., Ltd. Address before: 230601 No. 1 workshop of Tianmen Lake Industrial Park, west of Tianmen Road and south of Jinxiu Avenue, Hefei Economic and Technological Development Zone, Anhui Province Applicant before: Bamboo Osaka Intelligent Data (Hefei) Co., Ltd. |
|
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20190212 |