CN109321968A - The laying method of one type single crystal seed - Google Patents

The laying method of one type single crystal seed Download PDF

Info

Publication number
CN109321968A
CN109321968A CN201811376708.1A CN201811376708A CN109321968A CN 109321968 A CN109321968 A CN 109321968A CN 201811376708 A CN201811376708 A CN 201811376708A CN 109321968 A CN109321968 A CN 109321968A
Authority
CN
China
Prior art keywords
single crystal
crystal seed
layer
layer single
splicing seams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811376708.1A
Other languages
Chinese (zh)
Inventor
黄晶晶
张涛
肖贵云
丁云飞
梅坤
姜志兴
叶鹏
金浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Jinko Solar Co Ltd
Jinko Solar Co Ltd
Original Assignee
Zhejiang Jinko Solar Co Ltd
Jinko Solar Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Jinko Solar Co Ltd, Jinko Solar Co Ltd filed Critical Zhejiang Jinko Solar Co Ltd
Priority to CN201811376708.1A priority Critical patent/CN109321968A/en
Publication of CN109321968A publication Critical patent/CN109321968A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/14Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method characterised by the seed, e.g. its crystallographic orientation
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B28/00Production of homogeneous polycrystalline material with defined structure
    • C30B28/04Production of homogeneous polycrystalline material with defined structure from liquids
    • C30B28/06Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

This application discloses the laying methods of a type single crystal seed, and being included in the close laying depth of crucible bottom and seed crystal fusing terminates the identical first layer single crystal seed of leapfrog height;Dislocation type is closely laid with second layer single crystal seed on the first layer single crystal seed, wherein, the splicing seams of the second layer single crystal seed and the splicing seams of the first layer single crystal seed mutually stagger, even if therefore because transport or high temperature cause to generate splicing seams between second layer single crystal seed, the liquid of high temperature melting will not enter the splicing seams between first layer single crystal seed after penetrating the splicing seams between second layer single crystal seed, that is, this laying method can be avoided silicon melt along splicing seams to flow down and cooled and solidified generate polycrystalline, to improve the ratio of efficient monocrystalline silicon piece, and reduce production cost.

Description

The laying method of one type single crystal seed
Technical field
The invention belongs to photovoltaic apparatus manufacturing technology fields, more particularly to the laying method of a type single crystal seed.
Background technique
Current photovoltaic market is higher to the silicon wafer demand of high efficiency, low cost, and polycrystalline cast ingot has the advantage of low cost, but imitates Rate promotion encounters technical bottleneck, and monocrystalline has efficient advantage, but draws higher cost, in view of the foregoing, the casting of class monocrystalline Ingot technology becomes the developing direction of an emphasis.
However, having following problem during existing class monocrystalline ingot casting: as shown in FIG. 1, FIG. 1 is the castings of existing class monocrystalline The schematic diagram of single crystal seed silico briquette shop fixtures during ingot, it is seen then that when carrying out the shop fixtures of single crystal seed silico briquette 102 in crucible 101, It is the state being in close contact between silico briquette and silico briquette, but will appear vibration during transportation, and also can in the high temperature process Thermal expansion, these factors can all make occur splicing seams 103, during high temperature melting, silicon melt between single crystal seed silico briquette 102 Can be along this splicing seams 103 to flowing down, since the temperature of lower part is lower than top, the silicon melt for flowing to lower part can be cooled down Solidification and heterogeneous seeding, cause the region to generate polycrystalline, and resulting defect can reduce the accounting of efficient monocrystalline silicon piece.For Problem above, current main settling mode are to increase seed crystal blocks area to reduce seed crystal splicing regions, or on seed layer Side is laid with one layer of particulate material barrier layer, but since its compactness is relatively poor, finally still generates polycrystalline because of splicing seams, and Single crystal seed draws higher cost, and the process that single crystal seed is fabricated to the dedicated seed crystal blocks of class monocrystalline is more, can not be effective after ingot casting Recycling.
Summary of the invention
To solve the above problems, can be avoided silicon melt edge the present invention provides the laying method of a type single crystal seed Splicing seams to flow down and cooled and solidified generate polycrystalline, to improve the ratio of efficient monocrystalline silicon piece.
The laying method of type single crystal seed provided by the invention, comprising:
Terminate the identical first layer single crystal seed of leapfrog height in the close laying depth of crucible bottom and seed crystal fusing;
Dislocation type is closely laid with second layer single crystal seed on the first layer single crystal seed, wherein the second layer The splicing seams of single crystal seed and the splicing seams of the first layer single crystal seed mutually stagger.
Preferably, in the laying method of above-mentioned class single crystal seed, the first layer single crystal seed with a thickness of 15 millimeters To 25 millimeters.
Preferably, in the laying method of above-mentioned class single crystal seed, the second layer single crystal seed with a thickness of 10 millimeters To 15 millimeters.
Preferably, in the laying method of above-mentioned class single crystal seed, the splicing seams of the second layer single crystal seed with it is described The distance that the splicing seams of first layer single crystal seed are staggered is 5 millimeters to 15 millimeters.
Preferably, in the laying method of above-mentioned class single crystal seed, the first layer single crystal seed and the second layer list The distance between grain of crystallization crystalline substance and crucible medial surface are 20 millimeters to 40 millimeters.
Preferably, in the laying method of above-mentioned class single crystal seed, the first layer single crystal seed and the second layer list The side size range of grain of crystallization crystalline substance is 158 millimeters to 180 millimeters.
Preferably, in the laying method of above-mentioned class single crystal seed, the first layer single crystal seed and the second layer list Grain of crystallization crystalline substance is silicon single crystal seed crystal.
As can be seen from the above description, the laying method of above-mentioned class single crystal seed provided by the invention, due to described first Layer single crystal seed above dislocation type be closely laid with second layer single crystal seed, wherein the splicing seams of the second layer single crystal seed with The splicing seams of the first layer single crystal seed mutually stagger, therefore even if because transport or high temperature cause between second layer single crystal seed Splicing seams are generated, the liquid of high temperature melting will not enter first layer list after penetrating the splicing seams between second layer single crystal seed Grain of crystallization crystalline substance between splicing seams, that is to say, that this laying method can be avoided silicon melt along splicing seams to flow down and cool down Solidification generates polycrystalline, to improve the ratio of efficient monocrystalline silicon piece, and reduces production cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the schematic diagram of single crystal seed silico briquette shop fixtures during existing class monocrystalline ingot casting;
Fig. 2 is the schematic diagram of the laying method of type single crystal seed provided by the present application;
Fig. 3 is that class single crystal seed provided by the present application is laid with status diagram.
Specific embodiment
Core of the invention is to provide the laying method of a type single crystal seed, can be avoided silicon melt along splicing seams to It flows down and cooled and solidified generation polycrystalline, to improve the ratio of efficient monocrystalline silicon piece, and reduces production cost.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
The embodiment of the laying method of type single crystal seed provided by the present application is as shown in Fig. 2, Fig. 2 provides for the application A type single crystal seed laying method schematic diagram, and combine Fig. 3, Fig. 3 be class single crystal seed provided by the present application be laid with Status diagram, this method comprises the following steps:
S1: terminate the identical first layer monocrystalline seed of leapfrog height in the close laying depth in 201 bottom of crucible and seed crystal fusing Crystalline substance 202;
It should be noted that class single crystal seed growth technique can play the role of seeding using single crystal seed, because It is first laid with first layer single crystal seed 202 in this step, forms splicing seams 203, and class single crystal seed growth technique therebetween It is a kind of half process of smelting, needs to retain one layer of bottom seed crystal and be not melted to carry out seeding, in actual long brilliant control process In, by melting stage leapfrog to crystal growing stage, solid liquid interface the stable a certain height in seed crystal and starts upward afterwards for a period of time Crystallization, to complete seed crystal induction, leapfrog height mentioned herein is the height for being used as first layer single crystal seed 202 in the step Degree, such first layer single crystal seed would not be melted during entire long brilliant, thus can be by it after long crystalline substance terminates It takes out and is recycled, as first layer single crystal seed used in next furnace class crystal growth, so as to reduce production Cost.
S2: dislocation type is closely laid with second layer single crystal seed 204 on first layer single crystal seed 202, wherein the second layer The splicing seams 205 of single crystal seed 204 are mutually staggered with the splicing seams 203 of first layer single crystal seed 202.
Second layer single crystal seed 204 and 202 staggered of first layer single crystal seed are placed in the step, that is to say, that phase There is no between adjacent first layer single crystal seed 202 below for splicing seams 205 between adjacent second layer single crystal seed 204 Splicing seams 203 also can only touch accordingly even when melt is flowed down from the splicing seams 205 between second layer single crystal seed 204 The upper surface of one layer of single crystal seed 202, without continue on the splicing seams 203 between first layer single crystal seed 202 to flow down, It is condensed so as to avoid this part melt and generates polycrystalline and have an adverse effect to finally obtained crystal quality.It additionally needs Bright, this embodiment is illustrated just with the placement of two layers single crystal seed staggered, actually can also continue to the More layers single crystal seed is arranged in the upper surface of two layers of single crystal seed, and still the splicing seams of the single crystal seed of adjacent two layers are staggered and set It sets, melt can more perfectly be avoided to flow into the splicing seams between first layer single crystal seed.
As can be seen from the above description, the laying method of above-mentioned class single crystal seed provided by the present application, due in first layer list The brilliant dislocation type above of grain of crystallization is closely laid with second layer single crystal seed, wherein the splicing seams and first layer list of second layer single crystal seed The splicing seams of grain of crystallization crystalline substance mutually stagger, therefore even if because transport or high temperature cause to generate splicing seams between second layer single crystal seed, The liquid of high temperature melting will not enter between first layer single crystal seed after penetrating the splicing seams between second layer single crystal seed Splicing seams, that is to say, that this laying method can be avoided silicon melt along splicing seams to flow down and cooled and solidified generate it is more Crystalline substance, to improve the ratio of efficient monocrystalline silicon piece.
In a preferred embodiment, first layer single crystal seed with a thickness of 15 millimeters to 25 millimeters, need to illustrate Be, in the prior art in conventional scheme, only with one layer of single crystal seed, thickness general control at 25 millimeters to 50 millimeters, And actual (tube) length it is brilliant during can all control its seed crystal and retain 15 millimeters away from crucible bottom surface to 25 millimeters of height, that is, from crucible bottom Single crystal seed more than face within the scope of 15 millimeters to 25 millimeters can be retained after long brilliant, such technics comparing at It is ripe, and the present embodiment is the technique based on this maturation, since being provided with two layers of single crystal seed, then lower part can will be located at First layer single crystal seed height be set as 15 millimeters to 25 millimeters, will not all be melted during every vice-minister is brilliant in this way, thus After ingot casting, silico briquette product examine truncation, silico briquette goes portion to carry out secondary truncation, control is individually truncated in the single crystal seed of lower part Cleaning, cleaning, which finishes, carries out next round throwing furnace use, reduces production cost.
Further, the thickness of second layer single crystal seed can be preferably 10 millimeters to 15 millimeters, and this thickness can expire The demand of sufficient seeding technique, and cost is relatively low, can't carry out more benefits but to seeding process bands if thickness is bigger Cost is increased without foundation.
In a specific embodiment, the splicing seams of second layer single crystal seed and the splicing seams of first layer single crystal seed are wrong The distance opened is 5 millimeters to 15 millimeters, it should be noted that this distance being staggered is enough to avoid melt while passing through two layers of list The splicing seams of grain of crystallization crystalline substance, specifically, be exactly during high temperature melting melt along the splicing seams between second layer single crystal seed It flows down, is blocked later by first layer single crystal seed, since thickness and the seed crystal fusing of first layer single crystal seed terminate leapfrog height Degree is consistent, therefore the melt between splicing seams can be completely melted, and can not play seeding effect, thus will not be as in the prior art It generates polycrystalline like that and has an adverse effect to end product quality.
In another embodiment, first layer single crystal seed and the distance between second layer single crystal seed and crucible medial surface For that can be preferably 20 millimeters to 40 millimeters, what needs to be explained here is that, during ingot casting, earthenware is squeezed since melt thermally expands Crucible may have the risk of overflow, so the single crystal seed being laid with cannot directly be contacted with crucible side, and need to retain centainly Gap, single crystal seed itself have certain size, will generate gap after laying between crucible wall, in addition, for different Also there is certain difference in crucible, the gap.
Specifically, the side size range of first layer single crystal seed and second layer single crystal seed is 158 millimeters to 180 millimeters, and And first layer single crystal seed and second layer single crystal seed all can be silicon single crystal seed crystals.
In conclusion above-described embodiment shop fixtures by way of the double-deck staggered superposition, avoids in conventional scheme fusion process, The problem of silicon melt goes out to permeate from splicing seams, and last heterogeneous seeding forms polycrystalline;On the other hand, the laying of the double-deck seed crystal, lower layer Seed crystal is hit corrosion by silicon melt and is reduced, and seed crystal performance retains relatively preferable, may be reused, and reduces production cost.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (7)

1. the laying method of a type single crystal seed characterized by comprising
Terminate the identical first layer single crystal seed of leapfrog height in the close laying depth of crucible bottom and seed crystal fusing;
Dislocation type is closely laid with second layer single crystal seed on the first layer single crystal seed, wherein the second layer monocrystalline The splicing seams of seed crystal and the splicing seams of the first layer single crystal seed mutually stagger.
2. the laying method of class single crystal seed according to claim 1, which is characterized in that the first layer single crystal seed With a thickness of 15 millimeters to 25 millimeters.
3. the laying method of class single crystal seed according to claim 1, which is characterized in that the second layer single crystal seed With a thickness of 10 millimeters to 15 millimeters.
4. the laying method of class single crystal seed according to claim 1, which is characterized in that the second layer single crystal seed Splicing seams and the splicing seams of the first layer single crystal seed are 5 millimeters to 15 millimeters at a distance from being staggered.
5. the laying method of class single crystal seed according to claim 1-4, which is characterized in that the first layer list Grain of crystallization crystalline substance and the distance between the second layer single crystal seed and crucible medial surface are 20 millimeters to 40 millimeters.
6. the laying method of class single crystal seed according to claim 5, which is characterized in that the first layer single crystal seed and The side size range of the second layer single crystal seed is 158 millimeters to 180 millimeters.
7. the laying method of class single crystal seed according to claim 1-4, which is characterized in that the first layer list Grain of crystallization crystalline substance and the second layer single crystal seed are silicon single crystal seed crystal.
CN201811376708.1A 2018-11-19 2018-11-19 The laying method of one type single crystal seed Pending CN109321968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811376708.1A CN109321968A (en) 2018-11-19 2018-11-19 The laying method of one type single crystal seed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811376708.1A CN109321968A (en) 2018-11-19 2018-11-19 The laying method of one type single crystal seed

Publications (1)

Publication Number Publication Date
CN109321968A true CN109321968A (en) 2019-02-12

Family

ID=65258125

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811376708.1A Pending CN109321968A (en) 2018-11-19 2018-11-19 The laying method of one type single crystal seed

Country Status (1)

Country Link
CN (1) CN109321968A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111647941A (en) * 2020-06-01 2020-09-11 苏州阿特斯阳光电力科技有限公司 Seed crystal laying method, preparation method of mono-like silicon ingot and mono-like silicon ingot prepared by same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105568365A (en) * 2016-02-03 2016-05-11 江西赛维Ldk太阳能高科技有限公司 Seed crystal laying method and crystalline silicon and preparation method thereof
CN105603521A (en) * 2016-02-03 2016-05-25 江西赛维Ldk太阳能高科技有限公司 Seed crystal laying method, preparation method of monocrystalline silicon-like ingot and monocrystalline silicon-like piece
CN105603507A (en) * 2016-02-03 2016-05-25 江西赛维Ldk太阳能高科技有限公司 Seed crystal laying method, preparation method of monocrystalline silicon-like ingot and monocrystalline silicon-like piece
CN107523858A (en) * 2017-07-26 2017-12-29 晶科能源有限公司 A kind of seed crystal laying method, the casting method of class monocrystal silicon and class monocrystalline silicon piece

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105568365A (en) * 2016-02-03 2016-05-11 江西赛维Ldk太阳能高科技有限公司 Seed crystal laying method and crystalline silicon and preparation method thereof
CN105603521A (en) * 2016-02-03 2016-05-25 江西赛维Ldk太阳能高科技有限公司 Seed crystal laying method, preparation method of monocrystalline silicon-like ingot and monocrystalline silicon-like piece
CN105603507A (en) * 2016-02-03 2016-05-25 江西赛维Ldk太阳能高科技有限公司 Seed crystal laying method, preparation method of monocrystalline silicon-like ingot and monocrystalline silicon-like piece
CN107523858A (en) * 2017-07-26 2017-12-29 晶科能源有限公司 A kind of seed crystal laying method, the casting method of class monocrystal silicon and class monocrystalline silicon piece

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111647941A (en) * 2020-06-01 2020-09-11 苏州阿特斯阳光电力科技有限公司 Seed crystal laying method, preparation method of mono-like silicon ingot and mono-like silicon ingot prepared by same
CN111647941B (en) * 2020-06-01 2022-08-12 苏州阿特斯阳光电力科技有限公司 Seed crystal laying method, preparation method of mono-like silicon ingot and mono-like silicon ingot prepared by same

Similar Documents

Publication Publication Date Title
CN103952756B (en) Adhesion joining method and the crucible for casting ingots of seed crystal for one kind monocrystalline silicon ingot casting
CN103060892A (en) Seed crystal splicing method used for monocrystal-like silicone cast ingot
CN103215633A (en) Method for casting ingots by polycrystalline silicon
CN104032368A (en) Preparation method of high-efficiency polycrystalline silicon ingots
TWI449770B (en) Verfahren zur herstellung eines einkristalls aus silizium unter verwendung von geschmolzenem granulat
CN102260903A (en) Method for growing thin silicon crystals
TW201247948A (en) Method of fabricating crystalline silicon ingot
CN102644108A (en) Charging method for growing silicon crystal by using casting process and process for growing silicon crystal
CN109385662A (en) The preparation method and class monocrystalline silicon piece of a kind of laying method of seed crystal, class monocrystal silicon
CN109137067A (en) A kind of polycrystal silicon ingot pouring device and casting method
CN109321968A (en) The laying method of one type single crystal seed
CN110295391A (en) The preparation method of crystalline silicon ingot
CN107747121A (en) The laying method of one species single crystal seed
JP6121422B2 (en) System with additional lateral heat source for making crystalline materials by directional solidification
CN205474097U (en) A heat exchange platform for growing accurate single crystal
CN104862778A (en) Preparation method of polycrystalline silicon ingot, polycrystalline silicon ingot and polycrystalline silicon wafer
KR20110052501A (en) Method for producing a single crystal composed of silicon by remelting granules
CN104294358B (en) The preparation method and polycrystal silicon ingot of a kind of polycrystal silicon ingot
CN220149707U (en) Silicon nitride coating structure suitable for casting monocrystalline silicon
CN105586632A (en) Mono-like silicon ingot casting technology
CN106591936B (en) A kind of loading method of depressed class seed of single crystal silicon fusing control
CN103088418B (en) Crystalline silicon ingot and its making method
JP2003267717A (en) Manufacturing equipment and manufacturing method for silicon ingot
EP1085112A2 (en) Method of fabricating a single crystal
CN211339742U (en) Seed crystal layer structure for crystalline silicon ingot

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20190212