CN109321881A - A kind of improved vacuum coating equipment cavity cooling device of structure - Google Patents
A kind of improved vacuum coating equipment cavity cooling device of structure Download PDFInfo
- Publication number
- CN109321881A CN109321881A CN201811191895.6A CN201811191895A CN109321881A CN 109321881 A CN109321881 A CN 109321881A CN 201811191895 A CN201811191895 A CN 201811191895A CN 109321881 A CN109321881 A CN 109321881A
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- China
- Prior art keywords
- water
- circular groove
- cooling device
- heat dissipation
- vacuum coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
The present invention is suitable for coating machine technical field of auxiliary equipment, provide a kind of improved vacuum coating equipment cavity cooling device of structure, including coating machine cavity, the heat conducting sleeve that is socketed on coating machine cavity outer fringe surface and twist attach the heat dissipation pipe being set on heat conducting sleeve, heat dissipation pipe lower end is provided with the circular groove that catchments, catch basin right end is connected with water pump and refrigeration machine, heat dissipation pipe upper end is provided with into water circular groove, enter water circular groove right end and water pump is connected by return pipe, enter water circular groove left end and is provided with water inlet, right end and water pump junction are provided with discharge outlet, water pump connects external controller and power supply with refrigerator, water is freezed by refrigeration machine, cold water passes through heat dissipation pipe, the endothermic effect for heat conducting sleeve is greatly reinforced, so that cooling is rapider；The heat dissipation pipe is twist arranged so that flowing time of the cooling water on heat conducting sleeve increases, and setting protective plate protects heat dissipation pipe and coating machine cavity.
Description
Technical field
The invention belongs to coating machine technical field of auxiliary equipment more particularly to a kind of improved vacuum coating equipment cavitys of structure
Cooling device.
Background technique
Currently, vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, many kinds are specifically included
Class, including vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition are largely divided into steaming
Two kinds of hair and sputtering.The use of coating machine can effectively increase plating membrane efficiency, so that industrial efficiency is available to be had
The increase of effect, however vacuum coating equipment be when in use since high-frequency running can generate more heat, in this way to equipment
Safety can generate large effect.
It can play the role of basic cooling down when in use for the cooling device of vacuum coating equipment in the prior art,
However the technical deficiency and defect of some aspects are remained in actual use, therefore, the prior art also needs to improve.
Summary of the invention
The present invention provides a kind of improved vacuum coating equipment cavity cooling device of structure, it is intended to solve vacuum in the prior art
The bad problem of coating machine cavity heat dissipation effect.
The invention is realized in this way a kind of improved vacuum coating equipment cavity cooling device of structure, including plated film machine cavity
Body, the heat conducting sleeve being socketed on the coating machine cavity outer fringe surface and twist attaching are set on heat conducting sleeve
Heat dissipation pipe, the heat dissipation pipe lower end are provided with the circular groove that catchments, and the catch basin right end is connected with water pump and refrigeration machine, described
Heat dissipation pipe upper end is provided with into water circular groove, it is described enter water circular groove right end the water pump connected by return pipe, it is described enter water circle
Slot left end is provided with water inlet, and right end and the water pump junction are provided with discharge outlet, and the water pump connects external with refrigerator
Controller and power supply.
Further, the section of the circular groove that catchments is in concave character type, and bottom surface is tilted down close to water pump one end downward.
Further, the heat dissipation pipe is evenly distributed with three along heat conducting sleeve axis.
Further, enter the bottom of water circular groove described in the connection of the heat dissipation pipe top, three heat dissipation pipes with
It is described enter water circular groove junction be provided with the first solenoid valve, three the first solenoid valves are electrically connected connect external controller respectively.
Further, the heat dissipation pipe is square.
Further, the heat dissipation pipe is fixedly connected with the heat conducting sleeve by heat-conducting glue.
Further, the heat dissipation pipe is provided with protective sleeve, the protective sleeve bottom far from thermal conducting sleeve one end
Portion is fixedly connected with the circular groove outer fringe surface that catchments.
Further, the protective sleeve, which is located at the water inlet and discharge outlet, is provided with opening.
Further, the water inlet and discharge outlet are provided with valve.
Further, the refrigeration machine is set to the left side of the heat conducting sleeve bottom, the input terminal of the refrigeration machine
By water pipe connect described in catchment the right end of circular groove, catchment circular groove and water pipe junction be provided with second solenoid valve, described second
Solenoid valve is electrically connected external controller, and output end connects the water pump to entering water circular groove.
Advantageous effects of the invention: water freezes by refrigeration machine, endothermic effect has been greatly reinforced, so that
Cool down rapider；The heat dissipation pipe is twist arranged so that flowing time of the cooling water on heat conducting sleeve increases；Pass through
The contact endotherm area that three heat dissipation pipes increase heat exchange is set, cooling effect is increased；Protective plate is set, heat dissipation pipe is protected
With coating machine cavity.
Detailed description of the invention
Fig. 1 is a kind of structural scheme of mechanism of the improved vacuum coating equipment cavity cooling device of structure provided by the invention.
Fig. 2 is a kind of improved vacuum coating equipment cavity cooling device heat dissipation pipe's structural representation of structure provided by the invention
Figure.
Fig. 3 is a kind of main view of the improved vacuum coating equipment cavity cooling device of structure provided by the invention.
Fig. 4 is that a kind of the catchment mechanism of circular groove of the improved vacuum coating equipment cavity cooling device of structure provided by the invention shows
It is intended to.
In figure: 1- coating machine cavity；2- heat conducting sleeve；3- heat dissipation pipe；4- catchments circular groove；5- water pump；6- refrigeration machine；7-
Enter water circular groove；8- return pipe；9- water inlet；10- discharge outlet；11- protective sleeve.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As Figure 1-Figure 4, the improved vacuum coating equipment cavity cooling device of a kind of structure, including coating machine cavity 1, set
It connects the heat conducting sleeve 2 on 1 outer fringe surface of coating machine cavity and twist attaches the water of radiation being set on heat conducting sleeve 2
Pipe 3,3 lower end of heat dissipation pipe are provided with the circular groove 4 that catchments, and 4 right end of catch basin is connected with water pump 5 and refrigeration machine 6, on heat dissipation pipe 3
End is provided with into water circular groove 7, is entered 4 right end of water circular groove by return pipe 8 and is connected water pump 5, enters 4 left end of water circular groove and be provided with water inlet
9, right end and 5 junction of water pump are provided with discharge outlet 10, and water pump 5 and refrigerator 6 connect external controller and power supply.
Catchment circular groove 4 section in concave character type, bottom surface tilts down close to 5 one end of water pump downward, makes to catchment in circular groove 4
Water flows to right end by gravitation；Heat dissipation pipe 3 is evenly distributed with three along 2 axis of heat conducting sleeve；3 top of heat dissipation pipe connect into
The bottom of water circular groove 7, three heat dissipation pipes 3 and enters 7 junction of water circular groove and is provided with the first solenoid valve, three the first solenoid valves
It is electrically connected respectively and connects external controller；Heat dissipation pipe 3 is square, and increases the contact area with heat conducting sleeve 2, increases heat dissipation capacity；
Heat dissipation pipe 3 is fixedly connected with heat conducting sleeve by heat-conducting glue；Heat dissipation pipe 3 is provided with protective jacket far from 2 one end of thermal conducting sleeve
Cylinder 11,11 bottom of protective sleeve is fixedly connected with 4 outer fringe surface of circular groove that catchments；Protective sleeve 11 is located at water inlet 9 and discharge outlet 10
Place is provided with opening；Water inlet 9 and discharge outlet 10 are provided with valve；Refrigeration machine 6 is set to the left side of 2 bottom of heat conducting sleeve,
The input terminal of refrigeration machine 6 connects the right end for the circular groove 4 that catchments by water pipe, and the circular groove 4 that catchments is provided with the second electricity with water pipe junction
Magnet valve, second solenoid valve are electrically connected external controller, and output end connects water pump 5 to entering water circular groove 7.
Concrete operating principle of the invention: in use, passing through external controller to the water supply of circular groove 4 of catchmenting by water inlet
Second solenoid valve is controlled to open, water flow system cooler freezes, while by water pump 5 by cold water into cross return pipe 8 flow into
Water circular groove 7, external controller need to open and close the first solenoid valve number according to user, and cold water is twist flowed through along heat dissipation pipe 3
Heat conducting sleeve 2 radiates to guide sleeve guide sleeve 2, flow to the circular groove 4 that catchments after cold water heat absorption, freezes again, circuit sequentially use, and three
Root heat dissipation pipe greatly strengthens heat dissipation effect.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of improved vacuum coating equipment cavity cooling device of structure, which is characterized in that including coating machine cavity, be socketed in institute
It states the heat conducting sleeve on coating machine cavity outer fringe surface and twist attaches the heat dissipation pipe being set on heat conducting sleeve, institute
It states heat dissipation pipe lower end and is provided with the circular groove that catchments, the catch basin right end is connected with water pump and refrigeration machine, on the heat dissipation pipe
End is provided with into water circular groove, it is described enter water circular groove right end the water pump connected by return pipe, it is described enter water circular groove left end be arranged
There is water inlet, right end and the water pump junction are provided with discharge outlet, and the water pump connects external controller and electricity with refrigerator
Source.
2. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the circle that catchments
The section of slot is in concave character type, and bottom surface is tilted down close to water pump one end downward.
3. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the water of radiation
Pipe is evenly distributed with three along heat conducting sleeve axis.
4. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the water of radiation
Enter the bottom of water circular groove described in the connection of tube top end, three heat dissipation pipes and it is described enter water circular groove junction be provided with first
Solenoid valve, three the first solenoid valves are electrically connected connect external controller respectively.
5. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the water of radiation
Pipe is square.
6. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the water of radiation
Pipe is fixedly connected with the heat conducting sleeve by heat-conducting glue.
7. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the water of radiation
It manages and thermal conducting sleeve one end is provided with protective sleeve, the protective sleeve bottom is fixedly connected with the circular groove outer rim table that catchments
Face.
8. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the protective jacket
Cylinder, which is located at the water inlet and discharge outlet, is provided with opening.
9. the improved vacuum coating equipment cavity cooling device of structure as claimed in claim 8, which is characterized in that the water inlet
Discharge outlet is provided with valve.
10. the improved vacuum coating equipment cavity cooling device of structure as described in claim 1, which is characterized in that the refrigeration
Machine is set to the left side of the heat conducting sleeve bottom, the right side that the input terminal of the refrigeration machine passes through the circular groove that catchments described in water pipe connection
End, the circular groove that catchments are provided with second solenoid valve with water pipe junction, and the second solenoid valve is electrically connected external controller, output end
The water pump is connected to entering water circular groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811191895.6A CN109321881A (en) | 2018-10-12 | 2018-10-12 | A kind of improved vacuum coating equipment cavity cooling device of structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811191895.6A CN109321881A (en) | 2018-10-12 | 2018-10-12 | A kind of improved vacuum coating equipment cavity cooling device of structure |
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| Publication Number | Publication Date |
|---|---|
| CN109321881A true CN109321881A (en) | 2019-02-12 |
Family
ID=65262419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811191895.6A Pending CN109321881A (en) | 2018-10-12 | 2018-10-12 | A kind of improved vacuum coating equipment cavity cooling device of structure |
Country Status (1)
| Country | Link |
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| CN (1) | CN109321881A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831609A (en) * | 2010-05-14 | 2010-09-15 | 西安电子科技大学 | Circulating cooling water system of diffusion pump of vacuum coater |
| CN104989679A (en) * | 2015-07-14 | 2015-10-21 | 辽宁真龙真空设备制造有限公司 | Large-caliber high vacuum oil diffusion pump |
| CN206357613U (en) * | 2016-12-29 | 2017-07-28 | 东莞市柏力有机硅科技有限公司 | A kind of cooling water conveying equipment of silica gel production |
| CN206706186U (en) * | 2017-01-22 | 2017-12-05 | 台州豪达机电有限公司 | A kind of vacuum coating equipment |
| CN207498463U (en) * | 2017-11-03 | 2018-06-15 | 湖北环宇车灯有限公司 | A kind of coating machine circulating water automatic control device |
| CN207793406U (en) * | 2018-01-29 | 2018-08-31 | 苏州六三二八光电科技有限公司 | Vacuum coating equipment cooling device |
| CN207845751U (en) * | 2018-02-09 | 2018-09-11 | 深圳市提姆光电科技有限公司 | A kind of vacuum coating equipment cooling device |
| CN207904351U (en) * | 2018-03-13 | 2018-09-25 | 深圳市提姆光电科技有限公司 | A kind of vacuum coating equipment quickly cooling device |
-
2018
- 2018-10-12 CN CN201811191895.6A patent/CN109321881A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831609A (en) * | 2010-05-14 | 2010-09-15 | 西安电子科技大学 | Circulating cooling water system of diffusion pump of vacuum coater |
| CN104989679A (en) * | 2015-07-14 | 2015-10-21 | 辽宁真龙真空设备制造有限公司 | Large-caliber high vacuum oil diffusion pump |
| CN206357613U (en) * | 2016-12-29 | 2017-07-28 | 东莞市柏力有机硅科技有限公司 | A kind of cooling water conveying equipment of silica gel production |
| CN206706186U (en) * | 2017-01-22 | 2017-12-05 | 台州豪达机电有限公司 | A kind of vacuum coating equipment |
| CN207498463U (en) * | 2017-11-03 | 2018-06-15 | 湖北环宇车灯有限公司 | A kind of coating machine circulating water automatic control device |
| CN207793406U (en) * | 2018-01-29 | 2018-08-31 | 苏州六三二八光电科技有限公司 | Vacuum coating equipment cooling device |
| CN207845751U (en) * | 2018-02-09 | 2018-09-11 | 深圳市提姆光电科技有限公司 | A kind of vacuum coating equipment cooling device |
| CN207904351U (en) * | 2018-03-13 | 2018-09-25 | 深圳市提姆光电科技有限公司 | A kind of vacuum coating equipment quickly cooling device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190212 |
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| RJ01 | Rejection of invention patent application after publication |