CN109280877A - The preparation method and AZO target of AZO target - Google Patents
The preparation method and AZO target of AZO target Download PDFInfo
- Publication number
- CN109280877A CN109280877A CN201811349100.XA CN201811349100A CN109280877A CN 109280877 A CN109280877 A CN 109280877A CN 201811349100 A CN201811349100 A CN 201811349100A CN 109280877 A CN109280877 A CN 109280877A
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- Prior art keywords
- azo
- preparation
- target
- sprayed
- raw material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
The invention belongs to field of new materials, and in particular to a kind of preparation method of AZO target, comprising: prepare AZO sprayed on material by AZO raw material；And AZO target is made by spraying method in AZO sprayed on material.AZO target is made by preparation AZO sprayed on material and two step of spraying process in the preparation method of the application, improves the uniformity of target, also simplifies the production technology of target, improve production efficiency, saved production cost.
Description
Technical field
The present invention relates to field of new materials, and in particular to a kind of preparation method and AZO target of AZO target.
Background technique
Current AZO target preparation method is to mix raw material addition adhesive, and send into blender and carry out
It carries out degreasing sintered after stirring, and be easy to cause being unevenly distributed for each component during the preparation process, influence the quality of target
And using effect.
Summary of the invention
The object of the present invention is to provide a kind of preparation method of AZO target and AZO targets.
In order to solve the above-mentioned technical problems, the present invention provides a kind of preparation methods of AZO target, comprising: passes through AZO original
Material preparation AZO sprayed on material；And AZO target is made by spraying method in AZO sprayed on material.
Further, it includes: 95-99 parts of zinc oxide that the AZO raw material forms by weight；1-5 parts of aluminium oxide.
Further, the method for preparing AZO sprayed on material includes: that binder is added in AZO raw material, carries out mixing and stirs
AZO slurry is formed after mixing；It is passed through pressure-air in AZO slurry, and carries out pressurized treatments；Centrifugal treating is carried out to AZO slurry；
Spray drying forms AZO particle；Ungrease treatment is carried out to AZO particle；And vacuum-sintering, obtain AZO sprayed on material.
Further, the partial size of the AZO particle is 45~75 μm.
Further, the method for preparing AZO sprayed on material includes: to be heated after binder is added in AZO raw material,
Form AZO solid；Ungrease treatment is carried out to AZO solid；And sintering, crushing, obtain AZO sprayed on material.
Further, the particle diameter of the AZO sprayed on material is 45~75 μm.
Further, the spraying method is plasma spraying；The plasma spraying equipment parameter wherein used includes: in pipe
Water temperature is 90~120 DEG C, and reversion speed is 100~300R/min, and gun body movement speed is
0.1~2m/min.
Further, when carrying out plasma spraying, the AZO target is suitable for through the cooling combination cooling with exhausting in surface
Mode is cooled down.
On the other hand, the present invention also provides a kind of target AZO raw materials, and composition includes: zinc oxide 95- by weight
99；1-5 parts of oxidation.
Another aspect, the present invention also provides a kind of AZO target, the AZO target is suitable for by preparing as previously described
Method preparation.It wherein include zinc oxide 95-98 parts in AZO target；2-5 parts of aluminium oxide.
The invention has the advantages that preparation method of the invention passes through preparation AZO sprayed on material and two step of spraying process
AZO target is made, improves the uniformity of target, also simplifies the production technology of target, improves production efficiency, saved life
Produce cost；By controlling the partial size of AZO sprayed on material, adjustable spraying effect further promotes the using effect of target；Together
When also shorten the manufacturing time of target, improve production efficiency, be easy to cause target to be unevenly distributed when solving the preparation of AZO target
Even and low manufacture efficiency problem.
Specific embodiment
Embodiment 1
The present embodiment 1 provides a kind of preparation method of AZO target, and the preparation method includes the following steps:
Step 1: the zinc oxide of 98kg is mixed with the aluminium oxide of 2kg, forms AZO raw material；
Step 2: being added binder in AZO raw material, and AZO slurry is formed after being mixed；
Step 3: it is passed through pressure-air in AZO slurry, and carries out pressurized treatments；
Step 4: AZO slurry is sent into supercentrifuge and carries out centrifugal treating；
Step 5: AZO slurry is spray-dried, and obtains AZO particle of the partial size at 55 μm；
Step 6: ungrease treatment is carried out to AZO particle；
Step 7: being sintered under vacuum condition, obtains AZO sprayed on material；
Step 8: plasma spraying is carried out using plasma spraying equipment, obtains AZO target finished product.Wherein, plasma spray is coated with
Water temperature is 95 DEG C in standby pipe, and reversion speed is 200R/min, and gun body movement speed is 1.2m/min；And when plasma spraying
AZO target is cooled down using the combination type of cooling that surface is cooling and exhausting is cooling.
Embodiment 2
The present embodiment 2 provides a kind of preparation method of AZO target, and the preparation method includes the following steps:
Step 1: the zinc oxide of 98kg is mixed with the aluminium oxide of 2kg, forms AZO raw material；
Step 2: being heated after binder is added in AZO raw material, forms AZO solid；
Step 3: ungrease treatment is carried out to AZO solid；
Step 4: AZO solid is sent into sintering furnace and is sintered；
Step 5: the AZO solid after will be sintered is sent into pulverizer the little particle for being broken into that partial size is 45 μm, obtains spraying material
Material；；
Step 6: plasma spraying is carried out using plasma spraying equipment, obtains AZO target finished product.Wherein, plasma spray is coated with
Water temperature is 100 DEG C in standby pipe, and reversion speed is 100R/min, and gun body movement speed is 0.2m/min；And when plasma spraying
AZO target is cooled down using the combination type of cooling that surface is cooling and exhausting is cooling.
Embodiment 3
The present embodiment 3 provides a kind of preparation method of AZO target, and the preparation method includes the following steps:
Step 1: being crushed using the problematic discarded target of shape, obtains the AZO sprayed on material that partial size is 75 μm；
Step 2: plasma spraying is carried out using plasma spraying equipment, obtains AZO target finished product.Wherein, plasma spray is coated with
Water temperature is 100 DEG C in standby pipe, and reversion speed is 100R/min, and gun body movement speed is 0.2m/min；And when plasma spraying
AZO target is cooled down using the combination type of cooling that surface is cooling and exhausting is cooling.
Embodiment 4
The preparation method of the application is by spraying AZO raw material proportioning (mass ratio of zinc oxide and aluminium oxide), AZO particle or AZO
It applies the factors such as the particle of material, the parameter of plasma spraying equipment to be probed into, passes through preparation AZO sprayed on material and spraying process
The mode combined improves the homogeneity of ingredients of AZO target, while also improving production efficiency.In addition, AZO sprayed on material is logical
It crosses spraying method and AZO target is made, the flatness of target material surface can also be improved, further increase target quality.As space is limited,
Some embodiments are only only listed in embodiment 1-3, the major parameter of other embodiment is as shown in table 1, specific real
Process is applied referring to associated description in embodiment 1-3.
Taking the above-mentioned ideal embodiment according to the present invention as inspiration, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.
Claims (10)
1. a kind of preparation method of AZO target characterized by comprising
AZO sprayed on material is prepared by AZO raw material；And
AZO target is made by spraying method in AZO sprayed on material.
2. preparation method according to claim 1, which is characterized in that
It includes: 95-98 parts of zinc oxide that the AZO raw material forms by weight；2-5 parts of aluminium oxide.
3. preparation method according to claim 1 or 2, which is characterized in that
The method for preparing AZO sprayed on material includes:
Binder is added in AZO raw material, forms AZO slurry after being mixed；
It is passed through pressure-air in AZO slurry, and carries out pressurized treatments；
Centrifugal treating is carried out to AZO slurry；
Spray drying forms AZO particle；
Ungrease treatment is carried out to AZO particle；And
Vacuum-sintering obtains AZO sprayed on material.
4. preparation method according to claim 3, which is characterized in that
The partial size of the AZO particle is 45 ~ 75 μm.
5. preparation method according to claim 1 or 2, which is characterized in that
The method for preparing AZO sprayed on material includes:
It is heated after binder is added in AZO raw material, forms AZO solid；
Ungrease treatment is carried out to AZO solid；And
Sintering crushes, and obtains AZO sprayed on material.
6. preparation method according to claim 5, which is characterized in that
The particle diameter of the AZO sprayed on material is 45 ~ 75 μm.
7. preparation method according to claim 1, which is characterized in that
The spraying method is plasma spraying；Wherein
The plasma spraying equipment parameter used includes: that for water temperature for 90 ~ 120 DEG C, reversion speed is 100 ~ 300R/min, gun body in pipe
Movement speed is 0.1 ~ 2m/min.
8. preparation method according to claim 7, which is characterized in that
When carrying out plasma spraying, the AZO target is suitable for carrying out by the combination that surface is cooling and exhausting is cooling cold
But.
9. a kind of target AZO raw material, which is characterized in that composition includes: by weight
95-99 parts of zinc oxide；2-5 parts of aluminium oxide.
10. a kind of AZO target, which is characterized in that
The AZO target is suitable for preparing by preparation method as described in claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811349100.XA CN109280877A (en) | 2018-11-13 | 2018-11-13 | The preparation method and AZO target of AZO target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811349100.XA CN109280877A (en) | 2018-11-13 | 2018-11-13 | The preparation method and AZO target of AZO target |
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| Publication Number | Publication Date |
|---|---|
| CN109280877A true CN109280877A (en) | 2019-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811349100.XA Pending CN109280877A (en) | 2018-11-13 | 2018-11-13 | The preparation method and AZO target of AZO target |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102134702A (en) * | 2010-10-22 | 2011-07-27 | 迟伟光 | Method for preparing AZO powder and flat and rotary targets by spray drying process |
| CN102286717A (en) * | 2011-09-01 | 2011-12-21 | 基迈克材料科技（苏州）有限公司 | Cylindrical large-area film coating target prepared through plasma spray coating and method |
| CN102924076A (en) * | 2012-11-13 | 2013-02-13 | 漳州市合纵镀膜材料科技有限公司 | High-density AZO (aluminum-doped ZnO) target and preparation method thereof |
| CN102942363A (en) * | 2012-11-22 | 2013-02-27 | 国家钽铌特种金属材料工程技术研究中心 | Method for preparing AZO target by powdery slurry pouring |
| CN105349951A (en) * | 2015-11-03 | 2016-02-24 | 基迈克材料科技（苏州）有限公司 | Method for preparing zinc alloy oxide target through plasma spraying process |
-
2018
- 2018-11-13 CN CN201811349100.XA patent/CN109280877A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102134702A (en) * | 2010-10-22 | 2011-07-27 | 迟伟光 | Method for preparing AZO powder and flat and rotary targets by spray drying process |
| CN102286717A (en) * | 2011-09-01 | 2011-12-21 | 基迈克材料科技（苏州）有限公司 | Cylindrical large-area film coating target prepared through plasma spray coating and method |
| CN102924076A (en) * | 2012-11-13 | 2013-02-13 | 漳州市合纵镀膜材料科技有限公司 | High-density AZO (aluminum-doped ZnO) target and preparation method thereof |
| CN102942363A (en) * | 2012-11-22 | 2013-02-27 | 国家钽铌特种金属材料工程技术研究中心 | Method for preparing AZO target by powdery slurry pouring |
| CN105349951A (en) * | 2015-11-03 | 2016-02-24 | 基迈克材料科技（苏州）有限公司 | Method for preparing zinc alloy oxide target through plasma spraying process |
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Application publication date: 20190129 |
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