CN109273842A - The phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure - Google Patents

The phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure Download PDF

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Publication number
CN109273842A
CN109273842A CN201811081682.8A CN201811081682A CN109273842A CN 109273842 A CN109273842 A CN 109273842A CN 201811081682 A CN201811081682 A CN 201811081682A CN 109273842 A CN109273842 A CN 109273842A
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CN
China
Prior art keywords
phase shifter
medium substrate
phased array
array antenna
mems
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811081682.8A
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Chinese (zh)
Inventor
刘泽文
成俊峰
张玉龙
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Tsinghua University
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Tsinghua University
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Priority to CN201811081682.8A priority Critical patent/CN109273842A/en
Publication of CN109273842A publication Critical patent/CN109273842A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/36Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/38Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/48Earthing means; Earth screens; Counterpoises
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/50Structural association of antennas with earthing switches, lead-in devices or lightning protectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q21/00Antenna arrays or systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/30Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
    • H01Q3/34Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
    • H01Q3/36Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means with variable phase-shifters
    • H01Q3/38Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means with variable phase-shifters the phase-shifters being digital

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  • Variable-Direction Aerials And Aerial Arrays (AREA)

Abstract

The invention proposes a kind of phased array antenna units of the MEMS phase shifter of back-to-back multilayer lamination structure, it successively include the antenna radiation unit for stacking setting back-to-back, upper medium substrate, public stratum, lower medium substrate, MEMS phase shifter and control circuit, wherein, public stratum side is upper medium substrate, the public stratum other side is lower medium substrate, antenna radiation unit is arranged in upper medium substrate surface, lower medium substrate surface setting MEMS phase shifter and control circuit, and it is fed between the antenna radiation unit of upper medium substrate surface and the MEMS phase shifter of lower medium substrate surface using coaxial feeding mode.The phased array antenna unit is by using back-to-back multilayer lamination structure, from the whole volume for reducing phased array antenna unit, so that phased array antenna has many advantages, such as miniaturization, antenna radiation unit and MEMS phase shifter be not in the same side, and then reduce the influence that MEMS phase shifter received to antenna radiation unit and emitted signal, improve the radiance of phased array antenna unit.

Description

The phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure
Technical field
The present invention relates to technical field of communication equipment, in particular to a kind of MEMS phase shifter of back-to-back multilayer lamination structure Phased array antenna unit.
Background technique
Phased array antenna is a kind of smart antenna to get up with phased-array radar industry development, in satellite communication, now It is had a wide range of applications for fields such as wireless telecommunications, radars.Compared with traditional mechanical scan antenna, the electricity of phased array antenna Scanning mode has many advantages, such as reaction speed is fast, scanning range is wide, scanning accuracy is high.Phase shifter is the pass of phased array antenna One of key device, conventional phase shifter is because loss problem makes phase shifter be difficult to develop to high band, MEMS (Micro-Electro- Mechanical System, MEMS) technology appearance for solve this problem approach is provided, MEMS phase shifter has It is integrated, miniaturization, low-loss the advantages that.MEMS phase shifter is divided into switching wiring phase shifter, reflection-type phase shifter and distribution Phase shifter etc..
As shown in Figure 1, being a kind of phased array antenna unit structure based on MEMS phase shifter, in this configuration, antenna spoke Unit and MEMS phase shifter are penetrated in the same side of medium substrate, overall space range shared by antenna radiation unit and MEMS phase shifter It is bigger, do not meet the requirement of system compact;Meanwhile antenna radiation unit and MEMS phase shifter are placed in the same of medium substrate Side, MEMS phase shifter will affect transmitting and reception of the antenna radiation unit to signal, to influence the spoke of antenna radiation unit Penetrate performance.
Summary of the invention
The present invention is directed to solve at least some of the technical problems in related technologies.
For this purpose, it is an object of the invention to propose a kind of phased array day of the MEMS phase shifter of back-to-back multilayer lamination structure Line unit.
In order to achieve the above objectives, the invention proposes the phased array antenna of the MEMS phase shifter of back-to-back multilayer lamination structure Unit successively includes antenna radiation unit, the upper medium substrate, public stratum, lower medium substrate, MEMS for stacking setting back-to-back Phase shifter and control circuit, wherein the public stratum side is the upper medium substrate, and the public stratum other side is institute State lower medium substrate, the upper medium substrate surface is arranged antenna radiation unit, described in the lower medium substrate surface setting MEMS phase shifter and control circuit, and the antenna radiation unit of the upper medium substrate surface and the lower medium substrate surface MEMS phase shifter between fed using coaxial feeding mode.
The phased array antenna unit of the MEMS phase shifter of the back-to-back multilayer lamination structure of the embodiment of the present invention, by using Back-to-back multilayer lamination structure reduces space size shared by antenna radiation unit and phase shifter, and reduces MEMS phase shifter pair Antenna radiation unit receives and the influence of transmitting signal, so that improving the radiance of phased array antenna unit, and then improves The performance of phased array antenna;Meanwhile so that system have many advantages, such as miniaturization, structure it is simple, it is easy to process and at low cost.
In addition, the phased array antenna of the MEMS phase shifter of back-to-back multilayer lamination structure according to the above embodiment of the present invention Unit can also have following additional technical characteristic:
Further, in one embodiment of the invention, the public stratum be middle layer, the upper medium substrate and The lower medium substrate is respectively arranged at upper surface side and the lower face side of the middle layer.
Further, in one embodiment of the invention, the antenna radiation unit of the upper medium substrate surface and institute The MEMS phase shifter for stating lower medium substrate surface is respectively arranged at the two sides of the middle layer.
Optionally, in one embodiment of the invention, the upper medium substrate and the lower medium substrate two sides are adopted With pcb board structure or SMT technique.
Optionally, in one embodiment of the invention, the MEMS phase shifter includes: switching wiring phase shifter, reflection Type phase shifter and distributed phase shifters, phase shifter use any one of mems switch and MEMS capacitor.
Further, in one embodiment of the invention, the phased array antenna unit is an integrally disposed list Meta structure.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partially become from the following description Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect and advantage of the invention will become from the following description of the accompanying drawings of embodiments Obviously and it is readily appreciated that, in which:
Fig. 1 is phased array antenna unit structure top view of one of the relevant technologies based on MEMS phase shifter;
Fig. 2 is the phased array antenna unit according to the MEMS phase shifter of the back-to-back multilayer lamination structure of the embodiment of the present invention Schematic perspective view;
Fig. 3 is the phased array antenna unit according to the MEMS phase shifter of the back-to-back multilayer lamination structure of the embodiment of the present invention Stereochemical structure front view;
Fig. 4 is the phased array antenna unit according to the MEMS phase shifter of the back-to-back multilayer lamination structure of the embodiment of the present invention Stereochemical structure top view;
Fig. 5 is the phased array antenna unit according to the MEMS phase shifter of the back-to-back multilayer lamination structure of the embodiment of the present invention Stereochemical structure bottom view.
Description of symbols:
The phased array antenna unit -100 of the MEMS phase shifter of back-to-back multilayer lamination structure, antenna radiation unit -1, on Medium substrate -2, public stratum -3, lower medium substrate -4, MEMS phase shifter -5, control circuit -6, medium substrate -7, MEMS are opened Close -8, delay transmission line -9, microstrip line -10, antenna radiation unit -11 and coaxial line -12.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
The MEMS phase shifter of back-to-back multilayer lamination structure proposed according to embodiments of the present invention is described with reference to the accompanying drawings Phased array antenna unit.
Fig. 2 is the phased array antenna unit of the MEMS phase shifter of the back-to-back multilayer lamination structure of one embodiment of the invention Schematic perspective view.
As shown in Fig. 2, the phased array antenna unit 100 of the MEMS phase shifter of the back-to-back multilayer lamination structure includes: day Beta radiation unit 1, upper medium substrate 2, public stratum 3, lower medium substrate 4, MEMS phase shifter 5 and control circuit 6.
Wherein, public stratum side is upper medium substrate, and the public stratum other side is lower medium substrate, upper medium substrate table Antenna radiation unit, lower medium substrate surface setting MEMS phase shifter and control circuit, and upper medium substrate surface is arranged in face Antenna radiation unit and lower medium substrate surface MEMS phase shifter between fed using coaxial feeding mode.The present invention is real The phased array antenna unit 100 for applying example reduces volume size on the whole, and reduces the MEMS phase shift of lower medium substrate surface Device is received to the antenna radiation unit of upper medium substrate surface or the influence of transmitting signal, the back-to-back multiple-level stack improved The radiance of the phased array antenna unit of the MEMS phase shifter of structure, thus have structure simple, it is easy to process and at low cost The advantages of.
It should be noted that the overall structure of phased array antenna unit is back-to-back multilayer lamination structure, upper medium substrate Using coaxial feeding mode (or gap between the antenna radiation unit on surface and the MEMS phase shifter of lower medium substrate surface Other feeding classifications such as couple feed) feed, and then structure is simple, so that easy to process.
Further, in one embodiment of the invention, public stratum is middle layer, upper medium substrate and lower medium base Plate is respectively arranged at upper surface side and the lower face side of middle layer.
Optionally, in one embodiment of the invention, upper medium substrate and lower medium substrate two sides can use pcb board Structure, SMT technique or other processing technologys.
In addition, upper medium substrate and lower medium substrate can be silicon, plastics or glass or other suitable materials, In, suitable material and processing technology are selected, can not only accomplish that at low cost, the processing is simple, but also the available production haveing excellent performance Product.
Further, in one embodiment of the invention, the antenna radiation unit of upper medium substrate surface and lower medium The MEMS phase shifter of substrate surface is respectively arranged at the two sides of middle layer.
It should be noted that phase shifter is one of the Primary Component that phased array antenna realizes electric scanning, with traditional machinery Formula scanning is compared, and the electric scanning of phase shifter is more efficient, more flexible.Phase shifter point is analog and digital, and MEMS phase shifter is made For digital phase shifter, there are easy to operate, the advantages such as scanning accuracy height.It is digital with other of the compositions such as PIN pipe, FET pipe Phase shifter is compared, MEMS phase shifter have the advantages that it is integrated, minimize, be lost it is low.Therefore using the phased of MEMS phase shifter Array antenna unit can equally have many advantages, such as integrated, miniaturization, low-loss.
Optionally, in one embodiment of the invention, MEMS phase shifter includes: switching wiring phase shifter, reflection-type shifting Phase device and distributed phase shifters, phase shifter use any one of mems switch and MEMS capacitor.
Further, in one embodiment of the invention, phased array antenna unit is an integrally disposed unit knot Structure, wherein the embodiment of the present invention can constitute phased array antenna by different implementations.
The innovation that the phased array antenna unit of the MEMS phase shifter of the back-to-back multilayer lamination structure of the embodiment of the present invention has Point and advantage are as follows:
1, the embodiment of the present invention uses the back-to-back multilayer lamination structure using public stratum as middle layer, upper medium substrate table Face is provided with antenna radiation unit, and lower medium substrate surface is provided with the parts such as MEMS phase shifter, control circuit, aerial radiation list Member and MEMS phase shifter reduce the overall volume of antenna radiation unit and MEMS phase shifter, it is small to reach system not in the same side The purpose of type.
2, the antenna radiation unit of the embodiment of the present invention and MEMS phase shifter reduce MEMS phase shifter pair not in the same side Antenna radiation unit receives and the influence of transmitting signal, improves the radiance of phased array antenna unit.
3, the embodiment of the present invention use MEMS phase shifter, compared with conventional phase shifter, MEMS phase shifter have it is integrated, The advantages that miniaturization, low-loss, using MEMS phase shifter, phased array antenna unit equally has integrated, miniaturization, low-loss The advantages that.
4, the embodiment of the present invention can constitute phased array antenna by different implementations, be communication system, base station thunder Up to equal application provide a kind of low cost, high-performance, miniaturization phased array antenna unit.
The back-to-back multilayer lamination structure of 1 pair of embodiment of the present invention, upper medium substrate surface are provided with reference to the accompanying drawing Explanation is further expalined in antenna radiation unit.
As shown in Figure 1, for phased array antenna unit structure of one of the relevant technologies based on MEMS phase shifter, in the knot In structure, antenna radiation unit and MEMS phase shifter are in the same side.Compared with Fig. 2, Fig. 1 there are the shortcomings that: 1) antenna radiation unit It is bigger with overall space range shared by MEMS phase shifter, do not meet the requirement of system compact;2) MEMS phase shifter can be serious Transmitting and reception of the antenna radiation unit to signal are influenced, and then influences the radiance of antenna radiation unit.Therefore, using back Backrest multilayer lamination structure, so that antenna radiation unit and MEMS phase shifter reduce antenna radiation unit and shifting not in the same side Space size shared by phase device, the phased array antenna system for forming the present invention have many advantages, such as miniaturization, move in addition, reducing MEMS Phase device receives to antenna radiation unit and emits the influence of signal, improves the phase of the MEMS phase shifter of back-to-back multilayer lamination structure The radiance of array antenna unit is controlled, and then improves the performance for the phased array antenna that the present invention forms.
It should be noted that Fig. 2 is only preferred structure of the invention, wherein antenna radiation unit has selected rectangular microstrip Paster antenna, naturally it is also possible to select other antenna radiation units;It is used between antenna radiation unit and MEMS phase shifter same Axis feeding classification is fed, naturally it is also possible to use other feeding classifications such as aperture-coupled, therefore it cannot be assumed that Fig. 2 It is without being limited thereto for the only structure of the present invention.
The phased array antenna unit of the MEMS phase shifter of the back-to-back multilayer lamination structure proposed according to embodiments of the present invention, By using back-to-back multilayer lamination structure, reduce space size shared by antenna radiation unit and MEMS phase shifter, and reduces MEMS phase shifter receives to antenna radiation unit and emits the influence of signal, improves the radiance of phased array antenna unit, And then improve the performance of phased array antenna;Meanwhile so that system have miniaturization, structure it is simple, it is easy to process and at low cost etc. Advantage.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or Implicitly include at least one this feature.In the description of the present invention, the meaning of " plurality " is at least two, such as two, three It is a etc., unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc. Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral;It can be mechanical connect It connects, is also possible to be electrically connected;It can be directly connected, can also can be in two elements indirectly connected through an intermediary The interaction relationship of the connection in portion or two elements, unless otherwise restricted clearly.For those of ordinary skill in the art For, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below " One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned Embodiment is changed, modifies, replacement and variant.

Claims (6)

1. a kind of phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure, which is characterized in that successively include Antenna radiation unit, upper medium substrate, public stratum, lower medium substrate, MEMS phase shifter and the control of setting are stacked back-to-back Circuit, wherein the public stratum side is the upper medium substrate, and the public stratum other side is the lower medium base Plate, the upper medium substrate surface are arranged antenna radiation unit, the lower medium substrate surface be arranged the MEMS phase shifter and Control circuit, and the MEMS phase shifter of the antenna radiation unit of the upper medium substrate surface and the lower medium substrate surface Between fed using coaxial feeding mode.
2. the phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure according to claim 1, special Sign is that the public stratum is middle layer, and the upper medium substrate and the lower medium substrate are respectively arranged at the centre The upper surface side of layer and lower face side.
3. the phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure according to claim 2, special Sign is that the MEMS phase shifter of the antenna radiation unit of the upper medium substrate surface and the lower medium substrate surface is set respectively It is placed in the two sides of the middle layer.
4. the phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure according to claim 1, special Sign is that the upper medium substrate and the lower medium substrate two sides are all made of pcb board structure or SMT technique.
5. the phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure according to claim 1, special Sign is that the MEMS phase shifter includes: that switching wiring phase shifter, reflection-type phase shifter and distributed phase shifters, phase shifter are adopted With any one of mems switch and MEMS capacitor.
6. the phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure according to claim 1, special Sign is that the phased array antenna unit is an integrally disposed cellular construction.
CN201811081682.8A 2018-09-17 2018-09-17 The phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure Pending CN109273842A (en)

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CN201811081682.8A CN109273842A (en) 2018-09-17 2018-09-17 The phased array antenna unit of the MEMS phase shifter of back-to-back multilayer lamination structure

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CN110611164A (en) * 2019-09-19 2019-12-24 清华大学 Frequency reconfigurable antenna based on MEMS switch
CN115693156A (en) * 2021-07-29 2023-02-03 北京京东方技术开发有限公司 Antenna, antenna array and communication system
WO2023206438A1 (en) * 2022-04-29 2023-11-02 京东方科技集团股份有限公司 Antenna and electronic device

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
CN110611164A (en) * 2019-09-19 2019-12-24 清华大学 Frequency reconfigurable antenna based on MEMS switch
CN110611164B (en) * 2019-09-19 2021-03-30 清华大学 Frequency reconfigurable antenna based on MEMS switch
CN115693156A (en) * 2021-07-29 2023-02-03 北京京东方技术开发有限公司 Antenna, antenna array and communication system
CN115693156B (en) * 2021-07-29 2024-02-27 北京京东方技术开发有限公司 Antenna, antenna array and communication system
WO2023206438A1 (en) * 2022-04-29 2023-11-02 京东方科技集团股份有限公司 Antenna and electronic device

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