CN109248800A - A kind of piezoelectricity atomization spraying equipment - Google Patents

A kind of piezoelectricity atomization spraying equipment Download PDF

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Publication number
CN109248800A
CN109248800A CN201811237006.5A CN201811237006A CN109248800A CN 109248800 A CN109248800 A CN 109248800A CN 201811237006 A CN201811237006 A CN 201811237006A CN 109248800 A CN109248800 A CN 109248800A
Authority
CN
China
Prior art keywords
module
fixed frame
piezoelectricity
spray head
spraying equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811237006.5A
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Chinese (zh)
Inventor
王勇
翟荣安
朱军辉
汝长海
孙钰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Ji Ju Micro Automation System And Equipment Technology Research Institute Co Ltd
Original Assignee
Jiangsu Ji Ju Micro Automation System And Equipment Technology Research Institute Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Ji Ju Micro Automation System And Equipment Technology Research Institute Co Ltd filed Critical Jiangsu Ji Ju Micro Automation System And Equipment Technology Research Institute Co Ltd
Priority to CN201811237006.5A priority Critical patent/CN109248800A/en
Publication of CN109248800A publication Critical patent/CN109248800A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area

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  • Spray Control Apparatus (AREA)

Abstract

The invention discloses a kind of piezoelectricity atomization spraying equipments, including operation module, control module, operational module and supplementary module;The operation module includes fixed frame and the touch screen that is embedded in the fixed frame;The control module includes controller, and the controller and the operation module, the operational module and the supplementary module are electrically connected;The operational module includes spray head;The supplementary module includes syringe pump, air compressor and piezoelectricity atomizing generator;The syringe pump is connected to by the first pipeline with the spray head, and the air compressor is connected to by the second pipeline with the spray head, and the piezoelectricity atomizing generator and the spray head are electrically connected;The operational module is embedded inside the fixed frame, and the control module and the supplementary module are arranged at the outside of the fixed frame.The present invention has the beneficial effect that integration degree is high and malfunction elimination difficulty is low.

Description

A kind of piezoelectricity atomization spraying equipment
Technical field
The present invention relates to spraying equipment fields, and in particular to a kind of piezoelectricity atomization spraying equipment.
Background technique
With the rapid development of information-based industry and electronics industry, film preparing technology is greatly improved, especially Piezoelectricity atomized spray processes by feat of it is repeated it is strong, stability is high, large area coating and the features such as do not influenced by substrate pattern and It is widely used in film preparation.It is tiny that piezoelectricity atomized spray processes are really broken into masking liquid vibration using piezoelectricity atomizer Drop is ejected on substrate surface, forms film in homogeneous thickness.The quality of film quality and the efficiency of preparation depend on setting Standby self structure, because piezoelectricity atomization spraying equipment structure difference can make the technological parameter for influencing film quality have otherness, Different degrees of workload is brought to operator simultaneously.
Currently, the structure of piezoelectricity atomization spraying equipment is broadly divided into three-dimensional and separate type in the market.Logical atmospheric pressure electrospray Spraying equipment is collectively constituted by operational module, operation module, control module and supplementary module, and three-dimensional piezoelectricity atomizing spraying Equipment collects modules in integration, therefore equipment operation the degree of automation and overall structure integration degree are higher, while institute Take up space small volume.But the modules of separate type piezoelectricity atomization spraying equipment be it is separately independent, modules can set It cooperates during received shipment row and completes the work of film preparation, this structure operation and carry more convenient, check simultaneously Failure is high-efficient.
Existing three-dimensional and separate type piezoelectricity atomization spraying equipment is respectively present respective disadvantage, to film quality and system Standby efficiency brings adverse effect.Although three-dimensional piezoelectricity atomization spraying equipment automates and integration degree is high, improve thin Film preparation efficiency, but modules integrate, and cause functions of the equipments and complex process, make to operate inconvenient and influence Film quality.And control module is mainly wiring part between electrical component, once equipment break down, control module with it is other The integrated of module will lead to the increasing of malfunction elimination difficulty.The modules of usual three-dimensional piezoelectricity atomization spraying equipment are again can not Disassembly, equipment overall weight is very big, is unfavorable for carrying.And separate type piezoelectricity atomization spraying equipment is although easy to operate, easy row Failure and convenient in carrying are looked into, but integrated automation and integration degree be not high, greatly reduces film preparation efficiency.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of piezoelectricity atomization spraying equipment, have that integration degree is high simultaneously And the beneficial effect that malfunction elimination difficulty is low.
In order to solve the above-mentioned technical problems, the present invention provides include operation module, control module, operational module and auxiliary Module;The operation module includes fixed frame and the touch screen that is embedded in the fixed frame;The control module includes Controller, the controller and the operation module, the operational module and the supplementary module are electrically connected;The Working mould Block includes spray head;The supplementary module includes syringe pump, air compressor and piezoelectricity atomizing generator;The syringe pump passes through the One pipeline is connected to the spray head, and the air compressor is connected to by the second pipeline with the spray head, the piezoelectricity atomization hair Raw device and the spray head are electrically connected;The operational module is embedded inside the fixed frame, the control module and described Supplementary module is arranged at the outside of the fixed frame.
Further, the operational module further includes three-D electric slide unit, and the three-D electric slide unit is arranged described solid Determine lower portion, and the three-D electric slide unit is fixedly connected with the spray head.
Further, the operational module further includes adsorption plate, and several electric heaters are provided in the adsorption plate;It is described The inside of the fixed frame is arranged in adsorption plate, and the adsorption plate is located at the lower section of the spray head, the adsorption plate connection There is absorbent module.
Further, the absorbent module includes the second air compressor and negative pressure adapter, and the negative pressure adapter is set It sets and offers several stomatas being connected to the negative pressure adapter on the inside of the adsorption plate, the adsorption plate.
Further, be provided with temperature controller on the fixed frame, whole electric heaters with the temperature Spend controller connection.
Further, air pressure valve is provided on the fixed frame, the air pressure valve is arranged on second pipeline.
Further, air gauge is additionally provided on second pipeline.
Beneficial effects of the present invention:
1, operation module and operational module are integrated, can be realized human-computer interaction, i.e., observed in operation, thus Convenient for users to operation;Control module and supplementary module are arranged in the outside of fixed frame, supplementary module and work can be reduced The degree of integration for making module facilitates the investigation of failure;
2, control module and supplementary module are arranged in the outside of fixed frame, energy when operational module and supplementary module work Enough separately heat dissipations, to improve the heat dissipation effect and efficiency of piezoelectricity atomization spraying equipment.
Detailed description of the invention
Fig. 1 is overall schematic of the invention.
Figure label explanation: 11, spray head;12, three-D electric slide unit;2, air pressure valve;3, air gauge;4, temperature controller; 5, fixed frame;6, touch screen;7, piezoelectricity atomizing generator;8, controller;9, air compressor.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings and specific examples, so that those skilled in the art can be with It more fully understands the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
Referring to Fig.1, an a kind of embodiment of piezoelectricity atomization spraying equipment comprising operation module, control module, Working mould Block and supplementary module, operation module include fixed frame 5 and the touch screen 6 that is embedded on fixed frame 5, and touch screen 6 can be controlled System and operation element module.Fixed frame 5 is for integrating operation module and operational module, in order to the use of operator.
Referring to Fig.1, operational module includes that spray head 11, three-D electric slide unit 12 and adsorption plate, operational module are embedded in fixation The inside of frame 5, to realize the integrated of operational module and operation module.Spray head 11, three-D electric slide unit 12 and adsorption plate are all provided with It sets in the inside of fixed frame 5, spray head 11 is fixed on three-D electric slide unit 12, can be in the drive on three-D electric slide unit 12 It is moved simultaneously along X, Y and Z-direction under dynamic, wherein X moving range is 300mm, and Y moving range is 300mm, and Z moving range is 100mm, movement speed are 2mm/s-60mm/s.Adsorption plate is fixed on the lower section of spray head 11, with fixing substrate.It is set in adsorption plate Several electric heaters are equipped with, to realize the preheating to substrate, the preferred resistance wire of electric heater in the present embodiment.Adsorption plate is also connected with There is absorbent module, absorbent module includes the second air compressor 9 and negative pressure adapter, wherein the setting of negative pressure adapter is being adsorbed The inside of plate, while several stomatas that can be connected to negative pressure adapter are also provided on adsorption plate.Second air compressor 9 with The connection of negative pressure adapter, and the stomata by being connected to negative pressure adapter to form negative pressure above adsorption plate, so as to Substrate is adsorbed on adsorption plate, to facilitate spray head 11 to spray substrate.Both facilitate substrate using adsorption plate fixing substrate Spraying, can be improved substrate spraying effect and working efficiency;The substrate of unlike material can be realized using adsorption plate simultaneously Fixation, with realize piezoelectricity atomization spraying equipment application popularity.
Referring to Fig.1, be provided with temperature controller 84 on fixed frame 5, whole electric heaters with temperature controller 84 It is electrically connected, to realize the temperature for regulating and controlling adsorption plate using temperature controller 84.
Referring to Fig.1, control module includes controller 8, and controller 8 and operation module, operational module and supplementary module are electric Property connection, to realize the control synchronous with supplementary module of operation module, operational module.Supplementary module includes syringe pump, air pressure Contracting machine 9 and piezoelectricity atomizing generator 7, the preferred precise injection pump of syringe pump, the precision of feed are 0.001ml/ in the present embodiment min.Syringe pump is connect by the first pipeline with spray head 11, to provide solution into spray head 11.Air compressor 9 passes through second Pipeline is connect with spray head 11, sprays the drop in spray head 11 so as to provide gas into spray head 11.Piezoelectricity atomization simultaneously Generator 7 and spray head 11 are electrically connected, to control the work of spray head 11.Control module and supplementary module are all provided in the present embodiment It sets in the outside of fixed frame 5, i.e. syringe pump, air compressor 9 and piezoelectricity atomizing generator 7 is arranged at fixed frame 5 It is external.Supplementary module and operational module is separately positioned, and the integrated level for reducing supplementary module and operational module can facilitate failure Investigation, while being also convenient for the heat dissipation of piezoelectricity atomization spraying equipment.
Referring to Fig.1, air pressure valve 2 is fixed on fixed frame 5, air pressure valve 2 is arranged on the second pipeline, with the second pipe of control The flow velocity of road internal gas.Meanwhile second is additionally provided with air gauge 3 on pipeline, with convenient reading the second channel interior gas Pressure, consequently facilitating adjusting the pressure of gas in the second pipeline using air pressure valve 2.
Motion process:
Substrate is placed on adsorption plate, temperature controller 84 is adjusted and preheating temperature is set, substrate is preheated.In advance After heat, syringe pump is first opened to spray head 11, solution is provided;It is then turned on piezoelectricity atomizing generator 7, to piezoelectricity atomizer 11 Electricity is provided, so that the vibration of 11 internal solution of spray head is broken into drop, reaches spray pattern;It is then turned on air compressor 9, is atomized to piezoelectricity Spray head 11 provides gas, and by adjusting air pressure valve 2 in real time, sprays to the drop of atomization accurately on substrate surface;Finally open Three-D electric slide unit 12 coats piezoelectricity atomizer 11 on substrate surface according to the track of regulation, completes film Preparation.
Based on above-mentioned piezoelectricity atomization spraying equipment using RFJ-210 negative photo sol solution as material, the step of film is prepared It is rapid as follows:
1) place glass slide on adsorption plate and adjusting temperature controller, setting preheating temperature is 45 DEG C, to glass slide into Row preheating.
(2) the dilution volume ratio for preparing dimethylbenzene organic solvent and RFJ-210 negtive photoresist solution is 6:1, starts precise injection Pump, setting flow are 0.3ml/min, and dilute solution is injected at spray head.
(3) start piezoelectricity atomizing generator, setting power is 1.1w, is atomized, restarts to the dilution at spray head Air compressor, adjusting air pressure are 5.0kpa, are ejected into the drop of atomization accurately in slide surface.
(4) start electronic slide unit, setting X-direction moving displacement is 150mm, and X-direction movement speed is 20mm/s, Y-direction Moving displacement is 100mm, and Y-direction movement speed is 20mm/s.According to the mobile spray head in presetting track, keep atomized drop uniform Coated on the preparation in slide surface, completing photoresist film.
Photoresist film surface thickness based on above-mentioned piezoelectricity atomization spraying equipment is uniform, without solid particle, injustice The presence of the defects of whole trace and pitting.
Based on above-mentioned piezoelectricity atomization spraying equipment using nano-silver thread solution as material, film is prepared:
(1) PET flexible parent metal is placed in first carrying out absorption fixation on adsorption plate, then adjusts temperature controller and preheating is set Temperature is 45 DEG C, is preheated to PET flexible parent metal.
(2) starting precise injection pump, setting flow are 0.1ml/min, and nano-silver thread solution is injected at nozzle.
(3) starting piezoelectricity atomizing generator, setting power is 1.0w, the nano-silver thread solution at spray head is atomized, Restart air compressor, adjusting air pressure is 4.0kpa, is ejected into the drop of atomization accurately on PET flexible parent metal surface.
(4) start electronic slide unit, setting X-direction moving displacement is 100mm, and X-direction movement speed is 10mm/s, Y-direction Moving displacement is 80mm, and Y-direction movement speed is 10mm/s.According to the mobile spray head in presetting track, keep atomized drop uniform Coated on PET flexible parent metal surface, the preparation of nano-silver thread film is completed.
The nano-silver thread film surface thickness prepared based on this new structural system is uniform, and finds its sheet resistance after tested Small, electric conductivity is good.
Embodiment described above is only to absolutely prove preferred embodiment that is of the invention and being lifted, protection model of the invention It encloses without being limited thereto.Those skilled in the art's made equivalent substitute or transformation on the basis of the present invention, in the present invention Protection scope within.Protection scope of the present invention is subject to claims.

Claims (7)

1. a kind of piezoelectricity atomization spraying equipment, which is characterized in that including operation module, control module, operational module and auxiliary mould Block;The operation module includes fixed frame and the touch screen that is embedded in the fixed frame;The control module includes control Device processed, the controller and the operation module, the operational module and the supplementary module are electrically connected;The operational module Including spray head;The supplementary module includes syringe pump, air compressor and piezoelectricity atomizing generator;The syringe pump passes through first Pipeline is connected to the spray head, and the air compressor is connected to by the second pipeline with the spray head, and the piezoelectricity atomization occurs Device and the spray head are electrically connected;
The operational module is embedded inside the fixed frame, and the control module and the supplementary module are arranged at described The outside of fixed frame.
2. piezoelectricity atomization spraying equipment as described in claim 1, which is characterized in that the operational module further includes three-D electric Slide unit, the three-D electric slide unit is arranged inside the fixed frame, and the three-D electric slide unit and the spray head are fixed Connection.
3. piezoelectricity atomization spraying equipment as described in claim 1, which is characterized in that the operational module further includes adsorption plate, Several electric heaters are provided in the adsorption plate;The inside of the fixed frame, and the absorption is arranged in the adsorption plate Plate is located at the lower section of the spray head, and the adsorption plate is connected with absorbent module.
4. piezoelectricity atomization spraying equipment as claimed in claim 3, which is characterized in that the absorbent module includes the second air pressure Contracting machine and negative pressure adapter, the negative pressure adapter are arranged in the inside of the adsorption plate, offer on the adsorption plate several The stomata being connected to the negative pressure adapter.
5. piezoelectricity atomization spraying equipment as claimed in claim 3, which is characterized in that be provided with temperature control on the fixed frame Device processed, whole electric heaters are connect with the temperature controller.
6. piezoelectricity atomization spraying equipment as described in claim 1, which is characterized in that be provided with air pressure on the fixed frame Valve, the air pressure valve are arranged on second pipeline.
7. piezoelectricity atomization spraying equipment as described in claim 1, which is characterized in that be additionally provided with air pressure on second pipeline Table.
CN201811237006.5A 2018-10-23 2018-10-23 A kind of piezoelectricity atomization spraying equipment Pending CN109248800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811237006.5A CN109248800A (en) 2018-10-23 2018-10-23 A kind of piezoelectricity atomization spraying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811237006.5A CN109248800A (en) 2018-10-23 2018-10-23 A kind of piezoelectricity atomization spraying equipment

Publications (1)

Publication Number Publication Date
CN109248800A true CN109248800A (en) 2019-01-22

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206393650U (en) * 2017-01-18 2017-08-11 安吉八塔机器人有限公司 A kind of glue spraying robot system for being used to process office chair
CN206810540U (en) * 2017-05-17 2017-12-29 深圳怡钛积科技股份有限公司 A kind of spray equipment for anti-dazzle anti-fingerprint plated film
KR20180097057A (en) * 2017-02-22 2018-08-30 주식회사 소닉슨 Cosmetic liquid mist spray
CN108672184A (en) * 2018-08-14 2018-10-19 江苏集萃微纳自动化系统与装备技术研究所有限公司 A kind of spray equipment and spraying method preparing wide cut finishing coat
CN209829328U (en) * 2018-10-23 2019-12-24 江苏集萃微纳自动化系统与装备技术研究所有限公司 Piezoelectric atomization spraying equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206393650U (en) * 2017-01-18 2017-08-11 安吉八塔机器人有限公司 A kind of glue spraying robot system for being used to process office chair
KR20180097057A (en) * 2017-02-22 2018-08-30 주식회사 소닉슨 Cosmetic liquid mist spray
CN206810540U (en) * 2017-05-17 2017-12-29 深圳怡钛积科技股份有限公司 A kind of spray equipment for anti-dazzle anti-fingerprint plated film
CN108672184A (en) * 2018-08-14 2018-10-19 江苏集萃微纳自动化系统与装备技术研究所有限公司 A kind of spray equipment and spraying method preparing wide cut finishing coat
CN209829328U (en) * 2018-10-23 2019-12-24 江苏集萃微纳自动化系统与装备技术研究所有限公司 Piezoelectric atomization spraying equipment

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
翟荣安;汝长海;陈瑞华;朱军辉;: "基于压电雾化喷涂的光刻胶涂覆工艺及其应用研究", 黑龙江科学, no. 06, 23 March 2017 (2017-03-23), pages 98 - 100 *

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