CN109244108A - A kind of oled display substrate and preparation method thereof, OLED display - Google Patents

A kind of oled display substrate and preparation method thereof, OLED display Download PDF

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Publication number
CN109244108A
CN109244108A CN201810996084.7A CN201810996084A CN109244108A CN 109244108 A CN109244108 A CN 109244108A CN 201810996084 A CN201810996084 A CN 201810996084A CN 109244108 A CN109244108 A CN 109244108A
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China
Prior art keywords
electrode
layer
oled display
sub
display substrate
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CN201810996084.7A
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CN109244108B (en
Inventor
马国强
柴媛媛
孙阔
汪杨鹏
陈鹏
唐国强
代伟男
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201810996084.7A priority Critical patent/CN109244108B/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The embodiment of the present invention provides a kind of oled display substrate and preparation method thereof, OLED display, wherein, oled display substrate includes: underlay substrate, the OLED device layer being arranged on underlay substrate and the encapsulated layer for encapsulating OLED device layer, further includes: piezoelectricity functional layer;Side of the encapsulated layer far from underlay substrate is arranged in piezoelectricity functional layer, for generating mechanical oscillation under the action of electrical signals, to generate ultrasonic wave or audible sound.The embodiment of the present invention is by being arranged piezoelectricity functional layer in oled display substrate, ultrasonic wave and audible sound are generated by its mechanical oscillation, screen sounding and fingerprint identification function are realized using same structure, reduces the volume of OLED display occupancy, meets the lightening demand of OLED display.

Description

A kind of oled display substrate and preparation method thereof, OLED display
Technical field
The present embodiments relate to field of display technology, and in particular to a kind of oled display substrate and preparation method thereof, OLED display.
Background technique
Organic Light Emitting Diode (Organic Light-Emitting Device, abbreviation OLED) display, be it is a kind of with Traditional liquid crystal display (Liquid Crystal Display, abbreviation LCD) different display has actively luminous, temperature spy Property good, small power consumption, respond fast, flexible, ultra-thin and it is at low cost the advantages that.Therefore have become the weight of display device of new generation Develop one of discovery, and receives more and more attention.
Screen vocal function is realized using piezoelectric actuator in OLED display, realizes that fingerprint is known using ultrasonic sensor Other function, inventor is the study found that OLED display needs same to realize screen vocal function and fingerprint identification function simultaneously When setting piezoelectric actuator and ultrasonic sensor be unable to satisfy OLED so that the volume that OLED display occupies is larger and show The lightening demand of device.
Summary of the invention
In order to solve the above-mentioned technical problem, the embodiment of the invention provides a kind of oled display substrate and preparation method thereof, OLED display is realized screen sounding and fingerprint identification function using the same structure being arranged in oled display substrate, is subtracted The volume for having lacked OLED display occupancy, meets the lightening demand of OLED display.
In a first aspect, the embodiment of the present invention provides a kind of oled display substrate, comprising: underlay substrate is arranged in the lining OLED device layer on substrate and the encapsulated layer for encapsulating the OLED device layer, the oled display substrate also wrap It includes: piezoelectricity functional layer;
Side of the encapsulated layer far from underlay substrate is arranged in the piezoelectricity functional layer, under the action of electrical signals Mechanical oscillation are generated, to generate ultrasonic wave or audible sound.
Optionally, the piezoelectricity functional layer includes: first electrode, piezoelectric layer and second electrode;
The piezoelectric layer is arranged between the first electrode and the second electrode;
The piezoelectric layer is arranged in close to the side of the underlay substrate or far from the substrate base in the first electrode The side of plate.
Optionally, the first electrode includes: the first sub-electrode of M N array arrangement, and the piezoelectric layer includes: M × N The piezoelectric structure of array arrangement;
Orthographic projection of the first electrode on underlay substrate is overlapped with orthographic projection of the piezoelectric layer on underlay substrate, Wherein, M, N are positive integer.
Optionally, the second electrode includes: the second sub electrode of M N array arrangement;
Orthographic projection of the first electrode on underlay substrate and orthographic projection weight of the second electrode on underlay substrate It closes.
Optionally, the second electrode includes: plane-shape electrode;
Orthographic projection of the second electrode on underlay substrate covers orthographic projection of the first electrode on underlay substrate.
Optionally, the first electrode and second electrode are transparent electrode, and making material includes: tin indium oxide, nanometer Pipe or graphene;
The making material of the piezoelectric layer includes: Kynoar.
Optionally, the oled display substrate further include: buffer layer, buffer layer setting is in the encapsulated layer and described Between piezoelectricity functional layer;And/or
The side of the piezoelectricity functional layer far from underlay substrate is arranged in protective layer, the protective layer.
Optionally, oled display substrate further include: driving testing circuit, the first conducting wire and the second conducting wire;The driving inspection Slowdown monitoring circuit includes: drive sub-circuits, detection sub-circuit, first switch and the second switch;
The drive sub-circuits are connect with the first sub-electrode and first switch, for generating the first electric signal, are opened when first It closes in the closure state, drives the piezoelectric structure to generate mechanical oscillation, to generate ultrasonic wave;It is also used to generate the second telecommunications Number, when first switch in the closure state, drive the piezoelectric structure to generate mechanical oscillation, to generate audible sound;
The detection sub-circuit, connect with second sub electrode and second switch, for being in closed state when second switch When, according to the ultrasonic wave of the fingerprint reflection received, form fingerprint image;
Wherein, each first sub-electrode is connect by the first conducting wire with drive sub-circuits, and each second sub electrode is logical The second conducting wire is crossed to connect with detection sub-circuit.
Optionally, oled display substrate further include: driving testing circuit, the first conducting wire and the second conducting wire;The driving inspection Slowdown monitoring circuit includes: drive sub-circuits, detection sub-circuit, first switch and the second switch;
The drive sub-circuits are connect with the first sub-electrode and first switch, for generating the first electric signal, are opened when first It closes in the closure state, drives the piezoelectric structure to generate mechanical oscillation, to generate ultrasonic wave;It is also used to generate the second telecommunications Number, when first switch in the closure state, drive the piezoelectric structure to generate mechanical oscillation, to generate audible sound;
The detection sub-circuit, connect with the first sub-electrode and second switch, for being in closed state when second switch When, according to the ultrasonic wave of the fingerprint reflection received, form fingerprint image;
Wherein, each first sub-electrode passes through the second conducting wire and detection sub-circuit by the first conducting wire and drive sub-circuits Connection.
Optionally, first conducting wire and the first electrode same layer are arranged, second conducting wire and the second electrode Same layer setting.
Second aspect, the embodiment of the present invention also provide a kind of OLED display, comprising: above-mentioned oled display substrate.
The third aspect, the embodiment of the present invention also provide a kind of production method of oled display substrate, comprising:
One underlay substrate is provided;
OLED device layer is formed on the underlay substrate;
The encapsulated layer for encapsulating the OLED device layer is formed on the OLED device layer;
Piezoelectricity functional layer is formed on the encapsulated layer, wherein the piezoelectric package layer is under the action of electrical signals Mechanical oscillation are generated, to generate ultrasonic wave or audible sound.
Optionally, the piezoelectricity functional layer that formed on the encapsulated layer includes:
First electrode, piezoelectric layer and second electrode are formed, on the encapsulated layer to form piezoelectricity functional layer, wherein pressure Electric layer is arranged between the first electrode and the second electrode.
Optionally, forming piezoelectric layer includes:
It is coated with insulation film, piezoelectricity channel is formed by exposure development technique;
Piezoelectric layer is formed in the piezoelectricity channel by InkJet printing processes.
Optionally, described to be formed before piezoelectricity functional layer on the encapsulated layer, the method also includes:
Buffer layer is formed on the encapsulated layer;
It is described to be formed after piezoelectricity functional layer on the encapsulated layer, the method also includes:
Protective layer is formed in the piezoelectricity functional layer.
The embodiment of the present invention provides a kind of oled display substrate and preparation method thereof, OLED display, wherein OLED is aobvious Show that substrate includes: underlay substrate, the OLED device layer being arranged on underlay substrate and the encapsulation for encapsulating OLED device layer Layer, further includes: piezoelectricity functional layer;Side of the encapsulated layer far from underlay substrate is arranged in piezoelectricity functional layer, in electric signal Effect is lower to generate mechanical oscillation, to generate ultrasonic wave or audible sound.The embodiment of the present invention in oled display substrate by setting Piezoelectricity functional layer is set, generates ultrasonic wave and audible sound by its mechanical oscillation, screen sounding is realized using same structure and is referred to Line identification function reduces the volume of OLED display occupancy, meets the lightening demand of OLED display.
Other features and advantages of the present invention will be illustrated in the following description, also, partly becomes from specification It obtains it is clear that understand through the implementation of the invention.The objectives and other advantages of the invention can be by specification, right Specifically noted structure is achieved and obtained in claim and attached drawing.
Detailed description of the invention
Attached drawing is used to provide to further understand technical solution of the present invention, and constitutes part of specification, with this The embodiment of application technical solution for explaining the present invention together, does not constitute the limitation to technical solution of the present invention.
Fig. 1 is the structural schematic diagram one of oled display substrate provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of piezoelectricity functional layer provided in an embodiment of the present invention;
Fig. 3 is the side view one of oled display substrate provided in an embodiment of the present invention;
Fig. 4 is the side view of first electrode provided in an embodiment of the present invention;
Fig. 5 is the top view of piezoelectric layer provided in an embodiment of the present invention;
Fig. 6 is the top view one of second electrode provided in an embodiment of the present invention;
Fig. 7 is the side view two of oled display substrate provided in an embodiment of the present invention;
Fig. 8 is the top view two of second electrode provided in an embodiment of the present invention;
Fig. 9 is the structural schematic diagram two of oled display substrate provided in an embodiment of the present invention;
Figure 10 is the oblique view one of oled display substrate provided in an embodiment of the present invention;
Figure 11 is the equivalent circuit diagram of the corresponding oled display substrate of Figure 10;
Figure 12 is the oblique view two of oled display substrate provided in an embodiment of the present invention;
Figure 13 is the equivalent circuit diagram of the corresponding oled display substrate of Figure 12;
Figure 14 is the flow chart of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 A is the schematic diagram one of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 B is the schematic diagram two of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 C is the schematic diagram three of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 D is the schematic diagram four of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 E is the schematic diagram five of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 F is the schematic diagram six of the production method of oled display substrate provided in an embodiment of the present invention;
Figure 15 G is the schematic diagram seven of the production method of oled display substrate provided in an embodiment of the present invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the present invention Embodiment be described in detail.It should be noted that in the absence of conflict, in the embodiment and embodiment in the application Feature can mutual any combination.
Step shown in the flowchart of the accompanying drawings can be in a computer system such as a set of computer executable instructions It executes.Also, although logical order is shown in flow charts, and it in some cases, can be to be different from herein suitable Sequence executes shown or described step.
Unless otherwise defined, the embodiment of the present invention discloses the technical term used or scientific term should be institute of the present invention The ordinary meaning that personage in category field with general technical ability is understood." first ", " second " used in the embodiment of the present invention And similar word is not offered as any sequence, quantity or importance, and be used only to distinguish different component parts. The similar word such as " comprising " or "comprising", which means to occur element or object before the word, to be covered to appear in and arranges behind the word The element of act perhaps object and its equivalent and be not excluded for other elements or object.The similar word such as " connection " or " connected " Language is not limited to physics or mechanical connection, but may include electrical connection, either direct or indirect 's."upper", "lower", "left", "right" etc. are only used for indicating relative positional relationship, when the absolute position for the object being described changes Afterwards, then the relative positional relationship may also correspondingly change.
Embodiment one
Fig. 1 is the structural schematic diagram one of oled display substrate provided in an embodiment of the present invention, as shown in Figure 1, the present invention is real Apply example and a kind of oled display substrate be provided, comprising: underlay substrate 10, the OLED device layer 20 being arranged on underlay substrate 10 and For encapsulating the encapsulated layer 30 of OLED device layer 20, oled display substrate further include: piezoelectricity functional layer 40.
Specifically, side of the encapsulated layer 30 far from underlay substrate 10 is arranged in piezoelectricity functional layer 40, in electric signal Effect is lower to generate mechanical oscillation, to generate ultrasonic wave or audible sound.
Optionally, the making material of underlay substrate 10 includes: glass, plastics, quartz or polyimides etc., and the present invention is real It applies example and this is not limited in any way.
Specifically, OLED device layer 20 include: thin film transistor (TFT) and the anode being arranged on thin film transistor (TFT), luminescent layer and Cathode, wherein thin film transistor (TFT) includes: gate electrode, gate insulation layer, active layer, interlayer dielectric layer and source-drain electrode, film crystal The drain electrode of pipe is connect with anode.
Optionally, thin film transistor (TFT) can be top gate structure or bottom grating structure, and the embodiment of the present invention does not make any limit to this It is fixed.
Optionally, the making material of encapsulated layer 30 includes: tetrafluoroethene, for protecting OLED device layer not to be damaged.
In the present embodiment, piezoelectricity functional layer 40 for generating mechanical oscillation under the action of electrical signals, to generate ultrasound Wave or audible sound.Wherein, driving source of the mechanical oscillation of piezoelectricity functional layer as screen sounding, and then piezoelectricity functional layer is raw At audible sound, the function of screen sounding can be realized, wherein screen sounding includes: full screen sounding and/or earpiece sounding; Piezoelectricity functional layer generates ultrasonic wave, identifies that the ultrasonic signal of fingerprint reflection can reach fingerprint recognition by setting circuit structure Purpose.
In addition, piezoelectricity functional layer 40, which can be combined with touch-control feedback, realizes touch control detection, to increase user experience.
Oled display substrate provided in an embodiment of the present invention includes: underlay substrate, the OLED device being arranged on underlay substrate Part layer and encapsulated layer for encapsulating OLED device layer, further includes: piezoelectricity functional layer;The setting of piezoelectricity functional layer is remote in encapsulated layer Side from underlay substrate, for generating mechanical oscillation under the action of electrical signals, to generate ultrasonic wave or audible sound.This Inventive embodiments generate ultrasonic wave and audible sound by the way that piezoelectricity functional layer is arranged in oled display substrate, by its mechanical oscillation Wave realizes screen sounding and fingerprint identification function using same structure, reduces the volume of OLED display occupancy, meet The lightening demand of OLED display.
Optionally, Fig. 2 is the structural schematic diagram of piezoelectricity functional layer provided in an embodiment of the present invention, as shown in Fig. 2, of the invention The piezoelectricity functional layer 40 that embodiment provides includes: first electrode 41, piezoelectric layer 42 and second electrode 43.
Wherein, piezoelectric layer 42 is arranged between first electrode 41 and second electrode 43, and first electrode 41 is arranged in piezoelectric layer 42 sides close to underlay substrate 10 or the side far from underlay substrate 10.
Optionally, in order to not influence the display effect of oled display substrate, first electrode 41 is transparent electrode, makes material Material includes: the transparent conductive materials such as tin indium oxide, carbon nanotube or graphene.
Optionally, the making material of piezoelectric layer 42 is piezoelectric material, wherein piezoelectric material includes: Kynoar, poly- two Fluorine Asia ethylene, aluminium nitride AlN or composite oxides of perovskite structure of lead zirconate titanate system etc..
Preferably, in order to realize that flexible display substrates, the making material of piezoelectric layer 42 include: Kynoar.
Optionally, in order to not influence the display effect of oled display substrate, second electrode 43 is transparent electrode, makes material Material includes: the transparent conductive materials such as tin indium oxide, carbon nanotube.
It should be noted that the making material of first electrode 41 and second electrode 43 may be the same or different, this hair Bright embodiment is not limited in any way this.
Specifically, the position embodiment of the present invention of the setting of first electrode 41 and second electrode 43 does not make any limit to this It is fixed, it can be that piezoelectric layer 42 is arranged in close to the side of underlay substrate 10 in first electrode 41, second electrode 43 is arranged in piezoelectricity 42 side far from underlay substrate 10 of layer, can also be that one of piezoelectric layer 42 far from underlay substrate 10 is arranged in first electrode 41 Piezoelectric layer 42 is arranged in close to the side of underlay substrate 10 in side, second electrode 43.
Optionally, as an implementation, Fig. 3 is the side view of oled display substrate provided in an embodiment of the present invention One, Fig. 4 are the side view of first electrode provided in an embodiment of the present invention, and Fig. 5 is bowing for piezoelectric layer provided in an embodiment of the present invention View, Fig. 6 are the top view one of second electrode provided in an embodiment of the present invention, and as illustrated in figures 3-6, the embodiment of the present invention provides Oled display substrate in first electrode 41 include: M N array arrangement the first sub-electrode 410, piezoelectric layer 42 include: M × The piezoelectric structure 420 of N array arrangement, second electrode 43 include: the second sub electrode 430 of M N array arrangement.
Specifically, first electrode 41 is in the orthographic projection and positive throwing of the piezoelectric layer 42 on underlay substrate 10 on underlay substrate 10 Shadow be overlapped, first electrode 41 on underlay substrate 10 orthographic projection and orthographic projection weight of the second electrode 43 on underlay substrate 10 It closes, i.e. the first sub-electrode 410, piezoelectric structure 420 and second sub electrode 430 correspond, in the present embodiment by corresponding the One sub-electrode 410, piezoelectric structure 420 and second sub electrode 430 become vibration unit, that is to say, that mention in the embodiment of the present invention It include: the vibration unit of M N array arrangement in the piezoelectricity functional layer of confession.
It should be noted that Fig. 3~Fig. 6 is illustrated for N=3, the embodiment of the present invention does not make this with M=3 Any restriction.
Specifically, when the voltage signal applied to the first sub-electrode 410 and second sub electrode 430,420 meeting of piezoelectric structure Mechanical oscillation are generated, when the voltage signal difference applied to the first sub-electrode 410 with second sub electrode 430, piezoelectric structure is produced The intensity of raw mechanical oscillation will be different.
Wherein, M, N are positive integer, it should be noted that M is more than or equal to 1, N and is more than or equal to 1, works as M=N=1 When, oled display substrate can only realize full screen sounding, cannot achieve earpiece sounding.When M and N are not simultaneously 1, OLED is shown Panel can not only realize full screen sounding, additionally it is possible to earpiece sounding be realized, specifically, oled display substrate can be by only adjusting The mechanical oscillation of vibration unit near whole earpiece position realize that earpiece sounding, oled display substrate can also pass through all vibrations Full screen sounding is realized in the mechanical oscillation of moving cell.
Optionally, as another embodiment, Fig. 7 is the side view of oled display substrate provided in an embodiment of the present invention Two, Fig. 8 are the top view two of second electrode provided in an embodiment of the present invention, and as shown in Fig. 4, Fig. 5, Fig. 7 and Fig. 8, the present invention is real Apply the first sub-electrode 410 that the first electrode 41 in the oled display substrate of example offer includes: M N array arrangement, piezoelectric layer 42 It include: the piezoelectric structure 420 of M N array arrangement, second electrode 43 includes: plane-shape electrode.
Specifically, first electrode 41 is in the orthographic projection and positive throwing of the piezoelectric layer 42 on underlay substrate 10 on underlay substrate 10 Shadow is overlapped;Specifically, second electrode 43 is in the orthographic projection covering first electrode 41 on underlay substrate 10 on underlay substrate 10 Orthographic projection.
In addition, it is necessary to explanation, when second electrode 43 is plane-shape electrode, second electrode ground connection.
Optionally, Fig. 9 is the structural schematic diagram two of oled display substrate provided in an embodiment of the present invention, as shown in figure 9, this The oled display substrate that inventive embodiments provide further include: buffer layer 50.
Specifically, buffer layer 50 is arranged between encapsulated layer 30 and piezoelectricity functional layer 40;For avoiding in production piezoelectricity function When ergosphere, damage to encapsulated layer can be improved the reliability of oled display substrate.
Optionally, the making material of buffer layer 50 includes: the compound of silica, silicon nitride or silica and silicon nitride, The embodiment of the present invention is not limited in any way this.
Optionally, as shown in figure 9, oled display substrate provided in an embodiment of the present invention further include: protective layer 60.
Specifically, side of the piezoelectricity functional layer 40 far from underlay substrate 10 is arranged in protective layer 60, for protecting piezoelectricity function Ergosphere is not damaged, and equally can be improved the reliability of oled display substrate.
Optionally, the making material of protective layer 60 includes: the compound of silica, silicon nitride or silica and silicon nitride, The embodiment of the present invention is not limited in any way this.
It should be noted that Fig. 9 is illustrated by oled display substrate while for including buffer layer and protective layer.
Optionally, as an implementation, when second electrode 43 includes the second sub electrode 430 of array arrangement, figure 10 be oled display substrate provided in an embodiment of the present invention oblique view one, Figure 11 be the corresponding oled display substrate of Figure 10 etc. Imitate circuit diagram, as shown in Figure 10 and Figure 11, oled display substrate provided in an embodiment of the present invention further include: driving testing circuit 70, the first conducting wire L1 and the second conducting wire L2;Driving testing circuit 70 includes: drive sub-circuits 71, detection sub-circuit 72, first opens Close SW1 and second switch SW2.
Specifically, drive sub-circuits 71, connect with the first sub-electrode 410 and first switch SW1, for generating the first telecommunications Number, when first switch SW1 in the closure state, driving piezoelectric structure 420 generate mechanical oscillation, to generate ultrasonic wave;Driving Sub-circuit 71 is also used to generate the second electric signal, when first switch SW1 in the closure state, driving piezoelectric structure 420 generate Mechanical oscillation, to generate audible sound;Sub-circuit 72 is detected, is connect with second sub electrode 430 and second switch SW2, for working as Second switch SW2 in the closure state, according to the ultrasonic wave of the fingerprint reflection received, forms fingerprint image.
Wherein, each first sub-electrode 410 is connect by the first conducting wire L1 with drive sub-circuits 71, each second sub electrode 430 are connect by the second conducting wire L2 with detection sub-circuit 72.
Specifically, as shown in figure 11, the first end of first switch SW1 is connect with ground terminal GND, second end is respectively with the One sub-electrode 410 and drive sub-circuits 71 connect, and the first end of second switch SW2 is connect with ground terminal GND, second end difference It is connect with second sub electrode 430 and detection sub-circuit 72.
Specifically, the first conducting wire L1 and 41 same layer of first electrode are arranged, the second conducting wire L2 and 43 same layer of second electrode are arranged, It should be noted that the setting of two structure same layers indicated is that two structures are formed using the same technique of identical material.
It should be noted that Figure 11 is illustrated by taking the connection circuit diagram of a vibration unit as an example, piezoelectric structure The connection type of each vibration unit in layer is identical as the connection type of Figure 11.
Optionally, as another embodiment, Figure 12 is the strabismus of oled display substrate provided in an embodiment of the present invention Figure two, Figure 13 are the equivalent circuit diagram of the corresponding oled display substrate of Figure 12, as shown in Figure 12 and Figure 13, further includes: driving inspection Slowdown monitoring circuit 70, the first conducting wire L1 and the second conducting wire L2;Driving testing circuit 70 include: drive sub-circuits 71, detection sub-circuit 72, First switch SW1 and second switch SW2.
Specifically, drive sub-circuits 71, connect with the first sub-electrode 410 and first switch SW1, for generating the first telecommunications Number, when first switch SW1 in the closure state, driving piezoelectric structure 420 generate mechanical oscillation, to generate ultrasonic wave;Driving Sub-circuit 71 is also used to generate the second electric signal, when first switch SW1 in the closure state, driving piezoelectric structure 420 generate Mechanical oscillation, to generate audible sound;Sub-circuit 72 is detected, is connect with the first sub-electrode 410 and second switch SW2, for working as Second switch SW2 in the closure state, according to the ultrasonic wave of the fingerprint reflection received, forms fingerprint image.
Wherein, each first sub-electrode 410 is connect by the first conducting wire L1 with drive sub-circuits 71, passes through the second conducting wire L2 It is connect with detection sub-circuit 72.
Specifically, as shown in figure 13, the first end of first switch SW1 connects with ground terminal GND and the first sub-electrode 410 respectively Connect, second end is connect with drive sub-circuits 71, the first end of second switch SW2 respectively with ground terminal GND and second sub electrode 430 connections, second end are connect with detection sub-circuit 72.
It should be noted that Figure 13 is in first sub-electrode and corresponding piezoelectric structure and second electrode It is illustrated for the connection circuit diagram of part corresponding with the first sub-electrode.
Specifically, the first conducting wire L1 and the second conducting wire L2 and 41 same layer of first electrode are arranged.
Below with reference to Figure 11 and Figure 13 the embodiment of the present invention will be further explained provide oled display substrate working principle, It is specific:
When drive sub-circuits 71 generate the first electric signal, fingerprint identification function is realized, specifically, first stage, driving Sub-circuit 71 generates the first electric signal, and first switch SW1 is in closed state, and second switch SW2 is in an off state, at this point, The signal of first sub-electrode 410 is the first electric signal;Second stage, first switch SW1 are in an off state, second switch SW2 In closed state, at this point, the signal of the first sub-electrode 410 still maintains the first electric signal, the signal of second sub electrode 430 is Ground signalling, piezoelectric structure 420 generate mechanical oscillation under the driving of the first electric signal, to generate ultrasonic wave;When fingerprint presses When oled display substrate, the ultrasonic wave of generation is reflected by fingerprint, and detection sub-circuit receives the ultrasonic wave of fingerprint reflection, shape At fingerprint image.
Specifically, the ultrasonic wave of fingerprint reflection can cause the first sub-electrode and the second son when realizing fingerprint identification function The variation of electrode potential detects sub-circuit according to the variable quantity of the first sub-electrode and second sub electrode current potential, analyzes it Processing, to obtain fingerprint image.
In addition, oled display substrate provided in this embodiment can also realize touch control detection, and when realizing touch control detection, inspection As long as surveying sub-circuit detects the changed position of electric signal caused by the ultrasonic wave reflected as fingerprint, electric signal occurs The position for the touch-control that the position of variation as needs to detect.
When drive sub-circuits 71 generate the second electric signal, screen sounding is realized, specifically, first switch SW1 is in disconnected Open state, second switch SW2 are in closed state, and the signal of the first sub-electrode 410 is the second electric signal, so that piezoelectric structure 420 generate mechanical oscillation, to generate audible sound, wherein the range of audible sound is 20~20000HZ.Specifically, when being located at The first switch SW1 of piezoelectric structure connection near earpiece position is in the open state, the piezoelectric structure connection at remaining position First switch SW1 when being in close state, that is to say, that at this point, the pressure near 71 control earpiece positions of drive sub-circuits Electric structure, oled display substrate realize earpiece sounding;When the first switch of whole piezoelectric structures connection in oled display substrate SW1 is in the open state, when second switch SW2 is in close state, at this point, drive sub-circuits 71 can control whole piezoelectricity Structure, oled display substrate realize full screen sounding.
Embodiment two
Inventive concept based on the above embodiment, the embodiment of the present invention also provide a kind of production side of oled display substrate Method, Figure 14 are the flow chart of the production method of oled display substrate provided in an embodiment of the present invention, and as shown in figure 14, the present invention is real The production method that the oled display substrate of example offer is provided, specifically includes the following steps:
Step 100 provides a underlay substrate.
Optionally, the making material of underlay substrate includes: glass, plastics, quartz or polyimides etc., and the present invention is implemented Example is not limited in any way this.
Step 200 forms OLED device layer on underlay substrate.
Specifically, OLED device layer includes: thin film transistor (TFT) and the anode being arranged on thin film transistor (TFT), luminescent layer and yin Pole, wherein thin film transistor (TFT) includes: active layer, gate electrode, gate insulation layer, interlayer dielectric layer and source-drain electrode, thin film transistor (TFT) Drain electrode connect with anode.
Optionally, thin film transistor (TFT) can be top gate structure or bottom grating structure, and the embodiment of the present invention does not make any limit to this It is fixed.
Step 300 forms encapsulated layer for encapsulating OLED device layer on OLED device layer.
Optionally, the making material of encapsulated layer includes: tetrafluoroethene, for protecting OLED device layer not to be damaged.
Step 400 forms piezoelectricity functional layer on encapsulated layer.
Wherein, piezoelectric package layer is for generating mechanical oscillation under the action of electrical signals, to generate ultrasonic wave or audible Sound wave.
In the present embodiment, piezoelectricity functional layer for generating mechanical oscillation under the action of electrical signals, to generate ultrasonic wave Or audible sound, piezoelectricity functional layer generate audible sound, and the function of screen sounding can be realized, piezoelectricity functional layer generates ultrasound Wave is the purpose that can reach fingerprint recognition by the ultrasonic signal that setting circuit structure fingerprint reflects.
In addition, piezoelectricity functional layer, which can be combined with touch-control feedback, realizes touch control detection, to increase user experience.
The production method of oled display substrate provided in an embodiment of the present invention includes: to provide a underlay substrate;In substrate base OLED device layer is formed on plate;The encapsulated layer for encapsulating OLED device layer is formed on OLED device layer;The shape on encapsulated layer At piezoelectricity functional layer, wherein piezoelectric package layer for generating mechanical oscillation under the action of electrical signals, with generate ultrasonic wave or Audible sound.The embodiment of the present invention generates ultrasound by the way that piezoelectricity functional layer is arranged in oled display substrate, by its mechanical oscillation Wave and audible sound realize screen sounding and fingerprint identification function using same structure, reduce the body of OLED display occupancy Product, meets the lightening demand of OLED display.
Optionally, step 400 specifically includes: forming first electrode, piezoelectric layer and second electrode, on encapsulated layer to be formed Piezoelectricity functional layer, wherein piezoelectric layer is arranged between the first electrode and the second electrode.
Optionally, as an embodiment, step 400 may include: that first electrode, pressure are sequentially formed on encapsulated layer Electric layer and second electrode.
Optionally, as another embodiment, step 400 may include: sequentially formed on encapsulated layer second electrode, Piezoelectric layer and first electrode.
Optionally, in order to not influence the display effect of oled display substrate, first electrode is transparent electrode, making material It include: the transparent conductive materials such as tin indium oxide, carbon nanotube or graphene.
Optionally, the making material of piezoelectric layer is piezoelectric material, wherein piezoelectric material includes: Kynoar, poly- difluoro The composite oxides etc. of the perovskite structure of sub- ethylene, aluminium nitride AlN or lead zirconate titanate system.
Preferably, in order to realize that flexible display substrates, the making material of piezoelectric layer include: Kynoar.
Optionally, in order to not influence the display effect of oled display substrate, second electrode is transparent electrode, making material It include: the transparent conductive materials such as tin indium oxide, carbon nanotube.
It should be noted that the making material of first electrode and second electrode may be the same or different, the present invention is real It applies example and this is not limited in any way.
Specifically, first electrode includes: the first sub-electrode of M N array arrangement, piezoelectric layer includes: M N array arrangement Piezoelectric structure, second electrode include: M N array arrangement second sub electrode or second electrode include: plane-shape electrode.
In the present embodiment, oled display substrate further include: driving testing circuit, the first conducting wire and the second conducting wire, wherein Driving testing circuit includes: drive sub-circuits, detection sub-circuit, first switch and the second switch, and drive sub-circuits are opened with first Connection connects, and second switch is connect with detection sub-circuit.
Optionally, when second electrode includes: the sub-electrode of array arrangement, forming first electrode includes: to form the first electricity Pole and the first conducting wire, wherein the first sub-electrode is connect by the first conducting wire with drive sub-circuits;Forming second electrode includes: shape At second electrode and the second conducting wire, wherein second sub electrode is connect by the second conducting wire with drive sub-circuits.
Specifically, vapor deposition (the Plasma Enhanced Chemical Vapor for passing through plasma enhanced chemical Deposition, abbreviation PECVD) the first metallic film of process deposits, first electrode and the first conducting wire are formed by patterning processes, The second metallic film is deposited by pecvd process, forms second electrode and the second conducting wire by patterning processes.
It should be noted that patterning processes are to include: the works such as photoresist coating, exposure, development, etching and photoresist lift off Skill.
Optionally, when second electrode includes: plane-shape electrode, forming first electrode includes: to form first electrode, first lead Line and the second conducting wire, wherein the first sub-electrode is connect by the first conducting wire with drive sub-circuits, and the second conducting wire and detection are passed through Circuit connection.
Specifically, vapor deposition (the Plasma Enhanced Chemical Vapor for passing through plasma enhanced chemical Deposition, abbreviation PECVD) the first metallic film of process deposits, by patterning processes formed first electrode, the first conducting wire and Second conducting wire.
Optionally, in order to guarantee the performance of oled display substrate, forming piezoelectric layer includes: coating insulation film, passes through exposure Photo development processes form piezoelectricity channel;Piezoelectric layer is formed in piezoelectricity channel by InkJet printing processes.
It is alternatively possible to coat insulation film on the first electrode, insulation film can also be coated on the second electrode.
Optionally, the making material of insulation film can be polyimides, silica, silicon nitride or silica and nitridation The compound of silicon.
Specifically, the thickness of insulation film is equal to the sum of first electrode and piezoelectric layer thickness.
In the present embodiment, pass through the piezoelectric layer in piezoelectricity channel, it is ensured that the shape of piezoelectric layer avoids and passing through ink-jet When printing technology forms piezoelectric layer, piezoelectric material is not easy to be formed, so that the piezoelectric structure of adj acent piezoelectric structure connects, influences OLED The screen sounding and finger identification function of display base plate.
Optionally, before step 400, the production method of oled display substrate provided in an embodiment of the present invention further include: Buffer layer is formed on encapsulated layer.
Optionally, the making material of buffer layer includes: the compound of silica, silicon nitride or silica and silicon nitride, this Inventive embodiments are not limited in any way this.
Optionally, after step 400, the production method of oled display substrate provided in an embodiment of the present invention further include: Protective layer is formed in piezoelectricity functional layer.
Optionally, the making material of protective layer includes: the compound of silica, silicon nitride or silica and silicon nitride, this Inventive embodiments are not limited in any way this.
Side of the piezoelectric layer close to underlay substrate is arranged in first electrode below, and second electrode includes what array arranged For second sub electrode, in conjunction with the production of Figure 15 A- Figure 15 G oled display substrate that the embodiment of the present invention will be further explained provides Method.
Step 510 sequentially forms OLED device layer 20 and encapsulated layer 30 on underlay substrate 10, specifically as shown in fig. 15.
Step 520 forms buffer layer 50 on encapsulated layer 30, specifically as shown in fig. 15b.
Specifically, depositing buffer thin film on encapsulated layer 30, buffer layer 50 is formed by patterning processes.
Step 530, the first electrode and first that the first sub-electrode 410 including array arrangement is formed on buffer layer 50 are led Line (not shown), specifically as shown in figure 15 c.
Step 540 is coated with insulation film 80 on the first electrode, forms the first sub-electrode of exposure by exposure development technique 410 groove 81, specifically as shown in figure 15d.
Wherein, the thickness of insulation film 80 is equal to the sum of first electrode and piezoelectric layer thickness.
Step 550, the piezoelectricity for forming the piezoelectric structure 420 including array arrangement by InkJet printing processes in groove 81 Layer, specifically as shown in Fig. 15 E.
Step 560, the second electrode and the second conducting wire for forming the second sub electrode 430 including array arrangement over the piezoelectric layer (not shown), specifically as shown in fig. 15f.
Step 570 forms protective layer 60 on the second electrode, specifically as shown in Figure 15 G.
Specifically, depositing protective film on the second electrode, protective layer is formed by patterning processes.
It should be noted that when second electrode includes plane-shape electrode, with the above method the difference is that step 530 and step Rapid 560, correspond to step 530 be on buffer layer 50 formed include array arrangement the first sub-electrode 410 first electrode, First conducting wire and the second conducting wire, the step 560 corresponded to are to form plane-shape electrode on the piezoelectric materials, and wherein plane-shape electrode is serving as a contrast Orthographic projection of the projection covering first electrode on underlay substrate on substrate, details are not described herein for the embodiment of the present invention.
Embodiment three
Inventive concept based on the above embodiment, the embodiment of the present invention also provide a kind of OLED display, comprising: OLED Display base plate.
Wherein, oled display substrate is the oled display substrate that embodiment one provides, realization principle and realization effect class Seemingly, details are not described herein.
Specifically, the OLED display can be with are as follows: oled panel, mobile phone, tablet computer, television set, display, notes Any products or components having a display function such as this computer, Digital Frame, navigator.
Attached drawing of the embodiment of the present invention is pertained only to the present embodiments relate to the structure arrived, and other structures, which can refer to, usually to be set Meter.
For clarity, in the attached drawing of embodiment for describing the present invention, the thickness and size of layer or micro-structure It is amplified.It is appreciated that ought such as layer, film, region or substrate etc element be referred to as be located at another element "above" or "below" When, which " direct " can be located at "above" or "below" another element, or may exist intermediary element.
In the absence of conflict, the feature in the embodiment of the present invention, that is, embodiment can be combined with each other new to obtain Embodiment.
Although disclosed herein embodiment it is as above, the content only for ease of understanding the present invention and use Embodiment is not intended to limit the invention.Technical staff in any fields of the present invention is taken off not departing from the present invention Under the premise of the spirit and scope of dew, any modification and variation, but the present invention can be carried out in the form and details of implementation Scope of patent protection, still should be subject to the scope of the claims as defined in the appended claims.

Claims (15)

1. a kind of oled display substrate characterized by comprising underlay substrate, the OLED device being arranged on the underlay substrate Part layer and encapsulated layer for encapsulating the OLED device layer, the oled display substrate further include: piezoelectricity functional layer;
Side of the encapsulated layer far from underlay substrate is arranged in the piezoelectricity functional layer, for generating under the action of electrical signals Mechanical oscillation, to generate ultrasonic wave or audible sound.
2. oled display substrate according to claim 1, which is characterized in that the piezoelectricity functional layer include: first electrode, Piezoelectric layer and second electrode;
The piezoelectric layer is arranged between the first electrode and the second electrode;
The piezoelectric layer is arranged in close to the side of the underlay substrate or far from the underlay substrate in the first electrode Side.
3. oled display substrate according to claim 2, which is characterized in that the first electrode includes: M N array row First sub-electrode of column, the piezoelectric layer include: the piezoelectric structure of M N array arrangement;
Orthographic projection of the first electrode on underlay substrate is overlapped with orthographic projection of the piezoelectric layer on underlay substrate, In, M, N are positive integer.
4. oled display substrate according to claim 3, which is characterized in that the second electrode includes: M N array row The second sub electrode of column;
Orthographic projection of the first electrode on underlay substrate is overlapped with orthographic projection of the second electrode on underlay substrate.
5. oled display substrate according to claim 3, which is characterized in that the second electrode includes: plane-shape electrode;
Orthographic projection of the second electrode on underlay substrate covers orthographic projection of the first electrode on underlay substrate.
6. oled display substrate according to claim 2, which is characterized in that the first electrode and second electrode are transparent Electrode, making material include: tin indium oxide, nanotube or graphene;
The making material of the piezoelectric layer includes: Kynoar.
7. oled display substrate according to claim 1, which is characterized in that the oled display substrate further include: buffering Layer, the buffer layer are arranged between the encapsulated layer and the piezoelectricity functional layer;And/or
The side of the piezoelectricity functional layer far from underlay substrate is arranged in protective layer, the protective layer.
8. oled display substrate according to claim 4, which is characterized in that the oled display substrate further include: driving Detection circuit, the first conducting wire and the second conducting wire;The driving testing circuit includes: drive sub-circuits, detection sub-circuit, first opens Pass and second switch;
The drive sub-circuits are connect with the first sub-electrode and first switch, for generating the first electric signal, at first switch When closed state, the piezoelectric structure is driven to generate mechanical oscillation, to generate ultrasonic wave;It is also used to generate the second electric signal, When first switch in the closure state, drive the piezoelectric structure to generate mechanical oscillation, to generate audible sound;
The detection sub-circuit, connect with second sub electrode and second switch, for working as second switch in the closure state, root According to the ultrasonic wave of the fingerprint reflection received, fingerprint image is formed;
Wherein, each first sub-electrode is connect by the first conducting wire with drive sub-circuits, and each second sub electrode passes through the Two conducting wires are connect with detection sub-circuit.
9. oled display substrate according to claim 5, which is characterized in that the oled display substrate further include: driving Detection circuit, the first conducting wire and the second conducting wire;The driving testing circuit includes: drive sub-circuits, detection sub-circuit, first opens Pass and second switch;
The drive sub-circuits are connect with the first sub-electrode and first switch, for generating the first electric signal, at first switch When closed state, the piezoelectric structure is driven to generate mechanical oscillation, to generate ultrasonic wave;It is also used to generate the second electric signal, When first switch in the closure state, drive the piezoelectric structure to generate mechanical oscillation, to generate audible sound;
The detection sub-circuit, connect with the first sub-electrode and second switch, for working as second switch in the closure state, root According to the ultrasonic wave of the fingerprint reflection received, fingerprint image is formed;
Wherein, each first sub-electrode is connect by the first conducting wire with drive sub-circuits, passes through the second conducting wire and detection sub-circuit Connection.
10. oled display substrate according to claim 8, which is characterized in that first conducting wire and the first electrode Same layer setting, second conducting wire and the second electrode same layer are arranged.
11. a kind of OLED display characterized by comprising as the described in any item OLED of claim 1~10 show base Plate.
12. a kind of production method of oled display substrate characterized by comprising
One underlay substrate is provided;
OLED device layer is formed on the underlay substrate;
The encapsulated layer for encapsulating the OLED device layer is formed on the OLED device layer;
Piezoelectricity functional layer is formed on the encapsulated layer, wherein the piezoelectric package layer for generating under the action of electrical signals Mechanical oscillation, to generate ultrasonic wave or audible sound.
13. according to the method for claim 12, which is characterized in that described to form piezoelectricity functional layer packet on the encapsulated layer It includes:
First electrode, piezoelectric layer and second electrode are formed on the encapsulated layer, to form piezoelectricity functional layer, wherein piezoelectric layer Setting is between the first electrode and the second electrode.
14. according to the method for claim 13, which is characterized in that forming piezoelectric layer includes:
It is coated with insulation film, piezoelectricity channel is formed by exposure development technique;
Piezoelectric layer is formed in the piezoelectricity channel by InkJet printing processes.
15. according to the method for claim 12, which is characterized in that it is described on the encapsulated layer formed piezoelectricity functional layer it Before, the method also includes:
Buffer layer is formed on the encapsulated layer;
It is described to be formed after piezoelectricity functional layer on the encapsulated layer, the method also includes:
Protective layer is formed in the piezoelectricity functional layer.
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