CN109244016B - Apparatus and method for detecting abnormality of tray cover opening and closing mechanism - Google Patents
Apparatus and method for detecting abnormality of tray cover opening and closing mechanism Download PDFInfo
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- CN109244016B CN109244016B CN201811118382.2A CN201811118382A CN109244016B CN 109244016 B CN109244016 B CN 109244016B CN 201811118382 A CN201811118382 A CN 201811118382A CN 109244016 B CN109244016 B CN 109244016B
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
The present disclosure provides an apparatus and method for detecting an abnormality of a tray cover opening and closing mechanism including one or more vacuum suction members for sucking up a tray cover, the apparatus including: a tray cover simulant; one or more suction performance sensors attached to the tray cover simulant for sensing suction performance of each vacuum suction member when the tray cover simulant is sucked, for determining whether the tray cover opening and closing mechanism is abnormal.
Description
Technical Field
The present disclosure relates generally to the field of semiconductor device manufacturing, and more particularly, to an apparatus and method for detecting an abnormality of a tray cover opening and closing mechanism.
Background
In the field of semiconductor device manufacturing, the process of producing, manufacturing and packaging semiconductor devices is performed on a large-scale flow line. JEDEC standard trays (JEDEC standard trays), which are generally constructed of a tray bottom (tray base) having a space therein for accommodating a semiconductor device and a tray cover (tray lid), are widely used in the semiconductor industry. In operation, semiconductor devices are received in the tray bottom and capped with the tray cover. Generally, in a semiconductor device assembling process, a tray cover opening and closing mechanism is required to open the tray cover, place the semiconductor device in the accommodation space of the tray bottom, and then return the tray cover to the tray bottom to close the tray. Since the semiconductor device is very fragile, fine shocks and impacts may cause scratches or damages of the semiconductor device to cause product failure. If the tray cover is accidentally dropped when the tray cover opening/closing mechanism opens/closes the tray cover, the generated shock or impact may also cause the semiconductor device to be scratched or damaged, and thus the operational stability of opening and closing the tray cover is very important for the product quality.
Disclosure of Invention
The present disclosure provides an apparatus and method for detecting an abnormality of a tray cover opening and closing mechanism. With the apparatus and method, by sensing the suction performance of each vacuum suction member of the tray cover opening and closing mechanism when the tray cover simulant is sucked by the suction performance sensor attached to the tray cover simulant to determine whether the tray cover opening and closing mechanism is abnormal, the operation abnormality of the tray cover opening and closing mechanism can be effectively diagnosed, and the cause of the abnormality can be determined and found.
According to an aspect of the present disclosure, there is provided an apparatus for detecting an abnormality of a tray cover opening and closing mechanism including one or more vacuum suction members for sucking up a tray cover, the apparatus including: a tray cover simulant; one or more suction performance sensors attached to the tray cover simulant for sensing suction performance of each vacuum suction member when the tray cover simulant is sucked, for determining whether the tray cover opening and closing mechanism is abnormal.
Optionally, in one example of the above aspect, the apparatus further includes an abnormality determination unit for determining whether the tray cover opening and closing mechanism is abnormal based on the adsorptive performance sensing values of the respective vacuum adsorbing members.
Optionally, in an example of the above aspect, the apparatus further comprises: one or more sensing value display units for displaying the suction performance sensing values of the respective vacuum suction members for a user to determine whether the tray cover opening and closing mechanism is abnormal.
Optionally, in one example of the above aspect, the one or more suction performance sensors are movable, and the number and position of the suction performance sensors are adjusted based on the number and position of the vacuum suction members in the tray cover opening and closing mechanism.
Optionally, in an example of the above aspect, the apparatus further comprises: one or more vacuum suction member position sensors for sensing the position of each vacuum suction member in the tray cover opening and closing mechanism; and a suction performance sensor position adjusting mechanism for adjusting the position of the corresponding suction performance sensor on the tray cover simulant based on the sensed position of each vacuum suction member.
Optionally, in one example of the above aspect, the suction performance sensor position adjustment mechanism includes a movement driving mechanism integrated with the suction performance sensor, and the movement driving mechanism communicates with the one or more vacuum suction member position sensors by wireless communication.
Optionally, in one example of the above aspect, the tray cover simulant is at least partially constructed of steel, and the adsorptive performance sensor is at least partially constructed of a magnet.
Optionally, in one example of the above aspect, the adsorption performance sensor includes a vacuum degree sensor or a pressure sensor.
Optionally, in an example of the above aspect, the apparatus further comprises: a tray bottom simulant that, together with the tray cover simulant, simulates a tray box to be opened and closed by the tray bottom switching mechanism.
Optionally, in one example of the above aspect, the tray cover simulant is formed to be heavier than the tray cover.
According to another aspect of the present disclosure, there is provided a method for detecting an abnormality of a tray cover opening and closing mechanism including one or more vacuum suction members for sucking up a tray cover, the method including: sensing a suction performance of each vacuum suction member with one or more suction performance sensors attached to the tray cover simulant while the tray cover simulant is being suctioned by the one or more vacuum suction members; and determining whether the tray cover opening and closing mechanism is abnormal based on the suction performance sensing values of the respective vacuum suction members.
Optionally, in one example of the above aspect, before the tray of the simulant is sucked by the one or more vacuum sucking members, the method further comprises: the number and position of the suction performance sensors are adjusted based on the number and position of vacuum suction members in the tray cover opening and closing mechanism.
Optionally, in one example of the above aspect, the method further comprises: sensing a position of the one or more vacuum suction members, and adjusting the number and position of the suction performance sensors based on the number and position of the vacuum suction members in the tray cover opening and closing mechanism includes: the number and positions of the suction performance sensors are adjusted based on the number of vacuum suction members in the tray cover opening and closing mechanism and the sensed positions of the respective vacuum suction members.
With the apparatus and method of the present disclosure, by the suction performance sensor attached to the tray cover simulant, the suction performance of each vacuum suction member of the tray cover opening and closing mechanism is sensed when the tray cover simulant is sucked to determine whether the tray cover opening and closing mechanism is abnormal, it is possible to effectively diagnose whether the tray cover opening and closing mechanism is abnormal, which is helpful to determine and find the cause of the abnormality so as to adjust the tray cover opening and closing mechanism in a targeted manner.
With the apparatus and method of the present disclosure, by determining whether the tray cover opening and closing mechanism is abnormal based on the adsorptive performance sensing values of the respective vacuum adsorbing members, the adsorptive performance of the respective vacuum adsorbing members can be accurately and quantitatively determined through a standardized process, and the source of causing the abnormality can be ascertained so as to adjust the tray cover opening and closing mechanism in a targeted manner.
By using the device and the method disclosed by the invention, whether the opening and closing mechanism of the tray cover is abnormal or not is determined by displaying the adsorptive property sensing value of each vacuum adsorption component, the adsorptive property of each vacuum adsorption component can be displayed quantitatively and intuitively, the source of the abnormity can be found, and the opening and closing mechanism of the tray cover can be debugged conveniently.
With the device and the method disclosed by the invention, the device for detecting the abnormity of the tray cover opening and closing mechanism can be adapted to trays and various assembly line tools with various specifications and configurations by adjusting the number and the positions of the adsorption performance sensors based on the number and the positions of the vacuum adsorption components in the tray cover opening and closing mechanism, and the reusability and the detection efficiency of the detection device can be improved.
With the apparatus and method of the present disclosure, the position of each vacuum adsorption member in the tray cover opening and closing mechanism is sensed by one or more vacuum adsorption member position sensors, and the position of the corresponding adsorption performance sensor on the tray cover simulant is adjusted by the adsorption performance sensor position adjustment mechanism based on the sensed position of each vacuum adsorption member, so that errors generated by manually aligning mutually corresponding components can be reduced in the work of the inspection apparatus, and trial and error costs can be saved, and the work efficiency of the detection apparatus can be improved.
With the apparatus and method of the present disclosure, the tray cover simulant is formed to be heavier than the tray cover so that confidence in the stability of the tray cover switching mechanism is enhanced. In particular, when a heavier tray cover simulant is used, the tray cover opening and closing mechanism is shown to be healthy and free from abnormalities, and then it will be easier to stably suck up the conventional tray cover in mass production.
Drawings
A further understanding of the nature and advantages of the present disclosure may be realized by reference to the following drawings. In the drawings, similar components or features may have the same reference numerals.
Fig. 1 shows a schematic view of a tray cover opening and closing mechanism according to an embodiment.
Fig. 2 shows a block diagram of the structure of an apparatus for detecting an abnormality of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Fig. 2A shows a block diagram of the structure of an apparatus for detecting an abnormality of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Fig. 2B shows a block diagram of the structure of an apparatus for detecting an abnormality of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Fig. 3 shows a flow chart of a method for detecting an anomaly of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Fig. 4 shows a schematic diagram of detecting an anomaly of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Fig. 5 shows a block diagram of the structure of an apparatus for detecting abnormality of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Fig. 6 shows a flow chart of a method for detecting an anomaly of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
Reference numerals
10 tray cover switch mechanism
12 tray
101 vacuum adsorption member
101-1 vacuum adsorption member
101-2 vacuum adsorption component
121 tray cover
123 bottom of tray
20 detection device
201 tray cover simulant
203 adsorption performance sensor
203-1 adsorption performance sensor
203-2 adsorption performance sensor
205 abnormality determination unit
207 sensed value display unit
502 position adjusting mechanism for adsorption performance sensor
504 moving driving mechanism
Detailed Description
JEDEC standard trays are widely used in the semiconductor industry and are typically constructed of a tray base and a tray cover, wherein the tray base has a space therein for receiving a semiconductor device. In operation, semiconductor devices are received in the tray bottom and capped with the tray cover. Generally, in the semiconductor device assembling process, a tray cover opening and closing mechanism is required to open the tray cover, place the semiconductor device in the accommodation space of the tray bottom, and then return the tray cover to the tray bottom to close the tray. Since the semiconductor device is very fragile, fine shocks and impacts may cause scratches or damages of the semiconductor device to cause product failure. If the tray cover is accidentally dropped when the tray cover opening/closing mechanism opens/closes the tray cover, the generated shock or impact may also cause the semiconductor device to be scratched or damaged, and thus the operational stability of opening and closing the tray cover is very important for the product quality.
When a vacuum pump is used to suck the tray cover, since the tray cover is a large flat surface and may have irregular warpage or curvature on the flat surface, there is also a high degree of error in the vacuum sucking member (i.e., the tray cover opening and closing mechanism) to which the vacuum pump is connected at the time of suction, and thus sometimes the vacuum sucking member does not sufficiently contact the tray cover, which causes a lack of vacuum degree or vacuum leakage in the vacuum sucking member for sucking the tray cover, which causes imbalance in the sucking force of the respective vacuum sucking members, resulting in the tray cover falling down during being picked up to damage the electronic devices in the tray.
The vacuum degree of the vacuum adsorption component connected with the vacuum pump is detected to detect the switching mechanism of the tray cover, and the problem that the tray cover drops cannot be completely avoided. Moreover, the reason that the abnormity of the tray cover opening and closing mechanism is difficult to judge is captured by repeated grabbing attempts, and the debugging can not be carried out in a targeted manner. And even if repeatedly grabbed without dropping under experimental conditions, accidental dropping may occur in real mass production. Ideally, each vacuum adsorption component is guaranteed to have enough adsorption performance, so that the tray cover can obtain the balanced suction of each vacuum adsorption component, and then can be lifted up and put down stably, and damage to products is avoided.
The subject matter described herein will now be discussed with reference to example embodiments. It should be understood that these embodiments are discussed only to enable those skilled in the art to better understand and thereby implement the subject matter described herein, and are not intended to limit the scope, applicability, or examples set forth in the claims. Changes may be made in the function and arrangement of elements discussed without departing from the scope of the disclosure. Various examples may omit, substitute, or add various procedures or components as needed. For example, the described methods may be performed in an order different from that described, and various steps may be added, omitted, or combined. In addition, features described with respect to some examples may also be combined in other examples.
As used herein, the term "include" and its variants mean open-ended terms in the sense of "including, but not limited to. The term "based on" means "based at least in part on". The terms "one embodiment" and "an embodiment" mean "at least one embodiment". The term "another embodiment" means "at least one other embodiment". The terms "first," "second," and the like may refer to different or the same object. Other definitions, whether explicit or implicit, may be included below. The definition of a term is consistent throughout the specification unless the context clearly dictates otherwise.
In an embodiment of the present disclosure, the term "tray cover opening and closing mechanism" is a mechanism for opening the tray cover and putting the tray cover back to the bottom of the tray to close the tray. Fig. 1 illustrates a tray cover opening and closing mechanism 10 according to one embodiment. As shown in fig. 1, the tray 12 is composed of a tray cover 121 and a tray bottom 123, and the tray cover 121 and the tray bottom 123 are separable, such as by sucking the tray cover 121 by the tray cover opening and closing mechanism 10 to open or close the tray 12.
In one embodiment, the tray cover opening and closing mechanism 10 is constructed of one or more vacuum suction members 101 connected to a vacuum pump. In various embodiments, the vacuum adsorbing member 101 may be, for example, but not limited to, a vacuum nozzle, a vacuum suction head, a vacuum suction port, or the like. For example, referring to fig. 1, the vacuum suction members 101 are vacuum nozzles, four vacuum nozzles being shown in the example of fig. 1, and in other embodiments, the tray cover switching mechanism 10 may include any number of vacuum suction members 101, such as two, six, or eight. In the preferred embodiment, the layout of the vacuum sucking member 101 of the tray cover opening and closing mechanism 10 is a layout balanced from a mechanical point of view, which contributes to smooth opening and closing of the tray cover 121.
In one embodiment, when the tray cover opening and closing mechanism 10 sucks the tray cover 121, the vacuum sucking member 101 of the tray cover opening and closing mechanism 10 is slowly dropped to a predetermined height that can be brought into contact with the tray cover 121 (normally, the vacuum sucking member 101 is dropped to the predetermined height and can be brought into contact with the tray cover 121), the tray cover 121 is sucked by vacuum and then slowly raised to stably pick up the tray cover 121, and then, after the semiconductor device is placed in the accommodation space at the bottom of the tray, the sucked tray cover 121 is slowly lowered to close the tray 12.
Various embodiments of the present disclosure simulate a situation in which a tray cover used in mass production is opened and closed by a tray cover opening and closing mechanism using a tray cover simulant (simulated tray cover), and a suction performance sensor is provided on the tray cover simulant for sensing suction performance of each vacuum suction member of the tray cover opening and closing mechanism when the tray cover simulant is sucked. Through such a simulation test, it is possible to obtain the suction performance of the tray cover opening and closing mechanism close to the real production situation, that is, the suction force to which the tray cover is subjected (not only the degree of vacuum provided by the vacuum pump) and to find an abnormality from the sensed value of the suction performance sensor. If tray lid on-off mechanism passes through such simulation test, then can guarantee that each vacuum adsorption component homoenergetic enough has adsorption efficiency for the tray lid obtains the balanced suction of each vacuum adsorption component and then can be lifted up and put down steadily, avoids the product impaired.
Embodiments of the disclosed apparatus and method for detecting an abnormality of a tray cover opening and closing mechanism will now be described with reference to the accompanying drawings.
[ first embodiment ] A method for manufacturing a semiconductor device
Fig. 2 shows a block diagram of a structure of an apparatus for detecting abnormality of a tray cover opening and closing mechanism (hereinafter simply referred to as a detection apparatus) 20 according to an embodiment of the present disclosure.
As shown in fig. 2, the detection device 20 includes a tray cover simulant 201. In one embodiment, to make the simulated scene closer to the real scene, the tray cover simulator 201 may be set to be the same length and width as the tray cover 121. In one embodiment, the tray cover simulant 201 is formed to be heavier than the tray cover 121. In one embodiment, the simulation may be achieved by designing a tray cover simulator 201 of a particular thickness.
As shown in fig. 2, the detection device 20 further includes one or more suction performance sensors 203 attached to the tray cover simulant 201 for sensing the suction performance of each vacuum suction member 101 when the tray cover simulant 201 is sucked, for determining whether the tray cover opening and closing mechanism 10 is abnormal. In one embodiment, each vacuum adsorbing member 101 corresponds to one adsorption performance sensor 203 on the tray cover simulant 201, and when the tray cover simulant 201 is adsorbed, the adsorption performance sensor 203 is close to its corresponding vacuum adsorbing member 101 so as to be able to sense the adsorption performance of the corresponding vacuum adsorbing member 101. When the suction performance of each vacuum suction member 101 is detected, it can be determined whether the tray cover opening and closing mechanism 10 is abnormal. A criterion for judging whether or not the tray cover opening and closing mechanism 10 is abnormal will be described below with reference to fig. 4.
Fig. 2A shows a block diagram of the structure of the detection device 20 for detecting an abnormality of the tray cover opening and closing mechanism according to the embodiment of the present disclosure. In one embodiment, the inspection apparatus 20 may further include an abnormality determination unit 205 for determining whether the tray cover opening and closing mechanism 10 is abnormal based on the suction performance sensing values of the respective vacuum suction members 101. The anomaly determination unit 205 may be implemented using any software, hardware, or combination of software and hardware, such as, but not limited to, a processor, a computing device containing memory and a processor, a Field Programmable Gate Array (FPGA), an Application Specific Integrated Circuit (ASIC), and so forth. The computing device may be any computing device for enabling determination of whether the tray cover opening and closing mechanism 10 is abnormal based on the adsorptive performance sensing values of the respective vacuum adsorbing members 101, such as, but not limited to, a laptop computer, a tablet computer, a mobile phone, a personal digital assistant, and the like. In one embodiment, the anomaly determination unit 205 can be located outside the tray cover simulation 201, such as not in contact with or coupled to the tray cover simulation 201. In one embodiment, the abnormality determining unit 205 may wirelessly communicate with the one or more suction performance sensors 203 to obtain the suction performance sensing value of each vacuum suction member 101, so that it can be determined whether the tray cover opening and closing mechanism 10 is abnormal based on the suction performance sensing value of each vacuum suction member 101. A criterion for judging whether or not the tray cover opening and closing mechanism 10 is abnormal will be described below with reference to fig. 4.
Fig. 2B shows a block diagram of the structure of the detection device 20 for detecting an abnormality of the tray cover opening and closing mechanism according to the embodiment of the present disclosure. In one embodiment, the detection apparatus 20 may further include one or more sensing value display units 207 for displaying the suction performance sensing value of each vacuum suction member 101, so that the user can determine whether the tray cover opening and closing mechanism 10 is abnormal. In this way, the adsorptive property sensing value of each vacuum adsorption member 101 can be displayed through one or more sensing value display units 207, so that an engineer can quantitatively and intuitively see the adsorptive property of the vacuum adsorption member, find out the source of abnormality, debug the tray cover opening and closing mechanism according to the seen result, and also see the adsorptive property of the vacuum adsorption member in real time during debugging, thereby facilitating and improving the simulation test.
In one embodiment, the sensing value display unit 207 may be integrated with the adsorption performance sensors 203, that is, a sensing value display unit 207 for displaying the adsorption performance sensing value of the adsorption performance sensor 203 is integrated on each adsorption performance sensor 203. In another embodiment, the sensing value display unit 207 may be located on the tray cover simulator 201 or outside the tray cover simulator 201 for displaying the suction performance sensing value of each vacuum suction member 101.
In one embodiment, the sensed value display unit 207 may be wired and communicated with the one or more suction performance sensors 203 to obtain the suction performance sensed value of each vacuum suction member 101. In one embodiment, the sensed value display unit 207 may wirelessly communicate with one or more suction performance sensors 203 to obtain the suction performance sensed value of each vacuum suction member 101, so that the suction performance sensed value of each vacuum suction member 101 can be displayed for determining whether the tray cover opening and closing mechanism 10 is abnormal. In an embodiment where the sensed value display unit 207 is in wireless communication with the one or more sorption performance sensors 203, each sensed value display unit 207 corresponds to one sorption performance sensor 203, by way of example and not limitation, the sensed value display unit 207 may enable wireless communication with only its corresponding sorption performance sensor 203 by exchanging a unique identifier, a key, or the like. A criterion for judging whether or not the tray cover opening and closing mechanism 10 is abnormal will be described below with reference to fig. 4. Alternatively, whether the sensed value display unit 207 is integrated with the adsorption performance sensor 203 or is located on the tray cover simulator 201 as a separate sensed value display unit 207, the sensed value display unit 207 is arranged to avoid a center of gravity shift of the tray cover simulator 201.
In one embodiment, the tray cover simulant 201 is formed to be heavier than the tray cover 121. As described above, the tray cover opening and closing mechanism 10 is used to open the tray cover 121 and put the tray cover 121 back to the tray bottom 123 to close the tray 12. Typically, in a production line, the tray cover opening and closing mechanism 10 opens a tray, such as a JEDEC standard tray, and the tray cover 121 is typically made of a lighter material such as plastic. The detection device 20 for detecting whether the tray cover opening and closing mechanism 10 is abnormal may include the tray cover simulant 201 which is heavier than the tray cover 121 to be sucked up on the conventional flow line, which makes it possible to enhance the reliability of the stability of the tray cover opening and closing mechanism 10. Specifically, when a heavier tray cover simulant 201 is used, the tray cover opening and closing mechanism 10 appears to be free from abnormality (a criterion for judging whether or not the abnormality exists in the specific tray cover opening and closing mechanism 10 will be described below with reference to fig. 4), then it is easier for the tray cover opening and closing mechanism 10 to stably suck up the conventional tray cover 121 in mass production, and a phenomenon in which the tray cover 121 falls out is unlikely to occur.
In one embodiment, the scene of the tray cover opening and closing mechanism 10 sucking up the tray cover 121 on the conventional assembly line can be simulated by the detection device 20 and the tray cover opening and closing mechanism 10. In order to make the simulated scene closer to the real scene, the tray cover simulator 201 may be set to have the same length and width as the tray cover 121. In one embodiment, the height of the point of contact of the absorbency sensor 203 relative to the platform on which the detection device 20 is placed (i.e., the plane that will contact the pallet bottom 123 in the production line, not shown in the figures) is the same as the thickness of a conventional pallet box, e.g., 0.5 cm.
In one embodiment, the simulation may be achieved by designing a tray cover simulant 201 of a particular thickness. Specifically, a tray cover simulant 201 of a certain thickness is placed on a platform, one or more suction performance sensors 203 are attached to the tray cover simulant 201, when the tray cover switching mechanism 10 sucks the tray cover simulant 201, the vacuum sucking member 101 of the tray cover switching mechanism 10 is slowly dropped to a predetermined height (normally, the vacuum sucking member 101 is brought into contact with the suction performance sensor 203 when dropped to the predetermined height), the tray cover simulant 201 is sucked by vacuum and then slowly raised to stably pick up the tray cover simulant 201, and the sucked tray cover simulant 201 is slowly dropped onto the platform later.
In another embodiment, the inspection device 20 further comprises a tray bottom simulator (not shown in the figures) which, together with the tray cover simulator 201, simulates a tray 12 magazine to be opened and closed by the tray bottom switching mechanism 110. Specifically, a tray bottom simulant (optionally, the same length and width as the tray cover 121) is placed on the platform, the tray cover simulant is covered on the tray bottom simulant to form a simulation of the tray case, one or more absorption performance sensors 203 are attached on the tray cover simulant 201 (optionally, the height of the point to be contacted of the absorption performance sensor 203 relative to the platform for placing the detection device 20 is the same as the thickness of the conventional tray case), when the tray cover switching mechanism 10 sucks the tray cover simulant 201, the vacuum sucking member 101 of the tray cover switching mechanism 10 is slowly dropped to a predetermined height capable of contacting with the sucking performance sensor 203, the tray cover simulant 201 is sucked by vacuum and then slowly raised to stably pick up the tray cover simulant 201 to separate it from the tray bottom simulant, and then the sucked tray cover simulant 201 is slowly lowered onto the tray bottom simulant.
Fig. 3 shows a flow chart of a method for detecting an anomaly of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
As shown in fig. 3, at block S310, suction performance of each vacuum suction member is sensed with one or more suction performance sensors attached to the tray cover simulant while the tray cover simulant is being suctioned by the one or more vacuum suction members. In one embodiment, each vacuum suction member 101 corresponds to one suction performance sensor 203 on the tray cover simulant 201, and when the tray cover simulant 201 is sucked, the suction performance sensor 203 is close to and as much as possible in contact with its corresponding vacuum suction member 101 (whether or not contact is possible depends on the setting of the tray cover opening and closing mechanism 10) so as to be able to sense the suction performance of the corresponding vacuum suction member 101.
When the suction performance of each vacuum suction member 101 is sensed, the method proceeds to block S320, and it is determined whether the tray cover opening and closing mechanism 10 is abnormal based on the suction performance sensing value of each vacuum suction member 101. In one embodiment, determining whether the tray cover opening and closing mechanism 10 is abnormal based on the suction performance sensing values of the respective vacuum suction members 101 may include: the suction performance sensing value of each vacuum suction member 101 is displayed for the engineer to determine whether the tray cover opening and closing mechanism 10 is abnormal. In this way, the engineer can quantitatively and intuitively see the adsorption performance of the displayed vacuum adsorption member, determine whether the tray cover opening and closing mechanism 10 is abnormal, find out the source of the abnormality, debug the tray cover opening and closing mechanism according to the seen result, and also see the adsorption performance of the vacuum adsorption member in real time during debugging, so that the simulation test is convenient and efficient. In another embodiment, determining whether the tray cover opening and closing mechanism 10 is abnormal based on the suction performance sensing values of the respective vacuum suction members 101 may be performed using the abnormality determination unit 205. The anomaly determination unit 205 may be implemented using any software, hardware, or combination of software and hardware, such as, but not limited to, a processor, a computing device containing a memory and a processor, a Field Programmable Gate Array (FPGA), an Application Specific Integrated Circuit (ASIC), and the like. A criterion for judging whether or not the tray cover opening and closing mechanism 10 is abnormal will be described below with reference to fig. 4.
Fig. 4 shows a schematic diagram of detecting an abnormality of the tray cover opening and closing mechanism 10 according to an embodiment of the present disclosure.
As shown in fig. 4, when the tray cover switching mechanism 10 sucks the tray cover simulant 201, the vacuum sucking member 101 of the tray cover switching mechanism 10 is slowly dropped to a predetermined height that can be brought into contact with the sucking performance sensor 203 (normally, the vacuum sucking member 101 can be brought into contact with the sucking performance sensor 203 when dropped to the predetermined height). At this time, the adsorption performance sensor 203 may sense the adsorption performance of each vacuum adsorption member 101. In one embodiment, each of the suction performance sensors 203 may sense the suction performance of the vacuum suction member 101 corresponding thereto. By way of example and not limitation, when the tray cover opening and closing mechanism 10 slowly falls to its predetermined height (i.e., a predetermined height that can be brought into contact with the suction performance sensor 203 in a simulation, that is, a predetermined height that can be brought into contact with the tray cover in a process line), the vacuum suction member 101-1 comes into contact with the suction performance sensor 203-1. According to another example, when the tray cover opening and closing mechanism 10 slowly falls to its predetermined height, the vacuum suction member 101-2 fails to contact or fails to sufficiently contact the suction performance sensor 203-2. When there is a case where there is a failure to contact or sufficient contact with the suction performance sensor 203 in one or more vacuum suction members 101 of the tray cover opening and closing mechanism 10, the suction performance of the vacuum suction member 101 (for example, the vacuum suction member 101-2) that fails to contact with the suction performance sensor 203 is poor. In one embodiment, the suction force of the vacuum suction member 101 (e.g., the vacuum suction member 101-2) that fails to contact the suction performance sensor 203 to the tray cover is small or even zero. Thereby, it is possible to detect whether the tray cover opening and closing mechanism 10 is abnormal by detecting the suction capability of the vacuum suction member 101.
In one embodiment, when there is a case of failure to contact or failure to sufficiently contact in one or more vacuum suction members 101 of the tray cover opening and closing mechanism 10, the tray cover opening and closing mechanism 10 is abnormal. In one embodiment, it can be determined whether there is a case of a failed contact or a failed sufficient contact according to the sensed suction performance of the vacuum suction member 101. In one embodiment, the specific vacuum adsorption member or members 101 in which an abnormality occurs can be determined according to the sensed adsorption performance of the vacuum adsorption member 101. In one embodiment, the suction performance of the vacuum suction member 101 sensed by the suction performance sensor 203 is a sensing value, and if the sensing value is smaller than a specific threshold, it is determined that the vacuum suction member 101 is abnormal.
In another embodiment, when there is a case where the suction performances of the respective vacuum suction members 101 of the tray cover opening and closing mechanism 10 are not equal or not approximately equal, the tray cover opening and closing mechanism 10 is abnormal. In one embodiment, the fact that the suction performance of the respective vacuum suction members 101 of the tray cover opening and closing mechanism 10 is not equal means that there is an inequality in the sensed values of the suction performance of at least two vacuum suction members 101. In one embodiment, the suction performance of each of the vacuum suction members 101 of the tray cover opening and closing mechanism 10 is not approximately equal, which means that there are at least two vacuum suction members 101 whose sensed values of the suction performance are not approximately equal, for example, the difference of the sensed values is greater than a certain threshold value. In another embodiment, a variance of the sensed values of the suction performance of the respective vacuum suction members 101 larger than a certain threshold value is considered that the suction performance of the respective vacuum suction members 101 of the tray cover opening and closing mechanism 10 is not approximately equal.
In one embodiment, the sorption performance sensor 203 may include a vacuum sensor. Specifically, as shown in fig. 4, when the tray cover switching mechanism 10 sucks the tray cover simulant 201, the vacuum sucking member 101 of the tray cover switching mechanism 10 is slowly dropped to a predetermined height that can be brought into contact with the vacuum degree sensor. At this time, the vacuum degree sensor may sense the vacuum degree of each vacuum adsorption member 101. In one embodiment, each vacuum level sensor may sense the vacuum level of the vacuum adsorption member 101 corresponding thereto. By way of example and not limitation, when the tray cover opening and closing mechanism 10 slowly drops to its predetermined height, the vacuum suction member 101-1 comes into contact with the vacuum degree sensor, which makes the vacuum degree that the vacuum degree sensor can sense equal to or approximately equal to the vacuum degree that the vacuum suction member 101-1 provides (the vacuum gauge attached to the upper end of the vacuum suction member 101 can indicate the vacuum degree that the vacuum pump provides to the vacuum suction member 101), that is, the vacuum degree that the vacuum degree sensor can sense differs from the vacuum degree that the vacuum suction member 101-1 provides by less than a certain threshold value. According to another example, when the tray cover opening and closing mechanism 10 slowly falls to its predetermined height, the vacuum suction member 101-2 is not in contact or is not in sufficient contact with the vacuum degree sensor, which makes the vacuum degree that the vacuum degree sensor can sense zero or a small value, or the vacuum degree that the vacuum degree sensor can sense differs from the vacuum degree that the vacuum suction member 101-1 provides by more than a certain threshold value, it is determined that the vacuum suction member 101-2 is abnormal. In one embodiment, when one or more of the vacuum suction members 101 of the tray cover opening and closing mechanism 10 is abnormal, the tray cover opening and closing mechanism 10 is abnormal. In another embodiment, when the vacuum degrees sensed by the respective vacuum degree sensors (corresponding to the respective vacuum suction members 101) are not equal or not approximately equal, the tray cover opening and closing mechanism 10 is abnormal.
In one embodiment, the sorption performance sensor 203 may comprise a pressure sensor. Specifically, as shown in fig. 4, when the tray cover switching mechanism 10 sucks the tray cover simulant 201, the vacuum sucking member 101 of the tray cover switching mechanism 10 is slowly dropped to a predetermined height that can be brought into contact with the pressure sensor. At this time, the pressure sensor may sense a pressure generated by the contact with each vacuum adsorption member 101. In one embodiment, each pressure sensor may sense the pressure generated by contact with its corresponding vacuum adsorbing member 101. By way of example and not limitation, when the tray cover opening and closing mechanism 10 slowly drops to its predetermined height, the vacuum suction member 101-1 comes into contact with the pressure sensor, which enables the pressure sensor to sense a specific pressure. According to another example, when the tray cover opening and closing mechanism 10 is slowly lowered to its predetermined height, the vacuum suction member 101-2 is not in contact with the pressure sensor or is not in sufficient contact, which makes the pressure that the pressure sensor can sense zero or a small value (for example, less than a certain pressure threshold), and it is determined that the vacuum suction member 101-2 is abnormal. In one embodiment, when one or more of the vacuum suction members 101 of the tray cover opening and closing mechanism 10 is abnormal, the tray cover opening and closing mechanism 10 is abnormal. In another embodiment, when the pressures sensed by the respective pressure sensors (corresponding to the respective vacuum sucking members 101) are not equal or not approximately equal, the tray cover opening and closing mechanism 10 is abnormal.
[ second embodiment ]
Fig. 5 shows a block diagram of the structure of the detection device 20 for detecting an abnormality of the tray cover opening and closing mechanism according to the embodiment of the present disclosure.
In this embodiment, one or more suction performance sensors 203 are movable, and the number and positions of the suction performance sensors 203 can be adjusted based on the number and positions of the vacuum suction members 101 in the tray cover opening and closing mechanism 10. The number and positions of the vacuum sucking members in the tray cover opening and closing mechanism 10 are different in different configurations and specifications of the line. In this case, the movability of one or more suction performance sensors can be utilized to adjust the number and positions of the suction performance sensors accordingly based on the number and positions of the vacuum suction members 101 in the tray cover opening and closing mechanism 10, so that the detection device 20 can be adapted to tray cover opening mechanism detections in various configurations and specifications of production lines. Further, by adjusting the number and positions of the suction performance sensors accordingly based on the number and positions of the vacuum suction members 101 in the tray cover opening and closing mechanism 10, it is also possible to enable the vacuum suction members 101 in the tray cover opening and closing mechanism 10 to be aligned with their corresponding suction performance sensors, thereby promoting the effectiveness and accuracy of abnormality detection of the tray cover opening and closing mechanism.
In one embodiment, the tray cover simulant 201 is at least partially constructed of steel and the adsorptive property sensor 203 is at least partially constructed of a magnet. In this case, the tray cover simulant 201 and the suction performance sensors 203 are magnetically coupled so that one or more of the suction performance sensors 203 are movable, and the number and positions of the suction performance sensors 203 can be adjusted based on the number and positions of the vacuum suction members in the tray cover switching mechanism.
In one embodiment, the detection device 20 may further include one or more vacuum suction member position sensors (not shown in the drawings) for sensing the position of each vacuum suction member 101 in the tray cover opening and closing mechanism 10. In one embodiment, the vacuum attachment member position sensor may be one or more of: a laser sensor, a magnetic field sensor, a radar detector, etc., which are used individually or in combination to sense the position of each vacuum adsorbing member 101 in the tray cover opening and closing mechanism 10. In another embodiment, the vacuum suction member position sensor may be two or more cameras for capturing images of each vacuum suction member and calculating the position of each vacuum suction member using a SLAM algorithm. In another embodiment, the initial position of each vacuum suction member is known, and the displacement of each vacuum suction member is calculated from an accelerometer, gyroscope, or the like to sense the position of each vacuum suction member.
Accordingly, the detection device 20 further includes a suction performance sensor position adjustment mechanism 502 for adjusting the position of the corresponding suction performance sensor 203 on the tray cover simulant 201 based on the sensed position of each vacuum suction member 101. When the position of each vacuum suction member 101 is sensed, the suction performance sensor position adjusting mechanism 502 adjusts the position of the corresponding suction performance sensor 203 on the tray cover simulant 201 based on the sensed position of each vacuum suction member 101. In one embodiment, the adsorption performance sensor position adjustment mechanism 502 may be an adjustment mechanism such as a robot.
In another embodiment, the suction performance sensor position adjustment mechanism 502 may include a movement drive mechanism 504 integrated with the suction performance sensor 203, and the movement drive mechanism 504 communicates with one or more vacuum suction member position sensors by wireless communication. In this embodiment, the movement driving mechanism 504 may drive the movement of the suction performance sensor 203 and obtain the position information of the one or more vacuum suction members through wireless communication with the one or more vacuum suction member position sensors. In one embodiment, the movement driving mechanism 504 may have a rolling device such as a rubber rolling belt to cause the displacement of the adsorption property sensor 203. Furthermore, the movement drive mechanism 504 may be implemented using other suitable displacement drive mechanisms known in the art. In the present disclosure, each movement driving mechanism 504 may autonomously drive the adsorption performance sensor 203 integrated therewith to move, for example, may autonomously decide a moving direction and a moving distance, and drive the adsorption performance sensor 203 to move accordingly. In another embodiment, each movement driving mechanism 504 may be controlled (such as wirelessly controlled) by the external adsorption performance sensor position adjustment mechanism 502 to drive the adsorption performance sensor 203 integrated therewith to move.
Fig. 6 shows a flow chart of a method for detecting an anomaly of a tray cover opening and closing mechanism according to an embodiment of the present disclosure.
As shown in fig. 6, at block S610, the number and position of the suction performance sensors 203 are adjusted based on the number and position of the vacuum suction members in the tray cover opening and closing mechanism 10. In one embodiment, before block S610, sensing the position of one or more vacuum adsorption members 101 may be further included (dashed block S601), and block S610 may include: the number and positions of the suction performance sensors 203 are adjusted based on the number of vacuum suction members 101 in the tray cover opening and closing mechanism 10 and the sensed positions of the respective vacuum suction members 101.
Next, at block S620, while the tray cover simulant 201 is being suctioned by the one or more vacuum suction members 101, with the one or more suction performance sensors 203 attached to the tray cover simulant 201, the suction performance of each vacuum suction member is sensed. In one embodiment, each vacuum adsorbing member 101 corresponds to one adsorption performance sensor 203 on the tray cover simulant 201, and when the tray cover simulant 201 is adsorbed, the adsorption performance sensor 203 is close to its corresponding vacuum adsorbing member 101 so as to be able to sense the adsorption performance of the corresponding vacuum adsorbing member 101.
When the suction performance of each vacuum suction member 101 is sensed, the method proceeds to block S630, and it is determined whether the tray cover opening and closing mechanism 10 is abnormal based on the suction performance sensing value of each vacuum suction member 101.
As described above with reference to fig. 1 to 6, embodiments of a method and apparatus for checking an abnormality of a tray cover opening and closing mechanism according to the present disclosure are described.
The detailed description set forth above in connection with the appended drawings describes exemplary embodiments but does not represent all embodiments that may be practiced or fall within the scope of the claims. The term "exemplary" used throughout this specification means "serving as an example, instance, or illustration," and does not mean "preferred" or "advantageous" over other embodiments. The detailed description includes specific details for the purpose of providing an understanding of the described technology. However, the techniques may be practiced without these specific details. In some instances, well-known structures and devices are shown in block diagram form in order to avoid obscuring the concepts of the described embodiments.
The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. An apparatus for detecting an abnormality of a tray cover opening and closing mechanism including one or more vacuum sucking members for sucking up a tray cover, the apparatus comprising:
a tray cover simulant;
one or more suction performance sensors attached to the tray cover simulant for sensing suction performance of each vacuum suction member when the tray cover simulant is sucked for determining whether the tray cover opening and closing mechanism is abnormal, the one or more suction performance sensors being movably disposed, and the number and position of the suction performance sensors being adjusted based on the number and position of the vacuum suction members in the tray cover opening and closing mechanism;
one or more vacuum suction member position sensors for sensing the position of each vacuum suction member in the tray cover opening and closing mechanism;
a suction performance sensor position adjustment mechanism for adjusting a position of a corresponding suction performance sensor on the tray cover simulant based on the sensed position of each vacuum suction member; and
an abnormality determination unit that determines whether there is an abnormality in the tray cover opening and closing mechanism based on a difference between the suction performance sensing values of at least two of the respective vacuum suction members.
2. The apparatus of claim 1, further comprising:
one or more sensing value display units for displaying the suction performance sensing values of the respective vacuum suction members for a user to determine whether the tray cover opening and closing mechanism is abnormal.
3. The apparatus of claim 1 wherein the suction performance sensor position adjustment mechanism comprises a movement drive mechanism integrated with the suction performance sensor and wherein the movement drive mechanism communicates with the one or more vacuum suction member position sensors by wireless communication.
4. The apparatus of claim 3, wherein the tray cover simulant is at least partially comprised of steel and the adsorptive property sensor is at least partially comprised of a magnet.
5. The device of any one of claims 1 to 3, wherein the sorption performance sensor comprises a vacuum sensor or a pressure sensor.
6. The apparatus of any of claims 1 to 3, further comprising:
a tray bottom simulant that, together with the tray cover simulant, simulates a tray box to be opened and closed by the tray bottom switching mechanism.
7. The apparatus of any one of claims 1 to 3, wherein the tray cover simulant is formed to be heavier than the tray cover.
8. A method for detecting an abnormality of a tray cover opening and closing mechanism including one or more vacuum suction members for sucking up a tray cover, the method comprising:
sensing a suction performance of each vacuum suction member with one or more suction performance sensors attached to the tray cover simulant while the tray cover simulant is suctioned by the one or more vacuum suction members, the one or more suction performance sensors being movably disposed, and the number and positions of the suction performance sensors being adjusted based on the number and positions of the vacuum suction members in the tray cover switching mechanism; and
determining whether there is an abnormality in the tray cover opening and closing mechanism based on a difference between the suction performance sensing values of at least two of the respective vacuum suction members;
sensing the position of the one or more vacuum adsorbing members, an
Adjusting the number and position of the suction performance sensors based on the number and position of the vacuum suction members in the tray cover opening and closing mechanism includes:
the number and positions of the suction performance sensors are adjusted based on the number of vacuum suction members in the tray cover opening and closing mechanism and the sensed positions of the respective vacuum suction members.
9. The method of claim 8, further comprising, before the tray of the simulant is adsorbed by the one or more vacuum adsorbing members:
the number and position of the suction performance sensors are adjusted based on the number and position of vacuum suction members in the tray cover opening and closing mechanism.
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| CN201811118382.2A CN109244016B (en) | 2018-09-21 | 2018-09-21 | Apparatus and method for detecting abnormality of tray cover opening and closing mechanism |
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| CN201811118382.2A CN109244016B (en) | 2018-09-21 | 2018-09-21 | Apparatus and method for detecting abnormality of tray cover opening and closing mechanism |
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| JP2008306111A (en) * | 2007-06-11 | 2008-12-18 | Shin Etsu Polymer Co Ltd | Substrate storage tray |
| CN201327462Y (en) * | 2008-11-26 | 2009-10-14 | 福州宜美电子有限公司 | Novel alcohol content and heat measurement instrument |
| CN102658897B (en) * | 2012-04-27 | 2014-01-01 | 深圳市华星光电技术有限公司 | Substrate unpacking device |
| CN104465449B (en) * | 2013-09-18 | 2017-08-29 | 上海微电子装备（集团）股份有限公司 | One kind rotation exchanges hand self-adaptive protector and its guard method |
| JP6190264B2 (en) * | 2013-12-13 | 2017-08-30 | 東芝メモリ株式会社 | Semiconductor manufacturing equipment |
| KR102199642B1 (en) * | 2014-01-14 | 2021-01-08 | 삼성디스플레이 주식회사 | Vacuum apparatus and particle monitoring method thereof |
| CN207710595U (en) * | 2018-01-08 | 2018-08-10 | 郑州市永泰磨料磨具有限公司 | A kind of grinding wheel molding machine enhancing net apparatus for placing |
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