CN109244005A - A kind of wafer flow paster apparatus - Google Patents
A kind of wafer flow paster apparatus Download PDFInfo
- Publication number
- CN109244005A CN109244005A CN201811007863.6A CN201811007863A CN109244005A CN 109244005 A CN109244005 A CN 109244005A CN 201811007863 A CN201811007863 A CN 201811007863A CN 109244005 A CN109244005 A CN 109244005A
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- 238000002627 tracheal intubation Methods 0.000 claims abstract description 15
- 244000309464 bull Species 0.000 claims abstract description 14
- 239000004744 fabric Substances 0.000 claims abstract description 12
- 238000013016 damping Methods 0.000 claims description 35
- 238000009434 installation Methods 0.000 claims description 21
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 38
- 230000001070 adhesive effect Effects 0.000 abstract description 38
- 239000011505 plaster Substances 0.000 abstract description 38
- 238000005096 rolling process Methods 0.000 abstract description 16
- 238000005520 cutting process Methods 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000001360 synchronised effect Effects 0.000 description 6
- 238000009987 spinning Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67793—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with orientating and positioning by means of a vibratory bowl or track
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention relates to the technical fields of wafer flow production auxiliary equipment, more particularly to a kind of wafer flow paster apparatus, its stability of strutting system that roller can be improved, adhesive plaster is rolled without artificial directly operation roller, human factor is reduced, guarantees roller and adhesive plaster top contact surface flat contact, improves rolling effect, facilitate and grasp roller rolling dynamics, improves use reliability；Cutting effect is improved, cutting efficiency is improved, improves practicability；Including workbench, two groups of left support bars, two groups of right support bars, support plate, rubberized fabric roll, roller, left supported plate, right supported plate, top plate, two groups of limit travellers, first movement block, two group of first screwed pipe, two group of first threaded rod, adjustment axis, adjusting knob, connecting plate, fixed ring after preceding fixed ring, second movable block, upper operation panel, lower operation panel, shaft, bull stick, crank, four group of second screwed pipe, four group of second threaded rod, four groups of intubations, four groups of holddown springs, ring washer, swing rod and cutter.
Description
Technical field
The present invention relates to the technical fields of wafer flow production auxiliary equipment, more particularly to a kind of wafer flow patch
Device.
Background technique
It is well known that wafer flow is a kind of for wafer flow with paster apparatus, adhesive plaster attaching is carried out to its surface
Auxiliary device is widely used in a variety of applications in the field of circular jet piece production；Existing wafer flow includes with paster apparatus
Workbench, two groups of left support bars, two groups of right support bars, support plate, rubberized fabric roll and roller, the top of two groups of left support bars respectively with
The front left side of workbench bottom end is connected with left rear side, and the top of the two groups of right support bars forward right side with workbench bottom end respectively
It is connected with right lateral side, the front side of support plate left end and rear side are connect in the middle part of the right end of two groups of left support bars respectively, and are supported
The front side of plate right end and rear side are connect in the middle part of the left end of two groups of right support bars respectively, and foot yardage roll and roller are both placed in workbench
On, and the top middle portion of workbench is provided with operation position；Existing wafer flow paster apparatus is in use, first will behaviour
Make station to test completely using the non-dust cloth for being stained with alcohol, then wafer flow is lain on operation position, rubberized fabric roll is unfolded
And it is attached to wafer flow on piece, then manually adhesive plaster is rolled to bubble-free between adhesive plaster and crystal column surface using roller,
It is last that manually the adhesive plaster of crystal round fringes is cut using hobboing cutter；Existing wafer flow is sent out in paster apparatus use
Existing, the stability of strutting system of roller is poor, and artificial directly operation roller rolls adhesive plaster, and human factor is more, it cannot be guaranteed that
Roller and adhesive plaster top contact surface flat contact cause it to roll effect poor, while being not easy to grasp the rolling dynamics of roller, make
It is lower with reliability；And it is manually voluntarily cut using hobboing cutter, is easy to tilt adhesive plaster in cutting process and generates burr, cut
Effect is poor, while operating slowly, and cutting efficiency is lower, causes the practicality poor.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of stability of strutting system for improving roller, directly grasped without artificial
Make roller to roll adhesive plaster, reduce human factor, it is ensured that roller and adhesive plaster top contact surface flat contact improve rolling
Effect is pressed, while facilitating and grasping roller rolling dynamics, improves use reliability；And cutting effect is improved, cutting efficiency is improved,
Improve the wafer flow paster apparatus of practicability.
A kind of wafer flow paster apparatus of the invention, including workbench, two groups of left support bars, two groups of right support bars,
Support plate, rubberized fabric roll and roller, the top of two groups of left support bars are connect with the front left side of workbench bottom end and left rear side respectively, and
And the top of two groups of right support bars is connect with the forward right side of workbench bottom end and right lateral side respectively, the front side of support plate left end is with after
Side is connect in the middle part of the right end of two groups of left support bars respectively, and the front side of support plate right end and rear side respectively with two groups of right supports
Connection in the middle part of the left end of bar, foot yardage roll and roller are both placed on workbench, and the top middle portion of workbench is provided with operation
Station；Including left supported plate, right supported plate, top plate, two groups of limit travellers, first movement block, two group of first screwed pipe, two group of first spiral shell
The bottom end of rasp bar, adjustment axis, adjusting knob, connecting plate, preceding fixed ring and rear fixed ring, the left supported plate and right supported plate respectively with
The left and right side on the workbench top connects, and the top of the left supported plate and right supported plate left side with top plate bottom end respectively
Side is connected with right side, and the left end of two groups of limit travellers is connect with the upper front side of the left supported plate right end and upper rear side respectively,
The right end of two groups of limit travellers is connect with the upper front side of the right supported plate left end and upper rear side respectively, the first movement block
Internal front side and rear side is horizontally arranged with the perforative sliding through hole in left and right, and the first movement block passes through two groups of slidings
Through-hole is slidably set in the outside of two groups of limit travellers respectively, and the front side of first movement block bottom end and rear side are provided with
Fixing groove, and the first ball bearing is fixedly installed inside two groups of fixing grooves, the top of two group of first screwed pipe
End is inserted and fixed respectively inside installation to two group of first ball bearing, and the top of two group of first threaded rod is inserted into simultaneously respectively
Spiral shell is filled to the bottom inner portion of two group of first screwed pipe, the identical setting of thread rotary orientation outside two group of first threaded rod, and two group first
The bottom end of threaded rod is connect with the front side on the connecting plate top and rear side respectively, the front-end and back-end of the roller respectively with institute
State and be rotatably connected inside preceding fixed ring and rear fixed ring, and the top of the preceding fixed ring and rear fixed ring respectively with it is described
The front side of connecting plate bottom end is connected with rear side, and adjusting chamber, and adjusting cavity are internally provided on the right side of the first movement block
The right end of room communicates with the outside world, and the bottom end right side central of the first movement block is vertically arranged with adjusting through-hole, and the tune
Section through-hole is communicated with chamber interior is adjusted, and the top middle portion for adjusting chamber is provided with regulating tank, and solid inside regulating tank
Surely it is provided with the second ball bearing, the bottom end for adjusting through-hole has been arranged concentrically first bearing seat, and in first bearing seat
Portion is provided with third ball bearing, and the top of the adjustment axis passes through inside third ball bearing from the bottom end of first bearing seat,
And by adjusting through-hole and stretching to adjusting chamber interior, the top of adjustment axis is inserted and fixed installation extremely on the top of adjustment axis
Inside second ball bearing, the adjusting knob is located at the adjusting chamber interior, and is fixedly set in the outside of adjustment axis,
The right end that the right end self-regulation chamber interior of adjusting knob extend out to first movement block is extraneous, and the bottom end of the adjustment axis is set with one heart
Be equipped with driving gear, and the equal fixing sleeve installing in outside of two group of first screwed pipe is equipped with driven gear, described two groups from
Moving gear is engaged with the driving gear；Further include the second movable block, upper operation panel, lower operation panel, shaft, bull stick, crank,
Four group of second screwed pipe, four group of second threaded rod, four groups of intubations, four groups of holddown springs, ring washer, swing rod and cutter, it is described
The front side of the inside of second movable block and rear side are provided with the perforative adjusting through-hole in left and right, and the second movable block passes through two groups
Adjust the external right side that through-hole is slidably set in two groups of travellers respectively, the bottom end of second movable block and the upper behaviour
Make connection, front left side, left rear side, forward right side and the right lateral side of upper operation panel bottom end on the right side of the top of plate and be provided with placing groove,
And the 4th ball bearing is provided with inside four groups of placing grooves, the top of four group of second screwed pipe is inserted into simultaneously respectively
It is fixedly installed to inside four group of the 4th ball bearing, the top of four group of second threaded rod is inserted into respectively and spiral shell is filled to four groups the
The bottom inner portion of two screwed pipes, the bottom end of four group of second threaded rod respectively with the front left side on the lower operation panel top, left rear side,
Forward right side is connected with right lateral side, and the top of four groups of intubations respectively with the front left side of the lower operation panel bottom end, left back
Side, forward right side are connected with right lateral side, and the top of four groups of holddown springs puts in four groups from the bottom end of four groups of intubations insert respectively
The inside of pipe is simultaneously connect with the top inner wall of four groups of intubations respectively, the bottom end of four groups of holddown springs respectively with the ring washer top
Front left side, left rear side, the forward right side at end are connected with right lateral side, and the top middle portion of the upper operation panel is vertically arranged with to be run through up and down
Flexible through-hole, and the bottom end of the shaft passes through inside flexible through-hole from the top of upper operation panel and extend out to upper operation panel
Bottom end it is extraneous, the top of the lower operation panel is provided with perforative operation through-hole under mountain, and the top for operating through-hole is concentric
It is provided with second bearing seat, is fixedly installed the 5th ball bearing inside the second bearing seat, the bottom end of the shaft is from
The top of two bearing bracket passes through inside the 5th ball bearing and passes through the bottom end external world that lower operation panel is extend out to inside operation through-hole,
It is connect on the left of the bottom end of the bull stick with the top of the shaft, and on the right side of the bottom end of the crank and the top of the bull stick
It is rotatably connected, the top left hand of the swing rod is connect with the bottom end of the shaft, and the top of the cutter and the pendulum
Connection on the right side of the bottom end of bar, the length of the swing rod are less than the radius of ring washer.
A kind of wafer flow paster apparatus of the invention further includes two groups of connecting-rods with constant lenghs and two groups of limit plates, the right branch
The front side of plate right end and rear side are provided with the perforative limiting through hole in left and right, and the left end of two groups of connecting-rods with constant lenghs is from right branch
The right end of plate can be slid through inside two groups of limiting through hole respectively and extend out to right supported plate the left end external world and the upper operation panel
The front side of right end is connected with rear side, and the left end of two groups of limit plates is connect with the right end of two groups of connecting-rods with constant lenghs respectively.
A kind of wafer flow paster apparatus of the invention further includes strut and round slider, the bottom of the lower operation panel
End is provided with annular spacing groove, and the round slider is slidably arranged in inside the annular spacing groove, the strut
It is connect on the right side of bottom end and the top of the swing rod, and the top of strut passes through the bottom end of annular spacing groove and the round slider
Middle part connection.
A kind of wafer flow paster apparatus of the invention further includes that annular reinforces pad, and the circumference of the operation position is set
It is equipped with annular placing groove, and the annular reinforces pad fixing card inside the annular placing groove, annular reinforces the top of pad
End is flushed with the top of the workbench, and it is identical as the diameter of the ring washer that annular reinforces pad.
A kind of wafer flow paster apparatus of the invention further includes front supporting plate and rear carrier plate, the front supporting plate and afterwards branch
The bottom end of plate is connect with the front left side of the working tip and left rear side respectively, and the upper interior of front supporting plate and rear carrier plate is set respectively
It is equipped with pre-and post perforative preceding installation through-hole and rear installation through-hole, is rotatably provided with roller bearing in the middle part of the rubberized fabric roll, and described
The rear end of roller bearing is inserted into inside rear installation through-hole from the front end of rear carrier plate, and the front end of roller bearing is inserted into from the rear end of front supporting plate
Inside to preceding installation through-hole.
A kind of wafer flow paster apparatus of the invention further includes vacuum chuck and vacuum pump, the workbench top
Operation position be provided with mounting groove, and the vacuum chuck is fixedly mounted on inside mounting groove, the top of vacuum chuck with
The top of the workbench flushes, and connect on the right side of the top of the vacuum pump and the bottom end of the workbench, the output of vacuum pump
End is connected to the input terminal of the vacuum chuck by tracheae.
A kind of wafer flow paster apparatus of the invention further includes damping block and four groups of damping springs, the damping block
Top be provided with damping trough, the bottom end of vacuum pump is inserted into inside damping trough from the top of damping block, and described four groups subtract
The bottom end of shake spring is connect with front left side, left rear side, forward right side and the right lateral side of damping trough bottom end inner wall respectively, damping bullet
The top of spring is connect with front left side, left rear side, forward right side and the right lateral side of the vacuum pump bottom end respectively, the bottom end of damping block with
The top of the support plate connects.
A kind of wafer flow paster apparatus of the invention further includes two groups of operating handles, two groups of operating handles
Rear end is connect on the upside of the first movement block and the front end of the second movable block respectively.
Compared with prior art the invention has the benefit that two groups of sliding through holes inside first movement block can be passed through
Being slidably matched between two groups of limit travellers respectively keeps roller sliding along two groups of limits under the drive of first movement block
The direction of column is moved left and right, and adjustment axis can be made to roll in the second ball bearing and third by rotating adjusting knob
Pearl Bearing inner is rotated, so that driving gear be made to be rotated, through two groups of driven gears respectively between driving gear
Engagement, synchronize two group of first screwed pipe and rotated inside two group of first ball bearing in the same direction, pass through two group
One threaded rod assembles with the spiral shell inside two group of first screwed pipe close respectively, while passing through two group of first threaded rod external screw-thread screw thread
The identical setting of rotation direction allows two group of first threaded rod to synchronize the spinning in and out inside two group of first screwed pipe, so as to
Two group of first threaded rod synchronous drive connecting plate is moved down, the tip contact for the uniform and adhesive plaster for keeping roller horizontal,
After being adjusted to rolling to suitable rolling position, the can be made by the first movement block that moves right from the left of wafer flow piece
One movable block moves right along the direction of two groups of limit travellers, rolls roller uniformly adhesive plaster on the top of wafer flow
Pressure, attaches adhesive plaster well with wafer flow, so as to improve the stability of strutting system of roller, without artificial straight
It connects operation roller to roll adhesive plaster, reduces human factor, it is ensured that roller and adhesive plaster top contact surface flat contact mention
Height rolling effect, while conveniently by rotation adjusting knob, facilitate and be adjacent to distance between adjusting roller and adhesive plaster, thus convenient
It grasps roller and rolls dynamics, improve use reliability；And it can be distinguished by two groups of adjusting through-holes inside the second movable block
Being slidably matched between two groups of limit travellers, can be such that the second movable block moves left and right along the direction of two groups of limit travellers,
So as to make air ring so that upper operation panel, which is moved to stablize under the drive of the second movable block, is moved to the top of operation position
The external upper that circle is enclosed in wafer flow makes four group of second screwed pipe exist respectively by four group of second screwed pipe of synchronous rotary
It is rotated inside four group of the 4th ball bearing, so as to pass through four group of second threaded rod respectively and in four group of second screwed pipe
The spiral shell in portion, which assembles, to be closed, and screws out four group of second threaded rod downwards from inside four group of second screwed pipe, while can make lower behaviour
Make that plate is horizontal to be moved down, so as to so that the edge of the wafer flow after the bottom end of ring washer and attaching adhesive plaster
Top be adjacent to, while can by the retractility of four groups of holddown springs, continue rotate four group of second screwed pipe, make ring washer
Continue to move down, make the bottom end of cutter and the tip contact of adhesive plaster and be adjusted to suitable depth of cut, while shaft can be certainly
It is moved down inside flexible through-hole, by the 5th ball bearing inside second bearing seat, protects shaft with lower operation panel
It holds relative rotation and does not separate, by manually using crank rotation bull stick, rotating shaft inside the 5th ball bearing,
To driving swing rod to be rotated by the center of circle of shaft, thus allow cutter surround the outer ledge of wafer flow to adhesive plaster into
Row annular cutting, improves cutting effect, improves cutting efficiency, improve practicability.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the partial enlargement structural representation at A of the present invention；
Fig. 3 is the partial enlargement structural representation at B of the present invention；
Fig. 4 is the partial enlargement structural representation at C of the present invention；
Fig. 5 is the partial enlargement structural representation at D of the present invention；
Fig. 6 is that annular of the invention reinforces the schematic perspective view that pad is connect with workbench；
It is attached marked in the figure: 1, workbench；2, left support bar；3, right support bar；4, support plate；5, rubberized fabric roll；6, roller；7, left branch
Plate；8, top plate；9, traveller is limited；10, first movement block；11, the first screwed pipe；12, the first threaded rod；13, adjustment axis；14,
Adjusting knob；15, connecting plate；16, preceding fixed ring；17, driving gear；18, driven gear；19, the second movable block；20, upper behaviour
Make plate；21, shaft；22, bull stick；23, crank；24, the second screwed pipe；25, the second threaded rod；26, it is intubated；27, holddown spring；
28, ring washer；29, swing rod；30, cutter；31, connecting-rods with constant lengh；32, limit plate；33, strut；34, round slider；35, annular adds
Strong pad；36, front supporting plate；37, vacuum chuck；38, vacuum pump；39, damping block；40, damping spring；41, operating handle.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
As shown in Figures 1 to 6, a kind of wafer flow paster apparatus of the invention, including 1, two group of left support of workbench
2, two groups of right support bars 3 of bar, support plate 4, rubberized fabric roll 5 and roller 6, the top of two groups of left support bars respectively with workbench bottom end
Front left side is connected with left rear side, and the top of two groups of right support bars connects with the forward right side of workbench bottom end and right lateral side respectively
It connects, the front side of support plate left end and rear side are connect in the middle part of the right end of two groups of left support bars respectively, and before support plate right end
Side and rear side are connect in the middle part of the left end of two groups of right support bars respectively, and foot yardage roll and roller are both placed on workbench, and work
The top middle portion for making platform is provided with operation position；Including left supported plate 7, right supported plate, top plate 8, two groups of limit travellers 9, first movement
10, two group first of block 11, two group first of screwed pipe threaded rod 12, adjustment axis 13, adjusting knob 14, connecting plate 15, preceding fixed ring
16 and rear fixed ring, the bottom end of left supported plate and right supported plate is connect with the left and right side on workbench top respectively, and left supported plate
It is connect respectively with the left and right side of top plate bottom end with the top of right supported plate, the left end of two groups of limit travellers is right with left supported plate respectively
The upper front side at end is connected with upper rear side, and the right end of two groups of limit travellers connects with the upper front side of right supported plate left end and upper rear side respectively
It connects, the front side and rear side inside first movement block are horizontally arranged with the perforative sliding through hole in left and right, and first movement block is logical
The outside that two groups of sliding through holes are slidably set in two groups of limit travellers respectively is crossed, the front side of first movement block bottom end and rear side are equal
It is provided with fixing groove, and is fixedly installed the first ball bearing, the top of two group of first screwed pipe inside two groups of fixing grooves
It is inserted and fixed inside installation to two group of first ball bearing respectively, the top of two group of first threaded rod is inserted into respectively and spiral shell is filled to
The bottom inner portion of two group of first screwed pipe, the identical setting of thread rotary orientation outside two group of first threaded rod, two group of first threaded rod
Bottom end connect respectively with the front side on connecting plate top and rear side, the front-end and back-end of roller respectively with preceding fixed ring and rear fixed
It is rotatably connected inside ring, and the top of preceding fixed ring and rear fixed ring connects with the front side of connecting plate bottom end and rear side respectively
It connects, adjusting chamber is internally provided on the right side of first movement block, and the right end for adjusting chamber communicates with the outside world, first movement block
Bottom end right side central be vertically arranged with adjusting through-hole, and adjust through-hole with adjust chamber interior communicate, adjust the top of chamber
End middle part is provided with regulating tank, and the second ball bearing is fixedly installed inside regulating tank, and the bottom end for adjusting through-hole is set with one heart
It is equipped with first bearing seat, and first bearing seat is internally provided with third ball bearing, the top of adjustment axis is from first bearing seat
Bottom end pass through inside third ball bearing, and the top of adjustment axis is by adjusting through-hole and stretching to adjusting chamber interior,
The top of adjustment axis is inserted and fixed inside installation to the second ball bearing, and adjusting knob, which is located at, adjusts chamber interior, and solid
Surely it is sleeved on the outside of adjustment axis, the right end that the right end self-regulation chamber interior of adjusting knob extend out to first movement block is extraneous,
The bottom end of adjustment axis has been arranged concentrically driving gear 17, and the equal fixing sleeve installing in outside of two group of first screwed pipe be equipped with it is driven
Gear 18, two groups of driven gears are engaged with driving gear；Further include the second movable block 19, upper operation panel 20, lower operation panel, turn
Axis 21, bull stick 22,23, four group second of crank, 24, four group second of screwed pipe, 25, four groups of threaded rod, 26, four groups of intubation holddown spring
27, ring washer 28, swing rod 29 and cutter 30, the front side of the inside of the second movable block and rear side are provided with the perforative tune in left and right
Through-hole is saved, and the second movable block is slidably set on the right side of the outside of two groups of travellers respectively by two groups of adjusting through-holes, second
It is connect on the right side of the top of the bottom end of movable block and upper operation panel, behind the front left side of upper operation panel bottom end, left rear side, forward right side and the right side
Side is provided with placing groove, and the 4th ball bearing, the top of four group of second screwed pipe are provided with inside four groups of placing grooves
It is inserted and fixed inside installation to four group of the 4th ball bearing respectively, the top of four group of second threaded rod is inserted into respectively and spiral shell is filled to
The bottom inner portion of four group of second screwed pipe, the bottom end of four group of second threaded rod respectively with the front left side on lower operation panel top, left back
Side, forward right side are connected with right lateral side, and the top of four groups of intubations respectively with the front left side of lower operation panel bottom end, left rear side, the right side
Front side is connected with right lateral side, and the top of four groups of holddown springs puts in the inside to four groups of intubations simultaneously from the bottom end of four groups of intubations respectively
Connect respectively with the top inner wall of four groups of intubations, the bottom end of four groups of holddown springs respectively with the front left side on ring washer top, a left side
Rear side, forward right side are connected with right lateral side, and the top middle portion of upper operation panel is vertically arranged with perforative flexible through-hole up and down, and turns
The bottom end of axis passes through inside flexible through-hole from the top of upper operation panel and extend out to the bottom end external world of upper operation panel, lower operation panel
Top is provided with perforative operation through-hole under mountain, and the top for operating through-hole has been arranged concentrically second bearing seat, second bearing
Seat is internal to be fixedly installed the 5th ball bearing, and the bottom end of shaft passes through inside the 5th ball bearing from the top of second bearing seat
And the bottom end external world that lower operation panel is extend out to inside operation through-hole is passed through, it is connect on the left of the bottom end of bull stick with the top of shaft, and
And be rotatably connected on the right side of the bottom end of crank and the top of bull stick, the top left hand of swing rod and the bottom end of shaft connect, and cut
It is connected on the right side of the top of knife and the bottom end of swing rod, the length of swing rod is less than the radius of ring washer；First movement block can be passed through
Two groups of internal sliding through holes being slidably matched between two groups of limit travellers respectively, allows roller in the band of first movement block
It is moved left and right under dynamic along the direction of two groups of limit travellers, and adjustment axis can be made the by rotating adjusting knob
It is rotated inside two ball bearings and third ball bearing, so that driving gear be made to be rotated, passes through two groups of driven gears
Engaging between driving gear respectively, allow two group of first screwed pipe synchronize in the same direction inside two group of first ball bearing into
Row rotation, is assembled respectively with the spiral shell inside two group of first screwed pipe by two group of first threaded rod and is closed, while passing through two group first
The identical setting of threaded rod external screw-thread thread rotary orientation synchronizes two group of first threaded rod inside two group of first screwed pipe
Spinning in and out, so as to so that two group of first threaded rod synchronous drive connecting plate moves down, allow horizontal uniform of roller
It can be by moving right from the left of wafer flow piece after being adjusted to rolling to suitable rolling position with the tip contact of adhesive plaster
Dynamic first movement block, makes first movement block move right along the direction of two groups of limit travellers, allows roller by adhesive plaster in crystalline substance
The top of circular jet piece uniformly rolls, and attaches adhesive plaster well with wafer flow, so as to improve the branch of roller
Stability is supportted, adhesive plaster is rolled without artificial directly operation roller, reduces human factor, it is ensured that roller and adhesive plaster top
Contacting surface flat contact is terminated, rolling effect is improved, while conveniently facilitating and adjusting between roller and adhesive plaster by rotation adjusting knob
Be adjacent to distance, thus facilitate grasp roller rolling dynamics, improve use reliability；And inside can be by the second movable block
Two groups of adjusting through-holes being slidably matched between two groups of limit travellers respectively, the second movable block can be made sliding along two groups of limits
The direction of column moves left and right, so as to so that upper operation panel is moved to the stabilization under the drive of the second movable block and is moved to operative employee
The top of position, makes ring washer be enclosed in the external upper of wafer flow, by four group of second screwed pipe of synchronous rotary, makes four groups
Second screwed pipe is rotated inside four group of the 4th ball bearing respectively, so as to by four group of second threaded rod respectively with
Spiral shell inside four group of second screwed pipe, which assembles, to be closed, and allows four group of second threaded rod from inside four group of second screwed pipe to backspin
Out, while it can make lower operation panel is horizontal to move down, so as to so that wafer flow after the bottom end of ring washer and attaching
The top of the adhesive plaster of the edge of piece is adjacent to, while can continue rotation four groups the by the retractility of four groups of holddown springs
Two screwed pipes make ring washer continue to move down, and make the bottom end of cutter and the tip contact of adhesive plaster and be adjusted to suitably to cut
Depth is cut, while shaft can move down inside self extending through-hole, by the 5th ball bearing inside second bearing seat, makes to turn
Axis can keep relatively rotating and not separating with lower operation panel, by manually crank being used to rotate bull stick, make shaft in the 5th rolling
Pearl Bearing inner is rotated, to drive swing rod to be rotated by the center of circle of shaft, to allow cutter around wafer flow
The outer ledge of piece carries out annular cutting to adhesive plaster, improves cutting effect, improves cutting efficiency, improves practicability.
A kind of wafer flow paster apparatus of the invention further includes two groups of connecting-rods with constant lenghs 31 and two groups of limit plates 32, right branch
The front side of plate right end and rear side are provided with the perforative limiting through hole in left and right, and the left end of two groups of connecting-rods with constant lenghs is from right supported plate
Before right end can be slid through inside two groups of limiting through hole respectively and extend out to the left end external world and the upper operation panel right end of right supported plate
Side is connected with rear side, and the left end of two groups of limit plates is connect with the right end of two groups of connecting-rods with constant lenghs respectively；Two groups of fixed length can be passed through
Cooperation between the length of bar and two groups of limit plates, the distance that the second movable block of limitation is moved to the left, so as to facilitate fixation
The position that ring washer is moved to the left, holding is moved to the left the location consistency of ring washer every time, while can pass through two groups
The length of connecting-rods with constant lengh determines the position of ring washer and cutter, and making shaft every time can remain in by the wafer flow of patch
Center is longitudinally-aligned, so as to the circumgyration incision position of fixed cutter, improves the uniformity of patch cutting, improves and use
Reliability.
A kind of wafer flow paster apparatus of the invention further includes strut 33 and round slider 34, the bottom of lower operation panel
End is provided with annular spacing groove, and round slider is slidably arranged in inside annular spacing groove, the bottom end of strut and swing rod
Connection on the right side of top, and the top of strut passes through annular spacing groove and the center bottom of round slider connects；It can lead to simultaneously
The support for crossing strut makes the bottom end keeping parallelism of operation panel under swing rod, so as to pass through round slider in annular spacing groove
Portion is slidably matched, and swing rod is made always with lower operation panel keeping parallelism, while the rotation of swing rod to can be improved during rotation
Stabilizing power improves the stability during the circumgyration incision of cutter, improves use reliability.
A kind of wafer flow paster apparatus of the invention further includes that annular reinforces pad 35, the circumference setting of operation position
There is annular placing groove, and annular is reinforced pad fixing card and is mounted in inside annular placing groove, annular reinforces top and the workbench of pad
Top flush, annular reinforce pad it is identical as the diameter of ring washer；It can reinforce pad by annular and improve workbench
Intensity at operation position prevents the damage of ring washer multifrequency time squeezed during workbench to workbench top, mentions
The service life of high workbench.
A kind of wafer flow paster apparatus of the invention, further includes front supporting plate 36 and rear carrier plate, front supporting plate and rear carrier plate
Bottom end connect respectively with the front left side of working tip and left rear side, before the upper interior of front supporting plate and rear carrier plate is respectively arranged with
Perforative preceding installation through-hole and rear installation through-hole afterwards, rubberized fabric roll middle part is rotatably provided with roller bearing, and the rear end of roller bearing is after
The front end of supporting plate is inserted into inside rear installation through-hole, and the front end of roller bearing is inserted into preceding installation through-hole from the rear end of front supporting plate
Portion；Rubberized fabric roll can be set up by the way that front supporting plate and rear carrier plate are convenient, so that operator be facilitated to pull adhesive plaster to wafer
Flow carries out attaching use, improves practicability.
A kind of wafer flow paster apparatus of the invention further includes vacuum chuck 37 and vacuum pump 38, workbench top
Operation position be provided with mounting groove, and vacuum chuck is fixedly mounted on inside mounting groove, the top of vacuum chuck and work
The top of platform flushes, and connects on the right side of the bottom end of the top of vacuum pump and workbench, the output end of vacuum pump and vacuum chuck it is defeated
Enter end to be connected to by tracheae；The bottom end of wafer flow can be placed on to the top of vacuum chuck, and vacuum pump can be passed through
Make to generate negative pressure inside vacuum chuck, so as to suck the wafer flow for being placed on vacuum chuck top, improves wafer flow
Stability of the piece on operation position, prevents from moving, and improves use reliability.
A kind of wafer flow paster apparatus of the invention further includes damping block 39 and four groups of damping springs 40, damping block
Top be provided with damping trough, the bottom end of vacuum pump is inserted into inside damping trough from the top of damping block, and four groups of damping bullets
The bottom end of spring is connect with front left side, left rear side, forward right side and the right lateral side of damping trough bottom end inner wall respectively, the top of damping spring
It is connect respectively with the front left side of vacuum pump bottom end, left rear side, forward right side and right lateral side, the bottom end of damping block and the top of support plate
Connection；Bradyseism can be carried out inside damping trough to vacuum pump by four groups of damping springs, reduce vacuum pump mechanical shock and generate
Noise, improve practicability.
A kind of wafer flow paster apparatus of the invention, further includes two groups of operating handles 41, after two groups of operating handles
End is connect on the upside of first movement block and the front end of the second movable block respectively；Operation can be facilitated respectively by two groups of operating handles
Personnel move left and right first movement block and the second movable block, improve practicability.
A kind of wafer flow paster apparatus of the invention at work first connects vacuum pump and external power supply,
Then wafer flow is lain on vacuum chuck, opens vacuum pump, make to generate negative pressure inside vacuum chuck, so as to put
It sets the wafer flow on vacuum chuck top to suck, then through roller bearing respectively inside preceding installation through-hole and rear installation through-hole
Rotation pulls adhesive plaster, pulls adhesive plaster to move right to the top of wafer flow, then passes through two groups of cunnings inside first movement block
Dynamic through-hole being slidably matched between two groups of limit travellers respectively, allows roller under the drive of first movement block along two groups
The direction of limit traveller is moved left and right, and can by rotating adjusting knob, make adjustment axis in the second ball bearing and
Rotated inside third ball bearing, so that driving gear be made to be rotated, by two groups of driven gears respectively with driving tooth
Engagement between wheel synchronizes two group of first screwed pipe and is rotated inside two group of first ball bearing in the same direction, passed through
Two group of first threaded rod assembles with the spiral shell inside two group of first screwed pipe close respectively, while passing through spiral shell outside two group of first threaded rod
The identical setting of line thread rotary orientation allows two group of first threaded rod to synchronize the spinning in and out inside two group of first screwed pipe, from
And two group of first threaded rod synchronous drive connecting plate can be made to move down, the top for the uniform and adhesive plaster for keeping roller horizontal
Contact, after being adjusted to rolling to suitable rolling position, can by the first movement block that moves right from the left of wafer flow piece,
So that first movement block is moved right along the direction of two groups of limit travellers, keeps roller that adhesive plaster is equal on the top of wafer flow
Even rolling attaches adhesive plaster well with wafer flow, can be logical by two groups of adjustings inside the second movable block
Hole being slidably matched between two groups of limit travellers respectively, can make the second movable block along the direction or so of two groups of limit travellers
It is mobile, so as to make so that upper operation panel is moved to stablizes the top for being moved to operation position under the drive of the second movable block
Ring washer is enclosed in the external upper of wafer flow, by the cooperation between the length and two groups of limit plates of two groups of connecting-rods with constant lenghs,
The distance that the second movable block is moved to the left is limited, so as to the position for facilitating stationary annular washer to be moved to the left, keeps each
It is moved to the left the location consistency of ring washer, while can determine ring washer and cutter by the length of two groups of connecting-rods with constant lenghs
Position, makes shaft every time and can remain in longitudinally-aligned by the center of the wafer flow of patch, cuts so as to fixation
The circumgyration incision position of knife rolls four group of second screwed pipe at four group the 4th respectively by four group of second screwed pipe of synchronous rotary
Pearl Bearing inner is rotated, so as to be assembled respectively with the spiral shell inside four group of second screwed pipe by four group of second threaded rod
It closes, screws out four group of second threaded rod downwards from inside four group of second screwed pipe, while lower operation panel level can be made
Move down, so as to so that the wafer flow after the bottom end of ring washer and attaching edge adhesive plaster top patch
Tightly, it while can continue to rotate four group of second screwed pipe by the retractility of four groups of holddown springs, continue ring washer downward
It is mobile, make the bottom end of cutter and the tip contact of adhesive plaster and be adjusted to suitable depth of cut, while shaft can self extending through-hole
Inside moves down, and by the 5th ball bearing inside second bearing seat, so that shaft and lower operation panel is kept opposite and turns
It moves and does not separate, by manually crank being used to rotate bull stick, rotate shaft inside the 5th ball bearing, to drive
Swing rod is rotated by the center of circle of shaft, is cut so that cutter be allow to carry out annular to adhesive plaster around the outer ledge of wafer flow
It cuts, by the support of strut, makes the bottom end keeping parallelism of operation panel under swing rod, so as to pass through round slider in annular stop
Being slidably matched inside slot makes swing rod always with lower operation panel keeping parallelism, while swing rod can be improved during rotation
Spin stabilization ability improves the stability during the circumgyration incision of cutter, reinforces the operation that pad improves workbench by annular
Intensity at station prevents the damage of ring washer multifrequency time squeezed during workbench to workbench top, passes through four
Group damping spring carries out bradyseism to vacuum pump inside damping trough, reduces the noise that vacuum pump mechanical shock generates, passes through two groups
Operating handle facilitates operator to move left and right first movement block and the second movable block respectively.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications, these improvements and modifications can also be made
Also it should be regarded as protection scope of the present invention.
Claims (8)
1. a kind of wafer flow paster apparatus, including workbench (1), two groups of left support bars (2), two groups of right support bars (3), branch
Fagging (4), rubberized fabric roll (5) and roller (6), the top of two groups of left support bars (2) respectively with the front left side of workbench (1) bottom end and
Left rear side connection, and the top of two groups of right support bars (3) is connect with the forward right side of workbench (1) bottom end and right lateral side respectively,
The front side of support plate (4) left end and rear side are connect in the middle part of the right end of two groups of left support bars (2) respectively, and support plate (4) is right
The front side at end and rear side are connect in the middle part of the left end of two groups of right support bars (3) respectively, and foot yardage roll and roller (6) are both placed in work
On platform (1), and the top middle portion of workbench (1) is provided with operation position；It is characterised in that it includes left supported plate (7), right branch
Plate, top plate (8), two groups of limit travellers (9), first movement block (10), two group of first screwed pipe (11), two group of first threaded rod
(12), adjustment axis (13), adjusting knob (14), connecting plate (15), preceding fixed ring (16) and rear fixed ring, the left supported plate (7)
It is connect respectively with the left and right side on the workbench (1) top with the bottom end of right supported plate, and left supported plate (7) and right supported plate
Top is connect with the left and right side of the top plate (8) bottom end respectively, the left end of two groups of limit travellers (9) respectively with it is described
The upper front side of left supported plate (7) right end is connected with upper rear side, and the right end of two groups of limit travellers (9) is left with the right supported plate respectively
The upper front side at end is connected with upper rear side, and the internal front side of the first movement block (10) and rear side are horizontally arranged with left and right and run through
Sliding through hole, and the first movement block (10) is slidably set in two groups of limits by two groups of sliding through holes respectively
The outside of traveller (9), the front side of first movement block (10) bottom end and rear side are provided with fixing groove, and two groups of fixing grooves
Inside is fixedly installed the first ball bearing, and the top of two group of first screwed pipe (11) is inserted and fixed installation extremely respectively
Inside two group of first ball bearing, the top of two group of first threaded rod (12) is inserted into respectively and spiral shell is filled to two group of first screw thread
Manage the bottom inner portion of (11), the external identical setting of thread rotary orientation of two group of first threaded rod (12), two group of first threaded rod (12)
Bottom end connect respectively with the front side on the connecting plate (15) top and rear side, the front-end and back-end of the roller (6) respectively with
It is rotatably connected inside the preceding fixed ring (16) and rear fixed ring, and the top of preceding fixed ring (16) and rear fixed ring
It is connect respectively with the front side of the connecting plate (15) bottom end and rear side, is internally provided with tune on the right side of the first movement block (10)
Chamber is saved, and the right end for adjusting chamber communicates with the outside world, the bottom end right side central of the first movement block (10) is longitudinally disposed
There is adjusting through-hole, and the adjusting through-hole is communicated with chamber interior is adjusted, the top middle portion for adjusting chamber is provided with tune
Slot is saved, and is fixedly installed the second ball bearing inside regulating tank, the bottom end for adjusting through-hole has been arranged concentrically first axle
Hold seat, and first bearing seat is internally provided with third ball bearing, the top of the adjustment axis (13) is from first bearing seat
Bottom end passes through inside third ball bearing, and the top of adjustment axis (13) is by adjusting through-hole and stretching in adjusting cavity room
Portion, the top of adjustment axis (13) are inserted and fixed inside installation to the second ball bearing, and the adjusting knob (14) is located at described
Chamber interior is adjusted, and is fixedly set in the outside of adjustment axis (13), the right end self-regulation chamber interior of adjusting knob (14)
The right end for extending out to first movement block (10) is extraneous, and the bottom end of the adjustment axis (13) has been arranged concentrically driving gear (17), and
And the equal fixing sleeve installing in outside of two group of first screwed pipe (11) is equipped with driven gear (18), two groups of driven gears
(18) it is engaged with the driving gear (17)；It further include the second movable block (19), upper operation panel (20), lower operation panel, shaft
(21), bull stick (22), crank (23), four group of second screwed pipe (24), four group of second threaded rod (25), four groups of intubations (26), four
Group holddown spring (27), ring washer (28), swing rod (29) and cutter (30), the front side of the inside of second movable block (19)
It is provided with the perforative adjusting through-hole in left and right with rear side, and the second movable block (19) passes through two groups of adjusting through-holes respectively slidably
It is set in the external right side of two groups of travellers, the top of the bottom end of second movable block (19) and the upper operation panel (20)
Right side connection, front left side, left rear side, forward right side and the right lateral side of upper operation panel (20) bottom end are provided with placing groove, and institute
It states and is provided with the 4th ball bearing inside four groups of placing grooves, the top of four group of second screwed pipe (24) is inserted into respectively and is consolidated
Dingan County is filled to inside four group of the 4th ball bearing, and the top of four group of second threaded rod (25) is inserted into respectively and spiral shell is filled to four groups
The bottom inner portion of second screwed pipe (24), the bottom end of four group of second threaded rod (25) are left front with the lower operation panel top respectively
Side, left rear side, forward right side are connected with right lateral side, and the top of four groups of intubations (26) respectively with the lower operation panel bottom end
Front left side, left rear side, forward right side connected with right lateral side, the top of four groups of holddown springs (27) is respectively from four groups of intubations
(26) bottom end puts in the inside of four groups of intubations (26) and connect respectively with the top inner wall of four groups of intubations (26), four groups of compressions
The bottom end of spring (27) is connect with front left side, left rear side, forward right side and the right lateral side on the ring washer (28) top respectively, institute
The top middle portion for stating operation panel (20) is vertically arranged with perforative flexible through-hole up and down, and the bottom end of the shaft (21) is certainly
The top of upper operation panel (20) passes through inside flexible through-hole and extend out to the bottom end external world of operation panel (20), the lower operation panel
Top be provided with perforative operation through-hole under mountain, and the top for operating through-hole has been arranged concentrically second bearing seat, described
It is fixedly installed the 5th ball bearing inside two bearing bracket, the bottom end of the shaft (21) passes through the from the top of second bearing seat
Inside five ball bearings and the bottom end external world that lower operation panel is extend out to inside operation through-hole is passed through, the bottom end of the bull stick (22) is left
Side is connect with the top of the shaft (21), and can be turned on the right side of the bottom end of the crank (23) and the top of the bull stick (22)
Dynamic connection, the top left hand of the swing rod (29) is connect with the bottom end of the shaft (21), and the top of the cutter (30)
It is connect on the right side of the bottom end of the swing rod (29), the length of the swing rod (29) is less than the radius of ring washer (28).
2. a kind of wafer flow paster apparatus as described in claim 1, which is characterized in that further include two groups of connecting-rods with constant lenghs (31)
With two groups of limit plates (32), the front side of the right supported plate right end and rear side are provided with the perforative limiting through hole in left and right, and institute
The left end for stating two groups of connecting-rods with constant lenghs (31) can be slid through inside two groups of limiting through hole respectively and extend out to from the right end of right supported plate
The left end external world of right supported plate is connect with the front side of upper operation panel (20) right end and rear side, and two groups of limit plates (32)
Left end connect respectively with the right end of two groups of connecting-rods with constant lenghs (31).
3. a kind of wafer flow paster apparatus as claimed in claim 2, which is characterized in that further include strut (33) and circle
Sliding block (34), the bottom end of the lower operation panel is provided with annular spacing groove, and the round slider (34) is slidably arranged in
Inside the annular spacing groove, it is connect on the right side of the bottom end of the strut (33) and the top of the swing rod (29), and strut
(33) top passes through annular spacing groove and connect with the center bottom of the round slider (34).
4. a kind of wafer flow paster apparatus as claimed in claim 3, which is characterized in that further include that annular reinforces pad
(35), the circumference of the operation position is provided with annular placing groove, and the annular reinforces pad (35) fixing card mounted in described
Inside annular placing groove, annular reinforce pad (35) top flushed with the top of the workbench (1), annular reinforce pad (35) and
The diameter of the ring washer (28) is identical.
5. a kind of wafer flow paster apparatus as claimed in claim 4, which is characterized in that further include front supporting plate (36) and after
The bottom end of supporting plate, the front supporting plate (36) and rear carrier plate is connect with the front left side of the working tip and left rear side respectively, preceding branch
The upper interior of plate (36) and rear carrier plate is respectively arranged with pre-and post perforative preceding installation through-hole and rear installation through-hole, the rubberized fabric roll
(5) middle part is rotatably provided with roller bearing, and the rear end of the roller bearing is inserted into inside rear installation through-hole from the front end of rear carrier plate,
And before the rear end of the front end of roller bearing from front supporting plate (36) is inserted into inside installation through-hole.
6. a kind of wafer flow paster apparatus as claimed in claim 5, which is characterized in that further include vacuum chuck (37) and
Vacuum pump (38), the operation position on workbench (1) top are provided with mounting groove, and the fixed peace of the vacuum chuck (37)
Inside mounting groove, the top of vacuum chuck (37) is flushed with the top of the workbench (1), the top of the vacuum pump (38)
It holds and is connect on the right side of the bottom end with the workbench (1), the output end of vacuum pump (38) and the input terminal of the vacuum chuck (37)
It is connected to by tracheae.
7. a kind of wafer flow paster apparatus as claimed in claim 6, which is characterized in that further include damping block (39) and four
Group damping spring (40), the top of the damping block (39) are provided with damping trough, and the bottom end of vacuum pump (38) is from damping block (39)
Top be inserted into inside damping trough, and the bottom end of four groups of damping springs (40) respectively with damping trough bottom end inner wall
Front left side, left rear side, forward right side connected with right lateral side, the top of damping spring (40) respectively with the vacuum pump (38) bottom end
Front left side, left rear side, forward right side connected with right lateral side, the bottom end of damping block (39) is connect with the top of the support plate (4).
8. a kind of wafer flow paster apparatus as claimed in claim 7, which is characterized in that further include two groups of operating handles
(41), the rear end of two groups of operating handles (41) front end with the first movement block (10) and the second movable block (19) respectively
Upside connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811007863.6A CN109244005B (en) | 2018-08-31 | 2018-08-31 | Wafer is paster device for wafer flow piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811007863.6A CN109244005B (en) | 2018-08-31 | 2018-08-31 | Wafer is paster device for wafer flow piece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109244005A true CN109244005A (en) | 2019-01-18 |
| CN109244005B CN109244005B (en) | 2023-10-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811007863.6A Active CN109244005B (en) | 2018-08-31 | 2018-08-31 | Wafer is paster device for wafer flow piece |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113659056A (en) * | 2021-07-14 | 2021-11-16 | 秦明辉 | A LED wafer substrate paster gasket places equipment for wisdom community |
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| JP2009135376A (en) * | 2007-12-03 | 2009-06-18 | Lintec Corp | Sheet pasting apparatus and pasting method |
| KR100995845B1 (en) * | 2010-05-06 | 2010-11-23 | 주식회사 세미라인 | Vacuum adhesion transfer apparatus for semiconductor chip sorter |
| CN204303777U (en) * | 2015-01-23 | 2015-04-29 | 哈尔滨理工大学 | A kind of chip mounter |
| CN108355914A (en) * | 2018-03-30 | 2018-08-03 | 江苏迪佳电子有限公司 | A kind of handset touch panel face-piece point glue equipment |
| CN108454671A (en) * | 2018-05-17 | 2018-08-28 | 盐城三鼎电子科技有限公司 | A kind of flexible circuit board storage transport device |
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2018
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009135376A (en) * | 2007-12-03 | 2009-06-18 | Lintec Corp | Sheet pasting apparatus and pasting method |
| KR100995845B1 (en) * | 2010-05-06 | 2010-11-23 | 주식회사 세미라인 | Vacuum adhesion transfer apparatus for semiconductor chip sorter |
| CN204303777U (en) * | 2015-01-23 | 2015-04-29 | 哈尔滨理工大学 | A kind of chip mounter |
| CN108355914A (en) * | 2018-03-30 | 2018-08-03 | 江苏迪佳电子有限公司 | A kind of handset touch panel face-piece point glue equipment |
| CN108454671A (en) * | 2018-05-17 | 2018-08-28 | 盐城三鼎电子科技有限公司 | A kind of flexible circuit board storage transport device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113659056A (en) * | 2021-07-14 | 2021-11-16 | 秦明辉 | A LED wafer substrate paster gasket places equipment for wisdom community |
| CN113659056B (en) * | 2021-07-14 | 2023-06-27 | 汇涌进光电(浙江)有限公司 | LED chip substrate patch pad placement equipment for smart community |
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|---|---|
| CN109244005B (en) | 2023-10-31 |
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