CN109238559A - Triode type ion gauge and piezometry method - Google Patents
Triode type ion gauge and piezometry method Download PDFInfo
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- CN109238559A CN109238559A CN201810694986.5A CN201810694986A CN109238559A CN 109238559 A CN109238559 A CN 109238559A CN 201810694986 A CN201810694986 A CN 201810694986A CN 109238559 A CN109238559 A CN 109238559A
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- collector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provide it is a kind of being capable of the triode type ion gauge that is measured of the pressure correctly to the inside of measuring object.Triode type ion gauge according to the present invention has filament, aperture plate and ion collector.The aperture plate configuration is around the filament.The ioncollection extremely tubular configures around the aperture plate, and thermal conductivity when by 300K is that the material of 173W/ (mK) or more is constituted.
Description
Technical field
The present invention relates to the technologies such as triode type ion gauge.
Background technique
Vacuum treatment installation, which has, carries out the vacuum chamber to form a film etc. by sputtering, vapor deposition.Since the vacuum chamber is indoor
Pressure can bring very big influence to finished product rate, so needing correctly to measure the indoor pressure of vacuum chamber.As high-precision
Degree ground is to 1Pa~10 in the indoor pressure of vacuum chamber-6The device that the pressure of the range of Pa is measured, it is known to triode type
Ion gauge.
Triode type ion gauge usually has the filament of hair-pin shaped (shape of falling V), configuration around filament
Spiral helicine aperture plate and the cylindric ion collector being coaxially arranged at aperture plate around aperture plate.Apply ratio to aperture plate
The high voltage of filament (positive voltage) applies the voltage lower than aperture plate to ion collector.
When filament is energized, thermoelectron is radiated from filament (near top of filament), which is added towards aperture plate
Speed, and captured by aperture plate.The gas that thermionic a part is dispersed near aperture plate with the inside of triode type ion gauge
Body molecule is collided, and thus gas molecule is ionized.
The gas molecule (cation) of ionization is attracted and collided with ion collector by ion collector, and receives from ion
Collector receives electronics.Since the gas molecule of ionization receives electronics from ion collector, ion is generated in ion collector
Electric current.Since the value of the ionic current is proportional to the amount of gas molecule dispersed in the inside of triode type ion gauge,
So can be measured by the value to ionic current, thus to the measuring object for being equipped with triode type ion gauge
The pressure of the inside of (for example, vacuum treatment installation) is measured.
Here, as documented by following patent documents 1,2, in gas molecule (cation) to the table of ion collector
When face is collided, gas molecule absorption (such as physical absorption, chemisorption) forms molecule on the surface of ion collector sometimes
Layer (physical absorption layer, chemisorbed layer).
The region near the center in axial direction in ion collector is the high region of the collision probability of cation, is passed through
Cation in the regional sustained collides, as far as possible from molecular layer release neutral fragment molecule, neutral atom or their ion
Equal particles.Therefore, the region near the center in the axial direction in ion collector is difficult to the region accumulated as molecular layer.Separately
On the one hand, the region low for the collision probability of cation of the region near the both ends in the axial direction in ion collector, by
It is not collided constantly in cation, so becoming cation is easy the region that accumulation is molecular layer.
In addition, listing patent document 3 and patent document 4 below as technology relevant to the application.
Citation
Patent document
Patent document 1: International Publication No. 2016/151997；
Patent document 2: International Publication No. 2016/139894；
Patent document 3: Japanese Unexamined Patent Publication 2006-343305 bulletin；
Patent document 4: Japanese Unexamined Patent Publication 5-66170 bulletin.
Subject to be solved by the invention
Due to being formed by the influence of molecular layer etc. near the both ends in the axial direction in ion collector, existing cannot
Enough the problem of correctly pressure of the inside of measuring object is measured.
Summary of the invention
In view of the above circumstances, the purpose of the present invention is to provide can correctly the pressure to the inside of measuring object into
The triode type ion gauge of row measurement.
Solution for solving the problem
In order to achieve the above objectives, triode type ion gauge according to the present invention has filament, aperture plate and ion
Collector.The aperture plate configuration is around the filament.The ioncollection extremely tubular configures the week in the aperture plate
It encloses, thermal conductivity when by 300K is that the material of 173W/ (mK) or more is constituted.
In the triode type ion gauge, thermal conductivity when ion collector is by 300K is 173W/ (mK) or more
Material constitute.That is, ion collector is made of the high material of thermal conductivity.As a result, from filament generate heat be easy to
Ion collector integrally transmits, and can be improved ion collector near the both ends even if in the axial direction in ion collector
Temperature.Thereby, it is possible to prevent from forming molecular layer near the both ends in the axial direction of ion collector.As a result, three
Pole pipe formula ion gauge can the pressure correctly to the inside of measuring object be measured.
It can be 4W or less to the output power of the filament in above-mentioned triode type ion gauge.
Here, in small-sized triode type ion gauge as the output power to filament is set as 4W or less,
It is easy to be lower by the heat that filament generates, therefore be easy to be lower there are temperature near the both ends in the axial direction of ion collector
Problem.On the other hand, as described above, in triode type ion gauge according to the present invention, the high material of thermal conductivity is used
Material constitutes ion collector.Therefore, even if the thermal capacitance in the filament as the output power to filament is set as 4W or less is variable
It, also can be near the both ends in the axial direction of ion collector suitably in low small-sized triode type ion gauge
Improve the temperature of ion collector.
Above-mentioned triode type ion gauge can also have supporting member.The supporting member is to the ion collector
It is supported, and is made of the thermal conductivity material lower than the material for constituting the ion collector.
Thereby, it is possible to prevent the heat of ion collector towards supporting member loss, so as to by the heat of ion collector
Maintain higher state.
Above-mentioned triode type ion gauge can also have receiving portion.The receiving portion is made of metal material, and will
The filament, the aperture plate and the ion collector are housed in inside.
Like this, receiving portion is constituted by using metal material, the generation at hot electron impingement receiving portion can be prevented
Electrification, so as to which the Potential distribution in the space in receiving portion is maintained fixed.Thereby, it is possible to the spirits fixed with long-time
Sensitivity is measured pressure.
Piezometry method according to the present invention the following steps are included: prepare triode type ion gauge, described three
Pole pipe formula ion gauge has filament, aperture plate of the configuration around the filament and configuration around the aperture plate,
And the ion collector that thermal conductivity when by 300K is constituted for the material more than 173W/ (mK), the ioncollection extremely cylinder
Shape；And the pressure of the inside of measuring object is measured by the triode type ion gauge.
Invention effect
According to the present invention, as described above, it is possible to provide can the pressure correctly to the inside of measuring object survey
Fixed triode type ion gauge.
Detailed description of the invention
From Fig. 1 carries out triode type ion gauge involved in an embodiment of the invention from side
Schematic diagram.
Fig. 2 is the schematic diagram from carrying out from top to triode type ion gauge.
Fig. 3 be indicate the material as ion collector come using 7 kinds of metal materials and these metal materials in 300K
When thermal conductivity between relationship figure.
Fig. 4 is to indicate by the vacuum chamber of the different triode type ion gauge measurement of the material of ion collector
The figure of interior pressure.
Fig. 5 is that material of the thermal conductivity less than 173W/ (mK) when indicating by 300K constitutes the comparative example of ion collector
In, collision ion collector cation movement situation schematic diagram.
Fig. 6 is the case where material that thermal conductivity when indicating by 300K is 173W/ (mK) or more constitutes ion collector
Under, collision ion collector cation movement situation schematic diagram.
Specific embodiment
Hereinafter, being illustrated on one side to embodiment according to the present invention referring to attached drawing on one side.
The overall structure of < triode type ion gauge and the structure > of each section
Fig. 1 is to see from side to triode type ion gauge 100 involved in an embodiment of the invention
The schematic diagram examined.Fig. 2 is the schematic diagram from carrying out from top to triode type ion gauge 100.
As shown in these figures, triode type ion gauge 100 has sensor unit 10 and control unit 20.Sensor
Unit 10 has sensor main body 11 (receiving portion), filament 12, aperture plate 13, ion collector 14, multiple terminal 15a~15e, grid
Net supporting member 16 and ion collector supporting member 17 (supporting member).
Sensor main body 11 is the cylindric shape with bottom 11c, accommodate inside it filament 12, aperture plate 13, from
Sub- collector 14, multiple terminal 15a~15e, aperture plate supporting member 16 and ion collector supporting member 17.
The top of sensor main body 11 has flange part 11a, and the flange part 11a is for the measurement pair to vacuum chamber etc.
As object detachably installs sensor unit 10.In flange part 11a, in upside and the position of inner circumferential side, the circumferentially (side θ
To) it is formed with the groove portion 11b accommodated for the vacuum seal to O-ring etc..Flange part 11a passes through vacuum seal
Measuring object fixed to vacuum chamber etc., thus using triode type ion gauge 100 to the inside of measuring object
Pressure be measured.
Sensor main body 11 is by the alloy of stainless steel, nickel, nickel and iron, aluminium alloy, copper, copper alloy, titanium, titanium alloy, tungsten, molybdenum
Or the metal material of more than two combinations in these etc. is constituted.The sensor main body 11 is grounded.
Sub- 15a~the 15e of 5 butts is interspersed with via insulator (not shown) in the bottom 11c of sensor main body 11.5
Terminal 15a~15e is columned component long in the Z-axis direction.In addition, the shape of terminal can be triangular prism shape, tetragonous
The shapes such as column, the shape about terminal are not particularly limited.These terminals are made of metal materials such as such as iron, nickel, cobalts.
In the sub- 15a~15e of 5 butts, 2 butts 15a, 15b are the terminal connecting with filament 12, the sub- 15c of 1 butt be with
The terminal that aperture plate 13 connects, remaining 2 butt 15d, 15e are the terminal connecting with ion collector 14.
Filament 12 configures near the center of sensor main body 11.Filament 12 has hair-pin shaped (shape of falling V)
Shape, formed and centre is bent by the linear component for being such as 0.1~0.2mm of φ or so by thickness.In addition, lamp
Silk 12 also can have linear shape, and the shape about filament 12 is not particularly limited.
The height Hf (height of the part of the top of terminal 15a, 15b in filament 12) of filament 12 be set as such as 5mm~
15mm or so.
In filament 12, from curved overhead radiation thermoelectron.Curved top is in axial direction (Z-direction) in filament 12
Positioned at the center (referring to Fig.1) of aperture plate 13 and ion collector 14.In addition, the top of filament 12 also is located in the horizontal direction
The center of aperture plate 13 and ion collector 14 (referring to Fig. 2).
Filament 12 is oxidized the metal materials such as iridium, the tungsten of yttrium covering by such as surface and constituted.
The one end of filament 12 is electrically connected and is mechanically connected with terminal 15a, and another side and terminal 15b carry out electricity
Connection and mechanical connection.Terminal 15a and terminal 15b other than the effect as the terminal of filament 12, also have as from
The effect for the fulcrum post that lower section supports filament 12.In addition, in the present embodiment, being set as to the output power of filament 12
4W or less.
Aperture plate 13 is configured around filament 12 in the mode concentric with filament 12.Aperture plate 13 has spiral helicine shape,
Such as by the linear component for being 0.1~0.3mm of φ or so by thickness wind it is spiral and formed.In addition, aperture plate 13
Can by the way that sheet metal will be punched, photoetching piece be formed as tubular and constitute, about the shape of aperture plate 13, be not particularly limited.
The height Hg (referring to Fig.1) of aperture plate 13 is set as such as 10~30mm or so, and diameter phi g (referring to Fig. 2) is set as example
5mm~15mm or so.In addition, the height Hg of aperture plate 13 is set as 2 times of the height of the height Hf of filament 12.
The alloy of molybdenum, tantalum, platinum, iridium, platinum and iridium that aperture plate 13 is covered by such as tungsten, molybdenum, surface by platinum, nickel, nickel and iron
The metal material of alloy, stainless steel or more than two combinations in these etc. is constituted.
The lower end of aperture plate 13 is electrically connected and is mechanically connected with terminal 15c.Terminal 15c is in addition to as aperture plate 13
Other than the effect of terminal, also have the function of as the fulcrum post supported from below to aperture plate 13.In the top of terminal 15c
Erect setting aperture plate supporting member 16.The aperture plate supporting member 16 is long for example columned structure in axial direction (Z-direction)
Part can be abutted with the inner circumferential side of aperture plate 13 and be supported from inner circumferential side to aperture plate 13.
Ion collector 14 is configured around aperture plate 13 in the mode concentric with aperture plate 13.Ion collector 14 has circle
The shape of tubular is constituted and the component of the plate of thickness 0.05mm~0.3mm or so is formed as tubular.In addition, ion
As long as collector 14 is tubular, it is not limited to cylindrical shape, can also be made of shapes such as square tubes.
The height Hi (referring to Fig.1) of ion collector 14 is set as such as 10~30mm or so, and diameter phi i (referring to Fig. 2) is set
For such as 10mm~30mm or so.In addition, the height Hi of ion collector 14 is set as degree identical with the height Hg of aperture plate 13,
And it is set as 2 times of the height of the height Hf of filament 12.
Thermal conductivity when ion collector 14 is by 300K is that the metal material of 173W/ (mK) or more is constituted.Ioncollection
Arbitrary material can be used as long as material with the above characteristics in the material of pole 14, is able to use for example as the material
The metal materials such as tungsten, copper, graphite.In addition, about the reasons why using material of this material as ion collector 14 later
It is described in detail.
Ion collector 14 be electrically connected via ion collector supporting member 17 and terminal 15d and terminal 15e and
Mechanical connection.Terminal 15d, terminal 15e also have other than the effect as the terminal of ion collector 14 as from below
Effect to the fulcrum post that ion collector 14 is supported.
Ion collector supporting member 17 and terminal 15d, 15e and ion collector 14 are electrically connected and machinery connects
It connects, while being supported from below by terminal 15d, 15e, ion collector 14 is supported from below.Ion collector branch
Bearing member 17 is each configured with one in the side terminal 15d, the side terminal 15e.
The ion collector supporting member 17 is the component of the thin plate of thickness to be bent along the periphery of ion collector 14
Mode formed.In the present embodiment, ion collector supporting member 17 uses shape shorter on circumferential direction (direction θ),
But it can also be arranged in the whole circumference (360 °) of ion collector 14.
Ion collector supporting member 17 constitutes (such as 300K) by the thermal conductivity material lower than ion collector 14.Ion
As long as the material of collector supporting member 17 is the thermal conductivity material lower than ion collector 14, arbitrary material can be used
Material, such as use the metal materials such as stainless steel (SUS304), iron, nickel, cobalt as its material.
Control unit 20 has shell, is built-in with controller 21, galvanometer 22 and three power supply 23a in the inside in shell
~23c etc..Controller 21 includes CPU (Central processing Unit: central processing unit), volatile memory, non-
Volatile memory etc..
CPU carries out each section of triode type ion gauge 100 total according to the various programs stored in memory
Body control.For example, CPU executes the processing controlled to the work of each power supply 23a~23c, basis is measured by galvanometer 22
Ionic current values and pressure is calculated processing, calculated pressure shown into the processing on display (not shown)
Deng.
Galvanometer 22 is measured the ionic current values for flowing through ion collector 14, and by the value of measurement to controller 21
Output.In three power supply 23a~23c, the first power supply 23a is to make the electricity of 12 red heat of filament for leading to direct current to filament 12
Source, second source 23b are the power supply for applying the current potential higher than filament 12 to aperture plate 13.In addition, third power supply 23c be for
The current potential of filament 12 is set to be higher than the power supply of the current potential of ion collector 14.
In addition, being provided with the output terminal (not shown) with the conducting of each power supply 23, sensor unit 10 and control in the housing
Unit 20 processed is attached by the cable with connector.In addition, sensor unit 10 and control unit 20 can also assemble
In the inside of same housing.
< tests >
Next, implementing for for the relationship between the pressure investigating the thermal conductivity of ion collector 14 and measured
Experiment be illustrated.In this experiment, prepare 7 kinds of materials as the material of ion collector 14, pass through ioncollection
7 kinds of different triode type ion gauges 100 of the material of pole 14 respectively to vacuum evacuation when the indoor pressure of vacuum chamber into
Row measurement.
Fig. 3 is that the 7 kinds of metal materials and these metal materials for indicating the material as ion collector 14 and using exist
The figure of the relationship between thermal conductivity when 300K.Fig. 4 is to indicate the triode type different by the material of ion collector 14
The figure of the indoor pressure of the vacuum chamber that ion gauge 100 determines.
In addition, in this experiment, as the material of filament 12, be oxidized the iridium of yttrium covering using surface, filament 12 it is thick
Carefully it is set as φ 0.127mm (before being oxidized yttrium covering).In addition, the height Hf of filament 12 is set as 10mm.
In addition, the material as aperture plate 13, the molybdenum covered using surface by platinum, the thickness of aperture plate 13 are set as φ 0.25mm.
In addition, the height Hg of aperture plate 13 is set as 20mm, the diameter phi g of aperture plate 13 is set as 10mm.
In addition, the material as ion collector 14, as shown in figure 3, having used graphite, copper, tungsten, molybdenum, nickel, platinum, stainless
This 7 kinds of materials of steel (SUS304).As shown in figure 3, thermal conductivity (face direction) of these 7 kinds of materials in 300K is followed successively by 700W/
(m·K)、401W/(m·K)、173W/(m·K)、138W/(m·K)、90.9W/(m·K)、71.6W/(m·K)、16W/(m·
K)。
In addition, the thickness of ion collector 14 is set as 0.1mm, the height Hi of ion collector 14 is set as 20mm, and ion is received
The diameter phi i of collector 14 is set as 17mm.
In addition, the material as ion collector supporting member 17, has used stainless steel (SUS304).
In addition, the current potential of filament 12 is set as 25V, the current potential of aperture plate 13 is set as 150V, and the current potential of ion collector 14 is set as
0V.In addition, being set as 4W to the output power of filament 12 hereinafter, the emission current between filament 12 and aperture plate 13 is set as 1mA.
In addition, thermal conductivity when using 300K is the graphite, copper, tungsten of 173W/ (mK) or more as ion collector 14
Material the case where correspond to embodiment according to the present invention.Thermal conductivity when on the other hand, using 300K is less than 173W/
(mK) the case where material as ion collector 14 of molybdenum, nickel, platinum, stainless steel (SUS304), corresponds to comparative example.
Referring to Fig. 4, the triode type ion gauge different by the material of ion collector 14 is shown in FIG. 4
The 100 indoor pressure of vacuum chamber determined.In Fig. 4, the longitudinal axis indicates measured pressure, and horizontal axis indicates the time (generally
12 hours).In addition, since molybdenum, nickel, platinum become roughly the same curve graph, so being shown as the same curve graph.
Become following result: the limiting pressure (2 × 10 of the highest graphite of thermal conductivity in Fig. 4-6Pa) minimum, with thermal conductivity
Rate is lower, and limiting pressure is gradually got higher, the limiting pressure (1 × 10 of the minimum stainless steel of thermal conductivity (SUS304)-4Pa) highest.Separately
Outside, limiting pressure is after pressure is with vacuum evacuation decline, and pressure is stable and becomes value when fixing.
From this result, thermal conductivity becomes higher, and limiting pressure becomes lower.That is, ion collector 14
There are the relationships of inverse ratio between thermal conductivity and limiting pressure.
In Fig. 4, be conceived to thermal conductivity when 300K be less than the corresponding curve graph of molybdenum, nickel, the platinum of 173W/ (mK) and
Two curve graphs involved in the comparative example of curve graph corresponding with stainless steel.Pressure shown in these curve graphs is with passing through
Vacuum evacuation makes the indoor pressure of vacuum chamber be lower and be gradually reduced, and is falling to approximately 2 × 10-5After Pa (determination limit value) by
Gradually rise and to of about 8 × 10-5Pa is then stable.
Like this, when the material as ion collector 14 uses the low material of thermal conductivity, what generation was measured
Pressure rises after temporary decline, becomes certain constant value and stablizes such situation.
The reasons why the case where < pressure transient >
Hereinafter, the material to thermal conductivity when by 300K less than 173W/ (mK) constitutes the comparison of ion collector 14
The reasons why pressure becomes such case in example is illustrated.Fig. 5 is that thermal conductivity when indicating by 300K is less than 173W/ (mK)
Material constitutes the signal of the situation of the movement of in the comparative example of ion collector 14, collision ion collector 14 cation 1
Figure.In addition, aperture plate 13 is omitted for convenience's sake to illustrate in Fig. 5.
When filament 12 is energized, from the near top of filament 12 radiate thermoelectron, the thermoelectron towards aperture plate 13 and by
Accelerate, and is captured by aperture plate 13.Thermionic a part is near aperture plate 13 and in triode type ion gauge 100
The gas molecule collision that portion disperses, thus gas molecule is ionized and generates cation 1.
Cation 1 is attracted and collided with ion collector 14 by ion collector 14, and receives electricity from ion collector 14
Son.
Since cation 1 receives electronics from ion collector 14, ionic current is generated in ion collector 14, the ion
The value of electric current is measured by galvanometer 22.The pressure of the inside of vacuum chamber is measured as a result,.
In Fig. 4, it is conceived to and the corresponding curve graph of stainless steel and the two curves of curve graph corresponding with molybdenum, nickel, platinum
Figure.In these curve graphs, correspond to vacuum chamber vacuum evacuation and pressure gradually decline when, gas molecule (just from
Son is 1) to the surface collision of ion collector, and form equilibrium state to the gas molecule of surface collision: a part is as gas
It is detached from, remaining a part becomes molecular layer (for example, physical absorption layer or chemisorbed layer etc. that binding molecule 2 is constituted).
It is and other so in the case where ion collector 14 is made of platinum in addition, since platinum is highly stable in chemistry
Example is compared, the molecular layer generated almost without formation by chemisorption.Although that is, in the ion collector of Fig. 5
The equilibrium state at certain moment is shown in the schematic diagram of gas molecule existing for 14 surface, it is believed that herein as
The result on the surface of gas molecule (such as hydrone) collision ion collector 14 and in the molecular layer that is formed physical absorption account for master
Lead status.
Region near the center in the axial direction in ion collector 14 is that the probability that cation 1 collides is higher than
The region of the probability of the molecular layer generated by absorption is formed on the surface of ion collector 14, is that molecular layer is difficult in the state of the equilibrium
With the region of accumulation.In this region, since molecular layer is difficult to accumulate, so even if cation 1 collides the region, it is also difficult to release
Put the particles such as neutral molecule, neutral fragment molecule, neutral atom or their ion.
On the other hand, since the region near the both ends in the axial direction in ion collector 14 is touching for cation 1
Likelihood ratio center low region nearby is hit, so becoming with time going by and region that molecular layer is easy to accumulate.When just from
When son 1 is collided with the molecular layer accumulated, release neutral molecule, neutral fragment molecule, neutral atom or their ion etc..
In addition, the energy that molecule is detached from from surface can also be investigated from the temperature as molecular motion.When from the viewpoint
From the point of view of setting out when ion collector 14, since the center in axial direction is nearby proximate to generate the region at the top of the filament 12 of heat,
So becoming the high region of temperature (referring to Fig. 5).Therefore, the molecular layer near the center in the axial direction of ion collector 14 is kept
There is the energy higher than both ends.That is, it is believed that compared with both ends, be detached from and account under the equilibrium state near center
Leading position, at both ends, absorption is occupied an leading position.Therefore, it from the viewpoint of the temperature of ion collector 14, is received in ion
The region near the center in axial direction in collector 14 also becomes the region that molecular layer is difficult to accumulate, near the both ends in axial direction
Region also become molecular layer be easy accumulation region.
The vacuum evacuation from vacuum chamber further across the time after, the gas molecule in sensor main body 11
Composition towards composition corresponding with the exhaust capacity of vacuum chamber variation.In general, being detached from relative to absorption as leading gas
Molecule is preferentially discharged, as a result, in vacuum chamber towards be adsorbed as leading gas molecule as advantage composition and
Variation.For example, the composition direction of the gas in sensor main body 11 is difficult to the increased composition of the hydrone being discharged from vacuum chamber
And change.Certainly, accordingly with the variation of the indoor composition of vacuum chamber as measure object, point on 14 surface of ion collector
The composition of sublayer also changes.
It is whole in 14 surface region of ion collector since the composition of the gas molecule in sensor main body 11 changes
Towards the equilibrium state variation for adsorbing dominance compared with being detached from body.However, it is possible to say that the process of the variation is slow, making
For in Fig. 4 of experimental example pass through the 12h/9 time at the time of cannot clearly confirm the variation, after the 12h/9 time~warp
The variation is able to confirm that in a period of crossing 12h.That is, it is believed that final equilibrium state is at the time of have passed through 12h.
It forms near at the time of have passed through the 12h/9 time it is considered that this indicates that vacuum chamber is indoor from common Atmospheric composition ratio
Variation is the gas composition of absorption advantage.
It is set as having in Fig. 4 1.0 × 10-3Pa or less shows the vacuum evacuation of the gas composition environment of absorption advantage
The environment of system, but from the atmosphere opening moment, start the atmosphere group of the initial gas composition and original state of vacuum evacuation
At not differing significantly.That is, being the equilibrium-like as disengaging advantage in 14 surface region entirety of ion collector
State is to adsorb the situation not developed.That is, when using the tangent line of the time changing curve of a variety of materials of Fig. 4 as 1 letter
The value of several slopes when understanding, all as negative value, therefore can be confirmed the initial situation.
But 1.0 × 10-4When Pa or less, with the variation of gas composition, the composition on 14 surface of ion collector starts
Variation, this point are just able to confirm that according to the variation of Fig. 4.It is measured although being omitted in Fig. 4 by other vacuum degree measurement devices
Vacuum degree record, but since the value of graphite is close to the true vacuum degree in vacuum chamber, so should show originally
Vacuum degree identical with graphite.But other materials show the tendency that vacuum degree runs down, that is, although slope is negative
But level off to zero tendency.
The reason is that since the composition on initial 14 surface of ion collector is from Atmospheric composition to the gas group of absorption advantage
At variation, so that the thickness of the molecular layer on 14 surface of ion collector produces variation.It is not produced before reaching the vacuum degree
Raw difference.
The phenomenon shows the gas composition due to becoming absorption advantage, so compared with before it, adsorbed face
Temperature condition occupy an leading position.That is, it is believed that in the comparison between the material of Fig. 4, there is lower temperature table
The material in face is easy to adsorption gas molecule, and adsorbance, that is, molecular layer thickness increases.
Here, having been assigned the molecular layer of projectile energy when the molecular layer collision (incidence) increased to thickness of cation 1
Molecule be detached from.It need research from now on about detailed physical phenomenon, but from Fig. 4 etc. it is found that under the vacuum degree
Relative to cation towards triode type ion gauge ioncollection pole surface incidence, the amount and molecule of the molecule of disengaging
There are proportionate relationships between the thickness of layer.
That is, being released the pass that the molecule of (disengaging) increases by the increase of the thickness of molecular layer due to existing
System, so 1.0 × 10-4Pa or less becomes absorption advantage with equilibrium state, and the molecule of disengaging also increases, the molecule of the disengaging
It is measured again by vacuum meter, as a result, the slope of the measured value of vacuum degree is mobile to zero side.
In general, absorption/disengaging is stabilized into the stage that equilibrium state shifts.That is, by the measurement of vacuum degree
The slope of value is considered absorption/disengaging equilibrium state at the time of becoming zero.The equilibrium-like will be become using the user of vacuum meter
Identified at the time of state as determination limit, be understood as the performance difference of the vacuum meter, but when the determination limit with when
Between and when changing, it is difficult to distinguished with original vacuum degree deterioration, in addition, change causes user not believe analyzer in itself
Appoint, it may be said that as there are problems for commodity.
That is, it is necessary to avoid measuring slope from the vacuum degree that zero-turn becomes and becomes positive value, but contain platinum
The material can generate the problematic phenomenon.The reason for this is that the temperature on 14 surface of ion collector is low, that is to say, that due to its
Its material is compared, and the equilibrium state of disengaging and the absorption of the incident frequencies relative to cation is in one side of absorption, is further made
Molecular layer is accumulated and increases thickness, and the disengaging amount of result molecule as caused by the incidence of cation increases.
After the 12h/9 time~have passed through 12h in a period of above-mentioned slope become positive value the reason of to be received in ion
In the both ends molecular layer that nearby (the low position of temperature) is accumulated in the axial direction of collector 14, which becomes releasing for molecule
Put source.That is, being had the following problems in the case where constituting ion collector 14 by each material containing platinum: due to from this
The influence of the molecule of source of release release, the pressure in sensor main body 11 become the high pressure in part, become with as measurement pair
As the different pressure of the indoor pressure of the vacuum chamber of object.Accordingly, there exist cannot correctly survey to the indoor pressure of vacuum chamber
Fixed problem.
< binding molecule >
Next, being illustrated for for the measurement for judging which kind of molecule binding molecule 2 is mainly and implements.In the survey
In fixed, the material of ion collector 14 different 7 kinds of (graphite, copper, tungsten, molybdenum, nickel, platinum, stainless steels are prepared as described above
(SUS304)) triode type ion gauge.Also, after implementing the vacuum evacuation of vacuum chamber, disconnected in filament 12
When and filament 12 connect when, be measured by mass spectrum of the quadrupole mass spectrometer to the gas molecule in sensor main body 11.
As a result, true in triode type corresponding with the low molybdenum of thermal conductivity, nickel, platinum, four kinds of materials of stainless steel ionization
In sky meter (comparative example), the peak value of the water in mass spectrum when the peak value and filament 12 of the water in mass spectrum when filament 12 is connected disconnect
Compared to significantly becoming larger.
This indicates that compared with the amount of the hydrone to disperse in sensor main body 11 when filament 12 disconnects, filament 12 passes when connecting
The amount of the hydrone to disperse in sensor main body 11 is quite a lot of.The result indicates that binding molecule 2 is mainly hydrone.
That is, filament 12 disconnect when, due to hydrone will not become cation 1, so hydrone will not by from
Sub- collector 14 attracts, therefore the amount that hydrone is adsorbed on ion collector 14 as binding molecule 2 is few.Therefore, in filament
When 12 disconnection, since there is no the source of release of hydrone, so the amount and vacuum of the hydrone to disperse in sensor main body 11
The amount of the indoor hydrone of chamber is roughly the same, and the amount of the hydrone is few.
On the other hand, when filament 12 is connected, hydrone becomes cation 1, and hydrone is attracted by ion collector 14.This
Outside, since the material for using thermal conductivity low constitutes ion collector 14, thus hydrone be deposited in as binding molecule 2 from
Sub- collector 14.Moreover, because the hydrone accumulated becomes the source of release of hydrone, so compared with when filament 12 disconnects,
The amount for the hydrone that filament 12 disperses in sensor main body 11 when connecting becomes quite a lot of.
The peak value of the water in mass spectrum when filament 12 is connected is compared with the peak value of the water in mass spectrum when filament 12 disconnects
This result that becomes larger significantly shows above situation, it may thus be appreciated that binding molecule 2 is mainly hydrone.
In measurement in this, even highly stable platinum in chemistry, and filament 12 connect when mass spectrum in
Significantly become larger such result compared with the peak value of water of the peak value of water in the mass spectrum when disconnection of filament 12.This is indicated in comparative example
The reason that middle pressure becomes unstable is, main cause is not due to chemisorption and the formation of molecular layer that generates, but by
In hydrone absorption and the molecular layer that generates formation (because platinum is difficult to form the molecular layer generated by chemisorption).
In addition, in 100 (this of triode type ion gauge corresponding with the high graphite of thermal conductivity, copper, three kinds of materials of tungsten
Embodiment) in, although the water in mass spectrum when the peak value and filament 12 of the water in mass spectrum when filament 12 is connected disconnect
Peak value is compared and is also become larger, but its difference is small.This is indicated in the present embodiment, compared with comparative example, moisture when filament 12 is connected
The amount that son is adsorbed is quite few.
The > such as < effect
As described above, material of the thermal conductivity less than 173W/ (mK) when using 300K constitutes ion and receives
In the comparative example of collector 14, main cause is that hydrone is adsorbed to ion collector 14, and measured pressure is caused to become
Inaccuracy.
Therefore, in the present embodiment, the generation of binding molecule 2 (especially hydrone) in order to prevent, use by
Thermal conductivity when 300K is that the material (such as graphite, copper, tungsten) of 173W/ (mK) or more constitutes ion collector 14.
Fig. 6 is to indicate to constitute ion collector 14 by the material that the thermal conductivity in 300K is 173W/ (mK) or more
In the case of, collision ion collector 14 cation 1 movement situation schematic diagram.In addition, in Fig. 6, for the ease of
Illustrate, aperture plate 13 is omitted to illustrate.
As shown in fig. 6, in the present embodiment, due to constituting ion collector 14 by the high material of thermal conductivity, so energy
It is enough efficiently to transmit the heat generated from transmitting filament 12 to the entirety of ion collector 14.Therefore, in ion collector 14,
It is not only the central part of axial direction (Z-direction), and both ends in the axial direction nearby can elevate the temperature, so as to
Increase the temperature of the entirety of ion collector 14.
Therefore, different from Fig. 5 of comparative example in Fig. 6, near the both ends in the axial direction of ion collector 14, make
For the collision ion collector 14 of cation 1 gas molecule for being got higher from the energy that ion collector 14 is detached from.As a result,
It can prevent the generation of binding molecule 2 (specifically for hydrone).
In addition, in above-mentioned experiment, it is practical that the temperature for the ion collector 14 being made of graphite, copper, tungsten is measured
Result be temperature more than 210 degree.As long as here, knowing 200 degree of temperature of ion collector 14 or more, it will be able to prevent
The absorption of hydrone etc., it follows that can suitably prevent the generation of binding molecule 2 in the present embodiment.In addition, upper
State in experiment, reality to the temperature of the ion collector 14 (comparative example) being made of molybdenum, nickel, platinum, stainless steel (SUS304) into
The result of row measurement is 160 °~180 °.
As described above, in the present embodiment, since the generation of binding molecule 2 can be prevented, so can prevent such as than
Compared with the situation of the pressure inaccuracy measured as example, so as in the measuring object correctly to vacuum chamber etc.
The pressure in portion is measured.
The situation shows as the curve graph corresponding with graphite, copper, tungsten in Fig. 4.That is, as shown in these curve graphs, at this
The pressure measured in embodiment declines with making the indoor pressure of vacuum chamber be lower to be gradually reduced by vacuum evacuation
After to defined value (determination limit value), value that is stable in this state and obtaining fixation.
Here, in the present embodiment, being set as 4W or less to the output power of filament 12.Such as to filament 12 for electric work
Rate is set as in the such small-sized triode type ion gauge 100 of 4W or less, is easy to be lower by the heat that filament 12 generates, therefore
If not taking any countermeasure, it is easy to be lower there are the temperature near the both ends in the axial direction in ion collector 14
Problem.
On the other hand, as described above, in the triode type ion gauge 100 involved in present embodiment, by thermal conductivity
The high material of rate constitutes ion collector 14.Therefore, in the filament 12 as the output power to filament 12 is set as 4W or less
Heat be easy in the small-sized triode type ion gauge 100 being lower, also can be in two in the axial direction of ion collector 14
The temperature of ion collector 14 is suitably improved near end.
In addition, in the present embodiment, ion collector supporting member 17 is by thermal conductivity than constituting ion collector 14
The low material of material is constituted.Therefore, the heat of ion collector 14 can be prevented to 17 loss of ion collector supporting member, thus
The heat of ion collector 14 can be maintained higher state.
In addition, in the present embodiment, sensor main body 11 is made of metal material.Like this, by by metal material
Material constitutes sensor main body 11, can prevent from generating electrification in the hot electron impingement sensor main body 11 from filament 12, from
And the Potential distribution in the space in sensor main body 11 can be maintained fixed.Thereby, it is possible to the spirits fixed with long-time
Sensitivity is measured pressure.
Here, generating binding molecule 2 to ion collector 14 in order to prevent, it is contemplated that the axial direction (Z of ion collector 14
Axis direction) both ends cut, to reduce the height Hi of ion collector 14.But when reducing ion like this
When the height Hi of collector 14, it is possible to which the capturing efficiency of the cation 1 in ion collector 14 declines.
On the other hand, in the present embodiment, can be prevented by constituting ion collector 14 by the high material of thermal conductivity
The only generation of binding molecule 2, there is no need to reduce the height Hi of ion collector 14.Therefore, in the present embodiment, Neng Goushi
Locality prevents the generation of binding molecule 2, the capturing efficiency without reducing the cation 1 in ion collector 14.In addition, as above
It is described, in the present embodiment, the height Hi of ion collector 14 be set as about 2 times of the height Hf of filament 12 and with aperture plate 13
The identical height of height Hg.
In addition, this height Hi for being not meant to that ion collector 14 must be increased, such as can also make ion collector
14 height Hi becomes the height lower than the height Hg of aperture plate 13.
Description of symbols
1 cation；
2 binding molecules；
10 sensor units；
11 sensor main bodies；
12 filaments；
13 aperture plates；
14 ion collectors；
15 terminals；
16 aperture plate supporting members；
17 ion collector supporting members；
20 control units；
100 triode type ion gauges.
Claims (5)
1. a kind of triode type ion gauge, comprising:
Filament；
Aperture plate configures around the filament；And
Ion collector is tubular, is configured around the aperture plate, and thermal conductivity when by 300K is 173W/ (mK)
Above material is constituted.
2. triode type ion gauge as described in claim 1, wherein
Output power to the filament is 4W or less.
3. triode type ion gauge as claimed in claim 1 or 2, wherein
Also there is supporting member, the supporting member supports the ion collector, and is made of thermal conductivity ratio described
The low material of the material of ion collector is constituted.
4. triode type ion gauge as claimed in claim 1 or 2, wherein
Also there is receiving portion, the receiving portion is made of metal material, and the filament, the aperture plate and the ion are received
Collector is housed in inside.
5. a kind of piezometry method, comprising the following steps:
Prepare triode type ion gauge, the triode type ion gauge has filament, configures the week in the filament
It the aperture plate that encloses and configures around the aperture plate and thermal conductivity when by 300K is the material structure of 173W/ (mK) or more
At ion collector, the ioncollection extremely tubular；And
The pressure of the inside of measuring object is measured by the triode type ion gauge.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017134650A JP6932892B2 (en) | 2017-07-10 | 2017-07-10 | Triode type ionization pressure gauge and pressure measurement method |
| JP2017-134650 | 2017-07-10 |
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| CN109238559A true CN109238559A (en) | 2019-01-18 |
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| CN201810694986.5A Pending CN109238559A (en) | 2017-07-10 | 2018-06-29 | Triode type ion gauge and piezometry method |
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| JP (1) | JP6932892B2 (en) |
| KR (1) | KR102550943B1 (en) |
| CN (1) | CN109238559A (en) |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112903183A (en) * | 2019-11-19 | 2021-06-04 | 北京大学 | On-chip miniature ionization vacuum sensor and manufacturing method thereof |
| CN114354058A (en) * | 2021-12-06 | 2022-04-15 | 兰州空间技术物理研究所 | Gauge tube of wide-range ionization vacuum gauge |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02142050A (en) * | 1988-11-24 | 1990-05-31 | Fumio Watanabe | Hot cathode type ionization vacuum gauge |
| JP3069975B2 (en) * | 1991-09-06 | 2000-07-24 | アネルバ株式会社 | Ionization gauge |
| KR20080017929A (en) * | 2006-08-23 | 2008-02-27 | 한국표준과학연구원 | Apparatus and method of desorbed gas species and quantities measurements from ionization gauges using residual gas analyzer |
| CN101266180A (en) * | 2007-03-16 | 2008-09-17 | 清华大学 | Ionization gage |
| CN102138070B (en) * | 2009-03-18 | 2014-01-15 | 株式会社爱发科 | Method for detecting oxigen, method for determining air leakage, gas component detector, and vacuum processor |
| JP6227834B2 (en) * | 2015-03-03 | 2017-11-08 | 株式会社アルバック | Triode type ionization vacuum gauge |
| WO2016151997A1 (en) * | 2015-03-23 | 2016-09-29 | 株式会社アルバック | Triode type ionization vacuum gauge |
-
2017
- 2017-07-10 JP JP2017134650A patent/JP6932892B2/en active Active
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2018
- 2018-06-11 TW TW107120020A patent/TWI786129B/en active
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112903183A (en) * | 2019-11-19 | 2021-06-04 | 北京大学 | On-chip miniature ionization vacuum sensor and manufacturing method thereof |
| CN114354058A (en) * | 2021-12-06 | 2022-04-15 | 兰州空间技术物理研究所 | Gauge tube of wide-range ionization vacuum gauge |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201908706A (en) | 2019-03-01 |
| JP2019015666A (en) | 2019-01-31 |
| JP6932892B2 (en) | 2021-09-08 |
| KR20190006434A (en) | 2019-01-18 |
| TWI786129B (en) | 2022-12-11 |
| KR102550943B1 (en) | 2023-07-04 |
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