CN109238552A - A kind of pressure sensor assembly of microwave eliminating device - Google Patents

A kind of pressure sensor assembly of microwave eliminating device Download PDF

Info

Publication number
CN109238552A
CN109238552A CN201811173140.3A CN201811173140A CN109238552A CN 109238552 A CN109238552 A CN 109238552A CN 201811173140 A CN201811173140 A CN 201811173140A CN 109238552 A CN109238552 A CN 109238552A
Authority
CN
China
Prior art keywords
pressure sensor
pedestal
hole
lid
eliminating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811173140.3A
Other languages
Chinese (zh)
Inventor
陈长权
胡志远
康士全
汤彪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changsha Yonglekang Instrument And Equipment Co Ltd
Original Assignee
Changsha Yonglekang Instrument And Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changsha Yonglekang Instrument And Equipment Co Ltd filed Critical Changsha Yonglekang Instrument And Equipment Co Ltd
Priority to CN201811173140.3A priority Critical patent/CN109238552A/en
Publication of CN109238552A publication Critical patent/CN109238552A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44Sample treatment involving radiation, e.g. heat

Abstract

A kind of pressure sensor assembly of microwave eliminating device disclosed by the invention is related to laboratory testing equipment technical field, including pressure sensor 8 and pressure sensor signal cable 10;It further include having pedestal 9, lid 1, pressure sensor fixing seat 5 and pressure sensor surface protecting layer group;The pressure sensor fixing seat 5 is mounted in the step blind hole among pedestal 9, the pressure sensor 8 is mounted in the step through-hole among pressure sensor fixing seat 5, and the pressure sensor signal cable 10 connecting with 8 bottom surface of pressure sensor is pierced by by the through-hole below pressure sensor fixing seat 5 and is pierced by afterwards, again by the radial hole of 9 lower part of pedestal;The pressure sensor surface protecting layer group is mounted on the upper surface of pedestal 9, and centre is sleeved on the top of pedestal 9 with the lid 1 of step through-hole;Have the characteristics that structure is simple, Corrosion Protection is good, precision is high, is used for laboratory testing heavy metal or other harmful substances matter.

Description

A kind of pressure sensor assembly of microwave eliminating device
Technical field
The present invention relates to laboratory testing equipment technical field, the pressure sensor group of especially a kind of microwave eliminating device Piece installing.
Background technique
Currently, laboratory during test sample, is typically necessary the sample by approrpiate wts have been weighed loaded on resolution In tank, the strong acid, strong oxidizing property reagent such as concentrated nitric acid, perchloric acid, hydrogen peroxide are then added, are then assembled into resolution canister assembly, then Resolution canister assembly (single or multiple) is placed on counteracting tank Support tray, after allowing the reagent in tank to impregnate a few hours, is retransferred Into microwave eliminating device, digestion process then is carried out according to the program of setting.In digestion process, microwave eliminating device is generated micro- Wave is applied in counteracting tank, and strong acid and strong base and sample react in addition, and the temperature in counteracting tank can be promoted constantly, so as to cause Air pressure enhancing.When the air pressure in tank is more than certain numerical value, it just will appear dangerous situation.Thus, it is generally the case that it can disappear It solves and places a pressure sensor in tank, to be monitored to the air pressure in tank, to avoid the generation of dangerous situation.Due to Be added to strong acid and strong base in counteracting tank, belong to high corrosion environment, thus, to the corrosion resistance of pressure sensor used require compared with It is high.
" corrosion-preventive pressure sensor " disclosed in Chinese patent (number of patent application 95231269.7), it include shell, The terminal box and connecting flange that are assembled integrally with shell and it is encapsulated in the intracorporal silicon-sensitive element of shell, wherein the intracorporal silicon of shell Sensing element both ends are utilized respectively the encapsulation pilot medium of isolation diaphragm made of resistant material, and connecting flange passes through corrosion-resistant close Packing is combined into one with the sealing flange for being coated with lining envelope.
Another Chinese patent (number of patent application 98813506.X) is disclosed " outside the pressure sensor of media compatibility Shell ", the shell include bottom (105), and setting has the printing electricity of pressure sensor (18) mounted thereto on bottom (105) Road plate (115).Sealing element (45) setting seals the pressure sensor on circuit boards, and diaphragm (30) is arranged in sealing element On.Fluid flow port (130) is connect with bottom, and is compressed and connected the diaphragm to form the seal chamber for surrounding pressure sensor.By setting Pressure transmitting fluid (21) such as oil is injected seal chamber by the inlet (140) set on a printed circuit.Such structure makes to pass Sensor shell is easy to assemble using normal elements, and all outer surfaces of the shell can be made by the material system of pole corrosion resistance At.
It is disclosed " a kind of based on PDMS pressure drag and stainless that there are also Chinese patents (number of patent application 201420231416.X) The anti-corrosion pressure sensor of steel capacitor " including closed anti-corrosion shell and is mounted on the intracorporal PDMS pressure drag sensing of anti-corrosion shell Unit and stainless steel capacitive sensing cells.Anti-corrosion shell successively assembled by hollow bolt, stainless steel diaphragm, capping, nut and At;PDMS pressure drag sensing unit by insulating film, PDMS piezoresistance layer and lower surface there is the inertia rubber top electrode of detecting electrode to serve as a contrast Bottom composition;Stainless steel capacitive sensing cells are made of the stainless steel film pole plate and backing substrate of center opening.
It is disclosed " micro-pressure anti-corrosion pressure transducer " that there are also Chinese patents (number of patent application 200520078947.0), Lead is had, with reference to the metal shell of pressure chamber including one, it is characterised in that silicon micro-pressure sensing is bonded in the metal shell Device chip, chip are connect using spun gold with wire bonding, and metal shell, golden platinum yellow gold diaphragm and pressure welding ring use laser Welding, is full of silicone oil between golden platinum yellow gold diaphragm and silicon pressure sensor chip, and lead end is linked with thick-film resistor benefit Repay network.Above-mentioned gold platinum yellow gold diaphragm is using diaphragm made of golden platinum yellow gold 71.5: 7.5: 6: 15.Above-mentioned gold platinum Yellow gold diaphragm is the diaphragm using 15 Μ M thickness made of golden platinum yellow gold 71.5: 7.5: 6: 15.
There are also disclosed in Chinese patent (number of patent application 201620699457.0) " a kind of corrosion pressure sensor ", wrap Include ceramic core (4), outer silk compressing piece (5) and shell, which is characterized in that shell includes front casing, and the pressure sensor is also Including liner (2), the liner is had a first end and a second end, fluted in the second end setting of liner, along the axial direction of liner It is provided with the through-hole for importing detected fluid, the through-hole is connected to groove;The outer silk compressing piece (5) is by ceramic core (4) it is pressed on the second end of liner, is formed and surveys pressure cavity;Axial direction along front casing is provided with cavity;The liner, ceramic core (4) it is successively set in cavity with outer silk compressing piece (5).
Summary of the invention
That technical problem to be solved by the invention is to provide a kind of structures is simple, Corrosion Protection is good, pressure with high accuracy Sensor assembly.
To achieve the above object, the technical solution adopted by the present invention is that inventing a kind of pressure sensing of microwave eliminating device Device assembly: including pressure sensor 8 and pressure sensor signal cable 10;It further include having pedestal 9, lid 1, pressure sensor Fixing seat 5 and pressure sensor surface protecting layer group;The step that the pressure sensor fixing seat 5 is mounted among pedestal 9 is blind Kong Zhong, the pressure sensor 8 is mounted in the step through-hole among pressure sensor fixing seat 5, with the pressure sensor 8 The pressure sensor signal cable 10 of bottom surface connection is pierced by by the through-hole below pressure sensor fixing seat 5 afterwards, again by under pedestal 9 The radial hole in portion is pierced by;The pressure sensor surface protecting layer group is mounted on the upper surface of pedestal 9, and centre is with step through-hole Lid 1 is sleeved on the top of pedestal 9.
The pressure sensor surface protecting layer group includes tetrafluoro soft board 2 and copper foil plate 7, and the copper foil plate 7 closely pastes It closes in the ceramic plane of pressure sensor 8, the tetrafluoro soft board 2 is mounted on above copper foil plate 7.
Between the tetrafluoro soft board 2 and copper foil plate 7, it is additionally provided with aluminum foil plate 3.
On the outer cylinder on 9 top of pedestal, it is machined with external screw thread;Inner cylinder in the 1 lower step hole of lid On, also it is machined with internal screw thread;1 spinning of lid is in the top of pedestal 9.
On the seat wall on 9 top of pedestal, it is provided with more than one screw hole, by spinning in the holding screw in the screw hole 4 fixation pressure sensor fixing seats 5.
The pedestal 9 and lid 1 is made by copper or aluminium alloy or other metal materials, in 9 He of pedestal The surfaces externally and internally of lid 1 is coated with special Vernon coating.
On the interior step of the pedestal 9, it is provided with ground wire fixing threaded hole, is believed pressure sensor by ground wire fixing screws 6 Ground wire in number cable 10 is connected to pedestal 9.
The pressure sensor assembly of microwave eliminating device of the invention, is that pressure sensor is mounted on by pedestal and lid In the can that son is constituted, thus, it is relatively simple for structure;Meanwhile special Vernon is coated in the surfaces externally and internally of pedestal and lid Coating, is provided with pressure sensor surface protecting layer group on the exposed surface of pressure sensor in addition, therefore its Corrosion Protection Preferably;In addition, the protective layer contacted with the ceramic surface of pressure sensor uses copper foil plate, and the thermal expansion coefficient of ceramics and copper Almost, thus, be avoided that the very big deviation of pressure occur, therefore, sensing precision it is higher.
Detailed description of the invention
Fig. 1 is main cross-sectional schematic diagram of the invention;
Fig. 2 is schematic top plan view of the invention;
Fig. 3 is K partial enlargement diagram of the invention;
Fig. 4 is exploded isometric schematic diagram of the invention.
In figure:
1 is lid, and 2 be tetrafluoro soft board, and 3 be aluminum foil plate, and 4 be holding screw, and 5 be pressure sensor fixing seat, and 6 be ground wire Fixing screws, 7 be copper foil plate, and 8 be pressure sensor, and 9 be pedestal, and 10 be pressure sensor signal cable.
Specific embodiment
Below in conjunction with drawings and examples, the present invention is further illustrated.Following explanation is using the side enumerated Formula, but protection scope of the present invention should not be limited to thoses mentioned above.
The pressure sensor assembly of the microwave eliminating device of the present embodiment is believed by pressure sensor 8, pressure sensor Number cable 10, pedestal 9, lid 1, pressure sensor fixing seat 5 and pressure sensor surface protecting layer group are constituted.
Pressure sensor 8 connects pressure sensor signal cable using the ceramic mould pressure sensor of round pie below 10 leading-in end.
Pedestal 9 is a short cylinder, among it with double interior step blind holes;It is provided with ground in the lower step of the blind hole Ground wire in pressure sensor signal cable 10 is connected to pedestal 9 by ground wire fixing screws 6 by line fixing threaded hole;On pedestal 9 On the outer cylinder in portion, it is machined with external screw thread;On the seat wall on 9 top of pedestal, being provided with two, (this example uses two, can also be one A or three or other quantity) tightening screw hole;On the seat wall of 9 lower part of pedestal, one is provided with for installing pressure sensor letter The radial hole of number cable 10.
Lid 1 is the short cylinder for having two-way interior step through-hole, be machined on inner bore of step wall in its underpart with The matched internal screw thread of external screw thread on 9 top outer cylinder of pedestal.
Pedestal 9 and lid 1 are made of aluminium alloy (other metal or alloy can also be used) material, the surfaces externally and internally of the two It is coated with for etch-proof special Vernon coating.
Pressure sensor fixing seat 5 is the short cylinder that a top has interior step through-hole with outer step, lower part.
Pressure sensor surface protecting layer group is made of top-down tetrafluoro soft board 2, aluminum foil plate 3 and copper foil plate 7 Three-layer protection layer group.
When assembling, first pressure sensor 8 is placed in the interior step through-hole of pressure sensor fixing seat 5, allows pressure sensing Device signal cable 10 is pierced by downwards the radial hole on through-hole and 9 lower seat wall of pedestal;Thereafter, 6 spinning of ground wire fixing screws is arrived Ground wire fixing threaded hole, so that the ground wire of pressure sensor signal cable 10 is connected to pedestal 9.Then, pressure sensor is consolidated Reservation 5 is placed in the interior step blind hole of pedestal 9, its bottom surface is allowed to be butted on step in the lower part of pedestal 9, allows the outer step of upper part It is butted on the step on 9 top of pedestal, thereafter, holding screw 4 in the screw hole on 4 precession pedestal of holding screw, 9 upper seat wall, will be allowed End pushes against the outer cylinder of pressure sensor fixing seat 5, and then fixation pressure sensor fixing seat 5;Again by 7 (copper foil of copper foil plate The diameter of plate 7 is greater than the diameter of step through-hole in pressure sensor fixing seat 5, less than the upper surface of pressure sensor fixing seat 5 Diameter) it is covered on the upper surface of pressure sensor 8, allow copper foil plate 7 and the ceramic plane of pressure sensor 8 to fit closely together;It connects , by aluminum foil plate 3, (diameter of aluminum foil plate 3 is greater than the diameter on step blind hole top in pedestal 9 pairs, outside the upper surface less than pedestal 9 Diameter) it is covered on copper foil plate 7;By tetrafluoro soft board 2, (diameter of tetrafluoro soft board 2 is greater than the diameter of aluminum foil plate 3, less than pedestal 9 again Upper surface outer diameter) it is covered on aluminum foil plate 3, form three-layer protection layer group;Thereafter, by 1 spinning of lid in the top of pedestal 9, lid is allowed The interior step of sub 1 lower part pushes down tetrafluoro soft board 2, forms sealing.
Before use, the pressure sensor assembly of the microwave eliminating device of the present embodiment is placed in counteracting tank, and allow this An anti-corrosion pillar in tank contacts tetrafluoro soft board 2.
In use process, the microwave that microwave eliminating device generates is applied in the counteracting tank of strong acid and strong base and example reaction, Temperature in counteracting tank, which is constantly promoted, causes air pressure to enhance;After air pressure in tank increases, counteracting tank tank base will be generated Small deformation pushes anti-corrosion pillar to squeeze tetrafluoro soft board 2, and then passes to aluminum foil plate 3, copper foil plate 7, pressure sensor 8 Ceramic plane generates small voltage, the circuit board being transmitted to inside pressure sensor 8 after the ceramics of pressure sensor 8 are pressurized On, the pressure sensed is accurately conversed into specific pressure value, is then sent out by pressure sensor signal cable 10, For the monitoring in digestion process.
Since the thermal expansion coefficient of ceramics and copper is similar, it is avoided that the very big deviation of pressure occur, in addition tetrafluoro soft board 2, aluminum foil plate 3, the contact of 7 ceramic plane of copper foil plate are close, thus, three-layer protection is even used, still ensures that pressure sensing There are the weak voltages that pressure sensor can also be detected in the case where microwave inside microwave eliminating device for device, and can guarantee precision It is required that.
The pressure sensor assembly of microwave eliminating device of the invention is used for laboratory testing heavy metal or other nocuousness Substance.

Claims (7)

1. a kind of pressure sensor assembly of microwave eliminating device, including pressure sensor (8) and pressure sensor signal line Cable (10);It is characterized by also including have pedestal (9), lid (1), pressure sensor fixing seat (5) and pressure sensor surface Protective layer group;The pressure sensor fixing seat (5) is mounted in the intermediate step blind hole of pedestal (9), the pressure sensor (8) it is mounted in the intermediate step through-hole of pressure sensor fixing seat (5), the pressure being connect with the pressure sensor (8) bottom surface Force sensor signals cable (10) is pierced by by the through-hole of pressure sensor fixing seat (5) below afterwards, again by the diameter of pedestal (9) lower part It is pierced by hole;The pressure sensor surface protecting layer group is mounted on the upper surface of pedestal (9), and centre has the lid of step through-hole (1) it is sleeved on the top of pedestal (9).
2. the pressure sensor assembly of microwave eliminating device according to claim 1, it is characterised in that: the pressure passes Sensor surfaces protective layer group includes tetrafluoro soft board (2) and copper foil plate (7), and the copper foil plate (7) is fitted tightly over pressure sensor (8) in ceramic plane, the tetrafluoro soft board (2) is mounted on copper foil plate (7) above.
3. the pressure sensor assembly of microwave eliminating device according to claim 2, it is characterised in that: in the tetrafluoro Between soft board (2) and copper foil plate (7), it is additionally provided with aluminum foil plate (3).
4. the pressure sensor assembly of microwave eliminating device according to claim 3, it is characterised in that: in the pedestal (9) on the outer cylinder on top, it is machined with external screw thread;In the inner cylinder in the lid (1) lower step hole, it is also machined with interior spiral shell Line;Lid (1) spinning is in the top of pedestal (9).
5. the pressure sensor assembly of microwave eliminating device according to claim 4, it is characterised in that: in the pedestal (9) on the seat wall on top, it is provided with more than one screw hole, is sensed by spinning in holding screw (4) fixation pressure in the screw hole Device fixing seat (5).
6. the pressure sensor assembly of microwave eliminating device according to claim 5, it is characterised in that: the pedestal (9) and lid (1) is made by copper or aluminium alloy or other metal materials, in the inside and outside of the pedestal (9) and lid (1) Surface is coated with special Vernon coating.
7. the pressure sensor assembly of microwave eliminating device according to claim 6, it is characterised in that: in the pedestal (9) on interior step, it is provided with ground wire fixing threaded hole, it will be in pressure sensor signal cable (10) by ground wire fixing screws (6) Ground wire is connected to pedestal (9).
CN201811173140.3A 2018-10-09 2018-10-09 A kind of pressure sensor assembly of microwave eliminating device Pending CN109238552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811173140.3A CN109238552A (en) 2018-10-09 2018-10-09 A kind of pressure sensor assembly of microwave eliminating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811173140.3A CN109238552A (en) 2018-10-09 2018-10-09 A kind of pressure sensor assembly of microwave eliminating device

Publications (1)

Publication Number Publication Date
CN109238552A true CN109238552A (en) 2019-01-18

Family

ID=65055884

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811173140.3A Pending CN109238552A (en) 2018-10-09 2018-10-09 A kind of pressure sensor assembly of microwave eliminating device

Country Status (1)

Country Link
CN (1) CN109238552A (en)

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0949483A (en) * 1995-08-04 1997-02-18 Ngk Spark Plug Co Ltd Plug with pressure sensor
US7383737B1 (en) * 2007-03-29 2008-06-10 Delphi Technologies, Inc Capacitive pressure sensor
CN101800093A (en) * 2010-03-18 2010-08-11 钱秋英 Externally-sleeved insulated sleeve
CN201653787U (en) * 2010-03-19 2010-11-24 上海新拓分析仪器科技有限公司 Non-contact pressure measuring device and chemical digestion equipment
CN102065634A (en) * 2011-01-05 2011-05-18 倪新军 LED high-frequency aluminum-based circuit board
CN103968975A (en) * 2014-05-07 2014-08-06 衢州学院 Corrosion resistant pressure sensor based on PDMS piezoresistor and stainless steel capacitor
CN104215382A (en) * 2014-09-05 2014-12-17 沈阳市传感技术研究所 Membrane-separation type gauge pressure sensor of external balance chamber
CN204405419U (en) * 2015-02-13 2015-06-17 北京祥鹄科技发展有限公司 Intelligence warm-pressing double-control microwave dissolver
CN204855080U (en) * 2015-06-08 2015-12-09 伊玛精密电子(苏州)有限公司 Corrosion -resistant type all -metal pressure sensor
CN106017787A (en) * 2016-07-06 2016-10-12 济南海能仪器股份有限公司 Anticorrosion pressure transducer
CN205904621U (en) * 2016-07-07 2017-01-25 上海华培动力科技有限公司 Pretightning force laser welding frock
CN205937803U (en) * 2016-08-16 2017-02-08 长沙永乐康仪器设备有限公司 Automatic pressure release container blocks water
CN107487043A (en) * 2017-07-07 2017-12-19 周丽 A kind of polyfluortetraethylealuminum aluminum base copper-clad laminate of advantages of good shielding performance
CN207231695U (en) * 2017-09-04 2018-04-13 中国石油化工股份有限公司 A kind of acidifying and the general pressure transmitter of pressure break
CN208704946U (en) * 2018-10-09 2019-04-05 长沙永乐康仪器设备有限公司 A kind of pressure sensor assembly of microwave eliminating device

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0949483A (en) * 1995-08-04 1997-02-18 Ngk Spark Plug Co Ltd Plug with pressure sensor
US7383737B1 (en) * 2007-03-29 2008-06-10 Delphi Technologies, Inc Capacitive pressure sensor
CN101800093A (en) * 2010-03-18 2010-08-11 钱秋英 Externally-sleeved insulated sleeve
CN201653787U (en) * 2010-03-19 2010-11-24 上海新拓分析仪器科技有限公司 Non-contact pressure measuring device and chemical digestion equipment
CN102065634A (en) * 2011-01-05 2011-05-18 倪新军 LED high-frequency aluminum-based circuit board
CN103968975A (en) * 2014-05-07 2014-08-06 衢州学院 Corrosion resistant pressure sensor based on PDMS piezoresistor and stainless steel capacitor
CN104215382A (en) * 2014-09-05 2014-12-17 沈阳市传感技术研究所 Membrane-separation type gauge pressure sensor of external balance chamber
CN204405419U (en) * 2015-02-13 2015-06-17 北京祥鹄科技发展有限公司 Intelligence warm-pressing double-control microwave dissolver
CN204855080U (en) * 2015-06-08 2015-12-09 伊玛精密电子(苏州)有限公司 Corrosion -resistant type all -metal pressure sensor
CN106017787A (en) * 2016-07-06 2016-10-12 济南海能仪器股份有限公司 Anticorrosion pressure transducer
CN205904621U (en) * 2016-07-07 2017-01-25 上海华培动力科技有限公司 Pretightning force laser welding frock
CN205937803U (en) * 2016-08-16 2017-02-08 长沙永乐康仪器设备有限公司 Automatic pressure release container blocks water
CN107487043A (en) * 2017-07-07 2017-12-19 周丽 A kind of polyfluortetraethylealuminum aluminum base copper-clad laminate of advantages of good shielding performance
CN207231695U (en) * 2017-09-04 2018-04-13 中国石油化工股份有限公司 A kind of acidifying and the general pressure transmitter of pressure break
CN208704946U (en) * 2018-10-09 2019-04-05 长沙永乐康仪器设备有限公司 A kind of pressure sensor assembly of microwave eliminating device

Similar Documents

Publication Publication Date Title
US5867886A (en) Method of making a thick film pressure sensor
CN101356426B (en) Low cost high-voltage sensor
US5712428A (en) Pressure sensor with a solid to minimize temperature-related measurement error
CA2325903C (en) Pressure sensor
DE102006028673B4 (en) pressure sensor
CN109696268B (en) Pressure sensor assembly
US20030067960A1 (en) Precision temperature probe having fast response
EP2883026B1 (en) Thermal diagnostic for single-crystal process fluid pressure sensor
CN208704946U (en) A kind of pressure sensor assembly of microwave eliminating device
CN111928991A (en) Integrated miniature pore pressure sensor
US6997059B2 (en) Pressure sensor
CN109855789B (en) Sensor for monitoring surface pressure of underwater small-sized vehicle
CN114354033A (en) Force sensor and manufacturing method thereof
CN212300699U (en) Integrated miniature pore pressure sensor
CN109238552A (en) A kind of pressure sensor assembly of microwave eliminating device
CN110132462B (en) Pressure sensor packaging structure and packaging method thereof
CN211877068U (en) Sensor with a sensor element
CN210089911U (en) Pressure sensor
CN111397668A (en) Sensor core, core manufacturing and packaging method and sensor
CN109932109A (en) Microminiature quick response absolute pressure transducer
CN217738527U (en) Oil injection type pressure sensor
CN111157153A (en) Intelligent high-precision force-sensitive sensor
CN109716086A (en) Pressure sensor
TWI516386B (en) General pressure sensor for automobiles
CN115855360A (en) MCS differential pressure sensor

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination