CN109238119A - Grating straight-line displacement sensor when a kind of absolute type based on alternating electric field - Google Patents
Grating straight-line displacement sensor when a kind of absolute type based on alternating electric field Download PDFInfo
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Abstract
The invention discloses grating straight-line displacement sensors when a kind of absolute type based on alternating electric field, including dynamic ruler matrix and scale matrix, dynamic ruler matrix lower surface is equipped with reflecting electrode I, induction electrode, reflecting electrode II, and reflecting electrode I, II is connected with induction electrode respectively；Scale body upper surface is equipped with receiving electrode I, excitation electrode and receiving electrode II, four excitations of excitation electrode are mutually separately connected four tunnel pumping signals, receiving electrode I exports first via accurate measurement sine travelling wave signal, receiving electrode II exports the second road accurate measurement sine travelling wave signal, using the phase difference calculating bigness scale of the first via and the second road accurate measurement sine travelling wave signal to pole locator value, accurate measurement straight-line displacement value is calculated using the first via or the second road accurate measurement sine travelling wave signal, accurate measurement straight-line displacement value combines pole locator value with bigness scale to obtain absolute straight-line displacement value.The bigness scale signal and accurate measurement signal difference of the sensor are smaller, can be easier to realize absolute fix, have a wide range of application simultaneously.
Description
Technical field
The present invention relates to precision linear displacement sensors, and in particular to grid straight line when a kind of absolute type based on alternating electric field
Displacement sensor.
Background technique
The wide range accurate displacement measuring instrument generallyd use in accurate straight line fields of measurement is mainly laser interferometer
With using grating as the grating displacement sensor of representative.Laser interferometer, as measuring basis, carries out length using optical maser wavelength
Directly reappear, is the highest wide range nano measurement instrument of current precision, but its and price extremely harsh to environmental requirement is very
Valuableness, industrial application are limited.The relatively broad accurate displacement measuring instrument of industrial application is mainly grating, it uses precision ruling
Grid line as measuring basis, it has strong anti-interference ability advantage compared with laser interferometer, but pitch is smaller is difficult to
Realize wide range.A kind of time-grating sensor using clock signal pulse as displacement measurement benchmark is developed in recent years, and herein
On the basis of grating straight-line displacement sensor (Publication No. when having developed a kind of Electric field based on single multilayered structure
It CN103822571A),, can only using incremental count measurement method although this sensor can be realized nano measurement
It identifies the displacement in a cycle, and can not identify position cannot store after which period, power-off, booting needs to reset, no
It is able to achieve absolute measurement, many places are restricted on engineer application.In order to realize the absolute measurement of straight-line displacement, and develop
A kind of absolute type straight line time grating displacement sensor (106197240 A of Publication No. CN) based on alternating electric field is gone out, has been not required to
Zero reference is wanted, data are not lost after power-off, the high-precision absolute displacement measurement being able to achieve in machine with wide range, but it is still
There are the following problems: (1) inductive signal is from double sinusoidal accurate measurement electrodes, rectangle bigness scale electrode I and the rectangle on gauge head matrix
It is exported on bigness scale electrode II, needs to draw signal output line on gauge head matrix, some occasions cannot use, and application range is narrow；(2) it adopts
Bigness scale positioning is carried out with the signal exported on rectangle bigness scale electrode I and rectangle bigness scale electrode II, using double sinusoidal accurate measurement electrodes
The signal of upper output carries out accurate measurement measurement, and bigness scale signal and the otherness of accurate measurement signal are larger.
Summary of the invention
The object of the present invention is to provide grating straight-line displacement sensors when a kind of absolute type based on alternating electric field, thick to reduce
The otherness of signal and accurate measurement signal is surveyed, while expanding application range, enhances industrial Applicability.
The grating straight-line displacement sensor when absolute type of the present invention based on alternating electric field, including dynamic ruler matrix and scale
It is parallel with scale body upper surface face to move ruler matrix lower surface for matrix, and there are gaps, move ruler matrix lower surface and are equipped with induction
Electrode, scale body upper surface are equipped with the excitation electrode with induction electrode face, the excitation electrode identical, pole by row's size
Away from equidistantly being rearranged for the rectangle pole piece of W along measurement direction, wherein 4n1+ No. 1 rectangle pole piece is linked to be one group, forms A
Motivate phase, 4n1+ No. 2 rectangle pole pieces are linked to be one group, and composition B motivates phase, 4n1+ No. 3 rectangle pole pieces are linked to be one group, and composition C swashs
Encourage phase, 4n1+ No. 4 rectangle pole pieces are linked to be one group, and composition D motivates phase, n1It successively takes 0 to M1- 1 all integers, M1It indicates to swash
Encourage electrode always to number of poles.
The scale body upper surface is equipped with the receiving electrode I of differential type and the receiving electrode II of differential type, receiving electrode I
Positioned at the side of excitation electrode, receiving electrode II is located at the other side of excitation electrode, the starting of receiving electrode I, receiving electrode II
It holds and is aligned with the starting point of excitation electrode, receiving electrode I, receiving electrode II are more than or equal to excitation along the length of measurement direction
Electrode along measurement direction length, the dynamic ruler matrix lower surface be equipped with the reflecting electrode I of I face of receiving electrode and with reception
(i.e. the side that is located at induction electrode of reflecting electrode I, reflecting electrode II are located at induction electrode to the reflecting electrode II of II face of electrode
The other side)；By row's size, identical, pole span is W and is highly slightly less than double sinusoidals of rectangle pole piece height the induction electrode
Pole piece is equidistantly rearranged along measurement direction, wherein 4n2+ No. 1 double sinusoidal pole piece is linked to be one group, forms A sense group,
4n2+ No. 2 double sinusoidal pole pieces are linked to be one group, form B sense group, 4n2+ No. 3 double sinusoidal pole pieces are linked to be one group, form C
Sense group, 4n2+ No. 4 double sinusoidal pole pieces are linked to be one group, form D sense group, n2It successively takes 0 to M2- 1 all integers, M2
Indicate induction electrode always to number of poles；The reflecting electrode I is identical by four sizes and is respectively connected with A, B, C, D sense group
Reflection group I forms, the reflecting electrode II II group of group of reflection that is identical and being connected respectively with A, B, C, D sense group by four sizes
At.
When measurement, dynamic ruler matrix is opposite with scale matrix moves in parallel, and motivates to A, B, C, D of scale matrix and mutually applies respectively
Phase is added successively to differ tetra- tunnel 90 ° with frequency constant amplitude sinusoidal excitation voltage, pumping signal is through between excitation electrode and induction electrode
A coupled electric field, four tunnels are generated on induction electrode with 90 ° of phase difference of frequency constant amplitude phase of electric signal, this four roads electric signal warp
Secondary coupled electric field between reflecting electrode I and receiving electrode I and reflecting electrode II and receiving electrode II, in receiving electrode I
First, second travelling wave signal of the upper same frequency constant amplitude for generating 180 ° of phase phase difference, generates phase phase difference on receiving electrode II
The third of 180 ° of same frequency constant amplitude, fourth line wave signal, the first travelling wave signal synthesize through subtraction circuit with the second travelling wave signal
Accurate measurement sine travelling wave signal all the way, third travelling wave signal synthesize the second road accurate measurement sine row through subtraction circuit with fourth line wave signal
Wave signal, first via accurate measurement sine travelling wave signal or the second road accurate measurement sine travelling wave signal obtain accurate measurement straight line position after processing
Shifting value, first via accurate measurement sine travelling wave signal are obtained with the second road accurate measurement sine travelling wave signal than the phase difference after phase after processing
Bigness scale combines accurate measurement straight-line displacement value with bigness scale to obtain absolute straight-line displacement value to pole locator value to pole locator value.
The shape of double sinusoidal pole pieces in the induction electrode is that two root ranges are worth equal, 180 ° of phase phase difference sine songs
The closing zhou duicheng tuxing that line surrounds in [0, π] section.
There are two types of preferred structure types for grating straight-line displacement sensor when above-mentioned absolute type:
The receiving electrode I of the first structure is spaced on perpendicular to measurement direction by the sinusoidal electrode I of two area equations
It rearranges, it is straight line along the outside of measurement direction that first sinusoidal electrode I, which is straightway perpendicular to the start-stop side of measurement direction,
Section, the sinusoidal segments that inner edge is the multicycleSecond sinusoidal electrode I is perpendicular to measurement side
To start-stop side be straightway, along measurement direction inner edge be the multicycle sinusoidal segments
Outside is straightway, and the inner edge grid alignment of the inner edge of first sinusoidal electrode I and second sine electrode I makes receiving electrode I
Whole is in the rectangle with gap, output electrode of first sinusoidal electrode I as the first travelling wave signal, second sinusoidal electrode
I output electrode as the second travelling wave signal；Wherein, N1Indicate sinusoidal segmentsA cycle
Corresponding to length excitation electrode to number of poles, A1Indicate the amplitude of the sinusoidal segments,Indicate the phase of the sinusoidal segments
Position.
The receiving electrode II of the first structure by the sinusoidal electrode II of two area equations on perpendicular to measurement direction between
Every rearranging, first sinusoidal electrode II is straightway perpendicular to the start-stop side of measurement direction, and the outside along measurement direction is
Straightway, the sinusoidal segments that inner edge is the multicycleSecond sinusoidal electrode II is perpendicular to survey
The start-stop side for measuring direction is straightway, and the inner edge along measurement direction is the sinusoidal segments of multicycleOutside is straightway, the inner edge of first sinusoidal electrode II and second sine electrode II
Inner edge grid alignment makes receiving electrode II integrally in the rectangle with gap, and first sinusoidal electrode II is believed as third traveling wave
Number output electrode, output electrode of second sinusoidal electrode II as fourth line wave signal；Wherein, N2Indicate sinusoidal segmentsCorresponding to a cycle length excitation electrode to number of poles, N2> N1, A2Indicate the sine
The amplitude of curved section,Indicate the phase of the sinusoidal segments.
Reflection group I described in four in the reflecting electrode I of the first structure is equidistantly to arrange along measurement direction and pole
Away from for N1W, highly slightly larger than receiving electrode I whole height four rectangle pole pieces I, four rectangle pole pieces I respectively with A, B,
C, D sense group is connected.
Reflection group II described in four in the reflecting electrode II of the first structure be equidistantly arranged along measurement direction and
Pole span is N2W, highly slightly larger than receiving electrode II whole height four rectangle pole pieces II, four rectangle pole pieces II respectively with
A, B, C, D sense group are connected.
The receiving electrode I of second of structure identical, pole span 2N by row's size3Double sinusoidal pole pieces I of W are along measurement side
To equidistantly rearranging, wherein 2n3+ No. 1 double sinusoidal pole piece I is linked to be one group, the output electricity as the first travelling wave signal
Pole, 2n3+ No. 2 double sinusoidal pole pieces I are linked to be one group, as the output electrode of the second travelling wave signal, n3It successively takes 0 to M3- 1
All integers, M3Indicate receiving electrode I always to number of poles, N3Swash corresponding to two pole span length for indicating double sinusoidal pole pieces I
Encourage electrode to number of poles.
The receiving electrode II of second of structure identical, pole span 2N by row's size4Double sinusoidal pole pieces II of W are along measurement
Direction equidistantly rearranges, wherein 2n4+ No. 1 double sinusoidal pole piece II is linked to be one group, as the defeated of third travelling wave signal
Electrode out, 2n4+ No. 2 double sinusoidal pole pieces II are linked to be one group, as the output electrode of fourth line wave signal, n4Successively take 0 to
M4- 1 all integers, M4Indicate receiving electrode II always to number of poles, N4Indicate two pole span length institutes of double sinusoidal pole pieces II
It is corresponding excitation electrode to number of poles, N4> N3。
Wherein, the shape of double sinusoidal pole pieces I in receiving electrode I is that two root ranges are being worth equal, 180 ° of phase phase difference just
The closing zhou duicheng tuxing that chord curve surrounds in [0, π] section；The shape of double sinusoidal pole pieces II in receiving electrode II is two
Root range is worth the closing zhou duicheng tuxing that equal, 180 ° of phase phase difference sine curves surround in [0, π] section.
Reflection group I described in four in the reflecting electrode I of second of structure is equidistantly to arrange along measurement direction and pole
Away from for N3W, highly slightly larger than four rectangle pole pieces I of double I height of sinusoidal pole piece, four rectangle pole pieces I respectively with A, B, C, D
Sense group is connected.
Reflection group II described in four in the reflecting electrode II of second of structure be equidistantly arranged along measurement direction and
Pole span is N4W, highly slightly larger than four rectangle pole pieces II of double II height of sinusoidal pole piece, four rectangle pole pieces II respectively with A,
B, C, D sense group are connected.
The present invention has the effect that
(1) the four road travelling wave signals for sensing induction electrode are as the pumping signal of secondary coupling modulation, two secondary couplings
The pumping signal of modulation is reflected back receiving electrode I, II through reflecting electrode I, II, exports travelling wave signal by receiving electrode I, II, moves
For ruler matrix without drawing signal output line, application range is wider.
(2) first via accurate measurement sine travelling wave signal or the second road accurate measurement sine travelling wave signal are handled to obtain accurate measurement
Straight-line displacement value carries out first via accurate measurement sine travelling wave signal with the second road accurate measurement sine travelling wave signal than the phase difference after phase
Processing obtains bigness scale and is all made of the first via, the second road accurate measurement sine travelling wave signal, signal to pole locator value, bigness scale positioning and accurate measurement
Otherness is small, it is easier to realize absolute fix.
(3) receiving electrode I, II uses symmetrical difference structure, improves the stability of measurement, it is suppressed that common mode interference,
Signal amplitude is enhanced, industrial Applicability is stronger.
Detailed description of the invention
Fig. 1 is the electrode schematic diagram on the electrode and scale matrix moved on ruler matrix in embodiment 1.
Fig. 2 is the location diagram of the electrode face on the electrode and scale matrix moved on ruler matrix in embodiment 1.
Fig. 3 is that ruler matrix and scale matrix face are moved in embodiment 1, the input of the electrode on scale matrix, output signal
Connection figure.
Fig. 4 is the enlarged drawing in Fig. 3 at F.
Fig. 5 is the electrode schematic diagram on the electrode and scale matrix moved on ruler matrix in embodiment 2.
Fig. 6 is the location diagram of the electrode face on the electrode and scale matrix moved on ruler matrix in embodiment 2.
Fig. 7 is that ruler matrix and scale matrix face are moved in embodiment 2, the input of the electrode on scale matrix, output signal
Connection figure.
Fig. 8 is principles of signal processing block diagram of the invention.
Specific embodiment
It elaborates with reference to the accompanying drawing to the present invention.
Embodiment 1: the grating straight-line displacement sensor when absolute type based on alternating electric field as shown in Figures 1 to 4, including it is dynamic
2 two parts of ruler matrix 1 and scale matrix, dynamic ruler matrix 1, scale matrix 2 are all made of ceramics as basis material；Dynamic ruler matrix 1
Lower surface is parallel with 2 upper surface face of scale matrix, and there are the gaps 0.5mm.
2 upper surface of scale matrix is equipped with I 2-2 of receiving electrode of differential type, motivates the receiving electrode of electrode 2-1 and differential type
II 2-3, excitation electrode 2-1 are located at centre, and I 2-2 of receiving electrode is located at the side of excitation electrode 2-1, and II 2-3 of receiving electrode is located at
Motivate the other side of electrode 2-1, the starting point and the starting point pair of excitation electrode 2-1 of I 2-2 of receiving electrode, II 2-3 of receiving electrode
Together.Specifically, four layer dielectrics are successively covered on 2 upper surface of scale matrix, first layer is metal film, is coated with four excitation letters
Number lead 2-4 and 4 bars output lines, the second layer are insulating film, and third layer is metal film (using iron-nickel alloy material), spraying
There is II 2-3 of I 2-2 of receiving electrode, excitation electrode 2-1 and receiving electrode, the 4th layer is insulating protective film.
Excitation electrode 2-1 is identical by row's size, equidistantly (spacing is along measurement direction for rectangle pole piece that pole span be W
It 0.5mm) rearranges, height a=20mm, width b=2mm, the pole span W=2.5mm of each rectangle pole piece motivate the total of electrode
To number of poles M1=20, one is formed per adjacent four rectangle pole pieces to pole, then a total of 80 rectangle pole pieces；Wherein, along survey
Measure direction 4n1+ No. 1 rectangle pole piece is linked to be one group by first pumping signal lead 2-4, and composition A motivates phase, 4n1+ No. 2
Rectangle pole piece is linked to be one group by Article 2 pumping signal lead 2-4, and composition B motivates phase, 4n1+ No. 3 rectangle pole pieces pass through the
Three pumping signal lead 2-4 are linked to be one group, and composition C motivates phase, 4n1+ No. 4 rectangle pole pieces are drawn by Article 4 pumping signal
Line 2-4 is linked to be one group, and composition D motivates phase, n1Successively take 0 to 19 all integers.
I 2-2 of receiving electrode is by the sinusoidal electrode I of two area equations perpendicular to 0.5mm arrangement in interval in measurement direction
Composition, first sinusoidal electrode I are straightway perpendicular to the start-stop side of measurement direction, and the outside along measurement direction is (i.e. in Fig. 4
E is existed) it is straightway, the sinusoidal segments that inner edge when G (i.e.) in Fig. 4 is 5 periodsSecond
A sine electrode I is straightway perpendicular to the start-stop side of measurement direction, and the inner edge (i.e. the side H in Fig. 4) along measurement direction is 5
The sinusoidal segments in periodOutside (i.e. the side K in Fig. 4) is straightway, first sinusoidal electricity
The inner edge of pole I is aligned with the inner edge interval 0.5mm of second sinusoidal electrode I, makes receiving electrode I integrally in the gap 0.5mm
Rectangle, output electrode connection first bars output line of first sinusoidal electrode I as the first travelling wave signal, second is just
String electrode I connects Article 2 signal output line as the output electrode of the second travelling wave signal；Wherein,Indicate the sinusoidal segments
y1Phase, sinusoidal segments y1Amplitude A1=9.5mm, cycle T1=4N1W=40mm, corresponding to a cycle length
Motivate electrode to number of poles N1=4, the whole height of receiving electrode I is 20.5mm.
II 2-3 of receiving electrode is by the sinusoidal electrode II of two area equations perpendicular to 0.5mm row in interval in measurement direction
Column composition, first sinusoidal electrode II are straightway perpendicular to the start-stop side of measurement direction, are straight line along the outside of measurement direction
Section, the sinusoidal segments that inner edge is 4 periodsSecond sinusoidal electrode II is perpendicular to measurement
The start-stop side in direction is straightway, and the inner edge along measurement direction is the sinusoidal segments in 4 periodsOutside is straightway, the inner edge of first sinusoidal electrode II and second sine electrode II
0.5mm alignment in inner edge interval makes receiving electrode II integrally in the rectangle with the gap 0.5mm, first II conduct of sinusoidal electrode
The output electrode of third travelling wave signal connects Article 3 signal output line, and second sinusoidal electrode II is as fourth line wave signal
Output electrode connects Article 4 signal output line；Wherein,Indicate sinusoidal segments y2Phase, sinusoidal segments y2's
Amplitude A2=9.5mm, cycle T2=4N2W=50mm, excitation electrode to number of poles N corresponding to a cycle length2=5, it connects
The whole height for receiving electrode II is 20.5mm.
Dynamic 1 lower surface of ruler matrix is equipped with I 1-2 of reflecting electrode, induction electrode 1-1 and reflecting electrode II 1-3, induction electrode 1-
1, which is located at intermediate and excitation electrode 2-1 face, I 1-2 of reflecting electrode, is located at the side induction electrode 1-1 and I 2-2 face of receiving electrode,
II 1-3 of reflecting electrode is located at the other side induction electrode 1-1 and II 2-3 face of receiving electrode.Specifically, 1 upper surface of ruler matrix is moved
On be successively covered with four layer dielectrics, first layer is metal film, is coated with four inductive signal connecting line 1-4 and eight inductive signals
Lead, the second layer are insulating film, and third layer is metal film (using iron-nickel alloy material), are coated with I 1-2 of reflecting electrode, induction
II 1-3 of electrode 1-1 and reflecting electrode, the 4th layer is insulating protective film.
Induction electrode 1-1 double sinusoidal pole pieces that identical, pole span is W by row's size are along the equidistant (spacing of measurement direction
It is rearranged for 0.5mm), the shape of double sinusoidal pole pieces is worth equal, 180 ° of phase phase difference sine curves for two root ranges and exists
The closing zhou duicheng tuxing that [0, π] section surrounds, the height of each double sinusoidal pole pieces is 18mm, width 2mm, pole span W=
2.5mm, induction electrode always to number of poles M2=5, per adjacent four, double sinusoidal pole pieces form one to pole, then and a total of 20
A double sinusoidal pole pieces；Wherein, along measurement direction 4n2+ No. 1 double sinusoidal pole piece passes through first inductive signal connecting line 1-
4 are linked to be one group, form A sense group, 4n2+ No. 2 double sinusoidal pole pieces are linked to be one by Article 2 inductive signal connecting line 1-4
Group forms B sense group, 4n2+ No. 3 double sinusoidal pole pieces are linked to be one group by Article 3 inductive signal connecting line 1-4, form C
Sense group, 4n2+ No. 4 double sinusoidal pole pieces are linked to be one group by Article 4 inductive signal connecting line 1-4, form D sense group, n2
Successively take 0 to 4 all integers.
I 1-2 of reflecting electrode identical, pole span N by four sizes1The rectangle pole piece I of W=10mm is equidistant along measurement direction
(spacing 0.5mm) is rearranged, and four rectangle pole pieces I pass through four inductive signal leads and A, B, C, D sense group phase respectively
Even, the height of each rectangle pole piece I is 22.5mm, width 9.5mm.
II 1-3 of reflecting electrode identical, pole span N by four sizes2The rectangle pole piece II of W=12.5mm is along measurement direction etc.
Spacing (spacing 0.5mm) rearranges, and four rectangle pole pieces II pass through other four inductive signal leads and A, B, C, D respectively
Sense group is connected, and the height of each rectangle pole piece II is 22.5mm, width 12mm.
When measurement, dynamic ruler matrix 1 is opposite with scale matrix 2 to be moved in parallel, to A, B, C, D excitation phase point of scale matrix 2
Not Shi Jia phase successively differ tetra- tunnel 90 ° with frequency constant amplitude sinusoidal excitation voltage Ua=+UmSin ω t, Ub=+UmCos ω t, Uc
=-UmSin ω t, Ud=-UmCos ω t (i.e. each leads into phase successively differs 90 ° four in four pumping signal lead 2-4
Road is with frequency constant amplitude sinusoidal excitation signal), pumping signal through excitation electrode 2-1 and induction electrode 1-1 between a coupled electric field,
Four tunnels are generated on induction electrode 1-1 with 90 ° of phase difference of frequency constant amplitude phase of electric signal, this four roads electric signal is through I 1-2 of reflecting electrode
With the secondary coupled electric field between II 2-3 of I 2-2 of receiving electrode and II 1-3 of reflecting electrode and receiving electrode；
The first travelling wave signal is generated in the output electrode (i.e. first sinusoidal electrode I) of the first travelling wave signal
The second travelling wave signal is generated in the output electrode (i.e. second sinusoidal electrode I) of the second travelling wave signal
Third travelling wave signal is generated in the output electrode (i.e. first sinusoidal electrode II) of third travelling wave signal
Fourth line wave signal is generated in the output electrode (i.e. second sinusoidal electrode II) of fourth line wave signal
First travelling wave signalWith the second travelling wave signalFirst via accurate measurement sine travelling wave signal is synthesized through subtraction circuit
Uo1:
Third travelling wave signalWith fourth line wave signalThe second road accurate measurement sine travelling wave signal is synthesized through subtraction circuit
Uo2:
Wherein, the amplitude U of pumping signalm=5V, frequency f=40KHz, angular frequency=2 f=8 × 10 π4π, Ke are electric field
The coefficient of coup, x are accurate measurement straight-line displacement value.
First via accurate measurement sine travelling wave signal Uo1(it is also possible to the second road accurate measurement sine travelling wave signal Uo2) with phase all the way
Fixed same frequency refers to sinusoidal signal UrShaped circuit is shaped to be sent into FPGA signal processing system after square wave and carry out than phase,
Than the phase difference after phase by interpolation high-frequency clock pulse number indicate, and it is transformed after obtain accurate measurement straight-line displacement value；First
Road accurate measurement sine travelling wave signal Uo1With the second road accurate measurement sine travelling wave signal Uo2Shaped circuit is sent into FPGA after being shaped to square wave
The same frequency reference signal than phase, fixed than the phase difference after phase with the phase for being shaped to square wave all the way is carried out in signal processing system
UrCarry out again than phase, indicated than the phase difference after phase by the high-frequency clock pulse number of interpolation, and it is transformed after obtain bigness scale pair
Pole locator value, FPGA signal processing system combine accurate measurement straight-line displacement value with bigness scale to obtain absolute straight line position to pole locator value
Shifting value (referring to Fig. 8).
Embodiment 2: the grating straight-line displacement sensor when absolute type based on alternating electric field as shown in Figures 5 to 7, big portion
Separation structure is same as Example 1, the difference is that:
I 2-2 of receiving electrode identical, pole span 2N by row's size3Double sinusoidal pole pieces I of W=20mm are along measurement direction
Equidistantly (spacing 0.5mm) is rearranged, the shapes of double sinusoidal pole pieces I be two root ranges be worth it is equal, 180 ° of phase phase difference
The closing zhou duicheng tuxing that is surrounded in [0, π] section of sine curve, the height of each double sinusoidal pole pieces I is 20.5mm, width
Degree be 19.5mm, receiving electrode I always to number of poles M3=5, per adjacent two, double sinusoidal pole pieces I form one to pole, then
A total of 10 double sinusoidal pole pieces I；Wherein, along measurement direction 2n3+ No. 1 (i.e. odd number) double sinusoidal pole piece I pass through the
One bars output line is linked to be one group, as the output electrode of the first travelling wave signal, 2n3+ No. 2 (i.e. even number) double sinusoidals
Pole piece I is linked to be one group by Article 2 signal output line, as the output electrode of the second travelling wave signal, n3Successively take 0 to 4 institute
There is an integer, excitation electrode to number of poles N corresponding to two pole span length of double sinusoidal pole pieces I3=4.
II 2-3 of receiving electrode identical, pole span 2N by row's size4Double sinusoidal pole pieces II of W=25mm are along measurement side
It is rearranged to equidistant (spacing 0.5mm), the shape of double sinusoidal pole pieces II is that two root ranges are worth equal, phase phase difference
The height of the closing zhou duicheng tuxing that 180 ° of sine curve surrounds in [0, π] section, each double sinusoidal pole pieces II is
20.5mm, width 24.5mm, receiving electrode II always to number of poles M4=4, per adjacent two, double sinusoidal pole pieces II are formed
One to pole, then a total of 8 double sinusoidal pole pieces II；Wherein, along measurement direction 2n4+ No. 1 (i.e. odd number) double sinusoidal
Pole piece II is linked to be one group by Article 3 signal output line, as the output electrode of third travelling wave signal, 2n4+ No. 2 (i.e. even
Several numbers) double sinusoidal pole pieces II by Article 4 signal output line are linked to be one group, as the output electrode of fourth line wave signal, n4
Successively take 0 to 3 all integers, excitation electrode to number of poles N corresponding to two pole span length of double sinusoidal pole pieces II4=
5。
I 1-2 of reflecting electrode identical, pole span N by four sizes3The rectangle pole piece I of W=10mm is equidistant along measurement direction
(spacing 0.5mm) is rearranged, and four rectangle pole pieces I pass through four inductive signal leads and A, B, C, D sense group phase respectively
Even, the height of each rectangle pole piece I is 22.5mm, width 9.5mm.
II 1-3 of reflecting electrode identical, pole span N by four sizes4The rectangle pole piece II of W=12.5mm is along measurement direction etc.
Spacing (spacing 0.5mm) rearranges, and four rectangle pole pieces II pass through other four inductive signal leads and A, B, C, D respectively
Sense group is connected, and the height of each rectangle pole piece II is 22.5mm, width 12mm.
When measurement, dynamic ruler matrix 1 is opposite with scale matrix 2 to be moved in parallel, to A, B, C, D excitation phase point of scale matrix 2
Not Shi Jia phase successively differ tetra- tunnel 90 ° with frequency constant amplitude sinusoidal excitation voltage Ua=+UmSin ω t, Ub=+UmCos ω t, Uc
=-UmSin ω t, Ud=-UmCos ω t (i.e. each leads into phase successively differs 90 ° four in four pumping signal lead 2-4
Road is with frequency constant amplitude pumping signal), pumping signal is being felt through a coupled electric field between excitation electrode 2-1 and induction electrode 1-1
Answer and generate four tunnels on electrode 1-1 with 90 ° of phase difference of frequency constant amplitude phase of electric signal, this four roads electric signal through I 1-2 of reflecting electrode with connect
Receive the secondary coupled electric field between I 2-2 of electrode and II 2-3 of II 1-3 of reflecting electrode and receiving electrode；
The first travelling wave signal is generated in the output electrode of the first travelling wave signal
The second travelling wave signal is generated in the output electrode of the second travelling wave signal
Third travelling wave signal is generated in the output electrode of third travelling wave signal
Fourth line wave signal is generated in the output electrode of fourth line wave signal
First travelling wave signalWith the second travelling wave signalFirst via accurate measurement sine travelling wave signal is synthesized through subtraction circuit
Uo1:
Third travelling wave signalWith fourth line wave signalThe second road accurate measurement sine travelling wave signal is synthesized through subtraction circuit
Uo2:
Wherein, the amplitude U of pumping signalm=5V, frequency f=40KHz, angular frequency=2 f=8 × 10 π4π, Ke are electric field
The coefficient of coup, x are accurate measurement straight-line displacement value.
First via accurate measurement sine travelling wave signal Uo1(it is also possible to the second road accurate measurement sine travelling wave signal Uo2) with phase all the way
Fixed same frequency refers to sinusoidal signal UrShaped circuit is shaped to be sent into FPGA signal processing system after square wave and carry out than phase,
Than the phase difference after phase by interpolation high-frequency clock pulse number indicate, and it is transformed after obtain accurate measurement straight-line displacement value；First
Road accurate measurement sine travelling wave signal Uo1With the second road accurate measurement sine travelling wave signal Uo2Shaped circuit is sent into FPGA after being shaped to square wave
The same frequency reference signal than phase, fixed than the phase difference after phase with the phase for being shaped to square wave all the way is carried out in signal processing system
UrCarry out again than phase, indicated than the phase difference after phase by the high-frequency clock pulse number of interpolation, and it is transformed after obtain bigness scale pair
Pole locator value, FPGA signal processing system combine accurate measurement straight-line displacement value with bigness scale to obtain absolute straight line position to pole locator value
Shifting value (referring to Fig. 8).
Claims (7)
1. grating straight-line displacement sensor when a kind of absolute type based on alternating electric field, including dynamic ruler matrix (1) and scale matrix
(2), it is parallel with scale body upper surface face to move ruler matrix lower surface, and there are gaps, move ruler matrix lower surface and are equipped with induction
Electrode (1-1), scale body upper surface are equipped with the excitation electrode (2-1) with induction electrode (1-1) face, the excitation electrode
(2-1) identical, pole span is that the rectangle pole piece of W is equidistantly rearranged along measurement direction by row's size, wherein 4n1+ No. 1
Rectangle pole piece is linked to be one group, and composition A motivates phase, 4n1+ No. 2 rectangle pole pieces are linked to be one group, and composition B motivates phase, 4n1+ No. 3 squares
Shape pole piece is linked to be one group, and composition C motivates phase, 4n1+ No. 4 rectangle pole pieces are linked to be one group, and composition D motivates phase, n1Successively take 0 to
M1- 1 all integers, M1Indicate excitation electrode always to number of poles；It is characterized in that:
The scale body upper surface is equipped with the receiving electrode I (2-2) of differential type and the receiving electrode II (2-3) of differential type, connects
The side that electrode I (2-2) is located at excitation electrode (2-1) is received, receiving electrode II (2-3) is located at the other side of excitation electrode, receives
Electrode I, receiving electrode II starting point with excitation electrode (2-1) starting point be aligned, receiving electrode I, receiving electrode II are along survey
The length for measuring direction is more than or equal to excitation electrode along the length of measurement direction, and the dynamic ruler matrix lower surface is equipped with and reception
The reflecting electrode I (1-2) of I face of electrode and reflecting electrode II (1-3) with II face of receiving electrode；Induction electrode (the 1-
1) by row's size, identical, pole span is W and height is equidistant along measurement direction less than double sinusoidal pole pieces of rectangle pole piece height
It rearranges, wherein 4n2+ No. 1 double sinusoidal pole piece is linked to be one group, forms A sense group, 4n2+ No. 2 double sinusoidal pole pieces
It is linked to be one group, forms B sense group, 4n2+ No. 3 double sinusoidal pole pieces are linked to be one group, form C sense group, 4n2+ No. 4 double sinusoidal
Shape pole piece is linked to be one group, forms D sense group, n2It successively takes 0 to M2- 1 all integers, M2Indicate induction electrode always to number of poles；
By four sizes, reflection group I that is identical and being connected respectively with A, B, C, D sense group forms the reflecting electrode I (1-2), described anti-
By four sizes, reflection group II that is identical and being connected respectively with A, B, C, D sense group is formed for radio pole II (1-3)；
When measurement, dynamic ruler matrix is opposite with scale matrix moves in parallel, and motivates to A, B, C, D of scale matrix and mutually applies phase respectively
Position successively differs tetra- tunnel 90 ° with frequency constant amplitude sinusoidal excitation voltage, and 180 ° of phase phase difference of same frequency constant amplitude is generated on receiving electrode I
The first, second travelling wave signal, third, the fourth line wave letter of 180 ° of phase phase difference of same frequency constant amplitude are generated on receiving electrode II
Number, the first travelling wave signal synthesizes first via accurate measurement sine travelling wave signal, third traveling wave letter through subtraction circuit with the second travelling wave signal
Number synthesize the second road accurate measurement sine travelling wave signal through subtraction circuit with fourth line wave signal, first via accurate measurement sine travelling wave signal or
The second road of person accurate measurement sine travelling wave signal obtains accurate measurement straight-line displacement value, first via accurate measurement sine travelling wave signal and after processing
Two road accurate measurement sine travelling wave signals obtain bigness scale to pole locator value, by accurate measurement straight-line displacement value than the phase difference after phase after processing
Pole locator value is combined with bigness scale to obtain absolute straight-line displacement value.
2. grating straight-line displacement sensor when the absolute type according to claim 1 based on alternating electric field, it is characterized in that:
The receiving electrode I (2-2) is alternatively arranged group by the sinusoidal electrode I of two area equations on perpendicular to measurement direction
At, first sinusoidal electrode I is straightway perpendicular to the start-stop side of measurement direction, along the outside of measurement direction be straightway, it is interior
Side is the sinusoidal segments of multicycleSecond sinusoidal electrode I rising perpendicular to measurement direction
Only side is straightway, and the inner edge along measurement direction is the sinusoidal segments of multicycleOutside is
Straightway, the inner edge grid alignment of the inner edge of first sinusoidal electrode I and second sinusoidal electrode I, first sinusoidal work of electrode I
For the output electrode of the first travelling wave signal, output electrode of second sinusoidal electrode I as the second travelling wave signal；Wherein, N1Table
Show sinusoidal segmentsCorresponding to a cycle length excitation electrode to number of poles；
The receiving electrode II (2-3) is alternatively arranged group by the sinusoidal electrode II of two area equations on perpendicular to measurement direction
At, first sinusoidal electrode II is straightway perpendicular to the start-stop side of measurement direction, along the outside of measurement direction be straightway, it is interior
Side is the sinusoidal segments of multicycleSecond sinusoidal electrode II is perpendicular to measurement direction
Start-stop side is straightway, and the inner edge along measurement direction is the sinusoidal segments of multicycleOutside
For straightway, the inner edge grid alignment of the inner edge of first sinusoidal electrode II and second sinusoidal electrode II, first sinusoidal electric
Output electrode of the pole II as third travelling wave signal, output electrode of second sinusoidal electrode II as fourth line wave signal；Its
In, N2Indicate sinusoidal segmentsExcitation electrode corresponding to a cycle length to number of poles,
N2> N1。
3. grating straight-line displacement sensor when the absolute type according to claim 1 based on alternating electric field, it is characterized in that:
The receiving electrode I (2-2) identical, pole span 2N by row's size3Double sinusoidal pole pieces I of W are equidistant along measurement direction
It rearranges, wherein 2n3+ No. 1 double sinusoidal pole piece I is linked to be one group, as the output electrode of the first travelling wave signal, 2n3+
No. 2 double sinusoidal pole pieces I are linked to be one group, as the output electrode of the second travelling wave signal, n3It successively takes 0 to M3- 1 all integers,
M3Indicate receiving electrode I always to number of poles, N3Indicate excitation electrode corresponding to two pole span length of double sinusoidal pole pieces I
To number of poles；
The receiving electrode II (2-3) identical, pole span 2N by row's size4Double sinusoidal pole pieces II of W are between measurement direction etc.
Away from rearranging, wherein 2n4+ No. 1 double sinusoidal pole piece II is linked to be one group, as the output electrode of third travelling wave signal, the
2n4+ No. 2 double sinusoidal pole pieces II are linked to be one group, as the output electrode of fourth line wave signal, n4It successively takes 0 to M4- 1 it is all
Integer, M4Indicate receiving electrode II always to number of poles, N4Indicate excitation corresponding to two pole span length of double sinusoidal pole pieces II
Electrode to number of poles, N4> N3。
4. grating straight-line displacement sensor when the absolute type according to claim 2 based on alternating electric field, it is characterized in that:
Reflection group I described in four is equidistantly to arrange along measurement direction and pole span is N1W, highly greater than I height of receiving electrode
Four rectangle pole pieces I, four rectangle pole pieces I are connected with A, B, C, D sense group respectively；
Reflection group II described in four is equidistantly to arrange along measurement direction and pole span is N2W, highly it is greater than II height of receiving electrode
Four rectangle pole pieces II, four rectangle pole pieces II are connected with A, B, C, D sense group respectively.
5. grating straight-line displacement sensor when the absolute type according to claim 3 based on alternating electric field, it is characterized in that:
Reflection group I described in four is equidistantly to arrange along measurement direction and pole span is N3W, it is high to be highly greater than double sinusoidal pole pieces I
Four rectangle pole pieces I of degree, four rectangle pole pieces I are connected with A, B, C, D sense group respectively；
Reflection group II described in four is equidistantly to arrange along measurement direction and pole span is N4W, highly it is greater than double sinusoidal pole pieces II
Four rectangle pole pieces II of height, four rectangle pole pieces II are connected with A, B, C, D sense group respectively.
6. grating straight-line displacement sensor when absolute type according to claim 3 or 5 based on alternating electric field, it is characterized in that:
The shape of double sinusoidal pole pieces I in the receiving electrode I (2-2) is that two root ranges are being worth equal, 180 ° of phase phase difference just
The closing zhou duicheng tuxing that chord curve surrounds in [0, π] section；Double sinusoidal pole pieces II in the receiving electrode II (2-3)
Shape is that two root ranges are worth the closing zhou duicheng tuxing that equal, 180 ° of phase phase difference sine curves surround in [0, π] section.
7. grating straight-line displacement sensor, feature when -5 any described absolute type based on alternating electric field according to claim 1
Be: the shape of double sinusoidal pole pieces in the induction electrode (1-1) is that two root ranges are worth equal, 180 ° of phase phase difference sine songs
The closing zhou duicheng tuxing that line surrounds in [0, π] section.
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| CN113008119A (en) * | 2019-12-19 | 2021-06-22 | 重庆理工大学 | Time-sharing multiplexing absolute time grating linear displacement sensor |
| CN114088526A (en) * | 2021-11-23 | 2022-02-25 | 北京理工大学 | Measuring device and method for glued test piece |
| CN114087969A (en) * | 2021-11-18 | 2022-02-25 | 重庆理工大学 | Splicing type absolute linear displacement sensor |
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