CN109231152A - 利用光纤Fabry-Perot干涉仪测量夹持力和夹爪位移的微夹钳 - Google Patents
利用光纤Fabry-Perot干涉仪测量夹持力和夹爪位移的微夹钳 Download PDFInfo
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- CN109231152A CN109231152A CN201811158063.4A CN201811158063A CN109231152A CN 109231152 A CN109231152 A CN 109231152A CN 201811158063 A CN201811158063 A CN 201811158063A CN 109231152 A CN109231152 A CN 109231152A
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- optical fiber
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- perot interferometer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
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CN201811158063.4A CN109231152B (zh) | 2018-09-30 | 2018-09-30 | 利用光纤Fabry-Perot干涉仪测量夹持力和夹爪位移的微夹钳 |
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CN201811158063.4A CN109231152B (zh) | 2018-09-30 | 2018-09-30 | 利用光纤Fabry-Perot干涉仪测量夹持力和夹爪位移的微夹钳 |
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CN109231152A true CN109231152A (zh) | 2019-01-18 |
CN109231152B CN109231152B (zh) | 2020-06-16 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110044468A (zh) * | 2019-05-15 | 2019-07-23 | 重庆大学 | 一种用于球形聚焦集声器声场测量的光纤Fabry-Perot水听器系统 |
CN110044467A (zh) * | 2019-05-15 | 2019-07-23 | 重庆大学 | 测量球形聚焦集声器声场的光纤Fabry-Perot水听器径向耦合系统 |
CN111299996A (zh) * | 2020-03-10 | 2020-06-19 | 重庆大学 | 一种微夹持机器人 |
FR3102946A1 (fr) * | 2019-11-13 | 2021-05-14 | Percipio Robotics | Dispositif pour microactionneur et microactionneur équipé d’un tel dispositif |
CN113843719A (zh) * | 2021-10-12 | 2021-12-28 | 哈尔滨工业大学 | 一种二级放大气缸驱动微夹钳 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060043749A1 (en) * | 2004-09-01 | 2006-03-02 | Shyh-Chour Huang | Microgripper device for a micro-mechanism |
CN105236349A (zh) * | 2015-10-20 | 2016-01-13 | 天津大学 | 压电驱动式高精度引线线夹 |
CN206241884U (zh) * | 2016-09-22 | 2017-06-13 | 澳门大学 | 一种恒力夹钳 |
CN206610799U (zh) * | 2015-09-11 | 2017-11-03 | 应用材料公司 | 基板支撑件、处理腔室和用于在真空处理腔室中从基板支撑件升降基板的升降销 |
CN107498575A (zh) * | 2017-09-11 | 2017-12-22 | 澳门大学 | 一种具有力传感器的柔性微夹钳 |
CN108471985A (zh) * | 2015-10-16 | 2018-08-31 | 埃齐奥·阿莫里佐 | 用于医用针插入的引导系统 |
-
2018
- 2018-09-30 CN CN201811158063.4A patent/CN109231152B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060043749A1 (en) * | 2004-09-01 | 2006-03-02 | Shyh-Chour Huang | Microgripper device for a micro-mechanism |
CN206610799U (zh) * | 2015-09-11 | 2017-11-03 | 应用材料公司 | 基板支撑件、处理腔室和用于在真空处理腔室中从基板支撑件升降基板的升降销 |
CN108471985A (zh) * | 2015-10-16 | 2018-08-31 | 埃齐奥·阿莫里佐 | 用于医用针插入的引导系统 |
CN105236349A (zh) * | 2015-10-20 | 2016-01-13 | 天津大学 | 压电驱动式高精度引线线夹 |
CN206241884U (zh) * | 2016-09-22 | 2017-06-13 | 澳门大学 | 一种恒力夹钳 |
CN107498575A (zh) * | 2017-09-11 | 2017-12-22 | 澳门大学 | 一种具有力传感器的柔性微夹钳 |
Non-Patent Citations (1)
Title |
---|
王代华等: "一种压电致动微夹钳及其开环位移特性", 《纳米技术与精密工程》 * |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110044468A (zh) * | 2019-05-15 | 2019-07-23 | 重庆大学 | 一种用于球形聚焦集声器声场测量的光纤Fabry-Perot水听器系统 |
CN110044467A (zh) * | 2019-05-15 | 2019-07-23 | 重庆大学 | 测量球形聚焦集声器声场的光纤Fabry-Perot水听器径向耦合系统 |
CN110044467B (zh) * | 2019-05-15 | 2021-09-28 | 重庆大学 | 测量球形聚焦集声器声场的光纤Fabry-Perot水听器径向耦合系统 |
FR3102946A1 (fr) * | 2019-11-13 | 2021-05-14 | Percipio Robotics | Dispositif pour microactionneur et microactionneur équipé d’un tel dispositif |
WO2021094415A1 (fr) * | 2019-11-13 | 2021-05-20 | Percipio Robotics | Dispositif pour microactionneur et microactionneur equipe d'un tel dispositif |
CN114761181A (zh) * | 2019-11-13 | 2022-07-15 | 佩尔西皮奥罗机器人公司 | 用于微致动器的装置,以及配备有该装置的微致动器 |
US11878413B2 (en) | 2019-11-13 | 2024-01-23 | Percipio Robotics | Device for a microactuator, and microactuator equipped with such a device |
CN111299996A (zh) * | 2020-03-10 | 2020-06-19 | 重庆大学 | 一种微夹持机器人 |
CN111299996B (zh) * | 2020-03-10 | 2021-12-21 | 重庆大学 | 一种微夹持机器人 |
CN113843719A (zh) * | 2021-10-12 | 2021-12-28 | 哈尔滨工业大学 | 一种二级放大气缸驱动微夹钳 |
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CN109231152B (zh) | 2020-06-16 |
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