CN109219225A - Diagnose the collecting method of alternating current discharge plasma parameter - Google Patents
Diagnose the collecting method of alternating current discharge plasma parameter Download PDFInfo
- Publication number
- CN109219225A CN109219225A CN201811214890.0A CN201811214890A CN109219225A CN 109219225 A CN109219225 A CN 109219225A CN 201811214890 A CN201811214890 A CN 201811214890A CN 109219225 A CN109219225 A CN 109219225A
- Authority
- CN
- China
- Prior art keywords
- alternating current
- current discharge
- discharge plasma
- data
- plasma parameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The present invention is the collecting method for diagnosing alternating current discharge plasma parameter, after the periodic signal for obtaining alternating current discharge by the input terminal of synchronous AC signal element, the periodic signal of alternating current discharge issues stable irregular alternating current discharge signal by low-pass filter circuit；Stablize the synchronization signal that irregular AC signal exports square by the Schmidt trigger in optical coupling chip；Data acquisition unit triggers after receiving the synchronization signal of square, is acquired according to the data that acquisition time starting point carries out diagnosis alternating current discharge plasma parameter；Each period acquires a parameter point, obtains the data of last diagnostic alternating current discharge plasma parameter after the acquisition of multiple periods.The more stable parameter diagnosis that there is certain time to differentiate is realized to alternating current discharge plasma, solves the problem of that plasma potential fluctuates big existing method and can not acquire diagnosis alternating current discharge plasma parameter data.
Description
Technical field
The present invention relates to alternating current discharge plasma technology fields, are a kind of data for diagnosing alternating current discharge plasma parameter
Acquisition method.
Background technique
It is most important in the diagnosis of plasma research field and application field, plasma parameter, it obtains quasi- as far as possible
The data of true plasma parameter are always the target of researchers, and most of plasma diagnosis devices are using friendship
The form of electricity is banished to improve electron number densitiy.But since the plasma potential under the conditions of alternating current discharge has cyclically-varying
The characteristics of, and amplitude of variation is larger, so that having great fluctuation when with probe diagnostics plasma parameter.This direct shadow of fluctuation
Ringing final measurement result even cannot get correct measurement result, and the prior art can not acquire diagnosis alternating current discharge plasma
The data of body parameter.
Summary of the invention
The present invention is big for plasma potential fluctuation, and existing method can not acquire diagnosis alternating current discharge plasma parameter
Data the problem of, propose it is a kind of diagnose alternating current discharge plasma parameter collecting method, such as following technical scheme:
A kind of collecting method diagnosing alternating current discharge plasma parameter, the diagnosis alternating current discharge plasma ginseng
Several collecting methods realizes the acquisition of data by the data collection system of diagnosis alternating current discharge plasma parameter, described
The data collection system of diagnosis alternating current discharge plasma parameter includes synchronous AC signal input unit, synchronization signal conversion list
Member and data acquisition unit, synchronous AC signal input unit include induction coil, and synchronization signal conversion unit includes low pass filtered
Wave circuit and optical coupling chip, data acquisition unit include probe and oscillograph, the diagnosis alternating current discharge plasma parameter
Collecting method the following steps are included:
Step 1: the periodic signal of alternating current discharge is obtained by the input terminal of synchronous AC signal input unit；
Step 2: the periodic signal of alternating current discharge, which issues stable irregular alternating current discharge by low-pass filter circuit, to be believed
Number；
Step 3: the stable irregular AC signal exports square wave by the Schmidt trigger in optical coupling chip
The synchronization signal of form；
Step 4: data acquisition unit triggers after receiving the synchronization signal of square, is carried out according to acquisition time starting point
Diagnose the data acquisition of alternating current discharge plasma parameter；
Step 5: each period acquires the data point of a diagnosis alternating current discharge plasma parameter, by multiple periods
The data of final diagnosis alternating current discharge plasma parameter are obtained after acquisition.
Preferably, the periodic signal of alternating current discharge described in step 2 passes through the line of induction in synchronous AC signal input unit
The variation of induction discharge inter-electrode voltage is enclosed to issue.
Preferably, acquisition time starting point described in step 4 determines that the floating potential of probe changes by oscillograph, when described
When floating potential variation is steady, change the stable time point acquisition diagnosis alternating current discharge plasma ginseng in the floating potential
Several data.
Preferably, the data that alternating current discharge plasma parameter is diagnosed described in step 4 are to apply different voltages on probe
The different current parameters that the probe measures afterwards.
Preferably, the scanning voltage range of the floating potential is that -150V arrives+150V.
Preferably, the potential fluctuation range of the alternating current discharge plasma is 0V to+700V.
The present invention there are also following the utility model has the advantages that
Big for plasma potential fluctuation, existing method can not collect the data of alternating current discharge plasma parameter
Problem, the present invention are exported irregular alternating current discharge signal for stable square synchronization signal by low-pass filter circuit,
There is simultaneity using synchronization signal and plasma cycle variation, the data of Diagnostic parameters are acquired, detectable friendship
Banish the data for the Diagnostic parameters that electro-plasma fluctuation range is 0V to+700V.When floating potential variation is steady, acquisition is examined
Disconnected data, the data of acquisition are more accurate.A point is acquired within each period, is obtained finally by the acquisition data in multiple periods
Stable diagnostic result, the present invention have time resolved in the period in alternating current discharge plasma.
Detailed description of the invention
Fig. 1 is the collecting method schematic diagram for diagnosing alternating current discharge plasma parameter.
Fig. 2 is filter circuit and photoelectric coupling circuit figure.
Fig. 3 is synchronization signal and probe signals figure.
Specific embodiment
Below in conjunction with specific embodiment, describe the invention in detail.
As shown in Figure 1, the present invention is a kind of collecting method for diagnosing alternating current discharge plasma parameter, including following
Step:
Step 1: the periodic signal of alternating current discharge is obtained by the input terminal of synchronous AC signal input unit；
Step 2: the periodic signal of alternating current discharge, which issues stable irregular alternating current discharge by low-pass filter circuit, to be believed
Number；
Step 3: the stable irregular AC signal exports square wave by the Schmidt trigger in optical coupling chip
The synchronization signal of form；
Step 4: data acquisition unit triggers after receiving the synchronization signal of square, is carried out according to acquisition time starting point
Diagnose the data acquisition of alternating current discharge plasma parameter；
Step 5: each period acquires the data point of a diagnosis alternating current discharge plasma parameter, by multiple periods
The data of final diagnosis alternating current discharge plasma parameter are obtained after acquisition.
It include synchronous AC signal input unit, synchronization signal conversion unit and data acquisition unit the present invention is based on one kind
Diagnostic system, synchronous AC signal input unit by synchronization signal converting unit convert alternating current discharge signal after, data are adopted
Collect unit and acquires discharge signal；
The synchronous AC signal input unit includes induction coil, the synchronization signal converting unit by filter circuit and
Optical coupling chip composition, data acquisition unit are made of probe and oscillograph.
Synchronous AC signal input unit realizes the acquisition to the cyclical signal of alternating current discharge using induction coil.It is synchronous
Signal conversion unit realizes that AC signal is converted into the synchronization signal of stable square using photoelectric coupled device.Data are adopted
Collection unit includes time point choosing and carrying out triggering measurement two parts using synchronization signal, and time point, which is chosen, to be existed using oscillograph
The signal received on probe is analyzed, and is chosen and changed gentle time point in the period as data collection point.In intermediate frequency
It finds that the plasma potential of plasma changes with added voltage cycle in alternating current discharge plasma, and changes steady
Time point.Synchronization signal and plasma cycle variation have simultaneity, and carrying out triggering measurement using synchronization signal is then benefit
The time of data acquisition after synchronization signal triggering is provided to acquisition unit with the time point of selection.One is acquired within each period
Point obtains final diagnostic result by the acquisition data in multiple periods, has the time in the period in alternating current discharge plasma
Distinguishing.
AC signal is provided by voltage change between coil-induced discharge electrode, AC signal is just defeated from input terminal in Fig. 2
Enter matching and closes low-pass filter circuit appropriate to improve synchronization signal stability.Contain Schmidt's touching using photoelectric coupling chip
Device is sent out, irregular signal can be exported to the synchronization signal for square from output end.Optical coupling chip may be implemented together
Walk signal anti-interference, guarantee synchronization signal stablize, filter here be not limited to the present embodiment used in single order it is low
Pass filter.Data collection system is then to be changed using synchronization signal as trigger source by the floating potential that oscillograph observes Single probe
Determine the start time of acquisition data, data collection system then realizes diagnosis alternating current discharge plasma according to acquisition time starting point
The data of parameter acquire.The data of the diagnosis alternating current discharge plasma parameter are described after applying different voltages on probe
The different current parameters that probe measures.On probe plus different voltages measure the electric current on corresponding probe, each period acquisition
One data point.Eventually by the data for collecting final diagnosis alternating current discharge plasma parameter in multiple periods.
Fig. 3 is the probe floating potential variation observed by oscillograph, and stable data, choose the electricity that floats in order to obtain
Gesture variation stable time point is acquired.Since the signal of voltage source is not the square-wave signal of standard, to guarantee plasma
Body variation is stablized, and is selected voltage source to change stable time point and is measured available good result.In order to guarantee the electricity that floats
Gesture is no more than scanning voltage range, and signal level should be in scanning voltage range -150V to+150V at the time point of selection.This
Invention can acquire the supplemental characteristic that diagnosis alternating current discharge plasma potential variation range is 0V to+700V.
Described above is only the preferred embodiment for diagnosing the collecting method of alternating current discharge plasma parameter, diagnosis
The protection scope of the collecting method of alternating current discharge plasma parameter is not limited merely to above-described embodiment, all to belong to thinking
Under technical solution all belong to the scope of protection of the present invention.It should be pointed out that those of ordinary skill in the art, not
Several improvements and changes being detached under the premise of the principle of the invention, such modifications and variations also should be regarded as protection scope of the present invention.
Claims (6)
1. a kind of collecting method for diagnosing alternating current discharge plasma parameter, it is characterized in that: described diagnosis alternating current discharge etc.
The collecting method of plasma parameters realizes data by the data collection system of diagnosis alternating current discharge plasma parameter
The data collection system of acquisition, the diagnosis alternating current discharge plasma parameter includes synchronous AC signal input unit, synchronization
Signal conversion unit and data acquisition unit, synchronous AC signal input unit include induction coil, synchronization signal conversion unit
Including low-pass filter circuit and optical coupling chip, data acquisition unit includes probe and oscillograph；Described diagnosis alternating current discharge etc.
The collecting methods of plasma parameters the following steps are included:
Step 1: the periodic signal of alternating current discharge is obtained by the input terminal of synchronous AC signal input unit；
Step 2: the periodic signal of alternating current discharge issues stable irregular alternating current discharge signal by low-pass filter circuit；
Step 3: the stable irregular AC signal exports square by the Schmidt trigger in optical coupling chip
Synchronization signal；
Step 4: data acquisition unit triggers after receiving the synchronization signal of square, is diagnosed according to acquisition time starting point
The data of alternating current discharge plasma parameter acquire；
Step 5: each period acquires the data point of a diagnosis alternating current discharge plasma parameter, acquires by multiple periods
The data of final diagnosis alternating current discharge plasma parameter are obtained afterwards.
2. a kind of collecting method for diagnosing alternating current discharge plasma parameter according to claim 1, it is characterized in that:
The periodic signal of alternating current discharge described in step 2 passes through the induction coil induction discharge electrode in synchronous AC signal input unit
Between voltage change issue.
3. a kind of collecting method for diagnosing alternating current discharge plasma parameter according to claim 1, it is characterized in that:
Acquisition time starting point described in step 4 determines that the floating potential of probe changes by oscillograph, when floating potential variation is steady
When, the floating potential change stable time point acquire it is described diagnosis alternating current discharge plasma parameter data.
4. a kind of collecting method for diagnosing alternating current discharge plasma parameter according to claim 1, it is characterized in that:
The data that alternating current discharge plasma parameter is diagnosed described in step 4 are that the probe measures after applying different voltages on probe
Different current parameters.
5. a kind of collecting method for diagnosing alternating current discharge plasma parameter according to claim 3, it is characterized in that:
The scanning voltage range of the floating potential is that -150V arrives+150V.
6. a kind of collecting method for diagnosing alternating current discharge plasma parameter according to claim 1, it is characterized in that:
The potential fluctuation range of the alternating current discharge plasma is 0V to+700V.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811214890.0A CN109219225A (en) | 2018-10-18 | 2018-10-18 | Diagnose the collecting method of alternating current discharge plasma parameter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811214890.0A CN109219225A (en) | 2018-10-18 | 2018-10-18 | Diagnose the collecting method of alternating current discharge plasma parameter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109219225A true CN109219225A (en) | 2019-01-15 |
Family
ID=64980690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811214890.0A Pending CN109219225A (en) | 2018-10-18 | 2018-10-18 | Diagnose the collecting method of alternating current discharge plasma parameter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109219225A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101361176A (en) * | 2005-11-04 | 2009-02-04 | 韩国标准科学研究院 | Plasma diagnostic apparatus and method |
| CN201594110U (en) * | 2009-12-30 | 2010-09-29 | 中国科学院等离子体物理研究所 | System using power frequency sinusoidal voltage for ion source plasma measurement |
| CN102156001A (en) * | 2011-03-17 | 2011-08-17 | 大连理工大学 | Method for diagnosing self-biased probe of radio-frequency discharge plasma |
| CN104853513A (en) * | 2015-05-19 | 2015-08-19 | 大连理工大学 | Device for realizing large-area uniform dielectric barrier discharge and method |
| CN104969666A (en) * | 2013-02-07 | 2015-10-07 | Mks仪器有限公司 | Synchronization of rf pulsing with rf metrology, processing, and control |
| CN105704900A (en) * | 2016-04-19 | 2016-06-22 | 陈兆权 | Positive and negative amplitude-modulation pulse driven electrostatic probe and data acquisition and analysis integrated device |
| CN105699359A (en) * | 2016-01-18 | 2016-06-22 | 大连理工大学 | Experimental device and method for obtaining annular uniform plasmas in barometric pressure air |
| CN107014804A (en) * | 2017-03-23 | 2017-08-04 | 华中科技大学 | A kind of microwave radiation technology excites the apparatus and method for suppressing LIBS self absorption effect |
| CN107064753A (en) * | 2017-03-23 | 2017-08-18 | 西南交通大学 | Bow net arc-plasma Multi-parameter Data Acquisition method and apparatus |
| CN107087338A (en) * | 2017-05-17 | 2017-08-22 | 哈尔滨工业大学 | A kind of gas discharge type plasma density automatic regulating system and device |
-
2018
- 2018-10-18 CN CN201811214890.0A patent/CN109219225A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101361176A (en) * | 2005-11-04 | 2009-02-04 | 韩国标准科学研究院 | Plasma diagnostic apparatus and method |
| CN201594110U (en) * | 2009-12-30 | 2010-09-29 | 中国科学院等离子体物理研究所 | System using power frequency sinusoidal voltage for ion source plasma measurement |
| CN102156001A (en) * | 2011-03-17 | 2011-08-17 | 大连理工大学 | Method for diagnosing self-biased probe of radio-frequency discharge plasma |
| CN104969666A (en) * | 2013-02-07 | 2015-10-07 | Mks仪器有限公司 | Synchronization of rf pulsing with rf metrology, processing, and control |
| CN104853513A (en) * | 2015-05-19 | 2015-08-19 | 大连理工大学 | Device for realizing large-area uniform dielectric barrier discharge and method |
| CN105699359A (en) * | 2016-01-18 | 2016-06-22 | 大连理工大学 | Experimental device and method for obtaining annular uniform plasmas in barometric pressure air |
| CN105704900A (en) * | 2016-04-19 | 2016-06-22 | 陈兆权 | Positive and negative amplitude-modulation pulse driven electrostatic probe and data acquisition and analysis integrated device |
| CN107014804A (en) * | 2017-03-23 | 2017-08-04 | 华中科技大学 | A kind of microwave radiation technology excites the apparatus and method for suppressing LIBS self absorption effect |
| CN107064753A (en) * | 2017-03-23 | 2017-08-18 | 西南交通大学 | Bow net arc-plasma Multi-parameter Data Acquisition method and apparatus |
| CN107087338A (en) * | 2017-05-17 | 2017-08-22 | 哈尔滨工业大学 | A kind of gas discharge type plasma density automatic regulating system and device |
Non-Patent Citations (1)
| Title |
|---|
| CHENGXUN YUAN ET AL.: "Probe Diagnostics of Plasma Parameters in a Large-Volume Glow Discharge With Coaxial Gridded Hollow Electrodes", 《IEEE TRANSACTIONS ON PLASMA SCIENCE》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102565637B (en) | Oscillation wave partial discharge detection system for cable based on asynchronous double-end measurement | |
| CN107860979B (en) | Method and system for testing capacity and internal resistance of super capacitor energy storage system | |
| CN106324538B (en) | A kind of shelf depreciation automated calibration system | |
| CN104237831A (en) | Set for calibrating tester of arrester counter | |
| CN202903926U (en) | Portable electronic transformer time characteristic tester | |
| CN103901388A (en) | Parallel detection terminal device and detection method | |
| CN204101715U (en) | A kind of counter of lightning arrester tester calibration device | |
| CN109631733A (en) | In be pressed into disk cable conductor performance intelligent detection device and system | |
| CN205786834U (en) | A kind of oil pumper electric work figure measurement apparatus | |
| CN110514912A (en) | A kind of secondary voltage kernel phase system | |
| CN106152924A (en) | The measurement apparatus of a kind of condenser type tensile-line instrument and measuring method | |
| CN111308232A (en) | System and method for measuring stray parameters of current loop of high-power converter module | |
| CN202351329U (en) | Constant current different frequency voltage limiting type anti-interference ground grid resistance test system | |
| CN109219225A (en) | Diagnose the collecting method of alternating current discharge plasma parameter | |
| CN109342827B (en) | Circuit and method for measuring capacitance value through capacitance alternating current charge and discharge | |
| CN103344894B (en) | A kind of UHV (ultra-high voltage) operation signal acquiring system | |
| CN206161783U (en) | Dry -type air -core reactor oscillating wave partial discharge test device based on interchange is stepped up | |
| CN103809092A (en) | Test equipment for partial discharge of oscillatory wave cable based on optical electric field transducer | |
| CN213275769U (en) | Novel low-voltage loop resistance tester | |
| CN111856163B (en) | Non-contact single-rod asynchronous phase checking method | |
| CN211928030U (en) | Ground resistance measuring device suitable for transformer substation's surge monitoring is used | |
| CN107121659A (en) | A kind of three-phase electric energy meter on-site detection means and detection method | |
| CN203894334U (en) | Automatic capacitance and inductance tester | |
| CN103809091A (en) | Test equipment for partial discharge of cable based on voltage phase synchronization technology of optical electric field transducer | |
| CN105334439B (en) | Cable local discharge concentrates point detecting method and its system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190115 |