CN109216536B - Orthotropic piezoelectric ceramic driver - Google Patents
Orthotropic piezoelectric ceramic driver Download PDFInfo
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- CN109216536B CN109216536B CN201810930919.9A CN201810930919A CN109216536B CN 109216536 B CN109216536 B CN 109216536B CN 201810930919 A CN201810930919 A CN 201810930919A CN 109216536 B CN109216536 B CN 109216536B
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
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Abstract
The invention relates to an orthotropic piezoelectric ceramic driver, which comprises a circular piezoelectric ceramic matrix and electrodes covered on the upper surface and the lower surface of the piezoelectric ceramic matrix, wherein the lower surface electrode and the upper surface electrode are completely symmetrically arranged relative to the middle surface of the piezoelectric ceramic in the thickness direction, each electrode on the surface comprises a first electrode and a second electrode, the first electrode and the second electrode are both sector interdigital electrodes, the first electrode and the second electrode on the same surface are arranged in a mutually crossed manner, the invention can realize large displacement output in a specific direction or generate a high-energy stress wave signal in the specific direction, is particularly suitable for the field of micro-driving, and can improve the precision and reduce the realization difficulty of precision equipment.
Description
Technical Field
The invention relates to the technical field of piezoelectric ceramic driving, in particular to an orthotropic piezoelectric ceramic driver.
Background
With the rapid development of modern industry, the requirement on a high-precision mechanical engineering micro driver is higher and higher; the piezoelectric ceramic driver has the advantages of high resolution, quick response, small volume and large driving force, and is widely applied to the field of micro-driving. However, the conventional piezoelectric ceramic driver works in a d31 mode, and because the driving displacement is small, a piezoelectric ceramic driver array is required to be used, or the output of the driver is increased by increasing the external power voltage, so that the structure is complex; meanwhile, due to the isotropic characteristic of piezoelectric ceramics in a plane, stress waves with equal strength are generated in all directions of the driver, the defect of poor directivity is overcome, energy of emitted stress waves is dispersed in the whole area, and the difficulty in realizing high-precision electromechanical equipment is increased.
Disclosure of Invention
Aiming at the defects of small driving force and poor driving directivity of the piezoelectric ceramic driver in the prior art, the invention aims to provide the orthotropic piezoelectric ceramic driver, which utilizes a larger piezoelectric constant d33, can obtain larger micro displacement and driving force, and has the characteristics of orthotropic and strong directivity.
In order to achieve the purpose, the invention adopts the technical scheme that:
the utility model provides an orthotropic piezoceramics driver, includes circular piezoceramics base member and covers the electrode on the piezoceramics base member upper and lower surface, and lower surface electrode sets up with the relative piezoceramics thickness direction's of upper surface electrode midplane symmetry, and every electrode on the surface all includes electrode one and electrode two, forms electrode pair I after upper surface electrode one and lower surface electrode one are connected, forms electrode pair II, its characterized in that after upper surface electrode two and lower surface electrode two are connected: the first electrode and the second electrode are both sector interdigital electrodes, the first electrode and the second electrode on the same surface are arranged in a crossed manner, two sector electrode areas are formed on the surface of the piezoelectric ceramic, and the angles of the electrode areas are respectively alpha1And alpha2The direction angle between two sector electrode areas is beta respectively1And beta2The drive actuating range can be adjusted by changing the electrode area angle, and the drive actuating direction can be adjusted by changing the direction angle.
The first electrode and the second electrode both comprise main electrodes and branch electrodes, the main electrodes are arranged along the radius direction of the piezoelectric ceramic matrix, the branch electrodes are a plurality of concentric arcs respectively connected with the main electrodes, and the plurality of concentric arcs are arranged on the main electrodes in a sector interdigital mode by taking the center of the piezoelectric ceramic matrix as the center of a circle and along the radial direction of the piezoelectric ceramic matrix.
The main electrodes of the first electrode and the second electrode form the boundary of a sector electrode area, and the branch electrodes of the first electrode and the second electrode are mutually staggered and alternately distributed in the radial direction of the piezoelectric ceramic matrix.
When alpha is1And alpha2When one of the two is 0, the first electrode and the second electrode form a sector electrode area on the surface of the piezoelectric ceramic, and the driver only generates driving force or displacement in one direction.
α1And alpha2Is in a relation of1＝α2、α1<α2Or alpha1>α2。
β1And beta2Is in a relation of1＝β2、β1<β2Or beta1>β2。
The electrode is etched on the piezoelectric ceramic matrix through a screen printing method.
Has the advantages that:
according to the invention, through the special arrangement of the surface electrodes of the piezoelectric ceramic matrix, the driver has the characteristic of orthotropic, and when a certain voltage signal is excited, the piezoelectric ceramic driver realizes large displacement in a specific direction and generates a high-energy stress wave signal in the specific direction. The piezoelectric ceramic driver can complete the output of large displacement or large driving force only by a single chip, does not need array or superposition use, and has novel and simple structure and small volume; the invention has strong practicability, good stability, fast response and high precision; the cost and difficulty of realizing precision equipment are reduced, and the micro-driving device can be used in the field of micro-driving of precision mechanical engineering; the invention has low cost, basically the same cost as the common piezoelectric ceramic drivers of the same type, good performance and simple manufacturing process, only needs to print or etch the designed electrode pattern on the surface of the piezoelectric ceramic, is beneficial to batch production and has wide application prospect.
Drawings
FIG. 1 is a perspective view of a piezoceramic driver of the present invention;
FIG. 2 is a schematic top view of a first embodiment of a piezoceramic driver according to the present invention;
FIG. 3 is a schematic bottom view of a first embodiment of a piezoceramic actuator in accordance with the present invention;
FIG. 4 is a schematic view of a second embodiment of a piezoceramic driver according to the present invention;
FIG. 5 is a schematic view of a third embodiment of a piezoceramic driver according to the present invention;
FIG. 6 is a schematic view of a fourth embodiment of a piezoceramic driver according to the present invention;
FIG. 7 is a schematic diagram of a conventional piezoceramic driver for structural damage detection;
FIG. 8 is a schematic diagram of a piezoceramic driver of the present invention used for damage detection at defect A;
FIG. 9 is a schematic diagram of a piezoceramic driver of the present invention for damage detection at defect B;
FIG. 10 is a schematic view of the orientation and angle of defect A and defect B relative to the drive of the present invention.
Reference numerals: 1. the piezoelectric ceramic substrate comprises a piezoelectric ceramic substrate 2, upper surface electrodes I and 3, upper surface electrodes II and 4, lower surface electrodes I and 5, lower surface electrodes II and 6, a driver 7, defects A and 8, defects B and 9, a sensor 10 and stress waves.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
The orthotropic piezoelectric ceramic driver comprises a piezoelectric ceramic matrix 1 and electrodes covered on the upper surface and the lower surface of the piezoelectric ceramic matrix, wherein the electrodes on each surface respectively comprise a first electrode (2, 4) and a second electrode (3, 5), the lower surface electrode and the upper surface electrode are completely and symmetrically arranged relative to the middle surface of the piezoelectric ceramic in the thickness direction, the first upper surface electrode (2) and the first lower surface electrode (4) are connected to form an electrode pair I, the second upper surface electrode (3) and the second lower surface electrode (5) are connected to form an electrode pair II, the first electrodes (2, 4) and the second electrodes (3, 5) are all sector interdigital electrodes, the first electrode and the second electrode on the same surface are mutually crossed and covered on the surface of the piezoelectric ceramic matrix, two fan-shaped electrode regions are formed on the surface of the piezoelectric ceramic, and as shown in fig. 2 to 5 and 6, the region angles of the two fan-shaped electrode regions are α, respectively.1And alpha2The direction angles of the electrode regions are respectively beta1And beta2The drive actuating range can be adjusted by changing the electrode area angle, and the drive actuating direction can be adjusted by changing the direction angle.
Specifically, the first electrode and the second electrode both comprise main electrodes and branch electrodes, the main electrodes are arranged along the radius direction of the piezoelectric ceramic matrix, the branch electrodes are a plurality of concentric circular arcs respectively connected with the main electrodes, the concentric circular arcs use the center of the piezoelectric ceramic matrix as the center of a circle, the concentric circular arcs are arranged in a sector-shaped interdigital mode along the radial direction of the piezoelectric ceramic matrix, the first electrode and the second electrode on the same surface are arranged on the surface of the piezoelectric ceramic in a staggered mode and form two sector-shaped electrode areas, the main electrodes of the first electrode and the second electrode form the boundary of the sector-shaped electrode areas, the sector-shaped interdigital lines of the branch electrodes of the first electrode and the second electrode are staggered with each other, and the sector-shaped interdigital lines are alternately distributed in the radial direction of the piezoelectric ceramic matrix.
As shown in fig. 2, the first upper surface electrode 2 and the second upper surface electrode 3 are both sector interdigital electrodes, and both are covered on the upper surface of the piezoelectric ceramic substrate 1 in an interleaving manner, and the first upper surface electrode 2 and the second upper surface electrode 3 are not in contact with each other and are insulated from each other, as shown in fig. 3, the first lower surface electrode 4 and the second lower surface electrode 5 are both sector interdigital electrodes, and both are covered on the lower surface of the piezoelectric ceramic substrate 1 in an interleaving manner, and the first lower surface electrode 4 and the second lower surface electrode 5 are not in contact with each other and are insulated from each other. The positions and the sizes of the first upper surface electrode 2 and the first lower surface electrode 4 on the upper surface and the lower surface of the piezoelectric ceramic 1 are the same, and the positions and the sizes of the second upper surface electrode 3 and the second lower surface electrode 5 on the upper surface and the lower surface of the piezoelectric ceramic 1 are the same. The first electrode on the upper surface is communicated with the first electrode on the lower surface to form an electrode pair I, and the second electrode 3 on the upper surface is communicated with the second electrode 5 on the lower surface to form an electrode pair II.
The electrodes are etched on the upper surface of the piezoelectric ceramic 1 by a screen printing method, the electrodes are preferably silver electrode layers, the positions of the electrodes 2 and 4 on the upper surface and the lower surface of the piezoelectric ceramic 1 are the same in size, the positions of the electrodes 3 and 5 on the upper surface and the lower surface of the piezoelectric ceramic 1 are the same in size, and the electrodes on the upper surface and the lower surface are symmetrically arranged relative to the middle plane in the thickness direction of the piezoelectric ceramic, so that beta is1＝β3，β2＝β4，α1＝α3，α2＝α4。
After the electrode is manufactured, in the polarization process, the electrode pair I and the electrode pair II are respectively connected with the positive electrode and the negative electrode of the direct-current power supply to carry out polarization treatment. After polarization, the electrode pair is respectively connected with two stages of power supplies to realize the directional output of displacement or driving force.
Electrode area angle alpha1、α2For demonstration of pressureSize of the region of actuation of the electric drive, angle of orientation beta1、β2For explaining the direction of actuation of the piezoelectric actuators, their size is set according to the required driving range and the need of the driving direction, alpha1、α2May be equal to each other, α1＝α2And may also be unequal, α1<α2Or alpha1>α2Angle of direction beta1、β2May be equal to each other, β1＝β2But may also not be equal, β1<β2Or beta1>β2When in particular use, alpha1、α2And beta1、β2The above relations can be combined at will, the actuating range of the driver can be changed by changing the electrode area angle alpha, and the actuating direction of the driver can be adjusted by changing the direction angle beta.
As shown in FIGS. 2-3, the first embodiment of the piezoceramic actuator of the present invention, actuator α1＝α2，β1＝β2The driver may be in the motor region alpha1And alpha2The corresponding direction range generates driving force or stress wave; FIG. 4 shows a second embodiment of the piezoceramic driver according to the present invention, wherein α1<α2，β1＝β2(ii) a FIG. 5 shows a third embodiment of the piezoelectric ceramic actuator of the present invention, in which α is20, the surface of the piezoelectric ceramic substrate has only one sector electrode area, and the driver generates stress wave in only one direction, or alpha may be adopted1The surface of the corresponding piezoelectric ceramic substrate is also provided with only one sector electrode area; FIG. 6 shows a fourth embodiment of the piezoceramic actuator of the present invention, wherein α1＝α2，β1<β2. Of course, α1、α2The relationship between and beta1、β2The relationship therebetween is not limited to the above example, and may be α1>α2，β1＝β2Or α1＝α2，β1>β2Or α1<α2，β1<β2Or α1<α2，β1>β2Or α1>α2，β1>β2。
Fig. 7 is a schematic diagram of a conventional piezoelectric ceramic driver for detecting structural damage, in which reference numeral 6 represents a driver, 7 represents a defect a, 8 represents a defect B, and 9 represents a sensor, the conventional piezoelectric ceramic driver generates equal driving force or equal-strength stress waves in each direction due to isotropy, the emitted energy is dispersed in the whole area, the directivity is poor, and the piezoelectric ceramic driver is used for monitoring structural damage.
The orthotropic piezoelectric ceramic driver can realize that the piezoelectric ceramic driver generates high-energy stress wave signals in a specific direction when excited by a certain voltage signal, and is particularly suitable for directional detection and other applications.
As shown in fig. 8-9, the driver of the present invention can excite a stress wave in a specific direction on the surface of the structure, the beam propagates in a narrow region in the specific direction, the damage characteristics of the structure in the region are fused into the stress wave, the sensor 9 can detect the stress wave carrying the damage characteristic information, and the damage outside the structure will not affect the stress wave, so as to effectively improve the signal-to-noise ratio, achieve the precise positioning of the damage of the structure, and improve the energy efficiency.
Specifically, as shown in fig. 10, 7 indicates defect a, 8 indicates defect B, defect a ranges from 16 °, defect B ranges from 19 °, defect a and defect B are spaced apart by 28 ° with respect to driver 6, and when defect a is detected using the driver of the present invention, the stress wave excited by the driver propagates in the direction of defect a and does not cover defect B to prevent the signal reflected back to the sensor from overlapping and affecting the accuracy, and accordingly, electrode area angle α is set116 deg., the electrode area is aligned with defect a, while beta1Should be greater than 47 °(i.e., 28 ° +19 °) so that α is2The corresponding electrode region does not detect the defect a or the defect B, and any value meeting the requirement can be taken as required, for example, in the form of the first embodiment, β can be taken1＝164°，β2＝164°，α2In another form of embodiment three, the driver has only one electrode area and emits stress waves in only one direction for detecting the defect a, where the electrode area angle is 16 ° and the direction angle is 344 °, and where the driver is schematically shown in fig. 5.
When detecting the defect B, similarly, α is set1＝19°，β2Should be greater than 44 ° ((i.e., 16 ° +28 °), so that α is2The corresponding electrode area can not detect the defect A or the defect B, and any value meeting the requirement can be taken as required, for example, the value can be beta1＝161°，β2＝161°，α219 deg. is equal to. Or the driver only has one electrode area and emits the stress wave in one direction only for detecting the defect B, and the angle alpha of the electrode area is 19 degrees and the angle beta of the direction is 341 degrees.
Of course, the above values are only examples, are not exhaustive, and do not list all values and driver forms that satisfy the requirements, and those skilled in the art can set the angles that satisfy the requirements according to various combinations of the electrode area angles and the direction angles given by the embodiments of the present invention.
Claims (7)
1. The utility model provides an orthotropic piezoceramics driver, includes circular piezoceramics base member and covers the electrode on piezoceramics base member upper and lower surface, and lower surface electrode and the relative piezoceramics thickness direction's of upper surface electrode midplane symmetry set up completely, and every electrode on the surface all includes electrode one and electrode two, forms electrode pair I after upper surface electrode one and lower surface electrode one are connected, forms electrode pair II after upper surface electrode two and lower surface electrode two are connected, its characterized in that: the first electrode and the second electrode are both sector interdigital electrodes, the first electrode and the second electrode on the same surface are arranged in a crossed manner, two sector electrode areas are formed on the surface of the piezoelectric ceramic, and the electrode area anglesAre respectively as
The direction angle between two sector electrode areas is respectively
Angle of electrode area
、
Area size and direction angle for explaining actuation of piezoelectric actuator
、
The electrode area angle is changed to adjust the actuator range of the actuator, and the direction angle is changed to adjust the actuator direction of the actuator.
2. An orthotropic piezoceramic actuator according to claim 1, wherein: the first electrode and the second electrode both comprise main electrodes and branch electrodes, the main electrodes are arranged along the radius direction of the piezoelectric ceramic matrix, the branch electrodes are a plurality of concentric arcs respectively connected with the main electrodes, and the plurality of concentric arcs are arranged on the main electrodes in a sector interdigital mode by taking the center of the piezoelectric ceramic matrix as the center of a circle and along the radial direction of the piezoelectric ceramic matrix.
3. An orthotropic piezoceramic actuator according to claim 2, wherein: the main electrodes of the first electrode and the second electrode form the boundary of a sector electrode area, and the branch electrodes of the first electrode and the second electrode are mutually staggered and alternately distributed in the radial direction of the piezoelectric ceramic matrix.
4. An orthotropic piezoceramic actuator according to claim 1, wherein: when in use
When one of the two is 0, the first electrode and the second electrode form a sector electrode area on the surface of the piezoelectric ceramic, and the driver only generates driving force or displacement in one direction.
5. An orthotropic piezoceramic actuator according to claim 1, wherein:
or
。
6. An orthotropic piezoceramic actuator according to claim 1, wherein:
、
。
7. an orthotropic piezoceramic actuator according to claim 1, wherein: the electrode is etched on the piezoelectric ceramic matrix through a screen printing method.
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| CN111262471B (en) * | 2020-02-17 | 2022-02-11 | 北京大学 | Annular piezoelectric driver and piezoelectric motor |
| CN111554756B (en) * | 2020-05-15 | 2022-04-15 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
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| US3654574A (en) * | 1970-08-18 | 1972-04-04 | Zenith Radio Corp | Acoustic-wave transmitting system having curvilinear transducers |
| JPH06188675A (en) * | 1992-12-18 | 1994-07-08 | Canon Inc | Surface acoustic wave convolver |
| JP2002345269A (en) * | 2001-05-16 | 2002-11-29 | Canon Inc | Electric-mechanical energy converting element and vibration wave actuator |
| US7038358B2 (en) * | 2002-03-15 | 2006-05-02 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Electro-active transducer using radial electric field to produce/sense out-of-plane transducer motion |
| US7520173B2 (en) * | 2006-12-06 | 2009-04-21 | Electronics And Telecommunications Research Institute | Interdigitated electrode for electronic device and electronic device using the same |
| EP2713196A1 (en) * | 2012-09-27 | 2014-04-02 | poLight AS | Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration |
| CN103943772B (en) * | 2013-01-21 | 2016-06-22 | 北京大学 | Monolithic piezoelectric transducer and preparation method thereof |
| CN103346694A (en) * | 2013-06-09 | 2013-10-09 | 上海交通大学 | Piezoelectric micro energy collector based on annular interdigital electrode and preparation method thereof |
| CN107576854B (en) * | 2017-10-12 | 2020-04-03 | 河海大学 | Concentric circle-shaped MEMS low-conductivity sensor with interdigital and application method |
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