CN109216225B - Movable inflatable sealing device and using method thereof - Google Patents
Movable inflatable sealing device and using method thereof Download PDFInfo
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- CN109216225B CN109216225B CN201710519198.8A CN201710519198A CN109216225B CN 109216225 B CN109216225 B CN 109216225B CN 201710519198 A CN201710519198 A CN 201710519198A CN 109216225 B CN109216225 B CN 109216225B
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- sealing ring
- process station
- inflatable
- pneumatic control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
- F16J15/48—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings influenced by the pressure within the member to be sealed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
Abstract
The invention relates to an inflatable sealing device, in particular to a movable inflatable sealing device and a using method thereof, wherein the sealing device is arranged on a movable process station, the movable process station is connected with a fixed process station through a double-linear guide rail, the bottom surface of an inflatable sealing ring is stuck in a sealing ring fixing groove through an adhesive tape, the upper surface of the inflatable sealing ring is lower than the sealing ring fixing groove in an exhaust state, and at the moment, the sealing ring can be pulled and pulled in the movable process station; the inflatable sealing ring has the advantages that the upper surface of the sealing ring expands to be higher than the height of the sealing ring fixing groove in the inflated state, so that the inflatable sealing ring can be tightly attached to a sealing metal plate of a fixed process station to achieve a sealing effect. The movable inflatable sealing device is adopted, so that a good sealing effect between two process stations can be ensured, and when the fixed process station breaks down, the movable process station can enter the movable process station for good maintenance.
Description
Technical Field
The invention relates to an inflatable sealing device, in particular to a movable inflatable sealing device and a using method thereof.
Background
With the rapid expansion of the semiconductor industry, semiconductor devices are rapidly developed, and the requirements for the manufacturing process of integrated circuit wafers are higher and higher. In the wafer manufacturing process, the cleanliness requirement on the process chambers is high, and therefore, each process chamber needs to have good sealing performance so as to prevent the process chamber from being polluted by the external environment. As for the former spin coating and developing equipment, the yield of the equipment is matched with or higher than that of a photoetching machine as much as possible, the number of units and the number of robots of the equipment are more and more, and the volume of the equipment is also larger and more. In order to facilitate transportation, assembly and maintenance, the whole large equipment is designed into a plurality of detachable small process stations, each process station carries out wafer transfer through a robot, and a wafer transfer port of each process station is connected with a process cavity, so that the butt joint of each process station is well sealed. For some process stations in the equipment, when important parts such as robots are broken down, the process stations are disassembled for maintenance, and more precious time is obviously delayed. Therefore, some peripheral process stations are designed to be in a drawing and moving mode at the beginning of design, and a maintenance entrance is reserved; when the internal process station breaks down, the peripheral process station is pulled out through the linear slide rail, and enters from the reserved maintenance entrance for maintenance; after the maintenance is finished, the peripheral process station is pushed back to the original position, so that a large amount of time can be saved. However, this presents the problem of requiring a removable seal to meet the need for quick service.
Disclosure of Invention
In view of the above, it is an object of the present invention to provide a removable inflatable sealing device and method of use thereof. The movable inflatable sealing device has the characteristics that maintenance is carried out without disassembling each process station, and good sealing can be ensured after the maintenance is finished.
The purpose of the invention is realized by the following technical scheme:
the sealing device comprises an inflatable sealing ring, a sealing ring fixing groove, a sealing device mounting metal plate, an inflation system and an exhaust system, wherein the whole sealing device is mounted on the surface of one side, facing a fixed process station, of a mobile process station through the sealing device mounting metal plate; the sealing device mounting metal plate is provided with the sealing ring fixing groove, the inflatable sealing ring is accommodated in the sealing ring fixing groove, an inflating nozzle is arranged on the inflatable sealing ring, the inflating nozzle is communicated with an inflating system during inflation, the upper surface of the inflatable sealing ring in an inflated state expands to be higher than the sealing ring fixing groove and is in sealing butt joint with the fixed process station, the inflating nozzle is communicated with the exhausting system during exhausting, the upper surface of the inflatable sealing ring in an exhausted state is lower than the sealing ring fixing groove, and the movable process station can perform drawing movement relative to the fixed process station;
wherein: the inflatable sealing ring is annular, and the section of the inflatable sealing ring in the height direction is concave in a non-inflated state, namely the upper surface of the section in the height direction is corrugated and the middle of the section is concave inwards; when the inflatable sealing ring is in an inflated state, the sunken folds on the upper surface of the section in the height direction expand and bulge out of the sealing ring fixing groove and are in sealing abutting joint with the fixing process station; the surfaces and the lower surfaces of the left side and the right side of the cross section of the inflatable sealing ring in the height direction are planes, and the lower surfaces are fixedly bonded with the sealing ring fixing grooves;
one end of the inflating nozzle is connected with the inflatable sealing ring through threads, and the other end of the inflating nozzle is connected with the inflating system or the exhaust system through a quick-change connector;
the sealing device mounting metal plate is characterized in that a section is circumferentially arranged on the outer edge of the sealing device mounting metal plate, the shape of the sealing ring fixing groove corresponds to that of the inflatable sealing ring, the section of the sealing ring fixing groove in the height direction is U-shaped, the bottom surface of the sealing ring fixing groove is a plane, a countersunk hole is formed in the bottom surface of the sealing ring fixing groove and is fixedly connected with the section through a countersunk nail, the sealing ring fixing groove is connected with the sealing device mounting metal plate at a corner through the countersunk nail, and a through hole for an inflating nozzle to penetrate through is formed in the sealing device mounting;
the inflation system comprises an installation panel, a pressure reducing valve A, a pressure gauge A, a pressure reducing valve B, a pressure gauge B, an electromagnetic valve A and a three-way pneumatic control valve A which are respectively installed on the installation panel, factory compressed air is divided into two paths, the first path is connected to the electromagnetic valve A through the pressure reducing valve A and the pressure gauge A, the second path is connected to the first interface of the three-way pneumatic control valve A through the pressure reducing valve B and the pressure gauge B, the second interface of the three-way pneumatic control valve A is directly connected with an inflation nozzle of the inflatable sealing ring, the electromagnetic valve A is connected with the third interface of the three-way pneumatic control valve A to control the on-off of the three-way pneumatic control valve A, the pressure reducing valve B is adjusted to enable the indication number of the pressure gauge B to be a set value, the;
the exhaust system comprises an installation panel, and a pressure reducing valve A, a pressure gauge A, a pressure reducing valve B, a pressure gauge B, an electromagnetic valve A, an electromagnetic valve B, a three-way pneumatic control valve A, a three-way pneumatic control valve B, a vacuum generator and a silencer which are respectively installed on the installation panel, wherein factory compressed air is divided into two paths, the first path is connected to the electromagnetic valve B through the pressure reducing valve A and the pressure gauge A, the second path is connected to a first interface of the three-way pneumatic control valve B through the pressure reducing valve B and the pressure gauge B, a second interface of the three-way pneumatic control valve B is connected with the first interface of the vacuum generator, a second interface of the vacuum generator is connected with the first interface of the three-way pneumatic control valve A, the second interface of the three-way pneumatic control valve A is directly connected with an inflating nozzle of the inflatable sealing ring, a third interface of the three-way pneumatic control valve A is connected with the electromagnetic valve, the third interface of the three-way pneumatic control valve B is connected with the electromagnetic valve B and is controlled to be switched on and off by the electromagnetic valve B; through the action of the electromagnetic valve A and the electromagnetic valve B, the three-way pneumatic control valve A is disconnected with the second path of compressed air and does not perform inflation action any more, meanwhile, the three-way pneumatic control valve B enables the second path of compressed air to be connected with a vacuum generator, and the second path of compressed air is directly connected with the atmosphere through the silencer to form negative pressure so as to complete the exhaust action of the inflatable sealing ring;
the fixed process station is provided with a double linear guide rail, and the movable process station moves relative to the fixed process station through the double linear guide rail to perform drawing action;
the use method of the movable inflatable sealing device comprises the following steps: when the fixed process station is in a fault and needs maintenance, maintenance personnel can enter the fixed process station, the exhaust system exhausts compressed air in the inflatable sealing ring, and the inflatable sealing ring is in an exhaust state and is sunken in the sealing ring fixing groove, so that the pulling action of the movable process station can be performed; when the maintenance is finished, the mobile process station is pushed back to the working position, and the inflation system performs inflation action on the inflatable sealing ring, so that the sealing effect is achieved;
wherein: when the equipment normally runs, the mobile process station is pushed back to the working position along the double linear guide rails and locked with the fixed process station, the mobile process station corresponds to the wafer conveying port of the fixed process station, and a gap is reserved between the mobile process station and the fixed process station; at the moment, the pressure reducing valve B is adjusted to enable the indication number of the pressure gauge B to be a set value, and the three-way pneumatic control valve A is communicated with the inflatable sealing ring to perform inflation action by controlling the action of the electromagnetic valve A; adjusting the pressure reducing valve B to change the pressure value of the inflation gas, and finishing the inflation action when the upper surface of the inflatable sealing ring is tightly attached to the sealing surface of the fixed process station;
when the interior of the equipment breaks down and needs maintenance, the electromagnetic valve A and the electromagnetic valve B are controlled to act, the three-way pneumatic control valve A is disconnected from the plant compressed air, and the air inflation action is not performed any more; meanwhile, the three-way pneumatic control valve B enables the plant compressed air to be connected with the vacuum generator, the compressed air is directly connected with the atmosphere through the silencer to form negative pressure, the inflatable sealing ring is directly communicated with the vacuum generator through the three-way pneumatic control valve A, and the plant compressed air performs air suction action on the inflatable sealing ring through the negative pressure formed by the vacuum generator to complete exhaust action;
when the exhaust is finished, the original gap between the movable process station and the fixed process station is restored, the movable process station is opened, the drawing and pulling action is carried out along the double linear guide rails, and the repeated inflation action is carried out after the maintenance is finished.
The invention has the advantages and positive effects that:
1. compared with the prior art that the single-sided adhesive silicon rubber sealing strips are adopted between the process stations for sealing, the sealing device has better sealing performance and more uniform sealing, gaps between different process stations are different in size, and the inflatable sealing device can change the sealing effect by adjusting the pressure value of the charged compressed air.
2. The invention can be used for maintaining equipment on the premise of not disassembling each process station, can perform good sealing after maintenance, and the existing sealing method by sticking the silicon rubber sealing strip can generate the phenomena of large drawing resistance of the process station, dislocation, falling off and the like of the silicon rubber sealing strip during the resetting when the process station is drawn and moved.
Drawings
FIG. 1 is a schematic perspective view of a sealing device according to the present invention;
FIG. 2 is a front view of the seal of the present invention;
FIG. 3 is a cross-sectional view taken at C-C of FIG. 2;
FIG. 4 is a schematic view of a panel structure of an inflation and exhaust system of the sealing device of the present invention;
FIG. 5 is a piping diagram of the inflation and deflation system of the sealing device of the present invention;
wherein: a is a mobile process station, B is a fixed process station, 1 is an inflatable sealing ring, 2 is a sealing ring fixing groove, 3 is a section bar, 4 is a sealing device installation metal plate, 5 is a linear guide rail, 6 is an inflating nozzle, 7 is an installation panel, 8 is a pressure reducing valve A, 9 is a pressure gauge A, 10 is a pressure reducing valve B, 11 is a pressure gauge B, 12 is a three-way pneumatic control valve B, 13 is a vacuum generator, 14 is a three-way pneumatic control valve A, 15 is a silencer, 16 is an electromagnetic valve A, and 17 is an electromagnetic valve B.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1 to 3, the movable inflatable sealing device of the present invention includes an inflatable sealing ring 1, a sealing ring fixing groove 2, a profile 3, a sealing device mounting plate 4, a double linear guide 5, an inflation system and an exhaust system, wherein the sealing device is integrally mounted on a side surface of the movable process station a facing the fixed process station B through the profile 3 and the sealing device mounting plate 4, the fixed process station B is mounted with the double linear guide 5, and the movable process station a is connected to the fixed process station B through the double linear guide 5) in a relatively movable manner to perform a pulling action.
The sealing device installation metal plate 4 is provided with a sealing ring fixing groove 2, an inflatable sealing ring 1 is accommodated in the sealing ring fixing groove 2, an inflating nozzle 6 is arranged on the inflatable sealing ring 1, the inflating nozzle 6 is communicated with an inflating system during inflation, the upper surface of the inflatable sealing ring 1 in an inflated state expands to be higher than the sealing ring fixing groove 2 and is in sealing butt joint with a fixing process station B, the inflating nozzle 6 is communicated with an exhaust system during exhaust, and the upper surface of the inflatable sealing ring 1 in an exhaust state is lower than the sealing ring fixing groove 2.
The inflatable sealing ring 1 is annular (the inflatable sealing ring of the embodiment is in an O shape), and is made of silicon rubber, so that the inflatable sealing ring can play a role in corrosion resistance. The circumference of the inflatable sealing ring 1 of the embodiment is 6000mm, the thickness is 3mm in the non-inflated state, the section in the height direction is concave in the non-inflated state, and the height and the width of the section are 17mm and 25.5 mm; that is, the upper surface of the section in the height direction is in a corrugated shape, and the middle is inwards sunken. When the inflatable sealing ring 1 is in an inflated state, the sunken folds on the upper surface of the section in the height direction expand and bulge out of the sealing ring fixing groove 2 and are closely attached and abutted with the surface to be sealed of the fixing process station B, so that the sealing surface is acted. The left and right side surfaces and the lower surface of the cross section of the inflatable sealing ring 1 in the height direction are planes and can be well attached to the sealing ring fixing groove 2. An inflating nozzle 6 is arranged at the lower right corner of the inflatable sealing ring 1, one end of the inflating nozzle 6 is connected with the inflatable sealing ring 1 through threads, and the other end of the inflating nozzle 6 is connected with an inflating system through a quick-change connector.
The sealing device installation panel beating 4 outward flange circumference is equipped with section bar 3, and this section bar 3 is the aluminium alloy. The shape of the sealing ring fixing groove 2 corresponds to that of the inflatable sealing ring 1, the section of the sealing ring fixing groove 2 in the height direction is U-shaped, the bottom surface is a plane, and the height and the width in the groove are 18mm and 25 mm; open on the bottom surface of this sealing washer fixed slot 2 has the counter sink, links firmly sealing washer fixed slot 2 and section bar 3 through the countersunk head nail, and the lower surface of inflatable sealing washer 1 passes through the 3M sticky tape with the tank bottom surface of sealing washer fixed slot 2 and is connected. The sealing ring fixing grooves 2 are connected with the sealing device installation metal plate 4 at four corners through countersunk head nails, and circular through holes for the inflating nozzles 6 to penetrate are formed in the sealing device installation metal plate 4.
As shown in fig. 4 and 5, the inflation system includes a mounting panel 7, and a pressure reducing valve A8, a pressure gauge A9, a pressure reducing valve B10, a pressure gauge B11, a solenoid valve a16 and a three-way pneumatic control valve a14 respectively mounted on the mounting panel 7, the plant compressed air is divided into two paths, the first path is connected to a solenoid valve a16 through a pressure reducing valve A8 and a pressure gauge A9, the second path is connected to a first interface of a three-way pneumatic control valve a14 through a pressure reducing valve B10 and a pressure gauge B11, the second interface of the three-way pneumatic control valve a14 is directly connected to an inflation nozzle 6 of the inflatable sealing ring 1, the solenoid valve a16 is connected to a third interface of the three-way pneumatic control valve a14 to control the on-off of the three-way pneumatic control valve a14, the pressure reducing valve B10 is adjusted to make the pressure gauge B11 be 0.1Mpa, and when the solenoid valve a16 is.
The exhaust system comprises a mounting panel 7, a pressure reducing valve A8, a pressure gauge A9, a pressure reducing valve B10, a pressure gauge B11, an electromagnetic valve A16, an electromagnetic valve B17, a three-way pneumatic control valve A14, a three-way pneumatic control valve B12, a vacuum generator 13 and a silencer 15 which are respectively mounted on the mounting panel 7, wherein the factory compressed air is divided into two paths, the first path is connected to the electromagnetic valve B17 through the pressure reducing valve A8 and the pressure gauge A9, the second path is connected to a first interface of the three-way pneumatic control valve B12 through the pressure reducing valve B10 and the pressure gauge B11, a second interface of the three-way pneumatic control valve B12 is connected with a first interface of the vacuum generator 13, a second interface of the vacuum generator 13 is connected with a first interface of the three-way pneumatic control valve A14, a second interface of the three-way pneumatic control valve A14 is directly connected with an inflating nozzle 6 of the inflatable sealing ring 1, a third interface of the three-way pneumatic control valve A14 is connected with, the third port of the three-way pneumatic control valve B12 is connected with the solenoid valve B17 and is controlled to be switched on and off by the solenoid valve B17. When the electromagnetic valve A16 and the electromagnetic valve B17 are controlled to act, the three-way air control valve A14 is disconnected from the second path of compressed air, and the second path of compressed air is not inflated any more, meanwhile, the three-way air control valve B12 enables the second path of compressed air to be connected with the vacuum generator 13, and the second path of compressed air is directly connected with the atmosphere through the silencer 15, so that negative pressure is formed, and the action of exhausting the inflatable sealing ring 1 is completed.
The double-linear guide rail 5 is arranged on the fixed process station B, and the movable process station A can perform drawing action through the double-linear guide rail 5. When the fixed process station B breaks down and needs maintenance, maintenance personnel can enter the fixed process station B from the movable process station A, the exhaust system exhausts compressed air in the inflatable sealing ring 1, the sealing surface of the inflatable sealing ring 1 is in a fold shape and is sunken in the sealing ring fixing groove 2, and the movable process station A can be pulled; when the maintenance is finished, the mobile process station A is pushed back to the working position, and the inflation system performs inflation action on the inflatable sealing ring 1, so that the sealing effect is achieved.
The working process of the movable inflatable sealing device is as follows:
when the equipment normally runs, the movable process station A is pushed back to the working position along the double linear guide rails 5 and is locked with the fixed process station B, the wafer transfer ports of the movable process station A and the fixed process station B correspond to each other, and a 10mm gap is reserved between the wafer transfer ports; at the moment, the pressure reducing valve B10 is adjusted to ensure that the index of a pressure gauge B11 is 0.1Mpa, and the three-way air control valve A14 is communicated with the inflatable sealing ring 1 by controlling the action of the electromagnetic valve A16 to perform inflation action; and (3) adjusting the pressure reducing valve B10 to change the pressure value of the inflation gas according to the actual sealing condition, and finishing the inflation action when the upper surface of the inflatable sealing ring 1 is tightly attached to the sealing surface of the fixed process station B.
When important parts in the equipment are in fault and need maintenance, the electromagnetic valve A16 and the electromagnetic valve B17 are controlled to act, and the three-way pneumatic control valve A14 is disconnected from the plant compressed air and does not perform the inflation action any more; meanwhile, the three-way pneumatic control valve B12 enables the plant compressed air to be connected with the vacuum generator 13, the compressed air is directly connected with the atmosphere through the silencer 15 to form negative pressure, the inflatable sealing ring 1 is directly communicated with the vacuum generator 13 through the three-way pneumatic control valve A14, and the plant compressed air plays a role in air suction on the inflatable sealing ring 1 through the negative pressure formed by the vacuum generator 13 to further complete exhaust action.
When the exhaust is finished, the original 10mm gap is restored between the movable process station A and the fixed process station B, the movable process station A is opened, the drawing and pulling action is carried out along the double-linear guide rail 5, and the repeated inflation action is carried out after the maintenance is finished.
Claims (8)
1. A movable inflatable sealing device is characterized in that: the device comprises an inflatable sealing ring (1), a sealing ring fixing groove (2), a sealing device installation metal plate (4), an inflation system and an exhaust system, wherein the whole sealing device is installed on the surface of one side, facing a fixed process station (B), of a mobile process station (A) through the sealing device installation metal plate (4), and the mobile process station (A) is connected with the fixed process station (B) in a relatively movable mode; the sealing device mounting metal plate (4) is provided with the sealing ring fixing groove (2), the inflatable sealing ring (1) is accommodated in the sealing ring fixing groove (2), an inflating nozzle (6) is arranged on the inflatable sealing ring (1), the inflating nozzle (6) is communicated with an inflating system during inflation, the upper surface of the inflatable sealing ring (1) in an inflated state is expanded to be higher than the sealing ring fixing groove (2) and is in sealing butt joint with the fixed process station (B), the inflating nozzle (6) is communicated with the exhausting system during exhausting, the upper surface of the inflatable sealing ring (1) in an exhausted state is lower than the sealing ring fixing groove (2), and the movable process station (A) can perform drawing movement relative to the fixed process station (B);
the inflation system comprises an installation panel (7) and a pressure reducing valve A (8), a pressure gauge A (9), a pressure reducing valve B (10), a pressure gauge B (11), an electromagnetic valve A (16) and a three-way pneumatic control valve A (14) which are respectively installed on the installation panel (7), the plant compressed air is divided into two paths, the first path is connected to the electromagnetic valve A (16) through the pressure reducing valve A (8) and the pressure gauge A (9), the second path is connected to the first interface of the three-way pneumatic control valve A (14) through the pressure reducing valve B (10) and the pressure gauge B (11), the second interface of the three-way pneumatic control valve A (14) is directly connected with an inflation nozzle (6) of the inflatable sealing ring (1), the electromagnetic valve A (16) is connected with the third interface of the three-way pneumatic control valve A (14) to further control the on-off of the three-way pneumatic control valve A (14, the indication value of a pressure gauge B (11) is set, and a three-way pneumatic control valve A (14) is communicated with a second path of compressed air through the electromagnetic valve A (16) to complete the inflation action;
the exhaust system comprises an installation panel (7), and a pressure reducing valve A (8), a pressure gauge A (9), a pressure reducing valve B (10), a pressure gauge B (11), an electromagnetic valve A (16), an electromagnetic valve B (17), a three-way pneumatic control valve A (14), a three-way pneumatic control valve B (12), a vacuum generator (13) and a silencer (15) which are respectively installed on the installation panel (7), wherein factory compressed air is divided into two paths, the first path is connected to the electromagnetic valve B (17) through the pressure reducing valve A (8) and the pressure gauge A (9), the second path is connected to a first interface of the three-way pneumatic control valve B (12) through the pressure reducing valve B (10) and the pressure gauge B (11), the second interface of the three-way pneumatic control valve B (12) is connected with a first interface of the vacuum generator (13), and a second interface of the vacuum generator (13) is connected with a first interface of the three-way pneumatic control valve A (, the second interface of the three-way pneumatic control valve A (14) is directly connected with the inflating nozzle (6) of the inflatable sealing ring (1), the third interface of the three-way pneumatic control valve A (14) is connected with the electromagnetic valve A (16), the third interface of the vacuum generator (13) is directly communicated with the atmosphere through a silencer (15), and the third interface of the three-way pneumatic control valve B (12) is connected with the electromagnetic valve B (17) and is controlled to be switched on and off by the electromagnetic valve B (17); through the action of the electromagnetic valve A (16) and the electromagnetic valve B (17), the three-way pneumatic control valve A (14) is disconnected with the second path of compressed air, and the second path of compressed air is not inflated any more, meanwhile, the three-way pneumatic control valve B (12) enables the second path of compressed air to be connected with a vacuum generator (13), and the second path of compressed air is directly connected with the atmosphere through the silencer (15) to form negative pressure, so that the exhaust action of the inflatable sealing ring (1) is completed.
2. The movable inflatable sealing device of claim 1, wherein: the inflatable sealing ring (1) is annular, the section of the inflatable sealing ring in the height direction is concave in a non-inflatable state, namely the upper surface of the section in the height direction is wrinkled, and the middle of the section is inwards concave; when the inflatable sealing ring (1) is in an inflated state, the sunken folds on the upper surface of the section in the height direction expand and bulge out of the sealing ring fixing groove (2) and are in sealing butt joint with the fixing process station (B).
3. The movable inflatable sealing device of claim 2, wherein: the left and right side surfaces and the lower surface of the cross section of the inflatable sealing ring (1) in the height direction are planes, and the lower surface is fixedly bonded with the sealing ring fixing groove (2).
4. The movable inflatable sealing device of claim 1, wherein: one end of the inflating nozzle (6) is connected with the inflatable sealing ring (1) through threads, and the other end of the inflating nozzle is connected with the inflating system or the exhaust system through a quick-change connector.
5. The movable inflatable sealing device of claim 1, wherein: sealing device installation panel beating (4) outward flange circumference is equipped with section bar (3), the shape and inflatable seal circle (1) of sealing washer fixed slot (2) are corresponding, and sealing washer fixed slot (2) direction of height's cross-section is "U" shape, bottom surface for the plane, and it has the counter sink to open on the bottom surface of this sealing washer fixed slot (2), through the counter sink nail with section bar (3) link firmly, sealing washer fixed slot (2) in the corner with sealing device installation panel beating (4) are connected through the counter sink nail, open the through-hole that has supply charging connector (6) to pass on sealing device installation panel beating (4).
6. The movable inflatable sealing device of claim 1, wherein: the fixed process station (B) is provided with a double linear guide rail (5), and the movable process station (A) moves relative to the fixed process station (B) through the double linear guide rail (5) and performs drawing action.
7. A method of using the movable inflatable seal of any of claims 1 to 6, wherein: when the fixed process station (B) breaks down and needs maintenance, maintenance personnel can enter the fixed process station (B) from the movable process station (A), the exhaust system exhausts compressed air in the inflatable sealing ring (1), the inflatable sealing ring (1) is in an exhaust state and is sunken in the sealing ring fixing groove (2), and the movable process station (A) can be pulled; when the maintenance is finished, the movable process station (A) is pushed back to the working position, and the inflation system performs inflation action on the inflatable sealing ring (1), so that the sealing effect is achieved.
8. Use according to claim 7, characterized in that:
when the equipment normally runs, the mobile process station (A) is pushed back to a working position along the double linear guide rails (5) and locked with the fixed process station (B), the mobile process station (A) corresponds to the wafer transfer ports of the fixed process station (B), and a gap is reserved between the mobile process station (A) and the fixed process station (B); at the moment, the pressure reducing valve B (10) is adjusted to enable the indication number of the pressure gauge B (11) to be a set value, and the three-way pneumatic control valve A (14) is communicated with the inflatable sealing ring (1) by controlling the action of the electromagnetic valve A (16) to perform inflation action; adjusting the pressure reducing valve B (10) to change the pressure value of the inflation gas, and finishing the inflation action when the upper surface of the inflatable sealing ring (1) is tightly attached to the sealing surface of the fixed process station (B);
when the interior of the equipment breaks down and needs maintenance, the electromagnetic valve A (16) and the electromagnetic valve B (17) are controlled to act, and the three-way pneumatic control valve A (14) is disconnected from the plant compressed air and does not perform an inflation action any more; meanwhile, the three-way pneumatic control valve B (12) enables the plant compressed air to be connected with the vacuum generator (13), the compressed air is directly connected with the atmosphere through the silencer (15) to form negative pressure, the inflatable sealing ring (1) is directly communicated with the vacuum generator (13) through the three-way pneumatic control valve A (14), and the plant compressed air plays a role in air suction on the inflatable sealing ring (1) through the negative pressure formed by the vacuum generator (13) to further complete exhaust action;
when the exhaust is finished, the original gap is restored between the movable process station (A) and the fixed process station (B), the movable process station (A) is opened, the drawing and pulling action is carried out along the double linear guide rails (5), and the repeated inflation action is carried out after the maintenance is finished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710519198.8A CN109216225B (en) | 2017-06-30 | 2017-06-30 | Movable inflatable sealing device and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN113130365A (en) * | 2019-12-30 | 2021-07-16 | 上海微电子装备（集团）股份有限公司 | Suction cup |
| CN112483653B (en) * | 2020-10-29 | 2022-09-16 | 一重集团(黑龙江)专项装备科技有限公司 | Inflatable rubber sealing device |
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| TW477882B (en) * | 2000-07-03 | 2002-03-01 | Tokyo Electron Ltd | Processing apparatus with sealing mechanism |
| CN102425366A (en) * | 2011-10-27 | 2012-04-25 | 北京七星华创电子股份有限公司 | Sealing device and system |
| CN202772113U (en) * | 2012-08-30 | 2013-03-06 | 中芯国际集成电路制造(北京)有限公司 | Movable door used in semiconductor process chamber |
| CN203757001U (en) * | 2013-12-28 | 2014-08-06 | 楚天科技股份有限公司 | Air-charging sealing ring assembly |
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| Title |
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| A Vacuum-Compatible Air Bearing:Design Analysis and Optimization;Gyungho Khim;Chun-Hong Park;Husang Lee;Seung-Woo Kim;;《亚洲精密工程、微纳技术国际会议》;20051101;全文 * |
| Wafer-to-Wafer Bonding Techniques: From MEMS Packaging to IC Integration Applications;Rainer Pelzer;Herwig Kirchberger;Paul Kettner EV Group;;《第六届电子封装技术国际学术会议》;20050801;全文 * |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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