CN109211792A - Photo-thermal absorbs test macro and photo-thermal absorbs test method - Google Patents
Photo-thermal absorbs test macro and photo-thermal absorbs test method Download PDFInfo
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Abstract
Photo-thermal provided by the invention absorbs test macro and photo-thermal absorbs test method, is related to laser measuring technique field.Wherein, it includes: pump laser that photo-thermal, which absorbs test system, for exporting the test surfaces of pumping laser to sample to be tested；Detecting laser for exporting the first exploring laser light before pumping laser acts on test surfaces to the test surfaces, and exports the second exploring laser light to the test surfaces after pumping laser acts on test surfaces；Position sensor is set to exploring laser light on the reflected light path after test surfaces, to detect the amount of deflection between the first exploring laser light and the second exploring laser light by test surfaces reflection；Delay time generator, the delay time generator are connect with pump laser and detecting laser respectively, act on the test surfaces after pumping laser acts on test surfaces preset duration to control the second exploring laser light.By above-mentioned setting, the problem of test result of photo-thermal absorption characteristic in the prior art is unable to characterize photothermal singnal process can be filled up.
Description
Technical field
The present invention relates to laser measuring technique fields, absorb test macro in particular to a kind of photo-thermal and photo-thermal is inhaled
Acceptance Tests method.
Background technique
For a long time, the Laser Induced Damage problem of optical material is the important of high power laser light optical material production field
Problem, theoretical research relevant to damage physical mechanism can provide direction guidance for Material growth process modification.Wherein, optics material
The Laser Induced Damage of material is usually related to material own optical defect, these defects include impurity defect, electronic defects, structure
The multiple types such as defect.However, the physical mechanism of defect induced damage is sufficiently complex, it is generally recognized that all kinds of defects are to laser energy
Heat absorption constitute damage early stage energy source, detection material surface photo-thermal absorbs size to understanding defect induced damage behavior
Mechanism be of great significance.
The method absorbed at present for material mainly includes two kinds: Optical thermo lens method and photothermal deflection method.The former is to utilize
The thermal lensing effect that material surface generates under continuous wave laser action causes the intensity distribution for detecting light to change, by strong
Uptake is derived in degree variation；And the latter characterizes uptake using the deflection angle of detection light beam indirectly.Two ways is total to
It is all static attribute with feature, that is to say, that the absorption under continuous laser effect can only be obtained as a result, being a kind of absorption terminal shape
The characterization method of state.And in damage mechanisms research, it is important that deformation process of the material under laser action is obtained,
It among these include rate of deformation, deformation range etc..Therefore it provides one kind can be to the technology that photothermal singnal process measures
Technical problem urgently to be resolved.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of photo-thermal to absorb test macro and photo-thermal absorption test method,
To fill up the problem of test result of photo-thermal absorption characteristic in the prior art is unable to characterize photothermal singnal process.
To achieve the above object, the embodiment of the present invention adopts the following technical scheme that
A kind of photo-thermal absorption test macro, comprising:
Pump laser, the pump laser are used to export the test surfaces of pumping laser to sample to be tested；
Detecting laser, the detecting laser are used for the output first before the pumping laser acts on the test surfaces and visit
Laser is surveyed to the test surfaces, and exports the second exploring laser light to the test after the pumping laser acts on the test surfaces
Face；
Position sensor, the position sensor are set to exploring laser light on the reflected light path after the test surfaces, with
Amount of deflection between the first exploring laser light and the second exploring laser light of the detection by test surfaces reflection；
Delay time generator, the delay time generator are connect with the pump laser and the detecting laser respectively, with control
It makes second exploring laser light and acts on the test surfaces after the pumping laser acts on the test surfaces preset duration, with
Test surfaces any one first exploring laser light of moment and second detection after the effect of pumping laser to the sample to be tested
Amount of deflection between laser is tested, to obtain corresponding transient state photo-thermal absorption characteristic.
In the embodiment of the present invention preferably selects, absorbed in test macro in above-mentioned photo-thermal, further includes:
Host computer, the host computer are connect with the position sensor, are detected with to obtain the position sensor and are deflected
It measures, and the photo-thermal absorption characteristic of the test surfaces is calculated based on the amount of deflection.
In the embodiment of the present invention preferably selects, absorbed in test macro in above-mentioned photo-thermal, further includes:
First reflector, which is set between the detecting laser and the test surfaces, so that described
The exploring laser light of detecting laser output is by the first reflector back reflection to the test surfaces.
In the embodiment of the present invention preferably selects, absorbed in test macro in above-mentioned photo-thermal, further includes:
First lens, which is set between first reflector and the test surfaces, so that described in
The exploring laser light of first reflector reflection exports after the aggregation of first lens processing to the test surfaces.
In the embodiment of the present invention preferably selects, absorbed in test macro in above-mentioned photo-thermal, further includes:
Second reflector, which is set between the pump laser and the test surfaces, so that described
The pumping laser of pump laser output is by the second reflector back reflection to the test surfaces.
In the embodiment of the present invention preferably selects, absorbed in test macro in above-mentioned photo-thermal, further includes:
Second lens, which is set between second reflector and the test surfaces, so that described in
The pumping laser of second reflector reflection exports after the aggregation of second lens processing to the test surfaces.
On the basis of the above, the embodiment of the invention also provides a kind of photo-thermal to absorb test method, is applied to above-mentioned photo-thermal
Absorb test macro, which comprises
Detecting laser exports the test surfaces of the first exploring laser light to sample to be tested, so that first exploring laser light passes through
The test surfaces reflex to position sensor；
After stopping exporting first exploring laser light, pump laser export pumping laser to the test surfaces so that
Deformation occurs for the test surfaces；
After exporting first preset duration of pumping laser, the detecting laser exports the second exploring laser light to generation
The test surfaces of deformation are so that second exploring laser light reflexes to the position sensor by the test surfaces；
The position sensor detects the first exploring laser light of acquisition and the second exploring laser light, with obtain this first
Amount of deflection between exploring laser light and the second exploring laser light；
Host computer obtains the amount of deflection, and the light of the test surfaces of the sample to be tested is calculated according to the amount of deflection
Heat absorption characteristic.
In the embodiment of the present invention preferably selects, absorbs in test method in above-mentioned photo-thermal, pumped executing in output
After one preset duration of laser alignment, the detecting laser export the second exploring laser light to the test surfaces that deformation occurs so that this
After the step of two exploring laser lights reflex to the position sensor by the test surfaces, the method also includes:
A, the pump laser stopping output pumping laser to the test surfaces, and the detecting laser stops output
Second exploring laser light is to test surfaces；
B, after the test surfaces that deformation occurs restore deformation, the pump laser exports pumping laser to the survey again
Examination face so that the test surfaces deformation occurs again；
C, after exporting second preset duration of pumping laser, the detecting laser exports the second exploring laser light again
To the test surfaces that deformation occurs so that second exploring laser light reflexes to the position sensor by the test surfaces, wherein institute
The second preset duration is stated not equal to first preset duration；
Step a, step b and step c more times are repeated, corresponding second preset duration of step c is performed a plurality of times not
Together, it is tested with the deformation at multiple and different moment to test surfaces under the action of pumping laser, to obtain multiple deformation
Instantaneous value.
In the embodiment of the present invention preferably selects, absorbed in test method in above-mentioned photo-thermal, the detecting laser is defeated
Out the first exploring laser light to sample to be tested test surfaces the step of include:
Detecting laser exports the first exploring laser light to the first reflector, so that first exploring laser light passes through described first
Reflector reflexes to the first lens；
First exploring laser light is carried out aggregation processing and exported to the test surfaces of sample to be tested by first lens.
In the embodiment of the present invention preferably selects, absorbed in test method in above-mentioned photo-thermal, the pump laser is defeated
Pumping laser to the step of test surfaces, includes: out
Pump laser exports pumping laser to the second reflector, so that the pumping laser is anti-by second reflector
It is incident upon the second lens；
The pumping laser is carried out aggregation processing and exported to the test surfaces by second lens.
Photo-thermal provided by the invention absorbs test macro and photo-thermal absorbs test method, is swashed by pump laser, detection
Light device, position sensor and delay time generator are equipped with, and can control the delay between pumping laser and exploring laser light,
It is surveyed with treating the test surfaces of the test sample transient state photo-thermal absorption characteristic at any one moment after the effect of pumping laser
Examination, thus according to multiple measurement results to obtain deformation Evolution of the test surfaces after carrying out photo-thermal absorption.That is,
It may be implemented generating to each between deformation stopping test surfaces after the effect of pumping laser from deformation based on this programme
The transient changing at moment measures, and changes over time rule to disclose test surfaces photo-thermal and absorb deformation, and then improve existing
The photo-thermal absorption characteristic caused in technology because that can only measure final state deformation quantity of the test surfaces after deformation stopping being difficult to
The problem of effect ground characterizes the characteristic of test surfaces.
To enable the above objects, features and advantages of the present invention to be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate
Appended attached drawing, is described in detail below.
Detailed description of the invention
Fig. 1 is the application block diagram that photo-thermal provided in an embodiment of the present invention absorbs test macro.
Fig. 2 is the another application block diagram that photo-thermal provided in an embodiment of the present invention absorbs test macro.
Fig. 3 is the flow diagram that photo-thermal provided in an embodiment of the present invention absorbs test method.
Fig. 4 is another flow diagram that photo-thermal provided in an embodiment of the present invention absorbs test method.
Icon: 110- detecting laser；120- pump laser；130- position sensor；140- host computer；150- first
Reflector；The first lens of 160-；The second reflector of 170-；The second lens of 180-；190- delay time generator；200- sample to be tested
Product.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment only
It is a part of the embodiments of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings
The component of embodiment can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.In description of the invention
In, term " first ", " second " etc. are only used for distinguishing description, and should not be understood as only or imply relative importance.
In the description of the present invention unless specifically defined or limited otherwise, term " setting ", " connected ", " connection " are answered
It is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The connection in portion.For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body meaning.
As shown in Figure 1, the embodiment of the invention provides a kind of photo-thermal to absorb test macro, for treating test sample 200
Test surfaces carry out photo-thermal absorption characteristic tested.Wherein, it may include detecting laser that the photo-thermal, which absorbs test macro,
110, pump laser 120, position sensor 130 and host computer 140.
Further, in the present embodiment, the pump laser 120 is for exporting pumping laser to sample to be tested
200 test surfaces.The detecting laser 110 is used for the first detection of output before the pumping laser acts on the test surfaces
Laser exports the second exploring laser light to the test surfaces after the pumping laser acts on the test surfaces to the test surfaces.
The position sensor 130 is set to exploring laser light on the reflected light path after the test surfaces, passes through the survey with detection
Amount of deflection between the first exploring laser light and the second exploring laser light of the reflection of examination face.The host computer 140 and the position sensing
Device 130 connects, and obtains amount of deflection to obtain the detection of position sensor 130, and the survey is calculated based on the amount of deflection
The photo-thermal absorption characteristic in examination face.
Optionally, the relative positional relationship between the detecting laser 110 and the sample to be tested 200 is unrestricted
System, if guarantee the first exploring laser light that the detecting laser 110 exports and the second exploring laser light can effectively export to
The test surfaces of the sample to be tested 200.
Also, it is unrestricted that the exploring laser light exports the mode to the test surfaces, can be according to practical application request
It is configured, for example, being also possible to by being transmitted to after other optical devices either be directly transferred to the test surfaces
The test surfaces.In the present embodiment, in conjunction with Fig. 2, it is contemplated that in some circumstances, the output end of the detecting laser 110
It is not correspondingly arranged with the face to be tested generally, therefore, it can also include the first reflector that the photo-thermal, which absorbs test macro,
150。
Wherein, first reflector 150 is set between the detecting laser 110 and the test surfaces, so that institute
The exploring laser light of the output of detecting laser 110 is stated by 150 back reflection of the first reflector to the test surfaces.Namely
Say, along the transmission direction of first exploring laser light and second exploring laser light successively pass through the detecting laser 110,
First reflector 150, face to be tested and position sensor 130.
It further, is the performance for improving first exploring laser light and second exploring laser light, in the present embodiment,
It can also include the first lens 160 that the photo-thermal, which absorbs test macro,.
Wherein, first lens 160 are set between first reflector 150 and the test surfaces, so that by
The exploring laser light that first reflector 150 reflects exports after the aggregation of first lens 160 processing to the test
Face.That is, successively passing through the detection along the transmission direction of first exploring laser light and second exploring laser light
Laser 110, the first reflector 150, the first lens 160, face to be tested and position sensor 130.
Optionally, the relative positional relationship between the pump laser 120 and the sample to be tested 200 is unrestricted
System, as long as the pumping laser for guaranteeing that the pump laser 120 exports can be exported effectively to the sample 200 to be tested
Test surfaces.
Also, it is unrestricted that the pumping laser exports the mode to the test surfaces, can be according to practical application request
It is configured, for example, either the pumping laser is exported along perpendicular to the directions of the test surfaces to the test surfaces,
It can be the pumping laser to export along the direction for being not orthogonal to the test surfaces to the test surfaces.In the present embodiment, it is
Guarantee the pumping laser to the function and effect of the test surfaces, the pumping laser can be along the side perpendicular to the test surfaces
To output to the test surfaces.
Wherein, it is contemplated that under partial picture, the output end of the pump laser 120 generally with the non-face of the test surfaces
Setting, that is to say, that the exit direction for the pumping laser that the pump laser 120 exports generally is not orthogonal to the test
Face.Therefore, to guarantee the pumping laser to the function and effect of the test surfaces, the photo-thermal, which absorbs test macro, to be wrapped
Include the second reflector 170.
In detail, second reflector 170 is set between the pump laser 120 and the test surfaces, so that
The pumping laser that the pump laser 120 exports is by 170 back reflection of the second reflector to the test surfaces.Namely
Say, along the transmission direction of the pumping laser can successively pass through the pump laser 120, the second reflector 170 and
Test surfaces.
Also, the pumping laser is unrestricted by the incident angle and shooting angle of second reflector 170, only
It wants to guarantee to be transmitted to the test surfaces along the vertical direction of the test surfaces.In the present embodiment, the pumping swashs
Incident angle and shooting angle of the light on second reflector 170 can be 45 degree.
It further, is the performance for improving the pumping laser, in the present embodiment, the photo-thermal absorbs test macro also
It may include the second lens 180.
Wherein, second lens 180 are set between second reflector 170 and the test surfaces, so that by
The pumping laser that second reflector 170 reflects exports after the aggregation of second lens 180 processing to the test
Face.That is, the transmission direction along the pumping laser can successively be reflected by the pump laser 120, second
Device 170, the second lens 180 and test surfaces.
Further, for convenient for controlling the delay between the pumping laser and the second exploring laser light, to carry out
The multiple test of different delayed time, to be drilled according to multiple measurement results with obtaining deformation of the test surfaces after carrying out photo-thermal absorption
Law, in the present embodiment, it can also include delay time generator 190 that the photo-thermal, which absorbs test macro,.
Wherein, the delay time generator 190 can respectively with the host computer 140, the pump laser 120 and institute
The connection of detecting laser 110 is stated, to control second exploring laser light in the pump based on the control instruction of the host computer 140
Pu laser action acts on the test surfaces after the test surfaces preset duration.
By the setting of delay time generator 190, can test surfaces to the sample 200 to be tested pumping laser work
It is tested with the transient state photo-thermal absorption characteristic at any one lower moment, to be existed according to multiple measurement results with obtaining test surfaces
Carry out the deformation Evolution after photo-thermal absorption.
In detail, it can repeatedly be tested, and test corresponding preset duration difference each time, for example, can be successively
It is 0ms, 5ms, 10ms, 15ms etc..That is, initial time, the effect of test surfaces can be acted on to pumping laser respectively
Test surfaces at the time of after test surfaces 5ms, at the time of acting on after test surfaces 10ms, at the time of acting on after test surfaces 15ms
Deformation tested respectively, inscribed when obtaining an each instantaneous value.
Wherein, the size of the difference of the corresponding preset duration of each test is unrestricted, and the precision that can according to need carries out
Setting, for example, the difference can be smaller when higher to required precision.
In conjunction with Fig. 3, the embodiment of the present invention also provides a kind of photo-thermal absorption that can be applied to above-mentioned photo-thermal and absorb test macro
Test method.Wherein, it may include step S110, step S120, step S130, step S140 that the photo-thermal, which absorbs test method,
And step S150.Below in conjunction with Fig. 3, test method is absorbed to the photo-thermal and carries out that explanation is explained in detail.
Step S110, detecting laser 110 export the test surfaces of the first exploring laser light to sample 200 to be tested, so that should
First exploring laser light reflexes to position sensor 130 by the test surfaces.
In the present embodiment, when needing to test the sample 200 to be tested, the exploring laser light can be passed through
Device 110 exports one first exploring laser light to the test surfaces of the sample 200 to be tested, which can be in the survey
Examination face is reflected, to be transmitted to the position sensor 130.
It wherein, is the detection that amount of deflection is carried out convenient for the position sensor 130, it in the present embodiment, can also be to the
The reflected light path of one exploring laser light is adjusted, and when so that first exploring laser light being transmitted to the position sensor 130, is located at
The center of the target surface of the position sensor 130.
Optionally, the mode reflected light path of the first exploring laser light being adjusted is unrestricted, can be according to actually answering
It is configured with demand.In the present embodiment, the sample 200 to be tested can be set to a mobile platform, with by pair
The mobile platform is moved, so that the sample to be tested 200 be driven to be moved, and then realizes the anti-of the first exploring laser light
Penetrate the adjusting of optical path.
Optionally, the first exploring laser light is exported into the mode to the test surfaces of sample 200 to be tested unrestricted, Ke Yigen
It is configured according to practical application request, for example, being also possible to through other light either be directly transferred to the test surfaces
Device transmission is learned to the test surfaces, in the present embodiment, step S110 may include following sub-step: the detecting laser
110 output the first exploring laser lights to the first reflector 150, so that first exploring laser light is anti-by first reflector 150
It is incident upon the first lens 160；First exploring laser light is carried out aggregation processing and exported to sample to be tested by first lens 160
The test surfaces of product 200.
Step S120, after stopping exporting first exploring laser light, pump laser 120 exports pumping laser to institute
State test surfaces so that the test surfaces deformation occurs.
In the present embodiment, after executing step S110, it can control the detecting laser 110 and stop described in output
First exploring laser light, and after stopping exporting first exploring laser light, one can be exported by the pump laser 120
Pumping laser is to the test surfaces.Wherein, the optical pulse energy of the pumping laser should be greater than the photothermal singnal threshold of the test surfaces
Value, so that the test surfaces can generate certain deformation based on the pumping laser of absorption.
Also, in view of the light beam that the pumping laser is generally relatively assembled, when being transmitted to the test surfaces
It will form hot spot, that is to say, that the pumping laser is typically small in the useful effect region of the test surfaces.It therefore, is guarantor
The validity for demonstrate,proving test, can be adjusted the diameter of the hot spot of the pumping laser, so that the diameter is greater than the first detection
The diameter of the hot spot of laser and the second exploring laser light.Also, the hot spot of first exploring laser light and the second exploring laser light answers position
In in the hot spot of the pumping laser.
Optionally, the pumping laser is exported into the mode to the test surfaces of sample 200 to be tested unrestricted, Ke Yigen
It is configured according to practical application request, for example, being also possible to through other light either be directly transferred to the test surfaces
Device transmission is learned to the test surfaces, in the present embodiment, step S120 may include following sub-step: the pump laser
120 output pumping lasers to the second reflector 170, so that the pumping laser reflexes to second by second reflector 170
Lens 180；The pumping laser is carried out aggregation processing and exported to the test surfaces by second lens 180.
Step S130, after exporting first preset duration of pumping laser, the output of detecting laser 110 second is visited
Laser is surveyed to the test surfaces that deformation occurs so that second exploring laser light reflexes to the position sensor by the test surfaces
130。
In the present embodiment, after by the way that the pumping laser is acted on first preset duration of test surfaces, also
It is to say, after stopping exporting first preset duration of pumping laser, second can be exported by the detecting laser 110
Exploring laser light is to the test surfaces.
Wherein, the specific value of first preset duration is unrestricted, can be configured according to practical application request,
For example, it may be 5ms, 10ms or 15ms.Also, second exploring laser light can be identical with first exploring laser light
, the amount of deflection for causing two kinds of exploring laser lights of detection to obtain to avoid the difference due to exploring laser light is difficult to accurately be calculated
The problem of photo-thermal absorption characteristic of test surfaces.
Step S140,130 pairs of the position sensor the first exploring laser lights obtained and the second exploring laser light detect,
To obtain the amount of deflection between first exploring laser light and the second exploring laser light.
In the present embodiment, by position sensor 130 to the first exploring laser light and the second exploring laser light got point
It is not detected, to obtain the amount of deflection of first exploring laser light and the second exploring laser light.
Step S150, host computer 140 obtains the amount of deflection, and the sample to be tested is calculated according to the amount of deflection
The photo-thermal absorption characteristic of 200 test surfaces.
In the present embodiment, the relationship that the deformation quantity of the amount of deflection and the test surfaces is positively correlated, also, the survey
The relationship that the deformation quantity in examination face is positively correlated with the photo-thermal uptake of the test surfaces again.Therefore, one deflection of building can be preset
Then amount and the corresponding relationship of photo-thermal absorption characteristic when getting amount of deflection, can be calculated pair based on the corresponding relationship
The photo-thermal absorption characteristic answered.
Further, in order to control the delay between the pumping laser and the second exploring laser light, to carry out not
With the multiple test of delay, to be developed according to multiple measurement results with obtaining deformation of the test surfaces after carrying out photo-thermal absorption
Rule, in the present embodiment, in conjunction with Fig. 4, after executing step S130, it can also include step that the photo-thermal, which absorbs test method,
Rapid S160, step S170 and step S180.
Step S160, the stopping of the pump laser 120 output pumping laser to the test surfaces, and the exploring laser light
Device 110 stops the second exploring laser light of output to test surfaces.
Step S170, after the test surfaces that deformation occurs restore deformation, the pump laser 120 exports pumping again and swashs
Light to the test surfaces so that the test surfaces deformation occurs again.
Step S180, after exporting second preset duration of pumping laser, the detecting laser 110 exports again
Two exploring laser lights are to the test surfaces that deformation occurs so that second exploring laser light reflexes to the position sensing by the test surfaces
Device 130.
In the present embodiment, by setting second preset duration to not equal to first preset duration, so that
The pumping laser for executing step S130 output acts on the time of the test surfaces not equal to the pumping for executing step S180 output
Laser action is in the time of the test surfaces, so that the test surfaces generate different deformation under the action of pumping laser twice
Amount.
Wherein, the test of the deformation quantity at each moment for realization to test surfaces under the action of pumping laser, to obtain
Deformation Evolution of the test surfaces based on pumping laser, for example, from deformation takes place to each moment between deformation stopping
Deformation quantity.
In detail, step S160, step S170 and step S180 more times can be repeated, and each time in second
Preset duration has different values, for example, the first preset duration can be 0 when executing step S130, step is performed a plurality of times
The second preset duration in S180 can be successively 5ms, 10ms, 15ms etc..That is, can act on respectively pumping laser
In test surfaces initial time, act on after test surfaces 5ms at the time of, at the time of acting on after test surfaces 10ms, act on survey
The deformation of test surfaces at the time of after the 15ms of examination face is tested respectively, inscribe when obtaining an each instantaneous value.
Wherein, the size of the difference of corresponding second preset duration of the adjacent S180 of step twice is unrestricted, either
5ms is also possible to 3ms, can also be 1ms etc., and precision as needed is configured, for example, higher to required precision
When, which can be smaller.
In conclusion photo-thermal provided by the invention absorbs test macro and photo-thermal absorbs test method, pass through exploring laser light
Device 110, pump laser 120, position sensor 130 and delay time generator 190 are equipped with, and can control pumping laser
Delay between exploring laser light, to treat the test surfaces of test sample 200 any one moment after the effect of pumping laser
Transient state photo-thermal absorption characteristic tested, so as to obtained according to multiple measurement results test surfaces carry out photo-thermal absorption
Deformation Evolution later.That is, may be implemented to test surfaces after the effect of pumping laser based on this programme from shape
It sells of one's property the raw transient changing to each moment between deformation stopping to measure, so that disclosing test surfaces photo-thermal absorbs deformation
Rule is changed over time, and then improves and is led in the prior art because final state deformation quantity of the test surfaces after deformation stopping can only be measured
Obtained photo-thermal absorption characteristic is caused to be difficult to the problem of effectively characterizing to the characteristic of test surfaces.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of photo-thermal absorbs test macro characterized by comprising
Pump laser, the pump laser are used to export the test surfaces of pumping laser to sample to be tested；
Detecting laser, the detecting laser are used for the first detection of output before the pumping laser acts on the test surfaces and swash
Light exports the second exploring laser light to the test surfaces after the pumping laser acts on the test surfaces to the test surfaces；
Position sensor, the position sensor are set to exploring laser light on the reflected light path after the test surfaces, with detection
The amount of deflection between the first exploring laser light and the second exploring laser light by test surfaces reflection；
Delay time generator, which connect with the pump laser and the detecting laser respectively, to control
It states the second exploring laser light and acts on the test surfaces after the pumping laser acts on the test surfaces preset duration, to institute
State the test surfaces of sample to be tested any one first exploring laser light of moment and the second exploring laser light after the effect of pumping laser
Between amount of deflection tested, to obtain corresponding transient state photo-thermal absorption characteristic.
2. photo-thermal according to claim 1 absorbs test macro, which is characterized in that further include:
Host computer, the host computer are connect with the position sensor, detect to obtain amount of deflection to obtain the position sensor, and
The transient state photo-thermal absorption characteristic of the test surfaces is calculated based on the amount of deflection.
3. photo-thermal according to claim 1 or 2 absorbs test macro, which is characterized in that further include:
First reflector, which is set between the detecting laser and the test surfaces, so that the detection
The exploring laser light of laser output is by the first reflector back reflection to the test surfaces.
4. photo-thermal according to claim 3 absorbs test macro, which is characterized in that further include:
First lens, first lens are set between first reflector and the test surfaces, so that by described first
The exploring laser light of reflector reflection exports after the aggregation of first lens processing to the test surfaces.
5. photo-thermal according to claim 1 or 2 absorbs test macro, which is characterized in that further include:
Second reflector, which is set between the pump laser and the test surfaces, so that the pumping
The pumping laser of laser output is by the second reflector back reflection to the test surfaces.
6. photo-thermal according to claim 5 absorbs test macro, which is characterized in that further include:
Second lens, second lens are set between second reflector and the test surfaces, so that by described second
The pumping laser of reflector reflection exports after the aggregation of second lens processing to the test surfaces.
7. a kind of photo-thermal absorbs test method, it is applied to photo-thermal as claimed in any one of claims 1 to 6 and absorbs test macro,
It is characterized in that, which comprises
Detecting laser exports the test surfaces of the first exploring laser light to sample to be tested, so that first exploring laser light passes through the survey
Examination face reflexes to position sensor；
After stopping exporting first exploring laser light, pump laser exports pumping laser to the test surfaces so that the survey
Deformation occurs in examination face；
After exporting first preset duration of pumping laser, the detecting laser exports the second exploring laser light to deformation occurs
Test surfaces so that second exploring laser light reflexes to the position sensor by the test surfaces；
The position sensor detects the first exploring laser light of acquisition and the second exploring laser light, to obtain first detection
Amount of deflection between laser and the second exploring laser light；
Host computer obtains the amount of deflection, and is inhaled according to the photo-thermal that the test surfaces of the sample to be tested are calculated in the amount of deflection
Receive characteristic.
8. photo-thermal according to claim 7 absorbs test method, which is characterized in that pump laser alignment one in output executing
After preset duration, the detecting laser exports the second exploring laser light to the test surfaces that deformation occurs so that second detection swashs
After the step of light reflexes to the position sensor by the test surfaces, the method also includes:
A, the pump laser stopping output pumping laser to the test surfaces, and the detecting laser stops output second
Exploring laser light is to test surfaces；
B, after the test surfaces that deformation occurs restore deformation, the pump laser exports pumping laser to the test surfaces again
So that deformation occurs again for the test surfaces；
C, after exporting second preset duration of pumping laser, the detecting laser exports the second exploring laser light to hair again
The test surfaces of raw deformation are so that second exploring laser light reflexes to the position sensor by the test surfaces, wherein described the
Two preset durations are not equal to first preset duration；
Step a, step b and step c more times are repeated, the corresponding second preset duration difference of step c is performed a plurality of times, with
The deformation at multiple and different moment of test surfaces under the action of pumping laser is tested, to obtain the transient state of multiple deformation
Value.
9. photo-thermal according to claim 7 or 8 absorbs test method, which is characterized in that the detecting laser output the
One exploring laser light to sample to be tested test surfaces the step of include:
Detecting laser exports the first exploring laser light to the first reflector, so that first exploring laser light is by first reflection
Device reflexes to the first lens；
First exploring laser light is carried out aggregation processing and exported to the test surfaces of sample to be tested by first lens.
10. photo-thermal according to claim 7 or 8 absorbs test method, which is characterized in that the pump laser rear pump
Pu laser to the step of test surfaces includes:
Pump laser exports pumping laser to the second reflector, so that the pumping laser is reflexed to by second reflector
Second lens；
The pumping laser is carried out aggregation processing and exported to the test surfaces by second lens.
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