CN109188508A - High sensitivity optical fiber low-frequency detector based on microcantilever beam - Google Patents
High sensitivity optical fiber low-frequency detector based on microcantilever beam Download PDFInfo
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- CN109188508A CN109188508A CN201810809872.0A CN201810809872A CN109188508A CN 109188508 A CN109188508 A CN 109188508A CN 201810809872 A CN201810809872 A CN 201810809872A CN 109188508 A CN109188508 A CN 109188508A
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- optical fiber
- glass tube
- capillary glass
- oscillating component
- cantilever beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
Abstract
A kind of high sensitivity optical fiber low-frequency detector based on microcantilever beam, micro-vibration piece is pasted on one end face of capillary glass tube, micro-vibration piece is made of fixed part and cantilever beam and oscillating component, fixed part is pasted on the end face of capillary glass tube, oscillating component is connected by cantilever beam with fixed part, oscillating component is vacantly in capillary glass tube end face center position, fixed part and cantilever beam are single layer aluminium foil, oscillating component is five layers of aluminium foil, the thickness of oscillating component is greater than the thickness of cantilever beam, single mode optical fiber one end is extend into capillary glass tube from the other end of capillary glass tube and there are gaps between micro-vibration piece, form optical fibre Fabry-perot interference structure, single mode optical fiber is fixed on capillary glass tube.The present invention has the good linearity, small in size, at low cost, makes simple advantage.
Description
Technical field
The invention belongs to sensor technical fields, and in particular to a kind of high sensitivity optical fiber based on microcantilever beam
Low-frequency detector.
Background technique
Seismic prospecting is that the method motivated by man-made explosion applies vibration to the earth's crust, then monitors to geophone
Signal analyzed, so that it is determined that geological structure situation, and then obtain the fine description of the subterranean resource such as oil-gas reservoir, therefore,
Geophone is widely used among the fine granularing scalabilities such as petroleum, metal mineral reserves, coal, engineering geology field.Optical fiber cloth
Glug grating is as a kind of novel passive sensing element, since its size is small, structure is simple, high sensitivity, corrosion-resistant, resistance to
Electromagnetism interference, high reliablity, the features such as Distributed Detection can be achieved in high temperature and pressure, and the deep favor by people is suitable for
Make earthquake wave detector.In the design of geophone, core is the structure design of vibrating sensor, rationally
Property intuition determines the quality of geophone performance.
Although currently, having various types of vibration acceleration sensors for seismic wave monitoring, its frequency both at home and abroad
Rate range focuses mostly in 10Hz or more, and 10Hz Ultra-low Frequency Vibration Sensor below is rarely reported.Caused consequence is exactly
Geological information abundant included in low-frequency acoustic is possible to lose, to influence the precision of seismic information collection.Cause
This, 10Hz low-frequency earthquake waves below detection is the blind area of current seismic prospecting, constrains the high precision collecting of seismic wave and right
The fine description of underground oil-gas reservoir.For this status, it is badly in need of developing a kind of optical fiber Bradley for the monitoring of ultralow frequency seismic wave
Lattice grating vibration acceleration sensor.
Summary of the invention
The present invention provide it is a kind of it is small in size, compact-sized, high sensitivity, response band is wide, stability is high based on miniature
The high sensitivity optical fiber low-frequency detector of cantilever beam.
Solving technical solution used by above-mentioned technical problem is: a kind of high sensitivity optical fiber based on microcantilever beam
Low-frequency detector is pasted with micro-vibration piece on one end face of capillary glass tube, and micro-vibration piece is by fixed part and cantilever beam
And oscillating component is constituted, fixed part is pasted on the end face of capillary glass tube, and oscillating component passes through cantilever beam and fixed part
Split-phase connects, and for oscillating component vacantly in capillary glass tube end face center position, fixed part and cantilever beam are single layer aluminium foil, vibration
Dynamic part is five layers of aluminium foil, and the thickness of oscillating component is greater than the thickness of cantilever beam, and single mode optical fiber one end is from capillary glass tube
The other end is extend into capillary glass tube and there are gaps between micro-vibration piece, forms optical fibre Fabry-perot interference knot
Structure, single mode optical fiber are fixed on capillary glass tube.
As a kind of perferred technical scheme, the gap width between the single mode optical fiber end face and micro-vibration piece
For 17~145um.
As a kind of perferred technical scheme, the cantilever beam geometry be cuboid, a length of 100~300um,
Width is 20~50um, with a thickness of 10~30um.
As a kind of perferred technical scheme, the geometry of the oscillating component be cuboid, a length of 100~
300um, width are 100~300um, with a thickness of 30~100um.
As a kind of perferred technical scheme, the internal diameter of the capillary glass tube be 0.5~1.5mm, outer diameter 0.7
~1.7mm.
Beneficial effects of the present invention are as follows:
There are two reflectings surface for present invention tool, and a reflecting surface is single mode optical fiber end face, another reflecting surface is micro-vibration
The oscillating component surface of piece is reflected back two faces due to having the air gap between optical fiber and micro-vibration piece oscillating component
Light between there are phase difference, form interference, when extraneous vibration acts on the cantilever beam of micro-vibration piece, cause to vibrate
Part low-frequency vibration adjusts interference spectrum phase, interference spectrum is caused to drift about, and cooperates spectral sidebands filtering technique, can visit in real time
Environment low-frequency vibration signal is surveyed, the present invention has the advantages that small in size, compact-sized, high sensitivity.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is the top view of Fig. 1.
The sine curve that Fig. 3 is shake table frequency when being respectively 10Hz, 80Hz, 150Hz, 200Hz.
Fig. 4 is the amplitude of the present invention at different frequencies.
Fig. 5 be vibration frequency be 150Hz when change the increased linear fit of driving voltage amplitude of the present invention.
Specific embodiment
The present invention is described in more detail with reference to the accompanying drawings and examples, and single the present invention is not limited to following implementations
Mode.
In Fig. 1,2, the present embodiment based on the high sensitivity optical fiber low-frequency detector of microcantilever beam by glass capillary
Pipe 1, micro-vibration piece 2, single mode optical fiber 3 connect and compose.
The internal diameter of capillary glass tube 1 is 1mm, outer diameter 1.2mm, is pasted with miniature vibration on an end face of capillary glass tube 1
Movable plate 2, micro-vibration piece 2 are made of fixed part 2-1 and cantilever beam 2-2 and oscillating component 2-3, and fixed part 2-1 pastes
On the end face of capillary glass tube 1, oscillating component 2-3 is connected by cantilever beam 2-2 with fixed part 2-1, oscillating component 2-3
Vacantly in 1 end face center position of capillary glass tube, fixed part 2-1 and cantilever beam 2-2 are single layer aluminium foil, and cantilever beam 2-2 is several
What shape is cuboid, with a thickness of 20um, oscillating component 2-3 is a length of 200um, width 30um, five layers of aluminium foil, vibration section
The geometry of point 2-3 is cuboid, a length of 200um, width 200um, with a thickness of 70um, and 3 one end of single mode optical fiber is from glass
The other end of capillary 1 is extend into capillary glass tube 1 and between micro-vibration piece 2 there are gap, and gap width is
90um, forms optical fibre Fabry-perot interference structure, and single mode optical fiber 3 is fixed on capillary glass tube 1 by epoxide-resin glue.
There are two reflectings surface by the present invention, and a reflecting surface is 3 end face of single mode optical fiber, another reflecting surface is micro-vibration
The surface oscillating component 2-3 of piece 2 makes two due to having the air gap between optical fiber and the oscillating component 2-3 of micro-vibration piece
There are phase differences between the light that a face is reflected back, and interference are formed, when extraneous vibration acts on the cantilever beam 2-2 of micro-vibration piece 2
When upper, cause oscillating component 2-3 low-frequency vibration, and adjusted interference spectrum phase, interference spectrum is caused to drift about, cooperates spectral sidebands
Filtering technique, can real-time detection environment low-frequency vibration signal.
Embodiment 2
In the present embodiment, the internal diameter of capillary glass tube 1 be 0.5mm, outer diameter 0.7mm, one end of capillary glass tube 1
Micro-vibration piece 2 is pasted on face, micro-vibration piece 2 is by fixed part 2-1 and cantilever beam 2-2 and oscillating component 2-3 structure
At fixed part 2-1 is pasted on the end face of capillary glass tube 1, and oscillating component 2-3 passes through cantilever beam 2-2 and fixed part 2-
1 is connected, and for oscillating component 2-3 vacantly in 1 end face center position of capillary glass tube, fixed part 2-1 and cantilever beam 2-2 are single layer
Aluminium foil, cantilever beam 2-2 geometry are cuboid, a length of 100um, width 20um, are with a thickness of 10um, oscillating component 2-3
Five layers of aluminium foil, the geometry of oscillating component 2-3 are cuboid, a length of 100um, width 100um, with a thickness of 40um, single mode
3 one end of optical fiber extend into capillary glass tube 1 from the other end of capillary glass tube 1 and between micro-vibration piece 2 there are
Gap, gap width 17um form optical fibre Fabry-perot interference structure, and single mode optical fiber 3 is fixed on by epoxide-resin glue
On capillary glass tube 1.
Embodiment 3
In the present embodiment, the internal diameter of capillary glass tube 1 be 1.5mm, outer diameter 1.7mm, one end of capillary glass tube 1
Micro-vibration piece 2 is pasted on face, micro-vibration piece 2 is by fixed part 2-1 and cantilever beam 2-2 and oscillating component 2-3 structure
At fixed part 2-1 is pasted on the end face of capillary glass tube 1, and oscillating component 2-3 passes through cantilever beam 2-2 and fixed part 2-
1 is connected, and for oscillating component 2-3 vacantly in 1 end face center position of capillary glass tube, fixed part 2-1 and cantilever beam 2-2 are single layer
Aluminium foil, cantilever beam 2-2 geometry are cuboid, a length of 300um, width 50um, are with a thickness of 30um, oscillating component 2-3
Five layers of aluminium foil, the geometry of oscillating component 2-3 are cuboid, a length of 300um, width 300um, with a thickness of 100um, singly
3 one end of mode fiber extend into capillary glass tube 1 from the other end of capillary glass tube 1 and between micro-vibration piece 2 there are
Gap, gap width 145um form optical fibre Fabry-perot interference structure, and single mode optical fiber 3 is fixed by epoxide-resin glue
On capillary glass tube 1.
Experiment 1
In order to verify beneficial effects of the present invention, inventor has done the high sensitivity optical fiber low frequency based on microcantilever beam
The test experiments of wave detector, experimental procedure are as follows:
1, test equipment
Oscillograph, tunable laser, photodetector, circulator, the vibration of Beijing wave spectrum WS-Z30-40 type miniature precision
Dynamic platform
2, test experiments
The high sensitivity optical fiber low-frequency detector based on microcantilever beam of embodiment 1 is connected in test device, it can
Tuned laser is as light source, and line width and resolution ratio are respectively 100KHz and 0.1pm, and laser is exported from tunable laser,
It by circulator, imports in the high sensitivity optical fiber low-frequency detector based on microcantilever beam of embodiment 1, based on miniature outstanding
The high sensitivity optical fiber low-frequency detector reflective light intensity signal of arm beam is changed into voltage signal through photodetector, is transmitted to and shows
The analysis of wave device, shaking platform starting of oscillation drive the high sensitivity optical fiber low-frequency detector vibration based on microcantilever beam of embodiment 1
Dynamic, first fixed amplitude finds resonance frequency, then fixed frequency, increases driving voltage, testing example 1 based on microcantilever
The linearity of the high sensitivity optical fiber low-frequency detector of beam.
3, experimental configuration is analyzed
Shake table frequency is controlled, records one group of waveform every 10Hz by 10Hz to 250Hz, Fig. 3 gives frequency and is respectively
Wave spectrum when 10Hz, 80Hz, 150Hz, 200Hz is sine curve.Map to obtain resonance frequency of the present invention by Origin be
80Hz, such as Fig. 4, fixed vibration frequency are that 150Hz observes amplitude of the invention when changing driving voltage 0.25V~1.75V
With the preferable linearity, Linear Quasi right R2=0.9996, such as Fig. 5.
4, experiment conclusion
The present invention is in sine curve in the middle low-frequency range of 10~250Hz, through measuring, resonance frequency of the invention
For 80Hz, in addition, the present invention has the good linearity, small in size, at low cost, production is simple, centering low frequency vibration signal
Pickup have definite meaning.
Claims (5)
1. a kind of high sensitivity optical fiber low-frequency detector based on microcantilever beam, it is characterised in that: the one of capillary glass tube (1)
It is pasted on end face micro-vibration piece (2), micro-vibration piece (2) is by fixed part (2-1) and cantilever beam (2-2) and vibration section
(2-3) is divided to constitute, fixed part (2-1) is pasted on the end face of capillary glass tube (1), and oscillating component (2-3) passes through cantilever beam
(2-2) is connected with fixed part (2-1), and oscillating component (2-3) is vacantly in capillary glass tube (1) end face center position, fixed part
Divide (2-1) and cantilever beam (2-2) is single layer aluminium foil, oscillating component (2-3) is five layers of aluminium foil, the thickness of oscillating component (2-3)
Degree is greater than the thickness of cantilever beam (2-2), and single mode optical fiber (3) one end extend into glass capillary from the other end of capillary glass tube (1)
It manages in (1) and there are gap between micro-vibration piece (2), form optical fibre Fabry-perot interference structure, single mode optical fiber (3)
It is fixed on capillary glass tube (1).
2. the high sensitivity optical fiber low-frequency detector according to claim 1 based on microcantilever beam, it is characterised in that: institute
Gap width between the single mode optical fiber end face stated and micro-vibration piece (2) is 17~145um.
3. the high sensitivity optical fiber low-frequency detector according to claim 1 based on microcantilever beam, it is characterised in that: institute
Cantilever beam (2-2) geometry stated is cuboid, and a length of 100~300um, width are 20~50um, with a thickness of 10~30um.
4. the high sensitivity optical fiber low-frequency detector according to claim 1 based on microcantilever beam, it is characterised in that: institute
The geometry for the oscillating component (2-3) stated is cuboid, a length of 100~300um, width be 100~300um, with a thickness of 30~
100um。
5. the high sensitivity optical fiber low-frequency detector according to claim 1 based on microcantilever beam, it is characterised in that: institute
The internal diameter for the capillary glass tube (1) stated is 0.5~1.5mm, outer diameter is 0.7~1.7mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810809872.0A CN109188508B (en) | 2018-09-18 | 2018-09-18 | High-sensitivity optical fiber low-frequency detector based on micro cantilever beam |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810809872.0A CN109188508B (en) | 2018-09-18 | 2018-09-18 | High-sensitivity optical fiber low-frequency detector based on micro cantilever beam |
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| CN109188508A true CN109188508A (en) | 2019-01-11 |
| CN109188508B CN109188508B (en) | 2020-05-01 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308717A (en) * | 2013-05-23 | 2013-09-18 | 南京师范大学 | Optical fiber Fabry-Perot acceleration sensor and manufacturing method thereof |
| US20140202786A1 (en) * | 2013-01-23 | 2014-07-24 | A Craig Beal | Optical seismic sensor systems and methods |
| CN104541151A (en) * | 2012-05-04 | 2015-04-22 | 美国地震系统有限公司 | Fiber optic sensing systems and methods of operating the same |
| CN108375412A (en) * | 2018-01-31 | 2018-08-07 | 西北大学 | High sensitivity optical fiber sonac based on microcantilever beam |
| CN108415067A (en) * | 2017-12-28 | 2018-08-17 | 华中科技大学 | A kind of earthquake wave measuring system based on microstructured optical fibers distribution sound wave sensing |
-
2018
- 2018-09-18 CN CN201810809872.0A patent/CN109188508B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104541151A (en) * | 2012-05-04 | 2015-04-22 | 美国地震系统有限公司 | Fiber optic sensing systems and methods of operating the same |
| US20140202786A1 (en) * | 2013-01-23 | 2014-07-24 | A Craig Beal | Optical seismic sensor systems and methods |
| CN103308717A (en) * | 2013-05-23 | 2013-09-18 | 南京师范大学 | Optical fiber Fabry-Perot acceleration sensor and manufacturing method thereof |
| CN108415067A (en) * | 2017-12-28 | 2018-08-17 | 华中科技大学 | A kind of earthquake wave measuring system based on microstructured optical fibers distribution sound wave sensing |
| CN108375412A (en) * | 2018-01-31 | 2018-08-07 | 西北大学 | High sensitivity optical fiber sonac based on microcantilever beam |
Non-Patent Citations (1)
| Title |
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| 乔学光 等: "光纤超声传感器及应用研究进展", 《物理学报》 * |
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