CN109187658A - A kind of Resistivity testing instrument and Resistivity testing method - Google Patents
A kind of Resistivity testing instrument and Resistivity testing method Download PDFInfo
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- CN109187658A CN109187658A CN201811174169.3A CN201811174169A CN109187658A CN 109187658 A CN109187658 A CN 109187658A CN 201811174169 A CN201811174169 A CN 201811174169A CN 109187658 A CN109187658 A CN 109187658A
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- 238000012360 testing method Methods 0.000 title claims abstract description 60
- 239000000843 powder Substances 0.000 claims abstract description 52
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 238000003825 pressing Methods 0.000 claims abstract description 22
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 17
- 230000000994 depressogenic effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- DQMUQFUTDWISTM-UHFFFAOYSA-N O.[O-2].[Fe+2].[Fe+2].[O-2] Chemical compound O.[O-2].[Fe+2].[Fe+2].[O-2] DQMUQFUTDWISTM-UHFFFAOYSA-N 0.000 claims description 4
- 239000004800 polyvinyl chloride Substances 0.000 claims description 4
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 4
- 239000000523 sample Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000003252 repetitive effect Effects 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 201000004569 Blindness Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
- G01N27/07—Construction of measuring vessels; Electrodes therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
The invention discloses a kind of Resistivity testing instrument and Resistivity testing methods, are related to Resistivity testing technical field.Including support frame, and the upper table and lower table of setting on the support frame, powder volumetric standard is provided on upper table, through-hole is provided centrally in powder volumetric standard, carrier bar corresponding with through-hole is provided centrally in lower table, carrier bar includes pedestal portion, the bottom end of carrier bar is arranged in pedestal portion, height sensor is provided in pedestal portion, for detecting the reserved depth of through-hole, the upper end of carrier bar is provided with lower electrode, support frame includes upper junction plate and lower connecting plate, pressing mechanism is provided on upper junction plate, the bottom end of pressing mechanism is provided with top electrode liftable and corresponding with through-hole, pressure sensor is provided on lower connecting plate, mass sensor is provided between pressure sensor and pedestal portion, pressure sensor, mass sensor, top electrode and lower electrode are electrically connected with display respectively It connects.
Description
Technical field
The present invention relates to Resistivity testing technical fields, examine in particular to a kind of Resistivity testing instrument and resistivity
Survey method.
Background technique
Resistivity is one of important electrical parameter of semiconductor material, and common semiconductor resistor rate test method includes two
Sonde method, four probe method, method of one probe spreading resistance, vanderburg method.Four probe method can eliminate electrode and sample contact resistance
And the error that electrode, connecting wire bulk resistor generate, the drawbacks of two traditional hold-carryings measure powder resistivity instrument is overcome,
The resistivity of powder sample can more accurately be measured.
Existing four probe method semiconductor resistor rate detector is relatively high to environmental requirement, for the precision for improving test, leads to
It often to carry out repetitive test 3 times or so.In semiconductor resistor rate test process, commonly required sample quality is lighter, and sample is in
Powder or lenticular.It is easy to produce static electricity during charging, cause semiconductor material that can splash and be adsorbed on charging table top, makes
It is inconsistent at repetitive test charging quality, test result inaccuracy, the problems such as bigger error.
Summary of the invention
The purpose of the present invention is to provide a kind of Resistivity testing instrument and Resistivity testing methods, can be improved repeated examination
The uniformity for the sample to be tested quality added when testing reduces repetitive test test error, promotes the precision of test.
The embodiment of the present invention is achieved in that
The one side of the embodiment of the present invention provides a kind of Resistivity testing instrument, including support frame, and is arranged in the branch
Upper table and lower table on support, are provided with powder volumetric standard on the upper table, in the powder standard
Container center is provided with through-hole, is provided centrally with carrier bar corresponding with the through-hole, the carrier bar in the lower table
Including pedestal portion, the bottom end of the carrier bar is arranged in the pedestal portion, is provided with height sensor in the pedestal portion, uses
In detecting the reserved depth of the through-hole, the upper end of the carrier bar is provided with lower electrode, support frame as described above includes upper connection
Plate and lower connecting plate, are provided with pressing mechanism on the upper junction plate, and the bottom end of the pressing mechanism is provided with liftable
And top electrode corresponding with the through-hole, be provided with pressure sensor on the lower connecting plate, the pressure sensor with
It is provided with mass sensor between the pedestal portion, the pressure sensor, the mass sensor, the top electrode and described
Lower electrode is electrically connected with display.
Optionally, the pressing mechanism includes the adjusting knob for adjusting the top electrode lifting, the adjusting knob
On be provided with clamping portion, dismountable driving lever is provided on the clamping portion.
Optionally, the Resistivity testing instrument further includes the dial that the upper junction plate upper surface is arranged in, Yi Jishe
Set the direction needle in the clamping portion upper surface.
Optionally, the pressing mechanism includes fixing seat, and the lower surface of the upper junction plate is arranged in the fixing seat.
Optionally, adjusting screw rod is fixedly installed on the lower connecting plate, the adjusting screw rod passes through the upper work
Platform and the lower table, are provided with adjusting nut on the adjusting screw rod, and the adjusting nut is supported in the upper work
The upper surface of platform, for adjusting height of the upper table on support frame as described above.
Optionally, the Resistivity testing instrument further includes the first spring being set on the adjusting screw rod, and described first
One end of spring is abutted with the lower surface of the upper table, and the other end is abutted with the upper surface of the lower connecting plate.
Optionally, the making material of the powder volumetric standard includes polyvinyl chloride or di-iron trioxide.
Optionally, guide rod is provided between the upper junction plate and the lower connecting plate, the upper table passes through
Slip guiding sleeve is slidably connected with the guide rod, and the lower table is fixedly connected with the guide rod.
Optionally, be arranged with second spring on the carrier bar, the second spring support the upper table with
Between the lower table.
The another aspect of the embodiment of the present invention provides a kind of Resistivity testing method, comprising: lifts top electrode, makes to power on
Extremely far from powder volumetric standard, display indicating value zeroing, wherein the display indicating value includes pressure value and mass value；Logical
Powder sample to be detected is added in hole；Top electrode is depressed, makes the top electrode close to powder volumetric standard；Connect the top electrode
With lower electrode supply, pressing mechanism is finely tuned, the top electrode is depressed, pressed to powder sample to be detected；Obtain the resistance measured
Rate value；Take out the tablet of compacting.
The beneficial effect of the embodiment of the present invention includes:
Resistivity testing instrument provided in an embodiment of the present invention and Resistivity testing method, by being arranged at lower table center
Carrier bar corresponding with through-hole, be trapped in powder sample to be tested in through-hole, will not trickle down, facilitate and tested, also make
Carrier bar is more stable, reduces the shaking of carrier bar.By the way that the pedestal portion of carrier bar bottom end is arranged in, make carrier bar and quality
The connection of sensor is more stable, and measurement result is more accurate.Pass through pressure sensor, the mass sensitivity being electrically connected with display
Device, top electrode and lower electrode, keep the process of test resistance rate more intuitive, operator are facilitated to refer to, reduce operation difficulty,
Keep test result more accurate.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is one of the structural schematic diagram of Resistivity testing instrument provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of display provided in an embodiment of the present invention；
Fig. 3 is the top view of Fig. 1；
Fig. 4 is the second structural representation of Resistivity testing instrument provided in an embodiment of the present invention.
Icon: 100- Resistivity testing instrument；110- support frame；113- guide rod；115- upper junction plate；It is connected under 117-
Plate；120- upper table；123- powder volumetric standard；130- lower table；135- slip guiding sleeve；140- carrier bar；143- pedestal
Portion；145- height sensor；Electrode under 147-；149- second spring；150- pressing mechanism；151- fixing seat；152- top electrode；
154- adjusting knob；The clamping portion 155-；156- driving lever；157- dial；158- direction needle；160- pressure sensor；170- matter
Quantity sensor；180- display；The viewing area 182-；The control zone 184-；190- adjusting screw rod；192- adjusting nut；194- first
Spring.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should be noted that term " on ", "lower", "left", "right", "vertical", "horizontal",
The orientation or positional relationship of the instructions such as "inner", "outside" be based on the orientation or positional relationship shown in the drawings or the invention produce
Product using when the orientation or positional relationship usually put, be merely for convenience of description of the present invention and simplification of the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitation of the present invention.In addition, term " first ", " second " etc. are only used for distinguishing description, and it should not be understood as instruction or dark
Show relative importance.
In addition, the terms such as term "horizontal", "vertical" are not offered as requiring component abswolute level or pendency, but can be slightly
Low dip.It is not to indicate that the structure has been had to if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It is complete horizontal, but can be slightly tilted.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirect by intermediary
It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
Referring to Fig.1 and 2, the present embodiment provides a kind of Resistivity testing instrument 100, including support frame 110, and setting
Upper table 120 and lower table 130 on support frame 110, are provided with powder volumetric standard 123 on upper table 120,
It is provided centrally with through-hole in powder volumetric standard 123, is provided centrally with carrier bar 140 corresponding with through-hole in lower table 130,
Carrier bar 140 includes pedestal portion 143, and the bottom end of carrier bar 140 is arranged in pedestal portion 143, and height is provided in pedestal portion 143
Sensor 145 is provided with lower electrode 147 in the upper end of carrier bar 140, support frame 110 wraps for detecting the reserved depth of through-hole
Upper junction plate 115 and lower connecting plate 117 are included, pressing mechanism 150, the bottom end of pressing mechanism 150 are provided on upper junction plate 115
It is provided with top electrode 152 corresponding with through-hole, pressure sensor 160 is provided on lower connecting plate 117, in pressure sensor
Mass sensor 170, pressure sensor 160, mass sensor 170,152 and of top electrode are provided between 160 and pedestal portion 143
Lower electrode 147 is electrically connected with display 180.
It should be noted that first, it is arranged in parallel between upper table 120 and lower table 130, and powder standard is held
The center of device 123 and the center of lower table 130 are on the same line.So, it is arranged by 130 center of lower table
Cooperation between carrier bar 140 and through-hole is even closer, while also reducing the possibility of 140 unbalance stress of carrier bar and skew,
Reliability is higher.
Second, mass sensor 170 be used for detect the powder sample quality to be detected being added in through-hole number, resistance
Rate detector 100 can be with the quality for the powder sample to be detected that preset in advance need to add.Meanwhile adding powder sample to be detected
When, the viewing area 182 of display 180 can show the sample currently added number, control zone 184 is for changing parameter setting
(as shown in Figure 2), when within 0.002 gram of mass offset preset quality of addition, can be tested (when not in range,
Corresponding increase and decrease operation can be carried out according to the instruction of display 180).It is convenient that different samples is tested, reduce operation
Difficulty.
Third, the embodiment of the present invention are not particularly limited the positional relationship between support frame 110 and display 180, show
Example, support frame 110 can be directly placed on test platform and be operated, and when experiment porch position is limited, can also put
It sets on display 180 to reduce occupied area.
Resistivity testing instrument 100 provided in an embodiment of the present invention, by 130 center of lower table be arranged with through-hole pair
The carrier bar 140 answered, is trapped in powder sample to be tested in through-hole, will not trickle down, facilitate and tested, also make carrier bar
140 is more stable, reduces the shaking of carrier bar 140.By the way that the pedestal portion 143 of 140 bottom end of carrier bar is arranged in, make carrier bar
140 is more stable with the connection of mass sensor 170, and measurement result is more accurate.It is passed by the pressure being electrically connected with display 180
Sensor 160, mass sensor 170, top electrode 152 and lower electrode 147, keep the process of test resistance rate more intuitive, facilitate behaviour
Make personnel's reference, reduce operation difficulty, keeps test result more accurate.
As shown in figure 3, pressing mechanism 150 includes the adjusting knob 154 for adjusting the lifting of top electrode 152, adjusting knob
It is provided with clamping portion 155 on 154, dismountable driving lever 156 is provided on clamping portion 155.
It should be noted that the present invention is not particularly limited the shape of clamping portion 155, polygonized structure can be, show
Example, as shown in figure 3, clamping portion 155 is set as regular hexagon.So, facilitate and match between driving lever 156 and clamping portion 155
It closes or dismantles.It when needing fast lifting or falling top electrode 152, can quickly be operated, be saved by driving lever 156
Operating time, while also making more convenient in adjustment process.When needing to finely tune, it can use lower driving lever 156, directly revolved with finger
Turn adjusting knob 154, it is inconsistent in the size and Orientation of different 156 stress of angle driving lever when reducing using driving lever 156,
The problem of causing Resistivity testing instrument 100 to shake, and then influencing test accuracy.
Further, Resistivity testing instrument 100 further includes the dial 157 that 115 upper surface of upper junction plate is arranged in, and
The direction needle 158 of 155 upper surface of clamping portion is set.
It so, can be by direction needle 158 in dial in the pressure value fine tuning shown according to display 180
The angle that indicates on 157 purposefully rotates adjusting knob 154, make to have in pressure process can with reference to object rotate adjusting
Knob 154 is gradually pressurizeed, and when reducing the rotation adjusting knob 154 of blindness, the risk of test failure is crossed and made to pressure tune.
As shown in Figure 1, pressing mechanism 150 includes fixing seat 151, the following table of upper junction plate 115 is arranged in fixing seat 151
Face.
So, pressing mechanism 150 can be made more to be stably fixed on upper junction plate 115.In addition, disassembly assembling
Maintenance process is also more simple and convenient, meanwhile, be conducive to protect top electrode 152, reduce the probability that top electrode 152 is damaged.
As shown in Figure 1, being fixedly installed adjusting screw rod 190 on lower connecting plate 117, adjusting screw rod 190 passes through upper work
Platform 120 and lower table 130, are provided with adjusting nut 192 on adjusting screw rod 190, and adjusting nut 192 is supported in upper table
120 upper surface, for adjusting the height of upper table 120.
Specifically, being adjusted according to the difference of the powder of measurement and the difference of desired height using adjusting nut 192
When, it can refer to the value that the height sensor 145 that display 180 is shown detects to determine the regulated quantity of adjusting nut 192.In this way
One, the detection of different samples can be carried out, operating process is simplified so that the depth of sample can be added in flexible modulation through-hole.
As shown in Figure 1, Resistivity testing instrument 100 further includes the first spring 194 being set on adjusting screw rod 190, first
One end of spring 194 is abutted with the lower surface of upper table 120, and the other end is abutted with the upper surface of lower connecting plate 117.
So, can make adjust upper table 120 when it is more stable, reduce adjust upper table 120 when, due to
Deviation existing for the height that gap between thread causes the height after the adjusting of upper table 120 and actual needs to adjust.Make to adjust
Precision be easier control, also make the movement of upper table 120 in adjustment process more steady, enhance user experience.
The making material of powder volumetric standard 123 includes polyvinyl chloride or di-iron trioxide.It is exemplary, powder volumetric standard
123 can be ceramic material, and polyvinyl chloride or di-iron trioxide are added in ceramic material.So, powder standard is held
Device 123 can export in time the electrostatic generated on powder volumetric standard 123 when adding powder to be detected and go, and reduce
The influence of electrostatic, to make to add more easy when powder to be detected, reduce be adsorbed onto because of electrostatic powder volumetric standard 123 its
A possibility that his region.
As shown in figure 4, being provided with guide rod 113 between upper junction plate 115 and lower connecting plate 117, upper table 120 is logical
It crosses slip guiding sleeve 135 to be slidably connected with guide rod 113, lower table 130 is fixedly connected with guide rod 113.
Specifically, being arranged in parallel between two guide rods 113, it is arranged in parallel between upper junction plate 115 and lower connecting plate 117,
It is vertically arranged between guide rod 113 and upper junction plate 115, upper table 120 is connected by slip guiding sleeve 135 and the sliding of guide rod 113
It connects.So, after falling top electrode 152 using pressing mechanism 150, in 123 course of exerting pressure of powder volumetric standard, upper work
Making platform 120 can move down along guide rod 113.Meanwhile the powder to be detected being added in powder volumetric standard 123 is pressed into
Sheet.
As shown in figure 4, being arranged with second spring 149 on carrier bar 140, second spring 149 is supported in upper table 120
Between lower table 130.
So, after test, while top electrode 152 is lifted, second spring 149 restores elastic deformation, on
Workbench 120 can go back up to initial position with top electrode 152.It facilitates operator and carries out double measurement, also save tune
The time for trying Resistivity testing instrument 100, improve working efficiency.
The embodiment of the invention also provides a kind of Resistivity testing methods, comprising:
S100, top electrode 152 to be lifted, makes top electrode 152 far from powder volumetric standard 123,180 indicating value of display returns to zero,
Wherein, 180 indicating value of display includes pressure value and mass value.
S200, powder sample to be detected is added in through-hole.
Wherein, before powder sample to be detected is added, the mass value that need to add sample can be preset, it is to be checked adding
While surveying powder sample, the mass value that observation display 180 is shown facilitates the quality of control addition sample.After the completion of addition,
Powder sample to be detected is slightly compacted, is flattened, facilitates and operates in next step.
S300, pressure top electrode 152, make top electrode 152 close to powder volumetric standard 123；
Specifically, can be quickly propelled when top electrode 152 is close to powder volumetric standard 123, to save test institute
The time needed.
S400, top electrode 152 and lower 147 power supply of electrode are connected, finely tunes pressing mechanism 150, depressed top electrode 152, treat
Detect powder sample pressure；
In top electrode 152 after powder volumetric standard 123, in pressure process, need to observe the display of display 180 simultaneously
Voltage value, and finely tune pressing mechanism 150, prevent from applying that pressure is excessive to lead to test failure.
The resistivity value that S500, acquisition measure；
S600, the tablet for taking out compacting.
During the tablet for taking out compacting, top electrode 152 is lifted, then by stripping attachment, stripping attachment is set in and is powered on
At pole 152, pressing mechanism 150 is depressed, is pressed by stripping attachment to upper table 120 and powder volumetric standard 123, makes compacting
Tablet is ejected into the cavity of stripping attachment.Or top electrode 152 is lifted, then manual depression upper table 120 and powder standard
Container 123 pops up the tablet of compacting out of powder volumetric standard 123.It should be noted that when taking out the tablet of compacting,
Pay attention to observing the value that the height sensor 145 that display 180 is shown detects, prevents operation error from leading to equipment damage, feeding
Cleaning residual sample is also needed after the completion, facilitates next use.
Resistivity testing method disclosed by the embodiments of the present invention, makes to add by display 180 and mass sensor 170
Powder sample to be detected amount it is more accurate, reduce the error of test, operation simplifies, and final measurement accuracy is higher.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of Resistivity testing instrument, which is characterized in that including support frame, and the upper table being arranged on support frame as described above
And lower table, it is provided with powder volumetric standard on the upper table, is provided centrally in the powder volumetric standard logical
Hole is provided centrally with carrier bar corresponding with the through-hole in the lower table, and the carrier bar includes pedestal portion, the seat
The bottom end of the carrier bar is arranged in body portion, is provided with height sensor in the pedestal portion, pre- for detecting the through-hole
The depth stayed is provided with lower electrode in the upper end of the carrier bar, and support frame as described above includes upper junction plate and lower connecting plate, in institute
It states and is provided with pressing mechanism on upper junction plate, the bottom end of the pressing mechanism is provided with liftable and corresponding with the through-hole
Top electrode is provided with pressure sensor on the lower connecting plate, is arranged between the pressure sensor and the pedestal portion
Have a mass sensor, the pressure sensor, the mass sensor, the top electrode and the lower electrode respectively with display
Electrical connection.
2. Resistivity testing instrument according to claim 1, which is characterized in that the pressing mechanism includes described for adjusting
The adjusting knob of top electrode lifting, is provided with clamping portion on the adjusting knob, is provided on the clamping portion dismountable
Driving lever.
3. Resistivity testing instrument according to claim 2, which is characterized in that the Resistivity testing instrument further includes that setting exists
The dial of the upper junction plate upper surface, and the direction needle of the clamping portion upper surface is set.
4. Resistivity testing instrument according to claim 1 or 2, which is characterized in that the pressing mechanism includes fixing seat, institute
State the lower surface that the upper junction plate is arranged in fixing seat.
5. Resistivity testing instrument according to claim 1, which is characterized in that be fixedly installed tune on the lower connecting plate
Screw rod is saved, the adjusting screw rod passes through the upper table and the lower table, adjusting is provided on the adjusting screw rod
Nut, the adjusting nut is supported in the upper surface of the upper table, for adjusting the upper table in support frame as described above
On height.
6. Resistivity testing instrument according to claim 5, which is characterized in that the Resistivity testing instrument further includes being set in
One end of the first spring on the adjusting screw rod, first spring is abutted with the lower surface of the upper table, the other end
It is abutted with the upper surface of the lower connecting plate.
7. Resistivity testing instrument according to claim 1, which is characterized in that the making material packet of the powder volumetric standard
Include polyvinyl chloride or di-iron trioxide.
8. Resistivity testing instrument according to claim 1 or 6, which is characterized in that in the upper junction plate and the lower company
Guide rod is provided between fishplate bar, the upper table is slidably connected by slip guiding sleeve and the guide rod, the lower table
It is fixedly connected with the guide rod.
9. Resistivity testing instrument according to claim 1, which is characterized in that be arranged with the second bullet on the carrier bar
Spring, the second spring support between the upper table and the lower table.
10. a kind of Resistivity testing method characterized by comprising
Top electrode is lifted, makes top electrode far from powder volumetric standard, display indicating value zeroing, wherein the display indicating value packet
Include pressure value and mass value；
Powder sample to be detected is added in through-hole；
Top electrode is depressed, makes the top electrode close to powder volumetric standard；
The top electrode and lower electrode supply are connected, pressing mechanism is finely tuned, depresses the top electrode, powder sample to be detected is applied
Pressure；
Obtain the resistivity value measured；
Take out the tablet of compacting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811174169.3A CN109187658A (en) | 2018-10-09 | 2018-10-09 | A kind of Resistivity testing instrument and Resistivity testing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811174169.3A CN109187658A (en) | 2018-10-09 | 2018-10-09 | A kind of Resistivity testing instrument and Resistivity testing method |
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| CN109187658A true CN109187658A (en) | 2019-01-11 |
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| CN201811174169.3A Pending CN109187658A (en) | 2018-10-09 | 2018-10-09 | A kind of Resistivity testing instrument and Resistivity testing method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632182A (en) * | 2019-01-16 | 2019-04-16 | 深圳市科迈爱康科技有限公司 | Piezoresistive transducer test equipment and test method |
| CN112505417A (en) * | 2020-11-19 | 2021-03-16 | 天津大学 | Method for measuring resistivity of conductor material |
| CN113049881A (en) * | 2021-04-09 | 2021-06-29 | 中国电子技术标准化研究院 | Extension resistance tester for epitaxial layer of integrated circuit |
| CN113267683A (en) * | 2021-05-07 | 2021-08-17 | 武汉理工大学 | In-situ measurement method for metal resistivity at high temperature and high pressure |
| CN113406392A (en) * | 2021-06-16 | 2021-09-17 | 国网安徽省电力有限公司电力科学研究院 | Resistance measuring device and resistance measuring method in cable buffer layer ablation process |
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| CN113267683A (en) * | 2021-05-07 | 2021-08-17 | 武汉理工大学 | In-situ measurement method for metal resistivity at high temperature and high pressure |
| CN113406392A (en) * | 2021-06-16 | 2021-09-17 | 国网安徽省电力有限公司电力科学研究院 | Resistance measuring device and resistance measuring method in cable buffer layer ablation process |
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