CN109182980A - Intelligent composite material depositing device based on ultrasound examination - Google Patents
Intelligent composite material depositing device based on ultrasound examination Download PDFInfo
- Publication number
- CN109182980A CN109182980A CN201811188865.XA CN201811188865A CN109182980A CN 109182980 A CN109182980 A CN 109182980A CN 201811188865 A CN201811188865 A CN 201811188865A CN 109182980 A CN109182980 A CN 109182980A
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- Prior art keywords
- composite material
- intelligent
- laser transmitter
- vacuum chamber
- ultrasound examination
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The present invention provides a kind of intelligent composite material depositing device based on ultrasound examination, including Intelligent Laser transmitter, a driving mechanism, three the first reflecting mirrors, vacuum chamber, three for fixing the first fixed platform of different source material targets and for depositing the substrate for forming composite material；First fixed platform and substrate are all set in the vacuum chamber, three first fixed platforms are opposite with the predeterminable area of the substrate respectively, vacuum chamber is provided with light passing portion, and the light direction of the Intelligent Laser transmitter and first reflecting mirror is in default angle；The driving mechanism is connect to drive the Intelligent Laser transmitter along default linear movement with the Intelligent Laser transmitter, so that the laser selective that the Intelligent Laser transmitter issues be incident upon first reflecting mirror in three first reflecting mirrors, first reflecting mirror is for injecting at first fixed platform of the correspondence in the vacuum chamber laser by the light passing portion.
Description
Technical field
The present invention relates to field of composite material preparation, in particular to a kind of intelligent composite material based on ultrasound examination
Depositing device.
Background technique
There is very big hot spot to concentrate on the research to composite material in materialogy field at present, for example solar energy materials,
The performance of these composite materials is all mainly determined by its composition.In order to study and optimize these materials, usual method is one
One ground synthetic material.The process of this exploration very time-consuming.Therefore it is highly desirable to find a kind of spy of efficient system
The method of rope research composite material.The research of composite material so be especially fully developed not yet three compositions utilized or
The Efficiency of the composite material of four compositions can greatly improve.
However, this method that film deposition and mask are combined remixes after deposit.It brings
A series of problem, for example split-phase, mask misalignment and process complexity, etc..These problems can not solve always, and gradually
Root problem as this method.
Therefore, in Material Field to composite material increasingly keen interest, it is a kind of more reliable more efficient compound
Material synthesis method becomes to be even more important.
However, pulse laser deposition have the shortcomings that one it is very prominent, be exactly the inhomogeneities of growth rate, that is,
Film thickness can be inconsistent everywhere on substrate.However the growth rate in this invention exactly using pulse laser deposition is uneven
Property carrys out synthetic material, to keep the component of each point on substrate different.
Summary of the invention
The embodiment of the present invention provides a kind of intelligent composite material depositing device based on ultrasound examination, and it is quickly heavy to have
The beneficial effect of a variety of different composite materials of product.
The embodiment of the present invention provides a kind of intelligent composite material depositing device based on ultrasound examination, and feature exists
In, including it is master control borad, ultrasonic thickness detection components, Intelligent Laser transmitter, a driving mechanism, three the first reflecting mirrors, true
Empty room, three for fixing the first fixed platform of different source material targets and for depositing the base for forming composite material
Piece；
First fixed platform and substrate are all set in the vacuum chamber, three the first fixed platforms difference
Opposite with the predeterminable area of the substrate, the vacuum chamber is provided with light passing portion, the Intelligent Laser transmitter and described first
The light direction of reflecting mirror is in default angle；The driving mechanism is connect with the Intelligent Laser transmitter to drive the intelligence
Laser emitter along default linear movement so that the laser selective that the Intelligent Laser transmitter issues be incident upon it is described
First reflecting mirror in three the first reflecting mirrors, first reflecting mirror are used to laser injecting institute by the light passing portion
It states at correspondence first fixed platform in vacuum chamber；
The master control borad and the Intelligent Laser transmitter, three driving mechanisms and the ultrasonic thickness detect
Component communicates to connect respectively, and the thickness distribution information that the ultrasonic thickness detection components will test is uploaded to the master control
Plate, the master control borad control the transmission power of the Intelligent Laser transmitter according to the thickness distribution information, and in completion pair
After the deposition operation of one substrate, controls the driving mechanism and drives the Intelligent Laser transmitter along default linear movement,
So that the laser selective that the Intelligent Laser transmitter issues be incident upon one first in three first reflecting mirrors
Reflecting mirror.
In the intelligent composite material depositing device of the present invention based on ultrasound examination, the upper table of the substrate
Face is provided with Electrostatic Absorption adsorption layer, to enhance the deposition efficiency of composite material.
In the intelligent composite material depositing device of the present invention based on ultrasound examination, on the substrate with institute
State the first fixed platform it is opposite post mask on one side.
In the intelligent composite material depositing device of the present invention based on ultrasound examination, it is arranged on the mask
There are multiple deposition holes in matrix distribution.
In the intelligent composite material depositing device of the present invention based on ultrasound examination, described first is fixed flat
Platform is internally provided with heating component, and the heating component includes the heating element of multiple rectangular array distributions, multiple heating
Element is opposite with multiple deposition hole respectively, and the master control borad is used to control corresponding heating group according to the thickness distribution information
Each heating element of part is heated with corresponding power, wherein the substrate that the average thickness of composite material deposition is big is corresponding
The heating power of heating element be greater than the small substrate of average thickness of composite material deposition.
In the intelligent composite material depositing device of the present invention based on ultrasound examination, the wall of the vacuum chamber
There are three through-holes for upper setting, and the light passing portion includes three quartz glass for being covered on three through holes.
It further include for providing in the intelligent composite material depositing device of the present invention based on ultrasound examination
The gas storage structure of inert gas and vacuum pump for extracting inert gas out；Opened up on the side wall of the vacuum chamber air inlet with
And venthole, the gas storage structure pass through the venthole by the air inlet and the vacuum chamber, the vacuum pump
With the vacuum chamber.
In the intelligent composite material depositing device of the present invention based on ultrasound examination, the ultrasonic thickness
Detection components include ultrasonic wave transmitting probe and ultrasonic wave receiving transducer, and the ultrasonic wave transmitting probe and ultrasonic wave receive
Probe is electrically connected with the master control borad respectively.
The present invention has the beneficial effect of a variety of different composite materials of fast deposition, and due to that can be mentioned by Thickness sensitivity
The accuracy of height control, reduces material consumption.
Detailed description of the invention
Fig. 1 is a kind of structure of the intelligent composite material depositing device based on ultrasound examination in the embodiment of the present invention
Schematic diagram.
Fig. 2 is a kind of part of the intelligent composite material depositing device based on ultrasound examination in the embodiment of the present invention
Structural schematic diagram.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore be not considered as limiting the invention.In addition, term " first ", " second " are only used for
Purpose is described, relative importance is not understood to indicate or imply or implicitly indicates the quantity of indicated technical characteristic.
" first " is defined as a result, the feature of " second " can explicitly or implicitly include one or more feature.?
In description of the invention, the meaning of " plurality " is two or more, unless otherwise specifically defined.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected or can mutually communicate；It can be directly connected, it can also be by between intermediary
It connects connected, can be the connection inside two elements or the interaction relationship of two elements.For the ordinary skill of this field
For personnel, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
Following disclosure provides many different embodiments or example is used to realize different structure of the invention.In order to
Simplify disclosure of the invention, hereinafter the component of specific examples and setting are described.Certainly, they are merely examples, and
And it is not intended to limit the present invention.In addition, the present invention can in different examples repeat reference numerals and/or reference letter,
This repetition is for purposes of simplicity and clarity, itself not indicate between discussed various embodiments and/or setting
Relationship.In addition, the present invention provides various specific techniques and material example, but those of ordinary skill in the art can be with
Recognize the application of other techniques and/or the use of other materials.
Fig. 1 is please referred to, the embodiment of the present invention provides a kind of intelligent composite material depositing device based on ultrasound examination,
It is different for fixing including master control borad, Intelligent Laser transmitter 10, the first reflecting mirror 30, three of a driving mechanism 20, three
First fixed platform 60 of source material target, the second fixed platform 50, for depositing the substrate 70, the vacuum chamber that form composite material
100 and ultrasonic thickness detection components 210.
Wherein, first fixed platform 60, the second fixed platform 50, substrate 70 are all set in the vacuum chamber 100, should
Three the first fixed platforms 60 are set in second fixed platform 50.Second fixed platform 50 is parallel with the substrate 70 and phase
It is right.This three the first fixed platforms 60 are opposite with the predeterminable area of substrate 70 respectively, and vacuum chamber 100 is provided with light passing portion, and second
Reflecting mirror 40 is parallel with first reflecting mirror 10, and the Intelligent Laser transmitter 10 goes out light side with first reflecting mirror 30
To being in default angle, at such as 45 degree of angles.
The ultrasonic thickness detection components 210 include the ultrasonic thickness detection components include ultrasonic wave transmitting probe with
And ultrasonic wave receiving transducer, the ultrasonic wave transmitting probe and ultrasonic wave receiving transducer are electrically connected with the master control borad respectively.
Ultrasonic wave transmitting probe and ultrasonic wave receiving transducer are respectively set in the gap between two neighboring first fixed platform 50.It should
The detection probe of ultrasonic thickness detection components 210 is used to issue ultrasonic wave corresponding with deposition materials or infrasound, thus
Detect the thickness distribution information of the deposition of the composite material on the substrate.Detection probe includes ultrasonic wave or infrasound transmitting
Probe and ultrasonic wave or infrasound receive probe.Heating element is heating film.
Driving mechanism 20 is connect to drive the Intelligent Laser transmitter 10 mobile with the Intelligent Laser transmitter 10.
Wherein, which is to use stepper motor for the driving mechanism of power.
In the present embodiment, there are three 30, three the first fixing seats 60 of the first reflecting mirror for tool, accordingly, the driving mechanism
20 can choose the Intelligent Laser transmitter 10 being moved to a position in three positions, so that the Intelligent Laser
First reflecting mirror 30 being incident upon to the laser selective that transmitter 10 issues in three first reflecting mirrors 30, it is described
Laser for being injected correspondence first fixed platform in the vacuum chamber 100 by the first reflecting mirror 30 by the light passing portion
At 60.
In some embodiments, being somebody's turn to do the intelligent composite material depositing device based on ultrasound examination further includes a master control
Plate, this is stated master control borad and is electrically connected with Intelligent Laser transmitter 10 and driving mechanism 20.The master control borad swashs for controlling the intelligence
The switch of optical transmitting set 10 and the laser for issuing which kind of power, the master control borad drive the intelligence for controlling the driving mechanism 20
Laser emitter 10 is mobile.Master control borad and the Intelligent Laser transmitter, three driving mechanisms and the ultrasonic thickness of convolution
Degree detection components communicate to connect respectively, and the thickness distribution information that the ultrasonic thickness detection components will test is uploaded to described
Master control borad, the master control borad control the transmission power of the Intelligent Laser transmitter according to the thickness distribution information, and complete
After the deposition operation of a pairs of substrate, controls the driving mechanism and the Intelligent Laser transmitter is driven to move along default straight line
It is dynamic so that the laser selective that the Intelligent Laser transmitter issues be incident upon one in three first reflecting mirrors the
One reflecting mirror.
In some embodiments, opposite with the first fixed platform 60 on the substrate 70 to post mask 90 on one side.Mask 90
On be provided with multiple deposition holes in matrix distribution, the steam of the source material target passes through the correspondence of the deposition hole on the substrate 70
Region is deposited to form composite material.
In some embodiments, substrate 70 far from first fixed platform 60 is provided with heating component 80 on one side.
In some embodiments, please simultaneously, multiple in the intelligence of the present invention based on ultrasound examination referring to Fig. 2
In condensation material depositing device, the heating component 80 includes the heating element 81 of multiple rectangular arrays distribution, multiple heating
Element 81 is opposite and corresponding with multiple deposition hole 91 respectively.
The heating component includes the heating element of multiple rectangular array distributions, and multiple heating element is more with this respectively
A deposition hole is opposite, and the master control borad is used to control each heating unit of corresponding heating component according to the thickness distribution information
Part is heated with corresponding power, wherein the big corresponding heating element of substrate of the average thickness of composite material deposition adds
The thermal power substrate small greater than the average thickness of composite material deposition.
In some embodiments, the intelligent composite material depositing device of the present invention based on ultrasound examination
In, there are three through-holes 101 for setting on the wall of vacuum chamber 100, which includes three quartz being covered at three through-holes 101
Glass.
It in some embodiments, further include for providing in the intelligent composite material depositing device based on ultrasound examination
The gas storage structure 120 of inert gas and vacuum pump 130 for extracting inert gas out；It is opened on the side wall of the vacuum chamber 100
If air inlet and venthole, the gas storage structure 120 is connected to by the air inlet with the vacuum chamber 100, the vacuum
Pump 130 is connected to by the venthole with the vacuum chamber 100.
It in some embodiments, further include air pressure sensing in the intelligent composite material depositing device based on ultrasound examination
Device 110, baroceptor 110, the gas storage structure 120, heating component 80 and the vacuum pump 130 respectively with the master control
Plate electrical connection.Specifically, each heating element 81 of the heating component 80 is electrically connected with the master control borad respectively.
In addition, due to correspond to different source material target material depositions when best air pressure be it is different, can lead to
The master control borad is crossed to adjust the air pressure of the indoor inert gas of vacuum, so that deposition effect is best.
In addition, more parts of composite materials of rectangular array distribution can be formed on substrate due to using after mask, lead to
The temperature for controlling corresponding each heating element is crossed, the temperature of substrate each region is not identical when can to deposit, Jin Erke
So that the type for the composite material prepared is richer.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation
What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example
Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the invention.In this specification
In, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (8)
1. a kind of intelligent composite material depositing device based on ultrasound examination, which is characterized in that including master control borad, ultrasonic wave
Thickness sensitivity component, Intelligent Laser transmitter, a driving mechanism, three the first reflecting mirrors, vacuum chamber, three for fixed different
Source material target the first fixed platform and for depositing the substrate for forming composite material；
First fixed platform and substrate are all set in the vacuum chamber, three first fixed platforms respectively with institute
The predeterminable area for stating substrate is opposite, and the vacuum chamber is provided with light passing portion, the Intelligent Laser transmitter and first reflection
The light direction of mirror is in default angle；The driving mechanism is connect with the Intelligent Laser transmitter to drive the Intelligent Laser
Transmitter along default linear movement so that the laser selective that the Intelligent Laser transmitter issues be incident upon described three
First reflecting mirror in first reflecting mirror, first reflecting mirror are used to inject laser by the light passing portion described true
At correspondence first fixed platform in empty room；
The master control borad and the Intelligent Laser transmitter, three driving mechanisms and the ultrasonic thickness detection components
It communicates to connect respectively, the thickness distribution information that the ultrasonic thickness detection components will test is uploaded to the master control borad, institute
The transmission power that master control borad controls the Intelligent Laser transmitter according to the thickness distribution information is stated, and is completed to a base
After the deposition operation of piece, controls the driving mechanism and drive the Intelligent Laser transmitter along default linear movement, so that institute
First reflecting mirror being incident upon with stating the laser selective of Intelligent Laser transmitter sending in three first reflecting mirrors.
2. the intelligent composite material depositing device according to claim 1 based on ultrasound examination, which is characterized in that institute
The upper surface for stating substrate is provided with Electrostatic Absorption adsorption layer, to enhance the deposition efficiency of composite material.
3. the intelligent composite material depositing device according to claim 2 based on ultrasound examination, which is characterized in that institute
It states and opposite with first fixed platform on substrate posts mask on one side.
4. the intelligent composite material depositing device according to claim 3 based on ultrasound examination, which is characterized in that institute
It states and is provided with multiple deposition holes in matrix distribution on mask.
5. the intelligent composite material depositing device according to claim 4 based on ultrasound examination, which is characterized in that institute
It states the first fixed platform and is internally provided with heating component, the heating component includes the heating unit of multiple rectangular array distributions
Part, multiple heating element is opposite with multiple deposition hole respectively, and the master control borad is used for according to the thickness distribution information control
The each heating element for making corresponding heating component is heated with corresponding power, wherein the average thickness of composite material deposition
Spend the heating power of the corresponding heating element of the big substrate substrate small greater than the average thickness of composite material deposition.
6. the intelligent composite material depositing device according to claim 1 based on ultrasound examination, which is characterized in that institute
Stating setting on the wall of vacuum chamber, there are three through-hole, the light passing portion includes three quartzy glass for being covered on three through holes
Glass.
7. the intelligent composite material depositing device according to claim 6 based on ultrasound examination, which is characterized in that also
Including the gas storage structure for providing inert gas and the vacuum pump for extracting inert gas out；On the side wall of the vacuum chamber
Air inlet and venthole are opened up, for the gas storage structure by the air inlet and the vacuum chamber, the vacuum pump is logical
Cross the venthole and the vacuum chamber.
8. the intelligent composite material depositing device according to claim 1 based on ultrasound examination, which is characterized in that institute
Stating ultrasonic thickness detection components includes ultrasonic wave transmitting probe and ultrasonic wave receiving transducer, the ultrasonic wave transmitting probe with
And ultrasonic wave receiving transducer is electrically connected with the master control borad respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811188865.XA CN109182980A (en) | 2018-10-12 | 2018-10-12 | Intelligent composite material depositing device based on ultrasound examination |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811188865.XA CN109182980A (en) | 2018-10-12 | 2018-10-12 | Intelligent composite material depositing device based on ultrasound examination |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109182980A true CN109182980A (en) | 2019-01-11 |
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ID=64948254
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811188865.XA Withdrawn CN109182980A (en) | 2018-10-12 | 2018-10-12 | Intelligent composite material depositing device based on ultrasound examination |
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| Country | Link |
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| CN (1) | CN109182980A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112923878A (en) * | 2021-01-19 | 2021-06-08 | 宁波江丰电子材料股份有限公司 | Thickness evaluation method of strip-shaped target assembly |
-
2018
- 2018-10-12 CN CN201811188865.XA patent/CN109182980A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112923878A (en) * | 2021-01-19 | 2021-06-08 | 宁波江丰电子材料股份有限公司 | Thickness evaluation method of strip-shaped target assembly |
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Application publication date: 20190111 |
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