CN109182965A - Utilize AC field driving and the System and method for of directed transport micro-nano granules - Google Patents
Utilize AC field driving and the System and method for of directed transport micro-nano granules Download PDFInfo
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- CN109182965A CN109182965A CN201811055855.9A CN201811055855A CN109182965A CN 109182965 A CN109182965 A CN 109182965A CN 201811055855 A CN201811055855 A CN 201811055855A CN 109182965 A CN109182965 A CN 109182965A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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Abstract
The present invention provides it is a kind of using AC field driving and directed transport micro-nano granules system, the interdigital electrode of the function generator and realization micro-nano granules directed transport that are regulated and controled including the velocity magnitude to micro-nano granules, two output ends of the function generator are connect with the both ends of the interdigital electrode respectively, and the function generator is to the interdigital electrode output voltage and the adjustable alternating current of frequency.The present invention also provides it is a kind of using AC field driving and directed transport micro-nano granules method.The beneficial effects of the present invention are: using the velocity magnitude for adjusting the means such as voltage, frequency, the size of interdigital electrode regulation micro-nano granules, regulate and control the direction of motion of micro-nano granules using the shape of different interdigital electrodes, it can according to need and selected, control mode is not only enriched, but also expands application range.
Description
Technical field
The present invention relates to micro-nano granules more particularly to a kind of utilization AC field driving and directed transport micro-nano granules
System and method for.
Background technique
The meeting when asymmetric surface chemical reaction occurring or by external force of the micro-nano granules of certain special preparations
Autogenic movement, this micro-nano granules are also referred to as " micro-nano robot ".In the research and practical application of micro-nano robot
In, people pay close attention to and need to control two crucial factors: velocity magnitude and its direction of motion.
The driving method of micro-nano robot is sound, light, electricity, magnetic, heat, chemical reaction etc..Wherein, chemical reaction is used as one
The driving method of kind contact, limits its scope of application.Sound and the heat Shortcomings in terms of direction controlling.Since object is to light
Absorption and translucency the reason of, so the applicability of light is restricted.Therefore, movement electrically and magnetically and direction controlling are natural
It is concerned by people.Magnetic drives more superior with the performance of direction controlling compared to electricity.But due to the material to magnetic response
Expect limited amount, naturally also allows for its application range and be restricted.
Therefore, how to provide a kind of scheme that transports of micro-nano granules that application range is wider is those skilled in the art institute
Technical problem urgently to be resolved.
Summary of the invention
In order to solve the problems in the prior art, the present invention provides a kind of drives of utilization AC field that application range is wider
Dynamic and directed transport micro-nano granules System and method fors.
The present invention provides a kind of using AC field driving and the system of directed transport micro-nano granules, including to micro-nano
The interdigital electricity of the directed transport of function generator and realization micro-nano granules that the velocity magnitude of rice grain and direction are regulated and controled
Two output ends of pole, the function generator are connect with the both ends of the interdigital electrode respectively, and the function generator is to institute
State interdigital electrode output voltage and the adjustable alternating current of frequency.
As a further improvement of the present invention, the interdigital electrode is rectangular electrode, inclined electrode, appointing in mosquito-repellent incense electrode
It anticipates one kind.
As a further improvement of the present invention, the interdigital width of the interdigital electrode is 5-50 μm, and interdigital gap is 5-
100 μm。
The present invention also provides a kind of using AC field driving and the method for directed transport micro-nano granules, including following
Step:
S1, preparation interdigital electrode, determine the direction of micro-nano granules directed transport；
S2, superior function generator is connected at the both ends of the interdigital electrode prepared；
S3, the function generator apply voltage and the adjustable alternating current of frequency to the interdigital electrode, are applied to by adjusting
The voltage and frequency of alternating current in the interdigital electrode regulate and control the velocity magnitude of micro-nano granules, to realize micro-nano
The orientation of rice grain conveys.
As a further improvement of the present invention, step S1 includes following sub-step:
S11, the shape for designing interdigital electrode simultaneously prepare mask plate；
S12, it successively developed a film in substrate, spin coating, front baking, exposure, dry and develop afterwards, needs can be obtained in substrate
Electrode pattern；
S13, the method by electron beam evaporation plating, deposit certain thickness conductive layer in substrate, including but not limited to metal, lead
Metal oxide etc.；
Photoresist on S14, removal substrate, obtains the interdigital electrode of specific dimensions and shape.
As a further improvement of the present invention, in step s 11, the shape for designing interdigital electrode is rectangular electrode, inclination
Any one in electrode, mosquito-repellent incense electrode.
As a further improvement of the present invention, in step s3, the orientation transmission process of micro-nano granules are as follows: utilize fluid
Micro-nano granules, are transported to the middle line of interdigital electrode by the special flow regime in the interdigital electrode, subsequently, as micro-nano
Rice grain surface electro kinetic effect special under AC field, micro-nano granules movement is got up, and directionally moves to fork
Refer to electrode roots.
As a further improvement of the present invention, in step s3, the function generator applies to the interdigital electrode
Frequency range is between 1 kHz to 100 kHz.
As a further improvement of the present invention, in step s3, the function generator applies to the interdigital electrode
Frequency is 10 kHz.
The beneficial effects of the present invention are: through the above scheme, using the shape of interdigital electrode as the means of direction controlling,
The directed transport for non magnetic micro-nano granules is realized, the range that micro-nano granules transport has been expanded；Using adjust voltage,
The means such as frequency, the size of interdigital electrode regulate and control the velocity magnitude of micro-nano granules, are adjusted using the shape of different interdigital electrodes
The direction of motion for controlling micro-nano granules, can according to need and selected, not only enrich control mode, but also expand application
Range.
Detailed description of the invention
Fig. 1 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules method interdigital electrode
Preparation flow figure.
Fig. 2 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules system rectangular electrode
Schematic diagram.
Fig. 3 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules system inclined electrode
Schematic diagram.
Fig. 4 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules system mosquito-repellent incense electrode
Schematic diagram.
Fig. 5 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules system schematic diagram.
Fig. 6 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules method directed transport mistake
Cheng Tu.
Fig. 7 is that a kind of fluid orientation using AC field driving and the method for directed transport micro-nano granules of the present invention is defeated
Transport schematic diagram.
Fig. 8 is that a kind of induced charge using AC field driving and the method for directed transport micro-nano granules of the present invention is electric
The schematic diagram of swimming directed transport particle.
Fig. 9 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules method particle in difference
Status diagram under frequency.
Figure 10 be the present invention it is a kind of using AC field driving and directed transport micro-nano granules method three kinds of electrodes
On directed transport schematic diagram.
Figure 11 is that a kind of particle using AC field driving and the method for directed transport micro-nano granules of the present invention is average
The relational graph of speed and frequency.
Figure 12 is that a kind of particle using AC field driving and the method for directed transport micro-nano granules of the present invention is average
The relational graph of speed and voltage.
Figure 13 is that a kind of particle using AC field driving and the method for directed transport micro-nano granules of the present invention is average
The relational graph of speed and rectangular electrode gap.
Specific embodiment
The invention will be further described for explanation and specific embodiment with reference to the accompanying drawing.
As shown in figure 5, it is a kind of using AC field driving and the system of directed transport micro-nano granules, including to micro-nano
The interdigital electrode 1 of the directed transport of function generator 2 and realization micro-nano granules that the velocity magnitude of particle is regulated and controled, it is described
Two output ends of function generator 2 are connected with the both ends of the interdigital electrode 1 respectively, and the function generator 2 is to described
1 output voltage of interdigital electrode and the adjustable alternating current of frequency.
As shown in Figures 2 to 4, the interdigital electrode 1 is rectangular electrode, inclined electrode, any one in mosquito-repellent incense electrode.
As shown in Figures 2 to 4, the interdigital width of the interdigital electrode 1 is 5-50 μm, and interdigital gap is 5-100 μm, figure
The unit of 2 size marking into Fig. 4 is μm.
It is provided by the invention it is a kind of using AC field driving and directed transport micro-nano granules system, utilize interdigital electricity
This special electrode structure in pole 1 forms the confinement of fluid and electric field, realizes micro-nano granules by the structure of interdigital electrode 1
Directed transport.By changing the shape of interdigital electrode 1, the voltage and frequency of the alternating current being applied in interdigital electrode 1 are adjusted
Can velocity magnitude to micro-nano granules and direction regulate and control.
The present invention also provides a kind of using AC field driving and the method for directed transport micro-nano granules, including following
Step:
S1, preparation interdigital electrode 1, determine the direction of micro-nano granules directed transport；
S2, superior function generator 2 is connected at the both ends of the interdigital electrode 1 prepared；
S3, the function generator 2 apply voltage and the adjustable alternating current of frequency to the interdigital electrode 1, are applied by adjusting
The voltage and frequency of alternating current in the interdigital electrode 1 regulate and control the velocity magnitude of micro-nano granules, to realize
The orientation of micro-nano granules conveys.
It is provided by the invention it is a kind of using AC field driving and directed transport micro-nano granules method, utilize photoetching skill
Art prepares interdigital electrode 1, and interdigital electrode 1 needs to consider the direction that transports of micro-nano granules in the design process, i.e., will be micro-nano
Particle is transported to where；It is also required to consider the size of interdigital electrode 1, to adjust the speed transported.By being applied in interdigital electrode 1
Add alternating current, the driving of micro-nano granules may be implemented in the voltage and frequency that adjust alternating current.Direction will be transported mutually to tie with driving
Close the directed transport that micro-nano granules may be implemented.
A method of using AC field driving and directed transport micro-nano granules, specifically includes the following steps:
1, the production of interdigital electrode
Before using optical graving for interdigital electrode 1, needs to design the shape of interdigital electrode 1 and prepare mask plate.Obtain exposure mask
After plate, according to the process flow of photoetching, is successively developed a film, spin coating, front baking, exposure, dries and develop afterwards, obtained in substrate
The electrode pattern needed, as shown in Figure 1.Then, by the method for electron beam evaporation plating, conductive layer is deposited in substrate, such as 100
The gold of nm.The photoresist in substrate is finally removed, the golden interdigital electrode 1 of specific dimensions and shape can be obtained.
As shown in Figures 2 to 4, the schematic diagram of the three kinds of interdigital electrodes 1 of different shapes designed for the present invention is followed successively by straight
Corner electrode (Fig. 2), 85 ° of electrodes (Fig. 3) of inclination and mosquito-repellent incense electrode (Fig. 4), wherein it is 20 μ that the size of every electrode, which is all width,
m。
2, the system using AC field driving and directed transport micro-nano granules is built
Fig. 5 is the device figure of the system using AC field driving and directed transport micro-nano granules, and 1 both ends of interdigital electrode are led to
Cross the conducting wire that welding is drawn and be connected to function generator 2(to generate the ac signal of specific frequency and voltage), by micro-
Camera 4 on mirror 5 carries out video record to the movement of micro-nano granules, can be watched by computer 3, while can be with
Control the various parameters of video.
3, the directed transport of micro-nano granules
Micro-nano granules used in the present embodiment are the two of 3 μ m diameters that half is vapor-deposited with 50 nm Titanium (Ti) layers
Silica (SiO2) ball.The different bead of this both ends ingredient is referred to as Janus ball (Janus particle).Fig. 6 show micro-nano
The process that grain orientation transports, wherein the first step utilizes special flow regime of the fluid in interdigital electrode 1, and bead is transported to
The middle line of interdigital electrode 1.Subsequently, as the surface electro kinetic effect that Janus particle is special under AC field, moves
The root for moving to interdigital electrode 1 come, and oriented.This two steps details is described in detail in Fig. 7,8 respectively.
It is the schematic diagram of interdigital electrode 1 in Fig. 7 shown in (a).There is defined " ends 11 " of interdigital electrode 1, " root
Portion 12 " and " middle line ", these definition can be convenient the subsequent introduction to its drive mechanism.(b) is along figure (a) transversal in Fig. 7
Obtained sectional view.In Fig. 7 shown in (b), after applying alternating current to interdigital electrode 1, since 1 surface of interdigital electrode is charged
Interaction between lotus and electric field generates the electroosmotic flow to 1 middle line of interdigital electrode.Work of the Janus particle by the electroosmotic flow
With the midline that can gather 1 top of interdigital electrode, the directed transport work of the first step is completed.
Under suitable frequency, SiO2- Ti Janus ball can generate the effect of entitled " electric osmose of inducting electrophoresis " (referred to as ICEP)
It should and travel forward.As shown in figure 8, for the schematic diagram for electric osmose electrophoresis directed transport particle of inducting.Fig. 8 (a) is Janus single
Induct electric osmose electrophoresis drive mechanism of the grain under electric field action, Ti-SiO2Ball polarizes under electric field action, because of the pole of titanium
Change ability is stronger than silica, therefore induced charge quantity caused by titanium hemisphere is more than silica hemisphere, accordingly attracts liquid
Xenogenesis amount of charge in body is also more, therefore bigger than silica hemisphere in the electroosmotic flow of inducting that titanium hemisphere generates, in turn
Net active force is generated, driving particle is moved far from Ti layers；Fig. 8 (b) is the direction of motion of the Janus particle in interdigital electrode 1,
It is to move in such a way that silica is preceding, but Janus particle is to electrode that Janus particle moves all in interdigital electrode 1
Which end motion is then random；Fig. 8 (c) is that Janus particle can turn to when moving to 1 end 11 of interdigital electrode, Yan Yuanlu
Return, Janus particle 1 end 11 of interdigital electrode steering so that the final motion result of Janus particle be gather it is interdigital
The root 12 of electrode 1, ensure that directed transport；Fig. 8 (d) is that Janus particle is accumulated in 1 root 12 of interdigital electrode, also
It is the terminal that grain orientation transports, realizes the directed transport of Janus particle.
4, experiment parameter is to SiO2The influence of-Ti ball directed transport
In order to realize the movement of particle, electric field frequency range is between 1 kHz to 100 kHz applied in experiment, with 10
KHz effect is best.As shown in figure 9, particle can move when frequency is 10 kHz；And when frequency is increased to 100 kHz or more
When, particle can gather electrode edge.Under more low frequency (such as 1kHz or so), particle is rotated in electrode edge, can not be oriented
Transport.Therefore the frequency in experiment is adjusted between 1 kHz to 100 kHz.
Three kinds of electrodes in experiment discovery Fig. 2 to 4 can realize the purpose of directed transport, such as Figure 10 using the above method
It is shown.
5, experiment parameter is to SiO2The influence of-Ti ball speed
It ensure that SiO2After the transporting of-Ti ball, can by adjust the voltage of alternating current, frequency, the size of interdigital electrode 1 come
Control the speed transported.
As shown in figure 11, at right angle interdigital electrode, 20 μm of interdigital width, 30 μm of interdigital gap, the peak peak of alternating current
Particle velocity when threshold voltage is 1 V, under different frequency.It can be seen from the figure that the higher particle speed of frequency is smaller.
As shown in figure 12, in right angle interdigital electrode, 20 μm of interdigital width, 30 μm of interdigital gap, the frequency of alternating current
Particle velocity when for 10 kHz, under different voltages.It can be seen from the figure that the higher particle speed of voltage is bigger.
As shown in figure 13, in right angle interdigital electrode, 2 V of voltage, frequency 10kHz, interdigital gap is respectively 10 μm,
Corresponding speed at 30 μm and 50 μm.It can be seen from the figure that get over bulky grain speed smaller in interdigital gap.
It is provided by the invention it is a kind of using AC field driving and directed transport micro-nano granules System and method for, have
Following advantages:
1, using the shape of interdigital electrode 1 as the means of direction controlling, i.e., direction control has been reached by way of fluid confinement
The purpose of system realizes the directed transport for non magnetic micro-nano granules, has expanded the range that micro-nano granules transport；
It 2, in practice can be with using the velocity magnitude for the gap size control micro-nano granules for adjusting voltage, frequency, interdigital electrode 1
It is selected as needed, not only enriches control mode, but also expand application range.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (9)
1. it is a kind of using AC field driving and directed transport micro-nano granules system, it is characterised in that: including to micro-nano
The interdigital electrode of the directed transport of function generator and realization micro-nano granules that the velocity magnitude of particle is regulated and controled, the letter
Two output ends of number generator are connect with the both ends of the interdigital electrode respectively, and the function generator is to the interdigital electrode
Output voltage and the adjustable alternating current of frequency.
2. according to claim 1 existed using AC field driving and the system of directed transport micro-nano granules, feature
In: the interdigital electrode be rectangular electrode, inclined electrode, any one in mosquito-repellent incense type electrode.
3. according to claim 1 existed using AC field driving and the system of directed transport micro-nano granules, feature
In: the interdigital width of the interdigital electrode is 5-50 μm, and interdigital gap is 5-100 μm.
4. it is a kind of using AC field driving and directed transport micro-nano granules method, which comprises the following steps:
S1, preparation interdigital electrode, determine the direction of micro-nano granules directed transport；
S2, superior function generator is connected at the both ends of the interdigital electrode prepared；
S3, the function generator apply voltage and the adjustable alternating current of frequency to the interdigital electrode, are applied to by adjusting
The voltage and frequency of alternating current in the interdigital electrode regulate and control the velocity magnitude of micro-nano granules, to realize micro-nano
The orientation of rice grain conveys.
5. according to claim 4 existed using AC field driving and the system of directed transport micro-nano granules, feature
In step S1 includes following sub-step:
S11, the shape for designing interdigital electrode simultaneously prepare mask plate；
S12, it successively developed a film in substrate, spin coating, front baking, exposure, dry and develop afterwards, needs can be obtained in substrate
Electrode pattern；
S13, the method by electron beam evaporation plating, deposit certain thickness conductive layer in substrate；
Photoresist on S14, removal substrate, obtains the interdigital electrode of specific dimensions and shape.
6. according to claim 5 existed using AC field driving and the system of directed transport micro-nano granules, feature
In: in step s 11, the shape of interdigital electrode is designed as any one in rectangular electrode, inclined electrode, mosquito-repellent incense electrode.
7. according to claim 4 existed using AC field driving and the system of directed transport micro-nano granules, feature
In, in step s3, the orientation transmission process of micro-nano granules are as follows: utilize special flowing shape of the fluid in the interdigital electrode
Micro-nano granules are transported to the middle line of interdigital electrode by state；Subsequently, as the surface that micro-nano granules are special under AC field
Electro kinetic effect, micro-nano granules movement is got up, and directionally moves to interdigital electrode root.
8. according to claim 4 existed using AC field driving and the system of directed transport micro-nano granules, feature
In: in step s3, the frequency range that the function generator applies to the interdigital electrode is between 1 kHz to 100 kHz.
9. according to claim 4 existed using AC field driving and the system of directed transport micro-nano granules, feature
In: in step s3, the frequency that the function generator applies to the interdigital electrode is 10 kHz.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811055855.9A CN109182965B (en) | 2018-09-11 | 2018-09-11 | System and method for driving and directionally conveying micro-nano particles by using alternating current electric field |
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| CN201811055855.9A CN109182965B (en) | 2018-09-11 | 2018-09-11 | System and method for driving and directionally conveying micro-nano particles by using alternating current electric field |
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| CN110333604A (en) * | 2019-05-31 | 2019-10-15 | 暨南大学 | A kind of controllable full light transporting belt system and its regulation method for micro-nano particle |
| CN111621747A (en) * | 2019-02-28 | 2020-09-04 | 湖南早晨纳米机器人有限公司 | Preparation method of nano drug-loaded robot |
| CN114307785A (en) * | 2021-12-30 | 2022-04-12 | 华南师范大学 | Method capable of accurately controlling electric response behavior of particles in emulsion droplets and emulsion system |
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| CN111621747A (en) * | 2019-02-28 | 2020-09-04 | 湖南早晨纳米机器人有限公司 | Preparation method of nano drug-loaded robot |
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| CN114307785B (en) * | 2021-12-30 | 2023-03-14 | 华南师范大学 | Method capable of accurately controlling electric response behavior of particles in emulsion droplets and emulsion system |
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| CN109182965B (en) | 2020-08-14 |
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