CN109174819A - A kind of dust collector for microelectronic device - Google Patents

A kind of dust collector for microelectronic device Download PDF

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Publication number
CN109174819A
CN109174819A CN201810979483.2A CN201810979483A CN109174819A CN 109174819 A CN109174819 A CN 109174819A CN 201810979483 A CN201810979483 A CN 201810979483A CN 109174819 A CN109174819 A CN 109174819A
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CN
China
Prior art keywords
box
dust
wall
welded
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810979483.2A
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Chinese (zh)
Other versions
CN109174819B (en
Inventor
吴胜松
叶桂如
吴胜琴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Xingyu Productivity Promotion Center Co Ltd
Original Assignee
Anhui Xingyu Productivity Promotion Center Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Anhui Xingyu Productivity Promotion Center Co Ltd filed Critical Anhui Xingyu Productivity Promotion Center Co Ltd
Priority to CN201810979483.2A priority Critical patent/CN109174819B/en
Publication of CN109174819A publication Critical patent/CN109174819A/en
Application granted granted Critical
Publication of CN109174819B publication Critical patent/CN109174819B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/10Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12Brushes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/30Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05FSTATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00Carrying-off electrostatic charges
    • H05F3/06Carrying-off electrostatic charges by means of ionising radiation

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Elimination Of Static Electricity (AREA)
  • Cleaning In General (AREA)

Abstract

The invention discloses a kind of dust collector for microelectronic device, including rectangular box, the same tapered box is welded at the top of the two sides inner wall of the rectangular box, hollow cylinder is welded on the inner wall of the tapered box, the two sides of the hollow cylinder are fixedly installed with ion generator and dust catcher respectively, it is welded with circular slab on the inner wall of the tapered box, is welded with the same transverse slat on the two sides inner wall of the rectangular box.The configuration of the present invention is simple, ion generator can produce ion wind and blow to the surface of microelectronic component by ion wind gun, the dust that hairbrush can not fall ion wind brushes off, dust catcher is siphoned away dust by cleaner head and dust-absorbing box simultaneously, ion wind gun is allowed to concentrate and closely blow to ion wind on the surface of microelectronic component, the effect destaticed is good, and cleaner head can short distance the dust for siphoning away hairbrush and ion wind gun and being removed from microelectronic component, dust can be siphoned away in time, secondary pollution is avoided, it is easy to use.

Description

A kind of dust collector for microelectronic device
Technical field
The present invention relates to microelectronics dedusting technology field more particularly to a kind of dust collector for microelectronic device.
Background technique
A kind of dust collector for microelectronic device of disclosure of the invention that notification number is CN206443651U, including support board, The periphery of support board is equipped with annular sleeve, and the body of annular sleeve is hollow structure, opens up several ventilations on the inside of the body of annular sleeve The other end in hole, one end of annular sleeve connecting conduit, conduit connects dust catcher;Ion wind gun is installed in the middle of support board, Ion wind gun connects ion generator.It in the present invention, is buckled on chip by annular sleeve, forms a more closed space, Dust is siphoned away by the venthole of periphery, and dust is avoided to descend slowly and lightly, and improves efficiency of dust collection.
But the ion wind of the dust collector for microelectronic device is to blow to microelectronic component from top by fan, distance compared with Far, will cause blow to microelectronic device surface ion wind it is more dispersed, cause the effect destaticed bad, and suction inlet distance Dust farther out, cannot be siphoned away in time, will cause secondary pollution by the intermediate region of microelectronic component, so it is proposed that a kind of micro- Electronic device dust-extraction unit, to solve the problems, such as above-mentioned be previously mentioned.
Summary of the invention
The purpose of the present invention is to solve disadvantages existing in the prior art, and a kind of microelectronic component dedusting proposed Device.
To achieve the goals above, present invention employs following technical solutions:
A kind of dust collector for microelectronic device, including rectangular box, the two sides inner wall top of the rectangular box are welded with same A tapered box, is welded with hollow cylinder on the inner wall of the tapered box, the two sides of the hollow cylinder be fixedly installed with respectively from Electronic generator and dust catcher are welded with circular slab on the inner wall of the tapered box, are welded on the two sides inner wall of the rectangular box The same transverse slat, the side of the transverse slat slidably connect movable plate, offer through-hole on the two sides inner wall of the rectangular box, The through-hole is located at the side of transverse slat, and elastic string is slidably connected on the inner wall of the through-hole, and one end of the elastic string is run through Through-hole simultaneously extends in rectangular box, and two elastic strings one end close to each other is connected with the two sides of movable plate respectively, the shifting The top of movable plate and the bottom of circular slab are welded with the same tension spring, and the two sides of the movable plate are fixedly installed with divided flow box respectively And dust-absorbing box, it is fixedly installed with fan in the divided flow box, the bottom of the divided flow box and dust-absorbing box is fixedly installed with more respectively A symmetrically arranged ion wind gun and cleaner head, the ion wind gun and cleaner head are connected with divided flow box and dust-absorbing box respectively, The top of the divided flow box and dust-absorbing box is fixedly connected with the first bourdon tube and second spring pipe respectively, first bourdon tube and Second spring pipe is connected with divided flow box and dust-absorbing box respectively, and the top of first bourdon tube and second spring pipe runs through round The top of shape plate and the top for extending to circular slab, first bourdon tube and second spring pipe has been respectively fixedly connected with ion wind The top of pipe and sweep-up pipe, the ion air hose and sweep-up pipe extends through the two sides inner wall of hollow cylinder and sends out respectively with ion The air outlet of raw device and the air inlet of dust catcher are threadedly coupled.
Preferably, the bottom of the rectangular box is fixedly installed with sealing strip, and the sealing strip is soft materials.
Preferably, the side of the transverse slat is welded with guide rail, and the side of the movable plate is welded with sliding block, the sliding block with Guide rail is slidably connected.
Preferably, one end that two elastic strings are located remotely from each other is fixedly connected to pull ring, and the pull ring connects with rectangular box Touching.
Preferably, the bottom of the movable plate is fixedly installed with brush, and the bottom of the brush is fixedly installed with hairbrush.
Preferably, the side of the rectangular box offers rectangular opening, is fixedly installed on the inner wall of the rectangular opening transparent Window.
Compared with prior art, the beneficial effects of the present invention are: microelectronic component is placed in rectangular box, sealing strip can To separate rectangular box and the external world, start ion generator and dust catcher, ion generator can produce ion wind and by from Sub- air hose and the first bourdon tube are blown into divided flow box, and ion wind can be blowed to the table of microelectronic component by fan by ion wind gun Face, pull ring can drive ion wind gun and cleaner head to carry out transverse shifting, and movable plate can be with electric brush to microelectronic component Surface cleared up, the dust that ion wind can not be fallen brushes off, while dust catcher will be grey by cleaner head and dust-absorbing box Dirt siphons away.
The configuration of the present invention is simple, ion generator can produce ion wind and blow to microelectronic component by ion wind gun Surface, the dust that hairbrush can not fall ion wind brush off, while dust catcher is siphoned away dust by cleaner head and dust-absorbing box, Ion wind gun is allowed to concentrate and closely blow to ion wind on the surface of microelectronic component, the effect destaticed is good, and Cleaner head can short distance the dust for siphoning away hairbrush and ion wind gun and being removed from microelectronic component, dust can be inhaled in time It walks, avoids secondary pollution, it is easy to use.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of dust collector for microelectronic device proposed by the present invention;
Fig. 2 is a kind of structural schematic diagram of the transverse slat of dust collector for microelectronic device proposed by the present invention;
Fig. 3 is a kind of main view of dust collector for microelectronic device proposed by the present invention;
Fig. 4 is a kind of side view of the movable plate of dust collector for microelectronic device proposed by the present invention;
Fig. 5 is a kind of side view of the divided flow box of dust collector for microelectronic device proposed by the present invention;
Fig. 6 is a kind of side view of the dust-absorbing box of dust collector for microelectronic device proposed by the present invention.
In figure: 1 sealing strip, 2 rectangular box, 3 elastic strings, 4 guide rails, 5 transverse slats, 6 movable plates, 7 first bourdon tubes, 8 circular slabs, 9 conical plates, 10 ion generators, 11 dust catchers, 12 sweep-up pipes, 13 second spring pipes, 14 tension springs, 15 divided flow boxes, 16 ion winds Rifle, 17 brushs, 18 cleaner heads, 19 dust-absorbing box, 20 transparency windows, 21 hollow cylinders, 22 sliding blocks, 23 hairbrush, 24 ion air hoses.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
Referring to Fig.1-6, a kind of dust collector for microelectronic device, including rectangular box 2, the two sides inner wall top weldering of rectangular box 2 It is connected to the same tapered box 9, hollow cylinder 21 is welded on the inner wall of tapered box 9, the two sides of hollow cylinder 21 are fixed respectively to pacify Equipped with ion generator 10 and dust catcher 11, it is welded with circular slab 8 on the inner wall of tapered box 9, is welded on the two sides inner wall of rectangular box 2 It is connected to the same transverse slat 5, the side of transverse slat 5 slidably connects movable plate 6, offers through-hole on the two sides inner wall of rectangular box 2, Through-hole is located at the side of transverse slat 5, and elastic string 3 is slidably connected on the inner wall of through-hole, and one end of elastic string 3 through through-hole and extends To rectangular box 2, two elastic strings 3 one end close to each other is connected with the two sides of movable plate 6 respectively, the top of movable plate 6 It is welded with the same tension spring 14 with the bottom of circular slab 8, the two sides of movable plate 6 are fixedly installed with divided flow box 15 and dust-absorbing box respectively 19, it is fixedly installed with fan in divided flow box 15, the bottom of divided flow box 15 and dust-absorbing box 19 is fixedly installed with respectively multiple symmetrically to be set The ion wind gun 16 and cleaner head 18 set, ion wind gun 16 and cleaner head 18 are connected with divided flow box 15 and dust-absorbing box 19 respectively, The top of divided flow box 15 and dust-absorbing box 19 is fixedly connected with the first bourdon tube 7 and second spring pipe 13,7 He of the first bourdon tube respectively Second spring pipe 13 is connected with divided flow box 15 and dust-absorbing box 19 respectively, and the top of the first bourdon tube 7 and second spring pipe 13 is equal Through circular slab 8 and extend to the top of circular slab 8, the top of the first bourdon tube 7 and second spring pipe 13 is respectively fixedly connected with There are an ion air hose 24 and sweep-up pipe 12, the top of ion air hose 24 and sweep-up pipe 12 extends through the two sides inner wall of hollow cylinder 21 And be threadedly coupled respectively with the air inlet of the air outlet of ion generator 10 and dust catcher 11, microelectronic component is placed on rectangle In box 2, sealing strip 1 can be separated rectangular box 2 with the external world, start ion generator 10 and dust catcher 11, ion generator 10 It can produce ion wind and blown into divided flow box 15 by ion air hose 24 and the first bourdon tube 7, fan can lead to ion wind The surface that ion wind gun 16 blows to microelectronic component is crossed, pull ring can drive ion wind gun 16 and cleaner head 18 to carry out lateral shifting It is dynamic, and movable plate 6 can be cleared up with surface of the electric brush 23 to microelectronic component, the dust that ion wind can not be fallen It brushes off, while dust catcher 11 is siphoned away dust by cleaner head 18 and dust-absorbing box 19, the configuration of the present invention is simple, ion generator 10 It can produce ion wind and blow to the surface of microelectronic component by ion wind gun 16, what hairbrush 23 can not fall ion wind Dust brushes off, while dust catcher 11 is siphoned away dust by cleaner head 18 and dust-absorbing box 19, and ion wind gun 16 is concentrated And closely blow to ion wind on the surface of microelectronic component, the effect destaticed is good, and cleaner head 18 can short distance The dust that hairbrush 23 and ion wind gun 16 are removed from microelectronic component is siphoned away, dust can be siphoned away in time, avoid secondary pollution, It is easy to use.
In the present invention, the bottom of rectangular box 2 is fixedly installed with sealing strip 1, and sealing strip 1 is soft materials, the side of transverse slat 5 It is welded with guide rail 4, the side of movable plate 6 is welded with sliding block 22, and sliding block 22 is slidably connected with guide rail 4, and two elastic strings 3 are mutually remote From one end be fixedly connected to pull ring, pull ring is in contact with rectangular box 2, and the bottom of movable plate 6 is fixedly installed with brush 17, brush The bottom of disk 17 is fixedly installed with hairbrush 23, and the side of rectangular box 2 offers rectangular opening, is fixedly installed on the inner wall of rectangular opening Microelectronic component is placed in rectangular box 2 by transparency window 20, and sealing strip 1 can separate rectangular box 2 with the external world, starts ion Generator 10 and dust catcher 11, ion generator 10 can produce ion wind and blown by ion air hose 24 and the first bourdon tube 7 Into in divided flow box 15, ion wind can be blowed to the surface of microelectronic component by fan by ion wind gun 16, and pull ring can drive Ion wind gun 16 and cleaner head 18 carry out transverse shifting, and movable plate 6 can with electric brush 23 to the surface of microelectronic component into Row cleaning, the dust that ion wind can not be fallen brush off, while dust catcher 11 passes through cleaner head 18 and dust-absorbing box 19 for dust It siphons away, the configuration of the present invention is simple, ion generator 10 can produce ion wind and blow to microelectronic component by ion wind gun 16 Surface, the dust that hairbrush 23 can not fall ion wind brushes off, while dust catcher 11 passes through cleaner head 18 and dust-absorbing box 19 Dust is siphoned away, allows ion wind gun 16 to concentrate and closely blow to ion wind on the surface of microelectronic component, except quiet Electricity effect it is good, and cleaner head 18 can short distance the ash for siphoning away hairbrush 23 and ion wind gun 16 and being removed from microelectronic component Dirt can in time siphon away dust, avoid secondary pollution, easy to use.
Working principle: when in use, microelectronic component being placed in rectangular box 2, and sealing strip 1 is by rectangular box 2 and extraneous It separates, prevents extraneous air from entering in rectangular box 2, starting ion generator 10 and dust catcher 11, ion generator 10 can produce Raw ion wind is simultaneously blown into divided flow box 15 by ion air hose 24 and the first bourdon tube 7, and ion wind is passed through ion wind gun by fan 16 blow to the surface of microelectronic component, pull pull ring, and drawing clitellum dynamic elasticity rope 3 carries out transverse shifting, and elastic string 3 drives movable plate 6 carry out transverse shifting, and movable plate 6 drives ion wind gun 16 and cleaner head 18 to carry out transverse shifting, and movable plate 6 will drive hairbrush 23 carry out transverse shifting, and hairbrush 23 can clear up the surface of microelectronic component, the dust that ion wind can not be fallen It brushes off, while dust catcher 11 is siphoned away dust by cleaner head 18 and dust-absorbing box 19, ion wind gun 16 is concentrated and closely Distance blows to ion wind on the surface of microelectronic component, the effect destaticed is good, and cleaner head 18 can short distance siphon away The dust that hairbrush 23 and ion wind gun 16 are removed from microelectronic component, dust can be siphoned away, avoid secondary pollution in time, be used It is convenient.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.

Claims (6)

1. a kind of dust collector for microelectronic device, including rectangular box (2), which is characterized in that the two sides inner wall of the rectangular box (2) Top is welded with the same tapered box (9), is welded with hollow cylinder (21), the open circles on the inner wall of the tapered box (9) The two sides of column (21) are fixedly installed with ion generator (10) and dust catcher (11) respectively, weld on the inner wall of the tapered box (9) It is connected to circular slab (8), is welded with the same transverse slat (5) on the two sides inner wall of the rectangular box (2), the side of the transverse slat (5) It slidably connects movable plate (6), through-hole is offered on the two sides inner wall of the rectangular box (2), the through-hole is located at transverse slat (5) Side, slidably connect elastic string (3) on the inner wall of the through-hole, one end of the elastic string (3) through through-hole and extends In to rectangular box (2), two elastic strings (3) one end close to each other is connected with the two sides of movable plate (6) respectively, the movement The top of plate (6) and the bottom of circular slab (8) are welded with the same tension spring (14), and the two sides of the movable plate (6) are fixed respectively Divided flow box (15) and dust-absorbing box (19) be installed, is fixedly installed with fan in the divided flow box (15), the divided flow box (15) and The bottom of dust-absorbing box (19) is fixedly installed with multiple symmetrically arranged ion wind guns (16) and cleaner head (18), the ion respectively Air pressure gun (16) and cleaner head (18) are connected with divided flow box (15) and dust-absorbing box (19) respectively, the divided flow box (15) and dust-absorbing box (19) top is fixedly connected with the first bourdon tube (7) and second spring pipe (13), first bourdon tube (7) and second respectively Bourdon tube (13) is connected with divided flow box (15) and dust-absorbing box (19) respectively, first bourdon tube (7) and second spring pipe (13) top runs through circular slab (8) and extends to the top of circular slab (8), first bourdon tube (7) and second spring The top of pipe (13) has been respectively fixedly connected with ion air hose (24) and sweep-up pipe (12), the ion air hose (24) and sweep-up pipe (12) top extend through the two sides inner wall of hollow cylinder (21) and respectively with the air outlet of ion generator (10) and dust suction The air inlet of device (11) is threadedly coupled.
2. a kind of dust collector for microelectronic device according to claim 1, which is characterized in that the bottom of the rectangular box (2) Portion is fixedly installed with sealing strip (1), and the sealing strip (1) is soft materials.
3. a kind of dust collector for microelectronic device according to claim 1, which is characterized in that the side of the transverse slat (5) It is welded with guide rail (4), the side of the movable plate (6) is welded with sliding block (22), and the sliding block (22) and guide rail (4) sliding connect It connects.
4. a kind of dust collector for microelectronic device according to claim 1, which is characterized in that two elastic strings (3) are mutual Separate one end is fixedly connected to pull ring, and the pull ring is in contact with rectangular box (2).
5. a kind of dust collector for microelectronic device according to claim 1, which is characterized in that the bottom of the movable plate (6) Portion is fixedly installed with brush (17), and the bottom of the brush (17) is fixedly installed with hairbrush (23).
6. a kind of dust collector for microelectronic device according to claim 1, which is characterized in that the one of the rectangular box (2) Side offers rectangular opening, and transparency window (20) are fixedly installed on the inner wall of the rectangular opening.
CN201810979483.2A 2018-08-23 2018-08-23 Microelectronic device dust collector Active CN109174819B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810979483.2A CN109174819B (en) 2018-08-23 2018-08-23 Microelectronic device dust collector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810979483.2A CN109174819B (en) 2018-08-23 2018-08-23 Microelectronic device dust collector

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CN109174819A true CN109174819A (en) 2019-01-11
CN109174819B CN109174819B (en) 2020-04-17

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111822442A (en) * 2020-06-10 2020-10-27 解彩侠 Electrostatic dust collector with ion air nozzle
CN111822404A (en) * 2020-06-18 2020-10-27 蔡海勇 Coiled material class substrate drenches membrane production facility

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317661A (en) * 1977-03-16 1982-03-02 Matsushita Electric Industrial Co., Ltd. Electronic air cleaner
CN102599848A (en) * 2012-02-27 2012-07-25 吴华 Dust collector for microelectronic device
CN205128517U (en) * 2015-11-02 2016-04-06 群光电子(苏州)有限公司 Online ion electrostatic precipitator machine
CN206443651U (en) * 2016-10-10 2017-08-29 邱风 Dust collector for microelectronic device
CN107598417A (en) * 2017-08-23 2018-01-19 安徽工程大学 A kind of microelectronic component precision spot welder
CN107757101A (en) * 2017-10-29 2018-03-06 陈雪峰 A kind of printing equipment Destaticizing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317661A (en) * 1977-03-16 1982-03-02 Matsushita Electric Industrial Co., Ltd. Electronic air cleaner
CN102599848A (en) * 2012-02-27 2012-07-25 吴华 Dust collector for microelectronic device
CN205128517U (en) * 2015-11-02 2016-04-06 群光电子(苏州)有限公司 Online ion electrostatic precipitator machine
CN206443651U (en) * 2016-10-10 2017-08-29 邱风 Dust collector for microelectronic device
CN107598417A (en) * 2017-08-23 2018-01-19 安徽工程大学 A kind of microelectronic component precision spot welder
CN107757101A (en) * 2017-10-29 2018-03-06 陈雪峰 A kind of printing equipment Destaticizing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111822442A (en) * 2020-06-10 2020-10-27 解彩侠 Electrostatic dust collector with ion air nozzle
CN111822404A (en) * 2020-06-18 2020-10-27 蔡海勇 Coiled material class substrate drenches membrane production facility

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