CN109167246B - Dual-signal detection laser frequency stabilization integrated optical path device - Google Patents

Dual-signal detection laser frequency stabilization integrated optical path device Download PDF

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CN109167246B
CN109167246B CN201810891712.5A CN201810891712A CN109167246B CN 109167246 B CN109167246 B CN 109167246B CN 201810891712 A CN201810891712 A CN 201810891712A CN 109167246 B CN109167246 B CN 109167246B
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signal
laser
cavity
frequency stabilization
beam splitting
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CN109167246A (en
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骆颖欣
段会宗
李祝
薛超
叶贤基
梅健伟
罗俊
覃璇
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National Sun Yat Sen University
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National Sun Yat Sen University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1305Feedback control systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/139Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Automation & Control Theory (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)

Abstract

The invention provides a double-signal detection laser frequency stabilization integrated optical path device, which relates to the field of laser frequency stabilization devices and comprises a laser, an electro-optic modulator, a laser frequency stabilization integrated optical platform, an RAM signal photoelectric detector and a PDH signal photoelectric detector, wherein the integrated optical platform comprises a platform base, a collimation system, a beam splitting isolation element, a lens, a first reflector, a second reflector and a super-stable cavity; the laser signal passes through an electro-optical modulator, a collimation system and a beam splitting isolation element in sequence, the beam splitting isolation element separates the laser signal, one path of light beam is reflected and input into a RAM signal photoelectric detector, the other path of light beam is reflected by a lens, a first reflecting mirror and a second reflecting mirror, part of the laser signal is transmitted into an ultrastable cavity to complete cavity coupling, and the other laser signal returns to the beam splitting isolation element in the original path and is reflected and input into a PDH signal photoelectric detector. The invention effectively improves the portability and the anti-interference capability of the optical platform and realizes the maximum reduction of the noise level of the RAM.

Description

Dual-signal detection laser frequency stabilization integrated optical path device
Technical Field
The invention relates to the field of laser frequency stabilization devices, in particular to a dual-signal detection laser frequency stabilization integrated optical path device.
Background
The laser frequency stabilization technology is used for locking the light frequency of laser on an ultra-stable external frequency reference through feedback control so as to meet a certain frequency stability requirement. In a spatial environment or a non-laboratory environment such as outdoors, the laser frequency stabilization system requires a specific mode matching optical system to perform beam shaping and alignment on incident laser light, and thus requires sufficient mechanical strength and stability to withstand noise interference from vibration or impact in the non-laboratory environment. In addition, there is Residual Amplitude Modulation-RAM (Residual Amplitude Modulation-RAM) in the optical path system, the RAM noise signal and the laser frequency stabilization measurement signal are mixed together and cannot be distinguished, even if the RAM noise signal and the laser frequency stabilization measurement signal are suppressed in an active feedback compensation manner, if the optical path of the RAM noise measurement optical path and the frequency stabilization signal measurement optical path are not equivalent, the Residual RAM noise still affects the stability of the laser frequency.
At present, an ultrastable cavity of an experimental system for frequency stabilization of PDH laser is generally and independently installed in sub-devices for restraining environmental noise, such as vacuum and temperature control, and the like, but a detection light path of a frequency stabilization signal in the system has a section of light path which comes in and goes out of a vacuum and temperature control system, compared with a RAM noise detection light path, the compactness and portability of the system are low, the anti-interference and impact resistance of the optical system are poor, and the system is not beneficial to application in a non-laboratory environment or even a space environment.
Disclosure of Invention
The invention provides a dual-signal detection laser frequency stabilization integrated optical circuit device capable of effectively inhibiting RAM noise interference, aiming at overcoming the defect of RAM noise interference in the prior art.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a double-signal detection laser frequency stabilization integrated optical path device comprises a laser, an electro-optic modulator, a laser frequency stabilization integrated optical platform, an RAM signal photoelectric detector and a PDH signal photoelectric detector, wherein the laser frequency stabilization integrated optical platform comprises a platform base, a collimation system, a beam splitting isolation element, a lens, a first reflector, a second reflector and a super stable cavity, and the collimation system, the beam splitting isolation element, the lens, the first reflector, the second reflector and the super stable cavity are arranged on the platform base; laser signals output by the laser sequentially pass through the electro-optical modulator, the collimating system and the beam splitting isolation element, the laser signals are separated into S polarized light and P polarized light at the beam splitting isolation element, the S polarized light is reflected and input into the RAM signal photoelectric detector, the P polarized light penetrates through the beam splitting isolation element and sequentially passes through the lens, the first reflector and the second reflector, part of the laser signals are input into the ultrastable cavity to complete cavity coupling, and the rest of the laser signals are reflected at the ultrastable cavity input end and sequentially pass through the second reflector, the first reflector, the lens and the beam splitting isolation element and are reflected by the beam splitting isolation element and input into the PDH signal photoelectric detector. The invention adopts a method of a single-chip type integrated optical path, combines an optical element bonding means with stronger mechanical strength, and integrates a super stable cavity, a cavity coupling and mode matching optical path, an optical fiber collimation optical system and an RAM signal detection optical path in a laser frequency stabilization system into an integrated optical platform, wherein the optical path in the device adopts optical design software to carry out optimized design on the parameters and positioning of the optical element, so that the mode matching rate of laser and a cavity mode is maximized; in addition, the geometric dimension and the mechanical parameters of the platform are optimized and calculated through simulation software, so that the mechanical stability and the impact resistance of the device are maximized.
Preferably, the device further comprises a thermostat, a vacuum chamber, a vacuum fiber guide and a single-mode polarization maintaining fiber, wherein the vacuum chamber is arranged in the thermostat, the laser frequency stabilization integrated optical platform, the PDH signal photoelectric detector and the RAM signal photoelectric detector are arranged in the vacuum chamber, the laser and the electro-optical modulator are arranged outside the thermostat, and the thermostat is provided with a small hole corresponding to the laser signal input position of the laser; the vacuum optical fiber guide is arranged on the wall of the vacuum chamber through a vacuum flange meeting the vacuum degree requirement and is used for guiding the laser transmission inside and outside the vacuum chamber; the single-mode polarization maintaining fiber is sequentially connected with a vacuum fiber guiding and collimating system from the emergent end of the electro-optical modulator through a small hole arranged in the constant temperature box. The scheme is provided with the vacuum chamber, the thermostat, the vacuum optical fiber guide and the single-mode polarization maintaining optical fiber, ensures that signal light measured by the PDH signal photoelectric detector and the RAM signal photoelectric detector passes through optical fibers with the same length, the vacuum guide and optical fiber collimation optical paths in the same environmental conditions such as temperature and air pressure which affect the change of the optical paths, realizes the optical path equivalence of the highest degree, and ensures that the RAM noise mixed in the PDH frequency stabilization signal is inhibited to the maximum degree.
Preferably, the loop structure further comprises a modulation signal source, a first electronic mixer and a second electronic mixer, the modulation signal source, the first electronic mixer and the second electronic mixer being arranged outside the incubator; the PDH signal measured by the PDH signal photoelectric detector and the modulation signal sent by the modulation signal source are input into the first electronic mixer for demodulation, and the demodulated error signal is fed back into the laser to control the laser frequency; the RAM signal measured by the RAM signal photoelectric detector and the modulation signal sent by the modulation signal source are input to the second electronic mixer for demodulation, and the demodulated RAM signal is fed back to the electro-optical modulator to carry out active suppression on the RAM signal.
Preferably, the ultrastable cavity comprises a plane cavity mirror, a concave cavity mirror and a hollow light-transmitting cavity, wherein the plane cavity mirror is arranged at the incident end of the hollow light-transmitting cavity, and the concave cavity mirror is arranged at the emergent end of the hollow light-transmitting cavity. The planar cavity mirror and the concave cavity mirror are glass components with ultrahigh reflectivity.
Preferably, the planar cavity mirror and the concave cavity mirror in the ultrastable cavity adopt coating films with ultrahigh reflectivity, wherein the reflectivity of the coating films is more than 99.99%, and the fineness of the cavity is higher than 30000, so that the stability of the laser frequency can be ensured.
Preferably, the beam splitting isolation element comprises a polarization beam splitter and an 1/4 wave plate. S polarized light in the incident laser is reflected by the polarization spectroscope, passes through the inclined through hole of the cavity in the super-stable cavity and is input into the photoelectric detector; the P polarized light is converted into circular polarized light through an 1/4 glass slide and then enters the super stable cavity through a lens, a first reflecting mirror and a second reflecting mirror in sequence.
Preferably, an inclination angle of 2 to 4 degrees is set between the beam splitting isolation element and the base, and an inclination angle of 2 to 4 degrees is set between the beam splitting isolation element and the lens, and the inclination angle is used for reducing noise generated by an etalon effect of residual reflected light on the surface of the optical element.
Preferably, the platform base, the super-stable chamber, the collimating system, the beam splitting and isolating element, the plane cavity mirror, the concave cavity mirror, the lens, the first reflecting mirror and the second reflecting mirror are made of a glass material with a low thermal expansion coefficient, such as fused silica, or a commercial glass product with ultra-low thermal expansion, such as Zerodur and ULE, so as to increase the temperature stability of the optical system.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
1. the ultrastable cavity, the mode matching optical path, the RAM detection optical path and the like in the laser frequency stabilization system are integrated into a compact single-chip ultrastable glass optical platform, so that the portability, the stability and the anti-interference capability of optical interfaces among key optical paths are improved, and the application of the optical interfaces in a non-laboratory environment or other environments is more reliable and stable;
2. the frequency error signal and the RAM signal are integrated in the same optical platform for measurement, the optical path equivalence of two detection signals is realized to the maximum extent, the influence of environmental differences such as temperature, air pressure and the like on the optical path is avoided, and the RAM noise level of laser frequency locking is reduced to the maximum extent.
Drawings
Fig. 1 is a schematic structural diagram of a laser frequency stabilization integrated optical platform according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an optical path structure of a dual-signal detection laser frequency stabilization integrated optical circuit device according to an embodiment of the present invention. Wherein: 1. the laser frequency stabilization integrated optical platform comprises a platform base, 2. a collimation system, 3. a beam splitting isolation element, 4. a lens, 5. a first reflector, 6. a second reflector, 7. a plane cavity mirror, 8. an ultrastable cavity, 9. a concave surface cavity mirror, 10. a laser, 11. an electro-optical modulator, 12. a thermostat, 13. a vacuum chamber, 14. vacuum optical fiber guide, 15. a single-mode polarization-maintaining optical fiber, 16. a laser frequency stabilization integrated optical platform, 17. a RAM signal photoelectric detector, 18. a PDH signal photoelectric detector, 19. a first electronic mixer, 20. a second electronic mixer and 21. a modulation signal source.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent;
for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product;
it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
The dual-signal detection laser frequency stabilization integrated optical path device comprises: and a laser frequency stabilization integrated optical platform 16, a PDH laser frequency stabilization optical path and a loop structure for RAM noise detection control.
Fig. 1 is a schematic structural diagram of a laser frequency stabilization integrated optical platform according to an embodiment of the present invention.
The laser frequency stabilization integrated optical platform 16 comprises a platform base 1, a collimation system 2, a beam splitting isolation element 3, a lens 4, a first reflector 5, a second reflector 6 and an ultrastable cavity 8, wherein the collimation system 2, the beam splitting isolation element 3, the lens 4, the first reflector 5, the second reflector 6 and the ultrastable cavity 8 are located on the platform base 1. The beam splitting and isolating element 3 consists of a polarizing beam splitter and an 1/4 wave plate, and an inclination angle of 2-4 degrees is arranged between the positioning angle of the beam splitting and isolating element 3 and the platform base 1 and other components; the first reflector 5 and the second reflector 6 are both 45-degree reflectors; the ultrastable cavity 8 consists of a cavity body with a central through hole, and a plane cavity mirror 7 and a concave cavity mirror 9 which are coated with films with ultrahigh reflectivity. The optimal position of each component in the laser frequency stabilization integrated optical platform 16 is calculated by light path design software, and the obtained optimization result can enable the coupling between the incident laser and the FP cavity and the theoretical efficiency of mode matching to be optimal.
The loop structure of the PDH laser frequency stabilization optical path and RAM noise detection control comprises a laser 10, an electro-optic modulator 11, a vacuum optical fiber guide 14, a single-mode polarization-maintaining optical fiber 15, a RAM signal photoelectric detector 17, a PDH signal photoelectric detector 18, a first electronic mixer 19, a second electronic mixer 20, a modulation signal source 21, an incubator 12 and a vacuum chamber 13. The vacuum chamber 13 is arranged in the incubator 12, the laser frequency stabilization integrated optical platform 16, the PDH signal photoelectric detector 18 and the RAM signal photoelectric detector 17 are arranged in the vacuum chamber 13, and the electro-optical modulator 11, the modulation signal source 21, the first electronic mixer 19 and the second electronic mixer 20 are arranged outside the incubator; the vacuum optical fiber guide 14 is installed in the chamber wall of the vacuum chamber 13 through a vacuum flange meeting the vacuum degree requirement, the thermostat 12 is provided with a small hole corresponding to the position of the vacuum optical fiber guide 14, and the single-mode polarization maintaining optical fiber 15 is sequentially connected with the emergent end of the electro-optical modulator 11, the vacuum optical fiber guide 14 and the collimation system 2 through the small hole of the thermostat 12.
Before the laser frequency stabilization integrated optical platform 16 of the embodiment is built, optical parameters of the adopted ultrastable cavity 8 are analyzed according to application requirements, a corresponding integrated optical path design drawing is calculated, optical parameters of all elements such as the length of the cavity of the ultrastable cavity 8, the curvature radius of the concave cavity mirror 9, the focal length of the lens 4, the size of a collimation spot of the collimation system 2 and the like are determined, specific dimensions and geometric parameters of the platform base 1 such as the shape, the size, the thickness, the dimension proportion among the optical elements, the bonding mode and the bonding position of the platform base to the elements and the like are optimized and calculated, so that the strength and the stability of the device meet the actual application requirements, namely the highest theoretical value of the ultrastable cavity mode matching efficiency is used as a target to accurately calculate and determine the coordinates of the parameters and the positioning of all the optical elements. In the construction process, a high-precision metal positioning template is manufactured according to positioning coordinate data of each optical element, the template can adopt a processing mode of slow-speed wire cutting, the processing tolerance of the template is required to be less than 2 micrometers, and the beam isolation element 3, the lens 4, the first reflector 5, the second reflector 6 and the ultra-stable cavity 8 with the plane cavity mirror 7 and the concave cavity mirror 9 are respectively positioned and bonded on the platform base 1 by adopting the positioning template. When the incident single-mode polarization maintaining fiber 15 and the collimation system 2 are bonded and assembled, the polarization state of the emergent laser is measured, the single-mode polarization maintaining fiber 15 is rotated, the emergent laser can be bonded and fixed when the polarization of the emergent laser is adjusted to 45 degrees, the laser can be decomposed into a combination of S light and P light with equivalent power, namely, the transmission light and the reflection light power of the laser signal are equivalent when the laser signal passes through a polarization beam splitter in the beam isolation element 3, and the RAM noise levels measured by the RAM signal photoelectric detector 17 and the PDH signal photoelectric detector 18 are equivalent. Adjusting the position and the angle of the collimation system 2 on the platform base 1 relative to other optical elements, adjusting the mode matching efficiency to an optimal value, and adhesively fixing the collimation system 2 adjusted to the optimal position and angle on the platform base 1 by gluing or other bonding methods. And after the bonding surface is solidified, the laser frequency stabilization integrated optical platform 16 is manufactured.
Fig. 2 is a schematic diagram of an optical path structure of a dual-signal detection laser frequency stabilization integrated optical circuit device according to an embodiment of the present invention.
In the specific implementation process, a laser signal output by a laser 10 is firstly subjected to phase modulation through an electro-optic modulator 11, the modulated signal is applied to the electro-optic modulator 11 through a modulation signal source 21, the modulated laser signal passes through a single-mode polarization maintaining optical fiber 15, passes through a precise temperature control incubator 12, and enters into an ultrahigh vacuum environment maintained by a vacuum chamber 13 through a vacuum optical fiber guide 14; laser signals in the single-mode polarization maintaining fiber 15 are collimated into space light through the collimating system 2, S polarized light of the space light is reflected by the beam splitting isolation element 3 when passing through the beam splitting isolation element 3 and is input into the RAM signal photoelectric detector after passing through an inclined through hole in the super stable cavity 8; p polarized light of the space light is transmitted through the beam splitting isolation element 3 and converted into circularly polarized light by an 1/4 wave plate, and after light beam focusing of the mode matching lens 4 and reflection of the first reflecting mirror 5 and the second reflecting mirror 6, partial light power is coupled into a specific Gaussian resonance mode of the super stable cavity 8 to complete cavity coupling; the rest laser light is reflected back by the plane cavity mirror 7 of the super stable cavity 8, returns along with the resonant light leaked from the super stable cavity 8 through the second reflecting mirror 6, the first reflecting mirror 5 and the lens 4, passes through the 1/4 wave plate on the beam splitting isolation element 3 again, is converted from circularly polarized light into S polarized light, and is reflected to the PDH signal photodetector by the polarization beam splitter in the isolation element 3 for subsequent signal detection. A PDH electronic signal measured in the PDH photoelectric detector 18 and a modulation signal sent by a modulation signal source 21 are input into a first electronic mixer 19 for demodulation, and a demodulated error signal is fed back to the laser 10 to control the laser frequency, so that a laser frequency locking closed loop is completed; meanwhile, the electronic signal measured by the RAM signal photodetector 17 is input into the second electronic mixer 20 together with the modulation signal from the modulation signal source 21 for demodulation, and the demodulated RAM signal is fed back to the electro-optical modulator 11 to control the dc bias or temperature thereof, thereby completing the active suppression of RAM noise in the frequency stabilized optical path.
The same or similar reference numerals correspond to the same or similar parts;
the terms describing positional relationships in the drawings are for illustrative purposes only and are not to be construed as limiting the patent;
it should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (7)

1. The utility model provides a dual signal surveys integrated optical circuit device of laser frequency stabilization which characterized in that: the laser frequency stabilization integrated optical platform comprises a laser (10), an electro-optical modulator (11), a laser frequency stabilization integrated optical platform (16), an RAM signal photoelectric detector (17) and a PDH signal photoelectric detector (18), wherein the laser frequency stabilization integrated optical platform (16) comprises a platform base (1), a collimation system (2), a beam splitting isolation element (3), a lens (4), a first reflector (5), a second reflector (6) and an ultrastable cavity (8), and the collimation system (2), the beam splitting isolation element (3), the lens (4), the first reflector (5), the second reflector (6) and the ultrastable cavity (8) are arranged on the platform base (1); laser signals output by the laser (10) sequentially pass through the electro-optical modulator (11), the collimation system (2) and the beam splitting isolation element (3), the laser signals are separated into S polarized light and P polarized light at the beam splitting isolation element (3), the S polarized light is reflected and input into the RAM signal photoelectric detector (17), the P polarized light is transmitted through the beam splitting isolation element (3) and sequentially passes through the lens (4), the first reflector (5) and the second reflector (6), part of the laser signals are input into the cavity of the super-stable cavity (8) to complete cavity coupling, and the rest of the laser signals are reflected at the input end of the super-stable cavity (8), sequentially pass through the second reflector (6), the first reflector (5), the lens (4) and the beam splitting isolation element (3), and are reflected by the beam splitting isolation element (3) and input into the PDH signal photoelectric detector (18); the device also comprises an incubator (12), a vacuum chamber (13), a vacuum optical fiber guide (14) and a single-mode polarization maintaining optical fiber (15), wherein the vacuum chamber (13) is arranged in the incubator (12), a laser frequency stabilization integrated optical platform (16), a PDH signal photoelectric detector (18) and an RAM signal photoelectric detector (17) are arranged in the vacuum chamber (13), the laser (10) and the electro-optical modulator (11) are arranged outside the incubator (12), and the incubator (12) is provided with a small hole corresponding to the laser signal input position of the laser (10); the vacuum optical fiber guide (14) is arranged on the wall of the vacuum chamber (13) through a vacuum flange meeting the vacuum degree requirement and is used for guiding the laser transmission inside and outside the vacuum chamber (13); the single-mode polarization maintaining optical fiber (15) is sequentially connected with the vacuum optical fiber guide (14) and the collimation system (2) from the emergent end of the electro-optical modulator (11) through a small hole arranged in the thermostat (12).
2. The dual-signal detection laser frequency stabilization integrated optical circuit device according to claim 1, wherein: the device further comprises a modulation signal source (21), a first electronic mixer (19) and a second electronic mixer (20), wherein the modulation signal source (21), the first electronic mixer (19) and the second electronic mixer (20) are arranged outside the incubator (12); the PDH signal measured by the PDH signal photoelectric detector (18) and the modulation signal sent by the modulation signal source (21) are input into the first electronic mixer (19) for demodulation, and the demodulated error signal is fed back into the laser (10) to control the laser frequency; the RAM signal measured by the RAM signal photoelectric detector (17) and the modulation signal sent by the modulation signal source (21) are input into the second electronic mixer (20) for demodulation, and the demodulated RAM signal is fed back into the electro-optical modulator (11) to carry out active suppression on the RAM signal.
3. The dual-signal detection laser frequency stabilization integrated optical circuit device according to claim 1 or 2, characterized in that: the ultrastable cavity (8) comprises a plane cavity mirror (7), a concave cavity mirror (9) and a hollow light-transmitting cavity, wherein the plane cavity mirror (7) is arranged at the incident end of the hollow light-transmitting cavity, and the concave cavity mirror (9) is arranged at the emergent end of the hollow light-transmitting cavity.
4. The dual-signal detection laser frequency stabilization integrated optical circuit device according to claim 3, wherein: the plane cavity mirror (7) and the concave cavity mirror (9) adopt coating films with ultrahigh reflectivity.
5. The dual-signal detection laser frequency stabilization integrated optical circuit device according to claim 1, wherein: the beam splitting and isolating element (3) comprises a polarization beam splitter and an 1/4 wave plate.
6. The dual-signal detection laser frequency stabilization integrated optical circuit device according to claim 5, wherein: an inclination angle of 2-4 degrees is arranged between the beam splitting isolation element (3) and the platform base (1), and an inclination angle of 2-4 degrees is arranged between the beam splitting isolation element (3) and the lens (4).
7. The dual-signal detection laser frequency stabilization integrated optical circuit device according to claim 1, wherein: the manufacturing materials of the platform base (1), the collimation system (2), the beam splitting isolation element (3), the ultrastable cavity (8), the plane cavity mirror (7), the concave cavity mirror (9), the lens (4), the first reflecting mirror (5) and the second reflecting mirror (6) comprise glass materials with low thermal expansion coefficients.
CN201810891712.5A 2018-08-07 2018-08-07 Dual-signal detection laser frequency stabilization integrated optical path device Active CN109167246B (en)

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CN111555108A (en) * 2020-05-14 2020-08-18 山西大学 High-stability Fabry-Perot cavity device and laser output system applying same
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