CN109164846A - The temperature regulating device and temperature control method measured for SAW resonance, anti-resonance frequency - Google Patents
The temperature regulating device and temperature control method measured for SAW resonance, anti-resonance frequency Download PDFInfo
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- CN109164846A CN109164846A CN201811164611.4A CN201811164611A CN109164846A CN 109164846 A CN109164846 A CN 109164846A CN 201811164611 A CN201811164611 A CN 201811164611A CN 109164846 A CN109164846 A CN 109164846A
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- 238000005259 measurement Methods 0.000 claims abstract description 11
- 238000004458 analytical method Methods 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004321 preservation Methods 0.000 claims description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 4
- 229920000742 Cotton Polymers 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
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- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
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- 125000006850 spacer group Chemical group 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
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Abstract
The invention belongs to SAW filter production technical fields, disclose a kind of temperature regulating device and temperature control method measured for SAW resonance, anti-resonance frequency.The temperature regulating device measured for SAW resonance, anti-resonance frequency includes precise impedance analyzer, thermal insulation barn and temperature collecting cell, and the test lead of precise impedance analyzer is placed with SAW device to be measured；Thermal insulation barn includes the temperature controller of cabinet and control box interior temperature, and the test lead of precise impedance analyzer and the inner wall of thermal insulation barn connect；Temperature collecting cell includes the second temperature sensor for being placed in the first temperature sensor and the test lead close to precise impedance analyzer of box house.Temperature control method is applied in the above-mentioned temperature regulating device measured for SAW resonance, anti-resonance frequency.Provided by the present invention for SAW resonance, the temperature regulating device and temperature control method of anti-resonance frequency measurement, solve that sensing time existing in the prior art is long, measurement accuracy is poor, is unable to the problems such as in situ measurement.
Description
Technical field
The invention belongs to SAW filter production technical fields, and in particular to survey for SAW resonance, anti-resonance frequency
The temperature regulating device and temperature control method of amount.
Background technique
SAW device is widely used in the industries such as communication, telemetering, navigation and measurement, and with the fast development of industry, it
Ask SAW device constantly to highly sensitive, high frequency, low-loss, miniaturization development.Make the spy of SAW device substrate piezoelectric material
Property will directly affect the properties of SAW device, and then have an important influence on to the performance indicator of SAW sensor.
In numerous influence factors, environment temperature is one of the important parameter for influencing SAW device characteristic.With environment temperature
Variation, many parameters of SAW device, as dielectric constant, elastic constant, piezoelectric constant, dielectric loss, mechanical quality factor with
And electromechanical coupling factor etc. will all change therewith, and then therefore the velocity of wave of SAW device, frequency can also drift about.Together
The variation of Shi Wendu can also generate thermal stress, deteriorate the working performance of SAW device.Therefore, SAW device characteristic is understood in depth with ring
The relationship of border temperature change, the SAW device for preparing good stability have important theory significance and practical value.
Currently, test SAW device characteristic varies with temperature the device of relationship in the world, it is all to utilize conducting wire by external temperature control
Device is connected with 4294 precise impedance analyzer of Agilent or other model impedance analyzers to be measured.This measurement method
It is not only unable to in-situ characterization piezoelectric constants variation with temperature relationship, but also since the length of conducting wire also results in transmission damage
Consumption, reduces the accuracy of measurement.The reduction of measurement precision not only will affect the design of SAW device temperature-compensation circuit, and
And also due to the variation of environment temperature, causes very big error in high precision applications, or even it will cause the damage for being difficult to retrieve
It loses.
Summary of the invention
The purpose of the present invention is to provide a kind of temperature regulating device measured for SAW resonance, anti-resonance frequency and temperature control sides
Method, solves that sensing time existing in the prior art is long, measurement accuracy is poor, is unable to the problems such as in situ measurement.
The technology used in the present invention means are:
A kind of temperature regulating device measured for SAW resonance, anti-resonance frequency, comprising:
The test lead of precise impedance analyzer, the precise impedance analyzer is placed with SAW device to be measured；
Thermal insulation barn, the temperature controller including cabinet and the control box interior temperature, the survey of the precise impedance analyzer
Examination end is connect with the inner wall of the cabinet；
Temperature collecting cell, including being placed in the first temperature sensor of the box house and close to the precise impedance analyzer
Test lead second temperature sensor.
As optimal technical scheme, the side wall of the cabinet includes inner sidewall and lateral wall, the inner sidewall and described outer
Sidewall spacers setting, and heat conducting pipe is equipped between the inner sidewall and the lateral wall, the heat conducting pipe and the temperature control
Device connection processed, the intracorporal temperature of case are set as 10-85 DEG C.
As optimal technical scheme, the heat conducting pipe is copper pipe, and the both ends of the copper pipe both pass through the outside of the cabinet
Wall is placed in the outside of the cabinet.
As optimal technical scheme, the temperature controller includes adjustable low-temperature thermostat, is set in the low temperature thermostat bath
There is liquid, and liquid can be in the heat conducting pipe internal circulation flow by inlet tube and outlet tube.
As optimal technical scheme, between the inner sidewall and the lateral wall be filled with heat-preservation cotton, the inner sidewall by
Copper or aluminium are made.
It further include control unit as optimal technical scheme, described control unit includes master controller, the master controller
It is sensed respectively with the precise impedance analyzer, the temperature controller, first temperature sensor and the second temperature
Device electrical connection.
As optimal technical scheme, described control unit further include can set the SAW device prediction amount temperature it is upper
Position machine, the host computer are electrically connected with the controller.
As optimal technical scheme, the precise impedance analyzer includes shell, touch screen, impedance analysis circuit plate, control
System switch and plug receptacle, the touch screen, control switch and plug receptacle are distributed in the front plate of the shell, the impedance point
Analysis circuit board is located in shell, and is connected respectively with the touch screen, control switch and plug receptacle.
As optimal technical scheme, the shell includes front plate, backplate, upper housing, lower case and connecting plate, described
Upper housing is connected to form the cavity with inner space by connecting plate with lower case, and the front plate and backplate are accordingly set
It sets in the rear and front end of cavity；
The lower case is equipped with mounting post, and the upper surface of the mounting post is equipped with threaded hole, and in the impedance analysis circuit
Plate is equipped with mounting hole compatible with the threaded hole；
The impedance analysis circuit plate includes that PCB substrate and the power module being arranged in the PCB substrate, swept-frequency signal generate mould
Block, impedance matching module, tested network module, acquisition circuit module and control unit, the control unit respectively with the power supply
Module, swept-frequency signal generation module, impedance matching module, tested network module are connected with acquisition circuit module.
The present invention also provides a kind of temperature control methods, applied to the above-mentioned control measured for SAW resonance, anti-resonance frequency
In warm device comprising following steps:
SAW device is placed on to the test lead of precise impedance analyzer；
Start-up temperature controller, and make the intracorporal temperature heating of the case of thermal insulation barn, and keep certain temperature；
The temperature value that first temperature sensor acquires is compared with the temperature value that second temperature sensor acquires, until making two
The difference of person is less than the error amount of setting；
Precise impedance analyzer acquires the resonance of SAW device, anti-resonance frequency.
Compared with prior art, the beneficial effect comprise that:
The present invention is organically combined thermal insulation barn and precise impedance instrument test lead by designing independent thermal insulation barn, and then is accurately controlled
The temperature of test lead processed, it is characteristic of the invention that accurately controlling the test temperature of SAW device by the way of independent thermometric and temperature control
Degree.Second temperature sensor is placed on the actual temperature that SAW device is acquired near tested SAW device, the first temperature sensing
Device is placed in thermal insulation barn, detects the temperature of thermal insulation barn, when the temperature error that actual acquisition arrives is greater than setting error, by the
The temperature of the feedback adjust automatically thermal insulation barn of one temperature sensor, until the difference of the first temperature sensor and second temperature sensor
Value is less than or equal to setting error, and the measurement of resonance, anti-resonance frequency at this moment can be carried out to SAW device.The present invention not only can be with
SAW device resonance, anti-resonance frequency are measured at accurate temperature, solve that sensing time existing in the prior art is long, measurement
Low precision is unable to the problems such as in situ measurement, and can calculate the mechanical quality factor and electromechanics of SAW device under accurate temperature
The parameters such as the coefficient of coup provide condition to develop the SAW device of function admirable.
Detailed description of the invention
Fig. 1 is the temperature regulating device measured for SAW resonance, anti-resonance frequency；
Fig. 2 is the key step flow chart of temperature control method.
Wherein: 1, precise impedance analyzer；11, test lead；2, thermal insulation barn；21, cabinet；22, temperature controller；23, it leads
Heat pipe；31, the first temperature sensor；32, second temperature sensor.
Specific embodiment
Clear, complete description is carried out to technical solution of the present invention with reference to the accompanying drawing, it is clear that described embodiment
It is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The every other embodiment that member is obtained without making creative work, belongs to protection scope of the present invention.
SAW device described in the present embodiment is SAW filter.
As shown in Figure 1, a kind of temperature regulating device measured for SAW resonance, anti-resonance frequency provided in this embodiment, including
Precise impedance analyzer 1, thermal insulation barn 2 and temperature collecting cell.The test lead 11 of precise impedance analyzer 1 is placed with to be measured
SAW device；Thermal insulation barn 2 includes the temperature controller 22 of cabinet 21 and control 21 internal temperature of cabinet, precise impedance analyzer 1
Test lead 11 is connect with the inner wall of cabinet 2；Temperature collecting cell includes the first temperature sensor 31 being placed in inside cabinet 2 and leans on
The second temperature sensor 32 of the test lead of nearly precise impedance analyzer 1.
Independent thermal insulation barn 2 is arranged in the present embodiment, thermal insulation barn 2 and 1 test lead 11 of precise impedance instrument is organically combined, in turn
The temperature of accurate control test lead 11, second temperature sensor 32, which is placed near tested SAW device, acquires SAW device
Actual temperature, the first temperature sensor 31 are placed in thermal insulation barn 2, the temperature of thermal insulation barn 2 are detected, when the temperature that actual acquisition arrives
When error is greater than setting error, by the temperature of the feedback adjust automatically thermal insulation barn 2 of the first temperature sensor 31, until the first temperature
The difference for spending sensor 31 and second temperature sensor 32 is less than or equal to setting error, at this moment SAW device can be carried out resonance,
The measurement of anti-resonance frequency.The present embodiment can not only measure SAW device resonance, anti-resonance frequency at accurate temperature, solve
Sensing time existing in the prior art is long, measurement accuracy is poor, is unable to the problems such as in situ measurement, and can calculate accurate temperature
The parameters such as the mechanical quality factor of lower SAW device and electromechanical coupling factor provide item to develop the SAW device of function admirable
Part.
Specifically, the side wall of the cabinet 21 of thermal insulation barn 2 includes inner sidewall and lateral wall, and inner sidewall is set with lateral wall interval
It sets, and is equipped with heat conducting pipe 23 between inner sidewall and lateral wall, heat conducting pipe 23 is connect with temperature controller 22.Temperature controller 22
The temperature of heat conducting pipe 23 is controlled, and then by temperature conduction to cabinet 21, and is able to maintain a period of time.
In the present embodiment, heat conducting pipe 23 is copper pipe, and the both ends of copper pipe both pass through the lateral wall of cabinet 21, and its end is set
In the outside of cabinet 21.Temperature controller 22 includes adjustable low-temperature thermostat, is equipped with liquid in low temperature thermostat bath, and liquid passes through
Inlet tube and outlet tube can be in 23 internal circulation flows of heat conducting pipe.Specifically, one end of inlet tube and copper pipe connects, outlet tube and copper
The other end of pipe connects, and the liquid in adjustable low-temperature thermostat is entered in copper pipe by inlet tube, then using outlet tube
It is discharged in low temperature thermostat bath, realizes the circulation of liquid.Before the heating of start-up temperature controller 22, it can first set and need to heat
Temperature, then temperature controller 22 heat and make the temperature value for reaching setting in thermal insulation barn 2.
In order to make thermal insulation barn 2 that there is preferable thermal insulation property, it is also filled between the inner sidewall and lateral wall of cabinet 21
Heat-preservation cotton.The inner sidewall of cabinet 21 is made using high thermal conductivity materials, for example, by using metal materials such as copper or aluminium as case
The inner sidewall of body 21, can flash heat transfer；The lateral wall of cabinet 21 is made using low thermal conductivity material, reduces heat to the greatest extent
The loss of amount.In the present embodiment, the temperature in the cabinet 21 of thermal insulation barn 2 can control within the scope of 10-85 DEG C, and error
No more than ± 0.1 DEG C.
The temperature regulating device measured for SAW resonance, anti-resonance frequency further includes control unit, and control unit includes main control
Device, master controller are sensed with precise impedance analyzer 1, temperature controller 22, the first temperature sensor 31 and second temperature respectively
Device 32 is electrically connected.Control unit further includes the host computer that can set the prediction amount temperature of SAW device, and host computer is electrically connected with controller
It connects.The temperature, temperature error and the time of heat preservation of 2 interior prediction amount of thermal insulation barn can be set on host computer.Controller is warm by first
Spend sensor 31 acquire temperature and second temperature sensor 32 acquire temperature carry out difference calculating, and with preset temperature
Error is compared, to control whether precise impedance analyzer 1 starts the resonance of acquisition SAW device and the number of anti-resonance frequency
According to, and data are saved.
In the present embodiment, what the first temperature sensor 31 and second temperature sensor 32 were all made of is thermocouple, can also
With the temperature sensor taken other form, it is not limited here.
In the present embodiment, precise impedance analyzer include shell, touch screen, impedance analysis circuit plate, control switch and
Plug receptacle, the touch screen, control switch and plug receptacle are distributed in the front plate of the shell, specifically, the touch screen
Positioned at the right positions of front plate, plug receptacle and control switch are distributed in the leftward position of front plate by sequence from top to bottom,
It is brought convenience to operating with.The impedance analysis circuit plate is located in shell, and respectively with the touch screen, control switch and
Plug receptacle is connected.Rationally be equipped with touch screen in the front plate of shell, can directly be operated by touching, and energy it is quick,
It is intuitive to obtain required test data, but also it is equipped with control switch and plug receptacle, further to being brought convenience using operation, in addition
Compact overall structure, it is ingenious by host machine part and display portion together as one, it is small in size, it is light-weight, it is easy to carry, and test speed
Degree is fast, and precision is high, simple to operate.
The shell includes front plate, backplate, upper housing, lower case and connecting plate, specifically, the two sides of upper housing
It symmetrically bends downward to form interconnecting piece, the two sides of lower case are symmetrically folded upward to form lower interconnecting piece, and upper interconnecting piece passes through
Connecting plate is connected with lower interconnecting piece, and realization is connected the upper housing to form the cavity with inner space with lower case,
The rear and front end of cavity is accordingly arranged in the front plate and backplate.
Circuit board is analyzed for convenience of installation blocked impedance, mounting post, the upper end of the mounting post are equipped in the lower case
Face is equipped with threaded hole, and mounting hole compatible with the threaded hole is equipped on the impedance analysis circuit plate.Pass through screw
Across mounting hole and it is threaded into hole, that is, realizes and impedance analysis circuit plate is fixed in lower case.
The impedance analysis circuit plate includes that PCB substrate and the power module being arranged in the PCB substrate, swept-frequency signal are raw
At module, impedance matching module, tested network module, acquisition circuit module and control unit, the control unit respectively with it is described
Power module, swept-frequency signal generation module, impedance matching module, tested network module are connected with acquisition circuit module.Frequency sweep
Signal generation module mainly uses the frequency variation signal of single-chip microcontroller control DDS generation fixed amplitude.It is why main using DDS mode
It is that can flexibly generate frequency conversion swept-frequency signal, and frequency switching time, high-resolution, phase connect using its digital Frequency Adjustable feature
It can reach in terms of continuous property, orthogonal output and a series of performance indicators such as integrated considerably beyond legacy frequencies synthetic technology
Level, the performance better than simulation signal generator can be provided for system.Impedance matching module is mainly transformer coil matching,
There are two purposes: being conjugated fore line signal source internal resistance each other with the same level load impedance；(2) make in load impedance and signal source
Resistance is conjugated each other.Tested network module is the series circuit of energy converter and sampling resistor switching module.Wherein sampling resistor switches
Module automatically switches according to certain adaptive algorithm.When gating a certain road sampling resistor, this can produce piezoelectric energy-conversion all the way
Device analog voltage signal and analog current signal.Acquisition circuit module is used to acquire the voltage and current signals of prime.Control is single
Member selects ATMEGA1280-16AU, and internal storage location provides to can be used for phase difference detection algorithm and adaptive Method of Sweeping Algorithm
Enough internal storage locations.Single-chip microcontroller controls the generation of DDS variable frequency sine wave signal and controllable gain chip multiple value, and
Adaptive frequency sweep step frequency and sampling resistor gear switch are controlled by ADC transformation result, it is another to be responsible for communicating with host computer, it will
The voltage and current Amplitude Ratio and phase data of PZT (piezoelectric transducer) are transmitted to host computer.
The present embodiment additionally provides a kind of temperature control method, measures applied to above-mentioned for SAW resonance, anti-resonance frequency
In temperature regulating device.As shown in Fig. 2, temperature control method mainly comprises the steps that
SAW device is placed on to the test lead 11 of precise impedance analyzer 1；
Start-up temperature controller 22, and so that the temperature in the cabinet 21 of thermal insulation barn 2 is heated up, and keep certain temperature；
The temperature value that first temperature sensor 31 acquires is compared with the temperature value that second temperature sensor 32 acquires, until
The difference of the two is set to be less than the error amount of setting；
Precise impedance analyzer 1 acquires the resonance of SAW device, anti-resonance frequency.
Specifically, the temperature control method is described in detail below down comprising following steps:
Step 1: SAW device to be placed on to the test lead 11 of precise impedance analyzer 1, the temperature of premeasuring is set on host computer
Angle value, temperature error and the time of heat preservation.
Step 2: start-up temperature controller 22, and so that the temperature in the cabinet 21 of thermal insulation barn 2 is heated up, and reach premeasuring
Temperature value.
Step 3: after the temperature in thermal insulation barn 2 reaches the temperature value of premeasuring, the temperature of the first temperature sensor 31 acquisition
Difference calculating is carried out with the temperature that second temperature sensor 32 acquires, and is compared with the temperature error of setting, if greatly
In the temperature error of setting, the actual temperature value of acquisition is fed back to by controller, controller control by the first temperature sensor 31
Temperature controller 22 processed adjusts the temperature in the cabinet 21 of thermal insulation barn 2, until the temperature of the first temperature sensor 31 acquisition and the
The difference of the temperature of two temperature sensors 32 acquisition is less than or equal to the temperature error of setting, just meeting in the soaking time of setting
Start precise impedance analyzer 1 and acquires the resonance of SAW device, anti-resonance frequency.
Step 4: the difference for the temperature that the temperature and second temperature sensor 32 of the acquisition of the first temperature sensor 31 acquire exists
It is less than or equal to the temperature error of setting in the soaking time of setting, controller controls precise impedance analyzer 1 and starts, and acquisition is adopted
Collect resonance, the anti-resonance frequency of SAW device, and the data of acquisition are saved.In the present embodiment, the first temperature sensor
The difference for the temperature that the temperature of 31 acquisitions is acquired with second temperature sensor 32 is equal to or less than 0.1 DEG C and soaking time is 10
Start precise impedance analyzer after second.
It being detected using the temperature regulating device and temperature control method, test result shows that temperature regulating device passes through modularized design,
It does not only maintain simply, Function Extension is convenient, and has the following characteristics that resonance, anti-resonance frequency measuring accuracy are high；It is resonance, anti-
The electromechanical coupling factor error that the data of resonance frequency test calculate is less than or equal to 0.025%.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of temperature regulating device measured for SAW resonance, anti-resonance frequency characterized by comprising
The test lead (11) of precise impedance analyzer (1), the precise impedance analyzer (1) is placed with SAW device to be measured；
Thermal insulation barn (2), the temperature controller (22) including cabinet (21) and control cabinet (21) internal temperature, the precision
The test lead (11) of impedance analyzer (1) is connect with the inner wall of the cabinet (21)；
Temperature collecting cell, including being placed in internal the first temperature sensor (31) of the cabinet (21) and close to the accurate resistance
The second temperature sensor (32) of the test lead (11) of analysis resistant instrument (1).
2. the temperature regulating device according to claim 1 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
The side wall of cabinet (21) includes inner sidewall and lateral wall, and the inner sidewall and the lateral wall interval are arranged, and the inner sidewall
It is equipped between the lateral wall heat conducting pipe (23), the heat conducting pipe (23) connect with the temperature controller (22).
3. the temperature regulating device according to claim 2 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
Heat conducting pipe (23) is copper pipe, and the both ends of the copper pipe both pass through the lateral wall of the cabinet (21), are placed in the cabinet (21)
Outside.
4. the temperature regulating device according to claim 2 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
Temperature controller (22) includes adjustable low-temperature thermostat, is equipped with liquid in the low temperature thermostat bath, and liquid by inlet tube and
Storage outlet tube can be set as 10-85 DEG C in the temperature in the heat conducting pipe (23) internal circulation flow, the cabinet (21).
5. the temperature regulating device according to claim 2 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
Heat-preservation cotton is filled between inner sidewall and the lateral wall, the inner sidewall is made by copper or aluminium.
6. the temperature regulating device according to claim 1 measured for SAW resonance, anti-resonance frequency, which is characterized in that also wrap
Include control unit, described control unit includes master controller, the master controller respectively with the precise impedance analyzer (1),
The temperature controller (22), first temperature sensor (31) and the second temperature sensor (32) electrical connection.
7. the temperature regulating device according to claim 6 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
Control unit further includes the host computer that can set the prediction amount temperature of the SAW device, the host computer and controller electricity
Connection.
8. the temperature regulating device according to claim 1 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
Precise impedance analyzer includes shell, touch screen, impedance analysis circuit plate, control switch and plug receptacle, the touch screen, control
Switch and plug receptacle be distributed in the front plate of the shell, the impedance analysis circuit plate is located in shell, and respectively with institute
State touch screen, control switch is connected with plug receptacle.
9. the temperature regulating device according to claim 8 measured for SAW resonance, anti-resonance frequency, which is characterized in that described
Shell includes front plate, backplate, upper housing, lower case and connecting plate, and the upper housing is connected with lower case by connecting plate
It connects to form the cavity with inner space, the rear and front end of cavity is accordingly arranged in the front plate and backplate；
The lower case is equipped with mounting post, and the upper surface of the mounting post is equipped with threaded hole, and in the impedance analysis circuit
Plate is equipped with mounting hole compatible with the threaded hole；
The impedance analysis circuit plate includes that PCB substrate and the power module being arranged in the PCB substrate, swept-frequency signal generate mould
Block, impedance matching module, tested network module, acquisition circuit module and control unit, the control unit respectively with the power supply
Module, swept-frequency signal generation module, impedance matching module, tested network module are connected with acquisition circuit module.
10. a kind of temperature control method, which is characterized in that be applied to claim 1-9 it is described in any item for SAW resonance, it is anti-humorous
In the temperature regulating device of vibration frequency measurement comprising following steps:
SAW device is placed on to the test lead (11) of precise impedance analyzer (1)；
Start-up temperature controller (22), and so that the temperature in the cabinet (21) of thermal insulation barn (2) is heated up, and keep certain temperature；
The temperature value that first temperature sensor (31) acquire is compared with the temperature value that second temperature sensor (32) acquires,
Until the difference of the two is made to be less than the error amount set；
Precise impedance analyzer (1) acquires the resonance of SAW device, anti-resonance frequency.
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| CN201811164611.4A CN109164846A (en) | 2018-10-06 | 2018-10-06 | The temperature regulating device and temperature control method measured for SAW resonance, anti-resonance frequency |
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