CN109163668A - Thickness detection apparatus - Google Patents
Thickness detection apparatus Download PDFInfo
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- CN109163668A CN109163668A CN201811223469.6A CN201811223469A CN109163668A CN 109163668 A CN109163668 A CN 109163668A CN 201811223469 A CN201811223469 A CN 201811223469A CN 109163668 A CN109163668 A CN 109163668A
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- detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
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- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Controlling Sheets Or Webs (AREA)
Abstract
The present invention provides a kind of thickness detection apparatus, comprising: common unit, common unit are rodlike metalwork；Detection unit, there is the transfer passage of conveying testee between common unit and detection unit, detection unit has detection chip, and the detection signal that common unit issues is transmitted to detection chip through testee, and detection chip judges the thickness of testee according to detection signal.The present invention solves the problems, such as that the sensitivity of thickness detection apparatus in the prior art is low, detection is inaccurate.
Description
Technical field
The present invention relates to Thickness sensitivity technical fields, in particular to a kind of thickness detection apparatus.
Background technique
Laminar article, such as the on-line continuous thickness measure of bank note, paper, bill, plastics film to be measured, textile fabric,
In increasingly consequence during the production of its product, detection, processing, recycling etc..In recent years, pass through parallel-plate electricity
Electrostatic induction between container carries out the detection device of film thickness to be measured in continuous progress.As shown in Figure 1, this detection dress
It sets and is generally divided into common unit 10 ' and 20 ' two parts of detection unit, common unit 10 ' and detection unit 20 ' are in a first direction
It is oppositely arranged, the channel spaced apart for forming object under test.Wherein detection unit 20 ' is by the first framework 22 ', first substrate
23 ' and first cover board 25 ' form, be equipped with Thickness sensitivity chip 21 ' on first substrate 23 ' in a second direction, second direction with
First direction is vertical, and 23 ' lower section of first substrate is equipped with input/output interface 24 '.Common unit 10 ' is by second framework 12 ', second
Substrate 13 ' and the second cover board 15 ' form, and paving layers of copper is printed in the second substrate 13 ' as public electrode 14 '.Public electrode 14 ' is applied
It is thick when the medium between public electrode 14 ' and Thickness sensitivity chip 21 ' changes on added electric field to Thickness sensitivity chip 21 '
The voltage that degree detection chip 21 ' induces will change, to detect the thickness of object.
But this structure of existing thickness detection apparatus to begin between public electrode 14 ' and Thickness sensitivity chip 21 '
There are the first cover boards 25 ' and the second cover board 15 ' eventually, in order to smoothly walk paper money, walking between common unit 10 ' and detection unit 20 '
Paper money channel can not be arranged too small, therefore the spacing between public electrode 14 ' and Thickness sensitivity chip 21 ' can not be leaned on very
Closely, therefore sensitivity is relatively low, when testee passes through in channel spacing close to detection unit 20 ' and close to common unit 10 '
By when obtain detect voltage difference.Especially high speed test when, testee floats up and down in channel, same thickness
Object, the result of detection is different, be easy to cause erroneous judgement；It is special, when object to be detected is there are when fold, this deviation effects
It can not eliminate.
This structure of common unit 10 ' can not make the distance between public electrode 14 ' and thickness chip into one at present
Step reduces, and this planar structure of public electrode 14 ' is also unfavorable for the concentration of electric field, to improve sensitivity.Further more, such thickness
Detection device is influenced very greatly, bank note to be detected under moist environment by humidity, and image is whole partially dark, can not be accurately identified.This
This structure of outer common unit 10 ', production is also more complicated, in certain occasions for needing continuously to measure, this common unit
10 ' structure also limits the application of such thickness detection apparatus.
Summary of the invention
The main purpose of the present invention is to provide a kind of thickness detection apparatus, to solve Thickness sensitivity dress in the prior art
The problem that the sensitivity set is low, detection is inaccurate.
To achieve the goals above, the present invention provides a kind of thickness detection apparatus, comprising: common unit, common unit
For rodlike metalwork；Detection unit, has the transfer passage of conveying testee between common unit and detection unit, detection is single
Member has detection chip, and the detection signal that common unit issues is transmitted to detection chip through testee, and detection chip is according to inspection
Survey the thickness that signal judges testee.
Further, along the line direction of common unit and detection unit, the distance of transfer passage is more than or equal to 0.1 millimeter
And it is less than or equal to 2 millimeters.
Further, the line between common unit and detection chip is vertical with the conveying direction of testee.
Further, common unit is cylindrical, and cylindrical axis is parallel with the plane where transfer passage.
Further, common unit is tapered, and the axis of taper is vertical with the plane where transfer passage, and the cone of taper
Point is close to detection unit.
Further, thickness detection apparatus further includes guide part, and guide part is located at common unit close to the one of detection unit
The outer rim at end, to play guiding function to testee.
Further, common unit is arc-shaped, and projection of the arc in the plane where transfer passage is rectangular.
Further, common unit is the roll shaft for pivoting setting, and the axis of roll shaft is parallel with the plane where transfer passage.
Further, thickness detection apparatus further includes directive wheel, and directive wheel is arranged in pairs, and two be arranged in pairs are oriented to
The accessory channel of conveying testee is formed between wheel, accessory channel is connected to transfer passage.
Further, common unit is the roller for being arranged with testee.
Further, detection unit includes: framework, and framework has the holding tank for accommodating detection unit；Substrate, substrate setting
In holding tank, detection unit is connect with substrate；Input/output interface, input/output interface are disposed on the substrate and single with detection
Member connection；Cover board, cover plate lid are located at the opening of holding tank.
Further, substrate is parallel with the testee being located in transfer passage, and detection unit includes multiple detection chips,
Each detection chip is disposed on the substrate along the direction perpendicular to testee conveying.
Further, the opening of holding tank is towards transfer passage.
It applies the technical scheme of the present invention, by the way that common unit is arranged to rodlike metalwork, to rodlike metal when use
Part applies pulse voltage, and rodlike metalwork can effectively concentrate on electric field in detection unit, improves the sensitivity of detection device
And precision；Rodlike common unit can reduce gap between the two, to a certain degree to greatest extent close to detection unit
Upper reduction testee floating up and down in transfer passage, so that testee is close to detection unit side and close to public list
The output size of first side is almost the same.It, can be using lower pulse electricity on rodlike common unit due to the reduction in gap
Pressure, simplified control circuit substantially eliminates the influence of humidity, under the larger environment of humidity also can normal scan go out testee
Image, and image becomes clear uniform, and the production of this common unit is very simple and at low cost, need continuously to measure
Occasion is easy to combine with field detecting device, realizes miniaturization.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present invention, and of the invention shows
Examples and descriptions thereof are used to explain the present invention for meaning property, does not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 shows the structural schematic diagram of thickness detection apparatus in the prior art；
Fig. 2 shows the structural schematic diagrams of the thickness detection apparatus of form one of the invention；
Fig. 3 shows the structural schematic diagram of the thickness detection apparatus of form two of the invention；
Fig. 4 shows the structural schematic diagram of the thickness detection apparatus of form three of the invention；
Fig. 5 shows the structural schematic diagram of the thickness detection apparatus of form four of the invention；And
Fig. 6 shows the structural schematic diagram of the thickness detection apparatus of form five of the invention.
Wherein, the above drawings include the following reference numerals:
10 ', common unit；12 ', second framework；13 ', the second substrate；14 ', public electrode；15 ', second cover board；20',
Detection unit；21 ', Thickness sensitivity chip；22 ', first framework；23 ', first substrate；24 ', input/output interface；25 ', first
Cover board；10, common unit；20, detection unit；21, detection chip；22, framework；23, substrate；24, input/output interface；25,
Cover board；30, transfer passage；40, guide part；50, directive wheel.
Specific embodiment
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
It should be pointed out that unless otherwise specified, all technical and scientific terms used in this application have and the application
The normally understood identical meanings of person of an ordinary skill in the technical field.
In the present invention, in the absence of explanation to the contrary, the noun of locality used such as " upper and lower, top, bottom " is usually needle
For direction shown in the drawings, or for component itself is on vertical, vertical or gravity direction；Equally
Ground for ease of understanding and describes, and " inside and outside " refers to the inside and outside of the profile relative to each component itself, but the above-mentioned noun of locality is not
For limiting the present invention.
Sensitivity in order to solve the problems, such as thickness detection apparatus in the prior art is low, detection is inaccurate, and the present invention provides
A kind of thickness detection apparatus.
A kind of thickness detection apparatus as shown in Figures 2 to 6, including common unit 10 and detection unit 20, common unit
10 be rodlike metalwork；There is the transfer passage 30 of conveying testee, detection is single between common unit 10 and detection unit 20
Member 20 has detection chip 21, and the detection signal that common unit 10 issues is transmitted to detection chip 21 through testee, detects core
Piece 21 judges the thickness of testee according to detection signal.
The present embodiment applies pulse electricity to rodlike metalwork when use by the way that common unit 10 is arranged to rodlike metalwork
Pressure, rodlike metalwork can effectively concentrate on electric field in detection unit 20, improve the sensitivity and precision of detection device；It is rodlike
Common unit 10 can reduce gap between the two to greatest extent close to detection unit 20, reduce to a certain extent
Testee floating up and down in transfer passage 30, so that testee is close to 20 side of detection unit and close to common unit
The output size of 10 sides is almost the same.Due to the reduction in gap, lower pulse can be used on rodlike common unit 10
Voltage, simplified control circuit substantially eliminate the influence of humidity, under the larger environment of humidity also can normal scan go out measured object
The image of body, and image becomes clear uniform, and the production of this common unit 10 is very simple and at low cost, is needing continuous survey
The occasion of amount is easy to combine with field detecting device, realizes miniaturization.
The present embodiment is illustrated so that testee is film as an example, and certain testee is also possible to other objects.
In the present embodiment, along the line direction of common unit 10 and detection unit 20, the distance of transfer passage 30 is greater than
Equal to 0.1 millimeter and it is less than or equal to 2 millimeters, so that the size setting of transfer passage 30 can either be guaranteed in suitable distance
Testee passes through, and can reduce the gap between common unit 10 and detection unit 20 as much as possible, improves thick
Spend the sensitivity and detection accuracy of detection device.
Preferably, along the line direction of common unit 10 and detection unit 20, the distance of transfer passage 30 is more than or equal to 0.1
Millimeter and be less than or equal to 0.5 millimeter.
Optionally, the line between common unit 10 and detection chip 21 is vertical with the conveying direction of testee.Generally
In the case of, common unit 10 is located at the top of detection unit 20, and common unit 10 is located at the surface of detection chip 21, from
And make detection chip 21 receive the common unit 10 from metal electric field variation, guarantee detection accuracy.
In the present embodiment, detection unit 20 includes framework 22, substrate 23, input/output interface 24 and cover board 25, framework
22 have the holding tanks for accommodating detection unit 20, and the opening of holding tank is towards transfer passage 30；Substrate 23 is arranged in holding tank
Interior, detection unit 20 is connect with substrate 23；Input/output interface 24 is arranged on substrate 23 and connect with detection unit 20；Cover board
25 lids are located at the opening of holding tank.Resolution ratio, quantity and the sweep length of detection chip 21 can carry out according to the actual situation
Rationally setting, control signal of the input/output interface 24 for detection chip 21 and opposite voltage, and output detection data.Lid
Plate 25 is preferably ito glass, is located at 21 top of detection chip, is connected with framework 22, for protecting detection chip 21.
Optionally, substrate 23 is parallel with the testee being located in transfer passage 30, and detection unit 20 includes multiple detections
Chip 21, each detection chip 21 is arranged on substrate 23 along the direction conveyed perpendicular to testee, so that detection chip
21 can receive the electric field of common unit 10.
Following several shapes can be set into common unit 10:
Shape one
As shown in Fig. 2, common unit 10 is cylindrical, it is metal cylinder, and the axis of metal cylinder and conveying are logical
Plane where road 30 is parallel, that is, the axis of metal cylinder is parallel with cover board 25, and metal cylinder and detection chip
21 are oppositely arranged.
Optionally, 8 millimeters of metal cylinder diameter, it is 200 millimeters long.Gap can be set between metal cylinder and cover board 25
That sets is smaller, which is preferably 0.5 millimeter.In the embodiment, input/output interface 24 applies pulse to metal cylinder
Voltage, the electric field formed on metal cylinder pass through cover board 25 and are applied in opposite detection chip 21.When metal cylinder with
When testee thickness between cover board 25 changes, detection chip 21, which receives the electric field from metal cylinder, to be occurred
Variation, the size that detection chip 21 induces voltage can also change, to realize the detection to the thickness of testee.
In the embodiment, common unit 10 is the distance of transfer passage 30 at a distance from detection chip 21 plus cover board 25
Thickness, along with distance between 25 surface of detection chip 21 and cover board, compared with the prior art in thickness detection apparatus, this sets
The mode of setting greatly reduces the distance between 10 effective metal part of common unit and detection chip 21, improves sensitivity.It is this
Cylindrical structure, it is easier to electric field be concentrated in detection chip 21, sensitivity, and the Thickness sensitivity of the structure are further increased
Device is affected by humidity smaller.In addition, the common unit 10 of the embodiment is only metal cylinder, structure is simpler, production
Period is fast and at low cost.
Form two
As shown in figure 3, common unit 10 is tapered, the axis of taper is vertical with the plane where transfer passage 30, and bores
The cone of shape is close to detection unit 20.The set-up mode makes cone be easier to concentrate electric field, is applied in detection chip 21, from
And it can be further improved sensitivity.
Optionally, thickness detection apparatus further includes guide part 40, and guide part 40 is located at common unit 10 close to detection unit
The outer rim of 20 one end, to play guiding function to testee.Guide part 40 is arranged along the direction of motion of testee, thus
Testee can smoothly enter into and exit transfer passage 30.Guide part 40 is preferably non-metallic material scutum, avoids influencing gold
Belong to the electric field of the common unit 10 of material.
Form three
As shown in figure 4, common unit 10 is arc-shaped, and arc projects into square in the plane where transfer passage 30
Shape.Common unit 10 is arc plate-like piece, and projection of the arc plate-like piece on cover board 25 is in rectangle, which is more advantageous to tested
Object passes through, while simplifying the structure of thickness detection apparatus.
Form four
As shown in figure 5, common unit 10 is the roll shaft for pivoting setting, the axis of roll shaft and the plane where transfer passage 30
In parallel, roll shaft can be rotated relative to detection unit 20, so that roll shaft has the function of transporting testee.
Specifically, roll shaft, which can be, is separately provided, and also may belong to away a part of paper money equipment, fills as Thickness sensitivity
The common unit 10 set applies electric field with the detection chip 21 into detection unit 20.Roll shaft and walk between paper money equipment it is electrical absolutely
Edge, the pulse voltage on roll shaft can be provided by walking paper money equipment, can also be provided by thickness detection apparatus.The center of roll shaft is located at detection
The surface of chip 21, roll shaft and detection unit 20 constitute transfer passage 30, and transfer passage 30 is preferably 0.3 millimeter.The setting
Mode further decreases the distance between roll shaft and cover board 25, to enhance sensitivity, due to roll shaft high speed rotation, even if defeated
It send channel 30 gap shrinks, paper jam or card paper money phenomenon will not be caused.And it due to the diminution in 30 gap of transfer passage, limits
Testee floating up and down in transfer passage 30 eliminates testee because of deviation effects caused by floating up and down.For one
A bit there are fold or the tested laminar object of folding line, can subtract when passing through narrow transfer passage 30 under the rolling of metal roller shaft
The influence of light fold or folding line, improves detection accuracy.
Optionally, thickness detection apparatus further includes directive wheel 50, and the both ends of transfer passage 30 are arranged in directive wheel 50, guiding
Wheel 50 is arranged in pairs, and the accessory channel of conveying testee, accessory channel are formed between two be arranged in pairs directive wheel 50
It is connected to transfer passage 30, so that the facile motion of testee is realized in directive wheel 50 and roll shaft cooperation.
Form five
As shown in fig. 6, common unit 10 is the roller for being arranged with testee, 30 place of axis and transfer passage of roller
Plane it is parallel.
Specifically, roller, which can be, is separately provided, and the metal roller that is also possible in field detecting device doubles as thickness
Common unit 10 in detection device, is wound with detected film object thereon.Due to needing to apply on roller opposite pulse electricity
Pressure, so by roller and field detecting device electric insulation.Detection unit 20 is oppositely arranged with roller, forms 1.5 millimeters defeated
Send channel 30.Roller rotation drives testee to continuously run, while thickness detection apparatus applies pulse voltage, detection to roller
Detection chip 21 in unit 20 continuously induces voltage, exports detection data by input/output interface 24.When detected film
The thickness of object changes, or in the presence of having foreign matter, the electric field that roller is applied in detection chip 21 will change,
Detection chip 21 will change in the voltage that corresponding position induces, to realize the detection to thickness.Above-mentioned setting side
Formula is particularly suitable on site continuously to detect laminar object.When scene is continuously detected, it will usually be driven by motor
Roller drives object to be detected to be transmitted, and roller only need to be set as to metallic object as common unit 10, selected near roller
Suitable position is selected, the detection to laminar object can be realized in installation detection unit 20.Which is tight by tested laminar object
Tightly be wrapped on roller, reduce detection error caused by testee floats up and down, and install it is extremely convenient, save at
This.
It should be noted that multiple in above-described embodiment refer at least two.
It can be seen from the above description that the above embodiments of the present invention realized the following chievements:
1, solve the problems, such as that the sensitivity of thickness detection apparatus in the prior art is low, detection is inaccurate；
2, effectively electric field is concentrated on above Thickness sensitivity chip, improves the sensitivity and precision of detection device；
3, control circuit is simplified, the influence of humidity is substantially eliminated, it also being capable of normal scan under the larger environment of humidity
The image of testee out；
4, structure is simple and at low cost, in the occasion for needing continuously to measure, is easy to combine with field detecting device, realizes
Miniaturization.
Obviously, above-mentioned the described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts all
Other embodiments should fall within the scope of the present invention.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, work, device, component and/or their combination.
It should be noted that the description and claims of this application and term " first " in above-mentioned attached drawing, "
Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so that presently filed embodiment described herein can be in addition to illustrating herein
Or the sequence other than those of description is implemented.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (13)
1. a kind of thickness detection apparatus characterized by comprising
Common unit (10), the common unit (10) are rodlike metalwork；
Detection unit (20) has the conveying of conveying testee between the common unit (10) and the detection unit (20)
Channel (30), the detection unit (20) have detection chip (21), and the detection signal that the common unit (10) issues is through institute
It states testee to be transmitted to the detection chip (21), the detection chip (21) judges described tested according to the detection signal
The thickness of object.
2. thickness detection apparatus according to claim 1, which is characterized in that along the common unit (10) and the detection
The line direction of unit (20), the distance of the transfer passage (30) are more than or equal to 0.1 millimeter and are less than or equal to 2 millimeters.
3. thickness detection apparatus according to claim 1, which is characterized in that the common unit (10) and the detection core
Line between piece (21) is vertical with the conveying direction of the testee.
4. thickness detection apparatus according to claim 1, which is characterized in that the common unit (10) is cylindrical, and
The axis of the cylinder is parallel with the plane where the transfer passage (30).
5. thickness detection apparatus according to claim 1, which is characterized in that the common unit (10) is tapered, described
The axis of taper is vertical with the plane where the transfer passage (30), and the cone of the taper is close to the detection unit
(20)。
6. thickness detection apparatus according to claim 5, which is characterized in that the thickness detection apparatus further includes guide part
(40), the guide part (40) is located at the common unit (10) close to the outer rim of the one end of the detection unit (20), with right
The testee plays guiding function.
7. thickness detection apparatus according to claim 1, which is characterized in that the common unit (10) is arc-shaped, and institute
It is rectangular to state projection of the arc in the plane where the transfer passage (30).
8. thickness detection apparatus according to claim 1, which is characterized in that the common unit (10) is to pivot setting
Roll shaft, the axis of the roll shaft are parallel with the plane where the transfer passage (30).
9. thickness detection apparatus according to claim 8, which is characterized in that the thickness detection apparatus further includes directive wheel
(50), the directive wheel (50) is arranged in pairs, and is formed between two be arranged in pairs the directive wheel (50) and convey the quilt
The accessory channel of object is surveyed, the accessory channel is connected to the transfer passage (30).
10. thickness detection apparatus according to claim 1, which is characterized in that the common unit (10) be winding
State the roller of testee.
11. thickness detection apparatus according to any one of claim 1 to 10, which is characterized in that the detection unit
(20) include:
Framework (22), the framework (22) have the holding tank for accommodating the detection unit (20)；
Substrate (23), the substrate (23) are arranged in the holding tank, and the detection unit (20) and the substrate (23) are even
It connects；
Input/output interface (24), the input/output interface (24) be arranged on the substrate (23) and with the detection unit
(20) it connects；
Cover board (25), cover board (25) lid are located at the opening of the holding tank.
12. thickness detection apparatus according to claim 11, which is characterized in that the substrate (23) be located at the conveying
Testee in channel (30) is parallel, and the detection unit (20) includes multiple detection chips (21), each detection chip (21)
It is arranged on the substrate (23) along the direction perpendicular to testee conveying.
13. thickness detection apparatus according to claim 11, which is characterized in that the opening of the holding tank is towards described defeated
Send channel (30).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811223469.6A CN109163668A (en) | 2018-10-19 | 2018-10-19 | Thickness detection apparatus |
| PCT/CN2019/079623 WO2020077950A1 (en) | 2018-10-19 | 2019-03-26 | Thickness detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811223469.6A CN109163668A (en) | 2018-10-19 | 2018-10-19 | Thickness detection apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN109163668A true CN109163668A (en) | 2019-01-08 |
Family
ID=64878589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811223469.6A Pending CN109163668A (en) | 2018-10-19 | 2018-10-19 | Thickness detection apparatus |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109163668A (en) |
| WO (1) | WO2020077950A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109855547A (en) * | 2019-01-13 | 2019-06-07 | 叶新荣 | A kind of measuring device of vehicle glass |
| CN110701989A (en) * | 2019-08-29 | 2020-01-17 | 威海华菱光电股份有限公司 | Thickness detection device and thickness detection method |
| WO2020077950A1 (en) * | 2018-10-19 | 2020-04-23 | 威海华菱光电股份有限公司 | Thickness detection device |
| WO2021036343A1 (en) * | 2019-08-29 | 2021-03-04 | 威海华菱光电股份有限公司 | Thickness measurement apparatus, method and system, storage medium and processor |
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| WO2020077950A1 (en) * | 2018-10-19 | 2020-04-23 | 威海华菱光电股份有限公司 | Thickness detection device |
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| WO2021036343A1 (en) * | 2019-08-29 | 2021-03-04 | 威海华菱光电股份有限公司 | Thickness measurement apparatus, method and system, storage medium and processor |
| JP2022532820A (en) * | 2019-08-29 | 2022-07-20 | ウェイハイ ファーリング オプト－エレクトロニクス カンパニー リミテッド | Thickness detector method System storage medium and processor |
| JP7325518B2 (en) | 2019-08-29 | 2023-08-14 | ウェイハイ ファーリング オプト－エレクトロニクス カンパニー リミテッド | Thickness detector method system storage medium and processor |
| US11946739B2 (en) | 2019-08-29 | 2024-04-02 | Weihai Hualing Opto-Electronics Co., Ltd. | Thickness detection device, method and system |
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Application publication date: 20190108 |