CN109158782A - Air bearing control system, system of throwing the net, air bearing control method and storage medium - Google Patents
Air bearing control system, system of throwing the net, air bearing control method and storage medium Download PDFInfo
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- CN109158782A CN109158782A CN201811012087.9A CN201811012087A CN109158782A CN 109158782 A CN109158782 A CN 109158782A CN 201811012087 A CN201811012087 A CN 201811012087A CN 109158782 A CN109158782 A CN 109158782A
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- China
- Prior art keywords
- air bearing
- region
- clearance distance
- frame
- control assembly
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/003—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to controlling of welding distortion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
Abstract
The invention discloses a kind of air bearing control system, system of throwing the net, air bearing control method and storage mediums, belong to display panel manufacturing field.The air bearing control system includes: work base station and air bearing control assembly；Work base station includes: base station ontology, and the working face of base station ontology has multiple air bearing regions, is provided with detection components and multiple air bearing holes in each air bearing region.The detection components are configured as: in bearing frame on base station ontology, detecting the clearance distance between air bearing region and frame.All air bearing holes in each air bearing region are connect with air bearing control assembly, air bearing control assembly is also connect with each detection components, the air bearing control assembly is configured as: according to each detection components clearance distance detected, adjust the air bearing dynamics in the air bearing hole in air bearing region, so that the clearance distance in base station ontology between each air bearing region and frame is equal, accuracy when the subsequent application resistance to frame is effectively raised.
Description
Technical field
The present invention relates to display panel manufacturing field, in particular to a kind of air bearing control system, system of throwing the net, air bearing control
Method and storage medium.
Background technique
Organic Light Emitting Diode (English: Organic light emitting diode；Referred to as: OLED) display panel is
Novel display panel on the market.In the production of OLED display panel, for being deposited luminous organic material to display base plate
On fine metal mask plate (English: Fine Metal Mask, referred to as: FMM) component is in OLED display panel production process
Important component.
Under normal conditions, FMM component includes: frame, support mask plate and a plurality of FMM item, and FMM component is generally used and thrown the net
Technology production, the process of throwing the net is exactly that mask plate and FMM item will be supported to be welded to the process on frame.Due to one FMM of every welding
When, the FMM item frame can be generated certain drawing force (English: Stretch Force, referred to as: SF), which can make
At frame deformation occurs so as to cause finally formed entire FMM component deformation.In order to balance this drawing force, usually welding
Certain resistance (English: Counter Force, abbreviation: CF) can be applied in termination process to frame.Currently, using dress of throwing the net
It sets and resistance is applied to the frame in welding process.The device of throwing the net includes multiple shackle members, and multiple shackle member is for pressing from both sides
Frame is held, and is that frame applies resistance in the position of clamping.
It, should since multiple shackle member is to apply resistance to the frame when frame is placed on carrying base station
There are frictional force between frame and carrying base station, which will affect multiple shackle members and applies the accurate of resistance to frame
Property.Apply the accuracy of resistance in order to improve multiple shackle members to frame, which can use with air bearing hole
Air bearing base station substitution can be made between frame and the air bearing base station by air bearing base station there are a certain distance, effective to reduce
Frictional force between frame and the air bearing base station.
But due to the error of manufacturing process, the surface of the frame be not it is substantially flat (that is to say, the frame
Flatness is lower), therefore the frame can not uniformly swim on air bearing base station and (that is to say, in air bearing base station and frame respectively
Clearance distance between a position may be different), when causing subsequently through multiple shackle members to frame application resistance
Accuracy is lower.
Summary of the invention
This application provides a kind of air bearing control system, system of throwing the net, air bearing control method and storage mediums, can solve
Existing frame can not uniformly be swum on air bearing base station, caused to apply the frame subsequently through multiple shackle members and be fought
The lower problem of accuracy when power.The technical solution is as follows:
In a first aspect, providing a kind of air bearing control system, comprising:
Work base station and air bearing control assembly；
The work base station includes: base station ontology, and the working face of the base station ontology has multiple air bearing regions, Mei Gesuo
It states and is provided with detection components and multiple air bearing holes in air bearing region, the detection components are configured as: in the base station ontology
When upper bearing frame, the clearance distance between the air bearing region and the frame is detected；Institute in each air bearing region
Some air bearing holes are connect with the air bearing control assembly, and the air bearing control assembly is also connect with each detection components, institute
It states air bearing control assembly to be configured as: according to each detection components clearance distance detected, adjusting the air bearing region
In air bearing hole air bearing dynamics.
Optionally, the air bearing control assembly is configured as:
Obtain the clearance distance between each detection components corresponding air bearing region detected and the frame；Sentence
Whether the clearance distance to break between each air bearing region and the frame is in prepsetting gap distance range；Adjust clearance gap
Air bearing dynamics from the air bearing hole in the air bearing region being not in the prepsetting gap distance range.
Optionally, the air bearing control assembly is configured as:
It obtains each detection components and detects clearance distance between corresponding air bearing region and the frame；Institute
It states and determines target air bearing region in multiple air bearing regions；According to the clearance gap between target air bearing region and the frame
From adjusting the lift of gas in the air bearing hole in the air bearing region in the multiple air bearing region in addition to target air bearing region
Degree.
Optionally, the air bearing control assembly is configured as:
When in the clearance distance between the multiple air bearing region and the frame there are when identical clearance distance, statistics
The number of different gap distance；
Air bearing region corresponding to the largest number of clearance distances is determined as target air bearing region.
Optionally, the air bearing control assembly is configured as:
It, will when identical clearance distance is not present in the clearance distance between the multiple air bearing region and the frame
Any air bearing region for meeting default air bearing condition in the multiple air bearing region is determined as target air bearing region；
Wherein, the default air bearing condition are as follows: the clearance distance between the air bearing region and the frame is not 0.
Optionally, the air bearing control system further include: Airfloat pump and Duo Gen gas piping, in each air bearing region
Multiple air bearing holes are connect by a gas piping with the Airfloat pump；
The air bearing control system further include: the control damper being arranged on every gas piping, each air-flow
Control valve is connect with the air bearing control assembly, and the air bearing control assembly is configured as: by controlling the gas flow optimized
Valve adjusts the air bearing dynamics in the air bearing hole in the air bearing region.
Optionally, the air bearing control system further include: multiple Airfloat pumps, in each air bearing region multiple air bearing holes
It is connect by gas piping with an Airfloat pump,
Each Airfloat pump is also connect with the air bearing control assembly, and the air bearing control assembly is configured as: logical
It crosses and controls the Airfloat pump, adjust the air bearing dynamics in the air bearing hole in the air bearing region.
Optionally, the detection components are capacitive displacement transducer.
Optionally, multiple detection components are uniformly arranged on the working face of the base station ontology.
Optionally, the air bearing control assembly is integrated in the work base station, alternatively, the air bearing control assembly is located at
Outside the work base station, the air bearing control assembly is connect by cable with the work base station.
Second aspect provides one kind and throws the net system, comprising: air bearing control system and multiple shackle members, the air bearing control
System processed is any air bearing control system of first aspect, and the multiple shackle member is arranged in the air bearing control system
Work base station on.
The third aspect provides a kind of air bearing control method, applied to any air bearing control system of first aspect,
The described method includes:
In the work base station bearing frame, the clearance gap between each air bearing region and the frame is obtained
From；
According to the clearance distance got, the air bearing dynamics in the air bearing hole in the air bearing region is adjusted.
Optionally, the clearance distance that the basis is got adjusts the air bearing dynamics in the air bearing hole in the air bearing region,
Include:
Judge the clearance distance between each air bearing region and the frame whether in prepsetting gap distance range；
Adjust the lift of gas that clearance distance is not at the air bearing hole in the air bearing region in the prepsetting gap distance range
Degree.
Optionally, the clearance distance that the basis is got adjusts the air bearing dynamics in the air bearing hole in the air bearing region,
Include:
Target air bearing region is determined in the multiple air bearing region；
According to the clearance distance between target air bearing region and the frame, adjusts and removed in the multiple air bearing region
The air bearing dynamics in the air bearing hole in air bearing region except target air bearing region.
Fourth aspect provides a kind of computer readable storage medium, the finger in the computer readable storage medium
It enables when being executed by the air bearing control assembly of air bearing control system, so as to be able to carry out the third aspect any for the air bearing control assembly
The air bearing control method.
Technical solution provided in an embodiment of the present invention has the benefit that
The air bearing control system includes: work base station and air bearing control assembly, the work of the base station ontology in the work base station
Make that there are multiple air bearing regions on face, is provided with detection components and multiple air bearing holes, each air flotation zone in each air bearing region
All air bearing holes in domain are connect with air bearing controller, which also connect with each detection components.The detection group
Part is configured as: in bearing frame on base station ontology, detecting the clearance distance between air bearing region and frame；Air bearing control
Component is configured as: according to each detection components clearance distance detected, adjusting the air bearing dynamics in air bearing hole in air bearing region.
In base station ontology bearing frame, the air bearing dynamics in the air bearing hole in air bearing region is adjusted by air bearing control assembly, so that base
Clearance distance in playscript with stage directions body between each air bearing region and frame is equal, effectively raises subsequent to frame application resistance
When accuracy.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is a kind of structural schematic diagram for air bearing control system that the embodiment of the present invention passes through；
Fig. 2 is a kind of top view of work base station provided in an embodiment of the present invention；
Fig. 3 is the side view of air bearing control system shown in fig. 1；
Fig. 4 is the structural schematic diagram of another air bearing control system provided in an embodiment of the present invention；
Fig. 5 is the structural schematic diagram of another air bearing control system provided in an embodiment of the present invention；
Fig. 6 is a kind of structural schematic diagram for system of throwing the net that the embodiment of the present invention passes through；
Fig. 7 is a kind of flow chart of air bearing control method provided in an embodiment of the present invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention
Formula is described in further detail.
Referring to FIG. 1, Fig. 1 is a kind of structural schematic diagram for air bearing control system that the embodiment of the present invention passes through, the air bearing
Control system includes:
Work base station 10 and air bearing control assembly 20.Optionally, which may include: central processing unit
(English: Central Processing Unit；Referred to as: CPU).
The work base station 10 includes: base station ontology 11, and the working face S of the base station ontology 11 has multiple air bearing regions 12.
For the clearer structure for finding out each air bearing region 12 in base station ontology 11, Fig. 2 and Fig. 3 are please referred to, Fig. 2 is of the invention real
A kind of top view of work base station of example offer is applied, Fig. 3 is the side view of air bearing control system shown in fig. 1.Each air flotation zone
Detection components 121 and multiple air bearing holes 122 are provided in domain 12.Detection components 121 in each air bearing region 12 are configured
Are as follows: in bearing frame 00 on base station ontology 11, detect the clearance distance between the air bearing region 12 and frame 00.It needs to illustrate
, in order to enable detection components 121 can accurate detection go out the clearance gap between corresponding air bearing region 12 and frame 00
From multiple detection components 121 can be uniformly arranged on the working face S of base station ontology 11, and each detection components 121 can
To be arranged in the middle section in corresponding air bearing region 12.
All air bearing holes 122 in each air bearing region 12 are connect with air bearing control assembly 20, the air bearing control assembly
20 also connect with each detection components 121.The air bearing control assembly 20 is configured as: being detected according to each detection components 121
Clearance distance, adjust air bearing region 12 in air bearing hole 122 air bearing dynamics.
In embodiments of the present invention, in base station 11 bearing frame 00 of ontology, air bearing is adjusted by air bearing control assembly 20
The air bearing dynamics in the air bearing hole 122 in region 12 so that in base station ontology 11 between each air bearing region 12 and frame 00 between
Gap is equidistant, and effectively raises accuracy when the subsequent application resistance to frame 00.It is exemplary, as shown in Figure 1, Figure 2 and Fig. 3
It is shown, it is assumed that clearance distance detected by the detection components 121 in the 12a of air bearing region, relative in other air bearing regions
Detection components detected by clearance distance it is smaller, air bearing control assembly 20 can be by the air bearing hole 122 in the 12a of air bearing region
Air bearing dynamics tune up so that the clearance distance between air bearing region 12a and frame 00, with other air bearing regions and frame 00
Between clearance distance it is equal.
In conclusion air bearing control system provided in an embodiment of the present invention, comprising: work base station and air bearing control assembly,
There are multiple air bearing regions on the working face of base station ontology in the work base station, be provided with detection group in each air bearing region
Part and multiple air bearing holes, all air bearing holes in each air bearing region are connect with air bearing controller, the air bearing controller also with
Each detection components connection.The detection components are configured as: in bearing frame on base station ontology, detecting air bearing region and frame
Between clearance distance；The air bearing control assembly is configured as: according to each detection components clearance distance detected, adjusting gas
The air bearing dynamics in air bearing hole in the domain of floating region.In base station ontology bearing frame, adjusted in air bearing region by air bearing control assembly
Air bearing hole air bearing dynamics so that the clearance distance in base station ontology between each air bearing region and frame is equal, effectively
Improve accuracy when the subsequent application resistance to frame.
In embodiments of the present invention, as shown in Figure 1, Figure 2 and Figure 3, air bearing control assembly 20 is according to each detection components 121
Detected clearance distance, there are many modes for adjusting the air bearing dynamics in the air bearing hole 122 in air bearing region 12, and the present invention is real
Applying example can be schematically illustrated by following two for realization mode:
Can be in realization mode at the first, air bearing control assembly 20 may determine that detected by each detection components 121
Whether clearance distance is in prepsetting gap distance range, to determine air bearing region 12 that needs are adjusted.It is exemplary, the air bearing control
Component 20 processed is configured as: between obtaining between each detection components 121 corresponding air bearing region 12 detected and frame 00
Stand-off distance from；Judge the clearance distance between each air bearing region 12 and frame 00 whether in prepsetting gap distance range；It adjusts
Clearance distance is not at the air bearing dynamics in the air bearing hole 122 in the air bearing region 12 in prepsetting gap distance range.
In embodiments of the present invention, the detection components 121 in each air bearing region 12 detect the air bearing region 12 with
After clearance distance between frame 00, clearance distance can be converted into electric signal, wherein different clearance distances can correspond to not
Same electric signal.The electric signal of conversion can be sent to air bearing control assembly 20 by each detection components 121, the air bearing control group
The electric signal received can be again converted to clearance distance by part 20, which be got each
Clearance distance between corresponding air bearing region 12 and frame 00 detected by detection components 121.Air bearing control assembly 20 exists
After getting clearance distance detected by each detection components 121, each air bearing region 12 and frame 00 can be successively judged
Between clearance distance whether in prepsetting gap distance range, and adjust clearance distance and be not in prepsetting gap distance range
Air bearing region 12 in air bearing hole 122 air bearing dynamics.
For example, air bearing control assembly 20 is determining the clearance distance between air bearing region 12a and frame 00 not default
After within the scope of clearance distance, if the clearance distance between the air bearing region 12a and frame 00 is greater than the upper limit of prepsetting gap distance
Value, air bearing control assembly 20 can turn down the air bearing dynamics in the air bearing hole 122 in the 12a of the air bearing region, so that the air flotation zone
Clearance distance between domain 12a and frame 00 is in prepsetting gap distance range；If between the air bearing region 12a and frame 00
Clearance distance be less than prepsetting gap distance lower limit value, air bearing control assembly 20 can be by the air bearing in the 12a of the air bearing region
The air bearing dynamics in hole 122 is turned up, so that the clearance distance between the air bearing region 12a and frame 00 is in prepsetting gap apart from model
In enclosing.
In second of achievable mode, air bearing control assembly 20 can determine target air bearing in multiple air bearing regions 12
Region adjusts the air bearing region that target air bearing region is removed in multiple air bearing region 12.It is exemplary, 20 quilt of air bearing control assembly
It is configured that each detection components 121 of acquisition detect the clearance distance between corresponding air bearing region 12 and frame 00；Multiple
Target air bearing region is determined in air bearing region 12；According to the clearance distance between target air bearing region and frame 00, adjust multiple
The air bearing dynamics in the air bearing hole in air bearing region in air bearing region 12 in addition to target air bearing region, so that each air bearing region
Clearance distance between 12 and frame 00 is equal.
It should be noted that air bearing control assembly 20, which obtains each detection components 121, detects corresponding air bearing region 12
The process and principle of clearance distance between frame 00, can with reference to the first can corresponding content in realization mode, this hair
Details are not described herein for bright embodiment.
In embodiments of the present invention, between air bearing control assembly 20 may determine that between multiple air bearing regions 12 and frame 00
Stand-off distance whether there is identical clearance distance from, when air bearing control assembly 20 judge multiple air bearing regions 12 and frame 00 it
Between clearance distance in there are when identical clearance distance, air bearing control assembly 20 determines target gas in multiple air bearing regions 12
The mode in floating region domain is judged in the clearance distance between multiple air bearing regions 12 and frame 00 not with air bearing control assembly 20 is worked as
There are when identical clearance distance, air bearing control assembly 20 determines the mode in target air bearing region not in multiple air bearing regions 12
Together, the embodiment of the present invention is schematically illustrated in terms of following two:
In a first aspect, when air bearing control assembly 20 is judged in the clearance distance between multiple air bearing regions 12 and frame 00
There are when identical clearance distance, air bearing control assembly 20 can count the number of different clearance distances, and number is most
Clearance distance corresponding to air bearing region be determined as target air bearing region.At this point, air bearing control assembly 20, which is adjusted, removes target gas
The number in the air bearing region except the domain of floating region is less, effectively simplifies the gas in the adjusting of air bearing control assembly 20 air bearing region 12
The complexity of the air bearing dynamics in floating hole 122.
For example, as shown in Figure 1, Figure 2 and Figure 3, it is assumed that the working face S of base station ontology 11 has 10 air bearing regions 12,
When base station 11 bearing frame 00 of ontology, air bearing control assembly 20 is detected corresponding in each detection components 121 of acquisition
It in clearance distance between air bearing region and the frame 00, counts: the clearance distance between 4 air bearing regions and frame 00
For 5 millimeters (mm), the clearance distance between 3 air bearing regions and frame 00 is 4mm, between 2 air bearing regions and frame 00
Clearance distance is 2mm, and the clearance distance between 1 air bearing region and frame 00 is 1.5mm.At this point, air bearing control assembly 20 can
To be that air bearing region corresponding to 5mm is determined as target area by clearance distance.Air bearing control assembly 20 is by adjusting multiple gas
The air bearing dynamics that the air bearing hole in target air bearing region is removed in floating region domain 12, so that between each air bearing region 12 and frame 00
Gap is equidistant.
Specification is needed, if the clearance distance that air bearing control assembly 20 counts occurs: at least two gaps are apart from right
The number answered is most and number is identical, which can not be 0 apart from intermediate gap distance by air bearing control assembly 20
The corresponding air bearing region of any clearance distance be determined as target air bearing region.For example, if air bearing control assembly 20 counts: 4
Clearance distance between a air bearing region and frame 00 is 5mm, and the clearance distance between 4 air bearing regions and frame 00 is 4mm,
Clearance distance between 2 air bearing regions and frame 00 is 1.5mm.At this point, clearance distance can be 5mm by air bearing control assembly
Corresponding air bearing region, alternatively, clearance distance is that air bearing region corresponding to 4mm is determined as target air bearing region.
Second aspect, when in the clearance distance that air bearing control assembly 20 judges between multiple air bearing regions 12 and frame 00
There is no when identical clearance distance, air bearing control assembly 20 can will meet appointing for air bearing condition in multiple manner region 12
One air bearing region is determined as target air bearing region.The default air bearing condition are as follows: the clearance gap between air bearing region 12 and frame 00
From not be 0.Air bearing control assembly 20 removes the lift of gas in the air bearing hole in target air bearing region by adjusting in multiple air bearing regions 12
Degree, so that each air bearing region 12 is equal with the clearance distance between frame 00.
In an optional implementation manner, air bearing control assembly 20 adjusts the side of the dynamics in the air bearing hole in air bearing region
There are many formulas, and the embodiment of the present invention is schematically illustrated by taking following two implementation as an example:
In the first implementation, as shown in figure 4, Fig. 4 is another air bearing control system provided in an embodiment of the present invention
The structural schematic diagram of system, the air bearing control system further include: Airfloat pump 30 and Duo Gen gas piping 40.In each air bearing region 12
Multiple air bearing holes 122 connect with Airfloat pump 30 by an air bearing pipeline 40.The air bearing control system further include: in every gas
The control damper 50 being arranged on body pipeline 40, each control damper 50 are connect with air bearing control assembly 20.The air bearing control
Component 20 processed is configured as: by controlling air bearing control valve 50, adjusting the air bearing dynamics in the air bearing hole 122 in air bearing region 12.
In embodiments of the present invention, which can be solenoid valve, and air bearing control assembly 20 can control gas
Floating control valve 50, so that flowing to the gas stream in air bearing region 12 in the adjustable corresponding gas piping 40 of the air bearing control valve 50
Amount, to realize the adjusting to the air bearing dynamics in air bearing hole 122.
In the second implementation, as shown in figure 5, Fig. 5 is another air bearing control provided in an embodiment of the present invention system
The structural schematic diagram of system, the air bearing control system further include: multiple Airfloat pumps 30, in each air bearing region 12 multiple air bearing holes
122 are connect by gas piping 40 with an Airfloat pump 30.Each Airfloat pump 30 is also connect with air bearing control assembly 20, the gas
Floating control assembly 20 is configured as: by controlling Airfloat pump 30, adjusting the air bearing dynamics in the air bearing hole 122 in air bearing region 12.
In embodiments of the present invention, air bearing control assembly 20 can control each Airfloat pump 30 and flow to corresponding gas piping
40 gas flow, to realize the adjusting to the air bearing dynamics in air bearing hole 122.
Optionally, the Airfloat pump 30 in above-described embodiment can be blower pump.Detection components 121 in above-described embodiment
It can be capacitor position formula displacement sensor capacitance displacement sensor.The capacitive displacement transducer belongs to sensing element, the capacitor position
The mechanical displacement distance of object (that is to say the frame in the embodiment of the present invention) can be converted to capacitor quantitative change change by displacement sensor
Change, and by the size of electric capacitance change come the shift length of detection object.
In embodiments of the present invention, air bearing control assembly 20 can integrate in work base station 10；The air bearing control assembly
20 can also be located at outside work base station 10, at this point, the air bearing control assembly 20 can be connect by cable with work base station 10.
In conclusion air bearing control system provided in an embodiment of the present invention, comprising: work base station and air bearing control assembly,
There are multiple air bearing regions on the working face of base station ontology in the work base station, be provided with detection group in each air bearing region
Part and multiple air bearing holes, all air bearing holes in each air bearing region are connect with air bearing controller, the air bearing controller also with
Each detection components connection.The detection components are configured as: in bearing frame on base station ontology, detecting air bearing region and frame
Between clearance distance；The air bearing control assembly is configured as: according to each detection components clearance distance detected, adjusting gas
The air bearing dynamics in air bearing hole in the domain of floating region.In base station ontology bearing frame, adjusted in air bearing region by air bearing control assembly
Air bearing hole air bearing dynamics so that the clearance distance in base station ontology between each air bearing region and frame is equal, effectively
Improve accuracy when the subsequent application resistance to frame.
It throws the net system the embodiment of the invention also provides one kind, as shown in fig. 6, Fig. 6 is one that the embodiment of the present invention passes through
The structural schematic diagram for system of throwing the net is planted, which may include: air bearing control system and multiple shackle members 200, the air bearing
Control system can be the air bearing control system shown in Fig. 1, Fig. 4 or Fig. 5.Multiple shackle member 200 can be set in air bearing control
On work base station 10 in system processed.
In embodiments of the present invention, when base station 11 bearing frame of ontology in the base station 10 that works, in base station ontology 11
The detection components 121 being arranged in each air bearing region 12 detect the clearance distance between corresponding air bearing region and frame, air bearing
Control assembly 20 can adjust the air bearing hole 122 in air bearing region 12 according to each detection components 121 clearance distance detected
Air bearing dynamics so that the clearance distance between each air bearing region 12 and frame is equal.It is clamped again by multiple shackle members 200
The frame, and the accuracy when the non-frame in the position of clamping applies resistance is higher.
The embodiment of the invention also provides a kind of air bearing control methods, as shown in fig. 7, Fig. 7 is that the embodiment of the present invention provides
A kind of air bearing control method flow chart, this method apply and the air bearing control system shown in Fig. 1, Fig. 4 or Fig. 5, this method
May include:
Step 701, when working base station bearing frame, obtain the clearance distance between each air bearing region and frame.
It in embodiments of the present invention, can be by the inspection that is arranged in each air bearing region when working base station bearing frame
Survey the clearance distance between the corresponding air bearing region of component detection and frame.After each detection components detect clearance distance,
Clearance distance detected by the available each detection components of air bearing control assembly in air bearing control system.
The clearance distance that step 702, basis are got, adjusts the air bearing dynamics in the air bearing hole in air bearing region.
In embodiments of the present invention, according to the clearance distance got, the lift of gas in the air bearing hole in air bearing region is adjusted
Degree can there are many implementations, the embodiment of the present invention can be schematically illustrated for realization mode by following two:
Can be in realization mode at the first, above-mentioned steps 702 may include the following steps:
Step A1, judge the clearance distance between each air bearing region and frame whether in prepsetting gap distance range.
In embodiments of the present invention, after getting the clearance distance between each air bearing region and frame in step 701,
Whether the air bearing control assembly in air bearing control system may determine that the clearance distance between each air bearing region and frame pre-
If within the scope of clearance distance.When air bearing control assembly judges the clearance distance between each air bearing region and frame default
When within the scope of clearance distance, tenth skill；When air bearing control assembly judges that there are between at least one air bearing region and frame
Clearance distance not in prepsetting gap distance range when, execute step B1.
Step B1, the air bearing that clearance distance is not at the air bearing hole in the air bearing region in prepsetting gap distance range is adjusted
Dynamics.
In embodiments of the present invention, the adjustable clearance distance of air bearing control assembly is not in prepsetting gap distance range
Air bearing region in air bearing hole air bearing dynamics so that the clearance distance in base station ontology between each air bearing region and frame
It is in prepsetting gap distance range.
In second of achievable mode, above-mentioned steps 702 may include the following steps:
Step A2, target air bearing region is determined in multiple air bearing regions.
In an optional implementation manner, before executing step A2, which can also include: that judgement is more
It whether there is identical clearance distance in clearance distance between a air bearing region and frame.Due to judging when air bearing control assembly
Out there are when identical clearance distance in the clearance distance between multiple air bearing regions and frame, air bearing control assembly is in multiple gas
The mode that target air bearing region is determined in the domain of floating region is judged between multiple air bearing regions and frame with air bearing control assembly is worked as
When identical clearance distance being not present in clearance distance, air bearing control assembly determines target air bearing region in multiple air bearing regions
Mode it is different, therefore, the embodiment of the present invention is schematically illustrated in terms of following two:
In a first aspect, when air bearing control assembly judges that there are phases in the clearance distance between multiple air bearing regions and frame
With clearance distance when, step A2 may include: the number that air bearing control assembly counts different clearance distances, and by number
Air bearing region corresponding to most clearance distances is determined as target air bearing region.
Second aspect is not present when in the clearance distance that air bearing control assembly judges between multiple air bearing regions and frame
When identical clearance distance, step A2 may include: that will meet any air flotation zone of air bearing condition in multiple manner region
Domain is determined as target air bearing region.The default air bearing condition are as follows: the clearance distance between air bearing region and the frame is not 0.
Step B2, it according to the clearance distance between target air bearing region and frame, adjusts in multiple air bearing regions except target
The air bearing dynamics in the air bearing hole in air bearing region except air bearing region.
In embodiments of the present invention, in the adjustable multiple air bearing regions of air bearing control assembly in addition to target air bearing region
Air bearing region in air bearing hole air bearing dynamics so that the clearance distance between each air bearing region and frame is equal.
It is apparent to those skilled in the art that for convenience and simplicity of description, the air bearing of foregoing description
The concrete operating principle of control method, can with reference to aforementioned air bearing control system structure embodiment in corresponding part,
This is repeated no more.
Shown in sum up, air bearing control method provided in an embodiment of the present invention obtains each when working base station bearing frame
Clearance distance between air bearing region and frame；According to the clearance distance got, the gas in the air bearing hole in air bearing region is adjusted
Buoyancy degree.In base station ontology bearing frame, the air bearing dynamics in the air bearing hole in air bearing region is adjusted by air bearing control assembly,
So that the clearance distance in base station ontology between each air bearing region and frame is equal, effectively raise subsequent to frame application
Accuracy when resistance.
The embodiment of the present application also provides a kind of computer readable storage medium, which is non-volatile
Property computer readable storage medium, when the instruction in the computer readable storage medium is by the air bearing control group of air bearing control system
When part executes, so that the air bearing control assembly is able to carry out above-mentioned steps 701 to the air bearing control method described in step 702.Example
Such as, which can be ROM, random access memory (RAM), CD-ROM, tape, floppy disk
With optical data storage devices etc..
The embodiment of the present application also provides a kind of air bearing control assembly, which includes: at least one
Processor, memory and at least one bus, memory are connected by bus with processor；At least one processor can be with
It is CPU, processor is configured as executing the instruction stored in memory；Processor realizes above-mentioned steps by executing instruction
701 to the air bearing control method described in step 702.
Those of ordinary skill in the art will appreciate that realizing that all or part of the steps of above-described embodiment can pass through hardware
It completes, relevant hardware can also be instructed to complete by program, the program can store in a kind of computer-readable
In storage medium, storage medium mentioned above can be read-only memory, disk or CD etc..
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (15)
1. a kind of air bearing control system characterized by comprising
Work base station and air bearing control assembly；
The work base station includes: base station ontology, and the working face of the base station ontology has multiple air bearing regions, each gas
It is provided with detection components and multiple air bearing holes in the domain of floating region, the detection components are configured as: being held on the base station ontology
When carrying frame, the clearance distance between the air bearing region and the frame is detected；
All air bearing holes in each air bearing region are connect with the air bearing control assembly, and the air bearing control assembly is also
It is connect with each detection components, the air bearing control assembly is configured as: detected according to each detection components
Clearance distance adjusts the air bearing dynamics in the air bearing hole in the air bearing region.
2. air bearing control system according to claim 1, which is characterized in that the air bearing control assembly is configured as:
Obtain the clearance distance between each detection components corresponding air bearing region detected and the frame；
Judge the clearance distance between each air bearing region and the frame whether in prepsetting gap distance range；
Adjust the air bearing dynamics that clearance distance is not at the air bearing hole in the air bearing region in the prepsetting gap distance range.
3. air bearing control system according to claim 1, which is characterized in that the air bearing control assembly is configured as:
It obtains each detection components and detects clearance distance between corresponding air bearing region and the frame；
Target air bearing region is determined in the multiple air bearing region；
According to the clearance distance between target air bearing region and the frame, adjust in the multiple air bearing region except described
The air bearing dynamics in the air bearing hole in air bearing region except target air bearing region.
4. air bearing control system according to claim 3, which is characterized in that the air bearing control assembly is configured as:
When, there are when identical clearance distance, statistics is different in the clearance distance between the multiple air bearing region and the frame
The number of clearance distance；
Air bearing region corresponding to the largest number of clearance distances is determined as target air bearing region.
5. air bearing control system according to claim 3, which is characterized in that the air bearing control assembly is configured as:
It, will be described when identical clearance distance is not present in the clearance distance between the multiple air bearing region and the frame
Any air bearing region for meeting default air bearing condition in multiple air bearing regions is determined as target air bearing region；
Wherein, the default air bearing condition are as follows: the clearance distance between the air bearing region and the frame is not 0.
6. air bearing control system according to any one of claims 1 to 5, which is characterized in that the air bearing control system is also wrapped
Include: Airfloat pump and Duo Gen gas piping, multiple air bearing holes pass through a gas piping and institute in each air bearing region
State Airfloat pump connection；
The air bearing control system further include: the control damper being arranged on every gas piping, each gas flow optimized
Valve is connect with the air bearing control assembly, and the air bearing control assembly is configured as: by controlling the control damper, being adjusted
Save the air bearing dynamics in the air bearing hole in the air bearing region.
7. air bearing control system according to any one of claims 1 to 5, which is characterized in that the air bearing control system is also wrapped
Include: multiple Airfloat pumps, multiple air bearing holes are connect by gas piping with an Airfloat pump in each air bearing region,
Each Airfloat pump is also connect with the air bearing control assembly, and the air bearing control assembly is configured as: passing through control
The Airfloat pump is made, the air bearing dynamics in the air bearing hole in the air bearing region is adjusted.
8. air bearing control system according to claim 1, which is characterized in that
The detection components are capacitive displacement transducer.
9. air bearing control system according to claim 1, which is characterized in that
Multiple detection components are uniformly arranged on the working face of the base station ontology.
10. air bearing control system according to claim 1, which is characterized in that
The air bearing control assembly is integrated in the work base station, alternatively, the air bearing control assembly is located at the work base
Outside platform, the air bearing control assembly is connect by cable with the work base station.
The system 11. one kind is thrown the net characterized by comprising air bearing control system and multiple shackle members, the air bearing control system
For any air bearing control system of claims 1 to 10, the multiple shackle member is arranged in the air bearing control system
Work base station on.
12. a kind of air bearing control method, which is characterized in that applied to any air bearing control system of claims 1 to 10,
The described method includes:
In the work base station bearing frame, the clearance distance between each air bearing region and the frame is obtained；
According to the clearance distance got, the air bearing dynamics in the air bearing hole in the air bearing region is adjusted.
13. according to the method described in claim 10, it is characterized in that, the clearance distance that the basis is got, described in adjusting
The air bearing dynamics in the air bearing hole in air bearing region, comprising:
Judge the clearance distance between each air bearing region and the frame whether in prepsetting gap distance range；
Adjust the air bearing dynamics that clearance distance is not at the air bearing hole in the air bearing region in the prepsetting gap distance range.
14. according to the method described in claim 10, it is characterized in that, the clearance distance that the basis is got, described in adjusting
The air bearing dynamics in the air bearing hole in air bearing region, comprising:
Target air bearing region is determined in the multiple air bearing region；
According to the clearance distance between target air bearing region and the frame, adjust in the multiple air bearing region except described
The air bearing dynamics in the air bearing hole in air bearing region except target air bearing region.
15. a kind of computer readable storage medium, when the instruction in the computer readable storage medium is by air bearing control system
Air bearing control assembly when executing so that the air bearing control assembly is able to carry out any air bearing of claim 12 to 14
Control method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811012087.9A CN109158782A (en) | 2018-08-31 | 2018-08-31 | Air bearing control system, system of throwing the net, air bearing control method and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811012087.9A CN109158782A (en) | 2018-08-31 | 2018-08-31 | Air bearing control system, system of throwing the net, air bearing control method and storage medium |
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| CN109158782A true CN109158782A (en) | 2019-01-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811012087.9A Pending CN109158782A (en) | 2018-08-31 | 2018-08-31 | Air bearing control system, system of throwing the net, air bearing control method and storage medium |
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| CN (1) | CN109158782A (en) |
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| WO2022000890A1 (en) * | 2020-06-28 | 2022-01-06 | 武汉华星光电半导体显示技术有限公司 | Screen tensioning stage |
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