CN109148364A - A kind of manufacture craft of high resolution matrix screen - Google Patents
A kind of manufacture craft of high resolution matrix screen Download PDFInfo
- Publication number
- CN109148364A CN109148364A CN201810995430.XA CN201810995430A CN109148364A CN 109148364 A CN109148364 A CN 109148364A CN 201810995430 A CN201810995430 A CN 201810995430A CN 109148364 A CN109148364 A CN 109148364A
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- Prior art keywords
- display material
- flexible
- material area
- flexible substrate
- layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
Abstract
The manufacture craft of high resolution matrix screen of the invention, comprising: 1) chooses substrate；2) coats display material；3) is cut by laser.Also can be used: a) chooses substrate；B) resist coating；C) exposure-processed；D) development treatment；E) prepares display layer；F) removes extra display material area, to form flexible matrix screen.Manufacture craft of the invention, laser cutting parameter can be used to cut the flexible display material layer of coating on flexible substrates, also photoetching process can be used and prepare effective display material area (i.e. pixel) that size is met the requirements on flexible substrates, then extra display material area is being removed using laser cutting, dry etching or grinding method, to form high-resolution flexible matrix screen, solves the technical issues of prior art can not prepare high-resolution flexible display screen, beneficial effect is significant, is suitable for the application of popularization.
Description
Technical field
The present invention relates to a kind of manufacture crafts of matrix panel, more specifically, more particularly to a kind of high resolution matrix screen
Manufacture craft.
Background technique
Flexible display screen has good bending property, has broad application prospects in fields such as wearable devices,
Flexible display screen uses flexible display material, and flexible display material develops the color under the action of extra electric field, and extra electric field moves back
It can keep developing the color after going, only can just fade after application reversed electric field, this makes its power consumption extremely low.Existing flexible display screen is basic
All using printing or spraying process production, according to requiring to make text to display, figure etc. on flexible substrates, after energization
The display of i.e. controllable text or graphical information.In order to realize the display to variable characters or graphical information, this just needs flexibility
Display screen resolution ratio with higher, however by printing or spraying process is limited, it is difficult the dimensioned of pixel extremely
Grade is hereinafter, this is just that the production of high-resolution flexible display screen brings challenge, a kind of target effective processing not yet
The method of high-resolution (size of such as pixel is 0.1mm × 0.1mm) flexible display screen.
Summary of the invention
The present invention in order to overcome the shortcomings of the above technical problems, provides a kind of manufacture craft of high resolution matrix screen.
The manufacture craft of high resolution matrix screen of the invention, which is characterized in that realized by following steps:
1) chooses substrate, chooses suitable flexible substrate, then that the surface clean of flexible substrate is clean and dry up；2) is coated
Display material coats display material on the surface of flexible substrate, to form display material layer flexible；3) is cut by laser, and is used
Display material layer is cut into the pixel according to matrix arrangement by laser cutting parameter, to form high-resolution flexible matrix screen.
The manufacture craft of high resolution matrix screen of the invention, which is characterized in that realized by following steps:
A) chooses substrate, chooses suitable flexible substrate, then that the surface clean of flexible substrate is clean and dry up；B) applies light
Photoresist coats a layer photoresist on the surface of flexible substrate setting display material, forms photoresist layer；C) exposure-processed, according to
The pixel size of the flexible matrix of being made screen is exposed processing to the photoresist layer in flexible substrate；D) at development
Photoresist layer after exposure is carried out development treatment, to remove the exposure position of photoresist layer, the photoresist layer shape that do not remove by reason
At divider wall, the fill area for accommodating display material is formed between divider wall；E) prepares display layer, in the flexibility that step d) is obtained
Display material layer is prepared on substrate, display material layer is by effective display material area in fill area and on divider wall
Extra display material district's groups at；F) removes extra display material area, will be more using laser cutting, dry etching or grinding method
Remaining display material area removal, to form pixel mutually disjunct flexible matrix screen.
The manufacture craft of high resolution matrix screen of the invention, dry etching described in step f) by following steps come
It realizes: preparing layer protecting film in the upper surface in effective display material area and extra display material area first, to avoid dry method quarter
It, then will be more on divider wall using the dry etch process of such as ion beam to the destruction in effective display material area during erosion
Remaining display material area removal, that is, form pixel mutually disjunct high-resolution flexible matrix screen；
Grinding method described in step f) are as follows: first with abrasive sheet to the upper surface of the intermediary device obtained in step e) into
Row grinding, grinding thickness be subject to the extra display material area only removed on divider wall, without to effective display material area destroy,
Form pixel mutually disjunct high-resolution flexible matrix screen.
The beneficial effects of the present invention are: the manufacture craft of high resolution matrix screen of the invention, can be used laser cutting work
Skill cuts the flexible display material layer of coating on flexible substrates, forming smaller size (such as 0.1mm × 0.1mm)
Mutual disjunct pixel, also can be used photoetching process and prepares effective display material area that size is met the requirements on flexible substrates
(i.e. pixel) is then being removed extra display material area using laser cutting, dry etching or grinding method, to form height
Resolution ratio flexible matrix screen, solves the technical issues of prior art can not prepare high-resolution flexible display screen, beneficial effect
Significantly, it is suitable for the application of popularization.
Detailed description of the invention
Fig. 1 is the schematic diagram for preparing high-resolution flexible matrix screen in the present invention using laser cutting parameter；
Fig. 2 is the schematic diagram for preparing high-resolution flexible matrix screen in the present invention using photoetching process.
In figure: 1 flexible substrate, 2 display material layers, 3 pixels, 4 photoresist layers, 5 fill areas, 6 divider walls, 7 is effectively aobvious
Show material sections, 8 extra display material areas, 9 protective films, 10 abrasive sheets.
Specific embodiment
The invention will be further described with embodiment with reference to the accompanying drawing.
As shown in Figure 1, giving in the present invention using the signal of laser cutting parameter preparation high-resolution flexible matrix screen
Figure, is realized by following steps:
1) chooses substrate, chooses suitable flexible substrate 1, then that the surface clean of flexible substrate is clean and dry up；
Under normal conditions, flexible substrate 1 selects transparent conductive film, and a surface of transparent conductive film is conductive.
2) coats display material, display material is coated on the surface of flexible substrate 1, to form display material layer flexible
2；
In the step, display material layer is prepared on the surface of the conductive energy of flexible substrate 1；
3) is cut by laser, and display material layer 2 is cut into the pixel 3 according to matrix arrangement using laser cutting parameter, with shape
At high-resolution flexible matrix screen.
Although laser cutting parameter can obtain high-resolution flexible matrix screen, but if control is bad, laser cutting is very
It is easy that flexible substrate 1 is caused to damage.
As shown in Fig. 2, the schematic diagram for preparing high-resolution flexible matrix screen in the present invention using photoetching process is given,
It is implemented by the following steps:
A) chooses substrate, chooses suitable flexible substrate 1, then that the surface clean of flexible substrate 1 is clean and dry up；
Similarly, it is generally the case that flexible substrate 1 selects transparent conductive film, and a surface of transparent conductive film is conductive.
B) resist coating coats a layer photoresist on the surface that display material is arranged in flexible substrate 1, forms photoresist layer
4；
In the step, photoresist is coated on the conductive surface of flexible substrate 1.
C) exposure-processed, according to the pixel size of the flexible matrix of being made screen, to the photoresist layer in flexible substrate
4 are exposed processing；
Photoresist layer 4 after exposure is carried out development treatment, to remove the exposure position of photoresist layer 4, not by d) development treatment
The photoresist layer 4 removed forms divider wall 6, forms the fill area 5 for accommodating display material between divider wall；
E) prepares display layer, display material layer is prepared in the flexible substrate that step d) is obtained, display material layer is by being located at filling
Effective display material area 7 in area and extra display material area 8 composition on divider wall；
F) removes extra display material area, is gone to extra display material area using laser cutting, dry etching or grinding method
It removes, to form pixel mutually disjunct flexible matrix screen.
As shown in Figure 2,1. label indicates the step of laser cutting method removes extra display material area, is cut by laser work
If skill control is bad, it is easy that flexible substrate 1 is caused to damage.2. label indicates to use dry etching by extra display material area
The step of removal, the step are realized by the following method: first in effective display material area 7 and extra display material area 8
Upper surface prepares layer protecting film 9, to avoid the destruction during dry etching to effective display material area 8, then using all
If the dry etch process of ion beam removes the extra display material area 8 on divider wall, that is, forms pixel and be mutually not attached to
High-resolution flexible matrix screen,
3. label is indicated is removed extra display material area using grinding method, uses following steps to realize: first with
Abrasive sheet grinds the upper surface of the intermediary device obtained in step e), and grinding thickness is extra on divider wall only to remove
Display material area 8, without to effective display material area 7 destroy subject to, that is, foring pixel, mutually disjunct high-resolution is soft
Property matrix panel.
Claims (3)
1. a kind of manufacture craft of high resolution matrix screen, which is characterized in that realized by following steps:
1) chooses substrate, chooses suitable flexible substrate (1), then that the surface clean of flexible substrate is clean and dry up；
2) coats display material, display material is coated on the surface of flexible substrate, to form display material layer flexible (2)；
3) is cut by laser, and display material layer is cut into the pixel (3) according to matrix arrangement using laser cutting parameter, with
Form high-resolution flexible matrix screen.
2. a kind of manufacture craft of high resolution matrix screen, which is characterized in that realized by following steps:
A) chooses substrate, chooses suitable flexible substrate (1), then that the surface clean of flexible substrate is clean and dry up；
B) resist coating coats a layer photoresist on the surface of flexible substrate setting display material, is formed photoresist layer (4)；
C) exposure-processed carries out the photoresist layer in flexible substrate according to the pixel size of the flexible matrix of being made screen
Exposure-processed；
Photoresist layer after exposure is carried out development treatment and is not gone with removing the exposure position of photoresist layer by d) development treatment
The photoresist layer fallen forms divider wall (6), and the fill area (5) for accommodating display material is formed between divider wall；
E) prepares display layer, display material layer is prepared in the flexible substrate that step d) is obtained, display material layer is by being located at filling
Effective display material area (7) in area and extra display material area (8) composition on divider wall；
F) removes extra display material area, is gone to extra display material area using laser cutting, dry etching or grinding method
It removes, to form pixel mutually disjunct flexible matrix screen.
3. the manufacture craft of high resolution matrix screen according to claim 2, it is characterised in that: done described in step f)
Method is etching through following steps to realize: preparing a floor in the upper surface in effective display material area and extra display material area first
Then protective film (9) uses the dry method of such as ion beam to avoid the destruction during dry etching to effective display material area
Etching technics removes the extra display material area on divider wall, that is, forms pixel mutually disjunct high-resolution flexibility square
Battle array screen；
Grinding method described in step f) are as follows: first with abrasive sheet to the upper surface of the intermediary device obtained in step e) into
Row grinding, grinding thickness be subject to the extra display material area only removed on divider wall, without to effective display material area destroy,
Form pixel mutually disjunct high-resolution flexible matrix screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810995430.XA CN109148364A (en) | 2018-08-29 | 2018-08-29 | A kind of manufacture craft of high resolution matrix screen |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810995430.XA CN109148364A (en) | 2018-08-29 | 2018-08-29 | A kind of manufacture craft of high resolution matrix screen |
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| CN109148364A true CN109148364A (en) | 2019-01-04 |
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| CN101393891A (en) * | 2008-10-10 | 2009-03-25 | 中国科学院微电子研究所 | Fabrication method for surface silver electrode of silicon based organic light emitting micro display device |
| CN102169959A (en) * | 2010-01-11 | 2011-08-31 | 三星移动显示器株式会社 | Method of manufacturing high resolution organic thin film pattern |
| CN103000817A (en) * | 2012-11-29 | 2013-03-27 | 无锡格菲电子薄膜科技有限公司 | Flexible organic light emitting diode |
| CN104752365A (en) * | 2013-12-27 | 2015-07-01 | 昆山国显光电有限公司 | Flexible display and manufacturing method thereof |
| CN108258135A (en) * | 2016-12-29 | 2018-07-06 | 乐金显示有限公司 | Use the lighting apparatus and its manufacturing method of organic luminescent device |
| CN107240599A (en) * | 2017-06-23 | 2017-10-10 | 京东方科技集团股份有限公司 | Display device, OLED display panel and its manufacture method |
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Application publication date: 20190104 |