CN109143594A - A kind of line laser energy homogenising system of aberration control - Google Patents
A kind of line laser energy homogenising system of aberration control Download PDFInfo
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- CN109143594A CN109143594A CN201811088378.6A CN201811088378A CN109143594A CN 109143594 A CN109143594 A CN 109143594A CN 201811088378 A CN201811088378 A CN 201811088378A CN 109143594 A CN109143594 A CN 109143594A
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- cylindrical mirror
- line laser
- aberration control
- laser
- holding tank
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
The present invention relates to laser measuring technique field, the line laser energy homogenising system of a kind of aberration control provided, comprising: shell is frame structure;The holding tank, cavity and groove communicated is successively offered in shell;Line laser mechanism, is set in holding tank, is used for emission measurement line laser;First cylindrical mirror, is set in holding tank, for generating linear light line;Second cylindrical mirror, is arranged in the groove, for adjusting ray density distribution;Second cylindrical mirror is abutted with the inner wall of groove;Wherein, the dot laser that dot laser mechanism launches sequentially passes through the first cylindrical mirror and the second cylindrical mirror.Ray density distribution is adjusted by the lens combination of the first cylindrical mirror and the second cylindrical mirror, eliminates the shadow testing mistake during laser measurement.
Description
Technical field
The present invention relates to the line laser energy homogenising systems that laser measuring technique field more particularly to a kind of aberration control.
Background technique
The development need of industrial automation is equipped with various sensing devices, and laser is widely used because of its excellent optical property
It is tested in non-contact sensor.By the structure light for generate after integer by laser, wider laser measurement can be applied to
Field.
Line laser is a kind of structure light that laser generates, and is applied to the measuring device of various straight line positioning.Line at present
Laser forming method is divided into two kinds, and one kind is to be extended to line laser by monolithic cylindrical mirror after laser is collimated or focused,
Line laser Energy distribution is Gaussian Profile, another is extended to line by Bao Weier prism after collimating or focus for laser
Laser.However, line laser is as active light source, since testee can have difference in height larger in actual measurement process
Profile, the excessive light of tilt angle can be by contoured barrier, and cause to measure light cannot be completely covered the profile of testee,
And then measurement result is made shade mistake occur, to influence the normal measurement of line laser.
Therefore, it is urgently to be resolved for how passing through the dispersion angle for reducing line laser to eliminate the shade mistake in measurement process
The technical issues of.
Summary of the invention
The technical problem to be solved in the present invention is that by the dispersion angle of reduction line laser to eliminate in measurement process
Shade mistake.
For this purpose, according in a first aspect, the embodiment of the invention discloses a kind of aberration control line laser energy homogenising system,
Include: shell, is frame structure;The holding tank, cavity and groove communicated is successively offered in shell;Line laser mechanism,
It is set in holding tank, is used for emission measurement line laser;First cylindrical mirror, is set in holding tank, for generating linear light line;The
Two cylindrical mirrors, are arranged in the groove, for adjusting ray density distribution;Second cylindrical mirror is abutted with the inner wall of groove;Wherein, line
The line laser that laser light mechanism is launched sequentially passes through the first cylindrical mirror and the second cylindrical mirror.
The present invention is further arranged to: line laser mechanism includes: semiconductor laser, is set to holding tank one end, is used for
Emit line laser;Spherical lens is set in holding tank, is converged for light;The outgoing transparent surface of spherical lens is spherical surface.
The present invention is further arranged to: line laser mechanism further include: sleeve is set in holding tank, is hollow pipe knot
Structure, for accommodating semiconductor laser, spherical lens and the first cylindrical mirror;In one end inner wall of sleeve opposing cavities offers
Screw thread.
The present invention is further arranged to: line laser mechanism further include: every cylinder, be located at spherical lens and the first cylindrical mirror it
Between, it is tubular structure;It is gradually reduced along opposite spherical lens one end to the internal diameter far from spherical lens one end every cylinder.
The present invention is further arranged to: axially successively offering the first mounting groove communicated and the second peace in sleeve along it
Tankage, semiconductor laser, spherical lens are sequentially arranged in the second mounting groove every cylinder and the first cylindrical mirror.
The present invention is further arranged to: offer the slot communicated with the first mounting groove in sleeve, semiconductor laser with
Slot is mating, by encapsulating to fix semiconductor laser.
The present invention is further arranged to: locking assembly is equipped in sleeve, for preventing the first cylindrical mirror along the second mounting groove
Lateral direction sliding.
The present invention is further arranged to: locking assembly includes: retainer, offers external screw thread on the side wall of retainer, retainer with
Bush whorl connection.
The present invention is further arranged to: the outgoing transparent surface of the second cylindrical mirror is pillar face, and incident transparent surface is plane.
The present invention is further arranged to: the incident transparent surface of the second cylindrical mirror is pillar face, and outgoing transparent surface is plane.
The invention has the following advantages: the laser beam for measuring testee is generated by semiconductor laser,
Light sequentially passes through spherical lens, the first cylindrical mirror and the second cylindrical mirror, passes through the first cylindrical mirror and the second cylindrical mirror
Lens combination adjusts ray density distribution, increases the two sides ray density of optical axis, and the Gaussian Energy of semiconductor laser is close
Degree distribution is converted to flat-head type Energy distribution, reaches energy and homogenizes, and eliminates the shadow testing mistake during laser measurement.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the overall structure signal of the line laser energy homogenising system for the aberration control that the embodiment of the present invention one provides
Figure;
Fig. 2 is the perspective view of the explosion of the line laser energy homogenising system for the aberration control that the embodiment of the present invention one provides;
Fig. 3 is the tube-in-tube structure section view of the line laser energy homogenising system for the aberration control that the embodiment of the present invention one provides
Figure;
Fig. 4 is the perspective view of the explosion of the line laser energy homogenising system of aberration control provided by Embodiment 2 of the present invention;
Fig. 5 is the laser optical path figure of the line laser energy homogenising system for the aberration control that the embodiment of the present invention one provides;
Fig. 6 is the laser optical path figure of the line laser energy homogenising system of aberration control provided by Embodiment 2 of the present invention;
Fig. 7 is the illuminating effect comparison diagram of Bao Weier prism of the present invention and cylindrical mirror;
Fig. 8 is the curve of light distribution figure of Bao Weier prism of the present invention and cylindrical mirror.
Appended drawing reference: 1, shell;11, cavity;12, holding tank;13, groove;2, line laser mechanism;21, semiconductor laser
Device;22, sleeve;221, the first mounting groove;222, the second mounting groove;223, slot;23, spherical lens;24, every cylinder;25, first
Cylindrical mirror;26, retainer;3, the second cylindrical mirror.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can
To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also indirectly connected through an intermediary, it can be with
It is the connection inside two elements, can be wireless connection, be also possible to wired connection.For those of ordinary skill in the art
For, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
As long as in addition, the non-structure each other of technical characteristic involved in invention described below different embodiments
It can be combined with each other at conflict.
Embodiment one
A kind of line laser energy homogenising system of aberration control, as shown in Figure 1, including shell 1, sharp for emission measurement line
The line laser mechanism 2 of light, the first cylindrical mirror 25, the second cylindrical mirror 3 and locking assembly.
As depicted in figs. 1 and 2, shell 1 is square structure;One end end face perforation of shell 1 offers cavity 11, one end
Opening, other end closing;Perforation offers holding tank 12 on the side side wall of shell 1, and holding tank 12 is communicated with cavity 11, accommodates
The rounded setting in the section of slot 12;Shell 1 offers the groove communicated with cavity 11 far from the side side wall perforation of holding tank 12
13, the rectangular in cross-section setting of groove 13.
As shown in Figures 2 and 3, line laser mechanism 2 includes the sleeve 22 being set in holding tank 12, and sleeve 22 is hollow pipe
Structure, sleeve 22 offer internal screw thread close to one end inner wall of cavity 11;Sleeve 22 on one end end face of cavity 11 far from penetrating through
The first mounting groove 221 is offered, other end perforation offers the second mounting groove 222 communicated with the first mounting groove 221, the first peace
The rounded setting in section of tankage 221 and the second mounting groove 222, and the internal diameter of the first mounting groove 221 is less than the second mounting groove
222 internal diameter;Sleeve 22 offers slot 223 far from one end end face of cavity 11, and grafting is combined with for emitting in slot 223
The semiconductor laser 21 of laser, by encapsulating to fix semiconductor laser 21.
As shown in Figures 2 and 3, spherical lens 23 and the first column are sequentially installed in the second mounting groove 222 of sleeve 22
Face mirror 25, spherical lens 23 are abutted with the inner wall of the second mounting groove 222;The inner wall of first cylindrical mirror 25 and the second mounting groove 222
It abuts, the outgoing transparent surface of the first cylindrical mirror 25 is pillar face, and incident transparent surface is plane;Second cylinder is installed in groove 13
The both ends end face of mirror 3, the second cylindrical mirror 3 is abutted with the side wall of groove 13;Wherein, semiconductor laser 21, spherical lens 23,
The center of one cylindrical mirror 25 and the second cylindrical mirror 3 is all located on conplane same straight line.
It should be noted that semiconductor laser 21, spherical lens 23, the first cylindrical mirror 25 and the second cylindrical mirror 3
Center line is all located on conplane same straight line, and semiconductor laser 21 generates the laser beam for measuring testee,
Light sequentially passes through spherical lens 23, the first cylindrical mirror 25 and the second cylindrical mirror 3, light after the refraction of the second cylindrical mirror 3,
Ray density distribution is gradually increased from centre to two sides ray density, is distributed phase with the Gaussian energy density of semiconductor laser 21
The energy density realization of complementation, line laser is uniformly distributed, and eliminates the shadow testing mistake during laser measurement.
As shown in Fig. 2, be provided in the second mounting groove 222 between spherical lens 23 and the first cylindrical mirror 25 every cylinder
24, it is tubular structure, gradually subtracts every internal diameter of the cylinder 24 from close to 23 one end of spherical lens to far from 23 one end of spherical lens
It is small, it is abutted every one end of cylinder 24 with the plane of the first cylindrical mirror 25.
It should be noted that by installing in the second mounting groove 222 of sleeve 22 every cylinder 24, by spherical lens 23 and the
One cylindrical mirror 25 separates, and realizes that the distance between spherical lens 23 and the first cylindrical mirror 25 are adjustable, facilitates and adjust laser optical path
Light distribution.
As shown in Fig. 2, locking assembly includes retainer 26, the side wall of retainer 26 is equipped with external screw thread, retainer 26 and sleeve 22
It is threadedly coupled.
It should be noted that retainer 26 is threadedly coupled fixation with sleeve 22, retainer 26 plays position limitation protection, prevents spherical surface
Lens 23 and the first cylindrical mirror 25 are damaged because skidding off out of second mounting groove 222.
As shown in Fig. 2, the both ends of the second cylindrical mirror 3 are abutted with the side wall of groove 13, the outgoing transparent surface of the second cylindrical mirror 3
For pillar face, incident transparent surface is plane.
It should be noted that the second cylindrical mirror 3 is plugged and fixed in the groove 13 of shell 1, the plane of the second cylindrical mirror 3 with
The cavity 11 of shell 1 is opposite, and after the refraction of the second cylindrical mirror 3, ray density is distributed from centre to two sides ray density light
It gradually increases, mutually complementary with the distribution of the Gaussian energy density of semiconductor laser 21, the energy density of line laser, which is realized, uniformly divides
Cloth eliminates the shadow testing mistake during laser measurement.
Working principle: for length 15~20mm line laser, as shown in figure 5, in the slow axis of semiconductor laser 21
On direction, semiconductor laser 21 emits beam, and the light after spherical lens 23 converges P in the plane, the light in section
Spot profile is still Gaussian Profile, and line width size is between more than ten microns to tens microns;In the fast axle of semiconductor laser 21
On direction, the emergent ray of spherical lens 23 is after the first cylindrical mirror 25, due to the curvature of the convex cylinder of the first cylindrical mirror 25
Greatly, great spherical aberration can be generated;Light makes the central ray ratio close to optical axis far from light after the refraction of the second cylindrical mirror 3
The two sides light of axis is more sparse, and the light intensity among screen is caused to reduce, and then improves the ray density of central axis two sides, thus
Enhance the brightness of screen sides;Ray density distribution is adjusted by the second cylindrical mirror 3, the Gauss energy with semiconductor laser 21
Metric density distribution carries out complementation, and the energy realization of line laser is uniformly distributed, and eliminates the shadow testing mistake during laser measurement
Accidentally.Fig. 7 is the illuminating effect comparison diagram of Bao Weier prism of the present invention and cylindrical mirror, and Fig. 8 is Bao Weier prism of the present invention and cylinder
The curve of light distribution figure of mirror.
Embodiment two
As shown in figure 4, a kind of line laser energy homogenising system of aberration control provided in this embodiment, in embodiment one
On the basis of, the both ends of the second cylindrical mirror 3 are abutted with the side wall of groove 13, and the incident transparent surface of the second cylindrical mirror 3 is pillar face, out
Penetrating transparent surface is plane.
It should be noted that the second cylindrical mirror 3 is plugged and fixed in the groove 13 of shell 1, the pillar face of the second cylindrical mirror 3
It is opposite with the cavity 11 of shell 1, in semiconductor laser 21, spherical lens 23, the first cylindrical mirror 25 and the second cylindrical mirror 3
The heart is all located on conplane same straight line, and semiconductor laser 21 generates the laser beam for measuring testee, light
Spherical lens 23, the first cylindrical mirror 25 and the second cylindrical mirror 3 are sequentially passed through, light is after the refraction of the second cylindrical mirror 3, light
Density Distribution is gradually increased from centre to two sides ray density, and the Gaussian energy density distribution with semiconductor laser 21 is realized mutual
It mends, the energy density realization of line laser is uniformly distributed, and eliminates the shadow testing mistake during laser measurement.
Working principle: for length in the line laser for being greater than 20mm, as shown in fig. 6, in the slow axis of semiconductor laser 21
On direction, semiconductor laser 21 emits beam to be converged in P plane by spherical lens 23, and the line width size of Gaussian Profile exists
Tens microns between several hundred microns.In the fast axis direction of semiconductor laser 21,23 emergent ray of spherical lens passes through first
After cylindrical mirror 25, great spherical aberration can be generated, the dispersion of rays of different angle is met on optical axis;Light passes through the second cylindrical mirror 3
Refraction after, gradually increased from centre to two sides ray density, ray density distribution adjusted by the second cylindrical mirror 3, and is partly led
The Gaussian energy density distribution of body laser 21 carries out complementation, and the energy realization of line laser is uniformly distributed.Fig. 7 is Bao Wei of the present invention
The illuminating effect comparison diagram of your prism and cylindrical mirror, Fig. 8 is the curve of light distribution figure of Bao Weier prism of the present invention and cylindrical mirror.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (10)
1. a kind of line laser energy homogenising system of aberration control characterized by comprising
Shell (1), is frame structure;Successively offer in the shell (1) holding tank (12) communicated, cavity (11) and
Groove (13);
Line laser mechanism (2) is set in the holding tank (12), is used for emission measurement line laser;
First cylindrical mirror (25) is set in the holding tank (12), for generating linear light line;
Second cylindrical mirror (3) is set in the groove (13), for adjusting ray density distribution;Second cylindrical mirror (3)
It is abutted with the inner wall of the groove (13);
Wherein, the dot laser that the line laser mechanism (2) is launched sequentially passes through first cylindrical mirror (25) and described
Two cylindrical mirrors (3).
2. the line laser energy homogenising system of aberration control according to claim 1, which is characterized in that the line laser machine
Structure (2) includes:
Semiconductor laser (21) is set to the holding tank (12) one end, for emitting line laser;
Spherical lens (23) is set in the holding tank (12), is converged for light;The outgoing of the spherical lens (23) is saturating
Smooth surface is spherical surface.
3. the line laser energy homogenising system of aberration control according to claim 2, which is characterized in that the line laser machine
Structure (2) further include:
Sleeve (22) is set in the holding tank (12), is tubular structure, for accommodating the semiconductor laser
(21), the spherical lens (23) and first cylindrical mirror (25);The one of the relatively described cavity (11) of the sleeve (22)
End inner wall offers internal screw thread.
4. the line laser energy homogenising system of aberration control according to claim 3, which is characterized in that the line laser machine
Structure (2) further include:
It is tubular structure between the spherical lens (23) and first cylindrical mirror (25) every cylinder (24);It is described
It is gradually reduced along relatively described spherical lens (23) one end to the internal diameter far from the spherical lens (23) one end every cylinder (24).
5. the line laser energy homogenising system of aberration control according to claim 3, which is characterized in that the sleeve (22)
It is interior axially successively to offer the first mounting groove (221) and the second mounting groove (222) communicated, the semiconductor laser along it
(21), the spherical lens (23), described every cylinder and first cylindrical mirror (25) is sequentially arranged at second mounting groove
(222) in.
6. the line laser energy homogenising system of aberration control according to claim 1, which is characterized in that the sleeve (22)
Inside offer the slot (223) communicated with first mounting groove (221), the semiconductor laser (21) and the slot
(223) mating, by encapsulating with the fixation semiconductor laser (21).
7. the line laser energy homogenising system of aberration control according to claim 3, which is characterized in that the sleeve (22)
It is interior to be equipped with locking assembly, for preventing first cylindrical mirror (25) from sliding along the lateral direction of second mounting groove (222).
8. the line laser energy homogenising system of aberration control according to claim 7, which is characterized in that the locking assembly
Include:
Retainer (26) offers external screw thread, the retainer (26) and the sleeve (22) screw thread on the side wall of the retainer (26)
Connection.
9. the line laser energy homogenising system of aberration control according to claim 1-8, which is characterized in that described
The outgoing transparent surface of second cylindrical mirror (3) is pillar face, and incident transparent surface is plane.
10. the line laser energy homogenising system of aberration control according to claim 1-8, which is characterized in that institute
The incident transparent surface for stating the second cylindrical mirror (3) is pillar face, and outgoing transparent surface is plane.
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CN201811088378.6A CN109143594A (en) | 2018-09-18 | 2018-09-18 | A kind of line laser energy homogenising system of aberration control |
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Cited By (3)
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CN110045505A (en) * | 2019-03-28 | 2019-07-23 | 哈尔滨市科佳通用机电股份有限公司 | A kind of method and system of splicing thread laser light source intensity |
WO2020239129A1 (en) * | 2019-05-30 | 2020-12-03 | 西安精英光电技术有限公司 | Combined lens-based line laser homogenization generation apparatus |
CN112097745A (en) * | 2020-09-22 | 2020-12-18 | 中国科学院长春光学精密机械与物理研究所 | Line structured light quality improvement method of vision measurement system |
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Application publication date: 20190104 |