CN109143562A - A kind of variable mating plate lighting system based on zoom principle - Google Patents
A kind of variable mating plate lighting system based on zoom principle Download PDFInfo
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- CN109143562A CN109143562A CN201811059962.9A CN201811059962A CN109143562A CN 109143562 A CN109143562 A CN 109143562A CN 201811059962 A CN201811059962 A CN 201811059962A CN 109143562 A CN109143562 A CN 109143562A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
Abstract
The invention belongs to micro-imaging technique fields, and in particular to a kind of variable mating plate lighting system based on zoom principle；The light issued from laser light source is collimated light beam by beam-expanding system outgoing；Collimated light beam passes through cylindrical lens, has the direction of focal power to be converged at it, line focus light beam is compressed at cylindrical lens back focal plane, and in the direction of no focal power still exiting parallel；The mating plate of different-thickness and different length is obtained near its image space back focal plane by the variation of the focal length of zoom illumination objective lens again；The consecutive variations for realizing mating plate thickness and length are suitable for the observation of different size samples, simplify operation sequence, reduce use cost；System overall length is fixed；System overall length is shorter；Avoid the technical effect of higher laser energy damage eyeglass.
Description
Technical field
The invention belongs to micro-imaging technique fields, and in particular to a kind of variable mating plate illumination system based on zoom principle
System.
Background technique
Mating plate illumination microscope is a kind of novel optical microscopy.It is different from traditional fluorescence microscope, mating plate illumination
Microscopical illumination path is mutually perpendicular to fluorescence detection optical path.Illuminating bundle forms thick in a certain range by cylindrical lens
Very thin, well-proportioned sheet beam is spent, and detects optical path and carries out detection imaging, excitation beam in the direction vertical with illumination path
It is limited near detection object lens focal plane.The phototoxicity that mating plate illuminates microscope imaging is weak, and image taking speed is fast, is adapted for living body
Tissue three-dimensional imaging and long-time real time imagery, the real-time dynamic of available cell and subcellsular level.Therefore, mating plate illuminates
Microscope has very important meaning for life science.
The microscopical layer of mating plate illumination is cut ability and is mainly determined by mating plate thickness, and its visual field is exactly the length of entire mating plate
Degree.The 3D figure of mating plate shows such as attached drawing 1, and thickness W is defined as laser by after illumination objective lens, YZ plane gauss light beam waist position
Full width at half maximum (FWHM), visual field L is defined as twice Rayleigh distance (also known as mating plate length), clear aperture h is defined as mating plate height
Degree.Observe various sizes of sample, it is desirable that mating plate thickness and length it is also different.Existing most of mating plate microscope
Mating plate thickness and length be determining, so aobvious to just need replacing different types of mating plate to different size sample views
Micro mirror, this greatly limits mating plates to illuminate microscopical use scope.Since the shape of mating plate and the focal length of illumination objective lens have
It closes, this patent proposes that a kind of design of zoom illumination objective lens to obtain the new method of the mating plate of thickness and length consecutive variations, makes
Obtain the observation accomplished in a mating plate lighting system to size samples different in a certain range.
2011G.Ritter et al.[1]Devise a full cylindrical lens without burnt zoom beam-expanding system, expand ratio
It is 6.3, and is applied in mating plate illumination microscope, realizes the observation to different size samples.Since whole system is
Full cylindrical lens, processing and adjustment are all especially difficult, and manufacture and assembly cost are very high；Secondly it is realized in beam-expanding system part
No burnt zoom expands, different from method proposed by the present invention.
[1]G,Ritter,Jan-Hendrik,Spille,Tim,Kaminski,and,Ulrich,
Kubitscheck*.A cylindrical zoom lens unit for adjustable optical sectioning
in light sheet microscopy[J].OSA,2010,2(138857):185-193。
Kind celebrating of soup in 2009 et al. designs a kind of new pattern laser transmitting antenna[2], the antenna pass through four constituent element mechanical compensations become
Focus objective lens realize the consecutive variations of Laser emission light beam aperture.The system other than laser light source and fixed-focus collimating mirror, remaining
Part is an inverted Kepler telescope.The system is primarily upon beam size and energy, and varifocus objective for communicating
The use of system is in order to which the size for guaranteeing the hot spot on terrestrial receiving antenna when satellite is in multiple orbital attitudes is constant.These with
The present invention proposes that the purpose of use of varifocus objective is different, and the composition of optical system and property are also different, Bu Nengying
For in mating plate fluorescent illumination microscope.
[2] Tang Shanqing, a kind of design and research [J] popular science and technology of old new pattern laser transmitting antenna of name pine, 2009
(3), 27-29.
Summary of the invention
The variable mating plate lighting system based on zoom principle that the object of the present invention is to provide a kind of is being changed without mating plate illumination
In the case where system, the observation to the biological sample within the scope of certain size is realized.
To achieve the above object of the invention, the technical scheme is that
A kind of variable mating plate lighting system based on zoom principle to image side successively includes arranging along optical axis by object side
: laser light source, beam-expanding system, cylindrical lens, zoom illumination objective lens, wherein the beam-expanding system is to expand expanding for ratio surely to be
System, the zoom illumination objective lens are three constituent element mechanical compensation zoom illumination objective lens, and the three constituent element mechanical compensation zooms shine
Bright object lens fixed group, zoom group and compensation group before being followed successively by from object side to image side, the focal length of the preceding fixed group is positive, zoom
The focal length of group is negative, the focal length of compensation group is positive；The light issued from the laser light source is emitted by the beam-expanding system
For collimated light beam；The collimated light beam passes through the cylindrical lens, has the direction of focal power to be converged at it, after cylindrical lens
Line focus light beam is compressed at focal plane, and in the direction of no focal power still exiting parallel；Again by the zoom lighting
The variation of the focal length of mirror obtains the mating plate of different-thickness and different length near its image space back focal plane.The technical solution is realized
: the consecutive variations of mating plate thickness and length are suitable for the observation of different size samples, simplify operation sequence, reducing makes
Use cost；System overall length is fixed；System overall length is shorter；Avoid the technical effect of higher laser energy damage eyeglass.
Inversion galilean telescope system can be used in above-mentioned beam-expanding system.Optical path can be reduced using galilean telescope system is inverted
Length.
Focal power is different in two orthogonal sections of above-mentioned cylindrical lens, without focal power, Gauss in one of plane
Light beam waist radius after cylindrical lens have the section of focal power is compressed, and is girdled the waist after cylindrical lens are without the section of focal power
Radius is constant, so that the symmetrical light beam of circle becomes line focus light beam originally, forms piece light.
Three constituent element mechanical compensation zoom illumination objective lens can be used in above-mentioned zoom illumination objective lens.In zooming procedure, focal length is continuous
Variation, is effectively guaranteed the generation of the mating plate of thickness consecutive variations, and mating plate thickness W and focal length are proportional relation (variable mating plates
Thickness ratio is equal to zoom ratio).It can according to need the mating plate by zoom selection suitable thickness in observation sample processes.
Above-mentioned three constituent elements mechanical compensation zoom illumination objective lens fix group without after, and structure is simple, compact, convenient for design, overall length
It is shorter.
Above-mentioned three constituent elements mechanical compensation zoom illumination objective lens realize the overall length of entire lighting system not with zoom lighting
The focal length variations of mirror and the technical effect changed.Such lighting system overall length is fixed, and can simplify the Machine Design of system, simultaneously
Convenient for users to the observation to sample.
Above-mentioned three constituent elements mechanical compensation zoom illumination objective lens realize in zooming procedure mating plate beam waist position not with zoom
The variation of the focal length of illumination objective lens and the technical effect changed do not need mobile sample, in zooming procedure convenient for users to right
The observation of sample.
Above-mentioned three constituent elements mechanical compensation zoom illumination objective lens can be replaced four constituent element mechanical compensation zoom illumination objective lens, from object
Group fixed group, zoom group, compensation group and is fixed before being followed successively by side to image side afterwards, and focal length is followed successively by " positive and negative, just, just ".This sets
Set, realize: system overall length is fixed；Avoid the technical effect of higher laser energy damage eyeglass；Be conducive to system aberration school
Just with the optimization of mating plate illumination uniformity.The setting of fixed group makes the optimization of irradiance uniformity reach optimum state afterwards, may be used also
With play the role of adjustment system back work distance from and optical tube length.
It is preferred: above-mentioned beam-expanding system, system stop be located at beam-expanding system before group, this setting can make stop position and
Size is fixed, and the difficulty of Machine Design is greatly reduced, and keeps system total light energy constant.
To sum up, the sequence passed through in the technical program by light, the light respectively issued from laser light source, beam waist position
The object space or image space focal plane organized before beam-expanding system and near, realize expanding for outgoing laser beams by beam-expanding system, then
A kind of light is formed by cylindrical lens, is formed by the continuous change that piece light realizes mating plate thickness and length by zoom illumination objective lens
Change.
Detailed description of the invention
Fig. 1: mating plate lighting system is formed by mating plate 3D figure；
Fig. 2: three constituent element mating plates illuminate microscopical lighting system schematic diagram；
YZ optical planar circuit schematic diagram (be free of light source) of Fig. 3: three component systems in short focus；
XZ optical planar circuit schematic diagram (be free of light source) of Fig. 4: three component systems in short focus；
YZ optical planar circuit schematic diagram (be free of light source) of Fig. 5: three component systems when middle burnt；
XZ optical planar circuit schematic diagram (be free of light source) of Fig. 6: three component systems when middle burnt；
YZ optical planar circuit schematic diagram (be free of light source) of Fig. 7: three component systems in focal length；
XZ optical planar circuit schematic diagram (be free of light source) of Fig. 8: three component systems in focal length；
Point range figure of Fig. 9: three component systems in short focus；
Point range figure of Figure 10: three component systems when middle burnt；
Point range figure of Figure 11: three component systems in focal length；
Physical optics of Figure 12: three component systems in short focus propagates figure；
Physical optics of Figure 13: three component systems when middle burnt propagates figure；
Physical optics of Figure 14: three component systems in focal length propagates figure；
Figure 15: four constituent element mating plates illuminate microscopical lighting system schematic diagram；
YZ optical planar circuit schematic diagram (be free of light source) of Figure 16: four component systems in short focus；
XZ optical planar circuit schematic diagram (be free of light source) of Figure 17: four component systems in short focus；
YZ optical planar circuit schematic diagram (be free of light source) of Figure 18: four component systems when middle burnt；
XZ optical planar circuit schematic diagram (be free of light source) of Figure 19: four component systems when middle burnt；
YZ optical planar circuit schematic diagram (be free of light source) of Figure 20: four component systems in focal length；
XZ optical planar circuit schematic diagram (be free of light source) of Figure 21: four component systems in focal length；
Point range figure of Figure 22: four component systems in short focus；
Point range figure of Figure 23: four component systems when middle burnt；
Point range figure of Figure 24: four component systems in focal length；
Physical optics of Figure 25: four component systems in short focus propagates figure；
Physical optics of Figure 26: four component systems when middle burnt propagates figure；
Physical optics of Figure 27: four component systems in focal length propagates figure；
Wherein:
1 is laser light source；
2 be beam-expanding system；
2-1 is group before beam-expanding system；
2-2 is group after beam-expanding system；
3 be cylindrical lens；
4 be zoom illumination objective lens；
4-1 be zoom illumination objective lens before fix group；
4-2 is zoom illumination objective lens zoom group；
4-3 is zoom illumination objective lens compensation group；
4-4 be zoom illumination objective lens after fix group；
Specific embodiment
The invention will be further described with reference to the accompanying drawings and embodiments:
Embodiment one:
A kind of variable mating plate lighting system schematic diagram based on zoom principle, as shown in Fig. 2, successively being wrapped by object side to image side
Include along optical axis arrangement: laser light source 1, beam-expanding system 2, cylindrical lens 3, zoom illumination objective lens 4 are intended in zoom illumination objective lens
Image space fixes the variable mating plate that 0.8~4.0 μ m thick (full width at half maximum) is realized in position, and corresponding mating plate waist radius is 0.48
~2.40 μm.Laser source wavelength λ=the 532nm, waist radius 0.5mm.Beam-expanding system is using inversion Galileo or falls
Keplerian telescope system is set, the present embodiment can reduce length using galilean telescope system is inverted；It expands than size M according to need
It is expanded with the ratio between the focal length for organizing 2-1 before beam-expanding system, the present embodiment than being set to 10 it was determined that being equal to group 2-2 after beam-expanding system
Times.System stop organizes 2-1 before being located at beam-expanding system, and stop position and size are fixed, and greatly reduces the difficulty of Machine Design,
And keep system total light energy constant.Cylindrical lens have the sagittal surface focal length of focal power to can refer to its clear aperture, according to being conducive to
The requirement of aberration correction is determined with suitable F number (such as >=3).Three constituent elements of zoom illumination objective lens proposed adoption fixed group before having
Mechanical compensation variable focal length optical system；The zoom ratio of zoom illumination objective lens and variable mating plate thickness are than consistent.Three constituent elements
Varifocal illumination objective lens fix group 4-1, zoom group 4-2, compensation group 4-3 before being followed successively by from object to image side, " just, focal length is followed successively by
It is negative, positive ", group is fixed without after, structure is simple, compact, and convenient for design, overall length is shorter.Generate the original of variable thickness and length mating plate
Manage as follows: the light issued from the laser light source is collimated light beam by the light that beam-expanding system is emitted；Collimated light beam is saturating by column
Mirror has the direction of focal power to be converged, line focus light beam is compressed at cylindrical lens back focal plane at it, and in the side of no focal power
To still exiting parallel；Different-thickness and difference are obtained near its image space back focal plane by the variation of illumination objective lens focal length below again
The mating plate of length.Focal length consecutive variations in a certain range, are effectively guaranteed the generation of the mating plate of thickness consecutive variations, are seeing
Examine the mating plate that can according to need in sample processes through zoom selection suitable thickness.
Laser gaussian beam image transformational relation with a tight waist is as follows in system: firstly, the with a tight waist of the laser light source can position
It on object space or the image space focal plane for organizing 2-1 before beam-expanding system, may be alternatively located near them, but not be located at any lens surface,
Avoid higher laser energy damage eyeglass；When the stringent object space focal plane for organizing 2-1 before beam-expanding system with a tight waist of laser light source,
By beam-expanding system on its image space focal plane with a tight waist for also strictly organizing 2-2 after beam-expanding system, and work as the position with a tight waist of laser light source
It when remaining position, is changed greatly by the image space beam waist position of beam-expanding system, but image space waist radius is constant, is equal to initial bundle
Waist radius, which is multiplied by expand, compares M.Waist radius is 5mm after beam-expanding system in the present embodiment.It is expanded secondly, cylindrical lens are located at
After system near group, cylindrical lens should be adapted to fit and adjusted apart from size, it also should be compact as far as possible to reduce system length.By column
After lens have the section (XZ plane) of focal power, girdles the waist and be located on cylindrical lens image space focal plane, also be located at zoom illumination objective lens object space
A suitable position (such as at a distance from varifocus objective first >=6mm), and waist radius can then become smaller, the present embodiment
Middle waist radius is compressed to micron order；And waist radius is constant behind section (YZ plane) of the cylindrical lens without focal power.Most
Afterwards, compressed with a tight waist after three-component zooming illumination objective lens in terms of XZ plane, emergent light less parallel light beam；It is flat from YZ
Face sees, is emitted as the Gaussian beam for very little of girdling the waist, and image space is with a tight waist to be located at the fixed position in zoom illumination objective lens compensation group rear one,
I.e. near the back focal plane of objective system, this position is remained unchanged in zooming procedure, and system overall length is fixed, in zooming procedure not
Mobile sample is needed, convenient for users to the observation to sample.
Shown in laser gaussian beam expression formula such as formula (1) with a tight waist:
ω0'=λ f '/π M ω0 (1)
Wherein λ is laser source wavelength, ω0For laser light source waist radius, f ' is the focal length of zoom illumination objective lens, and M is
Beam-expanding system expands ratio, ω0' for mating plate waist radius after zoom illumination objective lens.Mating plate thickness is defined as YZ plane
The full width at half maximum (FWHM) at mating plate place with a tight waist, mating plate waist radius ω0Shown in ' the relation formula (2) with mating plate thickness (FWHM):
FWHM≈1.66ω0′ (2)
The zoom ratio of zoom illumination objective lens is 5, and focal length is 14.19~70.93mm, by the mating plate beam of zoom illumination objective lens
Waist radius is 0.48~2.40 μm, and corresponding mating plate is with a thickness of 0.8~4 μm；It is the length of mating plate with the perpendicular direction in this section
Direction is spent, length value L is equal to twice of Rayleigh distance, and size is 2.73~68.16 μm.Focal length is in 14.19~70.93mm range
The setting of interior consecutive variations is effectively guaranteed the mating plate changed in 0.8~4 μ m of thickness.
Variable mating plate lighting system based on the above principles lists the short focus of attached drawing 3- Fig. 8, middle burnt and focal length optical path is illustrated
Figure, the focal length of corresponding zoom illumination objective lens is respectively 14.19~42.56~70.93mm, and corresponding mating plate thickness is respectively
0.8~2.4~4 μm, the point range figure difference of the lighting system is as Figure 9-Figure 11, and physical optics propagates figure respectively such as Figure 12-
Shown in Figure 14.
Embodiment two:
A kind of variable mating plate lighting system schematic diagram based on zoom principle is successively wrapped if Figure 15 shows by object side to image side
Include along optical axis arrangement: laser light source 1, beam-expanding system 2, cylindrical lens 3, zoom illumination objective lens 4 are intended in zoom illumination objective lens
Image space fixes the variable mating plate that 0.8~4.0 μ m thick (full width at half maximum) is realized in position, and corresponding mating plate waist radius is 0.48
~2.40 μm.Laser source wavelength λ=the 532nm, waist radius 0.5mm.Beam-expanding system is using inversion Galileo or falls
Keplerian telescope system is set, the present embodiment can reduce length using galilean telescope system is inverted；It expands than size M according to need
It was determined that organizing the ratio between the focal length of 2-2 and preceding group of 2-1 after being equal to beam-expanding system, the present embodiment is expanded than being set to 10 times.System light
Door screen organizes 2-1 before being located at beam-expanding system, and stop position and size are fixed, and greatly reduce the difficulty of Machine Design, and make system
Total light energy is constant.Cylindrical lens have the sagittal surface focal length of focal power to can refer to its clear aperture, according to being conducive to aberration correction
Requirement determined with suitable F number (such as >=3).Zoom illumination objective lens proposed adoption has four constituent element machinery of the fixed group in front and back to mend
Repay variable focal length optical system；The zoom ratio of zoom illumination objective lens and variable mating plate thickness are than consistent.Four component zoomings away from
Illumination objective lens fixed group 4-1, zoom group 4-2, compensation group 4-3 before being followed successively by from object to image side, rear fixed group 4-4, focal length is successively
For " positive and negative, just, just ".Four component zoomings are conducive to the optimization of system aberration correction and mating plate illumination uniformity away from objective system.
The setting of fixed group makes irradiance uniformity optimization reach optimum state afterwards, can also play adjustment system back work distance from and light
Learn the effect of tube length.The principle for generating variable thickness and length mating plate is as follows: the light issued from the laser light source is by expanding
The light of system exit is collimated light beam；Collimated light beam passes through cylindrical lens, has the direction of focal power to be converged at it, after cylindrical lens
Line focus light beam is compressed at focal plane, and in the direction of no focal power still exiting parallel；Again by the coke of zoom illumination objective lens below
Away from variation obtain the mating plate of different-thickness and different length near its image space back focal plane.Focal length continuously becomes in a certain range
Change, be effectively guaranteed the generation of the mating plate of thickness consecutive variations, can according to need in observation sample processes and pass through zoom
Select the mating plate of suitable thickness.
Laser gaussian beam image transformational relation with a tight waist is as follows in system: firstly, the with a tight waist of the laser light source can position
It in the object space or image space focal plane organized before beam-expanding system, may be alternatively located near them, but not be located at any lens surface, avoid
Higher laser energy damages eyeglass；When the stringent object space focal plane for organizing 2-1 before beam-expanding system with a tight waist of laser light source, pass through
On its image space focal plane with a tight waist for also strictly organizing 2-2 after beam-expanding system of beam-expanding system, and when the with a tight waist of laser light source is located at it
It when remaining position, is changed greatly by the image space beam waist position of beam-expanding system, but image space waist radius is constant, is equal to initial with a tight waist half
Diameter, which is multiplied by expand, compares M.Waist radius is 5mm after beam-expanding system in the present embodiment.Secondly, cylindrical lens are located at beam-expanding system
Afterwards near group, cylindrical lens should be adapted to fit and adjusted apart from size, it also should be compact as far as possible to reduce system length.By cylindrical lens
There is the section (XZ plane) of focal power to girdle the waist afterwards to be located on cylindrical lens image space focal plane, also is located at one of zoom illumination objective lens object space
Suitable distance (such as at a distance from varifocus objective first >=6mm), and waist radius can then become smaller, and girdle the waist in the present embodiment
Radius is compressed to micron order；And waist radius is constant behind section (YZ plane) of the cylindrical lens without focal power.Finally, from XZ
Plane sees that compressed with a tight waist after four component zooming illumination objective lens, emergent light approximation regards collimated light beam as；From YZ plane
It sees, is emitted as the Gaussian beam for very little of girdling the waist, image space is with a tight waist to be located at the fixed position in zoom illumination objective lens compensation group rear one, i.e.,
Near the back focal plane of objective system, this position is remained unchanged in zooming procedure, and system overall length is fixed, and is not required in zooming procedure
Sample is moved, convenient for users to the observation to sample.The zoom ratio of zoom illumination objective lens be 5, focal length be 14.19~
70.93mm, image space waist radius be 0.48~2.40 μm, then mating plate with a thickness of 0.8~4 μm；The perpendicular side with this section
To the length direction for mating plate, size is 2.73~68.16 μm.
Variable mating plate lighting system based on the above principles lists the short focus of attached drawing 16- Figure 21, middle burnt and focal length optical path is shown
It is intended to, the focal length of corresponding zoom illumination objective lens is respectively 14.19~42.56~70.93mm, and corresponding mating plate thickness is respectively
0.8~2.4~4 μm, for the point range figure of the lighting system respectively as shown in Figure 22-Figure 24, physical optics propagates figure respectively such as Figure 25-
Shown in Figure 27.
From the point of view of design result, which realizes mating plate size in the case where no addition complicated zoom system, pancreatic system
Consecutive variations, reduce material and processing cost.Actual optical system except using in addition to common spherical mirror, can according to aberration and
What mating plate uniformity optimized needs to be suitably added aspherical.
The technical program unspecified part belongs to technology well known to those skilled in the art.
Claims (4)
1. a kind of variable mating plate lighting system based on zoom principle, successively includes arranging along optical axis by object side to image side:
Laser light source, beam-expanding system, cylindrical lens, zoom illumination objective lens, wherein the beam-expanding system is the beam-expanding system for expanding ratio surely,
The zoom illumination objective lens are three constituent element mechanical compensation zoom illumination objective lens, the three constituent element mechanical compensation zoom lighting
Mirror fixed group, zoom group and compensation group before being followed successively by from object side to image side, the focal length of the preceding fixed group is positive, zoom group
Focal length is negative, the focal length of compensation group is positive；The light issued from the laser light source passes through subject to the beam-expanding system outgoing
Collimated optical beam；The collimated light beam passes through the cylindrical lens, has the direction of focal power to be converged at it, in cylindrical lens back focal plane
Place is compressed into line focus light beam, and in the direction of no focal power still exiting parallel；Again by the zoom illumination objective lens
The variation of focal length obtains the mating plate of different-thickness and different length near its image space back focal plane.
2. the variable mating plate lighting system according to claim 1 based on zoom principle, it is characterised in that: above-mentioned expand be
System is using inversion galilean telescope system.
3. the variable mating plate lighting system according to claim 1 based on zoom principle, it is characterised in that: Gaussian Beam
Crossing cylindrical lens has waist radius behind the section of focal power to be compressed, and waist radius is not after cylindrical lens are without the section of focal power
Become, so that the symmetrical light beam of circle becomes line focus light beam originally, forms piece light.
4. the variable mating plate lighting system described in one of -3 based on zoom principle according to claim 1, wherein three constituent element
Mechanical compensation zoom illumination objective lens replace with four constituent element mechanical compensation zoom illumination objective lens, and preceding fixation is followed successively by from object side to image side
Group, zoom group, compensation group and group is fixed afterwards, focal length is followed successively by positive and negative, just, just.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112162395A (en) * | 2020-10-27 | 2021-01-01 | 江苏三米科思半导体设备有限公司 | Deep ultraviolet oblique incidence high-resolution dark field illumination optical system |
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