CN109141276A - A kind of double optics frequency comb line spectrum coded imaging method - Google Patents
A kind of double optics frequency comb line spectrum coded imaging method Download PDFInfo
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- CN109141276A CN109141276A CN201810735054.0A CN201810735054A CN109141276A CN 109141276 A CN109141276 A CN 109141276A CN 201810735054 A CN201810735054 A CN 201810735054A CN 109141276 A CN109141276 A CN 109141276A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Abstract
The invention discloses a kind of double optics frequency comb line spectrum coded imaging method, the optical frequency com that this method will use two repetition rates to lock, output is respectively signal light and local oscillator light；Signal light is divided into detection light and reference light；Detection light focuses on sample to be tested surface by optical spectrum encoded device, encodes and carries out double optics frequency comb difference interference with local oscillator light after sample to be tested；Reference light is directly interfered with local oscillator light.Two-way interference pulse signal photodetector is converted to digital signal through signal acquisition.Detection shake is compensated using optical reference, obtains the sample absolute distance of high-precision, high stability, linear reflective rate and phase information.Linear movement sample, it is continuous to measure, realize high accuracy three-dimensional feature image, two-dimentional albedo image.A series of advantages such as double optics frequency comb line spectrum coded imaging structure is simple, and measuring speed is fast, and precision is high, contains much information, and expansion is strong.
Description
Technical field
The invention belongs to ultrafast optical techniques fields, and in particular to a kind of double optics frequency comb line spectrum is encoded into image space
Method.
Background technique
Into the eighties, the appearance of non-optical class Scanning Probe Microscopy especially atomic force microscope can be by imaging
Resolution ratio is advanced to the precision of nanometer scale, and different types of microscopic structure emerges one after another, but these microtechnics or wears
Saturating depth very little, or the information of body surface can only be provided, and there is system structure complexity, image checking to varying degrees
The problems such as environmental requirement is harsh.Measurement while being difficult to realize multi-signal at the same time.The refreshing of conventional optical microscope simultaneously
Speed is directly limited by the frame number of the photoelectric devices such as CCD, CMOS, it is difficult to realize that high speed measures.These limitations are all that tradition is micro-
Mirror tradition is difficult to the shortcomings that overcoming.
Another aspect ultrafast laser technique, especially optical frequency com are developed rapidly in recent years.Laser this with good
The tool of good coherence, directionality and energy density apply to optical microscopy imaging, can provide for living body biological sample important
Optical information (such as polarization state, refractive index, spectrum), and carry out non-invasi biological living detection.Its peak value function simultaneously
Rate, the femtosecond pulse of low average power.There are many nonlinear effect that can be used for optical imagery, such as: two-photon absorption, secondary
Harmonic wave (SHG), triple-frequency harmonics (THG), coherent anti-stokes raman scattering (CARS), Kerr effect etc..But traditional swash
Photoimaging systems are mostly spot measurement while completing the multi-dimensional scanning to sample to be tested by moving component, it is difficult to realize that image is fast
The rapidly extracting of speed measurement and much information.
Summary of the invention
A kind of double optics frequency comb linear light that the purpose of the present invention is provide for the deficiency in existing imaging technique
Spectral encoding imaging method, this method can obtain feature image, albedo image and the absolute distance of sample to be tested simultaneously.
Realizing the specific technical solution of the object of the invention is:
A kind of double optics frequency comb line spectrum coded imaging method, this method comprising the following specific steps
Step 1: the locking of optical frequency com repetition rate
The laser pulse of two optical frequency coms extracts the electric signal of repetition rate through photodetector, with standard radio frequency
Reference signal is mixed, and the phase error signal of repetition rate shake is obtained after low-pass filtering, is fed back by servo feedback circuit control
Element locks repetition rate；After locking, the repetition rate of two optical frequency coms is respectively frAnd fr+△fr；
Step 2: image spectrum coding
The light that two optical frequency coms issue is respectively signal light and reference light；Signal light is divided into detection through polarization beam apparatus
Light and reference light, reference light directly carry out double optics frequency comb difference interference with local oscillator light and generate with reference to interference pulse signal；It visits
It surveys light and injects optical spectrum encoded imager, through dispersion original part, spectral component is focused on by imaging lens group to test sample in space development
Product surface；After sample to be tested encodes；Reflected light backtracking again passes by optical spectrum encoded imager；Spectral component space
It is overlapped, double optics frequency comb difference interference is finally carried out with local oscillator light and generates detection interference pulse signal；
Step 3: image decoding and reconstruction
Pass through photodiode, low-pass filtering, radio frequency respectively with reference to interference pulse signal and detection interference pulse signal to put
Greatly, after data acquisition, then spectral information restored by Fast Fourier Transform (FFT)；The frequency spectrum caused by wave envelope phase drift moves
It is dynamic, detectable signal is compensated from reference signal frequency spectrum amount of movement is extracted with cross correlation algorithm；The height of sample one dimensional image is realized in decoding
Resolution reconstruction, phase extraction and absolute distance measurement；One-dimensional linear displacement platform mobile example, scanning obtain the three-dimensional of sample
Feature image and two-dimentional albedo image.
The double optics frequency comb difference interference refers to that the repetition rate of two optical frequency coms is respectively frAnd fr+△
fr, repetition rate difference Δ fr；Two optical frequency coms are interfered in space coincidence, are generated with repetition rate difference Δ frFor refreshing frequency
Interference pulse；The frequency spectrum and spectrum of interference pulse correspond, conversion coefficient
The light source of the optical frequency com uses passive mode-locking mode, is non-linear rotatory polarization mode locking, saturable absorption
Mirror mode locking, kerr lens mode locking or carbon nanotube mode locking.
The spectrum of two optical frequency coms possesses identical central wavelength, and can be with operation wavelength ultraviolet, visible
Light, near-infrared or middle infrared band.
The feedback element of two optical frequency coms is that piezoelectric ceramics is adjusted, electro-optic crystal is adjusted, acousto-optic crsytal tune
Section locking or pumping current.
The optical spectrum encoded imager is made of dispersion original part and imaging lens group, detects the spectrum of light by dispersion member
Part has different dispersion angles in space development, different spectral components, poly- in sample to be tested surface by lens group spectral component
Burnt in alignment, Same Wavelength focuses on the same point in space；Spectral component and spatial position form mapping relations；By to
Sample, spectrum are encoded by sample to be tested.
The dispersion element is but is not limited to transmission grating, reflecting grating and prism.
The absolute distance measurement is calculated by reference to the delay of interference pulse and detection interference pulse and is obtained, specific to calculate
Method is but is not limited to time flight method and phase difference method.
The data acquisition, sample rate need to be greater than the repetition rate f of optical frequency comr。
The invention has the advantages that
Using double optics frequency comb measuring technique and optical spectrum encoded technology, sample to be tested is realized based on single photodiode
One-dimensional reflectivity, depth information and rapidly extracting while absolute distance.Measuring device is simple, abundant information, high-precision, speed
Degree is fast.
The refresh rate of one dimensional image is determined by repetition rate difference Δ f, refresh rate is improved by changing Δ f, by passing
The Hz magnitude of system is increased to kHz magnitude.Using the Superhigh repetition rate optical frequency com of GHz magnitude, MHz magnitude can be obtained
Refresh rate realizes the precise measurement of High-speed transient process；
Without motion mechanical part in optical path, is greatly improved stability and the service life of optical path, the favorable repeatability of measurement,
System installation and deployment are convenient in little interference by environment；
Reference light is introduced, two optical frequency com carrier envelope phases drift bring errors are eliminated on radio frequency.With reference to
Signal and detectable signal compare the reflectivity for directly obtaining each point, eliminate spectrum each point intensity different the problem of bringing.Drop
Requirement of the low measurement process to light comb light source coherence simplifies locking system；
Double optics frequency comb difference interference technology can obtain the reflectivity intensity and phase information of sample to be tested simultaneously, no
It needs to add other optical elements, changes optical path, this is the ability that conventional light microscope does not have；Simultaneously light comb frequency at
Divide and reaches 106Magnitude is laid a good foundation for super-resolution imaging；
For the frequency interval of optical frequency com generally in several hundred MHz to GHz, pulse width has peak value in femtosecond magnitude
The characteristics of power and low average power, can reduce to greatest extent generated while laser injures biological cell it is different non-
Linear effect possesses broad application prospect in non-linear biological spectrum imaging field；
It will be transformed into radio frequency band under optical frequency information using double optical frequency comb difference interference technologies, detect simple and precision
Height, the three-dimensional information of one-dimensional scanning measurement, is effectively reduced scanning dimension, improves image taking speed；
Light source is based on optical frequency com, with the advantage that wide spectrum is imaged simultaneously, while having the ability of spectral measurement；
Expansibility is strong, service band no requirement (NR) of the present invention to light source, can be extended to can according to application field is not had to
See, infrared, ultraviolet and middle infrared band.
Detailed description of the invention
Fig. 1 is to implement system block diagram of the invention；
Fig. 2 is 1 flow chart of the embodiment of the present invention；
Fig. 3 is 2 flow chart of the embodiment of the present invention；
Fig. 4 is 3 flow chart of the embodiment of the present invention.
Specific embodiment
Feature of the invention and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing, with
Convenient for the understanding of technical staff of the same trade:
Refering to fig. 1, implementing system of the invention includes double optics frequency comb module 100, spectral module 400, reference arm
200, optical spectrum encoded device 300, conjunction beam module 500, signal detection module 600 and digital sampling and processing 700.
Solid line represents optical path in each figure of the present invention, and dotted line represents circuit.
Embodiment 1
Referring to Fig.2, the repetition rate of signal optical source optical frequency com 101, local oscillator light source optical frequency comb 102 simultaneously with it is outer
Boundary's atomic clock 103 locks；The signal light that optical frequency com 101 generates divides by polarization beam apparatus 401 for reference light and detection light；
Reference light passes through quarter-wave plate 201, reflecting mirror 201, quarter-wave plate 201 is again passed by, through polarization beam apparatus 401
With detection combiner.It detects light and enters optical spectrum encoded imager by quarter-wave plate 301.Optical spectrum encoded imager is by transmiting
Grating 302 and microcobjective 303 form.Spectrum is transmitted 302 space development of grating, is focused on by microcobjective 303 to be measured
Sample 304.Reflected light comprising sample to be tested information is reverses through optical spectrum encoded imager；The spectrum of space development weighs again
It closes, again passes by quarter-wave plate 301 by the reflection of polarization beam apparatus 401 again and with reference to combiner.Signal light and local oscillator light
Beam is closed by a semi-transparent semi-reflecting lens 502, rotation half wave plate 501 controls local oscillator light in the light splitting of polarization beam apparatus 601
Than.Light, local oscillator light and reference light, local oscillator light are detected by 601 points by polarization beam apparatus.It is focused respectively by lens 602,603 again
In photodetector 604,605, difference interference generates the detectable signal and reference signal of the lower radio frequency converted.Two paths of signals difference
Data collecting card 701 is accessed after low-pass filtered device 606,607, amplifier 608,609, computer 702 carries out data processing.It sweeps
It retouches sample and realizes high-precision three-dimensional surface topography, two-dimentional albedo image and absolute distance measurement.
Pulse laser of two optical frequency coms 101 and 102 of the present embodiment to be pumped by semiconductor laser LD occurs
Source, the feedback element that laser resonator domestic demand has adjustable chamber long.Two optical frequency com light sources 101,102 export laser
Central wavelength be decided by the intracavitary gain media of laser resonance, it is suitable to be selected according to sample to be tested basic optical response characteristic
Seed source.
For the requirement for meeting the imaging of system double optics frequency comb coherent optics, two optical frequency coms 101,102 need to be made defeated
The repetition rate signal of pulse has difference out, and the difference is generally in Hz to kHz magnitude.
The frequency acquisition of data collecting card 701 is greater than the repetition rate f of optical frequency com 101,102r, and use atomic clock
103 are used as External Reference.
The carrier envelope phase of two optical frequency coms does not have fully locked, therefore the difference interference of two optical frequency coms
Signal can generate shake and drift in frequency domain.It adjusts reference arm and feeler arm is isometric, then reference arm is with measurement than carrier envelope phase
The drift of position is fully synchronized.Using cross correlation algorithm, reference arm RF shift amount is calculated, the drift of measurement arm can be obtained
Amount eliminates carrier envelope phase drift bring shake, correcting image distortion.It is obtained after the time domain interval conversion of signal to be measured
The absolute distance of sample.Signal spectrum intensity and reference spectrum are divided by, and can obtain the surface reflection pattern of sample to be tested.With reference to
The spectral phase of signal and detectable signal subtracts each other rear differential, calculates the surface topography of sample to be tested.
Embodiment 2
Refering to Fig. 3, signal optical source optical frequency com 101, local oscillator light source optical frequency comb 102 repetition rate simultaneously with it is outer
Boundary's atomic clock 103 locks；The signal light that optical frequency com 101 generates divides by polarization beam apparatus 401 for reference light and detection light；
Reference light passes through quarter-wave plate 201, reflecting mirror 201, quarter-wave plate 201 is again passed by, through polarization beam apparatus 401
With detection combiner.It detects light and enters optical spectrum encoded imager by quarter-wave plate 301.Optical spectrum encoded imager is by prism
305 and microcobjective 303 form.Spectrum focuses on sample to be tested 304 by 305 space development of prism, by microcobjective 303.
Pass through conjugate objective 306 and reflecting mirror 307 through the light of sample to be tested.The light of sample to be tested information again pass by it is optical spectrum encoded at
As device；The spectrum of space development is overlapped again, again pass by quarter-wave plate 301 by polarization beam apparatus 401 reflection again and
With reference to combiner.By a conjunction beam of semi-transparent semi-reflecting lens 502, rotation half wave plate 501 controls this for signal light and local oscillator light
Splitting ratio of the vibration light in polarization beam apparatus 601.Light, local oscillator light and reference light, local oscillator are detected by 601 points by polarization beam apparatus
Light.Photodetector 604,605 is focused on by lens 602,603 respectively again, difference interference generates the detection of the lower radio frequency converted
Signal and reference signal.Two paths of signals accesses data collecting card after distinguishing low-pass filtered device 606,607, amplifier 608,609
701, computer 702 carries out the defeated processing of data, calculates albedo image, phase and distance.It scans sample and realizes high-precision three-dimensional
Surface topography, two-dimentional albedo image and absolute distance measurement.
Pulse laser of two optical frequency coms 101 and 102 of the present embodiment to be pumped by semiconductor laser LD occurs
Source, the feedback element that laser resonator domestic demand has adjustable chamber long.Two optical frequency com light sources 101,102 export laser
Central wavelength be decided by the intracavitary gain media of laser resonance, it is suitable to be selected according to sample to be tested basic optical response characteristic
Seed source.
For the requirement for meeting the imaging of system double optics frequency comb coherent optics, two optical frequency coms 101,102 need to be made defeated
The repetition rate signal of pulse has difference out, and the difference is generally in Hz to kHz magnitude.
The frequency acquisition of data collecting card 701 is greater than the repetition rate f of optical frequency com 101,102r, and use atomic clock
103 are used as External Reference.
The carrier envelope phase of two optical frequency coms does not have fully locked, therefore the difference interference of two optical frequency coms
Signal can generate shake and drift in frequency domain.It adjusts reference arm and feeler arm is isometric, then reference arm is with measurement than carrier envelope phase
The drift of position is fully synchronized.Using cross correlation algorithm, reference arm RF shift amount is calculated, the drift of measurement arm can be obtained
Amount eliminates carrier envelope phase drift bring shake, correcting image distortion.It is obtained after the time domain interval conversion of signal to be measured
The absolute distance of sample.Signal spectrum intensity and reference spectrum are divided by, and can obtain the surface reflection pattern of sample to be tested.With reference to
The spectral phase of signal and detectable signal subtracts each other rear differential, calculates the surface topography of sample to be tested.
Embodiment 3
Refering to Fig. 4, signal optical source optical frequency com 101, local oscillator light source optical frequency comb 102 repetition rate simultaneously with it is outer
Boundary's atomic clock 103 locks；The signal light of optical frequency com 101 and the local oscillator light of optical frequency com 102 inject bundling device simultaneously
502.After bundling device 502, be divided into detection light and reference light, two-beam include simultaneously optical frequency com 101 signal light and
The local oscillator light of optical frequency com 102.Reference light is through overcompensated optical fibre, so that the light path of reference light and detection light light path are close to phase
Deng.Reference light is directly entered photodetector 605.Light is detected by fiber loop mirror 308, collimator 309 carries out optical spectrum encoded
Imaging.Optical spectrum encoded imager is made of transmission grating 302 and microcobjective 303, and transmission grating 302 is by spectral component in space
Expansion, focuses on 304 surface of sample to be tested by microcobjective 303.The reflected light of sample to be tested again passes by original optical path, and spectrum is empty
Between be overlapped.Detection light enters collimator 308, by fiber loop mirror 308 to photodetector 604.The heterodyne of double optics frequency comb
Interference signal is converted to electric signal through detection, passes through low-pass filter 606,607 respectively, and amplifier 608,609 is acquired by data
701 acquisition signal of card, the reflected intensity pattern and phase pattern of sample to be tested is rebuild using computer 702, and calculate sample
Surface topography.
Two optical frequency coms 101 and 102 are for by the pulse laser occurring source of diode-end-pumped, laser is humorous
Shake the intracavitary feedback element that need to have adjustable chamber long.The central wavelength that two optical frequency coms 101,102 export laser determines
In the intracavitary gain media of laser resonance, suitable seed source can be selected according to sample to be tested basic optical response characteristic.
For the requirement for meeting the imaging of system double optics frequency comb coherent optics, two optical frequency coms 101,102 need to be made defeated
The repetition rate signal of pulse has small difference out, and the difference is generally in KHz to Hz magnitude.
The frequency acquisition of data collecting card should be greater than the repetition rate of optical frequency com, and use atomic clock as outer ginseng
It examines.
As shown in figure 4, the carrier envelope phase of two optical frequency coms does not have fully locked, therefore two optical frequency coms
Relevant signal can generate drift, each coherent pulse, the position excursion of frequency domain in frequency domain.Adjust reference arm and feeler arm etc.
Long, then reference arm and measurement are more fully synchronized than the drift of carrier envelope phase.Using auto-correlation algorithm, reference arm radio frequency is calculated
Drift value can obtain the drift value of measurement arm, eliminate carrier envelope phase drift bring shake, reconstruction image.Scan sample
Product realize high-precision three-dimensional surface topography and two-dimentional albedo image.
Claims (9)
1. a kind of double optics frequency comb line spectrum coded imaging method, which is characterized in that this method comprising the following specific steps
Step 1: the locking of optical frequency com repetition rate
The laser pulse of two optical frequency coms extracts the electric signal of repetition rate through photodetector, refers to standard radio frequency
Signal mixing, the phase error signal of repetition rate shake is obtained after low-pass filtering, by servo feedback circuit control feedback element,
Lock repetition rate；After locking, the repetition rate of two optical frequency coms is respectively frAnd fr+△fr；
Step 2: image spectrum coding
The light that two optical frequency coms issue is respectively signal light and reference light；Signal light through polarization beam apparatus be divided into detection light and
Reference light, reference light directly carry out double optics frequency comb difference interference with local oscillator light and generate with reference to interference pulse signal；Detect light
Optical spectrum encoded imager is injected, through dispersion original part, spectral component focuses on sample to be tested table in space development, by imaging lens group
Face；After sample to be tested encodes；Reflected light backtracking again passes by optical spectrum encoded imager；Spectral component space coincidence,
Double optics frequency comb difference interference is finally carried out with local oscillator light generates detection interference pulse signal；
Step 3: image decoding and reconstruction
Pass through photodiode, low-pass filtering, radio frequency amplification, number respectively with reference to interference pulse signal and detection interference pulse signal
Spectral information is restored after acquisition, then by Fast Fourier Transform (FFT)；The frequency spectrum caused by wave envelope phase drift is mobile, with mutual
Related algorithm compensates detectable signal from reference signal frequency spectrum amount of movement is extracted；The high-resolution weight of sample one dimensional image is realized in decoding
It builds, phase extraction and absolute distance measurement；One-dimensional linear displacement platform mobile example, scanning obtain the three-dimensional appearance image of sample
With two-dimentional albedo image.
2. the method according to claim 1, wherein the double optics frequency comb difference interference refers to two light
The repetition rate for learning frequency comb is respectively frAnd fr+△fr, repetition rate difference Δ fr；Two optical frequency coms are dry in space coincidence
It relates to, generates with repetition rate difference Δ frFor the interference pulse of refreshing frequency；The frequency spectrum and spectrum of interference pulse correspond, turn
Change coefficient
3. the method according to claim 1, wherein the light source of the optical frequency com uses passive mode-locking side
Formula is non-linear rotatory polarization mode locking, saturable absorbing mirror mode locking, kerr lens mode locking or carbon nanotube mode locking.
4. the method according to claim 1, wherein the spectrum of two optical frequency coms possesses in identical
Cardiac wave is long, and can be with operation wavelength in ultraviolet, visible light, near-infrared or middle infrared band.
5. the method according to claim 1, wherein the feedback element of two optical frequency coms is piezoelectricity
Ceramics are adjusted, electro-optic crystal is adjusted, acousto-optic crsytal adjusts locking or pumping current.
6. the method according to claim 1, wherein the optical spectrum encoded imager is by dispersion original part and imaging
Lens group composition, the spectrum for detecting light pass through dispersion element in space development, and different spectral components have different dispersion angles, warp
It is in alignment in the focusing of sample to be tested surface to cross lens group spectral component, Same Wavelength focuses on the same point in space；Spectrum
Ingredient and spatial position form mapping relations；By sample to be tested, spectrum is encoded by sample to be tested.
7. according to the method described in claim 6, it is characterized in that, the dispersion element is but is not limited to transmission grating,
Reflecting grating and prism.
8. the method according to claim 1, wherein the absolute distance measurement by reference to interference pulse and
The delay of detection interference pulse is calculated and is obtained, and specific algorithm is but is not limited to time flight method and phase difference method.
9. sample rate need to be greater than optics frequency the method according to claim 1, wherein the data acquire
The repetition rate f of rate combr。
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